Asyst Technologies VersaPort 2200 User manual

Tool Picture
Rev. C Date: 6/12/2007
Printed on Cleanroom Paper
P/N: 2000-1252-01
Copyright ©2007
Asyst Technologies, Incorporated
All rights reserved.
VersaPort 2200
Technical Manual

Released Rev. C 2000-1252-01 Page iii
a
Disclaimers
This manual may not be reproduced, either wholly or in part, for any reason whatsoever, without prior written permission
from Asyst Technologies, Inc. (“Asyst”). Material contained in this manual is provided for informational purposes and is
subject to change without notice.
If this manual is marked “Preliminary” or “Draft,” then Asyst has not yet released a final version of the manual and the
manual is likely to be incomplete and will be revised. Contact Asyst at the address below to obtain a final copy of the
manual.
Manual Information
PCN: 08479
Part Number: 2000-1252-01
Date: 6/12/2007
Release: Rev. C
Printing Description: Printed on Cleanroom Paper.
Asyst Technologies, Inc.
46897 Bayside Parkway
Fremont, California 94538
Telephone: [phone]
FAX: [phone]
Technical Support: 1-800-342-SMIF
Trademarks
Asyst, the Asyst logo(s), and MANUAFACTURING CONNECTIVITY are registered trademarks ® of Asyst Technologies,
Inc.
VERSAPORT, INX, LINK MANAGER, SMART-TAG, SMART-TRAVELER, SMART-COMM, are trademarksTM of Asyst
Technologies, Inc.
All other product and company names mentioned herein may be trademarks and/or service marks of their respective
owners.
Equipment Modification
Any change, alteration, or modification to this equipment, as well as use of this equipment in a manner inconsistent with its
intended use will void this equipment’s warranty and may render this equipment unsafe for use or unfit for its intended
purposes.
Training and Languages
User training for equipment operation and maintenance is conducted in English. Translators are available on an as needed
basis. English versions of the manuals and other technical materials are provided and reviewed during the training. Please
contact the Asyst Training department or http://www.asyst.com for the training schedule and signup requirements.
Warranty
For warranty information, see Asyst’s Standard Terms and Conditions.

Page iv 2000-1252-01 Released Rev. C
VersaPort 2200 Technical Manual
Reader Comments a
Reader Comments
We welcome your comments of this manual. Your comments and suggestions help us
improve our publications.
Please copy and return to:
Asyst Technologies, Inc.
Technical Publications Manager
46897 Bayside Parkway.
Fremont CA 94538
Or fax: Attention—Tech Pubs Manager at 1-510-661-5157
Or E-mail: T[email protected]
Name:
Company:
Contact Phone # (in case we have questions):
Email:
Location of comment (page number or other reference):
Comments: (The more specific the comments, the more useful they are to us.)
Thank you for helping us to make the manuals better and to maintain accuracy.

Released Rev. C 2000-1252-01 Page v
a
Revision History
Date Author Version Revision Information
6/12/2007 R. Tonomura/ S. Sondergaard/
K. Kellerman
C Release ECN 08479
Updated content with engineering
changes, and reviewer comments, and
similar material.
Added procedure for replacing Printed
Circuit Board
Added notes on removing VersaPort from
Host Tool.

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Released Rev. C 2000-1252-01 Page vii
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Acronyms
BOM Bill of Materials
CAP Corrective Action Procedure
CSP Corrective Service Procedure
ECN Engineering Change Notice
IR Infrared
ISIM Indexer Simulation Software
MCBF Mean Cycles Between Failures
MRP Multiple Reticle Pod
MSC Micro Station Controller
PIO Parallel Input/Output
P/N (or PN) Part Number
PSP Preventive Service Procedure
RFID Radio Frequency Identification
SAM Smart Arm Master

VersaPort 2200 Technical Manual
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Table of Contents
Disclaimers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . iii
Manual Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . iii
Trademarks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . iii
Equipment Modification. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . iii
Training and Languages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . iii
Warranty . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . iii
Reader Comments . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .iv
Revision History . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .v
Acronyms . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .vii
Table Of Contents . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ix
List Of Figures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . xv
List Of Tables . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . xvii
Preface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
Core Products . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
Audience . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
About this Manual . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
Conventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
Chapter 1: Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
General Safety Identifiers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
Responsibility . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
ESD/EMI Precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
EMO & Electrical Power . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
Equipment Lockout/Tagout Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
Laser Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
User . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
Service Technician . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
Safety Interlocks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
Laser Interlock . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

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Seismic . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
Pinch Points. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
Labeling. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
Description of Labels used on the VersaPort . . . . . . . . . . . . . . . . . . . . . . . . 12
Location of Labels used on VersaPort Models . . . . . . . . . . . . . . . . . . . . . . 15
Chapter 2: Theory of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
Operating Sequence . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
Staging Sequence . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
Self Test. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
VersaPort Components. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
Mechanical. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
Port Door . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
Electronics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
Electrical Power . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
CPU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
Program Memory . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
SRAM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
Quad-Serial I/O . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
Interlocks, Parallel, I/O . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
Digital I/O . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
Interrupt Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
Laser Detector System. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
Excessive Wafer Protrusion Sensor, Vertical View . . . . . . . . . . . . . . . . . 26
Motor Controls . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
Port Plate Elevator and Cassette Shuttle Motors. . . . . . . . . . . . . . . . . . . 27
Pod Latch and Wafer Seater Motors . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
Pod-Door Lock/Unlock Motor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
Air Exhaust Motor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
Status Indicators . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
Power Indicator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
Ready Indicator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
Pod-in-Place Indicator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
Communications Interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
Serial Communications Interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
Parallel Communications Interface. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
NOVRAM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31