BRONKHORST IN-FLOW User manual

Instruction manual
General instructions digital
Mass Flow / Pressure instruments
laboratory style / IN-FLOW
Doc. no.: 9.17.022V Date: 12-01-2016
ATTENTION
Please read this instruction manual carefully before installing and operating the instrument.
Not following the guidelines could result in personal injury and/or damage to the equipment.

BRONKHORST®
SCOPE OF THIS MANUAL
This manual covers the general part of digital massflow / pressure instruments for gases
or liquids. It handles the general instructions needed for the instruments.
More information can be found in other documents.
Multibus instruments have modular instruction manuals consisting of:
-General instructions digital Mass Flow / Pressure instruments
laboratory style / IN-FLOW (document nr. 9.17.022)
-Operation instructions digital instruments (document nr. 9.17.023)
-Fieldbus/interface description:
-FLOW-BUS interface (document nr. 9.17.024)
-PROFIBUS–DP interface (document nr. 9.17.025)
-DeviceNet interface (document nr. 9.17.026)
-RS232 interface with FLOW-BUS protocol (document nr. 9.17.027)
-Modbus interface (document nr. 9.17.035)
-EtherCAT interface (document nr. 9.17.063)
-PROFINET interface (document nr. 9.17.095)

BRONKHORST®
Even though care has been taken in the preparation
and publication of the contents of this manual, we do
not assume legal or other liability for any inaccuracy,
mistake, mis-statement or any other error of
whatsoever nature contained herein. The material in
this manual is for information purposes only, and is
subject to change without notice.
Warranty
The products of Bronkhorst®are warranted against
defects in material and workmanship for a period of
three years from the date of shipment, provided they
are used in accordance with the ordering specifications
and the instructions in this manual and that they are
not subjected to abuse, physical damage or
contamination. Products that do not operate properly
during this period may be repaired or replaced at no
charge. Repairs are normally warranteed for one year
or the balance of the original warranty, whichever is the
longer.
See also paragraph 9 of the Conditions of sales.
The warranty includes all initial and latent defects,
random failures, and undeterminable internal causes.
It excludes failures and damage caused by the
customer, such as contamination, improper electrical
hook-up, physical shock etc.
Re-conditioning of products primarily returned for
warranty service that is partly or wholly judged non-
warranty may be charged for.
Bronkhorst High-Tech B.V. prepays outgoing freight
charges when any party of the service is performed
under warranty, unless otherwise agreed upon
beforehand. However, if the product has been returned
collect to Bronkhorst High-Tech B.V., these costs are
added to the repair invoice. Import and/or export
charges, foreign shipping methods/carriers are paid for
by the customer.

BRONKHORST®
Short-Form Operation Instruction
Before installing your Mass Flow or Pressure
Meter/Controller it is important to read the attached
label and check:
- flow/pressure rate
- fluid to be metered
- up- and downstream pressures
- input/output signal
Check the red-coloured sticker and make sure the
testpressure is in agreement with normal safety factors
for your application.
Check if the piping system is clean. For absolute
cleanliness always install filters to assure a clean,
moisture- and oil-free gas stream.
Install the Meter/Controller in the line and tighten the
fittings according to the instructions of the supplier of
the fittings. Choose the mounting position according to
the directions given in this manual.
Check the system for leaks before applying fluid
pressure
In systems with corrosive or reactive fluids, purging
with an inert gas is absolute necessary before use.
Complete purging after use with corrosive or reactive
fluids is also required before exposing the system to
air.
Electrical connections must be made with a standard
cable or according to the hook-up diagram in the back
of this manual.
Short form start-up
Install instrument in your process.
Provide instrument with correct pressure(s)
Analog operation
Connect the instrument to the power supply/readout
unit with the 9-pin cable at the DB-9 connector /
8 DIN connector

BRONKHORST®
BUS/digital operation
For this procedure: See description for specific fieldbus
Send a setpoint to the instrument and check the
measured value
Let the instrument warm-up for 30 minutes for best
accuracy
Your Mass Flow/Pressure Meter/Controller is now
ready for operation.
! Caution
Operation via fieldbus is done by means of a flatconductor
cable connected with the main PC board.
Although all functionality is possible by means of RS232
and the switch on top of the instrument, it is important
that care should be taken when removing the upper part
of the housing.

BRONKHORST®

BRONKHORST®
TABLE OF CONTENTS
1Introduction ................................................................................................................................................... 9
1.1General description................................................................................................................................ 9
1.1.1Gas flow.......................................................................................................................................... 9
1.1.2Liquid flow....................................................................................................................................... 9
1.1.3Pressure ......................................................................................................................................... 9
1.1.4Housings......................................................................................................................................... 9
1.1.5Valves........................................................................................................................................... 11
1.2Sensor principles ................................................................................................................................. 12
1.2.1Gas flow sensors (by-pass measurement)................................................................................... 12
1.2.2Gas flow sensors (direct mass flow measurement, CTA based) ................................................. 12
1.2.3Liquid flow sensors ....................................................................................................................... 12
1)The  -FLOW model for flowrates up to 2 g/h.......................................................................................... 12
2)The CTA based LIQUI-FLOW model for flow rates up to approximately 1000 g/h................................. 13
1.2.4Pressure sensor ........................................................................................................................... 13
1.3Valve principles.................................................................................................................................... 13
1.3.1Solenoid valve .............................................................................................................................. 13
1.3.2Vary-P valve ................................................................................................................................. 13
1.3.3Pilot operated valve ...................................................................................................................... 14
1.3.4Bellows valve................................................................................................................................ 14
1.4Kv-value calculation ............................................................................................................................. 14
1.4.1For gases...................................................................................................................................... 14
1.4.2For liquids ..................................................................................................................................... 15
1.4.3Maximum pressure drop............................................................................................................... 16
1.5Sensors and laminar flow devices....................................................................................................... 16
1.6Conversion factors............................................................................................................................... 17
1.6.1Gas conversion factors (by-pass measurement) ......................................................................... 17
1.6.2Gas Conversion Factors (direct mass flow measurement, CTA-based)...................................... 18
1.6.3Liquid Conversion Factors............................................................................................................ 19
1.6.4Software for conversion factor calculation ................................................................................... 19
2Installation ................................................................................................................................................... 20
2.1Receipt of equipment........................................................................................................................... 20
2.2Return shipment .................................................................................................................................. 20
2.3Service ................................................................................................................................................. 20
2.4Mounting .............................................................................................................................................. 21
2.5In-line filter ........................................................................................................................................... 21
2.6Fluid connections................................................................................................................................. 21
2.7Piping ................................................................................................................................................... 22
2.8Electrical connections.......................................................................................................................... 22
2.9Caution................................................................................................................................................. 22
2.10Supply pressure ............................................................................................................................... 23
2.11System purging ................................................................................................................................ 23
2.12Seals ................................................................................................................................................ 23
2.13Equipment storage ........................................................................................................................... 23
2.14Electromagnetic compatibility .......................................................................................................... 23
2.14.1Conditions for compliance with EMC requirements ..................................................................... 23
3OPERATION............................................................................................................................................... 25
3.1General ................................................................................................................................................ 25
3.2Power and warm-up............................................................................................................................. 25
3.3Zeroing................................................................................................................................................. 25
3.4Start-up ................................................................................................................................................ 26
3.5Operating conditions............................................................................................................................ 26
3.6Instrument performance ...................................................................................................................... 26
3.6.1Sensors ........................................................................................................................................ 26
3.6.2Controllers .................................................................................................................................... 26
3.7Manual operation ................................................................................................................................. 26
3.8Analog operation.................................................................................................................................. 27
3.9BUS / digital operation ......................................................................................................................... 27
4Maintenance ............................................................................................................................................... 28
4.1General ................................................................................................................................................ 28
4.2Gas flow sensor ................................................................................................................................... 28

BRONKHORST®
4.3Liquid flow sensor ................................................................................................................................ 28
4.4Pressure sensor................................................................................................................................... 28
4.5Controllers ........................................................................................................................................... 28
4.6Control valves ...................................................................................................................................... 28
4.6.1Solenoid valves ............................................................................................................................ 29
4.6.2Vary-P valve ................................................................................................................................. 29
4.6.3Pilot operated valve ...................................................................................................................... 29
4.6.4Bellows valve................................................................................................................................ 29
4.7Calibration procedure .......................................................................................................................... 29
5Digital instrument ........................................................................................................................................ 30
6Interface description.................................................................................................................................... 30
7TROUBLESHOOTING................................................................................................................................ 30
7.1General ................................................................................................................................................ 30
7.2Troubleshooting summary general...................................................................................................... 31
Appendices
1 Gasconversion table
2 Dimensions digital cases
3 Enclosures (if applicable)

BRONKHORST®
9.17.022 page 9
1 Introduction
1.1 General description
1.1.1 Gas flow
The Bronkhorst®series mass flow meter for gases is an accurate device for measuring gas flows up to 700
bar depending on body rating, virtually independent of pressure and temperature changes.
The system can be completed with a control valve and flexible readout to measure and control gas flows
from 1 mln/min up to several thousand m3
n/h, depending on the specific type of instrument.
For limited flow ranges a metal sealed model is available.
1.1.2 Liquid flow
The Bronkhorst®mass flow meter for liquids is an accurate device for measuring liquid flows up to 400 bar
depending on body rating, virtually independent of pressure and temperature changes. The system can be
completed with a control valve to measure and control liquid flows from 2g/h up to 1000g/h.
1.1.3 Pressure
The Bronkhorst®pressure meter measures pressures from 100 mbar up to 400 bar depending on body
rating, either absolute pressure or gauge pressure and in the range 0 to 15 bar differential pressure too. The
pressure controller controls pressure with a very high accuracy and repeatability. The controller is available
in forward control (P-600 series) and backward control (P-700 series).
The flow going through the pressure controller depends on up and downstream pressures, the orifice
diameter of the valve and kind of fluid.
1.1.4 Housings
Each instrument housing style incorporates several provisions to comply with EMC requirements.
EL-FLOW®, EL-PRESS
The p.c.board is placed in a metalized plastic cover. For electrical connection the
instrument has a male 9-pin miniature sub-D connector for analog/RS232
operation. For digital operation the instrument has various connectors on top. These
instruments are suited for dry (indoor) applications, like laboratories and in well
protected (OEM) housings.
EL-FLOW® , EL-PRESS metal seal
This series has the same housing as the standard EL-FLOW®, EL-PRESS series,
but this series distinguish itself by metal-to-metal seals.

BRONKHORST®
page 10 9.17.022
IN-FLOW , IN-PRESS
To comply with the IP65 ingress protection standard, the p.c. board is housed in a
sealed casted metal housing. For electrical connections the instrument has a 8DIN
male connector for analog/RS232 operation and for digital operation various
connectors on top. These instruments are suited for light industrial (outdoor) use to
IP65.
LIQUI-FLOW®
Two different digital-liquid flow meters can be distinguished:
-FLOW model
The -FLOW model for up to 2 g/h, basically a straight capillary tube with a sensor.
For electrical connection the instrument is equipped with a male 9-pin sub D-
connector. The instrument is suited for dry (indoor) applications like laboratories.
CTA based LIQUI-FLOW
The CTA based LIQUI-FLOWmodel for flow rates up to approximately 1000 g/h.
For electrical connection the instrument is equipped with a male 9-pin sub D-
connector. The instrument is suited for dry (indoor) applications like laboratories.
To comply with the IP65 ingress protection standard, the p.c. board is housed in a
sealed casted metal housing. For electrical connections the instrument has a 8DIN
male connector for analog/RS232 operation and for digital operation various
connectors on top. These instruments are suited for light industrial (outdoor) use to
IP65.