ATO MF5000 Series User manual

ATO MF5000 Series
MEMS Mass Flow Meters
MEMS FLOW SENSING PRODUCTS
User Manual (VC.2)

1
RESTRICTION ON USE
This meter is manufactured for general purpose industrial applications for flow
measurements. Do not alter any hardware and software of the product. Any
modifications might cause damage and unexpected events.
All practices for electronic device safety should apply.
Do not use this product in any environments where human safety may be at risk.
Only a qualified person from ATO or a person who is accredited by ATO can
perform troubleshooting services to the product, ATO is otherwise not liable
for any consequences thereafter.
1.
2.
4.
SAFETY PRECAUSION
The product can be utilized to measure and/or monitor in-line mass flow rate of
any clean, dry and preferably constant concentration gases in industrial
applications. For other special gases or variable concentration gases, the
product may not function properly or even can be damaged. Please contact
ATO for further information.
The operational environments of the product are illustrated in the section of
product specifications. If the product is used for other circumstances, the
product may not function properly or even can be damaged.
Operation, installation, storage, and maintenance of the product must strictly
follow the instructions illustrated in this user manual. Otherwise, unpredicted
damage and even injuries or other severe situations could be induced. All the
installation, storage, and maintenance of the product must be performed by
skilled workers. This user manual should be placed near the product for easy
access.
Before using the product, the user should read this user manual completely and
in details so that the user is well understand all the important instructions.
It is recommended that the product should be re calibrated and serviced in‐
every two years or at a time of desire.
1.
2.
3.
3.
4.

2
RESTRICTION ON USE ..........................................................................................
SAFETY PRECAUSION ..........................................................................................
Contents ................................................................................................................
1 Overview ...........................................................................................................
2 Models and Selection .........................................................................................
3 Product Description ...........................................................................................
4 Specifications ....................................................................................................
5 Installation ........................................................................................................
5.1 Physical Dimensions ......................................................................................
5.2 Installation Instructions .................................................................................
5.3 Attentions .....................................................................................................
6 Operation and Communication ...........................................................................
6.1 Cable Definition ............................................................................................
6.2 LCD Display .................................................................................................
6.3 RS485 Communication ....................................................................................
6.4 4~20mA Output .............................................................................................
6.5 Pulse Output .................................................................................................
6.6 Setup via Buttons ...........................................................................................
7 Safety and Maintenance ........................................................................................
7.1 Wetted Materials and Compatibility .................................................................
7.2 Safety Precautions .........................................................................................
7.3 Maintenance .................................................................................................
8 Warranty ...........................................................................................................
9 Customer Service and Order information .............................................................
Contents
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1. Overview
MF5000 series mass flow meters are specially designed for small pipe flow monitoring and control.
The series can measure gas flow in a pipe diameter as small as 3 mm, but not over 19 mm. With the
self-flow conditioning feature of the MEMS sensor package, the meters feature an extremely low
pressure loss compared to the traditional by-pass thermal mass flow meters in this application scope.
The accuracy of the meters are generally (1.5+0.5FS)% or better depending on the requests. The±
meters can work at an environment of -20 to 60 C and pressure up to 1.5 MPa. Applications include
semiconductor gas process monitoring and control, hospital oxygen gas monitoring, etc.
MF5000 Series MEMS Mass Flow Meters feature:
wHighly sensitive, measuring as low as 8 mm/sec, and as high as 65 m/sec with a single assembly
wDirectly sense mass flow using thermal mass flow principle
wProprietary MEMS sensor package design for better reliability
wStandard 12 ~ 24 Vdc power supply
wLow pressure loss forreducing energy cost
wIndustrial standard Modbus protocol for easy networking and remote control
The MEMS calorimetric sensor is installed at the flow channel wall forming a plate that serves as an
additional flow conditioner from the boundary layer configuration resulting in a laminar flow. The mass
flow measurement is established as the fluid carries heat away from the heater causing the redistribution of
the temperature field. Accurate flow rate is obtained by calibration with the standard fluid at the preset
conditions.
Flow direction
Free stream
Laminar
Turbulent
Sensor
Working Principle and Package
Time-averaged velocity profile boundary layer

4
2. Models and Selection
3. Product description
The parts are illustrated as below:
User Interface
Display
Meter body
External connection
Flow direction
Typical flow range:
Model DN Connection
Flow range*
* There is flow rate number only for unit SLPM. If other unit is selected, there must be flow rate number with unit together.
* For CO , flow range are 0.15~10, 0.5~40, 1.2~80, 3~200 and 8~600 SLPM.
2
Gas (A - air; C - CO ; N - N ; O - O ; R - Ar;
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Output (A - 4~20mA; B - RS485; D - pulse/ 0~5V;
Options: N for with Ex proof model;
N, B, AB, BD, ABD for without Ex proof model)
Maximum working pressure (15 - 1.5MPa )
for other gases, please contact ATO.)
Display (D - with LCD display)
Maximum flow rate* (See below table)
Minimum flow rate* (See below table)
Proof (E - with Ex proof; e - without Ex proof)
Connection (N - NPT)
Flow channel diameter (mm, see detailed as below table)
Product series name
MF50 N15
In addition to the models listed, we can also provide customized products that will be tailored to
customers' very needs. For further information, please contact manufacturer. The meters are made by
referencing to: ISO14511.
D

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5. Installation
5.1 Physical Dimensions
4. Specifications
Accuracy (1.5+0.5FS)%;±
Working Temperature -20~65 C;
o
Working Pressure <1.5 MPa;
Humidity 95%RH;≤
Power supply 1 ~ 4 VDC 50mA;,22
Interface 4~20mA/RS485/Pulse
Mechanical Connection NPT;
Display Mass flow, accumulated mass flow;
Calibration Air@20 C, 101.325 kPa ( other gases upon request);
o
Ex Proof Ex ia IIC T4
Protection IP40
3.0
6.0
8.0
12.0
19.0
MF5006
MF5003
MF5012
MF5008
MF5019
L
118
124
124
150
182.5
H
151
156
156
144
144
1/8"
1/4"
3/8"
1/2"
3/4"
W
38
38
38
40
40
d
Ф3
Ф6
Ф8
Ф12
Ф19
c
36
36
50
50
70
D
(-)NPT M
DN
()mm
Model
H1
35
40
40
28
28
D (Both sides)
88
H1
H
4-M4 7
L
24
c
d
W

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5.2 Installation Instructions
The product at the time of shipment is fully inspected for product quality and meets all safety
requirements. Additional safety measures during the installation should be applied. This includes,
but is not limited to leakage verification procedures, standard EDS (electrostatic discharge)
precautions, DC voltage precautions, and heavy duty precautions. Other tasks such as calibration,
part replacement, repair, and maintenance must only be performed by trained personnel. Upon
requests, manufacturer will provide necessary technical support and/or training of the personnel.
Do not open the product cover or alter any part of the product. Any such actions will forfeit the terms
of the warranty and cause the liability to any damages thereafter.
The product is preferably to be installed horizontally. Flow direction should be aligned with the
arrow mark on the meter body. If the flow fluid may have particles or debris, a filter is strongly
recommended to be installed upstream of the meter.
Please follow the following steps to complete the installation:
a) Upon opening the package, the product physical integrity should be inspected to ensure no visual
damage.
b) Before installation of the product, please ensure that the pipe debris or particles or any other
foreign materials are completed removed.
c) Cautions during installation:
(i) It is preferably to first install the inlet end of the meter and then the outlet end of the meter; To
ensure the measurement accuracy, an upstream straight pipe of length no less than 10DN and a
downstream straight pipe of length no less than 5DN should be in place.
(ii) If there is requirement of different pipe size at either upstream or downstream, the size of the
pipe diameters should be larger than that of the selected meters. Please see detailed as below:
M
10DN 5DN
Filter Upstream Flow Meter
Flow Direction
Downstream
15DN 10DN
( a ) 90 degree elbow or T-piece
Flow Direction
M
20DN 10DN
( c ) 2 x 90 degree elbow
Flow Direction
M
( b ) Reduction
15DN 5DN
Flow Direction
M
30DN 10DN
( d ) Expansion
Flow Direction
M

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(iii)During installation, please make sure no any foreign materials (such as water, oil, dirty,
particles, etc.) falling into the pipe.
d) Connect electrical wires for LCD, and then electrical wires for inputs/outputs. Please pay special
attention to power supply range (i.e., +12~+24 VDC) and power supply polarization (see the
description on Electrical Interfaces in this manual).
e) When connect the communication wires, please make sure that the wires are correctly connected
to the proper ports on your data device/equipment.
f) Turn on the power supply, and make sure that the LCD works correctly.
g) Slowly open the valves at the both ends of the pipeline, and the meter should then start to measure
the flow in the pipeline
h) Completion of the installation.
5.3 Cautions
a) Welding the pipe while the meter is installed is prohibited;
b) Any foreign materials in the pipeline after installation may cause irreversible damage;
c) Seal gaskets must not block flow channel otherwise accuracy cannot be maintained;
d) The meter should be properly grounded via the electrical connection;
e) After installation, severe force applied to the meter may cause damage;
f) Severe vibration or very strong magnetic field may cause malfunction.
( f ) Control valve
40DN 5DN
Flow Direction
M
( e ) 2 x 90 degree elbow, 3-dimensional
40DN 10DN40DN 10DN
Flow Direction
M

Figure 6-4. 4~20mA External Connection
4~20mA LOOP Violet(+ ),
4~20mA GND LOOP Transparent(- ),
0
100
200
300
400
500
600
700
800
900
12 14 16 18 20 22 24
R
L
(Ω)
Power supply(V)
aviable
0
1
2
3
...
Vdc
1 2 3 4 5 n n+1 n+2 n+3 ...
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6.1 Cable Definition
The electrical interfaces are defined as Figure 6-1:
6.2 LCD Display
Normally, the LCD display looks as Figure 6-2:
A standard litre (SL) represnts a litre of the
measured gas at 20ºC and 101.325 kPa.
6.3 RS485 Communication
For purposes of computer control and networking, the RS485 is
used for communication with the following settings:
Baud rate (Bits per second): 57600( )P0, Single-device communication
9600( )P1 & P2, Multi-device communications
Date bits: 8; Stop bits: 1;
Parity: None; Flow control: None.
For customers who use 4~20mA output. The connection of the loop load resistor is illustrated as
Figure 6-4: 24R max =850
L（） Ω( )Vdc power supply
6.4 4~20mA Output
The pulse output is in the form of even square wave that is composed of 3.3V signal high and 0V
signal low , and each pulse can be programmed to 0.001Nm , 0.01Nm , 0.1Nm or 1Nm ,
6-5 3333 ()Figure
respectively. .(default is 1Nm )
3
6.5 Pulse Output
Alarm code Figure():E1~E5 6-3
E1 Sensor error
E2 ADC error E4 EEPROM error
E3 RTC error E5 Crystal error
Figure 6-3. Error alarm display
6. Operation and Communication
M
Figure 6-2. Normal Display
Total – accumulated flow
Nm – Normal m
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Flowrate at Instant flow
SLPM – standard litre per minute
M
Figure 6-5. Even square wave of accumulated flow
Pin Definition Color
1 4~20mA output Purple
2 RS485(B) Brown
3 4~20mA GND Colorless
4 Pulse output Yellow
5 Pulse GND White
6 N.C. Blue
7 RS485 (A) Green
8 Ground (Common) Black
9 Power supply ( ) Red+
User Interface DB-9 (Male)
12 3 45
67 8 9
Figure 6-1. User Interface

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6.6 Setup via Buttons
6.6.1 Button definition
6.6.2 Operation
(1) The user interface (Figure 6-6):
Figure 6-7 Password menu Figure 6-8 Function setup menu
In the password menu, the flow measurement will not be interrupted, whereas the first line of the LCD
display will show the password menu as Figure 6-8:
The password consists of six numeric digits. The blinking digit can be assigned a numeric
value, which can be selected from 0-9 through the up/down buttons .
Selection/confirmation of a setting
Scroll up the setup menu
Scroll down the setup menu
Three buttons:
Caution: If you want change any settings, please refer to the manual, otherwise the
meter maybe work abnormally.
After selecting a desirable value, press to conform the selection, and the proceed to
the next digit.
After the password is correctly set, the meter enters the function setup menu. Otherwise,
the meter returns back to the user mode. ()NOTE: The default password is 11111
(2) Password interface (Figure 6-7):
(3) Function setup menu (Figure 6-7):
Button is used for function selection. After press it, the menu asks for password (authentication mode).
A
“qUIT”, exit from the setup mode (this is the default option).
Figure 6-6 User Interface
M
B
“UnITACC” select,accumulated flow units.
Press the display will show the accumulated flow units menu; if the value is “--n3--”, the accumulated,
flow unit is Nm ; if the value is “--SL--”, the accumulated flow unit is SL.
3
Press to switch in two units.
After selection, press to confirm and exit.

(4) Communication Modes switches Figure 6-9 Figure 6-10（， ）
A. From toSingle-device communication
Multi-device communication
Set the address of the meter(value of )
as (3).E. such as 255;
Set the meter to Multi-device communication
mode (select value of to P1-255 or P2-255)
as (3).D;
After setting, the address will show on the LCD.
B. From toMulti-device communication
Single-device communication
After setting, no address will show on the LCD.
Figure 6-10 Single-device communication mode
Set the meter to Signal-device communication
mode (select value of to P0-000) as (3).D;
Figure 6-9 Multi-device communication mode
E“SET GCF” Set the gas correction factor. See detailed operation in Figure 6-11.,
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M
M
G“SET Addr” Set the address for,.Multi-device communication mode
H
Notes: Please remember the new password and placed it properly.
I“OFFSET” reset the offset of the meter.,See detailed operation in Figure 6-11.
J“CLEAr ACC” reset the flow accumulation reading to zero.,
“SET PAS” Set the password.,
C“UnITTyPE” select,instant flow units.
Press the display will show the instant flow units menu; if the value is “--n3--”, the instant,
flow unit is Nm /h; if the value is “--SL--”, the instant flow unit is SLPM.
3
Press to switch in two units.
After selection, press to confirm and exit.
D“InTErVAL” set response time.,
Press the display will show the response time (default value is 125 ms).,
Press to set as other response time, 250 ms, 500 ms, 1000 ms (1 s), 2000 ms (2 s), 4000 (4 s).
After selection, press to confirm and exit.
F“PrOTOCOL” select communication .,protocols.
Press the display will show the protocol menu; P0-000 means mode 0, it is Single-device,
communication mode; P1-xxx (between 001 and 255) means mode 1, Modbus mode , it is Multi-device
communication mode. P2-xxx (between 001 and 255) means mode 2, reserved, it is Multi-device
communication mode. (e.g, P1-153 means the meter is working in Multi-device communication mode,
protocol is Modbus, and the address is153.)
Press to switch in two communication modes.
After selection, press to confirm and exit.
See detailed operation in Figure 6-11.
Notes: The default address is 255.

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Figure 6-11 Button operation
/
Push
Instant flow unit
/
Fn
Fn
Fn
Push
Push Push Push
/
Push
SL
shows
Nm
3
shows
/
Response time
1000ms
Fn
Push
Push
Normal display
Input password
Default 1:111 1
Correct?
Set Password
Auto clear the flow accumulation
Quit
Clear the
flow accumulation
Fn
Fn
Set 485RS
protocol
Protocol A
(Single-device)
shows P0-000
Set address
for Modbus
Auto offset calibration
Set Offset
/
/
/
/
/
/
/
Fn
Fn
Fn Fn
Fn
Fn
Fn
Set response time
Fn
/
Fn Fn
Set Gas
correction factor
Detailed operation
/
Fn
Response time
125ms
/
Response time
250ms
/
Response time
500ms
Response time
2000ms
/
Response time
4000ms
Fn
Fn
Fn
Push
Push
Push
Push
Push
Push
Push
Push
PushPush
Push
Push
Push
Push
Push
Push
Push
Push
Push
Push
PushPush
Push Push
Push
Push
Push
Push
Push
No
Yes
Detailed operation
Detailed operation
Protocol B
(Modbus)
shows P1-xxx
/
Push
Instant flow unit
/
Fn
Fn
Fn
Push
Push Push Push
/
Push
SLPM
shows
Nm /h
3
shows
No
Don’t clear the
flow accumulation
/
Fn
Fn
Fn
Push
Push Push Push
Yes
Clear the
flow accumulation
No
Don’t set offset
/
Fn
Fn
Fn
Push
Push Push Push
Yes
Set offset
/Fn
Push
Protocol C
(Reserved)
shows P2-xxx
Push
Fn
Push
No
Don’t set GCF
/
Fn
Fn
Fn
Push
Push Push Push
Yes
Set GCF

7.Safety and Maintenance
7.1 Wetted Materials and Compatibility
The meter body and pipe are made of 304 stainless steel. Sensors comprise of silicon, silicon nitride
and silicon dioxide and the sensor surfaces are passivated with silicon nitride and silicon dioxide. The
electronic sealing is provided by RTV (room temperature vulcanizing) silicone sealant WR-704
composed of HOCH3(SiO)nCH3H.
7.2 Safety Precautions
The product is designed for use with general purpose gases such as air and nitrogen. It is advised that
the products are best used for non-explosive clean gases. The sensors cannot be used for gas
metrology of fluoride or fluoride containing gases. For updates of the product
certification information, please contact manufacturer or visit www.ato.com. Use for other
gases such as extreme corrosive and toxic may cause the product malfunctioning or even
severe damages. The product sealing is ensured to work under working pressure of 1.0 MPa and is
leakage proof before the shipment. But cautions and further leakage test are important at
installation as well since any leakage could cause severe safety issue. The power supply for this
product is 12~24 VDC, all precautions and measures for electrical voltage handling must apply.
Attention: any alternation and/or improper use of the product without the permission of the
manufacturer can cause unpredicted damages and even injuries or other severe
situations. ATO or any of its employees, subsidiaries shall not be hold and indemnified
against such consequences due to such circumstances via improper use of the product.
7.3 Maintenance
Attention: without prior permission of the manufacturer, please do not attempt to alter any
parts of the product as it may cause unrecoverable damages. If there are questions or doubts,
please contact manufacturer immediately before further actions. Please ensure the DC power is
off before disassembling the sensor.
All maintenance of the sensor should be done by trained and certified personnel by ATO.
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8. Warranty
ATO warrants the products sold hereunder, properly used and properly installed under normal
circumstances and service as described in the user's manual, shall be free from faulty materials or
workmanship for 180 days for OEM products, and 365 days for non-OEM products from the date of
shipment. This warranty period is inclusive of any statutory warranty. Any repair or replacement
serviced product shall bear the same terms in this warranty.
ATO makes no other warranty, expressed or implied and assumes no liability for any special or
incidental damage or charges, including but not limited to any damages or charges due to installation,
dismantling, reinstallation or any other consequential or indirect damages of any kind. To the
extent permitted by Law, the exclusive remedy of the user or purchaser, and the limit of ATO's
liability for any and all losses, injuries or damages concerning the products including claims
based on contract, negligence, tort, strictly liability or otherwise shall be the return of products
to ATO, and upon verification by ATO to prove to be defective, at its sole option, to refund,
repair or replacement of the products. No Action, regardless of form, may be brought against ATO
more than 365 days after a cause of action has accrued. The products returned under warranty to
ATO shall be at user or purchaser's risk of loss, and will be returned, if at all, at ATO's risk of
loss. Purchasers or users are deemed to have accepted this limitation of warranty and liability,
which contains the complete and exclusive limited warranty of ATO, and it shall not be
amended, modified or its terms waived except by ATO's sole action.
This warranty is subject to the following exclusions:
a). Products that have been altered, modified or have been subject to unusual physical or electrical
circumstances indicated but not limited to those stated in the user's manual or any other actions
which cannot be deemed as proper use of the products
b). ATO does not provide any warranty on finished goods manufactured by others. Only the
original manufacturer's warranty applies.
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