BOC Edwards 250 User manual

A531-14-880
Issue B
Manor Royal, Crawley, West Sussex, RH10 9LW, UK
Telephone: [phone] Fax: [phone]
http://www.bocedwards.com
Model 250 Water-Cooled Exhaust Trap
Description Item Number
Model 250 Water-Cooled Exhaust Trap A531-14-000
Instruction Manual

CONTENTS
Section Title Page
1 INTRODUCTION 1
1.1 Scope and definitions 1
1.2 Description 1
1.2.1 General 1
1.2.2 Principle of operation 2
1.3 Installation options 4
2 TECHNICAL DATA 5
2.1 Operating conditions 5
2.2 Mechanical data 5
2.3 Construction materials 5
3 INSTALLATION 7
3.1 Safety 7
3.2 Unpack and inspect 8
3.3 Prepare the Exhaust Trap and the dry pump 8
3.4 Fit the Exhaust Trap to the dry pump 10
3.5 Connect the Exhaust Trap to your exhaust-extraction system 10
3.6 Connect the cooling-water hoses 11
3.7 Install the QDP Exhaust Pressure Module (if necessary) 11
3.8 Install a nitrogen flow switch 12
3.9 Leak-test the system 12
4 OPERATION 13
4.1 Start-up 13
4.2 Shut-down 13
5 MAINTENANCE 14
5.1 Safety 14
5.2 Maintenance plan 15
5.3 Inspect hoses, pipelines and connections 15
5.4 Clean the exhaust-silencer 15
5.5 Replace the Exhaust Trap liners 16
6 STORAGE AND DISPOSAL 17
6.1 Storage 17
6.2 Disposal 17
7 SERVICE, SPARES AND ACCESSORIES 18
7.1 Introduction 18
7.2 Service 18
7.3 Spares 18
7.4 Accessories 19
RETURN OF BOC EDWARDS EQUIPMENT
Model 250 Water-Cooled Exhaust Trap i
Ipsitech 8078-03

Illustrations
Figure Title Page
1 Components of the Exhaust Trap 3
2 Exhaust Trap dimensions (mm) 6
3 Exhaust Trap shown installed on a QMB/QDP combination pumping system 9
Tables
Table Title Page
1 Checklist of components 8
2 Maintenance plan 15
Associated publications
Publication title Publication Number
Drystar MKII Dry Pumping System A302-73-880
Compact Drystar Pumps Models CDP40Si and CDP80Si A526-43-880
QDP Drystar Vacuum Pumps A528-40-880
QMKII Dry Pumping System A529-78-880
Disposable Liners for the Model 250 Water-Cooled Exhaust Trap A531-15-880
ii Model 250 Water-Cooled Exhaust Trap

1 INTRODUCTION
1.1 Scope and definitions
This manual provides installation, operation and maintenance instructions for the BOC
Edwards Model 250 Water-Cooled Exhaust Trap. You must use the Exhaust Trap as specified in
this manual.
Read this manual before you install and operate the Exhaust Trap. Important safety information
is highlighted as WARNING and CAUTION instructions; you must obey these instructions. The
use of WARNINGS and CAUTIONS is defined below.
WARNING
Warnings are given where failure to observe the instruction could result in injury or death
to people.
CAUTION
Cautions are given where failure to observe the instruction could result in damage to the
equipment, associated equipment and process.
The units used throughout this manual conform to the SI international system of units of
measurement.
1.2 Description
1.2.1 General
Refer to Figure 1. The Exhaust Trap cools the exhaust gases from the pump and causes
particulates to collect in the Exhaust Trap. This prevents the collection of particulates in the
exhaust-system. The Exhaust Trap is designed for connection to a pump which is used in an
LPCVD nitride process using dichlorosilane or hexachlorodisilane and ammonia. The
Exhaust Trap is not suitable for connection to a pump which is used in other processes.
The Exhaust Trap is designed to fit BOC Edwards CDP and QDP dry pumps and Drystar MKI,
MKII and QMKII dry pumping systems. Your system must incorporate a pressure switch to
shut-down the pump if the exhaust system becomes blocked.
The Exhaust Trap has a main outer body (6) which is mounted on a baseframe (12). You can
adjust the height of the trap-body in the baseframe to fit the Exhaust Trap to different pumps.
The baseframe has castors (10) for ease of movement of the Exhaust Trap and levelling feet (9) so
that you can securely locate the Exhaust Trap in its operating position.
Model 250 Water-Cooled Exhaust Trap 1

1.2.2 Principle of operation
Refer to Figure 1. The Exhaust Trap inner body (32) is cooled by water which flows through
cooling-coils (33) wrapped around the trap-body. After it has passed through the cooling-coils,
the water flows upwards through the outside of a cold-finger (21) inside the trap-body and then
out of the trap-body through a pipe in the centre of the cold-finger (27).
The exhaust gases from the pump enter the inner body (32) through the Exhaust Trap inlet elbow
(8). The cooled inner body then cools the gases and particulates are collected on the following
liner components in the inner body:
•Inner and outer liners (20, 31)
•Inlet and outlet end-shields (29, 34)
•Cold-finger liner (30) and cold-finger end-cap (19).
In addition, the trap inlet and outlet (8, 16) are protected by inlet and outlet liners (24, 17).
The exhaust gases then flow out through the Exhaust Trap outlet (16), through the
exhaust-silencer (1), if fitted, and into the exhaust-extraction system.
All of the liner components can be easily removed and replaced.
2Model 250 Water-Cooled Exhaust Trap
Figure 1 - Key
1. Exhaust-silencer (not supplied)
2. Exhaust-silencer outlet
3. Clamp
4. Trap outlet elbow
5. Thumbwheels
6. Trap outer body
7. Cooling-water inlet
8. Trap inlet elbow
9. Levelling foot
10. Castor (4 off)
11. Cooling-water outlet
12. Baseframe
13. Lifting-bolt
14. ‘O’ ring
15. Top-flange
16. Trap outlet
17. Outlet liner
18. Outlet gasket
19. Cold-finger end-cap
20. Inner liner
21. Cold-finger
22. Inlet gasket
23. 'O' rings
24. Inlet liner
25. Nuts and washers
26. Inlet insulator
27. Cold-finger cooling-water outlet pipe
28. Bottom flange
29. Inlet end-shield
30. Cold-finger liner
31. Outer liner
32. Trap inner body
33. Cooling-coils
34. Outlet end-shield

Model 250 Water-Cooled Exhaust Trap 3
Figure 1 - Components of the Exhaust Trap (with a cross-section of the trap-body)

1.3 Installation options
The baseframe of the Exhaust Trap has mounting holes which allow you to connect the Exhaust
Trap to the dry pump in a number of different ways. This manual describes the recommended
installation configuration, where the Exhaust Trap is connected directly to the outlet of the dry
pump (as shown in Figure 3).
If you wish to install the Exhaust Trap in a different configuration, contact your supplier or BOC
Edwards for advice; in particular, note that:
•If you want to connect the Exhaust Trap to the position of the exhaust-silencer outlet on the
dry pump, you must use an Exhaust Trap Connection and T.M.S. Kit accessory: refer to
Section 7.
•If you want to install the Exhaust Trap in some other location and fit a connecting pipeline
between the pump and the Exhaust Trap inlet, you must ensure that the temperature of the
connecting pipeline does not fall to below 120 oC. A BOC Edwards Temperature
Management System (TMS) of suitable heaters and insulators is available for this purpose.
4Model 250 Water-Cooled Exhaust Trap

2 TECHNICAL DATA
2.1 Operating conditions
Maximum cooling-water pressure 7 bar gauge (70 Pa)
Minimum cooling-water flow rate 6 l min-1
Maximum inlet-port pressure 10 bar gauge (100 Pa)
Leak-tightness 1 x 10-6 mbar l s-1 (1 x 10-4 Pa l s-1)
2.2 Mechanical data
Dimensions See Figure 2
Trap inlet NW40
Trap outlet NW40
Water-inlet connector 3/8inch BSP male quick-connect
Water-outlet connector 3/8inch BSP female quick-connect
2.3 Construction materials
Trap-body AISI 304L stainless steel
Cooling-water coils Copper
Liner components Zinc coated mild steel
Model 250 Water-Cooled Exhaust Trap 5

6Model 250 Water-Cooled Exhaust Trap
Mounting
hole
Pump/pumping system &
installation configuration AB
1 Drystar MKII & QMKII, pump outlet 1808 515
2 CDP & QDP, pump outlet 1628 325
3 Drystar MKII & QMKII, exhaust-silencer outlet * 1533 240
4 QDP, exhaust-silencer outlet * 1448 155
5Drystar MKI, pump outlet and
CDP 40/80Ni, exhaust-silencer outlet * 1433 140
6 CDP 40/80i/Ei/Si exhaust-silencer outlet * 1373 80
Figure 2 - Exhaust Trap dimensions (mm)
* Installation configuration not described
in this manual: see Section 1.3

3 INSTALLATION
3.1 Safety
WARNING
Obey the safety instructions given below and take note of appropriate precautions. If you
do not, you can cause injury to people and damage to equipment.
A suitably trained and supervised technician must install your Exhaust Trap. Obey the safety
instructions below when you do installation work, especially when you connect into existing
systems. Details of specific safety precautions are given at the appropriate point in the
instructions.
•Wear the appropriate safety-clothing when you come into contact with contaminated
components
•Vent and purge the pumping system before you start installation work
•Check that all the required components are available and of the correct type before you start
work
•Ensure that the installation technician is familiar with the safety procedures which relate to
the products handled by the process system
•Disconnect the other components in the process system from the electrical supply so that
they cannot be operated accidentally
•Leak-test the system after installation work is complete and seal any leaks found to prevent
the leakage of dangerous substances from the system and the leakage of air into the system.
Model 250 Water-Cooled Exhaust Trap 7