BRONKHORST W-300B User manual

Instruction manual
C.E.M.
Controlled Evaporator
and Mixer
W-300B
Doc. no.: 9.17.082B Date: 14-03-2017
ATTENTION
Please read this instruction manual carefully before installing and operating the instrument.
Not following the guidelines could result in personal injury and/or damage to the equipment.

page 29.17.082
BRONKHORST®
Even though care has been taken in the preparation and
publication of the contents of this manual, we do not
assume legal or other liability for any inaccuracy, mistake,
mis-statement or any other error of whatsoever nature
contained herein. The material in this manual is for
information purposes only, and is subject to change without
notice.
Warranty
Bronkhorst®products are warranted against defects in
material and workmanship for a period of three years from
the date of shipment, provided they are used in accordance
with the ordering specifications and the instructions in this
manual and that they are not subjected to abuse, physical
damage or contamination. Products that do not operate
properly during this period may be repaired or replaced at
no charge. Repairs are normally warranted for one year or
the balance of the original warrant, whichever is longer.
See also paragraph 9 of the Conditions of sales.
The warranty includes all initial and latent defects, random
failures, and undeterminable internal causes.
It excludes failures and damage caused by the customer,
such as contamination, improper electrical hook-up,
dropping etc.
Re-conditioning of products primarily returned for warranty
service that is partly or wholly judged non-warranty may be
charged for.
Bronkhorst HIGH-TECH B.V. prepays outgoing freight
charges when any party of the service is performed under
warranty, unless otherwise agreed upon beforehand.
However, if the product has been returned collect to
Bronkhorst HIGH-TECH B.V., these costs are added to the
repair invoice. Import and/or export charges, foreign
shipping methods/carriers are paid for by the customer.

9.17.042 page 3
BRONKHORST®
Safety Precautions
The following safety precautions should be observed before
using this product and any associated instrumentation.
Although some instruments and accessories would normally
be used with non-hazardous voltages, there are situations
where hazardous conditions may be present.
This product is intended for use by qualified personnel who
recognize shock hazards and are familiar with the safety
precautions required to avoid possible injury. Read the
operating information carefully before using the product.
Before operating an instrument, make sure the line cord is
connected to a properly grounded power receptacle. Inspect
the connecting cables, test leads, and jumpers for possible
wear, cracks, or breaks before each use.
The instrument and accessories must be used in
accordance with its specifications and operating instructions
or the safety of the equipment may be impaired.
When fuses are used in a product, replace with same type
and rating for continued protection against fire hazard.
Opening of the equipment is not allowed. There are no
repairable parts inside. In case of a defect please return the
equipment to Bronkhorst High-Tech.
The symbol on an instrument indicates that the user
should refer to the operating instructions located in the
manual.
Surfaces near the symbol may be hot.
To maintain protection from electric shock and fire,
replacement components in mains circuits, must be
purchased from Bronkhorst®. Standard fuses, with
applicable national safety approvals, may be used if the
rating and type are the same. Other components that are
not safety related may be purchased from other suppliers as
long as they are equivalent to the original component. (Note
that selected parts should be purchased only through
Bronkhorst®to maintain accuracy and functionality of the
product.) If you are unsure about the applicability of a
replacement component, call a Bronkhorst®office for
information.

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BRONKHORST®
Short-Form Operation Instruction
- Before installing your CEM system it is
important to check:
* flow rate
* fluids to be controlled/evaporated
* up- and downstream pressures
* output signals
* heater temperature
- Watch the red-coloured stickers and make sure the
test pressures are in agreement with normal safety
factors for your application.
- Check if the piping system is clean. Always install filters
to assure particle free fluids.
- Install the CEM system and tighten the fittings
according to the instructions of the supplier of the
fittings.
- Check the system for leaks before applying fluid
pressure.
- In systems with corrosive or reactive fluids, purging with
an inert gas is absolute necessary before use. Complete
purging after use with corrosive or reactive fluids is also
required before exposing the system to air.
- Apply the controlled power to the heat exchanger
and wait till the temperature is stabilised.
- Your CEM system is now ready for operation.
- Be sure that your liquid system is free of gas bubbles. If
needed remove the de-aerate plug on top of the CEM
control valve for de-aeration.

9.17.042 page 5
BRONKHORST®
TABLE OF CONTENTS
1 Introduction
1.1 General .........................................................................................................................................page 7
1.2 Principle of operation ....................................................................................................................page 7
1.3 CEM set-up ...................................................................................................................................page 7
2 Installation
2.1 Receipt of equipment ....................................................................................................................page 8
2.2 Return shipment............................................................................................................................page 8
2.3 Service ..........................................................................................................................................page 8
2.4 Mounting position..........................................................................................................................page 8
2.5 Liquid filling ...................................................................................................................................page 8
2.6 In-line filter ....................................................................................................................................page 9
2.7 Fluid connections ..........................................................................................................................page 9
2.8 Electrical connections ...................................................................................................................page 9
2.8.1 General .........................................................................................................................................page 9
2.8.2 Pin configuration ...........................................................................................................................page 9
2.9 Electrical specifications...............................................................................................................page 10
2.9.1 Functional diagram .....................................................................................................................page 10
2.9.2 Electrical specifications...............................................................................................................page 10
2.10 Caution........................................................................................................................................page 10
2.11 Supply pressure ..........................................................................................................................page 11
2.12 System purging ...........................................................................................................................page 11
2.13 Seals ...........................................................................................................................................page 11
3 Operation
3.1 General .......................................................................................................................................page 12
3.2 Power and warm-up....................................................................................................................page 12
3.3 Start-up/close-down ....................................................................................................................page 12
4 Readout and control unit
4.1 Application with Bronkhorst®standard Readout and Control unit ..............................................page 14
4.1.1 General .......................................................................................................................................page 14
4.1.2 Rear panel connector..................................................................................................................page 14
4.1.3 Operation ....................................................................................................................................page 14
4.2 Application with none Bronkhorst®standard Readout and Control unit .....................................page 15
4.2.1 Recommended graphical diagram heater system ......................................................................page 15
5 Cables
5.1 EMC and cables..........................................................................................................................page 16
Appendices
1 Recommendations for handling the Bronkhorst®DLI (CEM) System
A. Vacuum system
B. Non Vacuum system
2 Enclosures

page 69.17.082
BRONKHORST®
Mix
Liquid
Gas
C
ONTROLLED
VAPORATOR
E
M
IXER
Control valve assembly
Purge connector
Liquid-gas mixing
device
Liquid Gas
Heat exchanger
Process
1 Introduction
1.1 General
The Bronkhorst®series CEM system is a unique
system to realise Mass Flow Control of vapour & mixtures,
containing up to 1200 g/h vapour. A complete system is a
combination of a mixing valve, a heating device, a liquid meter with
control function and a mass flow controller for the carrier gas. The
liquid flow through the liquid meter is controlled by the mixing valve.
A complete system also incorporates a readout/control unit,
including power supply for operation of the CEM system
devices.
1.2 Principle of operation
The abbreviation "CEM" stands for:
"C" the control of a flow of gas mixture, gas, liquid or liquid/gas mixture
"E" the evaporation of a flow of liquid/gas mixture by means of a temperature controlled heating device
"M" the mixing of a gas and a liquid (vapour).
At room temperature the liquid, for instance water or TEOS, is drawn from a container with an inert gas
blanket, or membrane, and measured by a liquid mass flow meter type µ-FLOW* or LIQUI-FLOW®*. The
required flow rate is controlled to the setpoint value by a control valve that forms an integral part of the CEM
system.
A carrier gas, controlled by a MFC* is used to stimulate the evaporation process as a mixing component, and
furthermore to transport the vapour.
The process is highly repeatable and efficient.
Subsequent total evaporation of the liquid is achieved in the CEM.
* For operation of these devices consult the appropriate instruction manuals.
1.3 CEM set-up
The CEM system is built up around 3 different parts; a control
valve, a mixing device and a heat exchanger in which heat is added
to the mixture of fluids for evaporation and furthermore to prevent
condensation. The temperature of the heat exchanger is controlled
by a temperature controller which is part of the readout and control
unit.

9.17.082
page 7
BRONKHORST®
2 INSTALLATION
2.1 Receipt of equipment
Check the outside packing box for damage incurred during shipment. Should the packing box be damaged,
then the local carrier must be notified at once regarding his liability, if so required. At the same time a report
should be submitted to:
BRONKHORST HIGH-TECH B.V.
RUURLO HOLLAND
Remove the envelope containing the packing list; carefully remove the equipment from the packing box.
Do not discard spare- or replacement parts with the packing material and inspect the contents for damaged
or missing parts.
2.2 Return shipment
When returning material, always describe the problem and if possible the work to be done, in a covering
letter.
It is absolutely required to notify the factory if toxic or dangerous gases have been metered with the
instrument!
This to enable the factory to take sufficient precautionary measures to safe-guard the staff in their repair
department. Take proper care of packing, if possible use the original packing box; seal instrument in plastic
etc.
All instruments must be dispatched with a completely filled in 'declaration on contamination form'. (In the
back of this manual)
Instruments without this declaration will not be accepted.
Note:
If the instruments have been used with toxic or dangerous gases the customer should pre-clean the
instrument.
Important:
Clearly note, on top of the package, the customer clearance number of BRONKHORST HIGH-TECH B.V.,
namely:
NL801989978B01
2.3 Service
If this equipment is not properly serviced, serious personal injury and/or damage to the equipment could be
the result. It is therefore important that trained and qualified service personnel perform servicing. Bronkhorst®
has a trained staff of servicemen available.
2.4 Mounting position
Preferably the CEM system is mounted in a vertical position, with the control valve section pointing upwards
and the vapour output pointing downwards.
Avoid installation in close proximity of mechanic vibration or strong heat sources.
2.5 Liquid filling
The purge connector can be used to remove the air from the liquid system. If available, use vacuum to de-
aerate the valve and liquid flowmeter before filling with liquid.

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BRONKHORST®
2.6 In-line filter
Although fluids and piping should be absolutely free from dirt, it is recommended to install inline filters
upstream of the flowmeter(s).
2.7 Fluid connections
The liquid meter should be installed according to its manual. The outlet of this meter should be connected to
the liquid input port of the CEM valve. The controller section of the liquid flowmeter controls the CEM valve.
Electrical connections should be made according to the customer system description.
The outlet of the gas flow controller must be connected to the gas input part of the CEM valve.
The vapour outlet of the CEM should be directly coupled to the process, this tube should be heated at a
temperature higher than the heater in order to assure that the vapour will not condense in this line. Avoid
“cold spots” in the outlet.
* Note: Always check your system for leaks, before applying fluid pressure. Especially if toxic, explosive or
other dangerous fluids are used.
2.8 Electrical connections
2.8.1 General
Bronkhorst®recommends using their standard Readout and Control module and standard cables, which
have been tested together with the system. These cables are always supplied with the CEM system.
When not using the standard Readout and Control unit please read chapter 4.
2.8.2 Pin configuration
The heat exchanger is equipped with two connectors:
connector (1) 6-pin male
Pinnumber
Description
A
B
C
D
E
F
Not connected
Not connected
PT100 (T-sensor)
PT100 (T-sensor)
Safety switch
Safety switch
connector (2) 5-pin male
Pinnumber
Description
110…120Vac supply
Description
220…240Vac supply
A
B
C
D
E
PE
Heater (N)
Heater (L)
Heater (L)
Heater (N)
PE
Not connected
Heater (N)
Heater (L)
Not connected

9.17.082
page 9
BRONKHORST®
2.9 Electrical specifications
2.9.1 Functional diagram
2.9.2 Electrical specifications
Heater
The heater consists of two heater elements with a resistance of approx. 19,25 ± 0.5 Ohm each.
For 110…120Vac-power supply: two heater elements switched parallel.
For 220…240Vac-power supply: two heater elements switched serial.
Temperature sensor
Heraeus Sensor PT 100 sensor M-K 2515 1PT100
Safety switch:
Pepi Miniature Thermostat Model C, CH version
Switch temperature: 200 ºC
Contact rating: 24Vdc max / 3A max.
Controlled power supply
110…120Vac or 220…240Vac max. (Factory adjusted)
50-60 Hz
Power 1650VA max.
Max. Ambient temperature
50°C max.
2.10 Caution
Each system is pressure tested to at least 1.5 times the working pressure of the process conditions
stipulated by the customer, with a minimum of 8 bar.
This test pressure is stated on the CEM valve with a Red Coloured sticker.
Check test pressure before installing in the line.
If this sticker is not available, or the test pressure is incorrect, the instrument should not be mounted in the
process line and be returned to the factory.
Each instrument is leak tested to at least 2 ⋅10-9 mbar.l/s Helium.

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BRONKHORST®
2.11 Supply pressure
Do not apply pressure until electrical connections are made. When applying pressure to the system, take
care to avoid pressure shocks in the system, and increase pressure gradually. Be sure that all setpoints are
at zero when doing so.
2.12 System purging
If corrosive or reactive fluids are used, purging with an inert gas is absolutely necessary, because if the
tubing has been exposed to air, introducing these fluids will tend to clog up or corrode the system due to a
chemical reaction with air or moist air.
Complete, long term purging is also required to remove such fluids from the system before exposing it to air.
It is preferred not to expose the system to air, when working with these corrosive fluids. Cycled purging and
evacuating is preferred.
2.13 Seals
Bronkhorst® has gathered a material compatibility chart from a number of sources believed to be reliable.
However, it is a general guide only. Operating conditions may substantially change the accuracy of this
guide. Therefore is no liability for damages accruing from the use of this guide. The customer’s application
demands its own specific design or test evaluation for optimum reliability. So check if the seals are correct for
your process. However the CEM system has metal seals for all connections. Only the valve plunger is an
elastomer.