ATONARP ASTON IMPACT User manual

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ASTON IMPACT PRODUCT MANUAL, USM-980-0003, REV.A
ASTON IMPACT
PRODUCT MANUAL
April 2022
Software Version: 1.0
Document Version: 1.0

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ASTON IMPACT PRODUCT MANUAL, USM-980-0003, REV.A
Copyright © 2022 Atonarp Inc.
The contents of this document are protected by copyright laws and
international treaties. Any reproduction, distribution or duplication of this
entire document, or portion of this document, in any form or by any means,
without the prior written consent of ATONARP is prohibited. Additionally, the
contents of this document are protected by contractual confidentiality
obligations. Atonarp products provided are subject to US and Japan Export
Regulations. Transfer of Atonarp products contrary to US and Japan laws is
prohibited.
Atonarp® is a trademark of Atonarp Corporation.
Atonarp U.S. Inc. 5960 Inglewood Dr. Suite 100
Pleasanton, CA 94588, USA
[email protected]
Atonarp Inc.
PMO Shibadaimon 9F, 1-10-18 Shibadaimon,
Minato-Ku, Tokyo
105-0012 JAPAN
Aston Impact Product Manual v. 1.0. 5/20/2022, Software version 1.0

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ASTON IMPACT PRODUCT MANUAL, USM-980-0003, REV.A
Revision History
Revision
ECO
Change Log
Author
A
ECO-001XX
No content change in this guide
Vinay Kulkarni

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ASTON IMPACT PRODUCT MANUAL, USM-980-0003, REV.A
TABLE OF CONTENTS
1. Introduction
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1.1 About Aston Impact
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1.2 Document Scope
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1.3 Intended audience
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1.4 Software release notes
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1.5 Document version history
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1.6 Safety guidelines
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1.7 Notational conventions
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1.8 Unit conventions
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1.9 Document support
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1.10 Customer support
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2. Specifications
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2.1 Electrical specifications
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2.2 Technical specifications
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2.3 Environmental specifications
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2.4 Physical dimensions
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3. Physical Overview
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3.1 Rear panel
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3.1.1 Remote IN (DSUB9 Male)
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3.1.2 Remote OUT (DSUB9 Female)
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3.2 Side panel
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3.3 System LEDs
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ASTON IMPACT PRODUCT MANUAL, USM-980-0003, REV.A
4. System Components and Operation
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4.1 Ion source
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4.2 Mass filter
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4.3 Detector
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4.4 Vacuum (Quadrupole) chamber
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4.5 Process and pressure measurement and regulation
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4.6 Quadrupole pressure sensor
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4.6.1 Pressure sensor specification
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4.7 Sensor heater
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4.8 Controllers
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4.8.1 Main controller
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4.9 Pumping system
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5. Legal Information
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5.1 Liability
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5.2 Licenses, trademarks, and copyright
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6. Abbreviations
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7. Quick Access to Impact Files
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8. Glossary
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