BOC Edwards Temescal SuperSource2 STIH-270-2PT User manual

Temescal
SuperSource2™
PopTop Electron Beam
Turret Source
Model STIH-270-2PT
Temescal,
a division of BOC Edwards, Inc.
4569C Las Positas Road, Livermore, CA 94551; Tel. [phone]; Fax. [phone]

Revision History
0101-9004
REV. VERSION/CHANGE DESCRIPTION APPLICATION/REASON FOR CHANGE DATE APPV’D
-0 First released version of manual Model STIH-270-2PT sources, beginning
with SN 1 6/02
-1 Second released version of manual Corrections and updates 4/06
Temescal,
A division of BOC Edwards, Inc.
4569C Las Positas Road
Livermore, CA 94551
©2002, 2006 by BOC Edwards, Inc. April, 2006
All rights reserved

Contents
Section 1 Description and Specifications
1.1 Section Overview ..........................................1-1
1.2 Unpacking ..............................................1-2
1.3 Product Description .........................................1-3
1.4 Specifications ............................................1-7
1.5 Accessories .............................................1-9
Section 2 Installation
2.1 Section Overview ..........................................2-1
2.2 Installation Requirements ......................................2-2
2.3 Installation Procedure ........................................2-5
2.4 Installing a Second Source .....................................2-15
Section 3 Operation
3.1 Section Overview ..........................................3-1
3.2 Electron Beam Control .......................................3-2
3.3 Initial Operation ...........................................3-6
3.4 Routine Inspection..........................................3-9
3.5 Crucible Removal and Replacement ................................3-11
Section 4 Maintenance of High-Performance Emitter Assembly
4.1 Section Overview ..........................................4-1
4.2 Filament Replacement ........................................4-2
4.3 Emitter Disassembly.........................................4-4
4.4 Emitter Reassembly .........................................4-5
Section 5 Source Disassembly
5.1 Section Overview ..........................................5-1
5.2 Source Removal and Disassembly..................................5-2
5.3 Disassembling the Bearing Housing Assembly ..........................5-17
5.4 Disassembling the Drive Shaft Assembly .............................5-22
Section 6 Troubleshooting
6.1 Section Overview ..........................................6-1
6.2 Difficulties in Generating or Maintaining a Beam..........................6-2
6.3 Unsatisfactory Performance during Deposition ...........................6-3
6.4 Beam-Position Problems.......................................6-6
6.5 Other Malfunctions .........................................6-8
6.6 Pop Top Feature not Functioning Correctly ............................6-10
Section 7 Engineering Drawing and Parts Lists
STIH-270-2PT 0101-9004-0A i

ii 0101-9004-0A STIH-270-2PT
Illustrations
Section 1
1-1. STIH-270-2PT source viewed from the top .....1-3
1-2. STIH-270-2PT source viewed from the front ....1-4
1-3.Dimensions of STIH-270-2PT source - top, side, and
front views ....................1-8
Section 2
2-1. Installation Details .................2-6
2-2. Correct placement of high-voltage shielding ....2-7
2-3. Typical installation of bottom-drive model
(STIH-270-2PT) .................2-8
2-4.Two methods of setting up a low-impedance ground for
the vacuum system................2-14
2-5. Magnetic shield mounted to water lines in two-gun
installation ...................2-15
2-6. Magnetic shield mounted to debris shield in two-gun
installation ...................2-16
Section 3
3-1. Correct mounting location for shunt bar(s) .....3-3
3-2. Location of the internal and external pole piece
extensions.....................3-5
3-3. Removing the crucible cover............3-12
3-4. Correct arrangement of sleeve on shaft of Allen driver
.........................3-13
3-6. Removing the screws that secure the crucible to the
crucible mounting flange ............3-14
3-5. Socket-head screw correctly retained by sleeve on end
of Allen driver ..................3-14
3-7. Source with crucible cover removed and knurled
thumbscrew in place in top of the crucible ...3-15
3-8.Removing the crucible from the source. Note angle of
withdrawal ...................3-16
Section 4
4-1. Front view of high-performance emitter assembly . 4-7
4-2. High-performance emitter viewed from rear ....4-7
4-3. Exploded view of high-performance emitter ....4-8
Section 5
5-1. Removing the crucible cover ............5-4
5-2. Detail of the sleeve on the Allen driver .......5-5
5-3. Socket-head screw correctly retained by the sleeve on
the end of the Allen driver ............5-5
5-4. Removing the screws that secure the crucible to the
crucible mounting flange .............5-6
5-5. Removing the crucible from the source. Note angle of
withdrawal ....................5-7
5-6. Removing the emitter assembly ...........5-8
5-8. Removing the screws that secure the coil housing to the
pole pieces ....................5-9
5-7. Uncoupling the water-crossover tube ........5-9
5-9. Removing the coil housing .............5-10
5-10. Removing the screws that secure the LH pole piece to
the base plate ..................5-10
5-11. Correct technique for detaching pole pieces from
magnet and base plate..............5-11
5-12. Removing the water baffle ............5-12
5-13. Detaching the pivot plate shaft from the base plate
.........................5-13
5-14. Removing the screws that secure the bearing housing
assembly to the crucible mounting flange ....5-14
5-15. Parts layout, STIH-270-2PT source, with emitter,
bearing housing assembly, and drive assembly still
intact ......................5-15
5-16. Removing the retaining ring ...........5-17
5-17. Layout of the parts of the bearing housing assembly, in
order of reassembly ...............5-17
5-18. Allen driver inserted through hole in the bearing
housing .....................5-18
5-19. Removing the retaining ring that secures the outer
crucible drive bearing in the bearing housing . 5-22
5-20. Removing the retaining ring that retains the drive
shaft .......................5-22
5-21. The parts of the drive shaft assembly laid out in order
of reassembly ..................5-24
Section 6
6-1. Correct and incorrect beam-spot positions with 0 A
longitudinal deflection current applied......6-5
Section 7
7-1. Source assembly, STIH-270-2CKB, pop-up type. Side
views .......................7-2
7-2. Source assembly, STIH-270-2CKB, pop-up type. Top
and bottom views .................7-3

SUMMARY OF TERMS AND CONDITIONS OF SALE
MECHANICAL WARRANTY: For a period of
twelve (12) months from the date of original ship-
ment to Purchaser thereof, the apparatus and each
part or component manufactured by Temescal, a di-
visionofTheBOCGroup,Inc.,hereinafterknownas
“Seller,” is warranted to be free from functional de-
fects in materials and workmanship. The foregoing
warranty is subject to the condition that the appara-
tus, part, or component be properly operated under
conditions of normal use, and that regular periodic
maintenance and service be performed, or replace-
ments made, in accordance with instructions pro-
vided by Seller. The foregoing warranty shall not
apply to any apparatus, part, or component that has
been repaired other than by Seller or an authorized
representative of Seller, or in accordance with writ-
ten instructions provided by Seller; that has been al-
tered by anyone other than Seller; or that has been
subject to improper installation or abuse, misuse,
negligence, accident, or corrosion.
Purchaser’s sole and exclusive remedy under the
abovewarrantyislimitedto,atSeller’soption,repair
or replacement of defective parts or components, or
returntoPurchaserofthepriceoftheapparatus. Any
such obligation on Seller’s part is subject to the fol-
lowing requirements: (x) the defect must be
promptly reported to Seller; (y) if so advised by
Seller, Purchaser must return the part or component
with a statement of the observed deficiency not later
than seven (7) days after the expiration date of the
warranty to the address designated by Seller, during
normal business hours, transportation charges pre-
paid; and (z) upon examination by Seller, the part or
component must be found not to comply with the
above warranty. Return trip transportation charges
forthepartorcomponentshallbepaidbyPurchaser.
In the event that Seller elects to refund the purchase
price, the apparatus shall be the property of Seller
andshallbepromptlyshippedtoSelleratSeller’sex-
pense. This mechanical warranty shall be void and
the apparatus shall be deemed to be purchased AS IS
in the event that the entire purchase price has not
beenpaidwithinthirty(30)daysoforiginalshipment
of the apparatus.
THERE ARE NO EXPRESS OR IMPLIED WAR-
RANTIES THAT EXTEND BEYOND THE WAR-
RANTY HEREINABOVE SET FORTH. THERE
IS NO WARRANTY OF MERCHANTABILITY
OR FITNESS FOR A PARTICULAR PURPOSE
WITH RESPECT TO THE APPARATUS OR ANY
PART OR COMPONENT THEREOF, AND NO
WARRANTY SHALL BE IMPLIED BY LAW.
ItemsnotofSeller’smanufacturebutresoldbySeller
are the products of other manufacturers and their
warranty, if any, shall apply. THERE ARE NO
WARRANTIES OF ANY KIND ON PRODUCTS
OF OTHER MANUFACTURERS RESOLD BY
TEMESCAL, EXCEPT THE WARRANTY OF TI-
TLE, AND NO WARRANTIES SHALL BE IM-
PLIED BY LAW. THERE IS NO EXPRESS OR
IMPLIED WARRANTY OF MERCHANTABIL-
ITYOR OFFITNESSFOR APARTICULAR PUR-
POSE WITH RESPECT TO PRODUCTS OF
OTHER MANUFACTURERS.
PERFORMANCE WARRANTY: Seller warrants
thattheapparatuswillcomplywiththespecifications
set forth in the purchase order. All specifications are
subject to the corrections and tolerances allowed by
the NEC. If the purchase order expressly provides
for factory testing to verify compliance with the
specifications, Purchaser shall be entitled to witness
the testing and the results of the testing. Upon dem-
onstration of compliance with the specifications by
factorytesting, Seller’sliability forfailure tocomply
with the specifications shall terminate. In the event
that the purchase order does not describe a compre-
hensive test program for demonstration of compli-
ance with the specifications, Seller’s test program
(which may incorporate extrapolation of data or test
results based upon similarity of criteria established
by Seller) shall be used for such purpose.
If the purchase order does not expressly provide for
factory testing, compliance with the specifications
shall be demonstrated by field testing which shall be
conducted by Purchaser at Purchaser’s expense.
Sellershallhavetherightto:(a)witnessthefieldtest-
ing and to verify the results of such field testing; (b)
STIH-270-2PT 0101-9004-0A iii

have free access to all data compiled by Purchaser in
connection with any field test; and (c) conduct its
own field test at its own expense during any four-
teen-day (14-day) consecutive period which may be
mutually agreed upon by Seller and Purchaser; pro-
vided, however, that Seller shall have the right to
field test within six (6) months of receipt from Pur-
chaser of any notice of failure to comply with the
specifications. If compliance with the specifications
istobedemonstratedbyfieldtesting,Purchasershall
conduct and complete all field testing within sixty
(60) days of the original shipment of the apparatus
and shall promptly notify Seller of any failure to
complywith the specifications. Sellershall notbe li-
able for any failure to comply with the specifications
demonstrated by field testing unless it receives no-
tice thereof within sixty-seven (67) days of the date
of original shipment of the apparatus.
In the event that factory testing or field testing does
not demonstrate compliance with the specifications,
Purchaser’s sole and exclusive remedy under the
abovewarrantyislimitedto,atSeller’soption,repair
or replacement of defective parts or components or
return to Purchaser of the purchase price of the appa-
ratus. Intheevent thatSellerelectsto refundthe pur-
chase price, the apparatus shall be the property of
Seller.
Any obligations on Seller’s part under this perfor-
mance warranty are subject to thefollowing require-
ments:(x) thenature ofthe failureoftheapparatusto
comply with the specifications must be promptly re-
ported to Seller in writing; (y) if the apparatus has
been delivered and field tested, Purchaser must re-
turn the apparatus or any part orcomponent to Seller
upon its request, not later than sixty-seven (67) days
afterinitialshipmenttoPurchaser,totheaddressdes-
ignated by Seller, during normal business hours,
transportation charges prepaid; and (z) upon exami-
nation and testing by Seller, the apparatus must be
found not to comply with the specifications. Return
trip transportation charges for the apparatus or any
part or component shall be paid by Purchaser. This
performance warranty shall be void and the appara-
tus shall be deemed to be purchased AS IS in the
event that the entire purchase price hasnot been paid
withinthirty(30)daysoforiginalshipmentof theap-
paratus.
THERE ARE NO EXPRESS OR IMPLIED WAR-
RANTIES THAT EXTEND BEYOND THE WAR-
RANTY HEREINABOVE SET FORTH. THERE
IS NO WARRANTY OF MERCHANTABILITY
OR FITNESS FOR A PARTICULAR PURPOSE
WITH RESPECT TO THE APPARATUS OR ANY
PART OR COMPONENT THEREOF, AND NO
WARRANTY SHALL BE IMPLIED BY LAW.
DISCLAIMER OF LIABILITY: IN NO EVENT
SHALL SELLER BE LIABLE FOR DIRECT, IN-
DIRECT, SPECIAL, INCIDENTAL, OR CONSE-
QUENTIAL DAMAGES ARISING FROM ANY
SOURCE such as, but not limited to, the manufac-
ture, use, delivery (including late delivery), or trans-
portation of any apparatus, part, or component sold
to Purchaser, whether such damages are caused by
Seller’s negligence or otherwise. Without limiting
the generality of the foregoing sentence, Seller shall
notbe liablefor:the costofcapital; thecostof substi-
tute apparatus, services, repairs, components, or
parts; loss of profit or revenue; the cost of power,
whether purchased or produced by the consumer
thereof; loss of use of the apparatus or any part
thereof, or of any other property owned by Pur-
chaser; claims or costs of Purchaser’s customers; in-
jurytopersons,ordeath;ordamagestoanyproperty.
In the event that any limited warranty or disclaimer
ofliabilityis foundtobe unlawfulor inapplicable,or
to have failed of its essential purpose, Seller’s liabil-
ity shall be limited to the amount paid by Purchaser
for the apparatus.
iv 0101-9004-0A STIH-270-2PT

SAFETY INSTRUCTIONS FOR OPERATING AND SERVICE PERSONNEL
Operators and service personnel should always wear safety glasses. Operators shall not enter areas intended
forserviceaccessonly. Onlyexperiencedservicepersonnelshouldentersuchareas,andonlyaftertakingthe
preliminary precautions described in paragraphs 1 through 6 below.
DANGER
Potentiallylethalvoltagesmayexistwithinthissystem,evenwiththemainpowerswitchedoff. Service
shouldonlybeattemptedbyqualifiedpersonnel. Failuretoobserveallsafetyprecautionscanresultin
personal injury.
Observetheprecautionsdescribedbelowwhen servicingthissystem,especiallywhen servicingcomponents
where high voltages might be present.
1Before servicing or operating this equipment, read all the component manuals supplied with the system,
paying special attention to safety instructions.
2Post HIGH VOLTAGE WARNING signs in conspicuous locations within the service area.
3Remove rings, watches, bracelets, and any other metal jewelry before working around high voltage.
4DO NOT WORK ALONE!
5Be sure that all equipmentis connected to a power receptaclehaving the correct polarity and grounding,
asprescribedby thelocalelectricalcodes. Refertothe powersupplyportion ofthedocumentationto de-
termine the proper electrical ground for high-voltage components.
6Before servicing any high-voltage component, switch off the electrical power at the component’s main
power switch. This switch should have a lockout feature. Lock the power off andkeep the key with you
while you are working on the equipment.
7Certainelectricalparts(e.g.,electrolyticcapacitors)holdalethalvoltageevenafterthepowerisswitched
off. Before entering any service area, use a grounding hook to short out such parts. Be sure that these
parts are discharged before starting any repairs.
8DO NOT touch high-voltage leadsunless power is off and a grounding hook is connected to thepartsto
be serviced.
9The high-voltage components of the system should beequipped with electrical interlocks to protect per-
sonnel from injury. DO NOT ATTEMPT TO DEFEAT, OVERRIDE, OR BYPASS THESE PROTEC-
TIVE DEVICES!
10 Never leave loose ends on high-voltage connections.
11 Observe the following warning if the system employs Radio Frequency (RF) power.
DANGER
RF radiation-even at modest power levels-can cause serious injury. If any of the RF components (e.g.,
the RF power supply, the RF matching network, or the RF electrodes or shielding inside the product
chamber) are moved or changed in any way, the RF energy may be radiated outside the equipment.
Monitor the equipment to assure that external RF radiation is below the levels prescribed by any and
all applicable safety codes.
STIH-270-2PT 0101-9004-0A v

vi 0101-9004-0A STIH-270-2PT
Special Amendment for United Kingdom Users
All Electrical Power Sources: Safety Precautions
Only authorized personnel should be permitted to carry out work on this system.
Prior to any servicing, grounding hooks should be used to short out all high-voltage parts and conductors in
both the vacuum system and thehigh-voltage power supply. Screensprotecting extra-high-voltage conduc-
torsshouldberemovedonlyifappropriateactionhasbeentakentoensurethatextra-high-voltageconductors
are dead and cannot be re-energized inadvertently.
In addition, all personnel should be aware of:
1theElectricity(FactoriesAct) SpecialRegulations(1908 and1944),inparticular,Regulations18(d) and
28 of the 1980 Regulations, as amended; and
2the employer’s responsibility to set up suitable systems to safeguard the health and safety of employees,
according to the Health & Safety at Work etc. Act (1974).

STIH-270-2PT 0101-9004-0A vii
USER RESPONSIBILITY
Thisequipmentwillperforminaccordancewiththeinstructionsandinformationcontainedintheuser’sman-
ual and its referenced documents when such equipmentis installed, operated, and maintained in compliance
withsuchinstructions. Theequipmentmustbecheckedperiodically. Defectiveequipmentshallnotbeused.
Parts that are broken, missing, plainly worn, distorted, or contaminated, shall be replaced immediately.
Should such repair or replacement become necessary, a telephonic or written request for service should be
made to Temescal.
The equipment, or any of its parts, shall not be altered without the prior written approval of Temescal. The
user and/or purchaser of this equipment shall have the sole responsibility for any malfunction which results
from improper use, faulty maintenance, damage, improper repair, or alteration by any party other than
Temescal.

viii 0101-9004-0A STIH-270-2PT
HEALTH HAZARD
The condensates deposited on the tank walls of a vacuum system aregenerally in the form of extremely fine
particles. The nature, as well as the form, of the materials pose the following potential health hazards:
a) Inhaling fine particles (powder) may cause damage to the lungs. To help prevent this, wear a protec-
tive respirator mask with fine filter that has been approved by the National Institute for Occupational
Safety and Health (NIOSH) and the federal Mine Safety and Health Administration (MSHA).
b) Some substances are toxic and inhaling them should be avoided. Take steps to ascertain whether or
not the material being deposited is a known toxic substance. Refer to the Material Safety Data
Sheet(s) covering the evaporant(s) in question.
c) Certain powders (titanium, for instance) can cause flash fires when exposed to oxygen or other oxi-
dizers. Therefore, when opening the chamber door after a deposition cycle, exercise extreme caution
and allow time for the coating surface to oxidize. Breakage of some of the more reactive condensates
may be hazardous, even when the above precautions are observed. In this situation, fire-protective
clothing should be worn.

SECTION 1
DESCRIPTION AND SPECIFICATIONS
1.1 SECTION OVERVIEW
ThissectionprovidesageneraldescriptionoftheSTIH-270-2PTsource,detailedspecificationsfortheproduct,
andinformationabouttheavailableaccessories.Section1.2describestheitemsthatshouldbefoundintheship-
pingcontainer,bothforgunsshippedfullyassembledandforguns shippedasabaseunitpluscomponents.Sec-
tion1.3providesa generalproductdescription,alongwithinformationon orderingadditionalcruciblesfor this
convertiblesource.Section1.4containsthegun’sspecifications,includingdetaileddimensioneddrawings,and
section1.5providesinformationabouttheaccessoriesthatareavailablefromTemescaltosupporttheproduct.
STIH-270-2PT 0101-9004-0A 1-1

1.2 UNPACKING
Remove the source from its shipping container. While unpacking, check the components in the container
against the packing list. Any discrepancy between the parts list and the actual parts received should be re-
portedtoTemescalrepresentatives.Inspectallpartsforpossibledamageinshippingandverifythatthegunis
ingoodworkingorder beforedisposingof itspackaging.If youdiscoverthat thesource hasbeendamaged in
shipment, report the damage immediately to the carrier and to the Temescal Service Department.
NOTE
To minimize vacuum system contamination, always wear rubber
gloves or lint-free linen gloves when handling the source, any of its
parts, or any other component that will be used in the vacuum
chamber.
The PopTop SuperSource2 can bepurchased either fully assembled or as a kit containing a base unit plus the
parts required to make up a complete source. If you have purchased a fully assembled source, the shipping
container should contain the assembled source plus the following items:
•two shunt bars
•one spare parts kit (PN 0627-3050-0) for the source
•one 7/64" Allen driver with specially machined sleeve
•one 10-24 ×1" ×¾" stainless steel thumbscrew
Ifyou havepurchaseda kitwitha baseunitpluscomponents,the shippingcontainershouldcontaintheitems
listed above plus the following:
•one base unit (i.e., a side- or bottom-drive source minus crucible, crucible cover, and emitter)
•one crucible
•one crucible cover
•one emitter assembly
•one spare parts kit for the emitter assembly
The availablekits cover all combinations ofdrive styles (i.e, side drive or bottom drive),crucibles, and emit-
ter assemblies.
NOTE
Base units as well as fully assembled guns ship with anti-cross-
contamination inserts for both four- and six-pocket crucibles,
regardless of which type of crucible is supplied as part of a
particular order. The smaller, nearly cube-shaped copper inserts
(PN 0715-8173-1) are for use with four-pocket crucibles, crucibles
with one banana-shaped pocket, and continuous-trough evaporant
carousels. The longer, arc-shaped inserts (PN 0715-8173-2) are for
use with six-pocket crucibles. Take care not to lose or damage the
‘extra’ inserts (i.e., the set that is not for use with the crucible you
will be using initially). You will need these inserts should you switch
from four- to six-pocket operation or vice versa.
Description and Specifications
1-20101-9004-0A STIH-270-2PT

1.3 PRODUCT DESCRIPTION
General Characteristics
The STIH-270-2PT belongs to Temescal’s SuperSource2 line of turret sources, which offer enhanced versa-
tility,convenience,anddependabilityin applicationsrangingfromopticalandmicroelectronicproductionto
specializedR&Dcoating.Theseenhancementsresultlargely fromthesource’skey feature,theverticaltrans-
lation cover thatprevents the crucible from seizing during rotation and blocks cross-contamination between
the pockets during operation. Also, the easy removal of its crucible cover and crucible is another important
feature(seeFigure1-1).Removingthecruciblecovermakesiteasytothoroughlycleanthecrucibleandadja-
cent structures, particularly the cut-out above the exposed pocket. On conventional turret sources, it can be
difficult to remove deposited evaporant along this cut-out without risking cross-contamination. Crucible
cover removalmakes it easy to clean thiscut-out quickly and with no risk of cross-contamination. To further
speed the resumption of production, many userskeep a clean cover handy and simply replace theused cover
with the clean one. The used cover can then be sent to a maintenance area for thorough cleaning and
glass-bead honing.
Description and Specifications
STIH-270-2PT 0101-9004-0A 1-3
Figure 1-1. STIH-270-2PT source viewed from the top
RH pole piece Pocket in
evaporation position
Removable
crucible cover
RH external pole
piece extension Coil housing
Coil shield
Crucible
LH external pole
piece extension
LH pole piece

Removing the crucible cover requires only raising the cover and removing the cover’s three mounting
screws. It is not necessary to blow the cooling water out of the source before removing the cover. Once the
cover is off, crucible removal is relatively easy, though this operation does necessitate blowing out the
source’s water channels. If desired, the crucible can be immediately replaced with a crucible of a different
configuration.ThiseasyconvertibilitymakesthePopTopSuperSource2themostversatilesourceinitsclass.
Principal Features
Magnetic Beam Deflection
Thesource’smainmagneticfieldisproducedbyapermanentmagnetmountedattherearofthesource.Mod-
ified by the two pole pieces that form the sides of the source, this magnetic field bends the electron beam
through its 270° arc and directs itinto the exposed pocket. Within thescale of the pocket, theposition of the
beam can be more precisely controlled by fields generated by a set of electromagnetic deflection coils
mountedinthefrontendofthesource.Thesefieldsalsoaffectthebeam’sshapeandconcentration,whichare
further influenced by two setsof adjustable pole piece extensions. One set of these extensions is mounted on
top of the source, while the other extends inside the body of its coil housing.
Emitter Assembly
Theelectronbeamisgeneratedbythe emitterassemblymountedatthefront ofthe source.Theprimaryfunc-
tional parts of the emitter are an electron-emitting filament and a beam former. The filament is easily re-
placed, and the entire emitter can be quickly disassembled for cleaning.
A filament should last for 100-plus hours of operating time when the source is used for evaporating metals.
Shorter filament lifetimes can be expected when the unit is used for evaporating dielectric materials, as such
processescreateanarea oflocalizedhighpressurenearthefilament. Forall otherapplications,short filament
Description and Specifications
1-40101-9004-0A STIH-270-2PT
Figure 1-2. STIH-270-2PT source viewed from the front
Emitter
assembly
Bottom-drive
shaft
Deflection coil
terminals

lifeis attributableto twocauses. Thefirst andmost commonis improperinstallationofthefilament.The sec-
ond is incorrect use of a deposition-rate controller. The person setting up the process parameters mustensure
that the maximum signal output by the ratecontroller will never drive the source beyond its maximum rating
of 10 kW. If the rate-request signal remains too high for too long, the filamentcan burn out as a result of ex-
cess power.
High-Performance Emitter
The optional high-performance emitter assembly is designed to improve dependability, coating uniformity,
andrun-to-runrepeatability.Withitsthicker-gaugefilament,thisnewemitteroffers filamentlifetimestwoto
three times as long asthose of conventionalemitters. In addition, the new design improves the positionalsta-
bility of the filament, the beam former, and the anode. These improvements, in turn, enhance the stability of
beamopticsandreducethepossibilityofanode-beamformercontact,whichcanshortouttheemitter.Thenet
benefits for the user are improved uniformity and reliability.
Drive Assembly
Thesourceis designedsothatwhenonepocketis inthe ‘home’position, theothersare shieldedby thecruci-
blecover.Aringgearfixedtothebottomofthecruciblemountingflangemateswiththegearontheendofthe
drive shaft, whose other end accepts a mechanical coupling. On the side-drive model, this end of the drive
shaft extends horizontally from the housing. On the bottom-drive model, the drive shaft extends toward the
source’s baseplate. On both models, one turn of the drive shaft produces one-quarter turn of the crucible.
Cooling System
Watercirculatesthroughchannelsinthebaseplateand thecoilhousingtoensureadequatecoolingduringop-
eration.TheSuperSource2providesimprovementsinthewaterchannelthatenhancethedirectcruciblecool-
ingthathasalwaysbeenafeatureofTemescalSuperSources.Thewaterinletandoutletarelocatedontherear
of the source.
Spare Parts Kit
The spare parts kit (PN 0627-3050-0) for the source contains extra 6-32 socket-head screws as well as re-
placements for O-rings and the gun’s single quad ring.
Description and Specifications
STIH-270-2PT 0101-9004-0A 1-5

Ordering Additional Crucibles
The table below lists the part numbers for the crucibles and crucible covers currently available for the
STIH-270-2PT.
FOUR-POCKET CRUCIBLES
DESCRIPTION PART NO.
four 15-cc pockets 0715-8444-0
four 25-cc pockets 0715-8454-0
two 7-cc pockets + two 15-cc pockets 0715-8464-0
two 15-cc pockets + two 25-cc pockets 0715-8494-0
three 15-cc pockets + one 25-cc pockets 0715-8484-0
three 25-cc pockets + one 15-cc pocket 0715-8244-0
one 7-cc pocket + one 15-cc pocket + two 25-cc pockets 0715-8474-0
SIX-POCKET CRUCIBLES
DESCRIPTION PART NO.
six 7-cc pockets 0715-8514-0
six 15-cc pockets 0715-8504-0
three 7-cc pockets + three 15-cc pockets 0715-8524-0
CRUCIBLE COVERS
DESCRIPTION PART NO.
Cover for use with 4-pocket crucibles 0627-8144-1
Cover for use with 6-pocket crucibles 0627-4854-1
Description and Specifications
1-60101-9004-0A STIH-270-2PT

1.4 SPECIFICATIONS
Dimensions See drawings
Weight 40.4 lbs. (18.3 kg)
Rotation torque 10 in.•lbs. (11.5 kg•cm)
Maximum bakeout temperature 302° F (150° C)
Maximum power 10 kW
Acceleration voltage 4-10 kV
Operating pressure range
Maximum 5 ×10-4 torr (6.7 ×10-4 mbar)
Minimum 1 ×10-8 torr (1.33 ×10-8 mbar)
Evaporation rate 25,000 Å/min. of Aluminum at a source-to-substrate distance of
10 inches (254 mm)
Beam characteristics
Deflection 270°
Range of spot size/shape From tight oval beam to diffuse oblong beam
Sweep capability Longitudinal and lateral when operated with a sweep controller
Installation requirements
Power
Filament current 70 A at 12 V ac
Emission current 0-1.5 A at 4-10 kV dc (10 kW max.)
Cooling water
Max. Temperature 68° F (20° C)
Flow rate 3.0 gpm (0.19 liter/sec)
Max. inlet pressure 100 psi (6890 mbar)
Min. pressure differential 50 psi (3445 mbar)
Feedthroughs 2 high-voltage feedthroughs rated for 12 kV at 70 A
1 octal feedthrough rated for 600 V at 15 A per lead
1 air/water feed-through with two 3/8" (9.5-mm) OD water tubes and
three 1/8" (3.18-mm) OD air tubes
1 rotary-motion feedthrough with a 1/4-in. (6.4-mm) diameter shaft
Description and Specifications
STIH-270-2PT 0101-9004-0A 1-7

Description and Specifications
1-80101-9004-0A STIH-270-2PT
Figure 1-3.Dimensions of STIH-270-2PT source - top, side, and front views

1.5 ACCESSORIES
Feedthroughs
The feedthroughs described below are required for installation of the PopTop SuperSource2.
1. The high-current octal feedthrough, which provides the conduit from atmosphere to vacuum
for the deflection coil current.
The ordering number for the octal feedthrough is:
1"-dia. O-ring-sealed octal 6047-5808-0
2. Two high-voltage feedthroughs, which provide the conduit from atmosphere to vacuum for
the power supplied to the emitter assembly.
The ordering numbers for high-voltage feedthroughs are:
1"-dia. O-ring-sealed HV feedthrough 0715-9033-0
3. One air/water feedthrough, which provides the conduit from atmosphere to vacuum for the
source’s cooling water and pneumatic cylinder. It is O-ring sealed (PN 0629-0780-2). An
adjustable flow switch is provided. The maximum pressure rating is 100 psig (7.0 kg/cm2).
4. One rotary-motion feedthrough (PN 9999-0013-1). The rotary drive connected to this
ferrofluid-type feedthrough can be either manually operated or motor driven. Note that even
with a manually rotated source, an external indexing mechanism is required to raise and
lower the cover in addition to ensure that the crucible can reliably be positioned with a
pocket in the correct ‘home’ or evaporation position.
Turret Indexer Controller
Temescal’s TRC-3460turret indexercontroller (PN0040-9380-0) featuresmanualandautomatic pocketse-
lection, forward and reverse rotation, and electronicphase adjustmentvia its front panel. The TRC-3460 can
beconfiguredforusewithawidevarietyofcrucibles,including4-, 6-,and8-pocketcrucibles,crucibleswith
various combinations of circular pockets and banana-shaped troughs, and continuous-trough evaporant
carousels.
Beam Sweep Controller
The Temescal SS64 (PN 0611-8570-0) is a programmable beam sweep controller that iscompatible with all
Temescal e-beam sources. The unit’s proprietary Windows-based software enables users to simulate and
modify beam sweep programs on a PC before downloading them to the SS64. Alternatively, users can em-
ploya hand-heldremotecontrolboxtomodifysweepprogramsinrealtime.Variablesweepprogramparam-
eters include amplitude, frequency, position and offset, emission current, and waveform. Four waveforms
(sine, triangle, sawtooth, and clipped) are predefined and preloaded in the unit, which provides for an addi-
tional, arbitrary, user-defined waveform. The SS64 can store up to 64 user-defined sweep programs, while a
virtually unlimited number of such programs can be stored on PC-based computer media.
Deposition Shutter Kit
Acompletedepositionshutter kit(PN0413-4313-0) isavailablefrom Temescal.Thiskit includesthe shutter
actuator mechanism, and a rotary-motion feedthrough for the shutter drive. Numerous combinations ofshut-
ters and shutter arms are available. Contact Temescal Sales for assistance in ordering these items.
Description and Specifications
STIH-270-2PT 0101-9004-0A 1-9

Dual Shutter Controller
Control units designed to control either one or two shutters are available from Temescal. For the sin-
gle-shutter controller, order PN 0611-4810-0. For the dual-shutter controller, order PN 0611-4810-1.
Crucible Liners
Theoptionalcruciblelinersavailablefrom Temescalincrease evaporation rates by reducing heat transfer be-
tween the evaporant and the water-cooled crucible. They also allow particulate-free pocket replenishment
and reduce the risk of cross-contamination when one material replaces another in a given pocket. Liners are
available in the following materials:
1. Molybdenum. These are high-strength inserts machined from solid-rod molybdenum. When con-
sidering the use of these liners, users should be aware that some metals alloy with molybdenum.
2. Tungsten. In most respects, tungsten liners are suitable for the same range of applications as
molybdenum liners, The one significant difference is that tungsten has a higher melting point
than molybdenum.
3. Graphite. These liners are machined from ATJ-grade solid-rod graphite. Materials such as
pure gold, silver, and copper do not alloy with graphite and are easily removed from the insert.
4. POCO graphite. Liners made of this material are effective in aluminum evaporation pro-
cesses. Their use impedes the formation of aluminum carbide.
For information on available sizes and ordering numbers, consult the current Temescal price list.
Description and Specifications
1-10 0101-9004-0A STIH-270-2PT