Advanced Energy Industries RF Power Products RF Series User manual

U S ER
MANUAL
Fort Collins,CO 80525 USA
970.221.4670
[email protected]
1625 Sharp Point Drive
Advanced Energy Industries,Inc.
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@RFPP
RF Pow• r Product a Inc.
RF POWER SUPPLY
OPERATOR'S MANUAL
RF SERIES 10/2S
REVISION 6.00
DOCUMENT NUMBER
21-22303-901
CC> COPYRIGHT 1996 RFPP, INC.
1007 LAUREL OAK ROAD VOORHEES, NEW JERSEY 08043
ALL RJGHTS RESERVED 1996

IIREV
0
A
B
DOCUMENT: RF Power Suppl.y Operator's Manual.
RF SERIES 10/25, REVISION 6.00
DOCUMENT No.: 21-22303-901
ENGINEERING APPROVAL:
CUSTOMER SERVICE APPROVAL:
Mike Kelly
Rene Clement
Monica DeMarco QA APPROVAL:
DATE APPROVAL REVISION DESCRIPTION
9/27/97 Mike Kelly Released per EPR 430.
7/22/97 Mike Kelly Analog pulse mode section
lt/;3j9 "?
<7&f-
changed per ECN 3468.
Word correction, pg 12 per
ECN 3670.
iii
II

TABLE OF CONTENTS
.,
SECTION l GENERAL INFORMATION.................................................................................................................-
1.l INTR.ODUCTION .•• -...............................................................................................................................2
1.2 PURPOSE ................................................................................................................................................2
1.3 RA TED POWER. ..........................................................................................····..·...•....········........·········..·2
1.4
GENERAL DESCRIP1lON ··-······································-·······································································::?
1.5 TiiEFRONTPANEL ..............................................................................................................................3
1.5.l
POWER. .............................................•...•.....................•..........................................................3
1.5.2
RF ON/OFF BUTION ...........................................................................................................3
1.5.3
MULTIFUNCTION BUTIONS ............••..................•..•........•................................................3
1.6
REAR PANEL CONTROLS AND CONNECTIONS.............................................................................3
1.6.1
CIRCUIT BR.EAKER•••....•••..••..••...•..............•••.......••••.....................•.....................................3
1.6.2
AC INPUT..............................................................................................................................3
1.6.3 CEX IN ..........................................................................-•••....•...•..••........•......•.......................3
1.6.4
CEX OUT ••..••.....•••..•.••••••...••.••••••...••...••••....•....•........••.••.................•......................................3
1.6.5 POWER/VOLTAGE* AND RF/DC• INPUTS ......................................................................4
1.6 .6 PRESET INVOKE• ................................................................................................................4
1.6.7
PPO, PPl, AND PP2................................................................................................................4
1.6.8
EXTINLK ............•.....•............................................................................................................4
1.6.9 GA TE......................................................................................................................................4
1.6.10 RAMP ENABLE• .................................................................................................................5
1.6.11
RFON• ...•..............................................•....•..•..••........•.......•...........•..............•.......•.......•.......5
1.6.12
RFENABLED• ....................................•........•...........•..•..•.....•.......................•.......................5
1.6.13
GATE ENABLE• .................................................................................................................5
1.6.14
+15V ......•....................•........................•.....•.......................................................................•..5
1.6.15
-15V ...............................................................................•.............•........................................5
1.6.16 +SV .......................................................................................................................................5
1.6.17
INCMON/MPl ......................................................................................................................7
1.6.l8 REFMON/MP2.....................................................................................................................7
1.6.19
RF PROBE ...........................................•..............•......•...••....................•.•........••..••.........••..•..7
1.6.20
DC PROBE...........................................................................................................................7
1.6.21 AUX PROBE...................................................................•....................................................7
1.6.22
FBL - FEEDBACK LOW ....................................•...................................•........•................... 7.
1.6.23 SETPOINT #1.......................................................................................................................7
1.6.24
SETPOINT #2.......................................................................................................................8
1.6.25
GROUND SENSE ................................................................................................................8
1.6.26 REMOTE LIMIT IN ........................................................•....................................................8
1.6.27 REMOTE LIMIT OUT SHIELD CONNECTION .......................................•.......................8
1.6.28 SHIELD CONNECTION.................................................•.......................••..........................•8
1.7
TECHNICAL SPECIFICATJONS..................................................................................•.....•...............• 11
1.8 STANDARD ACCESSORIES...............................................................................................................14
1.8.1
ACLINECORD .•....................•..........••.........................•••.•............................................•..... 14
1.8.2 PROGRAMMING PLUG .....................................................................................................14
l·:9 ·F kCTORY REP AIR.............................................................................................................................. 14
iv

TABLE OF CONTENTS
SECTION Il INSTALLATION AND OPERATION......••..•..•....•.•.........•...•.......•..•.................•................................ 15
2.1 GENERAL.......................................................................................-•• .•••••••••••••••.•••..•••....•..••................ 15
2.2 UNPACKING ........................................................................................................................................ 15
2.3 INSTALLATION.................................................._.............................................:································· 16
2.3.1 GROUNDING ...................................................................................................................... 16
2.3.l LINE TAPS........................................................................................................................... 16
2.3 .3 WATER COOLED SUPPLIES .......................................................................................... .. 16
2.3.4 TiiERMALCONSIDERATIONS...................................................................................... .. 17
2.3 .S CHECKOUT......................................................................................................................... 19
2.4 OPERATIONAL DESCRIPTION ......................................................................................................... 21
2.4.I PANEL MODE..................................................................................................................... 21
2.4.2 ANALOG MODE................................................................................................................. 23
2.4.3 ANALOG PULSE MODE....................................................................................................26
2.4.4 SERIAL CONl'R.OL..................................................._ .......................................................28
2.4.4.1 232 INTERFACE OPTION.................................................................................28
2.4.4.2 422 INTERFACE OPTION.................................................................................28
2.4.4.3 RFPP MULT-DROP PROTOCOL......................................................................29
2.4.4.4 485-WIRE
AND 485-WIRE OPTIONS•..•••••.••...•..........................•.•.............•.... 31
2.4.4.5 422, 485-2 AND 485-4 BUS TERMINATIONS ...............................................3I
2.5 MULTl-GENERATOR OPERATION....................................................................................36
2.5.l CALIBRATION PROCEDURE FOR DUAL GENERATOR SYSTEM .•..•..•..••..36
2.5.2 CALIBRATION PROCEDURE FOR QUAD GENERA
TOR SYSTEM...•......•.•.37
SECTION III FRON"r PANEL PROGRAMMING ...................................................................................................
41
3 .1 STATUS ENVIRONMENT AND ADJUSTMENT BUTTONS........................................................... 41
3.2 PROGRAMMING ENVIRONMENT AND PROGRAM BUTTON .................................................... 41
3.3 MOVEMENT WITHIN THE PROGRAMMING ENVIRONMENT ...................................................42
3.4 FRONT PANEL PARAMETER PROGRAMMING.............................................................................42
3.5 STATUS ENVIRONMENT MNEMONICS .........................................................................................44
3.5.l CONTROL............................................................................................................................44
3.S.2 OPERATIONAL MODE......................................................•.............•...••......................••.•..44
3.5.3 EXT CEX..............................................................................................................................44
3.5.4 PULSING/RAMPING/PROGRAMMABLE PRESETS ......................................................45
3.6 ALARM AND LIMIT CONDITION MNEMONICS............................................................................45
3.6.l RF OFF ALARM AND LIMIT MNEMONICS ...................................................................45
3.6.1.l COVER INTERLOCK ALARM (4 SPACES)..................................................
.. 45
3.6.l.2 EXTERNAL INTERLOCK ALARM (4 SPACES) ............................................45
3.6.l.3 PA UNBALANCE/FAN/TEMP ALARM (4 SPACES)......................................45
3.6.l.4 HIGH OR LOW LINE VOLTAGE ALARM (12 SPACES)...............................46
3.6.2 RF ON ALARM AND LIMIT MNEMONICS.....................................................................
46
3.6.2.l MAX POWER LIMIT (5 SPACES).................................................................... 46
3.6.2.2 REF LIMIT (6 SPACES)....................................................................................46
3.6.2.3 PA CURRENT LIMIT (4 SPACES) •...•..•...... ....................................................46
3.6.2.4 POWER DISSIPATION/RF OUTPUT ALARM (5 SPACES)........................... 46
V

TABLE OF coNTENTS
3.7 PROG~G ENVIR.ONMENT COLU}dNS ............................................................................... 47
3. 7 .1 ANALOG COLUMN -.........-............................................................................................47
3. 7.2 PRESETS COLUMN............-............................................................................................. 49
3. 7.3 PULSING COLUMN............................................................................................................ 51
3.7.3.l A WORD ON PROGRAMMINGSTARTPULSEPARAMETERS ................. 53
3.7.4 OPERATE COLUMN ..........................................................................................................56
3.7.5 SYSTEM COLUMN.............................................................................................................59
SECTION IV PRESETS............................................................................................................................................
61
4.1 INTRODUCTION .• -.............................................................................................................................6 l
4 .2 PRESET PARAMETERS...................................................................................................................... 61
4 .3 PRESETOPERATION..........................................................................................................................63
4.3.l INDIVIDUAL PRESETS ·-- ..-...................................................................................... 63
4.3.2 SEQUENTIAL PRESETS.................................................................................................... 63
4.3.3 PRESETS AND MULTI-GENERATOR SYSTEMS...........................................................64
4.4 PROGRAMMING PRESETS................................................................................................................65
4.4.1
PANEL PROGRAMMING OF PRESE'TS ..........................................................................65
4.4.2 SERIAL
PROGRAMMING OF PRESE'TS.••.•••........•...•.••••....•.•.......................................... 67
4.5 EXECUTING PRESETS........................................................................................................................67
4.5.I PANEL..................................................................................................................................67
4.5.2 ANALOG.••.•..•••.•...••••....•.•...•....••••........•......•.............•.......•.............................•......•...•....•....67
4.5.3 SERIAL.................................................................................................................................70
4.6 PRESET CLOCK...................................................................................................................................
71
ADDENDUMS
SECTION V SERIAL PROGRAMMING ........................................................................................ CONSULT RFPP
SECTION VI FRONT PANEL SERVICING OF 11IE GENERATOR........•..•................................ CONSULT RFPP
vi

TABLE 1
TABLE2
TABLE3
LIST OF TABLES
ANALOG INTERFACE PIN LIST ..................................................................................................9
TECflNICAL SPECIFICATIONS..................................................................................................
11
RF SERIES 10/25 PROGRAMMING ENVIRONMENT COLUMNS..........................................43
LIST OF FIGURES
FRONT PANEL DIAGRAM ........................................................................................................................................ 1
ANALOG INTERFACE CONNECTOR................•.....................................................................................................6
WATER FITTINGS ILLUSTRATION.......................................................................................................................
18
CI-IECKOUT CONFIGURATION.............................................................................................................................. 20
PANEL OPERATION.................................................................................................................................................22
FULL ANALOG DCV OPERATION CONFIGURATION.......•...............................•....•..........................................24
FULL ANALOG DCV OPERATION WITH MATCHING NETWORK PRESETS.................................................25
ANALOG PULSE MODE .........•...•............................................................................................................................27
DB25/DB9 PINOUTS .................................................................................................................................................30
SERIAL CABLES
232
AND 485 2-WIRE CONTROLLER CONNECTIONS..........................................................•...............32
485 4-WIRE
OR 422 CONNECTIONS...................................................................................•....................33
MULTI-DROP BUS LAYOUT....................................................................................................................34
SINGLE DROP BUS LAYOUT...................................................................................................................35
DUAL GENERATOR CONFIGURATION •...................................•...•.....•......•.....•...................................................38
QUAD GENERATOR CONFIGURATION...............................................................................................................
39
LIMIT POT ADJUSTMENTLOCATION ...................................................................................................•............. 40
PROCESS PULSE/ START PULSE TIMING............................................................................................................54
PRESET TIMING .......................................................................................................................................................62
DUAL GENERATOR PRESET CONNECTION...•...................................................................................................68
FULL ANALOG DCV WITH PRESET CONNECTIONS ........................................................................................69
APPENDIX A..............................................................................................................................................................72
vii

PROGRAM
RF SERIES
6.00
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DOWN
DOWN FAST
I• ADJUSTMENI
I ARROWS
I
LEFT
RIGHT
AR~
RF ON/OFF
FIGURE 1
FRONT PANEL DIAGRAM

SECTIONI
GENERAL INFORMATION
1.1 INTRODUCTION
This volume provides the operating instructions for the RF and HF series generators (also referred to as the
generator, the unit, the equipment, the RF supply
or the supply), manufactured by RFPP Inc., Voorhees, New
Jersey. This volume discusses thepurpose, application and technical characteristics
of the generator.
WARNING:
1.2 PURPOSE
This power supply operates using lethal voltages and is capable of producing hazardous RF
voltages.
DEA m ON CONT ACT may result from failure to observe SAFETY precautions.
When working inside the equipment, make certain the RF
power supply is disabled at the wall
disconnect.
In tpe unlikely event that operation
of the RF power supply is required with access covers
removed, do not allow body contact with any electrical component, tap, terminal
or connection.
Use only heavily insulated tools and test equipment to make measurements and adjustments.
The generator is a unique microprocessor based RF power supply designed to provide the user with a
flexible set of options for control. The supply provides the user with a pure, stable power source from Oto the
generator's rated power.
1.3 RATED POWER
RF5
HF5
RFIO
HFI0
500 Watts
500 Watts
1000 Watts
1000 Watts
1.4 GENERAL DESCRIPTION
RF20
RF20H
RF30
2000 Watts
2000 Watts
3000 Watts
With
RF ON, forward and reflected power are shown on the top line of the Vacuum Fluorescent Display
(VFD). With RF OFF, setpoint and max power are shown on the top line
of the VFD. Additional generator.status.
information is typically displayed on the bottom line
of the VFD. Blinking mnemonics on the bottom line of the
VFD convey limit
or alarm conditions as well as the quality of the match.
The generator is a simple stand alone RF power supply in the PANEL mode. PANEL mode
is front panel
operation. Power level is set via the four adjustment arrow buttons on the front panel. Feedback for the high speed
regulating circuits is supplied by the internal directional coupler (power control) or, for CPU controlled regulation,
the selected feedback terminal (voltage control). For more on panel programming, see Section III in this manual.
The ANALOG control mode allows control
of the generator via external analog and digital control signals.
The-SERIAL control mode is the most
·t1eX:ible mode of control. The unit can be configured to operate in
this mode with a minimum number
of external connections to the system controller. Under SERIAL control the
supply may be configured, power level set and status monitored over a simple serial link.
RF SERIES
6.00
10/25
2

1.5 THE FRONT PANEL
1.5.1 POWER
This is the AC powerswitch for the generator.
1.5.l RF ON/OFF BUTTON
When RF is ON, this button is alwlYJ active and turns RF OFF if momentarily depressed.
When
RF is OFF and front panel RF ON is permitted, this button turns RF ON if momentarily depressed.
1.5.3 MULTIFUNCTION BU'ITONS
. There are 8 additional tactile buttons called
ADJUSTMENT ARROWS on the front panel of the generator.
These multifunction buttons
(4 below the VFD and 4 to the right of the VFD) arc explained in detail in Section III
(PANEL PROGRAMMING) of this manual.
1.6 REAR PANEL CONTROLS AND CONNECTIONS
1.6.1 CIRCUIT BREAKER
The circuit breaker provides ovcrcurrent protection for the power supply. It DOES NOT provide short
circuit protection. An additional breaker with high current interrupt capacity
or a set of fuses should be included in
the system for safety. This breaker is
the AC main disconnect for the generator. To operate the supply, place the
lever
in the up position.
1.6.2 AC INPUT
Attach included line cord to unit.
1.6.3 CEX IN
Common exciter input for applications requiring synchronous operation of RF generators. The source can
be another RF supply or CEX product. Input impedance is SO Ohms and the required level is 7-20 volts P-P at the
operating frequency.
1.6.4 CEXOUT
Common exciter output for applications requiring synchronous operation of RF generators. The signal is
compatible with
CEX input of RF supplies. Output impedance is 50 Ohms and the level is 8 volts P-P at the
operating frequency.
RF SERIES
6.00
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3

NOTE:
The following items all refer to ANALOG interface (38 pin ELCO connector). Refer to Figure 2
and Table
l.
1.6.5 POWERNOLTAGE* AND RF/DC* INPUTS
These inputs arc used to selectthe control modes.
PWRNLT*
H
H
L
L
H
L
H
L
H =+5V or open pin
I.6.6
PRESET INVOKE*
CONTROL SELECTED
Forward Power Control
AUX Voltage Channel
RF Voltage Channel
DC Voltage Channel
L • Ground
or low logic level
In ANALOG operation PRESET INVOKE• is the invoke selected preset function. Pulling this pin from a
high to a low level will enable the preset selected by programming pins PP0, PPl and PP2. Note that a high to low
TRANSITION
is needed to invoke the selected preset. The input is TTLcompatible.
1.6.7 PP0,
PPI and PP2
These pins form a truth table that selects a preset in the following manner ...
PP2
PPI PPO
SELECTS
L L L
Preset# 0
L L H
Preset# I
L H L
Preset# 2
L H H Preset# 3
H L L
Preset# 4
H L H Preset# 5
H H L Preset# 6
H H H Presets Disabled
H =+5V or open pin L =Ground or low logic level
Refer to Section IV and Figure I7.
1.6.8 EXTINLK
External interlock is the system interlock. To enable RF, the EXTINLK pin must be grounded. An open
interlock will result in RF output being disabled.
1.6.9 GATE
In ANALOG operation, apply a pulse train to this terminal to operate the unit as a pulsed RF generator. At
the time
of the transition of the pulse train from low to the high level, the output power will be selected by the
setpoint # 2 level. On the high to low transition, the power will be selected by the setpoint # I level. Refer to
Section 2.4.2. ANALOG OPERATION. The input is TTL compatible.
RF SERIES
6.00
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4

1.6.10 RAMP ENABLE*
In ANALOG operation RAMP ENABLE is the RAMP AT RF ON function. Pulling this pin from a high
to a low level enables ramping. The input is TIL compatible.
1.6.11 RFON*
In ANALOG operation RFON* is the RF ON/OFF function. Pulling this pin from a high to a low level
enables RF. Note that a high
to low transition is REQUIRED to tum RF ON. The input is 1'TL compatible.
1.6.1:Z RFENABLED*
RFENABLED* is a status line indicating that RF is ON, or RF is ON and OK. Alternatively, in the preset
mode the logic
is reversed and it becomes the PRESET ENABLE signal for the PS2A Matching Network
.. Controller. Refer to Section 2.4.2.
NOTE:
This is an open collector output.
1.6.13 GATE ENABLE*
Pulling this pin low enables the ANALOG pulse mode. The input is 1TLcompatible.
1.6.14 +lSV
+15V is a positive 15 volt DC source whose designed purpose is to generate a positive external setpoint
using an external
IOk potentiometer in ANALOG operation. The unit must be programmed for positive polarity.
See POLARITY PROGRAMMING.
+15V has a 470 Ohm output resistance with a maximum allowable current
draw
of 15 mA.
1.6.15 -15V
-1 SV is a negative 15 volt DC source whose designed purpose is to generate a negative external setpoint
using an external 1
Ok potentiometer in ANALOG operation. The unit must be programmed for negative polarity.
See POLARITY PROGRAMMING. -15V has a
470 Ohm output resistance with a maximum allowable current
draw
of 15 mA.
t.6.16 +sv
+5V has a maximum allowable current draw of25 mA.
NOTE: RFPP does not recommend using the +15, -15 and +5 output voltages in new designs.
RF SERIES 5
6.00
10/25

@©@
0000
00000
0000
:6~8
o0o
00 00
0000
00000
0000
@@@
FIGURE· 2
LARGE KEYING
SOCKET
ANALOG INTERFACE CONNECTOR
(VIEW
OF CONNECTOR FROM
REAR OF UNIT)

1.6.17 INCMON/MPI
INCMON is an analog output that has two functions. In the nonnal mode of operation there is a voltage
present
on this terminal that is linearly related to the forward power. Toe voltage is +SV at rated power. Accuracy
is± .5 % full scale± 3% reading; resolution is 1 Watt.
When the Load & Tune function is enabled. the tcnninal is a forward power monitor (above), while RF is
ON, and a preset voltage for the nine capacitor in the AM-SERIES matching network when RF is OFF. Refer to
Figure 7 and Section 2.4.2.
1.6.18 REFMON/MPl
REFMON is an analog output that has two functions. In the normal mode of operation there is a voltage
_,present on this terminal
that is linearly related to the reflected power. The voltage is +5V at 10% of rated power.
Accuracy
is ± .5 o/o full scale :I: 3% reading; resolution is I Watt.
When the
Load & Tune function is enabled. the terminal is a reflected power monitor (above), while RF is
ON. and a preset voltage for the load capacitor in the AM-SERIES matching network when RF is OFF. Refer to
Figure 7 and Section 2.4.2.
1.6.19 RFPROBE
The feedback necessary for RF voltage control is applied to this terminal. The input is differential with an
impedance
of 47k Ohms. Sec Section 2.4.2 and Figures 6 & 7.
1.6.20 DC PROBE
The feedback necessary for DC bias voltage control is applied to this terminal. The input is differential
with an impedance of 47k Ohms. Sec Section 2.4.2 and Figures 6 & 7.
1.6.21 AUX PROBE
The feedback necessary for AUX voltage control is applied to this terminal. The input is differential with
an impedance
of 47k Ohms. See Section 2.4.2 and Figures 6 & 7.
1.6.22 FBL -FEEDBACK LOW
The voltage control feedback channels can be factory configured as single-ended or differential. The
aforementioned probe input terminals arc all the HIGH inputs of a differential pair. The FBL tenninal is the LOW
side of all probe inputs when they are configured as differential inputs.
1.6.23 SETPOINT # I
SETPOINT # 1 is the standard power and voltage setpoint input ln the power mode, the setpoint is linear
over a ±5 or ±10 volt range from Oto rated power. See RANGE and POLARITY PROGRAMMING. Input
impedance is 47k Ohms. In the voltage control mode, the control loop will alter the power until the setpoint and
feedback signals arc equal. The voltage-setpoint/power transfer function is a function of the probe attenuation and
load impedance.
NOTE: SETPOINT # I is also used as the high power level in ANALOG pulse operation.
RF SERIES 7
6.00
10/2S

1.6.24 SETPOINT # l
SETPOINT # 2 is the secondary setp<>int input. In ANALOG pulsed operation, the setpOint is linear over a
:1:5 or :!:IO volt range from Oto rated power. See RANGE AND POLARIIT PROGRAMMING. Input impedance
is47k Ohms.
NOTE: This input is used as the low power level in ANALOG pulse operation.
1.6.25 GROUND SENSE
The GROUND SENSE line is the reference input for setpoint inputs and monitor outputs.
1.6.26
REMOTE LIMIT IN
The REMOTE LIMIT IN signal is designed to fold the generator back under external limit conditions.
Typically this input
is used in dual bias systems. Input impedance is I Ok Ohms. See Section 2.5.
1.6.27 REMOTE LIMIT OUT
REMOTE LIMIT OUT is an analog signal which represents the level of reflected voltage sensed by the
supply. The signal
is not linearly related to reflected power. Typically it is used in dual bias systems. See Section
2.5.
1.6.28 SHIELD CONNECTION
SHIELD MilSI be tenninated at one end of the analog cable. Empirical testing may be required· to
determine the best termination point.
Rf SERIES
6.00
10/25
8

TABLEl
ANALOG INTERFACE PIN LIST
flli
LABEL FUNCTION
SIGNAL DIRECTION
A POWER/VOLTAGE* SELECT POWER OR DIGITAL INPUT
VOLTAGE CONTROL
B RF/DC* SELECT
RF OR DC VOLTS DIGITAL INPUT
cc PRESET INVOKE* INVOKES SELECTED PRESET DIGITAL INPUT
(PPO, PPl and PP2)
u
PPO
PRESET SELECTPIN 0 DIGITAL INPUT
BB
PPl PRESET SELECTPIN 1 DIGITAL INPUT
FF
PP2 PRESET SELECT PIN 2 DIGITAL INPUT
w EXTINTLK EXTERNAL INTERLOCK DIGITAL INPUT
s GATE GATE SIGNAL INPUT DIGITAL INPUT
DD RAMP ENABLE*
RF ON RAMP ENABLE DIGITAL INPUT
F RFON* RF ENABLE DIGITAL INPUT
M RFENABLED* RF STATUS LINE DIGITAL OUTPUT
EE
GATE ENABLE* ANALOG PULSING ENABLE DIGITAL INPUT
AA EPO EMERGENCY POWER OFF
SWITCH CONTACT
(OPTIONAL)
z EPO EMERGENCY POWER OFF
SWITCH CONTACT
(OPTIONAL)
PP +15V +15 VOLTS OUTPUT
TT -ISV -15 VOLTS OUTPUT
NN +5V
+5 VOLTS OUTPUT
H INCMONm.JNE INCIDENT POWER ANALOG OUTPUT
MONITOR
J REF MON/LOAD REFLECTED POWER ANALOG OUTPUT
MONITOR
C RF PROBE RF VOLTAGE FEEDBACK ANALOG INPUT
RF SERIES
9
6.00
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:eIN
D
LL
T
E
R
V
p
y
N
L
RR
K
MM
RF SERIES
6.00
1012S
TABLE 1 cont.
ANALOG INTERFACE PIN LIST
LABEL FUNCTION
SIGNAL
DIRECTION
DC PROBE
DC VOLTAGE FEEDBACK ANALOG
INPUT
AUXIN
AUXILIARY FEEDBACK ANALOG INPUT
FBL FEEDBACK LOW ANALOG INPUT
SETPOINT# 1 POWERNOLTAGE SETPOINT ANALOG INPUT
SETPOINT#2
POWERNOLTAGE SETPOINT ANALOG INPUT
GROUND SENSE REFERENCE INPUT
FOR
ANALOG IN/OUT
CONTROL GROUND
REMOTE LIMIT IN EXTERNAL LIMIT INPUT ANALOG INPUT
REMOTE LIMIT OUT INTERNAL LIMIT OUTPUT ANALOG OUTPUT
SHIELD SHIELD CONNECTION
GROUND DIGITAL GROUND
GROUND DIGITAL GROUND
GROUND DIGITAL GROUND
Available Fonnerly external PULL UP
10

1.7 TECHNICAL SPECIFICATIONS
2
3
4
5
6
7
8
9
9b
10
RF SERIES
6.00
10/25
PARAMETER
TABLEl
SPECIEJCATION
FREQUENCY
i) RFSQ, RFI0Q, RF20(), RF20HO
RF30Q
ii) HF5,
HFl0
FREQUENCY STABILITY
RF OUTPUT
POWER
OUTPUT IMPEDANCE
METERING ACCURACY
(S) 13.56 MHz:1: .01%
(P)27.12 MHz± .01%
(L)40.68
MHz:1: .01%
60.00 MHz± .01%
± .005 •/4 SHORT TERM.
RFS SOO Wans into 50 Ohms.
HFS 500 Watts into 50 Ohms
RFI0 1000 Watts into 50 Ohms.
HF10 1000 Watts into SO Ohms.
RF20 2000 Watts into SO Ohms.
RF20H 2000 Watts into 50 Ohms.
RF30 3000 Watts into SO Ohms.
SO ± S Ohms nominal.
Forward
power±.5 % FS ± 3% of reading.
STANDARD RF OUTPUT CONNECTOR RFS
HFS
RFlO
HFIO
RF20
RF20H
RF30
N
N
N
N
N
HN
DIN
POWER STABILITY
TEMPERA TIJRE COEFFICIENTS
OF POWER STABILITY
FORWARD POWER REGULATION
LINE REGULATION
LOAD MISMATCH TOLERANCE
11
For additional RF output connector configurations,
contact
RFPP.
± J Watt± 0.5% long term.
±0.05%/C.
I% into 50 Ohm load.
Related to RMS line voltage. Within range
of tap
settings,
all specifications will be met. Below 5%
low line, derate max power 1.5% for every I%
line change to a minimum 18% low line. Unit not
specified to operate below 190 V AC.
Continuous duty into any passive load without
failure or oscillation.

I I
12
13
14
15
16
17
18
19
20
RF SERIES
6.00
10/25
TABLE 2 cont.
PARAMETER
HARMONIC DISTORTION
NOISE, HUM, RIPPLE
COMMON EXCITER INPUT
COMMON EXCITER OUTPUT
PROTECTION
SPURIOUS RADIATION
OPERA TING AMBIENT
HUMIDITY
WATER FLOWrrEMPERA TURE
(Water Cooled Units)
AIR FLOW REQUIREMENTS
(Air Cooled Units)
12
SPECIFICATION
All harmonics
more than 45 dB down (typ. 50 dB),
reference
to carrier.
-40 dBC at full power.
Input impedance 50 Ohms,
7-20 volts P-P at
operating frequency.
Output impedance
50 Ohms, 8 volts P-P at operating
frequency.
Forward
power limits on PA current or excessive
reflected
power ...
RF5
37 Watts
HF5 75 Watts
RFlO 75 Watts
HFl0 150 Watts
RF20 150 Watts
RF20WC
300 Watts
RF20H
700 Watts
RF30
450 Watts
... short and
open circuit protected.
RF Series supplies
meet or exceed FCC
specifications.
0
to 40 degrees Celsius.
80% non-condensing.
HFlO
HF5
RF20WC
RF20H
RF30
l.0GPM
1.0 GPM
2.5 GPM
2.5 GPM
2.5 GPM
All at 35° C max inlet temp.
RF5
HF5
RFlO
RF20
100 cubic feet / minute
100 cubic feet / minute
220 cubic feet / minute
220 cubic feet / minute

21
22
RF SERIES
6.00
10/25
PARAMETER
POWER REQUIRED
CIRCUIT PROTECTION
TABLE 2 cont.
13
SPECIDCATION
RF5 99-125 V AC 50/60 Hz 1+ 11 Amps
190-262
VAC 50/60 Hz 14> 6 Amps
HF5 99-125 VAC 50/60 Hz 14> 11 Amps
190-262
VAC 50/60 Hz 14> 6 Amps
RFI0 190-262 VAC 50/60 Hz 14> 11 Amps
HFl0 190-262 VAC 50/60 Hz 34> 6 Amps
RF20 190-262 VAC 50/60 Hz34> 14 Amps
190-262
VAC 50/60 Hz 1+ 28 Amps
RF20H 190-262 V AC 50/60 Hz 34> 19 Amps
RF30 190-262 V AC 50/60 Hz 3q> 19 Amps
RF5 (208V)
RF5 (115V)
HF5 (208V)
RFIO
HFlO
RF2034'
RF20 14'
RF20H
RF30
8 Amp overcurrent
I5 Amp overcurrent
15 Amp overcurrcnt
l5 Amp overcurrent
8 Amp overcurrent
18 Amp overcurrent
38
Amp overcurrent
25 Amp ovcrcurrent
25 Amp overcurrent