Brooks Smart Series User manual

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Models 5800-S
Installation and Operation Manual
X-TMF-5800S-MFC-eng
PN541-C-051-AAG
November,2008
1
Brooks®Smart-Series Digital Mass
Flow Meters and Controllers
Brooks Smart Family
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Installation and Operation Manual
X-TMF-5800S-MFC-eng
PN541-C-051-AAG
November,2008
Models 5800-S
2
ESD (Electrostatic Discharge)
EssentialInstructions
Read this page before proceeding!
BrooksInstrumentdesigns,manufacturesandtestsitsproductstomeetmanynationalandinternationalstandards.Becausethese
instrumentsaresophisticatedtechnicalproducts,youmustproperlyinstall,useandmaintainthemtoensuretheycontinuetooperate
withintheirnormalspecifications.Thefollowinginstructionsmustbeadheredtoandintegratedintoyoursafetyprogramwhen
installing,usingandmaintainingBrooksProducts.
• Readallinstructionspriortoinstalling,operatingandservicingtheproduct.Ifthisinstructionmanualisnotthecorrectmanual,
pleaseseebackcoverforlocalsalesofficecontactinformation.Savethisinstructionmanualforfuturereference.
• Ifyoudonotunderstandanyoftheinstructions,contactyourBrooksInstrumentrepresentativeforclarification.
• Followallwarnings,cautionsandinstructionsmarkedonandsuppliedwiththeproduct.
• Informandeducateyourpersonnelintheproperinstallation,operationandmaintenanceoftheproduct.
• Installyourequipmentasspecifiedintheinstallationinstructionsoftheappropriateinstructionmanualandperapplicablelocal
andnationalcodes.Connectallproductstotheproperelectricalandpressuresources.
• Toensureproperperformance,usequalifiedpersonneltoinstall,operate,update,programandmaintaintheproduct.
• Whenreplacementpartsarerequired,ensurethatqualifiedpeopleusereplacementpartsspecifiedbyBrooksInstrument.
Unauthorizedpartsandprocedurescanaffecttheproduct'sperformanceandplacethesafeoperationofyourprocessatrisk.
Look-alikesubstitutionsmayresultinfire,electricalhazardsorimproperoperation.
• Ensurethatallequipmentdoorsareclosedandprotectivecoversareinplace,exceptwhenmaintenanceisbeingperformedby
qualifiedpersons,topreventelectricalshockandpersonalinjury.
Pressure Equipment Directive (PED)
Allpressureequipmentwithaninternalpressuregreaterthan0.5bar(g)andasizelargerthan25mmor1"(inch)fallsunderthePressure
EquipmentDirective(PED).TheDirectiveisapplicablewithintheEuropeanEconomicArea(EUplusNorway,Icelandand
Liechtenstein).PressureequipmentcanbetradedfreelywithinthisareaoncethePEDhasbeencompliedwith.
• Section1ofthismanualcontainsimportantsafetyandoperatinginstructionsrelatedtothePEDdirective.
• MetersdescribedinthismanualareincompliancewithENdirective97/23/ECmoduleHConformityAssessment.
• AllBrooksInstrumentFlowmetersfallunderfluidgroup1.
• Meterslargerthan25mmor1"(inch)areincompliancewithcategoryI,II,IIIofPED.
• Metersof 25mmor1"(inch)orsmallerareSoundEngineeringPractice(SEP).
HandlingProcedure:
1. Powertounitmustberemoved.
2. Personnelmustbegrounded,viaawriststraporothersafe,suitablemeansbeforeanyprintedcircuitcardorotherinternaldeviceis
installed,removedoradjusted.
3. Printedcircuitcardsmustbetransportedinaconductivecontainer.Boardsmustnotberemovedfromprotectiveenclosureuntil
immediatelybeforeinstallation.Removedboardsmustimmediatelybeplacedinprotectivecontainerfortransport,storageorreturn
tofactory.
Comments
ThisinstrumentisnotuniqueinitscontentofESD(electrostaticdischarge)sensitivecomponents.Mostmodernelectronic
designscontaincomponentsthatutilizemetaloxidetechnology(NMOS,SMOS,etc.).Experiencehasproventhatevensmallamounts
ofstaticelectricitycandamageordestroythesedevices.Damagedcomponents,eventhoughtheyappeartofunctionproperly,exhibit
earlyfailure.
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Models 5800-S
Installation and Operation Manual
X-TMF-5800S-MFC-eng
PN541-C-051-AAG
November,2008
3
DearCustomer,
We appreciate this opportunity to service your flow measurement and control requirements with a Brooks
Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their gas
andliquid low-flow applications. Brooksprovides an array offlow measurement and controlproducts for various
industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices, analytical
instrumentation,semiconductor manufacturing, and more.
TheBrooks product you havejust received is ofthe highest quality available,offering superior performance,
reliability and value to the user. It is designed with the ever changing process conditions, accuracy requirements
andhostile process environments in mind toprovide you with a lifetime ofdependable service.
We recommend that you read this manual in its entirety. Should you require any additional information concerning
Brooks products and services, please contact your local Brooks Sales and Service Office listed on the back cover
ofthis manual or visit www.BrooksInstrument.com
Yours sincerely,
BrooksInstrument
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Installation and Operation Manual
X-TMF-5800S-MFC-eng
PN541-C-051-AAG
November,2008
Models 5800-S
4
Table of Contents
Section 1:Introduction ......................................................................................................................................... 5
1.1Purpose ........................................................................................................................................... 5
1.2 How to use this Manual.................................................................................................................... 5
1.3Description....................................................................................................................................... 6
Section 2:Installation ......................................................................................................................................... 9
2.1General ............................................................................................................................................ 9
2.2Receipt of Equipment ....................................................................................................................... 9
2.3Recommended Storage Practice .....................................................................................................10
2.4Return Shipment .............................................................................................................................10
2.5Gas Connections ............................................................................................................................10
2.6Mechanical Installation....................................................................................................................11
2.7IN-LINEFilter ..................................................................................................................................11
2.8Electrical Interfacing........................................................................................................................12
2.9Digital Communication ....................................................................................................................14
2.10Interconnection..............................................................................................................................16
Section 3:Operation ..........................................................................................................................................19
3.1OperatingProcedure .......................................................................................................................19
3.2ZeroAdjustment ..............................................................................................................................19
3.3CalibrationProcedure ......................................................................................................................19
Section 4:Maintenance .....................................................................................................................................20
4.1General ...........................................................................................................................................20
4.2Troubleshooting and System checks...............................................................................................20
4.3CleaningProcedures .......................................................................................................................23
4.4CalibrationProcedure ......................................................................................................................23
4.5 Valve (Dis)AssemblyProcedure .....................................................................................................23
Section5: Specification........................................................................................................................................24
AppendixA:Gas ConversionTables .....................................................................................................................28
AppendixB: Dimensionaldrawings ......................................................................................................................32
AppendixC:Translation of CEMarking electrical installation instructions..............................................................34
AppendixD: Important SafetyInstructions............................................................................................................39
Appendix E: Modellist .........................................................................................................................................44
Figures
Figure2-1: OpenCollector ...................................................................................................................................13
Figure 2-2: p.c. boards with the locations of jumper switches Note: Switch number 1 is the switch at the bottom 14
Figure2-3: RS-232interconnection of TMFand PC..............................................................................................16
Figure2-4: RS-485multidrop interconnection TMFs and PC.................................................................................16
Figure2-5: TMF/C toRead-out cable ...................................................................................................................17
Figure2-6: TMF/CRead-out andpc .....................................................................................................................17
Tables
Table1-1: Flowranges per model.......................................................................................................................... 6
Table 2-1: Electrical interfacing. Smart TMF ........................................................................................................12
Table 2-2: Dipswitch settings ...............................................................................................................................15
Table 2-3: Electrical interfacing. Smart TMF cable...............................................................................................18
Table4-1: Troubleshooting ...................................................................................................................................22
Table5-1: Flowranges and pressureratings ........................................................................................................25
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Models 5800-S
Installation and Operation Manual
X-TMF-5800S-MFC-eng
PN541-C-051-AAG
November,2008
5
Section 1 Introduction
1.1 Purpose
Thisinstruction manual is intendedto provide the userwith all the information
necessary to install, operate and maintain the Brooks Smart series Mass Flow
meters5860S, 5861S, 5863Sand controllers 5850S,5851S, 5853S.
1.2 How to use this Manual
Itis recommended toread this manualbefore installing, operatingor repairing
these Mass Flow Instruments. This manual is organised into nine sections:
Section 1. Introduction
Section 2. Installation
Section 3. Operation
Section 4. Maintenance
Section 5. Specification
Appendices A - E
Thisinstruction manual is intendedto provide the userwith all the information
necessary to install, operate and maintain the Brooks Smart Mass Flow Meters
andControllers.
Thisseries of microprocessor-based field instruments is designed to meetthe
rigorousdemands ofvarious industries/applications.The use ofdigital
technology ensures that the Brooks Smart series provides maximum accuracy
and signal integrity. In addition it allows easy interfacing to any peripheral
equipmenteither throughanalogue ordigital communication.
Thismanual covers Smart MassFlow Meter models: 5860S,5861S, 5863S and
5864Sand Smart Mass Flow Controller models: 5850S,5851S and 5853S.
Digital communication
The presence of a computer icon to the left of the text (as shown here) denotes
that the accompanying text refers to digital communication.
SmartControl
Digitalcommunication (either viaRS-232 or RS-485)allows to connect our
Brooks model 0160 Smart Control. This interface program can be used to
operateand (re)configureSmart MassFlow Products (calibrationparameters are
not accessible).
SmartDDE
Ifyou requirebi-directional links between your Windows-basedapplications
software and Brooks Smart Mass Flow Products,our model 0162 Smart DDE
(apowerful, user-friendly DynamicData Exchangesoftware program)offers all
thefeatures you need.
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Installation and Operation Manual
X-TMF-5800S-MFC-eng
PN541-C-051-AAG
November,2008
Models 5800-S
6
SmartService
Ifyou areequipped with primary standardVolumeter calibration equipmentor
(secondary standard) Brooks Smart Mass Flow Meters, you can use the
model 0163 Brooks Smart Service programfor (re)configuration, diagnostics,
calibrationand/or verification.The HART protocol-based commandsare listedin
aseparate.
Communicationmanual
Document:Brookspart number:541-C-053-AAA.
1.3 Description
Models 5860S, 5861S, 5863S and 5864S Brooks Smart Mass Flow Meters are
primarilyused to provide accurate measurements of gas flows. Theheartof
these systems is the thermal mass flow sensor, which produces an electrical
output signal as a function of flow rate.
In addition, models 5850S, 5851S and 5853S Brooks Smart Mass Flow
Controllerscontrol gas flows.The flow ranges per modelare listed inTable 1-1.
Table 1-1: Flow ranges per model
min. f.s. max. f.s. Unit *
5850 S 5860 S 0.003 30 ln/min.
5851 S 5861 S 20 100 ln/min.
5853 S 5863 S 100 2500 ln/min.
Mass Flow
Meter
Model
Mass Flow
Controller
Model Flow Ranges
*refersto ‘normal’conditions,i.e. 0°C,1013.25mbar.
The Brooks Smart Mass Flow Meter is a stand-alone instrument with
microprocessor-basedelectronics on board.The MF-series SmartMass Flow
Controllerhas anintegrally-mounted control-valvemodule withwhich stablegas
flowscan be achieved.
The standard features listed below apply to all models.
The suppliedinlet adapter hasa built-in,upstream inletfilter for flow
straightening.Besides reducing the effects of changes in upstream piping, this
also protects the measuring element from occasional debris in the flow stream.
Inaddition, it eliminatesthe need for extra(expensive) nlet filtering.
• Flowsignaladjustable viasoftware:
0-5 Vdc or 1-5 Vdc or
0-20mA or 4-20 mA.
Note:Digital output(communication) is simultaneouslyavailable with analogue
output.
Section 1: Introduction
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Models 5800-S
Installation and Operation Manual
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November,2008
7
• Outputdamping provides aconstant scalereading under fluctuatingflow rate
conditions. Standard factory setting: 0.5 sec.
• Outputlimiting prevents possible damage to delicate acquisitiondevices by
limiting the output to 0-5.25 Vdc on the voltage signal output and 0-21 mA on
thecurrent output.
An alarm (TTLopen collector) signal output isavailable to theuser. If the
instrument’s specifications are exceeded, either by process conditions or by the
deviceitself, an alarmsignal can begenerated.
MASSFLOW CONTROLLER
Standardfeaturesinclude:
•Each Smart MassFlow Controlleris providedwith an adaptivevalve-control
algorithmfor themaintenance of stable flow control,even undervarying
processconditions(pressure/temperature).
• Setpoint source selectable: Setpoint signal source for the Mass Flow
Controllercan be selected from:
-communication (RS232 /RS485) or
- 0-5 Vdc or
- 1-5 Vdc or
-0-20 mA or
- 4-20 mA.
• FastResponse Control provides rapid gas settling timeswith minimal over/
undershoot.Standardfactorysetting: 1 sec. for 5850/51and meter models,
3 sec. for 5853.
• Valve Override (VOR, availabe at pin 12) allows the user to fully open or
closethe controlvalve independently ofthe set-point.
• Lowflow cut-off prevents the valvefrom openingwhenever theSet pointis
less than 1% of full scale.
Digital communication features
Digital communication, via RS485 or RS232, provides access to all of the Smart
TMF’sfunctions, including:
Accuratemass flow measurementand Set pointregulation (controller
only), as a percentage of full scale and in selectable engineering units
•Flowtotalizer
•Ambienttemperature
•Operationalsettings
⇒Calibration(storage ofup to10 calibration curves)
⇒Controllersettings (controlleronly)
•PID settings
Section 1: Introduction
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Installation and Operation Manual
X-TMF-5800S-MFC-eng
PN541-C-051-AAG
November,2008
Models 5800-S
8
•selectable soft start
•adaptivevalvecontrol
⇒Adaptivefilteringfor signalflow component
•Alarms
⇒Self-diagnostic
•EEPROMerror
•databaseerror
•analogueoutputerror
⇒Out-of-rangeindications
•foranalogue set points higher than 100% (controller only)
•flow
•valve(controlleronly)
•analogueoutput
⇒Environmentalerrors
•nogas flow detected
•powersupply outsidespecification range
•ambienttemperature outside specified range
•highand lowflow alarms
Section 1: Introduction
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Models 5800-S
Installation and Operation Manual
X-TMF-5800S-MFC-eng
PN541-C-051-AAG
November,2008
9
Section 2: Installation
2.1 General
This section contains the procedures for the receipt and installation of the
instrument. Do not attempt to start the system until the instrument has been
permanently installed. It is extremely important that the start-up procedures be
followedin the exactsequence presented.
NOTE: Operating procedure: do not operate this instrument outside the
specification range listed in section 5.
Beforebringing the unit intooperation, make sure thatall gas connections have
been correctly tightened and that all the necessary electrical connections have
been made.
2.2 Receipt of Equipment
When the equipment is received, the outside packing case should be checked
fordamage incurred during shipment.If the packing case is damaged, the local
carriershould be notified at once regarding his liability.Areportshould be
submittedto your nearestProduct Service Department.
Brooks Instrument
407 W. Vine Street
P.O. Box 903
Hatfield, PA 19440 USA
Toll Free (888) 554-FLOW (3569)
Tel [phone]
Fax [phone]
Email:[email protected]
http://www.brooksinstrument.com
Brooks Instrument Brooks Instrument
Neonstraat 3 1-4-4 Kitasuna Koto-Ku
6718 WX Ede, Netherlands Tokyo, 136-0073 Japan
P.O. Box 428 Tel [phone]
6710 BK Ede, Netherlands Fax [phone]
Tel [phone] Email: [email protected]
Fax [phone]
Email:[email protected]
Removethe envelopecontaining thepacking list.Carefully removethe
instrument from the packing case. Make sure spare parts are not discarded with
the packing materials. Inspect for damaged or missing parts.
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2.3 Recommended Storage Practice
If equipment supplied by Brooks Instrument is to be placed in intermediate or
long-term storage, it is recommended that it be:
a. Stored within theoriginal shippingcontainer.
b. Stored in asheltered area, underthe following conditions:
1) Optimum ambient temperature21°C (70 °F), maximum32 °C (90°F),
minimum 7 °C (45 °F),.
2) Optimum relative humidity45% (maximum 60%/minimum25%).
c. Subjectedto a visual inspection upon removal fromstorage, to verifythat the
conditionof the equipment is‘as received’. If the equipmenthas been in
storage for more than ten months or if it has not been stored under the
recommendedconditions, all pressurecontaining seals shouldbe replaced.
In addition, the device should be subjected to a pneumatic pressure test in
accordancewith the applicablevessel codes.
2.4 Return Shipment
Prior to returning any instrument to the factory, contact your nearest Brooks
locationfor a ReturnMaterialsAuthorization Number (RMA#).Thiscan be
obtainedfrom oneof the followinglocations:
Brooks Instrument
407 W. Vine Street
P.O. Box 903
Hatfield, PA 19440 USA
Toll Free (888) 554-FLOW (3569)
Tel [phone]
Fax [phone]
Email:[email protected]
http://www.brooksinstrument.com
Brooks Instrument Brooks Instrument
Neonstraat 3 1-4-4 Kitasuna Koto-Ku
6718 WX Ede, Netherlands Tokyo, 136-0073 Japan
P.O. Box 428 Tel [phone]
6710 BK Ede, Netherlands Fax [phone]
Tel [phone] Email: [email protected]
Fax [phone]
E-mail:[email protected]
Anyinstrument returned toBrooks requires completionof Form RPR003-1,
Brooks Instrument Decontamination Statement, as well as, a Material Safety
DataSheet (MSDS) for the fluid(s) used in the instrument. This is required
beforeany Brooks Personnel canbegin processing. Copies ofthe form can be
obtainedfrom any Brooks Instrument locationlisted above.
2.5 Gas Connections
All models are fitted with the following inlet and outlet connectors as standard:
NPT(F),tube compression fittings, VCR,VCO, DIN orANSI flanges. Prior to
installation, make certain that all piping is clean and free of obstruction. Install
the piping in a manner that permits easy access to the instrument, should it
needto beremoved forcleaning ortest-bench troubleshooting.
Section 2: Installation
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Models 5800-S
Installation and Operation Manual
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2.6 Mechanical Installation
(Fordimensional drawings seeAppendix B:Dimensional drawings)
NOTE: Wheninstalling the Mass Flowdevice, care should betaken to prevent
foreignmaterials from enteringthe instrument’s inlet oroutlet. Do notremove the
protectiveend-caps until the actual moment of installation.
When used with reactive gases (some of which may be toxic), contamination or
corrosion may occur as a result of plumbing leaks or improper purging.
Plumbing should be checked carefully for leaks and the Mass Flow device
shouldbe purged (for a significant time) with Nitrogenbefore and afteruse on
reactivegasses.
Recommendedinstallationprocedures:
a. Allmodels shouldbe mounted in places thatare relatively free from
mechanicalshocks andvibration.
b. Leavesufficient roomfor access to theelectrical components.
c. Install in a manner that allows the instrument to be easily removed for
cleaning.
d. Themounting position of the Smart Mass Flow Meter or Controller can be
either horizontal or vertical, in case process pressures are smaller than 10
bar.
e. Forhigher processpressures, a horizontal installationis preferred, since
these pressures may cause a thermal siphon effect of the output signal at
zeroflow conditionsand degrading specifications.
NOTE: Thecontrol valveof theSmart Mass FlowController provides precision
controland is not designed for positive shut off. If positive shut off is required, it
isrecommended thata separateshut-off valve be installed in-line,downstream
fromthe Smart Mass Flow Controller.
NOTE: If the power supply to the Smart Mass Flow Controller is interrupted, a
NORMALLYCLOSEDvalve willbe fullyclosed, whilea NORMALLYOPEN valve
willbe fully open. TheNORMALLYOPENcontrol valvemeetsapplication
specific requirements, since it allows nitrogen gas purging if the power supply is
interrupted.
2.7 In-Line Filter
An in-line filter is installed, as standard, in the instrument’s inlet to prevent any
foreignmaterial enteringthe flow sensor or controlvalve. Thefiltering element
shouldbe periodicallyreplaced or ultrasonicallycleaned.
Apply only clean gasses on Mass Flow Meter/Controllers.
Section 2: Installation
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Installation and Operation Manual
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Models 5800-S
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2.8 Electrical Interfacing
Theinstallationof SmartTMF includes a 15-pinSub-D connector. For detailsof
correct installation, see Table 2-1
Table 2-1: Electrical interfacing. Smart TMF
Pin (TMF side) Function Controller Meter
1. Setpoint return (-) * n.a.
2. 0 (1)-5 Vdc Flow signal output * *
3. (TTL) Open collector alarm output * *
4. 0 (4)-20 mA Flow signal output * *
5. +15 Vdc to +28 Vdc Power supply * *
6. -15 Vdc Power supply (if required) * *
7. 0 (4)-20 mA Setpoint input (+) * n.a.
8. 0 (1)-5 Vdc Setpoint input (+) * n.a.
9. Power supply common * *
10. Flow signal output common * *
11. +5 Vdc ref. output * n.a.
12. Valve override input * n.a.
13. Not connected * *
14. Optional RS232C-RxD or RS485-A- * *
Signal Output (pins 2, 4 and 10)
Pin 2 indicates the flow rate, represented by a 0-5 Vdc or 1-5 Vdc signal
proportional to the mass flow. Pin 4 indicates the flow rate, represented by
either a 0-20 mAor 4-20 mAsignal current proportional to the mass flow. Both
thecurrent andvoltagesignals are returnedvia pin 10 on theD-connector.
Analogue Setpoint Input (pins 7/8 and 1; Controller models only) . The Smart
Mass Flow Controller can be used either with a current or voltage Set point.To
use the current Set point, connect the Set point signal to pin 7 and the Set
point return signal to pin 1 on the terminal (jumper J1 must be in place refer to
Figure 2-2). To use the voltage Set point, connect the Set point signal to pin 8
and the Set point return to pin 1 on the D-connector.
5 Vdc reference (pin 11; Controller models only)
A+5 Vdc ref. voltage is available on pin 11. This can be used to set the
Setpoint with the aid of an externally located potentiometer (10 turn 2 KOhm
suggested)..
NOTE: I/Oconfiguration tobe definedat time of ordering. Reconfigurationat
customer side can be accomplished using digital communication.
Power Supply
MassFlow Meter models(pin 5 and 9):The Mass FlowMeter's power
supply is connected via pins 5 (+15 to +28 Vdc) and 9 (power supply common)
onthe D-connector.
MassFlow Controller models(pin 5, 6and 9): The MassFlow Controller's
power supply is connected via pin 5 (+15 to +28 Vdc) and 9 (power supply
Section 2: Installation
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common) on the D-connector. If a -15 Vdc power supply is required, pin 6 must
be connected and jumper [K2] on the p.c. board must be set the lower
position (seeFigure2-2).
Thisis applicablefor model 5851Sand/or when aNormally Opened (N.O.)
controlvalve isused.
NOTE: With regard to the power supply connections, the attached cable must
be as short as possible to ensure that the minimum required voltage and
currentis available atthe mass flow device.
Cable Shielding Earth
Cablerequirements
Compliancewith EMC directive 89/336/EEC, requiresthat the equipmentbe
fitted with fully screened signal cables with at least 80% shielding.The cable
shielding should be connected to the PG connector’s metal shell, and have
360°shielding at both ends. The shielding should be connectedto an earth
terminal.
For translations of this instruction, see Appendix D: Translations of installation
instructions
Alarm (pin 3 of 9)
A(TTL) OpenCollector alarmoutput isavailable.
Type of used transistor is NPN.
Figure 2-1: Open Collector
Valve override (pin 12; Controller models only)
To open orclose the control valve independentlyof the Set point signal (e.g. for
safetyreasons), pin12 isavailable tocarry a valve override signal.Leave floating
(i.e.not connected) toallow for normal controloperation.
≥5 Vdc ValveOpen(for bothNOand NC valves)
≤≤
≤≤
≤ 0 Vdc ValveClosed (for bothNO and NCvalves)
NOTE:Thevalve overridecommandon pin12takes precedenceoverthe
communication-mediatedvalveoverridecommand.
Digital communication (pins 14 and 15)
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Section 2: Installation
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Installation and Operation Manual
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Models 5800-S
14
pins 14 and 15 are available for connecting the device to the RxD/A-or TxD/A+
linesfor RS-232/RS-485communications.
NOTE: EitherRS-232 or RS-485should be specified at the time ofordering. See
section 2.7 for details of how to configure the p.c. board.
2.9 Digital Communication
NOTE: Theprinted circuitboards onlyneed to bereconfigured ifthe hardware
settingsdiffer from those specifiedat the time ofordering.
BrooksSmart Mass Flow Meters and Controllers incorporate two printed
circuitboards: one main boardcontaining the processor anda piggyback board.
Thepiggyback board enables the device to communicatewith a PC via an
RS-232or RS-485 connection.The piggybackboard is installed via theK5, K6
andK7 connectors on themain board (see Figure2-2).
The p.c. board enclosure must be removed to gain access to the electronics.
Disconnectthe power to thedevice and any cablesrunning to the D-connector.
Remove the three screws at the base of the electronics enclosure, then lift off
theenclosure. The electronics enclosure mustbe replaced beforereturning the
unitto service.
Figure 2-2: p.c. boards with the locations of jumper switches
Note: Switch number 1 is the switch at the bottom
Thedigital communication piggyback boardis used for all
communication-relatedhardware settings. Forthis purpose, theboard is
equipped with a dipswitch block (SW1) holding 4 switches. RS-232 Board
(097-B-364-ZZZ)orRS-485Board (097-B-363-ZZZ),andto selectthebaud rate.
Table 2-2 summarises the possible settings.
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Section 2: Installation
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Table 2-2: Dipswitch settings
Switch
#1 Switch #2 Switch #3 Switch #4
RS-232 Off
RS-485 On
1200 Off Off Off
2400 On Off Off
3600 Off On Off
4800 On On Off
7200 Off Off On
9600 On Off On
19200 Off On On
38400 On On On
Baud rate
selection
Physical
layer
selection
Dipswitch block SW1
Since Brooks Smart Mass Flow devices are capable of communication
immediately after start-up, you should set the correct baud rates prior to power
up.Any changes to the baud rate settings or the physical layer selection made
duringoperation willtake effect immediately.Thecommunication I/O driversare
directly connected to the D-connector on top of the device.
TheRS-232 is essentially a point-to-point connection, i.e. one host-computer
andone Smart Mass Flowdevice. Most IBM-compatible PCsare equipped with
oneor more RS-232ports (COM ports) asstandard. The RS 232usage and
definitiansare very diverse. On the MF Smart Mass Flow devia the TxD signal is
theoutput signal of thedevia and the RxDthe input signal.The communication
terminals can be directly connected to a serial COM-port of any PC. The other
part of the terminals can be connected to Brooks model 0152/0154
Microprocessor-basedRead-out and Control Electronics. Thismodel provides
the power supply for Smart Mass Flow devices, as well as providing local
read-outand displaying theanalogue output signals.Figure 2-3 showsthe
interconnectiondiagram ofthe RS-232configuration. The pinassignment onan
IBMCompatible PC. Thisis standard for RS-232.
Section 2: Installation
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RxD
TxD
Gnd
3(2)
2(3)
7(5)
1
9
8D-connector to PC
25-pin (9-pin)
15
Figure 2-3: RS-232 interconnection of TMF and PC
Figure 2-4: RS-485 multidrop interconnection TMFs and PC
The RS-485 is essentially a multidrop connection. It allows a maximum of 32
devices to be connected to a computer system. IBM-ompatible PCs are not
equippedwith RS-485portsas standard.AnRS-232 toRS-485 converter or
RS-485interface boardis therefore requiredo connectan RS-485 toa standard
PC. Figure 2-4 is an interconnection diagram showing two TMFs linked to an
IBM-compatiblePC,via RS-485and RS-485 toRS-232 converter.TheRS-485
bus, a daisy-chain network, meaning that the wires are connected at the units
asin figure 2-4.
2.10 Interconnection
Ifno digital communicationis required (i.e. analogue I/O only), thefollowing
cablesare available forconnection of theSmart Mass Flow Meter/Controller to
theBrooks Microprocessor Control& Read-out Unit(see figure 2-5):
Section 2: Installation
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Length: 3 m; partnumber124-Z-236-AAA
Length: 6 m; partnumber124-Z-237-AAA
Length: 12 m; partnumber124-Z-610-AAA
THERMAL SIDE
Sub-D 15-pin female READ-OUT SIDE
Sub-D 15-pin male
Figure 2-5: TMF/C to Read-out cable
If no digital communication is required, a split cable can be supplied to
interconnectthe Brooks Microprocessor Control & Read-out Unit, the
SmartMass FlowMeter/Controller and computer(see figure 2-5):
Length: 3 m; partnumber124-Z-893-AAA
Length: 6 m; partnumber124-Z-894-AAA
Length: 12 m; partnumber124-Z-895-AAA
Figure 2-6: TMF/C Read-out and pc
NOTE: Special cablescan be suppliedmultidrop (RS-485) installations
arerequired.
Fordetailed information about the cable connections, see table 2-3.
Section 2: Installation
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Table 2-3: Electrical interfacing. Smart TMF cable
sub D (25p)
female
pin no.
sub D (9p)
female
pin no.
1. 6 brown Setpoint return (-)
2. 10 white 0 (1)-5 Vdc Flow signal output
3. 9 grey/pink (TTL) Open collector alarm output
4. 2 red/blue 0 (4)-20 mA Flow signal output
5. 13 red +15 Vcc to +28 Vdc Power supply
6. 14 blue -15 Vdc Power supply (if required)
7. 3 violet 0 (4)-20 mA Setpiont input (+)
8. 5 grey 0 (1)-5 Vdc Setpiont input (+)
9. 12 7 5 black Power supply common
10. 8 pink Flow signal output common
11. 4 yellow +5 Vdc ref. output
12. 7 green valve override input
11 shielding Chassis
14. 2 3 green/white Optional RS232C-RxD or RS485-A-
15. 3 2 blue/white Optional RS232C-TxD or RS485-A+
Read-out side
sub D (15p)
male
pin no.
Sub-D (15 c.)
sub D (15p)
female
pin no.
Colour FunctionComputer side
Section 2: Installation
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Section 3: Operation
3.1 Operating Procedure
1 Apply power to the Smart Mass Flow device and allow approximately 45
minutes for the instrument to reach a stable temperature.
2 Checkthe flow readingbefore turning on thepressurised gas supply. If the
flowreading is >0.2%then the instrument shouldbe re-zeroed
(see section 3.2).
3 Turn on the gas supply.
4 Regulate flow to 0%. Monitor the instrument’s output signal. If the output is
not <0.2%, check for leaks.
5 Commencenormaloperation.
3.2 Zero Adjustment
Each Smart Mass Flow device is factory-adjusted to provide a 0 ±10 mVdc
signal at zero flow. The adjustment is carried out in our calibration laboratory, an
ambientthe temperature of 20°Cis maintained.Afterinitial installationand
warm-up in the gas system, the zero flow indication may differ from the factory
setting.This is primarilycaused by differences intemperature between our
calibrationlaboratory andthe final mountingposition.
When checking the zero flow indication, always mount the device in its final
location and allow a minimum of 45 minutes for it to reach a stable temperature.
Incase Zero adjustment isrequired, this can bedone via Smart Control(model
0160) or via the zero push button next to the diagnostics LED.
Thezero adjustment shouldbe carried out underprocess conditions andno flow.
3.3 Calibration Procedure
Calibration of the Smart Mass Flow device is not described in this manual.
Calibrationcan only beachieved with useof the accurateBrooks Vol-U-Meter
equipmentand the digitalcommunication.
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