akrometrix Table Top Shadow Moire User manual

Table Top Shadow
Moiré
User Manual

Table Top Shadow Moiré User Manual
Page 2 of 14 40-5000-8100 Rev. A
Akrometrix Proprietary
Information
No reproduction, adaptation,
or translation without prior
written approval.
Warranty
The information contained in
this document is subject to
change without notice.
Akrometrix makes no warranty
of any kind with respect to this
information.
Akrometrix shall not be liable
for any direct, indirect,
incidental, consequential, or
other damage alleged in
connection with the furnishing
or use of this information.
Trademark Credits
Microsoft®, Windows®,
Excel®, and Notepad® are
registered trademarks of
Microsoft Corporation.
TherMoiré® is a registered
trademark of Akrometrix, LLC.

Table Top Shadow Moiré User Manual
40-5000-8100 Rev. A Page 3 of 14
Contents
1Introduction.................................................................................................................4
1.1 Overview.............................................................................................................4
1.2 Warnings and Precautions..................................................................................4
1.3 System Configuration..........................................................................................6
1.4 System Components...........................................................................................6
1.5 Technical Support...............................................................................................8
2System Set-up and Use..............................................................................................9
2.1 System Set-up.....................................................................................................9
2.2 System Shutdown ...............................................................................................9
2.3 Replacing Gratings and Lenses..........................................................................9
2.4 Cleaning a Grating ..............................................................................................9
3Troubleshooting .......................................................................................................10
3.1 Troubleshooting Data Acquisition......................................................................10
Appendix A - Miscellaneous Information..................................................................11
A.1 Equipment Ratings............................................................................................11
A.2 Installation and Assembly..................................................................................11
A.3 Transport...........................................................................................................12
A.4 Disassembly......................................................................................................12
A.5 Maintenance......................................................................................................13
A.6 Camera Lens.....................................................................................................14

Table Top Shadow Moiré User Manual
Page 4 of 14 40-5000-8100 Rev. A
1Introduction
1.1 Overview
The Akrometrix Table Top Shadow Moiré (TTSM) is a small-scale system
designed to measure sample surface warpage at room temperature. It uses a full-field,
non-contact optical technique called shadow moiré in combination with automated image
processing. Samples are measured on a pull-out tray at the base of the unit.
This manual describes the system hardware of the TTSM. Data acquisition is
described in the Surface Measurement User Manual and analysis is described in the
Surface Analysis User Manual. Surface Measurement requires system hardware to
operate and, thus, will only be installed on the TTSM. Surface Analysis may reside on the
TTSM computer and/or on a remote computer.
The main body of this manual emphasizes the system hardware and its operation.
A user unfamiliar with shadow moiré and its applications is advised to first read
Akrometrix Optical Techniques and Analyses 101, and Section 3, Troubleshooting in
order to make best use of the system.
Before operating the system, the user should carefully read Section 1.2.2, which
describes safety and health hazards associated with the system.
Sections 1.3 and 1.4 identify system components and controls. Section 2
describes basic procedures for system setup and shutdown. Section 3 describes basic
troubleshooting.
Appendix A describes recommended procedures for maintenance, transport and
disassembly of the system. This section also contains equipment ratings and technical
support material.
1.2 Warnings and Precautions
1.2.1 Warnings and Notes in this Manual
Warnings and Notes are marked throughout the manual with these icons:
Figure 1.1 Warning Icon
Figure 1.2 Note Icon
Warnings are specific health hazards for the operator or potential sources of damage
to the TTSM system. Notes highlight system limitations or automatic responses that may
require corrective action by the operator for successful operation.
1.2.2 Health and Safety Hazards
Keep hands out of the system during measurements. The grating is motorized, and
there is the potential for pinch points between moving and stationary components,
especially the grating and sample drawer supports. Keep the grating translation
path free from obstruction.

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40-5000-8100 Rev. A Page 5 of 14
Take care when opening and closing the system doors, as pinching is possible
when they are moved.
Do not operate the light sources with the fiber optic bundle connectors removed
from the light source housings.
Do not sit on any part of the system enclosure. Do not place loads greater than 15
kg (33 lbs) on top of the system.
Caution should be exercised when lifting the TTSM. Use two people at all times
and take care to use proper lifting technique when transporting the unit.
Follow transport procedures described in Appendix A.3 when moving the unit.
Removing the back panel exposes all electrical components, and some
components, especially the light source heat sink, can be hot enough to burn if
touched. Make sure that the light has been off for at least 30 minutes before
opening the back panel.
MSDS data sheets for all supplied chemicals are available upon request.
1.2.3 System Operating Precautions
Do not install additional software on the TTSM computer, change computer system
settings, or upgrade system software or hardware without consulting Akrometrix.
Unauthorized modifications can cause problems in normal system operation.
In order to eliminate anyeye, hand, or back strain, adjust the monitor and keyboard
cart for ease and comfort of use. The monitor can be tilted and raised on its
pedestal. The cart can be raised and lowered for proper hand position on the
keyboard.

Table Top Shadow Moiré User Manual
Page 6 of 14 40-5000-8100 Rev. A
1.3 System Configuration
A Line Light
E Heat Sink
I Sample Tray
B Camera
F Door
J Mirror
C Lens
G Sample Drawer
K Grating Support
DLight Source
H Grating
L Motor Stage
Figure 1.3 Overall System Components
1.4 System Components
This system contains four main hardware components.

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40-5000-8100 Rev. A Page 7 of 14
Grating
Sample Drawer
Camera
Light Source
It is important to understand the basic design and operation of these components in
order to fully utilize the system’s capabilities. See the following sections for a brief
description of each component.
1.4.1 Grating
Each TTSM system is provided with a single Ronchi ruled grating with either 100 or
200 lines per inch. These frequencies, when combined with appropriate camera lenses,
allow the user good accuracy at a variety of part sizes and working distances. Please see
Table 1.1 and the Akrometrix Optical Techniques and Analyses 101 document for more
details.
A linear motion stage drives the grating up and down to achieve phase stepping in
the TTSM. The system’s mirror is mounted to the stage assembly, and moves along with
it. A single motor in the back of the unit is attached to a linear motion stage that provides
a 5.08 cm (2 inch) range of travel. A limit switch prevents the motor from operating past
the stage travel limits. Control over the motor is done exclusively using the Surface
Measurement software. Please see the Surface Measurement User Manual for
instructions on its use.
1.4.2 Sample Drawer
Samples are supported by a sliding aluminum tray contained within a drawer which
can be manually extended from the system for easy access. A catch locks the drawer into
place once it is fully pushed inside the machine.
1.4.3 Camera
The system is equipped with a single 2.0 megapixel camera to capture image data.
Multiple of lenses are provided with the camera, allowing the user control over field of
vision and level of zoom. Table 1.1 shows the relationship between lens size, grating
frequency, and maximum field of vision.
Table 1.1 Grating Frequency, Lens Size, and Field of Vision
Grating/Lens
4.4-11 mm Lens
12-36 mm Lens
100 LPI Grating
FOV: 310x300mm
Not compatible
200 LPI Grating
FOV: 302x230mm - 310x300mm
FOV: 206x154mm –276x209mm
1.4.4 Light Source
An LED light source feeds light to a pair of fiber optic line lights which are pointed at
the mirror in the back of the unit. The light source should generally be set to maximum
intensity for shadow moiré tests to maximize contrast.

Table Top Shadow Moiré User Manual
Page 8 of 14 40-5000-8100 Rev. A
1.5 Technical Support
For technical support, contact Akrometrix:
Akrometrix
2700 NE Expressway
Building B, Suite 500
Atlanta, GA 30345
404-486-0880
404-486-0890 (fax)
http://www.akrometrix.com
When contacting Akrometrix, please provide the system serial number, the version
numbers of the Akrometrix software being used, a description of the problem or question,
and contact information for reply. If the question concerns a particular measurement or
analysis, please provide electronic copies of the phase images, reference images, and
final results and a description of dataacquisition and/or analysisconditions. If the problem
concerns changes or failure in general system operation, please describe any events or
system modifications that occurred immediately before the problem arose.

Table Top Shadow Moiré User Manual
40-5000-8100 Rev. A Page 9 of 14
2System Set-up and Use
2.1 System Set-up
1. Turn the TTSM system on.
a. Ensure that the TTSM System is correctly connected to the computer (see
Section A.2).
b. Turn on the light source and ensure that it is set to 100% power.
2. Run Surface Measurement by clicking the Surface Measurement button in the
Studio Manager bar on the left sideof the screen. A start-up splash screen appears
while the software initializes. Refer to the Surface Measurement User Manual for
operating procedures.
3. To access the sample tray, push firmly inward on the front of the sample drawer.
This will release the catch that holds the drawer closed, allowing the sample tray
to be pulled towards the user. Place all samples on the tray so that they are
oriented in line with the tray and parallel with each other.
4. Push the sample drawer closed until the catch engages. The system is now ready
to begin operation.
2.2 System Shutdown
The TTSM has a rocker switch on the back, near the main power cord, that serves
as the master on/off switch.
2.3 Replacing Gratings and Lenses
Both gratings and lenses can be swapped out to change the field of view, data
density, and Z-resolution requirements (see Table 1.1 for details). In order to swap
gratings, open the system doors and carefully lift out the old grating before putting a new
one in its place. To replace a lens, open the door and unscrew the old lens from the
camera, then screw on a new one.
2.4 Cleaning a Grating
Maintaining a clean grating is critical to optimizing measurement resolution and
reducing measurement noise when using shadow moiré. Gratings should be cleaned on
an as needed basis, when dust collects on the top surface or fingerprints are present.
Gratings should be cleaned with a lint free cloth or wipe and typically with a mild glass
cleaner or 30-70% IPA solution. The etched lines in the grating surface are not easily
removed. Users are free to press firmly on the grating and wipe in multiple directions to
clean the grating surface effectively. If the grating is removed for cleaning, be careful not
to drop it, as they are relatively fragile.
Note: Refer to the cleaning product precautions for any
personal protection equipment needed and for disposal
of soiled cloths.

Table Top Shadow Moiré User Manual
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3Troubleshooting
3.1 Troubleshooting Data Acquisition
As with any measurement system, the TTSM has its limitations. These limitations
exist because the shadow moiré technique with phase stepping analysis is sensitive to
the optical properties of the samples measured.
The optical and analytical limitations of the system include:
Failure to obtain good fringe phase information.
Loss of resolution on samples with a wide range of reflectivity.
Fine pitch surface patterns.
For further troubleshooting details, please see the Surface Analysis User Manual as
well as the Akrometrix Optical Techniques and Analyses 101 manual.

Table Top Shadow Moiré User Manual
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Appendix A - Miscellaneous Information
A.1 Equipment Ratings
Electrical
Supply Voltage
100 –240 VAC, 50-60 Hz
Full Load Amp Rating
10 A
Mechanical
Footprint
490 (w) x 531 (d) x 678 (h) mm
Weight
32 kg (70.5 lbs)
A.2 Installation and Assembly
1. The TTSM is designed to be installed atop a table, in a room with a temperature
between 20–26C and humidity between 20-80% non-condensing. The lighting
should not be overly bright, nor so dim that these instructions cannot be read.
2. The TTSM can be lifted and carried by two people, and should be held bythe frame
at the base. Place it on the table where it will be installed.
3. Remove any packing materials attached to the equipment.
4. Unscrew the grating support from the motor stage and remove it.
5. Remove the strap from the motor stage (see Figure A.1 and Figure A.2).
6. Screw the grating support back into place.
7. Install the grating on the grating support.
8. Install the mirror on the back of the grating support.
9. Attach one of the included lenses to the camera. Match the lens with the grating
using Table 1.1.
10.Assemble the monitor and place it on the table next to the unit. Place the keyboard
and mouse on the table.
11.Install the computer where it can be attached to both the monitor and the system.
12.Connect all cables.
a. The TTSM unit and monitor must be plugged into wall sockets.
b. The Ethernet cable on the back of the unit connects to the top Ethernet add-on
card port on the back of the computer.
c. The RS2-32 cable on the back of the unit connects to the S1 port on the
computer’s break-out serial port cable.
d. Monitor cable, keyboard and mouse cables, Ethernet cable to local network
connects to motherboard Ethernet port.

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A.3 Transport
When transporting the TTSM system to a new location, Akrometrix recommends that
certain components be removed from the system and packed separately. These include:
Grating
System Mirror
Camera lenses (place lens caps on lenses, both ends, and a cap over the
exposed camera element)
Other moving parts should be either restrained from movement with zip-ties or
removed and shipped separately, including:
Sample Drawer
Vertical translation stage. There is a metal strap that is shipped installed on the
stage. This should be saved and reused in the event the system needs to be
moved long distance again. Figure A.1 shows the strap attached to the
underside of the motor stage, and Figure A.2 shows the strap in place on the
motor stage.
Figure A.1 Bottom View of Stage Strap Installed
for Shipping
Figure A.2 Front View of Stage Strap Installed for
Shipping
A.4 Disassembly
No special precautions or procedures are required for disassembly or final disposal,
beyond normal care in handling the heavier components. No materials incorporated in
the TTSM are known to require special handling or disposal. The metals used are
aluminum and steel. The outer panels are acrylic.

Table Top Shadow Moiré User Manual
40-5000-8100 Rev. A Page 13 of 14
A.5 Maintenance
A.5.1 Stage Lubrication
A syringe of lubricant called Lubriplate (see Figure A.3) is supplied with each
Akrometrix system. This lubricant should be applied to the stage leadscrews at 6 month
intervals. The procedure to do so is as follows.
Figure A.3 Lubriplate Stage Lubricant
1. Remove the grating carefully from the machine.
2. Remove the mirror from the grating support.
3. Unscrew the grating support and remove it, exposing the motor stage.
4. Using the Surface Measurement application, lower the stage to its bottom position.
The leadscrews will be visible as shown in Figure A.4.
5. Apply a small bead of Lubriplate along the visible portion of the stage leadscrew.
A small flathead screwdriver or wooden coffee stirrer can be used, just take care
to not damage the leadscrew.
6. Raise the stage to its top position.
7. Apply another small bead of Lubriplate along the visible portion of the leadscrew.
8. Jog the stages up and down to their limits several times to ensure that the lubricant
is adequately spread onto the leadscrew.
Warning: Avoid contact with skin and do not inhale.
This product has a NFPA Health rating of 1. In the
event of skin contact, wash with warm water and soap.
A full MSDS is available upon request.

Table Top Shadow Moiré User Manual
Page 14 of 14 40-5000-8100 Rev. A
Figure A.4 Leadscrew Visible with Grating at Top Position
A.5.2 Servicing the Light Source
The LED light source in the TTSM has a serviceable life of ~50,000 hours. If any
problems are encountered with this light source, contact your local Akrometrix
representative for repair or replacement.
A.6 Camera Lens
Clean the lens as needed. The recommended product for cleaning the camera lens
is Tech Spec Lens Cleaner. An eight fluid ounce bottle is included in the accessories kit.
When using this product read and follow all directions and precautions on the bottle.
Warning: Avoid contact with the eyes. This product
has a NFPA Health rating of 1. In the event of eye
contact, rinse immediately with plenty of water for at
least 15 minutes. Seek medical attention if irritation
develops or persists. A full MSDS is available upon
request.
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