BOC Edwards EXDC Series User manual

D396-40-880
Issue F
Manor Royal, Crawley, West Sussex, RH10 2LW, UK
Telephone: [phone] Fax: [phone]
http://www.bocedwards.com
Instruction Manual
EXDC Turbomolecular Pump
Drive Modules
Description Item Number
EXDC80 Turbomolecular Pump Drive Module D396-40-000
EXDC160 Turbomolecular Pump Drive Module D396-41-000

CONTENTS
Section Title Page
1 INTRODUCTION 1
1.1 Scope and definitions 1
1.2 Description 2
1.3 Logic interface 2
1.4 Indicator LEDs 2
2 TECHNICAL DATA 4
2.1 Operating and storage data 4
2.2 Mechanical data 4
2.3 Electrical data 4
3 INSTALLATION 7
3.1 Unpack and inspect 7
3.2 Adjust the electrical connector position (optional) 7
3.3 Fit the EXDC to the EXT pump 7
3.4 Electrical connections 8
3.4.1 Introduction 8
3.4.2 Connect the logic interface to your control equipment 8
3.4.3 Connect the electrical supply 10
4 OPERATION 11
4.1 Start-up 11
4.2 Operation with high inlet pressure or temperature 11
4.3 Normal shutdown 12
4.4 Shut down due to pump under or over-speed 12
4.5 Electrical supply failure 13
5 MAINTENANCE 14
5.1 Introduction 14
5.2 EXDC LED fault find
ing 14
6 STORAGE AND DISPOSAL 15
6.1 Storage 15
6.2 Disposal 15
RETURN OF BOC EDWARDS EQUIPMENT
EXDC Turbomolecular Pump Drive Modules i

Illustrations
Figure Title Page
1 The EXDC 3
2 Dimensions (mm) 5
3 Schematic diagram of the logic interface connections 9
Tables
Table Title Page
1 Logic interface connector pins 8
2 EXDC LED fault finding 14
Associated Publications
Publication Title Publication Number
EXT Pump Accessories B580-66-880
EXT70 and EXT250 Turomolecular Pumps B722-01-880
EXT351 and EXT501 Turbomolecular Pumps B727-20-880
EXT70H, EXT70Hi, EXT250H and EXT250Hi
Compound Molecular Pumps B740-01-880
EXT255H and EXT255Hi
Compound Molecular Pumps B753-03-880
ii EXDC Turbomolecular Pump Drive Modules

1 INTRODUCTION
1.1 Scope and definitions
Thismanualprovidesinstallation,operationandmaintenanceinstructionsforthe
BOC Edwards EXDC80 and EXDC160 Turbomolecular Pump Drive Modules
(abbreviatedtoEXDCintheremainderofthismanual). YoumustusetheEXDC
as specified in this manual. If you do not, the protection provided by the EXDC
may be impaired, or you may damage the EXDC, or cause injury to people.
Read this manual before you install and operate the EXDC. Important safety
informationishighlightedasWARNINGandCAUTIONinstructions;youmust
obey these instructions. The use of WARNINGS and CAUTIONS is defined
below.
WARNING
Warnings are given where failure to observe the instruction could result in
injury or death to people.
CAUTION
Cautions are given where failure to observe the instruction could result in
damage to the equipment, associated equipment or process.
The units used throughout this manual conform to the SI international system of
units of measurement.
In accordance with the recommendations of IEC1010, the following warning
symbols appear on the EXDC:
Caution - refer to accompanying documents
Caution - hot surface.
EXDC Turbomolecular Pump Drive Modules 1

1.2 Description
TheEXDC controls the electrical supplyfor a BOC Edwards EXT70,EXT70H,
EXT250, EXT255H, EXT351 or EXT501 turbomolecular pump.
The EXDC has no manual controls and can only be operated through the logic
interface. To operate the EXT pump, you must therefore connect the EXDC to
your own control equipment and electrical supply (see Figure 3).
TwomodelsofEXDCareavailable,theonlydifferencebetweenthetwomodelsis
the output power provided to the EXT pump: see Section 2.
1.3 Logic interface
TheEXDC has a9-way logic interface connector on the endof the logicinterface
cable (Figure 1, item 3). You must use a suitable connector mating half (not
supplied) to connect the EXDC to your own equipment: refer to Section 2.3 for
theconnectormating-halftypeandtoSection3.4fortheelectricalconnections.
Refer to Table 1 and Figure 3 for detailed information about the logic interface
connector pins and their uses.
1.4 Indicator LEDs
Refer to Figure 1. The EXDC has four indicator LEDs, as follows:
Phase LEDs (4) These red LEDs are on when the corresponding
phase output to the EXT pump motor is on.
TMP Normal LED (5) Thisgreen LED isonwhenthe EXT pumpis80%or
more of full rotational speed.
You can use these LEDs as an aid to fault finding: refer to Section 5.2.
2EXDC Turbomolecular Pump Drive Modules

EXDC Turbomolecular Pump Drive Modules 3
Figure 1 - The EXDC
1. Grub screw
2. Cooling fins
3. Logic interface cable
4. Phase LEDs (red)
5. TMP Normal LED (green)
6. Connector lock
7. Unlocked position
8. Locked position
9. EXT pump connector

2 TECHNICAL DATA
2.1 Operating and storage data
Ambient operating temperature range 0 to 40 oC
Ambient storage temperature range -20 to 70 oC
Maximum ambient operating humidity 10 to 95%RH(non-condensing
to DIN 40040)
Maximum operating altitude 3000 m
Cooling Natural convection
Radiated electromagnetic emission EN50081-1
Electromagnetic immunity EN50082-1
2.2 Mechanical data
Dimensions See Figure 2
Mass 0.2 kg
Enclosure protection IP20 (as defined by IEC529)
Pollution degree IEC664, category 1
2.3 Electrical data
Electrical supply requirements
•The EXDC electrical supply must meet the requirements of
IEC1010-1/C22.2 1010-1.
•The safety earth (ground) impedance must be < 0.1 Ω.
•The EXDC 0 V is not referenced to earth (ground). Ensure that the electrical
supply offers a path (≤22 kΩ) between 0 V and earth (ground).
Maximum continuous output power
EXDC80 80 W
EXDC160 160 W
4EXDC Turbomolecular Pump Drive Modules

EXDC Turbomolecular Pump Drive Modules 5
Figure 2 - Dimensions (mm)
A Cable bend radius (≥30)

Logic interface
Connector mating half * 9-way D-type male
EXDC electrical supply
Allowable voltage range 70 to 85 V d.c.
Undervoltage lock-out voltage > 63 V
Maximum voltage ripple 2 V r.m.s.
Fuse (or equivalent current
limiting device) rating 3.15 A type ‘T’ IEC approved or
3.2 A time delay fuse UL/CSA
approved
Maximum input current 1.1 A (EXDC80)
2.2 A (EXDC160)
Start/stop control input signal
Start control voltage: low (close) < 0.8 V d.c.
Stop control voltage: high (open) 4 to 24 V d.c.
Speed analogue output
Output voltage 0 to +10 V d.c. (directly
proportional to pump speed,
that is 0 to 10 V ≅0 to 100%
of pump speed)
Output impedance 0.1Ω
Minimum load ≥5 kΩ
TMP Normal status output
Type Open collector transistor
< 80 % Off (pull up to 15 V d.c.)
≥80 % On (< 0.8 V d.c.)
Rating 20 mA
* Not supplied
6EXDC Turbomolecular Pump Drive Modules

3 INSTALLATION
3.1 Unpack and inspect
Remove all packing materials and check the EXDC. If the EXDC is damaged,
notify your supplier and the carrier in writing within three days; state the Item
Number of the EXDC together with your order number and your supplier’s
invoice number. Retain all packing materials for inspection. Do not use the
EXDC if it is damaged.
If the EXDC is not to be used immediately, store the EXDC in suitable
conditions, as described in Section 6.
3.2 Adjust the electrical connector position (optional)
CAUTION
Do not turn the pump electrical connector more than 180ofrom its
orientation as supplied. If you do, you may damage the wires inside
the EXDC.
Refer to Figure 1. Use the following procedure to adjust the position of the EXT
pump connector (9) and connector lock (6) with respect to the EXDC body.
1. Use a hexagonal key to loosen the grub screw (1).
2. Turn the connector (9) and lock (6) to the required orientation: you can turn
the connector and lock up to 180oclockwise or anticlockwise.
3. Tighten the grub screw (1) to secure the connector and connector lock.
3.3 Fit the EXDC to the EXT pump
1. RefertoFigure1. LookatthefrontoftheEXDC(thatis,withtheLEDs(4,5)
towards you), then turn the connector lock (6) fully anticlockwise (in
direction 7).
2. Fit the connector (9) directly to the pump to Controller connector on the
EXT pump: refer to the EXT pump instruction manual.
3. Turn the lock (6) fully clockwise (in direction 8) to lock the connectors and
secure the EXDC in position.
EXDC Turbomolecular Pump Drive Modules 7

3.4 Electrical connections
3.4.1 Introduction
Use a suitable connector mating half (not supplied) to connect the electrical
supplies and your control equipment to the connector on the logic interface cable
(Figure 1, item 3). When you make the electrical connections to the EXDC
described in the following sections, refer to Table 1 for full details of the logic
interfaceconnectionsandtoFigure3foraschematicdiagramoftheconnections.
Pin number Signal Polarity Use
1 Start/Stop control input - Close * to start EXT
pump.
2 TMP Normal status output - Closed * when EXT
pump speed is 80%
or more of full
rotational speed.
3 Earth (ground) -
4 Pump speed analogue output Positive
5, 6 Electrical supply: 0 V -
7, 8 Electrical supply: 80 V Positive
* With respect to pins 5 or 6.
Table 1 - Logic interface connector pins
3.4.2 Connect the logic interface to your control equipment
1. Connect your control equipment to the start/stop control input pins of your
logic interface mating half to start/stop the EXT pump as required:
•Link (close) the start/stop control input (pin 1) to pins 5 or 6 to start the
EXT pump.
•Unlink (open) the start/stop control input (pin 1) from pins 5 or 6 to stop
the EXT pump.
2. Connect your control equipment to the pump speed analogue output (pin 4)
and to pins 5 or 6 of your logic interface mating half to monitor the speed
output of the EXDC.
(Continued on page 10)
8EXDC Turbomolecular Pump Drive Modules

EXDC Turbomolecular Pump Drive Modules 9
Figure 3 - Schematic diagram of the logic interface connections
A EXDC logic interface plug
B Mating half to EXDC logic interface plug
4. D. C. relay (optional)
5. Relay power supply (optional)
6. Voltmeter
1. Start/stop switch
2. Electrical supply
3. Back EMF suppression diode (optional)

3. Connect your control equipment to the TMP normal status output (pin 2)
andtopins5or6ofyourlogicinterfacematinghalf. Youcanusetheoutputto
control other devices in your pumping system. The output can drive a low
power relay of up to 24 V coil rating.
3.4.3 Connect the electrical supply
WARNING
Ensure that the EXDC is earthed (grounded) as required by
IEC1010-1\C22.2 1010-1 and all local legislative requirements, and observe
all appropriate safety precautions for the safe installation and handling of
electrical equipment. If you do not, there will be a danger of injury or death
to people by electric shock.
WARNING
Incorporate a suitable isolation device in the electrical supply, close to the
EXDC. If you do not, you will not be able to switch off the EXDC in an
emergency.
WARNING
Incorporate suitable fuses or current limiting devices in the electrical supply
circuit. If you do not and a fault develops, the EXDC may be damaged and
there will be a danger of injury or death to people by electric shock.
Connect suitable electrical supplies to pins 5 to 8 of your connector mating half.
When you connect the supplies:
•Incorporate a suitable fuse or current limiting devices in your external
electrical supply: the rating of the fuse or current limiting device must be
suitable for your electrical supply.
•Incorporatesuitablefusesorcurrentlimitingdevicesinthenominal80Vlines:
refer to Section 2 for the fuse/current limiting device rating.
•Incorporate an isolation switch.
10 EXDC Turbomolecular Pump Drive Modules

4 OPERATION
WARNING
Do not disconnect the EXDC from the EXT pump when the pump is
operating. At full speed, the EXT pump motor generates 48 V RMS which
is accessible at the pump to Controller electrical connection, and there may
be a risk of injury by electric shock.
CAUTION
Do not disconnect the EXDC from, or reconnect the EXDC to, the EXT
pump if the electrical supply to the EXDC is on, or if the EXT pump is
rotating. If you do, you can damage the EXDC.
4.1 Start-up
Notes: You can start the backing pump and the EXT pump at the same time; the EXT
pumpwill not bedamagedandcan operate asaneffectivebaffle. However, ifthe
system pressure remains too high, the EXT pump may not reach 80% of full
rotational speed and the TMP Normal status output signal will not be set.
Usethefollowingproceduretostartupyoursystem. Thisprocedureassumesthat
you will manually operate the vent-valve and the backing pump.
1. Switch on the electrical supply to the EXDC.
2. Close the vent-valve (if fitted) and start the backing pump.
3. Start the EXT pump: close the Start/Stop control input on the logic interface
connector.
4.2 Operation with high inlet pressure or temperature
If the EXT pump inlet pressure rises, the power supplied by the EXDC to the
pump-motor will increase to counteract the gas frictional load. The pump
rotationalspeedwillremainconstantuntiltheEXDCpeakpowerlevelisreached;
beyond this power level, the speed of the pump will start to reduce.
(Continued on page 12)
EXDC Turbomolecular Pump Drive Modules 11

Temperature sensors in the EXDC and the EXT pump are monitored by the
EXDC. IftheEXDCdetectsthatthepumptemperatureoritsowntemperatureis
too high, the power supplied to the pump-motor is reduced; the pump may not
therefore be able to maintain full rotational speed if it is too hot.
Refer to the EXT pump instruction manual for the maximum allowable inlet
pressure and for the pump operating temperature ranges, and refer to Section 2.3
for the maximum EXDC output power.
4.3 Normal shutdown
Use the following procedure to shut down your system. This procedure assumes
that you will manually operate the vent-valve and the backing pump. Refer to the
InstructionManualfortheEXTpumpfordetailsofthe maximum allowable vent
rate.
1. Select Stop: open the Start/Stop control input on the logic interface
connector.
2. Openthevent-valveaftertheEXTpumpspeedhasfallentobelow50%offull
rotational speed.
3. Switch off the backing pump.
4.4 Shut down due to pump under or over-speed
CAUTION
Shut down the EXT pump if its speed falls to below 50% of full rotational
speed. If you do not, the EXT pump may be damaged.
You must use the speed analogue output to monitor the speed of the EXT pump.
If the pump speed falls to below 50% of its full rotational speed, this means that
thereishighinletpressureortemperature,orthatthereisafaultintheEXTpump
(for example, the bearings may have failed).
If the pump speed falls to below 50% of its full rotational speed, you must
therefore switch off the EXT pump (open the start/stop control input) to prevent
damage to the pump.
12 EXDC Turbomolecular Pump Drive Modules

The EXDC has an electronic EXT pump speed control system. This control
system prevents operation of the EXT pump at over 100% of its normal full
rotationalspeed(asoperationabovethisspeedreducesbearingoperationallife).
If required, you can monitor the speed analogue output and configure your
control equipment to switch off the EXT pump if its speed exceeds 100% of full
rotational speed.
4.5 Electrical supply failure
WARNING
If the Start/Stop control signal on the logic interface connector is set to Start,
the EXDC will automatically restart the EXT pump when the electrical
supply is restored after an electrical supply failure. Ensure that people
cannot be injured by the rotating rotor blades of the EXT pump.
If the electrical supply to the EXDC fails when the EXT pump is rotating, the
motor of the EXT pump acts as a generator and the power generated can be used
as the electrical supply for the associated control logic connected to the EXDC.
Youcanconnectasuitabled.c.tod.c.convertortothe80Vsupplypins(pins7,8)
onyourlogicinterfacematinghalf;the voltage on these pins is maintained at 50 V
d.c. during external electrical supply failure.
EXDC Turbomolecular Pump Drive Modules 13

5 MAINTENANCE
5.1 Introduction
TheEXDChasnopartswhichcanbeservicedbytheuser. Ifnecessary,returnthe
EXDC to your supplier or BOC Edwards for repair or replacement.
5.2 EXDC LED fault finding
Symptom Check Action
None of the LEDs
are on. Has the EXDC electrical supply
failed ?
Ensure that the electrical
supply is switched on and that
the fuses (and current limiting
devices) have not been
tripped.
The Normal LED
does not go on. Is there a leak in the vacuum system ? Inspect the vacuum system and seal any leaks found.
Is the EXT pump
faulty ? Inspect the EXT pump and check that it operates correctly
with another EXDC or EXC
Turbomolecular Pump
Controller. If necessary,
replace the EXT pump.
Only one phase
LED is on. Is the EXT pump faulty ? Inspect the EXT pump and check that it operates correctly
with another EXDC or EXC
Turbomolecular Pump
Controller. If necessary,
replace the EXT pump.
(Any of the
above.) - If all the previous checks and actions have been made and
the fault symptom is till
present, the EXDC may be
faulty: contact your supplier or
BOC Edwards.
Table 2 - EXDC LED fault finding
14 EXDC Turbomolecular Pump Drive Modules

6 STORAGE AND DISPOSAL
6.1 Storage
Fit protective covers over the electrical connections and store the EXDC in clean
dry conditions until required.
Whenrequiredfor use, prepare and install the EXDCasdescribed in Section 3 of
this manual.
6.2 Disposal
Disposeofthe EXDC and any components safely in accordancewithalllocaland
national safety and environmental requirements.
EXDC Turbomolecular Pump Drive Modules 15

Return of BOC Edwards Equipment - Procedure
Form HS1
INTRODUCTION
Before returning your equipment, you must warn BOC Edwards if substances you used (and produced)
in the equipment can be hazardous. This information is fundamental to the safety of our Service Centre
employees and will determine the procedures employed to service your equipment.
Complete the Declaration (HS2) and send it to BOC Edwards before you dispatch the
equipment. It is important to note that this declaration is for BOC Edwards internal use only, and
has no relationship to local, national or international transportation safety or environmental
requirements. As the person offering the equipment for shipment, it is your responsibility to ensure
compliance with applicable laws.
GUIDELINES
• Equipment is 'uncontaminated' if it has not been used, or if it has only been used with substances
that are not hazardous. Your equipment is 'contaminated' if it has been used with any substances
classified as hazardous under EU Directive 67/548/EEC (as amended) or OSHA Occupational Safety
(29 CFR 1910).
• If your equipment has been used with radioactive substances, biological or infectious agents,
mercury, polychlorinated biphenyls (PCB’s), dioxins or sodium azide, you must decontaminate it
before you return it to BOC Edwards. You must send independent proof of decontamination (for
example a certificate of analysis) to BOC Edwards with the Declaration (HS2). Phone BOC
Edwards for advice.
• If your equipment is contaminated, you must either:
• Remove all traces of contamination (to the satisfaction of laws governing the transportation of
dangerous/hazardous substances).
• Or, properly classify the hazard, mark, manifest and ship the equipment in accordance with
applicable laws governing the shipment of hazardous materials.
Note: Some contaminated equipment may not be suitable for airfreight.
PROCEDURE
1. Contact BOC Edwards and obtain a Return Authorisation Number for your equipment.
2. Complete the Return of BOC Edwards Equipment - Declaration (HS2).
3. If the equipment is contaminated, you must contact your transporter to ensure that you properly
classify the hazard, mark, manifest and ship the equipment, in accordance with applicable laws
governing the shipment of contaminated/hazardous materials. As the person offering the equipment
for shipment, it is your responsibility to ensure compliance with applicable law. Note: Equipment
contaminated with some hazardous materials, such as semiconductor by-products,
may not be suitable for airfreight - contact your transporter for advice.
4. Remove all traces of hazardous gases: pass an inert gas through the equipment and any accessories
that will be returned to BOC Edwards. Where possible, drain all fluids and lubricants from the
equipment and its accessories.
5. Seal up all of the equipment's inlets and outlets (including those where accessories were attached)
with blanking flanges or, for uncontaminated product, with heavy gauge tape.
6. Seal equipment in a thick polythene/polyethylene bag or sheet.
7. If the equipment is large, strap the equipment and its accessories to a wooden pallet. If the
equipment is too small to be strapped to a pallet, pack it in a suitable strong box.
8. Fax or post a copy of the Declaration (HS2) to BOC Edwards. The Declaration must arrive before
the equipment.
9. Give a copy of the Declaration (HS2) to the transporter. You must tell your transporter if the
equipment is contaminated.
10. Seal the original Declaration in a suitable envelope: attach the envelope securely to the outside of
the equipment package, in a clear weatherproof bag.
WRITE YOUR RETURN AUTHORISATION NUMBER CLEARLY ON THE
OUTSIDE OF THE ENVELOPE OR ON THE OUTSIDE OF THE EQUIPMENT
PACKAGE.
P900-70-000 Issue K