Brooks 4850 User manual

Installation and Operation Manual
X -TMF-4800-MFC-eng
Part Number: 541B072AAG
October, 2017 Brooks®48xx Series
Brooks®48xx Series
4850 Mass Flow Controller
4860 Mass Flow Meter
Model 4850/4860 with
Local Operator Interface
Model 4850/4860
with Compression Fittings

Installation and Operation Manual
X -TMF-4800-MFC-eng
PartNumber:541B072AAG
October, 2017
Brooks®48xx Series
ESD (Electrostatic Discharge)
CAUTION: This instrument contains electronic components that are susceptible to damage by static electricity. Proper handling procedures must be observed
during the removal, installation or other handling of internal circuit boards or devices.
Handling Procedure:
1. Power to unit must be removed.
2. Personnel must be grounded, via a wrist strap or other safe, suitable means before any printed circuit card or other internal device is installed,
removed or adjusted.
3. Printed circuit cards must be transported in a conductive container. Boards must not be removed from protective enclosure until immediately before
installation. Removed boards must immediately be placed in protective container for transport, storage or return to factory.
Comments
This instrument is not unique in its content of ESD (electrostatic discharge) sensitive components. Most modern electronic designs contain components
that utilize metal oxide technology (NMOS, SMOS, etc.). Experience has proven that even small amounts of static electricity can damage or destroy these
devices. Damaged components, even though they appear to function properly, exhibit early failure.
Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. These products must be properly
installed, operated and maintained to ensure they continue to operate within their normal specifications. The following instructions must be adhered to
and integrated into your safety program when installing, operating and maintaining Brooks Instrument products.
• To ensure proper performance, use qualified personnel to install, operate, update, program and maintain the product.
• Read all instructions prior to installing, operating and servicing the product. If this instruction manual is not the correct manual, please see back cover
for local sales office contact information. Save this instruction manual for future reference.
WARNING: Do not operate this instrument in excess of the specifications listed in the Instruction and Operation Manual. Failure to heed
this warning can result in serious personal injury and / or damage to the equipment.
• If you do not understand any of the instructions, contact your Brooks Instrument representative for clarification.
• Follow all warnings, cautions and instructions marked on and supplied with the product.
WARNING: Prior to installation ensure this instrument has the required approval ratings to meet local and national codes. Failure to heed this warning can
result in serious personal injury and / or damage to the equipment.
• Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable local and national codes.
Connect all products to the proper electrical and pressure sources.
• Operation: (1) Slowly initiate flow into the system. Open process valves slowly to avoid flow surges. (2) Check for leaks around the flow meter inlet
and outlet connections. If no leaks are present, bring the system up to the operating pressure.
• Please make sure that the process line pressure is removed prior to service. When replacement parts are required, ensure that qualified people use
replacement parts specified by Brooks Instrument. Unauthorized parts and procedures can affect the product's performance and place the safe
operation of your process at risk. Look-alike substitutions may result in fire, electrical hazards or improper operation.
• Ensure that all equipment doors are closed and protective covers are in place to prevent electrical shock and personal injury, except when
maintenance is being performed by qualified persons.
WARNING: For liquid flow devices, if the inlet and outlet valves adjacent to the devices are to be closed for any reason, the devices must be completely
drained. Failure to do so may result in thermal expansion of the liquid that can rupture the device and may cause personal injury.
All pressure equipment with an internal pressure greater than 0.5 bar (g) and a size larger than 25mm or 1" (inch) falls under the Pressure Equipment Directive (PED).
• The Specifications Section of this manual contains instructions related to the PED directive.
• Products described in this manual are in compliance with EN directive 2014/34/EU.
• All Brooks Instrument Flowmeters fall under fluid group 1.
• Products larger than 25mm or 1" (inch) are in compliance with PED category I, II or III.
• Products of 25mm or 1" (inch) or smaller are Sound Engineering Practice (SEP).
The Brooks Instrument (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic
Compatibility (EMC directive 2014/30/EU).
Special attention however is required when selecting the signal cable to be used with CE marked equipment.
Quality of the signal cable, cable glands and connectors:
Brooks Instrument supplies high quality cable(s) which meets the specifications for CE certification.
If you provide your own signal cable you should use a cable which is overall completely screened with a 100% shield.
“D” or “Circular” type connectors used should be shielded with a metal shield. If applicable, metal cable glands must be used providing cable screen clamping.
The cable screen should be connected to the metal shell or gland and shielded at both ends over 360 Degrees.
The shield should be terminated to an earth ground.
Card Edge Connectors are standard non-metallic. The cables used must be screened with 100% shield to comply with CE certification.
The shield should be terminated to an earth ground.
For pin configuration : Please refer to the enclosed Instruction Manual.
European Pressure Equipment Directive (PED)
European Electromagnetic Compatibility (EMC)
Essential Instructions
Read before proceeding!

Installation and Operation Manual
X -TMF-4800-MFC-eng
Part Number: 541B072AAG
October, 2017 Brooks®48xx Series
Dear Customer,
We appreciate this opportunity to service your flow measurement and control requirements with a Brooks
Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their
gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for
various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices,
analytical instrumentation, semiconductor manufacturing, and more.
The Brooks product you have just received is of the highest quality available, offering superior performance,
reliability and value to the user. It is designed with the ever changing process conditions, accuracy requirements
and hostile process environments in mind to provide you with a lifetime of dependable service.
We recommend that you read this manual in its entirety. Should you require any additional information concerning
Brooks products and services, please contact your local Brooks Sales and Service Office listed on the back cover
of this manual or visit www.BrooksInstrument.com
Yourssincerely,
Brooks Instrument

Installation and Operation Manual
X -TMF-4800-MFC-eng
PartNumber:541B072AAG
October, 2017
Brooks®48xx Series
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i
Brooks®48xx Series
Contents
Installation and Operation Manual
X-TMF-4800-MFC-eng
Part Number: 541B072AAG
October, 2017
Paragraph Page
Number Number
Section 1 Introduction
1-1 How to Use This Manual ............................................................................................................1-1
1-2 Description .................................................................................................................................1-1
1-3 Specifications .............................................................................................................................1-1
1-4 Specifications for Local Operator Interface (LOI).......................................................................1-6
Section 2 Installation
2-1 General ......................................................................................................................................2-1
2-2 Receipt of Equipment.................................................................................................................2-1
2-3 Recommended Storage Practice ...............................................................................................2-1
2-4 Return Shipment ........................................................................................................................2-2
2-5 Transit Precaution ......................................................................................................................2-2
2-6 Removal from Storage ...............................................................................................................2-2
2-7 Mechanical Connections ............................................................................................................2-3
2-8 Electrical Connections................................................................................................................2-4
2-9 Operation Check Procedure.......................................................................................................2-5
Section 3 Operation
3-1 Operating Procedure..................................................................................................................3-1
3-2 Theory of Operation ...................................................................................................................3-1
3-3 Features .....................................................................................................................................3-2
3-4 Analog I/O Mode of Operation....................................................................................................3-2
3-5 PC-Based Support Tools............................................................................................................3-4
3-6 Local Operator Interface (LOI) ...................................................................................................3-4
Section 4 Maintenance and Troubleshooting
4-1 Overview ....................................................................................................................................4-1
4-2 Troubleshooting..........................................................................................................................4-2
4-2-1 TroubleshootingTable ................................................................................................................4-2
4-2-2 FrequentlyAsked Questions ......................................................................................................4-3
4-2-3 System Checks ..........................................................................................................................4-3
4-2-4 Calibration Procedure ................................................................................................................4-5
Section A Essential Instructions............................................................................................................ A-1
Warranty, Local Sales/Service Contact Information....................................................................... Back Cover

ii
Brooks®48xx Series
Contents Installation and Operation Manual
X-TMF-4800-MFC-eng
Part Number: 541B0072AG
October, 2017
Figures
Figure Page
Number Number
1-1 Dimensions for Model 4850/4860 with Standard Process Connections .....................................1-4
1-2 Dimensions for Model 4850/4860 with Downport Connections ..................................................1-4
1-3 Dimensions for the 48xx Series Local Operator Interface (LOI) ................................................1-6
3-1 Gas FlowAcross the MEMS Sensor ..........................................................................................3-1
4-1 Bench Troubleshooting Circuit ...................................................................................................4-5
Tables
Table Page
Number Number
1-1 48xx Series Specifications .........................................................................................................1-2
1-2 15-Pin D-Sub Connector Pin-out................................................................................................1-5
4-1 Troubleshooting..........................................................................................................................4-2

1-1
Brooks®48xx Series
Section 1 Introduction
Installation and Operation Manual
X-TMF-4800-MFC-eng
Part Number: 541B072AAG
October, 2017
1-1 How to Use This Manual
This instruction manual is intended to provide the user with all the
information necessary to install, operate and maintain the Brooks 48xx
Series Products.
This manual is organized into the following sections:
Section 1. Introduction
Section 2. Installation
Section 3. Operation
Section 4. Maintenance and Troubleshooting
SectionA. Essential Instructions
Back Cover Warranty, Local Sales/Service Contact Information
1-2 Description
The Brooks 48xx Series Products are mass flow measurement devices
designed for accurately measuring (MFMs) and rapidly controlling (MFCs)
flows of gases. This instruction manual is intended to provide the user with
all the information necessary to install, operate and maintain the Brooks
Model 4850 mass flow controller(MFC) and 4860 mass flow meter (MFM).
1-3 Specifications for Meter/Controller
Do not operate on gases other than those listed in this
specification. Failure to heed this warning can result in serious
personal injury and/or damage to the equipment.
WARNING
!

1-2
Brooks®48xx Series
Section 1 Introduction Installation and Operation Manual
X-TMF-4800-MFC-eng
Part Number: 541B072AAG
October, 2017
PP
PP
Performanceerformance
erformanceerformance
erformance
Full Scale Flow RangeFull Scale Flow Range
Full Scale Flow RangeFull Scale Flow Range
Full Scale Flow Range 50 ml/min - 40 l/min
(50 sccm - 40 slpm)
(N22
22
2eq., at 0oC Ref, with typical 50 psid pressure differential)
ConCon
ConCon
Contrtr
trtr
trol Rangeol Range
ol Rangeol Range
ol Range 2 - 100%
FlowFlow
FlowFlow
Flow AccurAccur
AccurAccur
Accuracyacy
acyacy
acy +/- 3.0% of FS, +/- 1.0% FS optional
Flow RepeatabilityFlow Repeatability
Flow RepeatabilityFlow Repeatability
Flow Repeatability +/- 0.15% of FS
ResponseResponse
ResponseResponse
Response TimeTime
TimeTime
Time Flow signal: <0.3 sec
Flow control: Settling time <0.75 sec from 0 to 100% FS (typical <0.5 sec for all steps)
TT
TT
Temperemper
emperemper
emperaturatur
aturatur
ature Coefficiene Coefficien
e Coefficiene Coefficien
e Coefficientt
tt
t +/- 0.1% of FS/oC (N22
22
2)
RatingsRatings
RatingsRatings
Ratings
GasesGases
GasesGases
Gases Air, N2, O2, Ar, He, H2, CO2, CO, N2O, CH4, C3H6 (Propene), C3H8(other gases upon request)
OperOper
OperOper
Operating Limitsating Limits
ating Limitsating Limits
ating Limits Pressure 0 - 10 barg (0 - 150 psig)
Temperature 0 - 50oC
Humidity 5 to 95% R.H. (ambient)
DifferDiffer
DifferDiffer
Differenen
enen
ential Prtial Pr
tial Prtial Pr
tial Pressuressur
essuressur
essure Rangee Range
e Rangee Range
e Range Minimum: 0.35 bar (5 psid)
(Con(Con
(Con(Con
(Contrtr
trtr
trollers)ollers)
ollers)ollers)
ollers) Maximum: 10 bar (150 psid)
Leak InLeak In
Leak InLeak In
Leak Integritytegrity
tegritytegrity
tegrity Inboard to Outboard: 1x10-9 atm scc/sec Helium max.
MecMec
MecMec
Mechanicalhanical
hanicalhanical
hanical
Materials of ConstructionMaterials of Construction
Materials of ConstructionMaterials of Construction
Materials of Construction Wetted parts: stainless steel, fluoroelastomers, silicon-based sensor
RoHSRoHS
RoHSRoHS
RoHS Fully RoHS compliant per EU Directive 2011/65/EU
Outline DimensionsOutline Dimensions
Outline DimensionsOutline Dimensions
Outline Dimensions Refer to Figures 1-1 & 1-2
PrPr
PrPr
Process Connectionsocess Connections
ocess Connectionsocess Connections
ocess Connections Inlet/Outlet threads: 9/16” - 18 UNF threads, Refer to Figure 6 for available process connections.
ElectricalElectrical
ElectricalElectrical
Electrical
Electrical ConnectionsElectrical Connections
Electrical ConnectionsElectrical Connections
Electrical Connections 15-pin D-sub connector
Analog/RS232: 15-pin D-sub connector
PP
PP
Power Supplyower Supply
ower Supplyower Supply
ower Supply VV
VV
Voltage**oltage**
oltage**oltage**
oltage** +15 Vdc + 10% or
+24 Vdc + 10%
Device only uses single sided power supply
Inrush current: < 1 A
PP
PP
Power Requirower Requir
ower Requirower Requir
ower Requiremenemen
emenemen
ementsts
tsts
ts Model Device 15 Vdc 24 Vdc
Type Typical (mA) Max (mA) Typical (mA) Max (mA)
4850 Controller 130 160 150 200
4860 Meter 30 60 30 60
Analog Input/OutputAnalog Input/Output
Analog Input/OutputAnalog Input/Output
Analog Input/Output 0-5 Vdc or 4-20 mA
Digital Input/OutputDigital Input/Output
Digital Input/OutputDigital Input/Output
Digital Input/Output RS232 (Standard with all analog I/O options)
VV
VV
Valve Override Signalalve Override Signal
alve Override Signalalve Override Signal
alve Override Signal Valve Controller: Input Open
Valve Closed: <0.3 V; open valve: >4.8 V
** For high flows and/or low differential pressures (using orifices 0.049” (1.25mm) or 0.079” (2.0mm)) only 24 Vdc power is available.
Local OperLocal Oper
Local OperLocal Oper
Local Operator Inator In
ator Inator In
ator Interface (Lterface (L
terface (Lterface (L
terface (LOI)OI)
OI)OI)
OI)
DisplayDisplay
DisplayDisplay
Display Effective display area: 28mm wide, 11mm high
Display Contents: 8x2 dot matrix display
OperOper
OperOper
Operating Limitsating Limits
ating Limitsating Limits
ating Limits Temperature 0-50oC
Operating Humidity 5 to 95% R.H. (ambient)
Electrical ConnectionsElectrical Connections
Electrical ConnectionsElectrical Connections
Electrical Connections 2 15-pin D-sub connectors, one for the connection to the 48xx Series and one for the remote connection
PP
PP
Power Supplyower Supply
ower Supplyower Supply
ower Supply VV
VV
Voltageoltage
oltageoltage
oltage The LOI optionally includes a wall mount power adaptor with a 3.5-mm DC-plug. The adaptor works with input
voltages of AC 90-240 V/47-63Hz. The adaptor supports European, U.K., Australia and U.S. wall plugs. Power can
also be supplied by a remote connection via the D-connector.
Materials of ConstructionMaterials of Construction
Materials of ConstructionMaterials of Construction
Materials of Construction Enclosure: ABS plastic with CU-Ni plating
RoHSRoHS
RoHSRoHS
RoHS Fully RoHS compliant per EU Directive 2011/65/EU.
Outline DimensionsOutline Dimensions
Outline DimensionsOutline Dimensions
Outline Dimensions Refer to Figure 1-3
Table 1-1 48xx Series Specifications
Refer to Brooks document X-SE-4800-LOI-eng for complete instructions.

1-3
Brooks®48xx Series
Section 1 Introduction
Installation and Operation Manual
X-TMF-4800-MFC-eng
Part Number: 541B072AAG
October, 2017
These certifications cover the 48xx Series thermal mass flow devices as well as the Local Operator Interface (LOI).
Mark Agency Certification/ Marking/ Directive
Applicable
Standard Details
CSA
Class I, Div 2 Groups A, B, C & D; T4
Class 1, Zone 2, AEx nA II T4
Ex nA II T4
UL & CSA
Standards
Certificate No.
06.CSA150464
ATEX II 3 G Ex nA II T4 EN60079-0:2006
EN 60079-15:2005 KEMA 06ATEX0251 X
CE
EMC Directive
2014/30/EU EN:61326-1:2013 EMC
RoHS Directive
2011/65/EU RoHS
Pressure Equipment Directive
2014/68/EU
Sound Engineering
Practice (SEP)
CSA Special Conditions for safe use:
1. The models are evaluated for an ambient temperature of 0°C to 50°C.
2. The module shall be installed in a suitable enclosure providing a degree of protection of
at least IP54 according to EN 60529, taking into account the environmental conditions
under which the equipment will be used.
ATEX Special Conditions for safe use:
1. The module shall be installed in a suitable enclosure in accordance with EN60079-15,
taking into account the environmental conditions under which the equipment will be used.
2. Provisions shall be made to prevent the rated voltage from being exceeded by transient
disturbances of more than 40%.
A review against the standards EN60079-0:2012, EN60079-15:2010, shows no significant
changes relevant to this equipment. Hence the standards EN 60079-0: 2006, EN 60079-15:
2005 continues to re
p
resent “State of the Art”
Hazardous Location Classification
The modules shall be installed in a suitable enclosure providing a degree of protection of at least IP54 according to
EN 60529, taking into account the environmental conditions under which the equipment will be used. Provisions
shall be made to prevent the rated voltage from being exceeded by transient disturbances of more than 40%.

1-4
Brooks®48xx Series
Section 1 Introduction Installation and Operation Manual
X-TMF-4800-MFC-eng
Part Number: 541B072AAG
October, 2017
Figure 1-1 Dimensions for Model 4850/4860 with Standard Process Connections
Figure 1-2 Dimensions for Model 4850/4860 with Downport Connections

1-5
Brooks®48xx Series
Section 1 Introduction
Installation and Operation Manual
X-TMF-4800-MFC-eng
Part Number: 541B072AAG
October, 2017
Figure 1-3 Dimensions for the 48xx Series Local Operator Interface (LOI)
5850TR and S-Series pin-outs shown for reference only.
Table 1-2 15-Pin D-Sub Connector Pin-out
PIN # 4800 Series 5850TR S – SERIES (58xxS)
1 SETPOINT SIGNAL COMMON ANALOG COMMON SETPOINT SIGNAL COMMON
2 FLOW VOLTAGE OUTPUT FLOW VOLTAGEOUTPUT FLOW VOLTAGE OUTPUT
3 NOT USED NOT USED ALARM OUTPUT
4 FLOW CURRENT OUTPUT FLOW CURRENT OUTPUT FLOW CURRENT OUTPUT
5 POSITIVE SUPPLY VOLTAGE POSITIVE SUPPLY VOLTAGE POSITIVE SUPPLY VOLTAGE
6 NOT USED NOT USED NEGATIVE SUPPLY VOLTAGE
7 SETPOINT CURRENT INPUT SETPOINT CURRENT INPUT SETPOINT CURRENT INPUT
8 SETPOINT VOLTAGE INPUT SETPOINT VOLTAGE INPUT SETPOINTVOLTAGE INPUT
9 POWER SUPPLY COMMON POWER SUPPLY COMMON POWER SUPPLY COMMON
10 FLOW SIGNAL COMMON FLOW SIGNAL COMMON FLOW SIGNAL COMMON
11 NOT USED 5V REFERENCE 5V REFERENCE
12 VALVE OVERRIDE INPUT VALVE OVERRIDE INPUT VALVE OVERRIDE INPUT
13 NOT USED NOT USED NOT USED
14 RXD NOT USED RXD / A-
15 TXD NOT USED TXD / A+

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Brooks®48xx Series
Section 1 Introduction Installation and Operation Manual
X-TMF-4800-MFC-eng
Part Number: 541B072AAG
October, 2017
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2-1
Brooks®48xx Series
Section 2 Installation
Installation and Operation Manual
X-TMF-4800-MFC-eng
Part Number: 541B072AAG
October, 2017
2-1 General
This section contains the procedures for the receipt and installation of the
instrument. See Section 1 for dimensional and connection requirements.
Do not attempt to start the system until the instrument has been
permanently installed. It is important that the start-up procedures be
followed in the exact sequence presented.
2-2 Receipt of Equipment
When the equipment is received, the outside packing case should be
checked for damage incurred during shipment. If the packing case is
damaged, the local carrier should be notified at once regarding his liability.
A report should be submitted to the nearest Brooks Instrument location
listed on the Global Service Network page on our website:
BrooksInstrument.com/GlobalSupportCenters
Remove the envelope containing the packing list. Carefully remove the
instrument from the packing case. Make sure spare parts are not discarded
with the packing materials. Inspect for damaged or missing parts.
2-3 Recommended Storage Practice
If intermediate or long-term storage of equipment is required, it is
recommended that the equipment be stored in accordance with the
followingconditions:
a. Within the original shipping container.
b. Stored in a sheltered area, preferably a warm, dry, heated warehouse.
c. Ambient temperature 21°C (70°F) nominal, 32°C (90°F) maximum,
7°C (45°F) minimum.
d. Relative humidity 45% nominal, 60% maximum, 25% minimum.

2-2
Brooks®48xx Series
Section 2 Installation Installation and Operation Manual
X-TMF-4800-MFC-eng
Part Number: 541B072AAG
October, 2017
2-4 Return Shipment
Prior to returning any instrument to the factory for any reason, visit our
website for instructions on how to obtain a Return MaterialsAuthorization
Number (RMA#) and complete a Decontamination Statement to
accompany it: BrooksInstrument.com/Service.All instruments returned to
Brooks also require a Material Safety Data Sheet (MSDS) for the fluid(s)
used in the instrument. Failure to provide this information will delay
processing of the instrument.
Instrument must have been purged in accordance with the following:
2-5 Transit Precautions
To safeguard the instrument against transportation damage, it is
recommended to keep the instrument in its factory container until ready for
installation.
2-6 Removal from Storage
Upon removal of the instrument from storage, a visual inspection should be
conducted to verify its "as-received" condition. If the instrument has been
subject to storage conditions in excess of those recommended (See
Section 2-3), it should be subjected to a pneumatic pressure test in
accordance with applicable vessel codes.

2-3
Brooks®48xx Series
Section 2 Installation
Installation and Operation Manual
X-TMF-4800-MFC-eng
Part Number: 541B072AAG
October, 2017
2-7 Mechanical Connections
If mechanical connections were ordered from Brooks Instrument, an
integrated filter of 40 microns is already installed in the upstream fitting.
This is to prevent the possibility of any foreign material entering the flow
sensor or control valve (for MFC).
If the 48xx Series product was ordered without fittings, there is no internal
filter in the device. In this case, it is recommended that an in-line filter rated
to at least 40 microns be installed upstream from the device.
Recommended installation procedures:
a. The Brooks MFC or MFM should be located in a clean,
dry atmosphere relatively free from shock and vibration.
b. Install in such a manner that permits easy removal if the instrument
requires servicing.
c. The Brooks MFC or MFM can be installed in any position.
However, mounting in orientations other than the original factory
calibration (see calibration data sheet supplied with the instrument) can
result in a <±0.2% maximum full scale shift after re-zeroing.
d. When installing a mass flow controller or meter with full scale flow rates
of 10 ln/min (10 slpm) or greater, be aware that sharp, abrupt angles in
the system piping directly upstream of the controller may cause a small
shift in accuracy. If possible, have at least ten pipe diameters of straight
tubing upstream of the mass flow controller or meter. This is not
required for meters with an integrated inlet filter.

2-4
Brooks®48xx Series
Section 2 Installation Installation and Operation Manual
X-TMF-4800-MFC-eng
Part Number: 541B072AAG
October, 2017
2-8 Electrical Connections
The setpoint signal is supplied as a 0 to 5 Vdc or 4 to 20 mA analog signal.
All signals are supplied via the 15-pin D-Connector.There is also an
optional local operator interface (LOI). When the LOI is used the setpoint
signal is provided by the LOI.
The Brooks electrical interface is designed to facilitate low-loss, quiet
signal connections. Separate returns (commons) are supplied for the
analog setpoint, analog flow signal, and the power supply. These commons
are electrically connected together on the PC board.

2-5
Brooks®48xx Series
Section 2 Installation
Installation and Operation Manual
X-TMF-4800-MFC-eng
Part Number: 541B072AAG
October, 2017
Analog I/O Versions
• Signal Common
• Signal Output (Voltage or Current)
• Nominal +15 Vdc or +24 Vdc
• Setpoint Input (Voltage or Current)
• Setpoint Common
• Supply Common
• Chassis Ground (via unit body)
Refer to Table 1-1 for pin connections
Local Operator Interface (LOI) Versions
For description and specifications for the local operator interface refer to
Section 1-4 in this manual and the Brooks document
X-SE-4800-LOI-eng
2-9 Operation Check Procedure
a. Mount the MFC/MFM in its final orientation.
b. Apply power to the MFC/MFM and allow approximately 15 minutes for
the instrument to completely warm up and stabilize its temperature.
c. Do NOT supply gas to the MFC/MFM. Ensure that the differential
pressure across the MFC/MFM is zero.
d. Apply a setpoint (MFC only) of:
0.000 Vdc ± 10 mV (0 - 5 Vdc setpoint)
4.000 mA ± 32 μA (4 - 20 mA setpoint)
e. If the zero exceeds one of these limits, follow the re-zeroing procedure
in Section 3. The analog output signal should be:
0.000 Vdc ± 10 mV (0 - 5 Vdc output)
4.000 mA ± 32 μA (4 - 20 mA output)
f. Turn on the gas supply.A positive flow signal may be present due to
slight valve leak-thru (MFC only).
g. Supply a setpoint signal between:
0 to 5 Vdc (0 - 5 Vdc setpoint)
4 to 20 mA (4 - 20 mA setpoint)

2-6
Brooks®48xx Series
Section 2 Installation Installation and Operation Manual
X-TMF-4800-MFC-eng
Part Number: 541B072AAG
October, 2017
h. Check the analog output signal. The output signal should match the
setpoint signal in accordance with the accuracy specifications provided
in Section 1 of this document.
i. If flow output signal does not match the setpoint, and pressure settings
are correct, this could indicate a problem in the MFC.Asecondary issue
could be the gas type. When checking with a surrogate gas, ensure that
there is enough pressure to the MFC in order to flow the correct amount
of the surrogate gas.

3-1
Brooks®48xx Series
Section 3 Operation
Installation and Operation Manual
X-TMF-4800-MFC-eng
Part Number: 541B072AAG
October, 2017
3-1 Operating Procedure
After the MFC/MFM has been properly installed in the process, it is ready
for operation. When initiating flow, slowly open the valve to avoid a flow
surge. Bypass is a help in bringing the flow on smoothly. Avoid starting a
pump to supply the flowmeter without the use of a valve upstream of the
flowmeter.
3-2 Theory of Operation
As with traditional Thermal Mass Flow devices, the 48xx Series flow
measurement system consists of two components: the flow restrictor and
the sensor. The purpose of the 48xx Series flow restrictor is to create
backpressure and force flow through the thermal sensor. Figure 3-1 is a
cross sectional cut-away view depicting gas flow around the thermal
sensor.
Figure 3-1 Gas Flow Across the MEMS Sensor
The 48xx Series sensor is a Micro Electro Mechanical Systems (MEMS)
based thermal sensor.As shown in Figure 3-1, the gas flows directly
across the MEMS sensor, resulting in extremely fast response times. As
with traditional thermal mass flow sensors, upstream and downstream
temperature sensors are centered around a heating element.As gas flows
across the upstream temperature sensor towards the heater and the
downstream temperature sensor, it cools the upstream temperature sensor
and heats the downstream temperature sensor. This causes the

3-2
Brooks®48xx Series
Section 3 Operation Installation and Operation Manual
X-TMF-4800-MFC-eng
Part Number: 541B072AAG
October, 2017
temperature difference measured by the two temperature sensors to
increase with increasing flow. The temperature difference is then converted
into a flow signal based on the factory calibration.
There is one major difference between a traditional thermal mass flow
sensor and the MEMS based sensor.A traditional thermal mass flow
sensor makes use of a Cp transfer function. However, as depicted in
Figure 3-1, only a portion of the flow field is heated by the MEMS sensor.
Therefore, a Cp transfer function cannot be used in the MEMS sensor to
adjust the flow rate for a gas other than what the device was calibrated on
when it left the factory.
3-3 Features
Note: All Brooks Series mass flow meters are configured at the
factory according to customer order and do not require adjustment.
Not all features are available on all instruments.
The Brooks 48xx Series device is a full-featured digital MFC. The device
performs much like a traditional analog MFC, but with improved step
response and valve control. The analog interface matches that of Brooks'
popular analog MFCs so it can be retrofitted into tools using analog MFCs.
3-4 Analog I/O Mode of Operation
The following paragraphs describe the basic features of the Brooks 4800
Series instruments.
Functional Description
The analog interface may include any of the following I/O options as
specified by the user:
0 - 5 Vdc setpoint, 0 - 5 Vdc flow output
4 - 20 mA setpoint, 4 - 20 mA flow output
Also included is the Valve Override input pin. All analog signals available
are on the 15 pin D-Connector. (See Fig. 1-1 for connections.)
Before operating the MFC/MFM, apply power and warm-up the instrument
for approximately 15 minutes.After warm-up, apply gas pressure then
proceed by following the instructions in the following sections.
Setpoint Signal Input (MFC Only)
This input allows the user to establish the MFC setpoint. Several input
types are available as follows: