Agilent Technologies B1500A Installation guide

Agilent Technologies
Agilent B1500A
Semiconductor Device
Analyzer
Self-paced Training Manual, 1

Notices
© Agilent Technologies 2005 - 2008
No part of this manual may be reproduced
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laws.
Manual Part Number
B1500-90040
Edition
Edition 1, September 2005
Edition 2, May 2006
Edition 3, January 2007
Edition 4, June 2007
Edition 5, February 2008
Agilent Technologies
5301 Stevens Creek Blvd
Santa Clara, CA 95051 USA
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In This Manual
This document is the self-paced training manual to help you to understand what is Agilent
B1500A, what functions the B1500A has, how to use the B1500A, and what applications
the B1500A contributes to.
CAUTION The test setup data described in this manual are only examples. If these example data
damage your devices, Agilent is NOT LIABLE for the damage.
• Module 1. Introduction
This module explains the product concept and the key features of the B1500A/
EasyEXPERT. You will learn about what is the B1500A.
• Module 2. Getting Started
This module explains the basic operations of the B1500A. You will learn about how to
launch B1500A/EasyEXPERT and how to perform application test and quick test.
• Module 3. Data Display and Management
This module explains the data display and analysis capabilities of the EasyEXPERT
software. You will learn how to use analysis tools, how to change display setup, and
how to print/export test result data.
• Module 4. Classic Test Environment
This module explains the classic test mode of the EasyEXPERT. You will learn how to
create the classic test setup in the course exercises.
• Module 5. Basic Measurement
This module explains the basic I-V sweep measurement functionand the cabling and
fixturing issues. You will learn how to measure I-V curves in the course exercises.
• Module 6. Low Current Measurement
This module explains the low current measurement technique. You will learn how to
measure the low current in the course exercises.
• Module 7. Measurement Functions
This module explains the measurement functions available with the B1500A. You will
learn how to use various measurement functions in the course exercises.
• Module 8. Capacitance Measurement
This module explains the capacitance measurement function. You will learn how to
measure the capacitance in a course exercise.
• Module 9. Modifying Application Test Definitions
This module explains a modification example of an application test definition. You will
learn how to modify the definition in a course exercise.
• Module 10. Creating Your Test Definitions
This module explains about the application test definition. You will learn how to create
your application test definition in a course exercise.

• Module 11. Advanced Definitions and Operations
This module explains how to control external GPIB devices, how to call an execution
file, how to perform a repeat measurement, and how to use the prober control script.
• Module 12. Miscellaneous Operations
This module explains what is the status indicator, what is the automatic data export
function and the automatic data record function, how to perform selftest and
calibration, how to perform SMU zero offset cancel, and such.
• Module 13. SPGU Control and Applications
This module explains the SPGU Control classic test. You will learn how to create the
classic test setup and the applications using SPGU in the course exercises.
EasyEXPERT is a trademark of Agilent Technologies. All other trademarks are the
property of their respective owners.

Class Exercises
Class exercises use the test setup listed below. The test setup data are only examples and
included in the Demo.xpg file stored in the Manual CD-ROM.
Module Exercise Device Test setup/definition/data Page
Module 1 no exercise
Module 2 Id-Vd measurement MOSFET CMOS: Id-Vd 2-19, 27
Id-Vg, gm-Vg measurement MOSFET CMOS: Vth gmMax 2-19, 27
B2200/E5250 switch control - - 2-32
Module 3 Id-Vg, gm-Vg measurement MOSFET GMMAX.xtr 3-28
Using Preview window - - 3-31
Module 4 Id-Vd measurement MOSFET Trng Id-Vd 4-25
Multi Channel I/V Sweep
MeasurementBipolar Tr
LED Trng Multi 4-37
I/V List Sweep Measurement MOSFET Trng List 4-51
I/V-t sampling measurement 0.1 μFTrng Sampling 4-64
C-V sweep measurement MOSFET Trng CV 4-76
B2200/E5250 switch control -Trng Switch 4-81
Direct Control (C-f measurement) 0.1 μFTrng C-f 4-88
Module 5 Id-Vd measurement MOSFET IDVD, Id-Vd 5-7
SMU series connection 511 kohm IRVR 5-24
SMU parallel connection 1 ohm Parallel 5-28
Re measurement, kelvin connection Bipolar Tr REKELV 5-38
Module 6 Leak current measurement -Zero-check 6-9
Ultra low current measurement -Zero-check-ASU 6-19
Id-Vg measurement MOSFET IDVG 6-20
Gummel plot Bipolar Tr GUMMEL 6-25
Module 7 SMU pulse mode MOSFET IDVD-Pulse 7-8
RC measurement 0.1 μF and
511 kohm RC-sampling-log 7-16
Negative hold time 511 kohm R-sampl-neg-hold 7-22
Auto analysis MOSFET GMMAX 7-28
Bias hold function LED LED 7-35
SMU series resistor 511 kohm IV-res 7-43

NOTE Demo.xpg file
Demo.xpg file is required to create the Demo preset group which contains the test setup
data used by the class exercises. And it is stored in the \data folder on the Agilent B1500A
Manual CD-ROM, Edition 4 or later.
The Demo preset group should be created before starting the class exercise. To create the
preset group, launch EasyEXPERT and import the file by using the Preset Group Import
dialog box opened by clicking My Favorite Setup > Preset Group > Import Preset Group.
The test setup data are only examples for the class exercises.
NOTE .xtd files
The \data folder on the Manual CD-ROM stores some .xtd files. They are the application
test definitions used by some class exercises. To use the definition file, import the file by
using the Test Definition Import dialog box opened by clicking Library > Import Test
Definition. The test definition data are only examples for the class exercises.
NOTE .xtr files
The \data folder on the Manual CD-ROM stores some .xtr files. They are the sample test
results created by executing the test setup which has the same name as the result data. To
display these sample test results, import the files by using the Test Result Import dialog
box opened by clicking Results > Transport Data > Import.
Module 8 C-V sweep measurement MOSFET CV-1MHz 8-6
Module 9 Modifying application test
definition MOSFET Trng IdVd Vth.xtd 9-14
Trng idvd idvg2.xtd 9-32
Trng idvd idvg3.xtd 9-35
Using vector data MOSFET Trng Cgg-Vg 9-41
Module 10 Creating application test definition MOSFET Trng idvd idvg.xtd 10-17
Module 11 no exercise
Module 12 no exercise
Module 13 Charge pumping MOSFET Charge Pumping 4T 0.1V
step13-20
Flash memory MOSFET Demo-S-NorFlash
Endurance 13-29
ALWG output 511 kohm ALWG monitor 13-36
Module Exercise Device Test setup/definition/data Page

Test Setup for Class Exercises
The Demo preset group contains the following test setup. The setup data are only examples
for the class exercises. The following table lists the test setup name in alphabetical order.
Test Setup Name Description
ALWG monitor 511 kohm sampling measurement with SPGU ALWG output
Charge Pumping 4T
0.1V step MOSFET Icp-Vbase measurement
CV-1MHz MOSFET Cgs-Vg measurement
Demo-S-NorFlash
Endurance MOSFET Endurance test
Fowler-Nordheim Fowler-Nordheim (FN) plot
GMMAX MOSFET sqrt_Id-Vg, PEAK-Vg measurement
GUMMEL Bipolar transistor gummel plot
IDVD MOSFET Id-Vd measurement
IDVD-Pulse MOSFET pulsed Id-Vd measurement
Id-Vd MOSFET Id-Vd measurement, Application Test
IDVG MOSFET Id-Vg measurement
IRVR 511 kohm I-V measurement
IV-res 511 kohm I-V measurement with SMU series resistor
LED LED I-V measurement
Parallel 1 ohm I-V measurement, voltage force and current measurement
PG monitor 511 kohm sampling measurement with SPGU VPULSE output
RC-sampling-log RC sampling measurement, log sampling
REKELV Bipolar transistor Re measurement
R-sampl-neg-hold 511 kohm sampling measurement with negative hold time
Subthreshold MOSFET subthreshold measurement
Trng C-f Direct Control (C-f measurement)
Trng Cgg-Vg Modifying application test definition using vector data
Trng CV MOSFET C-V measurement
Trng Id-Vd MOSFET Id-Vd measurement

Trng List MOSFET Vth-gmmax measurement using I/V List Sweep
Trng Multi Multi Channel I/V Sweep (Bipolar transistor and LED)
Trng Sampling 0.1 μF sampling measurement
Trng Switch B2200/E5250 switch setup, Input 1-3-5-7 to Output 1-3-5-7
Zero-check SMU open measurement
Zero-check-ASU SMU open measurement with ASU
Test Setup Name Description

Required Devices for Class Exercises
To perform the class exercises, you need the device set (Agilent part number 04156-87001)
which contains the following devices.
Description Quantity
N-channel MOSFET 2 ea.
NPN Bipolar Transistor 1 ea.
Red Miniature LED 1 ea.
0.1 μF Capacitor 50 V 1 ea.
1.0 Ω Resistor 1/8 W 1 ea.
1.1 kΩResistor 1/8 W 1 ea.
511 kΩResistor 1/8 W 1 ea.
NPN bipolar TransistorN-ch MOSFET LED
1 ohm Resistor
Brown
Black
Black
Silver
1.1 kohm Resistor
Brown
Brown
Black
Brown
511 kohm Resistor
Green
Brown
Brown
Orange
0.1 uF Capacitor

Required Accessories for Class Exercises
To perform the classexercises, you need the following accessories. Prepare the accessories
shown below.
Designation Description Model No. Qty.
1Test Fixture 16442A/B a
a. The 16058A Test Fixture for the 4145A/B may be substituted for the
16442A/B Test Fixture. If you use the 16058A, you also need the 16435A
Interlock Adapter.
1 ea.
28 pin socket module 1 ea.
Connection wire 6 ea.
2Triaxial Cable 16494A 4 ea.
3Interlock Cable 16493J 1 ea.
4Kelvin Triaxial Cable, for Module 5 16493K 1 ea.
5CMU Cable, for Module 8 N1300A 1 ea.
6Atto Sense/Switch Unit, for Module 6 E5288A 1 ea.
ASU control cable, triax cable, for Module 6 16493M 1 ea.
16442A/B Test Fixture (1ea.)
Triaxial Cable (4ea.)
INTLK Cable (1ea.)
Connection Wire (6ea.)
28 pin DIP Socket Module (1ea.)
2
3
1
4
5CMU Cable (1ea.)
6
E5288A ASU (1ea.)
Triaxial Cable (1ea.)
Control Cable (1ea.)
Kelvin Triaxial Cable (1ea.)

To perform the flash memory class exercise in Module 13 and if you use the ASU, you
need the following accessories.
To perform the flash memory class exercise in Module 13 and if you use the selector, you
need the following accessories.
Description Model No. Qty.
ASU (Atto Sense/Switch Unit) with control cable E5288A Total
3sets
Triaxial Cable 16494A or
equivalent Total
7ea.
BNC-SMA Cable 16493P 3 ea.
SMA-SMA Cable, for synchronization of SPGU 16493Q 2 ea.
Description Model No. Qty.
SMU/PG selector with control cable a
a. One selector can be replaced with one ASU.
16440A 2 sets
Selector adapter with control cable 16445A 1 set
Triaxial Cable 16494A or
equivalent Total
7ea.
BNC-SMA Cable 16493P 3 ea.
SMA-SMA Cable, for synchronization of SPGU 16493Q 2 ea.

Contents
Contents-1
Module 1. Introduction
•New Features
•EasyEXPERT
•To Perform Easy Application Test
•User Interface
•Modular Mainframe
•SCUU/GSWU
•ASU
•SMU/Pulse Generator Selector
•B2200/E5250 Switch Control
•Desktop EasyEXPERT
Module 2. Getting Started
•To Turn on/off B1500A
•To Launch EasyEXPERT
•To Specify/Create Workspace
•To Perform Application Test
•To Save/Recall Your Test Setup
•To Export/Import Your Preset Group
•To Export/Import Test Record
•To Perform Quick Test
•To Control Switching Matrix
•To Manage Data Display Window

Contents
Contents-2
Module 3. Data Display and Management
•Data Display window
•Graph Analysis Tools
•Data Status
•To Change Graph/List/Display Setup
•To See Print Preview
•To Print Display Data
•To Copy Graph Plot/List Data
•To Save Analysis Result
•To Use Preview Window
Module 4. Classic Test Environment
•Classic Test Execution Mode
•I/V Sweep Measurement
•Multi Channel I/V Sweep Measurement
•I/V List Sweep Measurement
•I/V-t Sampling Measurement
•C-V Sweep Measurement
•Switching Matrix Control
•Direct Control

Contents
Contents-3
Module 5. Basic Measurement
•SMU Fundamentals
•Classic Test Environment
•SMUs Connected in Series or Parallel
•Cabling and Fixture Issues
•Kelvin and Driven Guard
•Probes and Prober Connections
•Triax and Coax Adapters
•Safety Interlock Issues
Module 6. Low Current Measurement
•Low-Current Measurement Challenges
•Calibration and Zero Cancel
•Effect of Cable Movement
•ASU for Ultra Low-Current Measurement
•Low-Current Subthreshold
•Trade-Off Speed Vs Accuracy
•Low-Current Gummel Plot
•Low-Current Gate Oxide Leakage

Contents
Contents-4
Module 7. Measurement Functions
•SMU Pulsed Sweep Measurement
•I/V-t Sampling Measurement
•Negative Hold Time for High Speed Sampling
•Auto Analysis
•SMU Filter
•SMU Series Resistor
•Standby Function
•Bias Hold Function
Module 8. Capacitance Measurement
•CMU Fundamentals
•Classic Test Environment
•CMU Calibration
•SCUU for IV/CV Switching
•GSWU for Accurate Capacitance Measurement
•ASU for IV/CV Switching

Contents
Contents-5
Module 9. Modifying Application Test Definitions
•To Open Application Test Definition
•To Modify Test Definition
•To Use Debug Tools
•To Use Built-in Functions
•To Add Data Display
•To Use Auto Analysis
•To Use Test Setup Internal Variables
Module 10. Creating Your Test Definitions
•What is Test Definition
•What is Test Contents
•To Open Test Definition Editor
•To Define Test Specification
•To Define Test Contents
•Available Elements
•Available Variables
•To Define Test Output

Contents
Contents-6
Module 11. Advanced Definitions and Operations
•To Control External GPIB Devices
•To Call Execution Files
•To Perform Repeat Measurements
•Prober Control Script
Module 12. Miscellaneous Operations
•Function Status Indicator
•Run Option
•Automatic Data Export and Data Record
•Calibration
•Configuration
•XSLT Samples
•To Enable System Controller
•To Start Desktop EasyEXPERT
•To Use 415x Setup File Converter

Contents
Contents-7
Module 13. SPGU Control and Applications
•SPGU
•Pulse Generator Mode
•Charge Pumping
•Flash Memory Test
•ALWG Mode