Asyst Technologies Advantag 9100 User manual

Rev. AX5 Date: 03/31/2003
Printed on Standard Paper
P/N: 2000-3160-02
Copyright ©2003
Asyst Technologies, Incorporated
All rights reserved.
Preliminary
AdvanTag 9100
AdvanTag Gateway
Technical Manual

Rev. AX5 Draft Page i
AdvanTag 9100 Technical Manual
Disclaimers
a
Disclaimers
This manual may not be reproduced, either wholly or in part, for any reason whatsoever, without prior written permission
from Asyst Technologies, Inc. (“Asyst”). Material contained in this manual is provided for informational purposes and is
subject to change without notice.
If this manual is marked “Preliminary” or “Draft,” then Asyst has not yet released a final version of the manual and the
manual is likely to be incomplete and will be revised. Contact Asyst at the address below to obtain a final copy of the
manual.
Manual Information
PCN: Un-released Version
Part Number: 2000-3160-02
Date: 03/31/2003
Release: x
Printing Description: Printed on Standard Paper.
Asyst Technologies, Inc.
48761 Kato Road
Fremont, California 94538
Telephone: [phone]
FAX: [phone]
Technical Support: 1-800-342-SMIF
Trademarks
Asyst, the Asyst logo(s), FLOUROTRAC, KPOD, ADU and MANUAFACTURING CONNECTIVITY are registered
trademarks ® of Asyst Technologies, Inc.
VERSAPORT, PLUS, INX, ADVAN-TAG, LINK MANAGER, SMART-TAG, SMART-STATION, SMART-STORAGE,
SMART-TRAVELER, SMART-COMM, AXYS, FASTRACK, FASTMOVE, FASTLOAD, FASTORE are trademarksTM of
Asyst Technologies, Inc.
All other product and company names mentioned herein may be trademarks and/or service marks of their respective
owners.
Equipment Modification
Any change, alteration, or modification to this equipment, as well as use of this equipment in a manner inconsistent with its
intended use will void this equipment’s warranty and may render this equipment unsafe for use or unfit for its intended
purposes.
Training and Languages
User training for equipment operation and maintenance is conducted in English. Translators are available on an as needed
basis. English versions of the manuals and other technical materials are provided and reviewed during the training. Please
contact the Asyst Training department or http://www.asyst.com for the training schedule and signup requirements.
Warranty
For warranty information, see Asyst’s Standard Terms and Conditions.

Page ii Draft Rev. AX5
AdvanTag 9100 Technical Manual
Reader Comments a
Reader Comments
We welcome your comments regarding this manual. Your comments and suggestions
help us to improve our publications.
Please send comments and suggestions to:
Asyst Technologies, Inc.
Technical Publications Manager
48761 Kato Rd.
Fremont CA 94538
Or fax: Attention—Tech Pubs Manager at 1-510-661-5185
Or email: T[email protected]
Include the following:
Name:
Company:
Contact Phone # (in case we have questions):
Email:
Document Information (Name of document, Part Number, Revision):
Location of comment (page number or other reference):
Comments: (The more specific the comments, the more useful they are to us.)
Thank you for helping to improve the manuals and to maintain accuracy.

Rev. AX5 Draft Page iii
a
Acronym List
AMHS Automated Material Handling System
ASCII American Standard Coding for Information Interchange
ATR AdvanTag Reader
CAN Control Area Network
CIM Computer-Integrated Manufacturing
EMF Electromagnetic Field
EMI Electromagnetic Interference
EMO Emergency (Machine) Off
ESD Electrostatic Discharge
MID Material IDentification
OEM Original Equipment Manufacturer
PN or P/N Part Number
RFID Radio Frequency IDentification
SECS Semiconductor Equipment Communication Standard
SEMI Semiconductor Equipment and Materials International
SMIF Standard Mechanical Interface

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AdvanTag 9100 Technical Manual a

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Revision History
Date Author Version Revision Information
02/11/2003 Royden Tonomura AX1 Original version
02/27/2003 AX2 Added ECID table
Deleted mounting photos
Added tables for CAN and Ethernet ports
02/28/2003 AX3 Added Gateway information
Updated antenna graphs for tubular antennas
03/07/2003 AX4 Updated power information
Revised Gateway photo
03/31/2003 AX5 Added disclaimers on Node Address panel and antenna
installation

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AdvanTag 9100 Technical Manual
Table of Contents
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Table of Contents
Disclaimers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .i
Manual Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .i
Trademarks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .i
Equipment Modification. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .i
Training and Languages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .i
Warranty . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .i
Reader Comments . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ii
Acronym List. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . iii
Revision History . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .v
Preface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
Purpose and Audience . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
About this Manual . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
Conventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
Safety Tags. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
Chapter 1: General Information. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
Technical Data (Specifications and Outline Drawing) . . . . . . . . . . . . . . . . . . . . . . 5
Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
General Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
Servicing. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
ESD / EMI Precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
Electrical Power/Input Power Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . 7
Environmental . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
Warranty and Liability . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
Location of Labels used on the AdvanTag . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
Chapter 2: Theory of Operation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
AdvanTag Reader. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
AdvanTag Gateway. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
Multiplexing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
Protocols and Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
Message Format and Translation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12

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Table of Contents a
Messages Supported. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
Specifications. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
Features . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
LEDs. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
Baud rates . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
Integration of Parts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
Mounting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
Ports . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
Data Storage—AdvanTag Reader . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
Memory . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
MicroTags . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
AdvanTag Gateway. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
Commands Supported by the Gateway . . . . . . . . . . . . . . . . . . . . . . . . . . 22
Commands Routed to the Heads (ATR 9100s connected on the CAN bus):
22
Code Upgrade Functionality in ATR Gateway . . . . . . . . . . . . . . . . . . . . . 23
Interfaces . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
LEDs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
Power Indicator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
Host Comm . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
Read/Write (9100 Reader only) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
Connectors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
Power . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
Communication . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
Antenna . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
External Presence (9100 Reader only) . . . . . . . . . . . . . . . . . . . . . . . . . . 26
Ethernet (in development) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
Buttons/Switches . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
Reset . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
Code Upgrade . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
Long Range (9100 Reader only) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
Node Address (9100 Reader only). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
Communications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
To Host. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
Read Range . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
SECS/ASCII . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
Serial Communications Interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
CAN Communications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
Ethernet Communications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29

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Table of Contents
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Software. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
Antenna Performance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
Read/Write Performance Factors. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
RF Field Diagrams (9100 Reader only) . . . . . . . . . . . . . . . . . . . . . . . . . . 30
Stick Antennas . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
Chapter 3: Troubleshooting. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
Troubleshooting Chart. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33

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Table of Contents a

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AdvanTag 9100 Technical Manual
List of Figures
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List of Figures
Figure 1 Outline Drawing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
Figure 2 AdvanTag Top View . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
Figure 3 AdvanTag 9100 Gateway . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
Figure 4 ATR Gateway Connectivity with Host and Slave ATRs . . . . . . . . . . . . .11
Figure 5 AdvanTag 9100 Reader LEDs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
Figure 6 Long Range Switch, AdvanTag 9100 Reader, Side View . . . . . . . . . . 27
Figure 7 Node Address Switches (9100 Reader only) . . . . . . . . . . . . . . . . . . . . 28
Figure 8 Stick Antenna 9700-9097-01 (Standard Range only). . . . . . . . . . . . . . 31

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List of Tables
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List of Tables
Table 1 AdvanTag Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
Table 2 Labels. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
Table 3 Attribute Values (ECID and SVID) . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
Table 4 Power Cable Pin Outs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
Table 5 Serial Port Pin Usage. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
Table 6 ATR Errors and Solutions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33

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List of Tables a

Rev. AX5 Draft Page 1
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Preface
Purpose and Audience
This manual describes the Asyst AdvanTag 9100 Reader, also referred to as the ATR
9100, which is part of Asyst’s radio-frequency auto ID system, AdvanTag. The AdvanTag
Reader is an Asyst OEM, SEMI-standard device that reads and writes to tags embedded
in wafer cassettes, pods, FOUPs, reticle boxes, and so on.
This document is intended for user of the AdvanTag system and the ATR 9100. Service is
not applicable to the ATR 9100; see “Servicing” on page 7.
About this Manual
The AdvanTag Reader Manual is organized as follows:
Chapter 1, General Information, provides specifications and describes safety
considerations and labeling for the AdvanTag.
Chapter 2, Theory of Operation, provides an operational overview of the AdvanTag
Reader ATR 9100.
Chapter 3 provides troubleshooting.
An Index is also provided in the back of the manual.
References
This manual uses information from several sources, including application notes and other
internal documentation.

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AdvanTag 9100 Technical Manual
Conventions a
Conventions
The following keyboard conventions and terminology are used.
Safety Tags
Special tags are used in this document to alert technicians to personal and equipment
safety hazards.
Before using this document, a thorough understanding of AdvanTag safety issues
detailed in the AdvanTag Reader ATR 9100 Manual must be understood.
The following types of safety tags appear in this document. Note that the following are
only examples; they do not indicate a specific hazard associated with the AdvanTag.
Example Meaning
Bold User action on keyboard keys or other objects are bold.
Choose The word choose is used for menu choices. Submenus are separated by a
>.
For example: Choose File > Import > File...
Click Refers to mouse actions.
For example: Click the hand icon.
Courier New Font Text displayed on the screen uses Courier New.
DOS and windows path names are displayed in Courier New.
For example: Use the C:\Folder\SubFolder\SubFolder2 to access
this file.
Source code or DOS commands use courier new.
Hexidecimal streams and examples.
Double quotes Used when discussing or describing an action, functional word, or definition.
Folder Used instead of Directory, unless discussing DOS movement commands.
Italic Italics are used to show computer entry from the users keyboard or Teach
Pendant.
Press Shows action by a user on a key or physical button.
For example: Press PF1, then type the file name.
Select Used if the user is to pick from several choices.
For example: Select the lot number from the list supplies.
Type Shows entry.
For example: Type the Product Name and Model Number at the top of the
page. Press Enter.

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AdvanTag 9100 Technical Manual
Safety Tags
a
DANGER
CORROSION HAZARD
DANGERS ALERT PERSONNEL TO POTENTIALLY HAZARDOUS
SITUATIONS WHICH, IF NOT AVOIDED, WILL RESULT IN
SERIOUS INJURY OR DEATH.
WARNING
CORROSION HAZARD
WARNINGS ALERT PERSONNEL TO POTENTIALLY HAZARDOUS
SITUATIONS WHICH, IF NOT AVOIDED, MAY RESULT IN SERIOUS
INJURY OR DEATH.
GENERAL HAZARD
CAUTION
STANDARD CAUTIONS—AS OPPOSED TO EQUIPMENT-DAMAGE
CAUTIONS SHOWN BELOW—ALERT PERSONNEL TO
POTENTIALLY HAZARDOUS SITUATIONS WHICH, IF NOT
AVOIDED, MAY RESULT IN INJURY.
CAUTION
THESE CAUTIONS ALERT PERSONNEL TO SITUATIONS THAT
MAY LEAD TO EQUIPMENT DAMAGE. FAILURE TO FOLLOW
DIRECTIONS WILL RESULT IN DAMAGE TO THE EQUIPMENT
AND/OR DAMAGE TO RELATED PRODUCTS (E.G., WAFERS)
AND VOIDING OF WARRANTY.
NOTE . . .
NOTES EMPHASIZE, OR EXPAND UPON, THE PRESENTED INFORMATION.

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Chapter 1: General Information
Technical Data (Specifications and Outline Drawing)
TABLE 1 AdvanTag Specifications
Width 115.06 mm (4.53 inches)
Depth 41.15 mm (1.62 inches)
Height 40.39 mm (1.59 inches)
Weight TBD
Communications Serial RS-232, Ethernet, CANbus
• Protocols: ASCII, CIDRW SECS, HSMS, CAN Open
Host Protocols supported: ASCII, CIDRW SECS, HSMS
Power Reader: 24 VDC (± 10%);
500mA maximum (short range mode), 1 Amp maximum (long range
mode)
Gateway: Reader: 24 VDC (± 10%); 300mA
Environmental Operating Temperature 0°to 30° C (non-condensing)
Operating Humidity 30%- 95% (non-condensing)
Storage Temperature 0° to +55° C
Storage Humidity 5%- 90%
Mounting Mounting hardware and mounting pattern provided