Brooks 9600 Manual

9600 Compressor
Installation, Operation and
Maintenance Instructions
8040444 Revision AA

9600 Compressor
Installation, Operation and Maintenance Instructions
Brooks Automation
8040444 Revision AA
Information provided within this document is subject to change without notice, and although believed to be
accurate, Brooks Automation assumes no responsibility for any errors, omissions, or inaccuracies.
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© 2013 Brooks Automation, Inc. All Rights Reserved. The information included in this manual is Proprietary
Information of Brooks Automation and is provided for the use of Brooks Automation customers only and cannot
be used for distribution, reproduction, or sale without the express written permission of Brooks Automation.
This information may be incorporated into the user’s documentation, however any changes made by the user
to this information is the responsibility of the user.
For Technical Support:
Visit us online: www.brooks.com
January 14, 2013 Part Num 8040444 Revision AA
This technology is subject to United States export Administration Regulations and authorized to the destination
only; diversion contrary to U.S. law is prohibited.
Printed in the U.S.A.
Location GUTS®Contact Number
North America +1-800-FOR-GUTS (1-800-367-4887)
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Singapore [phone]

9600 Compressor Installation, Operation and Maintenance Instructions
©2013 Brooks Automation Inc. Pub. No. 8040444, Rev. AA, 01/14/2013 ECO No. 63723 i
Table of Contents
Table of Contents
Figures
Tables
Safety Conventions
Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . S-1
Signal Word Descriptions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . S-1
Safety Shape Descriptions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . S-2
References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . S-2
Section 1 - 9600 Compressor Description
General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
Compressor Configurations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
System Documentation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
BROOKS-CRYOGENICS Helium Refrigeration System . . . . . . . . . . . . . . . . . . . 1-1
Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3
Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3
Weight . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
Electrical . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
Cooling Water . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
Component Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
System Circuit Breaker . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9
Elapsed Time Meter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9
Control Circuit Breaker . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9
Power ON Indicator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9
Gas Charge Flared Fitting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9
Helium Pressure Gauge . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10
Power Inlet . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10
Return Gas Coupling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10
Cooling Water IN . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10
Cooling Water OUT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10
Cryopump Electrical Outlet . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10
Compressor Remote Connector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-11
Supply Gas Coupling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-11

9600 Compressor Installation, Operation and Maintenance Instructions
ii ©2013 Brooks Automation Inc. Pub. No. 8040444, Rev. AA, 01/14/2013 ECO No. 63723
Multiple On-Board Cryopump Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-12
Multiple Cryo-Torr Cryopump Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-12
Section 2 - Unpacking and Inspection
Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
Shipping Carton Inspection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
Removal from Shipping Carton . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
Compressor Inspection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2
Compressor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2
Helium "OFF" Condition Pressure Verification . . . . . . . . . . . . . . . . . . . . . . . . 2-2
Shipping Carton Contents . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2
Section 3 - Installation
Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
Supply and Return Water Line Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
Hard Water Lines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
Flexible Water Lines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
Electrical Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4
Power Cable Preparation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4
Phase Check . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6
Connecting/Disconnecting Helium Flex Lines . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7
Connecting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7
Disconnecting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7
Single On-Board Cryopump Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-8
Single Cryo-Torr Cryopump Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-9
Multiple On-Board Cryopump Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11
Helium Line Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11
Power Cable Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11
Multiple Cryo-Torr Cryopump Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-14
Helium Line Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-14
Power Cable Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-14
Section 4 - Operation
Adjusting System Helium Pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
"OFF" Condition Helium System Pressure Verification . . . . . . . . . . . . . . . . . . . . . 4-1
Compressor Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
Replacement of Helium Circuit Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3
Section 5 - Maintenance
Scheduled Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
Suggested Maintenance Equipment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1

9600 Compressor Installation, Operation and Maintenance Instructions
©2013 Brooks Automation Inc. Pub. No. 8040444, Rev. AA, 01/14/2013 ECO No. 63723 iii
Adsorber Replacement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2
Adjusting System Helium Pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4
Reducing Helium Pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4
Increasing Helium Pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-5
Adding Helium . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-5
Appendix A: Customer Brooks Automation Technical Support Information
Appendix B - Flow Diagram
Appendix C - Troubleshooting Procedures
Troubleshooting the Compressor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C-1
Technical Inquiries . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C-1
Appendix D - Schematic
Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D-1
Index

9600 Compressor Installation, Operation and Maintenance Instructions
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©2013 Brooks Automation Inc. Pub. No. 8040444, Rev. AA, 01/14/2013 ECO No. 63723 v
Figures
Figure 1-1: 9600 Compressor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3
Figure 1-2: 9600 Compressor Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
Figure 1-3: Water Flow Rate versus Pressure Drop . . . . . . . . . . . . . . . . . . . . . 1-6
Figure 1-4: 9600 Compressor Rear View Component Locations. . . . . . . . . . . 1-8
Figure 1-5: 9600 Compressor Connected to Multiple On-Board Cryopumps 1-12
Figure 1-6: 9600 Compressor Connected to Multiple Cryo-Torr Cryopumps 1-13
Figure 3-1:9600 Compressor Installation Flowchart . . . . . . . . . . . . . . . . . . . . 3-2
Figure 3-2: 9600 Compressor Circuit Breaker Terminals (Cover Removed) . 3-5
Figure 3-3: Connecting/Disconnecting Helium Flex Line Couplings . . . . . . . 3-8
Figure 3-4: Single On-Board Cryopump Connections . . . . . . . . . . . . . . . . . . . 3-9
Figure 3-5: Single Cryo-Torr Cryopump Installation. . . . . . . . . . . . . . . . . . . 3-10
Figure 3-6: Recommended Multiple On-Board Cryopump or Waterpump Installation
(Splitter Box located at Process Tool) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12
Figure 3-7: Alternative Multiple On-Board Cryopump or Waterpump Installation
(Splitter Box located at Compressor) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-13
Figure 3-8: Multiple Cryo-Torr Cryopump Installation . . . . . . . . . . . . . . . . . 3-15
Figure 3-9:Multiple Cryo-Torr Cryopump Installation . . . . . . . . . . . . . . . . . 3-16
Figure 5-1: Disconnecting Self Sealing Couplings. . . . . . . . . . . . . . . . . . . . . . 5-2
Figure 5-2: Adsorber Location, 9600 Compressor (Rear Panel Removed) . . . 5-3
Figure 5-3: Helium Pressure Control Components. . . . . . . . . . . . . . . . . . . . . . 5-4
Figure B-1:9600 Compressor Flow . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B-2
Figure D-1:9600 Compressor (Low Voltage) Schematic . . . . . . . . . . . . . . . . . D-5

vi ©2013 Brooks Automation Inc. Pub. No. 8040444, Rev. AA, 01/14/2013 ECO No. 63723

©2013 Brooks Automation Inc. Pub. No. 8040444, Rev. AA, 01/14/2013 ECO No. 63723 vii
Tables
Table 1-1:Compressor Weight . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
Table 1-2:Electrical Input Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
Table 1-3:Cooling Water Specifications. . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
Table 1-4:General Compressor Operating Specifications . . . . . . . . . . . . . 1-7
Table 1-5:Cryopump Electrical Outlet Pin Assignments . . . . . . . . . . . . . 1-11
Table 1-6:Compressor Remote Connector Pin Assignments . . . . . . . . . . 1-11
Table 4-1:9600 Compressor Helium ("OFF" Condition) Charge. . . . . . . . 4-1
Table 5-1:Suggested Maintenance Equipment . . . . . . . . . . . . . . . . . . . . . . 5-1
Table C-1:Compressor Troubleshooting Procedures . . . . . . . . . . . . . . . . . C-2
Table D-2:Basic Control Assembly Legend. . . . . . . . . . . . . . . . . . . . . . . . D-1
Table D-3:On-Board/Cryo Electrical Module P/N 8135127G001 Legend D-2
Table D-4:On-Board Output Module P/N 8135148G001 Legend . . . . . . . D-3

viii ©2013 Brooks Automation Inc. Pub. No. 8040444, Rev. AA, 01/14/2013 ECO No. 63723

©2013 Brooks Automation Inc. Part Number 8040444, Revision AA, 01/14/2013, ECO Number 63723 S-1
Safety Conventions
Introduction
Follow all safety precautions during installation, normal operation, and when
servicing BROOKS-Cryogenics products.
This chapter explains the safety conventions used throughout this manual.
BROOKS-Cryogenics uses a specific format for cautions and warnings, which
includes standard signal words and safety shapes.
See also the Customer Support appendix or call your local Customer Support
Center for assistance.
Signal Word Descriptions
CAUTION
A signal word accompanied by a safety shape
that indicates a potentially hazardous situation
or unsafe practice.
If not avoided, the action may result in minor
or moderate personal injury or equipment
damage. A CAUTION is highlighted in
yellow.
CAUTION
A signal word that indicates a situation or
unsafe practice, which if not avoided may
result in equipment damage. A CAUTION is
highlighted in yellow.
WA R N I N G
A signal word accompanied by a safety shape
that indicates indicates a potentially hazardous
situation.
If not avoided, the action may result in serious
injury or death. A WARNING is highlighted
in orange.
All cautions and warnings contain signal words, which call attention to safety
messages and designate the degree of hazard seriousness. The following table
shows the signal words and their meanings that may be used in this document.
Term Example Definition

Safety Shape Descriptions
S-2 Part Number 8040444, Revision AA, 01/14/2013, ECO Number 63723 ©2013 Brooks Automation Inc.
Safety Shape Descriptions
Indicates a general hazard. Details about this
hazard appear in the safety notice explanation.
Indicates a high voltage hazard.
Indicates a surface is hot enough to cause
discomfort or a burn.
All cautions and warnings contain safety shapes, which have specific safety
meanings. The following table shows some of the safety shapes used in this
document and their meanings.
References
For more information about safety standards, see the following documents:
• ISO 7010: 2003(E), Graphic symbols - Safety colours and safety
signs - Safety signs used in workplaces and public areas
• ISO 3864-1: 2002(E), Graphic symbols - Safety colours and safety
signs - Part 1: Design principles for safety signs in workplaces and
public areas
Example Term Shape Definition
General Warning
High Voltage
Hot Surface

©2013 Brooks Automation Inc. Pub. No. 8040444, Rev. AA, 01/14/2013 ECO No. 63723 1-1
9600 Compressor Installation, Operation and Maintenance Instructions
Section 1 - 9600 Compressor Description
General
This manual provides the information required to install, operate, and
maintain the BROOKS-CRYOGENICS 9600 Compressor.
NOTE: All personnel with installation, operation, and maintenance
responsibilities should become familiar with the contents of both the 9600
Compressor Installation, Operation, Maintenance, and appropriate
cryopump manuals to ensure safe, high quality, and reliable system
performance.
CAUTION
Refer to “Appendix A: Customer Brooks Automation Technical
Support Information” to contact the local Customer Support Center for
information on connecting 9600 Compressors to a manifold with other
BROOKS-CRYOGENICS compressors.
Compressor Configurations
The 9600 Compressor supports either On-Board or Cryo-Torr Cryopumps.
For multiple cryopump installations, an On-Board Splitter Box or Cryo-
Torr Interface can be used for cold head power distribution that reduces
total cable requirements as shown in Figure 1-5 and Figure 1-6.
System Documentation
The manuals for a system cover two basic components: the cryopump and
the Compressor. A manual is shipped with each system component to
provide information for installation and operation of that component. A
loose-leaf binder with index tab separators is also provided so you can
compile a complete set of tabulated manuals.
BROOKS-CRYOGENICS Helium Refrigeration System
The operation of BROOKS-CRYOGENICS’ cryopumps is based upon a
closed loop helium expansion cycle. The system is made up of two major

1-2 ©2013 Brooks Automation Inc. Pub. No. 8040444, Rev. AA, 01/14/2013 ECO No. 63723
components: the cryopump, which contains the cold head, and the helium
Compressor which compresses the helium gas.
Refrigeration is produced in the cryopump cold head through periodic
expansion of high pressure helium in a regenerative process. The high
pressure helium is provided by the Compressor. Low pressure helium
returning from the cold head is compressed into the necessary high
pressure to be returned to the cold head. The energy required to compress
the helium is rejected as heat through the cooling water.
High pressure room temperature helium is transferred to the cold head
through the supply lines. After expansion, low pressure helium is returned
to the Compressor (at or near room temperature) to repeat the cycle in a
closed loop fashion. Large separation distances can be accommodated
between the Compressor and the cryopump.
In the Compressor, helium is compressed using a highly reliable oil
lubricated commercial Compressor. Helium purification takes place via
several stages of oil removal. The final stage of purification is performed
with a replaceable adsorber cartridge. In order to maintain peak efficiency,
the adsorber must be replaced every three years. The 9600 Compressor is
shown in Figure 1-1.

©2013 Brooks Automation Inc. Pub. No. 8040444, Rev. AA, 01/14/2013 ECO No. 63723 1-3
9600 Compressor Installation, Operation and Maintenance Instructions
Figure 1-1: 9600 Compressor
Specifications
Dimensions
The dimensions of the Compressor are shown in Figure 1-2.
9600
COMPRESSOR
COMPRESSOR
9600

1-4 ©2013 Brooks Automation Inc. Pub. No. 8040444, Rev. AA, 01/14/2013 ECO No. 63723
Figure 1-2: 9600 Compressor Dimensions
19.52 in.
(496 mm)
21.50 in.
(546 mm)
1.28
(32mm)
23.36 in.
(593 mm)
3.18 in.
(81 mm)
14.4 in.
(366 mm)
CAUTION
Do not place a weight greater than 75 lbs. (34Kg) on top of the
Compressor.

©2013 Brooks Automation Inc. Pub. No. 8040444, Rev. AA, 01/14/2013 ECO No. 63723 1-5
9600 Compressor Installation, Operation and Maintenance Instructions
Weight
The weight of the Compressor is listed in Table 1-1.
Electrical
The electrical specifications of the Compressor are listed in Table 1-2.
Table 1-1: Compressor Weight
Weight lbs./kg
250/114kg
Table 1-2: Electrical Input Specifications
Parameter Value
Operating Voltage Range 180 - 253 VAC
Line Frequency 50/60 Hz
Phase 3
Nominal Input Power 5.5 KW
Nominal Power Factor 0.85
Rated FL/LR* Current 16.2/80
Minimum Electrical Service 30 Amps
*FL/LR = Full Load/Locked Rotor

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Cooling Water
The water used to cool the Compressor must meet the specifications shown
in Table 1-3 for proper system operation.
Figure 1-3: Water Flow Rate versus Pressure Drop
Table 1-3: Cooling Water Specifications
Parameter Value
Maximum Inlet Temperature 90°F (32°C)
Minimum Inlet Temperature 50°F (10°C)
Flow Rate 2.75 ±1.25 gpm (10.4 ± 4.7 lpm)
Pressure Drop (inlet-to-outlet) See Figure 1-3
Maximum Inlet Pressure 100 psi (6.9 bars)
Alkalinity 6.0 - 8.0 pH
Calcium Carbonate < 75 ppm
NOTE: Water conditioning may be required for applications not meeting these requirements.
4.00
3.50
3.00
2.50
2.00
1.50
1.00
0.50
1357911
WATER FLOW RATE (GPM)
WATER PRESSURE DROP (PSID)
ACCEPTABLE
OPERATING
LINE
.07 .49
.21 .35 .63 .7715.2
13.3
11.40
9.50
7.60
5.70
3.80
1.90
WATER FLOW RATE (LPM)
WATER PRESSURE DROP (Bars)
NOTE: Figure 1-3 defines the water flow rate through the Compressor as a function of the pressure drop from
water inlet to water outlet. You must provide the correct pressure drop in your water supply system to ensure that
the water flow condition meets the requirements specified in Table 1-3.

©2013 Brooks Automation Inc. Pub. No. 8040444, Rev. AA, 01/14/2013 ECO No. 63723 1-7
9600 Compressor Installation, Operation and Maintenance Instructions
General
The information in Table 1-4 provides general Compressor operating
specifications.
NOTE: The 9600 Compressor is designed for continuous operation and
should remain ON when the cryopumps are in a regeneration cycle.
Component Description
The components of the 9600 Compressor that are accessible from the rear
panel are shown in Figure 1-4 and described in the following paragraphs.
Table 1-4: General Compressor Operating Specifications
Specification Values
Part Numbers 8135900G001
8135908G001
Input Power Cable
(Customer Supplied)
600 VAC
10 Gauge, 3 conductor wire with ground
Must conform to local electrical codes
Nominal Helium Pressure Refer to Table 4-1
Ambient Operating Tem-
perature Range
50 - 100º F (10 - 38º C)
Interface
Gas Supply Connector
Gas Return Connector
Remote Control Receptacle
Cryopump Power Receptacles: mates with the
BROOKS-CRYOGENICS supplied cryopump power cable for
single pump use.
Mates with remote junction box power cable for multiple
cryopump use.
1/2 in. Aeroquip self-sealing coupling
1/2 in. Aeroquip self-sealing coupling
24VAC, 2.7A inductive mates with P5 connector P/N MS3106A*
Adsorber Service Schedule 3 Years
* Supplied by BROOKS-CRYOGENICS

1-8 ©2013 Brooks Automation Inc. Pub. No. 8040444, Rev. AA, 01/14/2013 ECO No. 63723
Figure 1-4: 9600 Compressor Rear View Component Locations
Control Circuit
Breaker
System Circuit
Breaker
Power Inlet
Gas Charge
Flared Fitting
Helium
Pressure Gauge
Cryopump Electrical Outlet
Supply Gas
Coupling
Return Gas
Coupling
Cooling Water
OUT
Compressor
Remote
Connector
Rear Panel
Gas Charge
Control Valve
Cooling Water
IN
Elapsed Time
Meter
Power ON
Indicator