BOC Edwards Temescal SuperSource2 STIH-270-2PT User manual

Temescal
SuperSource2™
PopTop Electron Beam
Turret Source
Model STIH-270-2PT
Temescal,
a division of BOC Edwards, Inc.
4569C Las Positas Road, Livermore, CA 94551; Tel. [phone]; Fax. [phone]

Revision History
0101-9004
REV. VERSION/CHANGE DESCRIPTION APPLICATION/REASON FOR CHANGE DATE APPV’D
-0 First released version of manual Model STIH-270-2PT sources, beginning
with SN 1 6/02
-1 Second released version of manual Corrections and updates 4/06
Temescal,
A division of BOC Edwards, Inc.
4569C Las Positas Road
Livermore, CA 94551
©2002, 2006 by BOC Edwards, Inc. April, 2006
All rights reserved

Contents
Section 1 Description and Specifications
1.1 Section Overview ..........................................1-1
1.2 Unpacking ..............................................1-2
1.3 Product Description .........................................1-3
1.4 Specifications ............................................1-7
1.5 Accessories .............................................1-9
Section 2 Installation
2.1 Section Overview ..........................................2-1
2.2 Installation Requirements ......................................2-2
2.3 Installation Procedure ........................................2-5
2.4 Installing a Second Source .....................................2-15
Section 3 Operation
3.1 Section Overview ..........................................3-1
3.2 Electron Beam Control .......................................3-2
3.3 Initial Operation ...........................................3-6
3.4 Routine Inspection..........................................3-9
3.5 Crucible Removal and Replacement ................................3-11
Section 4 Maintenance of High-Performance Emitter Assembly
4.1 Section Overview ..........................................4-1
4.2 Filament Replacement ........................................4-2
4.3 Emitter Disassembly.........................................4-4
4.4 Emitter Reassembly .........................................4-5
Section 5 Source Disassembly
5.1 Section Overview ..........................................5-1
5.2 Source Removal and Disassembly..................................5-2
5.3 Disassembling the Bearing Housing Assembly ..........................5-17
5.4 Disassembling the Drive Shaft Assembly .............................5-22
Section 6 Troubleshooting
6.1 Section Overview ..........................................6-1
6.2 Difficulties in Generating or Maintaining a Beam..........................6-2
6.3 Unsatisfactory Performance during Deposition ...........................6-3
6.4 Beam-Position Problems.......................................6-6
6.5 Other Malfunctions .........................................6-8
6.6 Pop Top Feature not Functioning Correctly ............................6-10
Section 7 Engineering Drawing and Parts Lists
STIH-270-2PT 0101-9004-0A i

ii 0101-9004-0A STIH-270-2PT
Illustrations
Section 1
1-1. STIH-270-2PT source viewed from the top .....1-3
1-2. STIH-270-2PT source viewed from the front ....1-4
1-3.Dimensions of STIH-270-2PT source - top, side, and
front views ....................1-8
Section 2
2-1. Installation Details .................2-6
2-2. Correct placement of high-voltage shielding ....2-7
2-3. Typical installation of bottom-drive model
(STIH-270-2PT) .................2-8
2-4.Two methods of setting up a low-impedance ground for
the vacuum system................2-14
2-5. Magnetic shield mounted to water lines in two-gun
installation ...................2-15
2-6. Magnetic shield mounted to debris shield in two-gun
installation ...................2-16
Section 3
3-1. Correct mounting location for shunt bar(s) .....3-3
3-2. Location of the internal and external pole piece
extensions.....................3-5
3-3. Removing the crucible cover............3-12
3-4. Correct arrangement of sleeve on shaft of Allen driver
.........................3-13
3-6. Removing the screws that secure the crucible to the
crucible mounting flange ............3-14
3-5. Socket-head screw correctly retained by sleeve on end
of Allen driver ..................3-14
3-7. Source with crucible cover removed and knurled
thumbscrew in place in top of the crucible ...3-15
3-8.Removing the crucible from the source. Note angle of
withdrawal ...................3-16
Section 4
4-1. Front view of high-performance emitter assembly . 4-7
4-2. High-performance emitter viewed from rear ....4-7
4-3. Exploded view of high-performance emitter ....4-8
Section 5
5-1. Removing the crucible cover ............5-4
5-2. Detail of the sleeve on the Allen driver .......5-5
5-3. Socket-head screw correctly retained by the sleeve on
the end of the Allen driver ............5-5
5-4. Removing the screws that secure the crucible to the
crucible mounting flange .............5-6
5-5. Removing the crucible from the source. Note angle of
withdrawal ....................5-7
5-6. Removing the emitter assembly ...........5-8
5-8. Removing the screws that secure the coil housing to the
pole pieces ....................5-9
5-7. Uncoupling the water-crossover tube ........5-9
5-9. Removing the coil housing .............5-10
5-10. Removing the screws that secure the LH pole piece to
the base plate ..................5-10
5-11. Correct technique for detaching pole pieces from
magnet and base plate..............5-11
5-12. Removing the water baffle ............5-12
5-13. Detaching the pivot plate shaft from the base plate
.........................5-13
5-14. Removing the screws that secure the bearing housing
assembly to the crucible mounting flange ....5-14
5-15. Parts layout, STIH-270-2PT source, with emitter,
bearing housing assembly, and drive assembly still
intact ......................5-15
5-16. Removing the retaining ring ...........5-17
5-17. Layout of the parts of the bearing housing assembly, in
order of reassembly ...............5-17
5-18. Allen driver inserted through hole in the bearing
housing .....................5-18
5-19. Removing the retaining ring that secures the outer
crucible drive bearing in the bearing housing . 5-22
5-20. Removing the retaining ring that retains the drive
shaft .......................5-22
5-21. The parts of the drive shaft assembly laid out in order
of reassembly ..................5-24
Section 6
6-1. Correct and incorrect beam-spot positions with 0 A
longitudinal deflection current applied......6-5
Section 7
7-1. Source assembly, STIH-270-2CKB, pop-up type. Side
views .......................7-2
7-2. Source assembly, STIH-270-2CKB, pop-up type. Top
and bottom views .................7-3

SUMMARY OF TERMS AND CONDITIONS OF SALE
MECHANICAL WARRANTY: For a period of
twelve (12) months from the date of original ship-
ment to Purchaser thereof, the apparatus and each
part or component manufactured by Temescal, a di-
visionofTheBOCGroup,Inc.,hereinafterknownas
“Seller,” is warranted to be free from functional de-
fects in materials and workmanship. The foregoing
warranty is subject to the condition that the appara-
tus, part, or component be properly operated under
conditions of normal use, and that regular periodic
maintenance and service be performed, or replace-
ments made, in accordance with instructions pro-
vided by Seller. The foregoing warranty shall not
apply to any apparatus, part, or component that has
been repaired other than by Seller or an authorized
representative of Seller, or in accordance with writ-
ten instructions provided by Seller; that has been al-
tered by anyone other than Seller; or that has been
subject to improper installation or abuse, misuse,
negligence, accident, or corrosion.
Purchaser’s sole and exclusive remedy under the
abovewarrantyislimitedto,atSeller’soption,repair
or replacement of defective parts or components, or
returntoPurchaserofthepriceoftheapparatus. Any
such obligation on Seller’s part is subject to the fol-
lowing requirements: (x) the defect must be
promptly reported to Seller; (y) if so advised by
Seller, Purchaser must return the part or component
with a statement of the observed deficiency not later
than seven (7) days after the expiration date of the
warranty to the address designated by Seller, during
normal business hours, transportation charges pre-
paid; and (z) upon examination by Seller, the part or
component must be found not to comply with the
above warranty. Return trip transportation charges
forthepartorcomponentshallbepaidbyPurchaser.
In the event that Seller elects to refund the purchase
price, the apparatus shall be the property of Seller
andshallbepromptlyshippedtoSelleratSeller’sex-
pense. This mechanical warranty shall be void and
the apparatus shall be deemed to be purchased AS IS
in the event that the entire purchase price has not
beenpaidwithinthirty(30)daysoforiginalshipment
of the apparatus.
THERE ARE NO EXPRESS OR IMPLIED WAR-
RANTIES THAT EXTEND BEYOND THE WAR-
RANTY HEREINABOVE SET FORTH. THERE
IS NO WARRANTY OF MERCHANTABILITY
OR FITNESS FOR A PARTICULAR PURPOSE
WITH RESPECT TO THE APPARATUS OR ANY
PART OR COMPONENT THEREOF, AND NO
WARRANTY SHALL BE IMPLIED BY LAW.
ItemsnotofSeller’smanufacturebutresoldbySeller
are the products of other manufacturers and their
warranty, if any, shall apply. THERE ARE NO
WARRANTIES OF ANY KIND ON PRODUCTS
OF OTHER MANUFACTURERS RESOLD BY
TEMESCAL, EXCEPT THE WARRANTY OF TI-
TLE, AND NO WARRANTIES SHALL BE IM-
PLIED BY LAW. THERE IS NO EXPRESS OR
IMPLIED WARRANTY OF MERCHANTABIL-
ITYOR OFFITNESSFOR APARTICULAR PUR-
POSE WITH RESPECT TO PRODUCTS OF
OTHER MANUFACTURERS.
PERFORMANCE WARRANTY: Seller warrants
thattheapparatuswillcomplywiththespecifications
set forth in the purchase order. All specifications are
subject to the corrections and tolerances allowed by
the NEC. If the purchase order expressly provides
for factory testing to verify compliance with the
specifications, Purchaser shall be entitled to witness
the testing and the results of the testing. Upon dem-
onstration of compliance with the specifications by
factorytesting, Seller’sliability forfailure tocomply
with the specifications shall terminate. In the event
that the purchase order does not describe a compre-
hensive test program for demonstration of compli-
ance with the specifications, Seller’s test program
(which may incorporate extrapolation of data or test
results based upon similarity of criteria established
by Seller) shall be used for such purpose.
If the purchase order does not expressly provide for
factory testing, compliance with the specifications
shall be demonstrated by field testing which shall be
conducted by Purchaser at Purchaser’s expense.
Sellershallhavetherightto:(a)witnessthefieldtest-
ing and to verify the results of such field testing; (b)
STIH-270-2PT 0101-9004-0A iii

have free access to all data compiled by Purchaser in
connection with any field test; and (c) conduct its
own field test at its own expense during any four-
teen-day (14-day) consecutive period which may be
mutually agreed upon by Seller and Purchaser; pro-
vided, however, that Seller shall have the right to
field test within six (6) months of receipt from Pur-
chaser of any notice of failure to comply with the
specifications. If compliance with the specifications
istobedemonstratedbyfieldtesting,Purchasershall
conduct and complete all field testing within sixty
(60) days of the original shipment of the apparatus
and shall promptly notify Seller of any failure to
complywith the specifications. Sellershall notbe li-
able for any failure to comply with the specifications
demonstrated by field testing unless it receives no-
tice thereof within sixty-seven (67) days of the date
of original shipment of the apparatus.
In the event that factory testing or field testing does
not demonstrate compliance with the specifications,
Purchaser’s sole and exclusive remedy under the
abovewarrantyislimitedto,atSeller’soption,repair
or replacement of defective parts or components or
return to Purchaser of the purchase price of the appa-
ratus. Intheevent thatSellerelectsto refundthe pur-
chase price, the apparatus shall be the property of
Seller.
Any obligations on Seller’s part under this perfor-
mance warranty are subject to thefollowing require-
ments:(x) thenature ofthe failureoftheapparatusto
comply with the specifications must be promptly re-
ported to Seller in writing; (y) if the apparatus has
been delivered and field tested, Purchaser must re-
turn the apparatus or any part orcomponent to Seller
upon its request, not later than sixty-seven (67) days
afterinitialshipmenttoPurchaser,totheaddressdes-
ignated by Seller, during normal business hours,
transportation charges prepaid; and (z) upon exami-
nation and testing by Seller, the apparatus must be
found not to comply with the specifications. Return
trip transportation charges for the apparatus or any
part or component shall be paid by Purchaser. This
performance warranty shall be void and the appara-
tus shall be deemed to be purchased AS IS in the
event that the entire purchase price hasnot been paid
withinthirty(30)daysoforiginalshipmentof theap-
paratus.
THERE ARE NO EXPRESS OR IMPLIED WAR-
RANTIES THAT EXTEND BEYOND THE WAR-
RANTY HEREINABOVE SET FORTH. THERE
IS NO WARRANTY OF MERCHANTABILITY
OR FITNESS FOR A PARTICULAR PURPOSE
WITH RESPECT TO THE APPARATUS OR ANY
PART OR COMPONENT THEREOF, AND NO
WARRANTY SHALL BE IMPLIED BY LAW.
DISCLAIMER OF LIABILITY: IN NO EVENT
SHALL SELLER BE LIABLE FOR DIRECT, IN-
DIRECT, SPECIAL, INCIDENTAL, OR CONSE-
QUENTIAL DAMAGES ARISING FROM ANY
SOURCE such as, but not limited to, the manufac-
ture, use, delivery (including late delivery), or trans-
portation of any apparatus, part, or component sold
to Purchaser, whether such damages are caused by
Seller’s negligence or otherwise. Without limiting
the generality of the foregoing sentence, Seller shall
notbe liablefor:the costofcapital; thecostof substi-
tute apparatus, services, repairs, components, or
parts; loss of profit or revenue; the cost of power,
whether purchased or produced by the consumer
thereof; loss of use of the apparatus or any part
thereof, or of any other property owned by Pur-
chaser; claims or costs of Purchaser’s customers; in-
jurytopersons,ordeath;ordamagestoanyproperty.
In the event that any limited warranty or disclaimer
ofliabilityis foundtobe unlawfulor inapplicable,or
to have failed of its essential purpose, Seller’s liabil-
ity shall be limited to the amount paid by Purchaser
for the apparatus.
iv 0101-9004-0A STIH-270-2PT

SAFETY INSTRUCTIONS FOR OPERATING AND SERVICE PERSONNEL
Operators and service personnel should always wear safety glasses. Operators shall not enter areas intended
forserviceaccessonly. Onlyexperiencedservicepersonnelshouldentersuchareas,andonlyaftertakingthe
preliminary precautions described in paragraphs 1 through 6 below.
DANGER
Potentiallylethalvoltagesmayexistwithinthissystem,evenwiththemainpowerswitchedoff. Service
shouldonlybeattemptedbyqualifiedpersonnel. Failuretoobserveallsafetyprecautionscanresultin
personal injury.
Observetheprecautionsdescribedbelowwhen servicingthissystem,especiallywhen servicingcomponents
where high voltages might be present.
1Before servicing or operating this equipment, read all the component manuals supplied with the system,
paying special attention to safety instructions.
2Post HIGH VOLTAGE WARNING signs in conspicuous locations within the service area.
3Remove rings, watches, bracelets, and any other metal jewelry before working around high voltage.
4DO NOT WORK ALONE!
5Be sure that all equipmentis connected to a power receptaclehaving the correct polarity and grounding,
asprescribedby thelocalelectricalcodes. Refertothe powersupplyportion ofthedocumentationto de-
termine the proper electrical ground for high-voltage components.
6Before servicing any high-voltage component, switch off the electrical power at the component’s main
power switch. This switch should have a lockout feature. Lock the power off andkeep the key with you
while you are working on the equipment.
7Certainelectricalparts(e.g.,electrolyticcapacitors)holdalethalvoltageevenafterthepowerisswitched
off. Before entering any service area, use a grounding hook to short out such parts. Be sure that these
parts are discharged before starting any repairs.
8DO NOT touch high-voltage leadsunless power is off and a grounding hook is connected to thepartsto
be serviced.
9The high-voltage components of the system should beequipped with electrical interlocks to protect per-
sonnel from injury. DO NOT ATTEMPT TO DEFEAT, OVERRIDE, OR BYPASS THESE PROTEC-
TIVE DEVICES!
10 Never leave loose ends on high-voltage connections.
11 Observe the following warning if the system employs Radio Frequency (RF) power.
DANGER
RF radiation-even at modest power levels-can cause serious injury. If any of the RF components (e.g.,
the RF power supply, the RF matching network, or the RF electrodes or shielding inside the product
chamber) are moved or changed in any way, the RF energy may be radiated outside the equipment.
Monitor the equipment to assure that external RF radiation is below the levels prescribed by any and
all applicable safety codes.
STIH-270-2PT 0101-9004-0A v

vi 0101-9004-0A STIH-270-2PT
Special Amendment for United Kingdom Users
All Electrical Power Sources: Safety Precautions
Only authorized personnel should be permitted to carry out work on this system.
Prior to any servicing, grounding hooks should be used to short out all high-voltage parts and conductors in
both the vacuum system and thehigh-voltage power supply. Screensprotecting extra-high-voltage conduc-
torsshouldberemovedonlyifappropriateactionhasbeentakentoensurethatextra-high-voltageconductors
are dead and cannot be re-energized inadvertently.
In addition, all personnel should be aware of:
1theElectricity(FactoriesAct) SpecialRegulations(1908 and1944),inparticular,Regulations18(d) and
28 of the 1980 Regulations, as amended; and
2the employer’s responsibility to set up suitable systems to safeguard the health and safety of employees,
according to the Health & Safety at Work etc. Act (1974).

STIH-270-2PT 0101-9004-0A vii
USER RESPONSIBILITY
Thisequipmentwillperforminaccordancewiththeinstructionsandinformationcontainedintheuser’sman-
ual and its referenced documents when such equipmentis installed, operated, and maintained in compliance
withsuchinstructions. Theequipmentmustbecheckedperiodically. Defectiveequipmentshallnotbeused.
Parts that are broken, missing, plainly worn, distorted, or contaminated, shall be replaced immediately.
Should such repair or replacement become necessary, a telephonic or written request for service should be
made to Temescal.
The equipment, or any of its parts, shall not be altered without the prior written approval of Temescal. The
user and/or purchaser of this equipment shall have the sole responsibility for any malfunction which results
from improper use, faulty maintenance, damage, improper repair, or alteration by any party other than
Temescal.

viii 0101-9004-0A STIH-270-2PT
HEALTH HAZARD
The condensates deposited on the tank walls of a vacuum system aregenerally in the form of extremely fine
particles. The nature, as well as the form, of the materials pose the following potential health hazards:
a) Inhaling fine particles (powder) may cause damage to the lungs. To help prevent this, wear a protec-
tive respirator mask with fine filter that has been approved by the National Institute for Occupational
Safety and Health (NIOSH) and the federal Mine Safety and Health Administration (MSHA).
b) Some substances are toxic and inhaling them should be avoided. Take steps to ascertain whether or
not the material being deposited is a known toxic substance. Refer to the Material Safety Data
Sheet(s) covering the evaporant(s) in question.
c) Certain powders (titanium, for instance) can cause flash fires when exposed to oxygen or other oxi-
dizers. Therefore, when opening the chamber door after a deposition cycle, exercise extreme caution
and allow time for the coating surface to oxidize. Breakage of some of the more reactive condensates
may be hazardous, even when the above precautions are observed. In this situation, fire-protective
clothing should be worn.