Aerotech AOM360D Series User manual

Revision: 1.02.00
AOM360D Direct-Drive Gimbal
User Manual

Global Technical Support
Go to www.aerotech.com/global-technical-support for information and support about your Aerotech, Inc. products. The
website supplies software, product manuals, Help files, training schedules, and PC-to-PC remote technical support. If
necessary, you can complete Product Return (RMA) forms and get information about repairs and spare or replacement parts.
To get help immediately, contact a service office or your sales representative. Include your customer order number in your
email or have it available before you call.
United States (World Headquarters)
Email: Support@aerotech.com
Phone: +1-412-967-6440
Fax: +1-412-967-6870
101 Zeta Drive
Pittsburgh, PA 15238-2811
www.aerotech.com
United Kingdom China
Email: Support@aerotech.com
Phone: +44 (0)1256 855055
Fax: +44 (0)1256 855649
Email: Support@aerotech.com
Phone: +86 (21) 5508 6731
Germany Taiwan
Email: Support@aerotech.com
Phone: +49 (0)911 967 9370
Fax: +49 (0)911 967 93720
Email: Support@aerotech.com
Phone: +886 (0)2 8751 6690
France
Email: Support@aerotech.com
Phone: +33 2 37 21 87 65
This manual contains proprietary information and may not be reproduced, disclosed, or used in whole or in part without the
express written permission of Aerotech, Inc. Product names mentioned herein are used for identification purposes only and
may be trademarks of their respective companies.
Copyright © 1994-2020, Aerotech, Inc., All rights reserved.

AOM360D User Manual Table of Contents
Table of Contents
AOM360D Direct-Drive Gimbal User Manual 1
Table of Contents 3
List of Figures 4
List of Tables 5
Safety Procedures and Warnings 6
EU Declaration of Incorporation 7
Chapter 1: Overview 9
1.1. Environmental Specifications 10
1.2. Accuracy and Temperature Effects 10
1.3. Basic Specifications 11
1.4. Vacuum Operation 12
1.5. Export Restrictions 12
Chapter 2: Mechanical Specifications and Installation 13
2.1. Unpacking and Handling the Stage 13
2.2. Dimensions 14
2.3. Securing the AOM360D Base to the Mounting Surface 18
2.4. Attaching the Payload to the Stage 21
Chapter 3: Electrical Specifications and Installation 23
3.1. Motor and Feedback Connectors 24
3.2. Motor and Feedback Wiring 27
3.3. Stage Hall, Thermistor, Inductosyn, and Limits Specifications 29
3.4. Limits, Marker, and Machine Direction 32
3.5. Motor and Feedback Phasing 33
Chapter 4: Maintenance 35
4.1. Service and Inspection Schedule 35
4.2. Cleaning and Lubrication 36
Appendix A: Warranty and Field Service 37
Appendix B: Revision History 39
Index 41
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Table of Contents AOM360D User Manual
List of Figures
Figure 2-1: AOM360D-200 Dimensions 14
Figure 2-2: AOM360D-300 Dimensions 15
Figure 2-3: AOM360D-400 Dimensions 16
Figure 2-4: AOM360D-500 Dimensions 17
Figure 2-5: Mounting Hole Locations 19
Figure 2-6: Leveling Screw Assembly 20
Figure 3-1: Motor Wiring [AZ and EL] 27
Figure 3-2: Feedback Wiring [AZ and EL] 28
Figure 3-3: Machine Direction 32
Figure 3-4: Hall Phasing 33
Figure 3-5: Analog Encoder Phasing Reference Diagram 34
Figure 3-6: Encoder Phasing Reference Diagram (Standard) 34
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AOM360D User Manual Table of Contents
List of Tables
Table 1-1: AOM360D Optical Mount Model Options 9
Table 1-2: Environmental Specifications 10
Table 1-3: AOM360D Series Specifications 11
Table 3-1: 26-Pin Motor Connector Pinouts [AZ and EL] 25
Table 3-2: 26-Pin Motor Connector Mating Connector 25
Table 3-3: 19-Pin Feedback Connector Pinouts [AZ and EL] 26
Table 3-4: 19-Pin Feedback Connector Mating Connector 26
Table 3-5: Feedback Specifications 29
Table 3-6: S-180-44 [EL] and S-180-69 [AZ] Rotary Motor Specifications (-200 and -300 options) 30
Table 3-7: S-240-63 [EL] and S-240-83 [AZ] Rotary Motor Specifications (-400 and -500 options) 31
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Table of Contents AOM360D User Manual
Safety Procedures and Warnings
This manual tells you how to carefully and correctly use and operate the AOM360D. Read all parts of this
manual before you install or operate the AOM360D or before you do maintenance to your system. To prevent
injury to you and damage to the equipment, obey the precautions in this manual. The precautions that follow
apply when you see a Danger or Warning symbol in this manual. If you do not obey these precautions, injury
to you or damage to the equipment can occur. If you do not understand the information in this manual,
contact Aerotech Global Technical Support.
This product has been designed for light industrial manufacturing or laboratory environments. The protection
provided by the equipment could be impaired if the product is used in a manner not specified by the
manufacturer.
N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any
time. All drawings and illustrations are for reference only and were complete and accurate as of this
manual’s release. Refer to www.aerotech.com for the most up-to-date information.
D A N G E R : This product contains potentially lethal voltages. To reduce the possibility of
electrical shock, bodily injury, or death the following precautions must be followed.
1. Access to the AOM360D and component parts must be restricted while connected to a
power source.
2. Do not connect or disconnect any electrical components or connecting cables while
connected to a power source.
3. Disconnect electrical power before servicing equipment.
4. All components must be properly grounded in accordance with local electrical safety
requirements.
5. Operator safeguarding requirements must be addressed during final integration of the
product.
W A R N I N G : To minimize the possibility of electrical shock, bodily injury or death the
following precautions must be followed.
1. Moving parts can cause crushing or shearing injuries. Access to all stage and motor parts
must be restricted while connected to a power source.
2. Cables can pose a tripping hazard. Securely mount and position all system cables to avoid
potential hazards.
3. Do not expose this product to environments or conditions outside of the listed
specifications. Exceeding environmental or operating specifications can cause damage to
the equipment.
4. The AOM360D must be mounted securely. Improper mounting can result in injury and
damage to the equipment.
5. Use care when moving the AOM360D. Lifting or transporting the AOM360D improperly can
result in injury or damage to the AOM360D.
6. If the product is used in a manner not specified by the manufacturer, the protection
provided by the product can be impaired and result in damage, shock, injury, or death.
7. The motor case temperature may exceed 75°C.
8. Operators must be trained before operating this equipment.
9. All service and maintenance must be performed by qualified personnel.
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AOM360D User Manual Table of Contents
EU Declaration of Incorporation
Manufacturer: Aerotech, Inc.
101 Zeta Drive
Pittsburgh, PA 15238-2811
USA
herewith declares that the product:
AOM360D
is intended to be incorporated into machinery to constitute machinery covered by the Directive
2006/42/EC as amended;
and that the following harmonized European standards have been applied:
EN ISO 12100:2010
Safety of machinery - Basic concepts, general principles for design
EN 60204-1:2010
Safety of machinery - Electrical equipment of machines - Part 1:General requirements
and further more declares that
it is not allowed to put the equipment into service until the machinery into which it is to be
incorporated or of which it is to be a component has been found and declared to be in
conformity with the provisions of the Directive 2006/42/EC and with national
implementing legislation, for example, as a whole, including the equipment referred to in
this Declaration.
This is to certify that the aforementioned product is in accordance with the applicable requirements of the
following Directive(s):
EU 2015/863 RoHS3 Directive
Authorized Representative:
Simon Smith, European Director
Address:
Aerotech Ltd
The Old Brick Kiln, Ramsdell, Tadley
Hampshire RG26 5PR
UK
Name
/ Alex Weibel
Position
Engineer Verifying Compliance
Location
Pittsburgh, PA
Date
1/17/2020
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Table of Contents AOM360D User Manual
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AOM360D User Manual Overview
Chapter 1: Overview
Table 1-1: AOM360D Optical Mount Model Options
AOM360D Optical Mount
Cell Size (Required)
-200 200 mm diameter cell
-300 300 mm diameter cell
-400 400 mm diameter cell
-500 500 mm diameter cell
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Overview AOM360D User Manual
1.1. Environmental Specifications
W A R N I N G : Do not expose this product to environments or conditions outside of the listed
specifications. Exceeding environmental or operating specifications can cause damage to the
equipment.
Table 1-2: Environmental Specifications
Ambient
Temperature
Operating: 10° to 35° C
Deviation in temperature can result in performance degradation.
The optimal operating temperature is 20° C ±2° C. If at any time the operating
temperature deviates from 20° C, degradation in performance could occur.
Storage: 0° to 40° C
Humidity Operating: 20% to 60% RH
Storage: 10% to 70% RH, non-condensing in original packaging
Protection
Rating
The gimbals have limited protection against airborne particles but not water. This
equates to an ingress protection rating of IP40.
Use Indoor use only
1.2. Accuracy and Temperature Effects
Aerotech products are designed for and built in a 20°C (68°F) environment. Extreme temperature changes
could cause a decrease in performance or permanent damage to the AOM360D. At a minimum, the
environmental temperature must be controlled to within 0.25ºC per 24 hours to ensure the AOM360D
specifications are repeatable over an extended period of time. The severity of temperature effects on all
specifications depends on many different environmental conditions, including how the AOM360D is
mounted. Contact the factory for more details.
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AOM360D User Manual Overview
1.3. Basic Specifications
Table 1-3: AOM360D Series Specifications
AOM360D-
200
AOM360D-
300
AOM360D-
400
AOM360D-
500
Travel 360° continuous, both azimuth and elevation
Clear Aperture Diameter(1) 193.5 mm 292.1 mm 393.7 mm 489.0 mm
Mechanical Drive System Direct-Drive Brushless Servomotor
Accuracy(2) ±10 µrad
(±2 arc sec)
±10 µrad
(±2 arc sec)
±5 µrad
(±1 arc sec)
±5 µrad
(±1 arc sec)
Repeatability ±2.5 µrad
(±0.5 arc sec)
±2.5 µrad
(±0.5 arc sec)
±2.5 µrad
(±0.5 arc sec)
±2.5 µrad
(±0.5 arc sec)
Resolution 0.27 µrad (±0.055 arc sec)
Feedback Inductosyn (7 in diameter; 720
poles)
Inductosyn (12 in diameter; 720
poles)
Maximum Rotary Speed(3) 100 rpm 100 rpm 50 rpm 50 rpm
Maximum Load
Parameters
Diameter 203.2 mm 304.8 mm 406.6 mm 508.0 mm
Thickness 40.6 mm 53.3 mm 63.5 mm 88.9 mm
Weight 20.0 kg 20.0 kg 50.0 kg 50.0 kg
Axis Wobble Azimuth 14.6 µrad (3 arc sec)
Elevation 24.3 µrad (5 arc sec)
Orthogonality 48.5 µrad (10 arc sec); 12 µrad (2 arc sec) optional
Mass 84 kg 91 kg 208 kg 234 kg
AZ Inertia 1.62 kg-m22.5 kg-m29 kg-m212.53 kg-m2
EL Inertia 0.019 kg-m20.105 kg-m20.27 kg-m20.974 kg-m2
Material Steel AZ housing and yoke; Aluminum EL housing and mirror cell
Standard Finish Paint: Textured Epoxy (Polane-T), Pebble Grey Color
1. Special cell adapters and slip ring assemblies available by special order.
2. Requires Aerotech controls and axis calibration.
3. Maximum speed based on stage capability. Maximum application velocity may be limited by system
data rate and system resolution.
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Overview AOM360D User Manual
1.4. Vacuum Operation
Contact the factory for information regarding operation in a vacuum environment and for bakeout
specifications.
To make sure that the AOM360D will continue to perform well in the vacuum environment, use the guidelines
that follow (in addition to standard handling, installation, and lubrication guidelines outlined in this manual).
lDo not remove the AOM360D from its sealed bag until it is ready to use.
lAlways handle the AOM360D in a clean environment and use powder-free polyethylene gloves to
prevent any contaminants from adhering to the surface of the AOM360D.
lDuring installation, use cleaned, vented, stainless steel fasteners when securing the AOM360D.
lReduced air pressure eliminates significant convective heat transfer. This, coupled with the viscous
vacuum-compatible lubricants, could result in excessive motor operating temperatures. Because of this,
consider all continuous torque ratings to be 40 to 60% lower than the value specified for operation in
normal atmospheric environment. Reduce motor usage accordingly.
lFor vacuum applications, the recommended lubricant is a small quantity of Braycote® 602EF grease or
a compatible substitute of equal quality.
lBaking vacuum components significantly reduces outgassing at initial pump-down to vacuum pressure
and evaporates water vapor that impregnates porous surfaces on the aluminum and Teflon cables.
Aerotech recommends that customers bake out vacuum systems when first installing them in the
vacuum chamber. Contact Aerotech for bakeout temperatures and times for your application.
Reduced air pressure eliminates significant convective heat transfer. This, coupled with the viscous
vacuum-compatible lubricants, could result in excessive motor operating temperatures. Because of this,
consider all continuous torque ratings to be 40 to 60% lower than the value specified for operation in normal
atmospheric environment. Reduce motor usage accordingly.
1.5. Export Restrictions
The AOM360D is export controlled by United States Commerce Department export regulations. If you are
from a non-US country and wish to purchase this gimbal, contact Aerotech to determine if an export license
is required to purchase this product. People in countries embargoed by the United States cannot purchase
and import this product.
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AOM360D User Manual Mechanical Installation
Chapter 2: Mechanical Specifications and Installation
W A R N I N G : AOM360D installation must be in accordance to instructions provided by this
manual and any accompanying documentation. Failure to follow these instructions could result
in injury or damage to the equipment.
2.1. Unpacking and Handling the Stage
D A N G E R / H E A V Y : Manually lifting and moving the stage requires a minimum of two
people on either side of the stage. Refer to Section 1.3. for stage mass specifications.
lDo not attempt to lift heavy loads single handed.
lFollow the lifting instructions and only manually lift from the specified surfaces (if lifting
hardware hasn't been supplied).
lDo not use any of the cables as lifting points.
D A N G E R : The Elevation Direct Rotary Encoder is exposed. You must not touch or strike the
encoder with any object.
W A R N I N G : It is the customer's responsibility to safely and carefully lift the stage.
lMake sure that all moving parts are secure before moving the AOM360D. Unsecured
moving parts may shift and cause bodily injury.
lImproper handling could adversely affect the performance of the AOM360D. Use care
when moving the AOM360D.
N O T E : If any damage has occurred during shipping, report it immediately.
Lifting Instructions
Carefully remove the AOM360D from the protective shipping container. Before operating the AOM360D, it is
important to let the AOM360D stabilize at room temperature for at least 12 hours. Allowing the AOM360D to
stabilize to room temperature will ensure that all of the alignments, preloads, and tolerances are the same as
they were when tested at Aerotech. Use compressed nitrogen or clean, dry, oil-less air to remove any dust or
debris that has collected during shipping. Set the AOM360D on a smooth, flat, and clean surface.
Each AOM360D has a label listing the system part number and serial number. These numbers contain
information necessary for maintaining or updating system hardware and software. Locate this label and
record the information for later reference.
Shipping Clamps
Before you can operate the stage, remove all of the red anodized shipping brackets. Save the shipping
brackets to be used for long-term storage of the stage or return shipping for service.
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Mechanical Installation AOM360D User Manual
2.2. Dimensions
Figure 2-1: AOM360D-200 Dimensions
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AOM360D User Manual Mechanical Installation
Figure 2-2: AOM360D-300 Dimensions
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Mechanical Installation AOM360D User Manual
Figure 2-3: AOM360D-400 Dimensions
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AOM360D User Manual Mechanical Installation
Figure 2-4: AOM360D-500 Dimensions
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Mechanical Installation AOM360D User Manual
2.3. Securing the AOM360D Base to the Mounting Surface
W A R N I N G : The AOM360D must be mounted securely. Improper mounting can result in
injury and damage to the equipment.
W A R N I N G : Make sure that all moving parts are secure before moving the AOM360D.
Unsecured moving parts may shift and cause bodily injury.
D A N G E R / H E A V Y : Manually lifting and moving the stage requires a minimum of two
people on either side of the stage. Refer to Section 1.3. for stage mass specifications.
lDo not attempt to lift heavy loads single handed.
lFollow the lifting instructions and only manually lift from the specified surfaces (if lifting
hardware hasn't been supplied).
lDo not use any of the cables as lifting points.
The mounting surface should be flat and have adequate stiffness to achieve the maximum performance from
the AOM360D. When the AOM360D is mounted to a non-flat surface, the stage can be distorted while the
mounting screws are tightened. This distortion will decrease the overall accuracy of the stage. Adjustments
to the mounting surface must be done before the stage is secured.
Inspect the mounting surface for dirt or unwanted residue and clean if necessary. Use precision flatstones
on the mounting surface to remove any burrs or high spots. Clean the mounting surface with a lint free cloth
and isopropyl alcohol and allow the cleaning solvent to completely dry. Gently place the stage on the
mounting surface.
N O T E : To maintain accuracy, the mounting surface must be flat to within 2.5 µm.
N O T E : The AOM360D is precision machined and verified for flatness prior to product assembly at the
factory. If machining is required to achieve the desired flatness, it should be performed on the mounting
surface rather than the AOM360D. Shimming should be avoided if possible. If shimming is required, it
should be minimized to retain maximum rigidity of the system.
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AOM360D User Manual Mechanical Installation
The AOM360D has a fixed mounting pattern. Refer to Figure 2-5 for the mounting hole locations.
Figure 2-5: Mounting Hole Locations
Adjusting the Leveling Screw Assembly
Refer to Figure 2-6 for the parts of the Leveling Screw Assembly.
To adjust the level:
1. Make sure that the SHCS (1/2 - 13) is loose.
2. Loosen the jam nut with a 1 1/4" wrench.
3. Adjust the height with a 1" wrench on the adjustment hex. The rate of displacement is approximately
0.032" per CW turn.
4. Tighten the jam nut.
5. Tighten the SHCS to 58 Ft–Lbs.
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Mechanical Installation AOM360D User Manual
Figure 2-6: Leveling Screw Assembly
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