Air Products GASGUARD AP10 User manual

AirProducts
Installation, Operation and
Maintenance Manual for the
GASGUARD®AP10
Distribution Systems
Commodity Number: 123224
December 2005
Air Products and Chemicals, Inc.
1919 Vultee Street
Allentown, PA 18103
123224 MANUAL DISTRIBUTION AP10

Introduction
Revision – December 2005 Page i - i
Manual Matrix Sheet
for the GASGUARD®AP10
Distribution Systems
Commodity Number: 123224, Initial Release – December 2005
Manual Section Revision Level Reason for Revision
Cover and Front Dec. 2005 Initial Release
Introduction Dec. 2005 Initial Release
Section 1: Safety Warnings Dec. 2005 Initial Release
Section 2: Dimensions and Mounting Dec. 2005 Initial Release
Section 3: Tubing Connections Dec. 2005 Initial Release
Section 4: Electrical Connections Dec. 2005 Initial Release
Section 5: Helium Leak Testing Dec. 2005 Initial Release
Section 6: Distribution System
Functional Checklist Dec. 2005 Initial Release
Section 7: System Description Dec. 2005 Initial Release
Section 8: Operating Procedures Dec. 2005 Initial Release
Section 9: Troubleshooting Dec. 2005 Initial Release
Section 10: Maintenance Dec. 2005 Initial Release
Section 11: System Specific Information Dec. 2005 Initial Release
Appendix A Dec. 2005 Initial Release
Appendix B Dec. 2005 Initial Release

GASGUARD®AP10 Distribution System Manual
Air Products and Chemicals, Inc. Page i - ii
Manual Section Revision Level Reason for Revision
Appendix C Dec. 2005 Initial Release

Introduction
Revision – December 2005 Page i - iii
Important Safety Information
Read and understand the safety warnings
section of this manual before working with
the system. Failure to do so can result in
personal injury or death.
Warnings:
Warnings, like the sample shown below are found throughout the manual to
point out hazards which could cause personal injury or death if proper
procedures are not followed:
The operator MUST read and understand
the safety section before operating the
system. All operating and maintenance
personnel must receive training and
instruction by Air Products and Chemicals,
Inc.
System Hazards:
Possible hazards when working with this system are exposure to:
•Toxic Gas Hazards
•Corrosive Gas Hazards
•Flammable Gas Hazards
•Oxidizer Hazards
•Inert Gas Hazards
•Pressurized Gases
•Electrical Hazard
Do not make any changes to the equipment
independently. Injury or death may result
from unauthorized modifications. If
equipment needs to be modified, an Air
Products' Representative MUST be
contacted.

GASGUARD®AP10 Distribution System Manual
Air Products and Chemicals, Inc. Page i - iv
Air Products Support Systems
Emergency Response - 24 Hour Service
If an emergency occurs that cannot be alleviated by the trained operator or his/her
supervisor, call Air Products and Chemicals, Inc. on one of these telephone numbers.
•From anywhere in the continental United States, Canada and Puerto Rico -
800-523-9374 (toll free)
•From all other locations - 610-481-7711
•FAX -610-481-3772
•APCI Operator - 610-481-4911
•European Community/Middle East Gases - [phone]
Technical Support Contacts
Visit:
www.airproducts.com/Products/Equipment/equipment_showcase/global_contact
s.htm
to find your Local Representative
or Call:
Canada
Canadian Technical Center Information:
Air Products Canada Ltd.
17C Enterprise Ave.
Nepean, Ontario, Canada K2G 0A7
Phone: [phone]
Fax: [phone]
USA Eastern Region Technical Center (Northeast)
102 Hayes Memorial Drive
Marlborough, MA 10752-1888
Phone: [phone]
Fax: [phone]

Introduction
Revision – December 2005 Page i - v
USA (continued)
Eastern Region Technical Center (Central East)
128 Wembly Road
New Windsor, NY 12553
Phone: [phone]
Fax: [phone]
Eastern Region Technical Center (Southeast)
P.O. Box 12837
Research Triangle Park, NC 27709
Phone: [phone]
Fax: [phone]
Mid- America Tech Center
5508 W Highway 290 Suite 150
Austin, TX 78735-8817
Phone: [phone]
Western Tech Center
2880 Lakeside Drive Suite 150
Santa Clara, CA 95054
Phone: [phone]
Pacific Northwest Tech Center
19955 SW Teton Ave
Tualatin, OR 97062
Phone: [phone]
Fax: [phone]
Southwest Tech Center (New Mexico, Colorado, and Arizona)
2415 W. Erie Drive
Tempe, AZ 85282
Phone: [phone]
Fax: [phone]
Europe
Dublin Tech Center
52 Broomhill Road
Tallaght, Dublin 24 Ireland
Phone: [phone]
Fax: [phone]

GASGUARD®AP10 Distribution System Manual
Air Products and Chemicals, Inc. Page i - vi
Europe (continued)
East Kilbride Tech Center
Units 5, 6, & 6A Scottish Enterprise Technology Park
East Kilbride G75 0QD Scotland
Phone: [phone]
Nijmegen Tech Center
Ooskanaaldikj 110
6534 AL Nijmegen, The Netherlands
Phone: [phone]
Fax: [phone]
Asia Singapore Tech Center
8 Tuas Basin Link
Singapore 638762
Phone: [phone]
FAX: [phone]
Shanghai Tech Center
No. 238 Fenju Rd
WGQ Free Trade Zone
Shanghai, China. 200131
Phone: [phone] (WGQ); 86-21-6360-5096 (EAP)
Fax: [phone] (WGQ); 86-21-6360-9090 (EAP)
Factory Contact Information:
USA: Air Products and Chemicals, Inc.
Semiconductor Equipment Manufacturing Center
1919 Vultee Street
Allentown, PA 18103
Phone: [phone]
International: Air Products and Chemicals, Inc.
Semiconductor Equipment Manufacturing Center
1919 Vultee Street
Allentown, PA 18103
Phone: [phone]

Introduction
Revision – December 2005 Page i - vii
Table of Contents
Section 1: Safety Warnings..............................................................................................1-1
1.1 Introduction....................................................................................................1-1
1.1.1 Level or Intensity of Hazard ...........................................................1-1
1.1.2 Hazard Types (Symbols).................................................................1-2
1.2 Important Safety Warnings............................................................................1-4
1.3 Inert Gas Hazards...........................................................................................1-5
1.4 Pressurized Gases ..........................................................................................1-6
1.5 Electrical Hazard............................................................................................1-7
1.6 Falling Equipment Hazard.............................................................................1-7
1.7 Gas Cylinder Handling Hazard......................................................................1-7
1.8 Pinch Hazard..................................................................................................1-8
1.9 Personal Protective Equipment......................................................................1-8
1.10 Hazard Warnings .........................................................................................1-12
1.10.1 Toxic Gas Hazards........................................................................1-13
1.10.2 Corrosive Gas Hazards .................................................................1-14
1.10.3 Flammable and Pyrophoric Gas Hazards......................................1-14
1.10.4 Oxygen and Other Oxidizer Hazards............................................1-17
1.10.5 Inert Gas Hazards..........................................................................1-18
1.10.6 Pressurized Gases .........................................................................1-20
1.10.7 Cylinder Handling Hazards...........................................................1-21
1.10.8 Electrical Hazards.........................................................................1-22
1.10.9 Purge Gas Backstream Hazard......................................................1-23
1.11 Typical Minimal Lockout or Tagout System Procedures............................1-23
1.12 Safety Signs and Labels...............................................................................1-27
1.13 Electrical Hazards........................................................................................1-34
1.14 Safety Literature for Handling and Use of Gas Cylinders...........................1-36
1.15 Safety Literature for Handling and Use of Instrument Nitrogen
Supply..........................................................................................................1-36
Section 2: Dimensions and Mounting..............................................................................2-1
2.1 Outline Dimensions.......................................................................................2-1
2.1.1 Outline Dimension Figures for 24” Distribution Systems
(4 stick)...........................................................................................2-2
2.1.2 Outline Dimension Figures for 30” Distribution Systems
(6 stick or 8 stick)...........................................................................2-7
2.2 Mounting Hole Locations..............................................................................2-12
2.2.1 Rack Anchoring for 24” Distribution Systems (4 stick).................2-13
2.2.2 Rack Anchoring for 30” Distribution Systems (6 stick or
8 stick) ............................................................................................2-15
Section 3: Tubing Connections........................................................................................3-1
3.1 Tubing Interconnections................................................................................3-2
3.2 Process Line Connection ...............................................................................3-2
3.3 Vent Line.......................................................................................................3-5

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Air Products and Chemicals, Inc. Page i - viii
3.4 Venturi Line.................................................................................................. 3-6
3.5 Purge Line..................................................................................................... 3-6
3.6 Pneumatic Supply.......................................................................................... 3-7
3.6.1 Z-Purge Procedure.......................................................................... 3-8
3.7 Enclosure Exhaust System Requirements..................................................... 3-9
3.7.1 Exhaust Flow Clarifications and Definitions:............................... 3-11
3.8 Weld Shield Gas, Purge Gas Connection...................................................... 3-13
3.9 Helium Leak Test Port.................................................................................. 3-14
3.10 Hazardous Gas Leak Detection System (Customer Requirement).............. 3-14
Section 4: Electrical Connections ................................................................................... 4-1
4.1 Grounding Method........................................................................................ 4-2
4.2 Power Supply Connection............................................................................. 4-3
4.3 Field Connections.......................................................................................... 4-5
4.4 External I/O Communication........................................................................ 4-8
4.4.1 Supervised Inputs........................................................................... 4-9
4.5 PC and MMMS GASGUARD Networks ..................................................... 4-13
4.5.1 General Description ....................................................................... 4-13
4.5.2 GASGUARD AP3 Controller Connections................................... 4-14
4.5.3 PC Network Breakout Box............................................................. 4-15
4.5.4 PC Network Field Wiring .............................................................. 4-15
4.5.5 MMMS Network Wiring Configuration........................................ 4-17
4.5.6 MMMS Network Interface Box..................................................... 4-17
4.5.7 MMMS Network Field Wiring ...................................................... 4-18
Section 5: Helium Leak Testing...................................................................................... 5-1
Section 6: Distribution System Functional Checklist ..................................................... 6-1
Section 7: System Description ........................................................................................ 7-1
7.1 Valve Manifold Enclosure ............................................................................ 7-1
7.2 Hazardous Gas Manifold Panel..................................................................... 7-3
7.3 Panel Schematic and Component Descriptions............................................. 7-4
7.3.1 Panel Components.......................................................................... 7-4
7.4 GASGUARD AP3 Distribution System Controller...................................... 7-8
7.4.1 Controller Components.................................................................. 7-9
7.5 Basic GASGUARD AP3 Controller Operation........................................... 7-14
7.5.1 Security Code Protection................................................................ 7-14
7.5.2 Menu Operation .............................................................................7-14
7.5.3 Branch Menu Operations ............................................................... 7-15
7.6 Configuration Menu...................................................................................... 7-17
7.7 Manual Mode Operation............................................................................... 7-18
Section 8: Operating Procedures..................................................................................... 8-1
8.1 Emergency Shutdown Procedure .................................................................. 8-2
8.2 Operation of the GASGUARD AP3 Distribution System Controller........... 8-3
8.3 New System Startup Procedure..................................................................... 8-6
8.4 Line Purge and Process Line Purging Procedures......................................... 8-11
8.4.1 Line Purge Procedure..................................................................... 8-11
8.4.2 Rough Line Evacuation Procedure................................................. 8-14

Introduction
Revision – December 2005 Page i - ix
8.4.3 Flow Purge Procedure.....................................................................8-15
8.5 Process Gas Flow Procedure..........................................................................8-17
8.5.1 Start Process Gas Flow...................................................................8-17
8.5.2 Stop Process Gas Flow ...................................................................8-19
8.6 Manual Mode.................................................................................................8-20
8.6.1 How to Operate in Manual Mode...................................................8-20
8.6.2 How to Open and Close Valves......................................................8-22
8.6.3 General Principles of Manual Operation........................................8-23
8.7 Password Security..........................................................................................8-24
8.8 System Configuration....................................................................................8-25
8.8.1 Net Product.....................................................................................9-28
8.8.2 User Analog Setpoints....................................................................9-28
8.8.3 Subcycle Parameters.......................................................................9-29
8.8.4 Leak Test Parameters......................................................................9-29
8.8.5 System Test.....................................................................................9-29
8.8.6 Valve Setup.....................................................................................9-31
8.8.7 Valve Counts ..................................................................................9-31
8.8.8 Operation Sequences.......................................................................9-31
8.8.9 Sequence Flow Options..................................................................9-32
8.8.10 Prompt List ...................................................................................9-32
8.8.11 Set Time/Date...............................................................................9-32
8.8.12 Analog Scaling..............................................................................9-32
8.8.13 APCI Analog Setpoints.................................................................9-33
8.8.14 Alarm Conditions..........................................................................9-33
8.8.15 Alarm Delays................................................................................9-33
8.8.16 Alarm Types .................................................................................9-33
8.8.17 Alarm Sequences ..........................................................................9-34
8.8.18 Relay Defaults...............................................................................9-34
8.8.19 Helium Leak Check......................................................................9-34
8.8.20 1st Security List.............................................................................9-34
8.8.21 2nd Security List ............................................................................9-35
8.8.22 3rd Security List.............................................................................9-35
8.8.23 2nd Security Access ......................................................................9-35
8.8.24 3rd Security Access........................................................................9-36
8.8.25 System Setup.................................................................................9-36
8.8.26 Config Transfer.............................................................................9-38
8.8.27 Memory Management...................................................................9-38
Section 9: Troubleshooting..............................................................................................9-1
9.1 System Shut Down, No Lights on Controller................................................9-2
9.2 No or Low Purge Gas Pressure......................................................................9-3
9.3 No or Low Purge Gas Flow...........................................................................9-3
9.4 No or Low Process Gas Pressure...................................................................9-4
9.5 No or Low Process Gas Inlet Flow................................................................9-4
9.6 Typical Alarms ..............................................................................................9-5

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Air Products and Chemicals, Inc. Page i - x
9.6.1 Excess Flow ................................................................................... 9-5
9.6.2 Low Pneumatic Supply Pressure.................................................... 9-5
9.6.3 Low Branch Delivery Pressure or Very Low Branch Delivery
Pressure.......................................................................................... 9-6
9.6.4 High Branch Delivery Pressure or Very High Branch
Delivery Pressure ........................................................................... 9-6
9.6.5 Low Process Inlet Pressure or Very Low Process Inlet
Pressure.......................................................................................... 9-7
9.6.6 High Process Inlet Pressure or Very High Process Inlet
Pressure.......................................................................................... 9-7
9.6.7 Low Purge Inlet Pressure or Very Low Purge Inlet Pressure......... 9-8
9.6.8 High Purge Inlet Pressure or Very High Purge Inlet Pressure........ 9-8
9.6.9 High Vent or Very High Vent Pressure.......................................... 9-8
9.6.10 Low Vacuum Generated............................................................... 9-9
Section 10: Maintenance................................................................................................. 10-1
10.1 Warranty...................................................................................................... 10-1
10.2 Routine Maintenance .................................................................................. 10-2
10.3 Safety Interlock Maintenance...................................................................... 10-6
10.4 Emergency Shutdown ................................................................................. 10-7
Section 11: System Specific Information........................................................................ 11-1
11.1 System Specifications ................................................................................. 11-3
11.2 AP3 Recommended Spare Parts.................................................................. 11-5
11.2.1 Controller Circuit Boards Recommended Spare Parts................. 11-5
11.2.2 Distribution System Recommended Mechanical Spare Parts...... 11-6
11.3 Program Logic Chart................................................................................... 11-7
Appendix A..................................................................................................................... A-1
Appendix B ..................................................................................................................... B-1
Appendix C ..................................................................................................................... C-1

Introduction
Revision – December 2005 Page i - 1
Introduction
This manual covers the tasks required to install, operate and maintain the
GASGUARDDistribution Systems. Because of unique installation variables
from site to site, it is not intended as a step-by-step installation procedure, but
relies on the knowledge of qualified personnel to perform the work properly. This
manual should be read thoroughly by the supervising installation engineer before
installation is begun.
The GASGUARDdistribution systems have been designed and built in
accordance with the Uniform Fire Code (UFC) and the National Fire Protection
Association (NFPA). They must be installed and operated in accordance with the
UFC, NFPA and all other applicable industrial, federal, state and local codes.
This distribution system is to be used with an upstream hazardous process gas
source (a cabinet or rack system) that is also designed and built in accordance with
the Uniform Fire Code (UFC) and the National Fire Protection Association
(NFPA). The source equipment must be installed and operated in accordance with
the UFC, NFPA and all other applicable industrial, federal, state and local codes.
The source system must have excess flow shutdown, emergency shutdown and
over-pressure protection and the source cylinders must contain a restrictive flow
orifice in the cylinder valve if required by code.
GASGUARDis a registered trademark. The GASGUARDname is officially
registered and legally restricted to be used only by Air Products and Chemicals,
Inc. The information and data contained herein are proprietary to Air Products and
Chemicals, Inc. and are not to be copied, reproduced, duplicated or disclosed to
others, in whole or in part, without prior written consent of Air Products and
Chemicals, Inc. This restriction shall not apply to any safety information
contained in the manual. The safety information is intended for your use and we
encourage you to copy it so that anyone using this equipment knows how to use it
safely.

GASGUARDAP10 Distribution System Manual
Air Products and Chemicals, Inc. Page i - 2
Note: Air Products recommends that the customer develop a specific "Work
Instruction" for each gas cabinet, rack system or distribution system. The work
instruction can be used as a step through check list procedure for trained
operators.
A standard industrial work instruction would include the following:
System identification number, gas service, basic description of system, etc.
Current operating data (pressure, etc.), date, time, operator.
Tools/supplies required for maintenance (PPE required for the gas, leak
testing equipment, gaskets, etc.)
Step-through procedural check list to include specific customer PPE
protocol, communications and customer leak test procedures.
Consult your local Air Products technical representative if you need assistance in
preparation of standard work instruction.
Section 1: Safety Warnings
This section provides the safety information needed to safely operate the system.
Material Safety Data sheets for the gases and the instrument nitrogen supply. The
safety section is to be carefully read and understood before work is performed on
the system.
Section 2: Dimensions and Mounting
This section provides an overview of methods to mount the system as well as
envelope dimensions for typical systems.
Section 3: Tubing Connections
This section provides information for on site mechanical hook up requirements.
Section 4: Electrical Connections
This section provides information for on site electrical hook up requirements.
Section 5: Helium Leak Test
This section provides an overview on site helium leak test requirements.
Section 6: Distribution System Functional Checklist
This section contains a checklist to assure the system was installed properly.

Introduction
Revision – December 2005 Page i - 3
Section 7: System Description
This section provides an overview of the system.
Section 8: Operating Procedures
This section contains the procedures to prepare the system for operation and to
operate it.
Section 9: Troubleshooting
This section provides guidelines for solving operating system alarm problems. It is
a general guide; reference to manufacturers' literature will be required in some
cases.
Section 10: Maintenance
This section provides a guide to routine maintenance operations.
Section 11: System Specific Information
This section provides system specific information such as system specifications,
drawings, recommended spare parts and the program logic chart.
Appendix A
This Appendix Section contains the Air Products EES document QAF030 “UHP
Tubing and Fitting Specification”.
Appendix B
This Appendix contains the Air Products Material Safety Data Sheet(MSDS) for
N2 gas.
Appendix C
This Appendix contains the Pressure Equipment Directive (PED) Assessment
certificate for Gasguard Equipment.

GASGUARDAP10 Distribution System Manual
Air Products and Chemicals, Inc. Page i - 4
The table below provides a quick reference as to the applicability of the manual's
sections.
Manual Section Supervisory Maintenance Operations
1. Safety Warnings 
2: Dimensions and Mounting 
3: Tubing Connections 
4: Electrical Connections 
5: Helium Leak Test 
6: Distribution System
Functional Checklist 
7: System Description 
8: Operating Procedures 
9: Troubleshooting 
10: Maintenance 
11: System Specific
Information 
Appendices 
The information and data contained herein are proprietary to Air Products and
Chemicals, Inc. and are not to be copied, reproduced, duplicated or disclosed to
others, in whole or in part, without prior written consent of Air Products and
Chemicals, Inc. This restriction shall not apply to any safety information
contained in the manual. The safety information is intended for your use and we
encourage you to copy it so that anyone using this equipment knows how to use it
safely.

Section 1: Safety Warnings
Revision – December 2005 Page 1 - 1
Section 1: Safety Warnings
Please read the following safety warnings carefully before installing the
equipment.
1.1 Introduction
This section is meant to communicate to the user any hazards involved with the
equipment.
The following paragraphs will define the hazard warnings used and describe the
icons found in various sections of the manual and on the equipment. The hazard
warning labels used in the manual will correlate with those used on the equipment.
1.1.1 Level or Intensity of Hazard
Indicates an immediate hazard, which if
not avoided, will result in death or
serious injury.
Indicates a potentially hazardous
situation, which if not avoided, could
result in death or serious injury.
Indicates a potentially hazardous
situation, which if not avoided, may
result in a minor or moderate injury. It
may also be use to alert against unsafe
practices.

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Air Products and Chemicals, Inc. Page 1 - 2
1.1.2 Hazard Types (Symbols)
This symbol is a safety alert symbol.
This symbol represents asphyxiant, toxic or corrosive
gases. Gases used with the Gasguard can cause personal
injury or death.
This symbol can represent one or more of the following
conditions:
Explosive gases! Gases used with the Gasguard can cause
an explosion when combined with air.
The formation for explosive gas mixtures of flammable
gas and air when exposed to an ignition source.
Pyrophoric gases which will ignite spontaneously without
the presence of an ignition source when exposed to air.
Energy release which may result from pneumatic or
hydraulic pressure rapidly escaping from a portion of the
equipment.
This symbol represents flammable gases. Gases used
with the Gasguard can cause flammable atmospheres.
This symbol represents PPE (Personal Protective
Equipment). Proper PPE shall be worn when working
with this system.

Section 1: Safety Warnings
Revision – December 2005 Page 1 - 3
This symbol represents electrical shock hazard.
This symbol warns of potential strain or injury when
lifting cylinders.
This symbol warns of a pinch hazard. This hazard exists
on cabinet doors equipped with automatic closers.
This symbol warns of the possibility of the source system
tipping over if it is not installed properly. Personal injury
could result.
This symbol indicates the need for head protection.
This symbol cautions against the improper anchoring of
cabinets.

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Air Products and Chemicals, Inc. Page 1 - 4
1.2 Important Safety Warnings
Failure to read, understand and follow the
safety information found in this section
could result in personal injury and death.
The operator must read and understand
this safety section before operating the
system. All operating and maintenance
personnel must receive training and
instruction by Air Products and
Chemicals, Inc.
All cylinder storage areas must be
continually monitored with an air quality
monitor to prevent the danger of a
hazardous atmosphere.
Before using the system, review your
company's requirements for use of toxic,
corrosive, flammable, pyrophoric,
oxidizers and inert gas cylinders and
electrically powered equipment. You must
be thoroughly trained in your company's
safety procedures and safety equipment
(self-contained breathing apparatus,
emergency shutdown systems, plant alarm
locations, etc.)