Brooks 5850 S User manual

1
Installation and Operation Manual
X-DPT-Profibus-Interface-eng
PN 541-C-068-AAG
November, 2008
Profibus-DP Interface
for use with Brooks®Smart Mass
Flow Meters
models 5860S, 5861S, 5863S, 5864S &
Mass Flow Controllers
models 5850S, 5851S, 5853S

2
Installation and Operation Manual
X-DPT-Profibus-DP-Interface-eng
PN 541-C-068-AAG
November, 2008
Handling Procedure:
1. Power to unit must be removed.
2. Personnel must be grounded, via a wrist strap or other safe, suitable means before any printed circuit card
or other internal device is installed, removed or adjusted.
3. Printed circuit cards must be transported in a conductive container. Boards must not be removed from
protective enclosure until immediately before installation. Removed boards must immediately be placed in
protective container for transport, storage or return to factory.
Comments
This instrument is not unique in its content of ESD (electrostatic discharge) sensitive components. Most
modern electronic designs contain components that utilize metal oxide technology (NMOS, SMOS, etc.).
Experience has proven that even small amounts of static electricity can damage or destroy these devices.
Damaged components, even though they appear to function properly, exhibit early failure.
This instrument contains electronic components that are susceptible to damage by static electricity. Proper
handling procedure must be observed during the removal, installation or other handling of circuit boards or
devices.
ESD (Electrostatic Discharge)
CAUTION
EssentialInstructions
Read this page before proceeding!
BrooksInstrumentdesigns,manufacturesandtestsitsproductstomeetmanynationalandinternationalstandards.Becausethese
instrumentsaresophisticatedtechnicalproducts,youmustproperlyinstall,useandmaintainthemtoensuretheycontinueto
operatewithintheirnormalspecifications.Thefollowinginstructionsmustbeadheredtoandintegratedintoyoursafetyprogram
wheninstalling,usingandmaintainingBrooksProducts.
• Read all instructions prior to installing, operating and servicing the product. If this instruction manual is not the correct
manual, please see back cover for local sales office contact information. Save this instruction manual for future reference.
• If you do not understand any of the instructions, contact your Brooks Instrument representative for clarification.
• Follow all warnings, cautions and instructions marked on and supplied with the product.
• Inform and educate your personnel in the proper installation, operation and maintenance of the product.
• Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable
local and national codes. Connect all products to the proper electrical and pressure sources.
• To ensure proper performance, use qualified personnel to install, operate, update, program and maintain the product.
• When replacement parts are required, ensure that qualified people use replacement parts specified by Brooks Instrument.
Unauthorized parts and procedures can affect the product's performance and place the safe operation of your process at risk.
Look-alike substitutions may result in fire, electrical hazards or improper operation.
• Ensure that all equipment doors are closed and protective covers are in place, except when maintenance is being performed
by qualified persons, to prevent electrical shock and personal injury.

3
Installation and Operation Manual
X-DPT-Profibus-Interface-eng
PN 541-C-068-AAG
November, 2008
Dear Customer,
We appreciate this opportunity to service your flow measurement and control requirements with a Brooks
Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their
gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for
various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices,
analytical instrumentation, semiconductor manufacturing, and more.
The Brooks product you have just received is of the highest quality available, offering superior performance,
reliability and value to the user. It is designed with the ever changing process conditions, accuracy requirements
and hostile process environments in mind to provide you with a lifetime of dependable service.
We recommend that you read this manual in its entirety. Should you require any additional information
concerning Brooks products and services, please contact your local Brooks Sales and Service Office listed on
the back cover of this manual or visit www.BrooksInstrument.com
Yours sincerely,
Brooks Instrument

4
Installation and Operation Manual
X-DPT-Profibus-DP-Interface-eng
PN 541-C-068-AAG
November, 2008
CONTENTS
1 INTRODUCTION .............................................................................................................. 6
1.1 How to use this manual .................................................................................................... 6
1.2 Related documents ........................................................................................................... 6
1.3 Definition of terms ............................................................................................................. 7
1.3.1 Terminology ........................................................................................................... 7
1.3.2 Number representations and formats ...................................................................... 8
2 PRODUCTOVERVIEW .................................................................................................... 9
2.1 General ......................................................................................................................... 9
2.2 Receipt of Equipment ....................................................................................................... 9
2.3 Recommended Storage Practice ..................................................................................... 10
2.4 Return Shipment ..............................................................................................................10
2.5 Gas Connectionsl ............................................................................................................10
2.6 The Brooks Smart Mass flow products ............................................................................ 11
2.7 Profibus on the Smart TMF series ................................................................................. 12
3 INSTALLATION...............................................................................................................14
3.1 Installation ....................................................................................................................... 14
3.2 Electrical interfacing ........................................................................................................14
3.2.1 General .................................................................................................................14
3.2.2 Main connector ..................................................................................................... 14
3.2.3 Additional Profibus connector (5800 series) ..........................................................16
3.2.4 Main connector (MF series) .................................................................................. 17
3.2.5 Profibus connector (MF series) .............................................................................18
3.3 Station address selection ................................................................................................18
3.4 Zero pushbutton ...............................................................................................................19
3.5 Supported baud rates ......................................................................................................19
3.6 Profibus network wiring ....................................................................................................20
3.6.1 Profibus network wiring requirements ....................................................................20
3.6.2 Line termination requirements ...............................................................................21
3.6.3 Special requirements for high-speed communication ............................................. 21
4 SLAVE CONFIGURATION...............................................................................................23
4.1 Introduction ......................................................................................................................23
4.2 Illustration of the Profibus-DP communication procedure .................................................. 23
4.3 Parameterization of the salve (MFC) ................................................................................23
4.4 Configuration of the slave ................................................................................................. 29
4.5 Diagnostic .......................................................................................................................31
4.5.1 Device diagnostic Message ................................................................................... 31
4.5.2 Run-time message errors ...................................................................................... 31
4.5.3 Fatal system errors ............................................................................................... 32
4.5.4 Primary non-fatal system errors ............................................................................32
4.5.5 Secondary non-fatal system errors ........................................................................ 34
4.5.6 Non-fatal ambient errors ........................................................................................34
4.6 Data Exchange Mode ...................................................................................................... 35
4.7 Example of the Profibus-DP communication procedure ....................................................38
5 MODELLISTING .............................................................................................................39
APPENDIX A PROFIBUS-DP MESSAGESERVICES ............................................................47
A.1 Global control commands ................................................................................................47
A.2 Fail-safe option ................................................................................................................47
A.3 Sync/unsync option .........................................................................................................47
APPENDIXB IEEE754 FLOATING POINT FORMAT ............................................................49

5
Installation and Operation Manual
X-DPT-Profibus-Interface-eng
PN 541-C-068-AAG
November, 2008 TABLES
Table 2-1: Brooks Smart Mass Flow Meters and Controllers.................................................. 11
Table 3-1: Smart TMF main connector pin layout.................................................................. 15
Table 3-2: Smart TMF Profibus-DP network connector pin layout........................................... 16
Table 3-3: Supported baud rate values................................................................................. 20
Table 3-4: Profibus cable parameters.................................................................................. 20
Table 5-1: Diagnostics message, extended data section layout............................................. 31
Table 5-2: Diagnostics: Run-time message error bits............................................................ 31
Table 5-3: Diagnostics: Fatal system error bits.................................................................... 32
Table 5-4: Diagnostics: Primary non-fatal system error/alarm bits.......................................... 33
Table 5-5: Diagnostics: Secondary non-fatal system error/alarm bits...................................... 34
Table 5-6: Diagnostics: Non-fatal ambient error/alarm bits..................................................... 34
Figures
Figure 3-1: Smart TMF main 15-pin male sub-D connector - pin numbering............................... 15
Figure 3-2: Profibus 9-pin female sub-D connector - pin numbering ........................................... 16
Figure 3-3: MF Profibus Main Power Connection ..................................................................... 17
Figure 3-4: Pinnumbering ...................................................................................................... 18
Figure 3-5: Smart Mass Flow Meter/Controller - Outlet view ...................................................... 18
Figure 3-6: Profibus line termination configuration .................................................................... 21
Figure 3-7: Recommended TEE and Terminator Resistor .......................................................... 21
Figure 3-8: High-speed communication inductors .................................................................... 22

6
Installation and Operation Manual
X-DPT-Profibus-DP-Interface-eng
PN 541-C-068-AAG
November, 2008
1 Introduction
1.1 HOW TO USE THIS MANUAL
This instruction manual is intended to provide the user with all the necessary
information to operate and program the Brooks Instrument Smart Mass Flow
Meters and Controllers on a Profibus-DP network. This manual should be used
together to the Installation and Operating Manual SmartTMF series (Brooks
Instrument doc. #541-C-051), which covers the installation, operation and
maintenance of Smart Mass Flow devices with respect to their intended use in
a gas flow system.
This manual covers the additional device features as well as the installation and
programming issues with respect to operating the Smart TMF series devices on
a Profibus-DP network.
This manual is organized in to five sections:
Section 1: Introduction
Section 2: Product overview
Section 3: Installation
Section 4: Slave configuration
Section 5: Modellisting
Appendix A: Profibus-DP message services
Appendix B: IEEE 754 floating point format
Appendix C: Warranty & Repair sheet
It is recommended that this manual is read in its entirety, before connecting the
device to the network and attempting to operate it over the network.
1.2 RELATEDDOCUMENTS
The following documents are referred to in this document or are suggested for
further reading:
1. InstallationandOperatingManual Smart seriesTMF- Brooks Instrument,
doc. #541-C-051
2. Installation andOperating Manual MF series - Brooks Instrument,
doc. #541-C-061
3. Installation and Operating Manual Smart-Control software - Brooks Instru-
ment, doc. #541-C-054
4. InstallationandOperatingManualSmartDDEsoftware- Brooks Instrument,
doc. #541-C-057
5. EN 50170 (DIN 19245 Part 1) - GeneralProfibusstandard (PNO doc. #0.002)
6. EN 50170 (DIN 19245 Part 3) - Profibus-DPstandard (PNO doc. #0.012)
7. Profibus Interconnection Technology ProfibusGuideline (PNO doc. #2.142)
8. ImplementierungshinweisezurDINE19245Teil3(German, PNO doc. #2.041)
9. Simatic-NetSPC3SiemensPROFIBUS Controller - UserDescription,v1.5,
10/96, Siemens AG 1996, document 6ES7-195-0BD00-8BA0.
10. The rapid waytoProfibus-DP. M. Popp, 1997 (PNO doc. 4.072)
The PNO document numbers between brackets, refer to the PNO (German Profibus
User Organization) documentation list.

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Installation and Operation Manual
X-DPT-Profibus-Interface-eng
PN 541-C-068-AAG
November, 2008 1.3 DEFINITIONOF TERMS
1.3.1 Terminology
GSD file The GSD file contains the characteristic device data of
the product, i.e. the device profile.
Input/Output Profibus-DP conventions define all input/output directions
as seen from the master system.
Data transferred by the master to the slave (e.g.
commands, setpoints) is referred to as ‘output data’.
Slave (sensor) data to be transferred to the master is
referred to as ‘input data’.
Motherboard Main electronics board of the Smart TMF series
containing the main processor, sensor and valve interface
and main connector.
Piggyback Exchangeable board on top of and connected to the main
board. This board provides the communications
functionality and holds the program and data memory.
PNO Profibus Nutzer Organization. Profibus User
Organization, based in Germany.
Profibus-FMS Process field bus - Fieldbus Message Specification.
Profibus protocol for high-level, object oriented data
communication.
Can be operated together with Profibus-DP.
Profibus-DP Process field bus - Decentralized Periphery. Profibus
protocol for high-speed, cyclic data communication.
Profibus-PA Process field bus - Process Automation. Profibus
protocol for intrinsically safe data communication,
according to IEC1158-2 and DIN E19245 T4.
SPC3 Profibus-DP ASIC. Component manufactured by
Siemens AG to provide Profibus-DP slave functionality to
a host processor.
MFC Mass Flow Controller
MFM Mass Flow Meter

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Installation and Operation Manual
X-DPT-Profibus-DP-Interface-eng
PN 541-C-068-AAG
November, 2008
1.3.2 Number representations and formats
Bit Smallest binary information representation: 0 or 1
Nibble Binary number representation, consists of 4 bits. Repre
sents 1 value or 4 situations (‘bitmapped’). Usually
nibbles appear grouped together in one or more bytes
(i.e. two per byte).
Examples:
Value: binary 0011 = 3 decimal
Bitmapped: binary 0111 = bits 0,1, and 2 are true, 3 is
false
Byte or Octet Binary number representation, consists of 8 bits. Repre
sents 1 value or 8 situations (‘bitmapped’). Bits in a byte
are numbered from right to left, i.e. least significant bit is
bit 0, most significant bit is bit 7.
Examples:
Value: binary 00110011 = 51 decimal
Bitmapped: binary 00010111 = bits 0,1,2 and 4 are true,
others are false
Word Combination of 2 bytes or 16 bits. Represents 1 value or
16 situations (‘bitmapped’).
Examples:
Value: binary 00010001 00110011 = 4404 decimal
Bitmapped: binary 00010001 00010111 = bits 0,1,2,4,8
and 12 are true, others are false.
Integer An integer is a whole number (not a fractional number) that
can be positive, negative, or zero.
Examples:
-5, 1, 5, 8, 97, and 3,043.
Decimal Common numbers in the decimal number system. Range
depends on size of the binary representation:
Examples:
1 binary byte: range 0..255 decimal
2 binary bytes = 1 binary word: range 0..65535
Hexadecimal Representation of numbers in the hexadecimal number
system. Any written hexadecimal number in this manual is
preceded by “0x”
Examples:
0x25 = hexadecimal 25 = decimal 37 (1 byte)
0xB4 = hexadecimal B4 = decimal 180 (1 byte)
Real Representation of fractional numbers according to IEEE-
754 single precision floating point format definition.
See also Appendix B
Size: 4 bytes
Range: ±3.4*10-38 to ±3.4*10+38
Examples:
0x41 0x45 0x70 0xA4 = decimal 12.34

9
Installation and Operation Manual
X-DPT-Profibus-Interface-eng
PN 541-C-068-AAG
November, 2008
2 PRODUCTOVERVIEW
2.1 General
This section contains the procedures for the receipt and installation of the instrument. Do not
attempt to start the system until the instrument has been permanently installed. It is extremely
important that the start-up procedures be followed in the exact sequence presented.
NOTE: Operating procedure: do not operate this instrument outside the specification range
listed in section 5.
Before bringing the unit into operation, make sure that all gas connections have been correctly
tightened and that all the necessary electrical connections have been made.
2.2 Receipt of Equipment
When the equipment is received, the outside packing case should be checked for damage
incurred during shipment. If the packing case is damaged, the local carrier should be notified at
once regarding his liability. A report should be submitted to your nearest Product Service
Department.
Brooks Instrument
407 W. Vine Street
P.O. Box 903
Hatfield, PA 19440 USA
Toll Free (888) 554-FLOW (3569)
Tel [phone]
Fax [phone]
E-mail: [email protected]
http://www.brooksinstrument.com
Brooks Instrument Brooks Instrument
Neonstraat 3 1-4-4 Kitasuna Koto-Ku
6718 WX Ede, Netherlands Tokyo, 136-0073 Japan
P.O. Box 428 Tel [phone]
6710 BK Ede, Netherlands Fax [phone]
Tel [phone] E-mail: [email protected]
Fax [phone]
E-mail:[email protected]
Remove the envelope containing the packing list. Carefully remove the instrument from the
packing case. Make sure spare parts are not discarded with the packing materials. Inspect for
damaged or missing parts.

10
Installation and Operation Manual
X-DPT-Profibus-DP-Interface-eng
PN 541-C-068-AAG
November, 2008
2.3 Recommended Storage Practice
If equipment supplied by Brooks Instrument is to be placed in intermediate or long-term storage,
it is recommended that it be:
a. Stored within the original shipping container.
b. Stored in a sheltered area, under the following conditions:
1) Optimum ambient temperature 21°C (70 °F), maximum 32 °C (90 °F), minimum 7 °C
(45 °F),.
2) Optimum relative humidity 45% (maximum 60%/minimum 25%).
c. Subjected to a visual inspection upon removal from storage, to verify that the condition of the
equipment is ‘as received’. If the equipment has been in storage for more than ten months or if it
has not been stored under the recommended conditions, all pressure containing seals should be
replaced. In addition, the device should be subjected to a pneumatic pressure test in accordance
with the applicable vessel codes.
2.4 Return Shipment
Prior to returning any instrument to the factory, contact your nearest Brooks location for a Return
Materials Authorization Number (RMA#). This can be obtained from one of the following
locations:
Brooks Instrument
407 W. Vine Street
P.O. Box 903
Hatfield, PA 19440 USA
Toll Free (888) 554-FLOW (3569)
Tel [phone]
Fax [phone]
E-mail: [email protected]
http://www.brooksinstrument.com
Brooks Instrument Brooks Instrument
Neonstraat 3 1-4-4 Kitasuna Koto-Ku
6718 WX Ede, Netherlands Tokyo, 136-0073 Japan
P.O. Box 428 Tel [phone]
6710 BK Ede, Netherlands Fax [phone]
Tel [phone] E-mail: [email protected]
Fax [phone]
E-mail:[email protected]
Any instrument returned to Brooks requires completion of Form RPR003-1, Brooks Instrument
Decontamination Statement, as well as, a Material Safety Data Sheet (MSDS) for the fluid(s)
used in the instrument. This is required before any Brooks Personnel can begin processing.
Copies of the form can be obtained from any Brooks Instrument location listed above.
2.5 Gas Connections
All models are fitted with the following inlet and outlet connectors as standard: NPT(F), tube
compression fittings, VCR, VCO, DIN or ANSI flanges. Prior to installation, make certain that all
piping is clean and free of obstruction. Install the piping in a manner that permits easy access to
the instrument, should it need to be removed for cleaning or test-bench troubleshooting.