Cee 300X User manual

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Cee®300X
Precision Spin Coater
Operator/User Manual
New users: Read this manual in its entirety before operating the equipment.
© 2017 Cost Effective Equipment LLC

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1. Machines Covered
This manual covers the CeeTM Model 300X series machines. It is to be used to install,
operate, and troubleshoot this model Spin Coater.
2. Table of Contents
1. Machines Covered..............................................................................................2
2. Table of Contents ...............................................................................................2
3. Introduction to the Model 300X.........................................................................4
3.1 Dimensions.......................................................................................................4
3.2 Programmability................................................................................................4
3.3 Precision...........................................................................................................4
3.4 Reliability...........................................................................................................4
3.5 Bowl Design......................................................................................................5
3.6 Utilities ..............................................................................................................5
4. Equipment Description ......................................................................................6
4.1 System Specifications.......................................................................................6
4.2 Model and Revisions.........................................................................................7
4.3 Safety Hazards/Precautions..............................................................................7
4.3.1 Overview of Equipment-Specific Hazards..................................................7
4.3.2 Electrical....................................................................................................7
4.3.3 Mechanical.................................................................................................7
4.3.4 Chemical....................................................................................................8
4.3.5 Lockout/Tagout Procedures and Information.............................................8
4.3.6 Intended Use of Machine...........................................................................8
4.4 Installation.........................................................................................................9
4.4.1 Facilities Requirements..............................................................................9
4.4.2 Environment...............................................................................................9
4.4.3 Unpacking/Inspection.................................................................................9
4.4.4 System Installation and Setup ...................................................................9
5 Software....................................................................................................................10
5.1 Run Screen.....................................................................................................10
5.1.1 Startup with Passwords Enabled.............................................................10
5.1 Run Screen.....................................................................................................11
5.2 Spin process Page..........................................................................................12
5.2.1 Field definitions:.......................................................................................12
5.4 Centering a Substrate.....................................................................................15
5.5 Starting the Process........................................................................................16
5.6 Aborting a Process..........................................................................................16
5.7 Process Complete...........................................................................................17
5.8 Running Multiple Iterations..............................................................................17
5.9 Edit Screen .....................................................................................................18

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5.10 Writing a Spin Recipe .....................................................................................20
5.10.1 Entering data ...........................................................................................20
5.10.2 Recipe Management................................................................................22
5.10.3 Recipe Backup.........................................................................................22
5.10.4 Desktop Recipe Editing............................................................................23
5.11 DiagScreen.....................................................................................................24
5.11.1 Spin Diagnostics Screen..........................................................................25
5.11.2 Configuration Screen...............................................................................27
5.11.3 Spin Configuration Screen.......................................................................28
5.11.4 Naming Dispenses on the Spin Config Screen........................................29
5.11.5 Selecting Empty Sensors on the Spin Config Screen..............................30
5.11.6 Password Configuration Screen ..............................................................30
5.11.6 Password Configuration Screen ..............................................................31
6Navigation Bar ......................................................................................................32
6.1 Run.................................................................................................................32
6.2 Edit..................................................................................................................32
6.3 Diag ................................................................................................................32
6.4 Config .............................................................................................................32
6.5 Help ................................................................................................................32
6.6 Back................................................................................................................32
7LIVE Update feature..............................................................................................33
7.1 Limitations of LIVE Update Mode....................................................................35
8. Service & Maintenance ....................................................................................36
8.1 Maintenance –Vacuum Liquid Trap ...............................................................37
8.2 Spin Chuck Replacement................................................................................37
8.3 Troubleshooting Chart ....................................................................................38

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3. Introduction to the Model 300X
3.1 Dimensions
•27.75” (70.5 cm) W x 34.75” (88.3 cm) L × 20.25” (51.5 cm) H
•Machine weight: 115 lb (52.2 kg)
•Shipping weight: 250 lb (113.4 kg)
3.2 Programmability
•PC-controlled
•PC-based touch screen interface and display
•Full-color alphanumeric-capable graphical user interface (GUI)
•250,000 process recipe programs on board
•A virtually unlimited number of user-defined recipe program steps
•0.1-second resolution for step times (9,999.9 seconds max step time)
•Spin speed: 0 to 6,000 rpm (3,000 rpm option/no charge)
•Spin speed acceleration:
o0 to 30,000 rpm/s unloaded
o0 to 23,000 rpm/s 200-mm substrate
o0 to 3,000 rpm/s 6” × 6” × 0.250” photomask recessed chuck
•Connectivity: USB/ethernet port for communications for uploading/downloading
process parameters with offline firmware standard (offline recipe number and
steps unlimited)
•System capable of controlling third-party host software of high-end IDI / Cybor /
Mykrolis positive displacement pumps
•Simultaneous dual automated dispense capability
•Bi-directional speed control/oscillating chuck
•Iteration software (recipe looping)
•Dispense or component outputs: 50
•Security: Password protection option available at no charge
•In process/dynamic speed/acceleration control
3.3 Precision
•Spin speed repeatability: < 0.2 rpm
•Spin speed resolution: < 0.2 rpm
•Substrate sizes: < 1 cm to 450 mm round; 14” x 14” square
3.4 Reliability
•Indirect drive system protects the spin motor from contact with process chemicals
and solvents
•Vacuum and lid interlock standard
•Industry-leading reliability and uptime
•1-year full warranty on parts and labor
•Free remote technical support (phone, email, fax) for the life of the product
•Application process assistance for life of the product

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3.5 Bowl Design
•Stainless steel bowl (for all stainless steel construction)
•Optional polyethylene splash ring
•Closed and optional open lid designs for process flexibility
•Drain and exhaust ports located in the bottom of bowl
•Optional nitrogen purge for an inert spin environment
3.6 Utilities
•Voltage ranges: 208-240 VAC, 50/60 Hz
•Power requirements: 655 watts
•Drain port: 3⁄4” OD
•Exhaust port: 1” OD
•Vacuum: 25” Hg
•Exhaust: 50 cfm at 0.2” water
•Nitrogen or CDA (for automated dispenses): 70 psi

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4. Equipment Description
The Cee® 300X precision spin coater delivers track-quality performance, with
revolutionary interface capabilities and the utmost in chemical compatibility, in an
efficient, space-saving design.
Fully programmable and user-friendly, the Cee® 300X precision spin coater features the
accuracy and repeatability needed to eliminate processing variability from critical
experiments. With its convenient compact footprint, wide array of chemical compatibility,
and durability, this easy-to-use benchtop system will provide years of high-performance
operation, making the Cee® 300X purchase a smart and cost-effective decision.
4.1 System Specifications
Maximum Spin Speed
(3000)(4000)(6000)
RPM/s
Maximum Ramp
30000
RPM/s
Speed Accuracy
<0.2 RPM
RPM/s
Maximum Substrate that will
fit in the bowl
450
mm
Recipe Storage
Virtually Unlimited
Recipes
Power
220
Volts AC- Single Phase
Weight
115
Pounds

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4.2 Model and Revisions
The model and serial number information for the CeeTM 300X are located on the rear
panel near the power inlet. Software version information can be found on the Main
screen. See Software for screen shots and a detailed explanation of the system
software.
4.3 Safety Hazards/Precautions
Read this manual in its entirety before operating the machine.
4.3.1 Overview of Equipment-Specific Hazards
The unit is very heavy and proper precautions should be taken when handling the
machine to minimize risk of injury. Labels are placed on the machine to identify areas
where caution is needed during operation.
4.3.2 Electrical
General Hazard
Pinch Point Warning
Notes
High voltage is present in the machine. Disconnect the power before
servicing.
Stored electrical energy is present in the machine. Before servicing allow
sufficient time for discharge. The servo amp has a charge light; do not service
the machine until this light has gone out.
4.3.3 Mechanical
This machine uses compressed gasses, which can provide motive force for
components and can expand violently upon decompression. Disconnect N2 or CDA
before removing any panels.
The machine is capable of very high-speed rotation. Ensure all lids and panels
are in place before rotating these devices.
Ensure that all panels are on and in their correct locations before powering up or
operating.
When opening the lid be aware of the pinch point at the hinge cover. Open the lid
only by using the handle on the lid.
The unit is very heavy and proper precautions should be taken when handling or
moving the machine to minimize risk of injury.

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4.3.4 Chemical
Ensure chemical compatibility of all chemicals and materials being used inside
the machine. This includes all wetted parts of the storage, supply, dispense, and waste
systems.
Ensure chemical compatibility of all chemicals with each other. All dispensed
materials are held in one common waste storage tank. Check for reactions between
chemicals before use.
Flammable Chemicals. No open flames/sparks.
Relieve pressure before opening canisters, tanks, cartridges, or syringes to refill.
Relieve pressure and shut off chemical valves before servicing supply lines,
dispense valves or other components.
Relieve pressure and shut off chemical valves before removing spin lid or
changing BSR tubes, EBR tubes, or any other dispense nozzle or spray tip.
Flush tubing and valves with an appropriate solvent and drain system before
servicing.
When draining waste tank, use appropriate containers and connection methods.
Ensure proper ventilation/exhaust is used at all times.
Always wear the proper Personal Protective Equipment for the job. This includes
safety glasses, gloves and other equipment as needed to protect from mechanical and
chemical hazards.
4.3.5 Lockout/Tagout Procedures and Information
Before servicing, turn off the machine and remove the power inlet cord by disconnecting
the plug where it enters the machine.
4.3.6 Intended Use of Machine
The CeeTM Model 300X is intended for use as a Semiconductor/Optical application spin
coating machine. It is primarily intended for substrates up to the maximum size.
The Model 300X is not intended for use in food or medical applications or for use in
hazardous locations.
The CeeTM Model 300X is intended for use only by properly trained personnel wearing
the proper personal protective equipment. Anyone not trained in the proper use of the
Model 300X and have not fully read this manual should not operate the equipment. The
CeeTM Model 300X is intended for use in a cleanroom environment to provide the proper
processing conditions for the substrates. If it is used outside of a cleanroom
environment, the substrate cleanliness may be compromised.
The CeeTM Model 300X is not intended for use in a hazardous or explosive
environment.

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4.4 Installation
4.4.1 Facilities Requirements
The CeeTM 300X requires the following utilities for operation.
•Single Phase 208-240V AC at 15 Amps
•Vacuum Supply at 20 in Hg
•Nitrogen Supply at 45psi to 55psi (Auto Dispense and Bake Proximity)
•Exhaust Port 1 Inch OD
•Drain Port 3⁄4 Inch OD
4.4.2 Environment
The CeeTM 300X should be operated in a clean, low humidity environment.
4.4.3 Unpacking/Inspection
Thoroughly check machine for shipping damage. If physical damage is seen, DO NOT
APPLY POWER! Contact CeeTM immediately.
The following items should be included with the shipment.
(1) CeeTM 300X
(1) Power Cord with female power connector
(1) Anodized Aluminum Stylus
(1) User & Installation Manual
Optionally included items:
Spin Chucks with Screws
Dispense Controllers
Dispense Valves
Dispense Nozzles
Dispense Hubs
4.4.4 System Installation and Setup
(1) Lift the unit out of the packing crate by grasping the bottom only. Do
not lift the by any of the top covers or protrusions. Do not roll or turn
the unit on its side or ends.
(2) Remove plastic wrap and packing foam.
(3) Place CeeTM Model 300X on a table of proper height and strength so
that the controls and spin chuck are at the proper ergonomic height.
(4) Level the machine using the feet so that the spin chuck is level front-to-
back and side-to-side.
(5) Thoroughly clean the spin bowl and spin chuck.
(6) Connect vacuum, N2, drain, and exhaust lines.
(7) Plug in the machine.
(8) Once plugged in, only the cooling fan should be powered, not the
display or bake plate.
(9) Switch ON the ON/OFF Power Switch.
(10) Display should momentarily show boot screen and then show main
screen. Please be patient for booting process to complete.

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5 Software
5.1 Run Screen
5.1.1 Startup with Passwords Enabled
The Run Screen is the first screen that you will see when you start the software. If the
300X unit has passwords enabled, the beginning screen will be blank with login and
logout buttons.
To login, press the Login button in the upper right of the touch-screen and this will bring
up the keyboard to enter your password. By default, the passwords for a 300X are:
Super User Level: CEE
User Level: 200X
Maintenance: DIAG

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5.1 Run Screen
Once logged in, or if passwords are not enabled, this is how the Run Screen looks.
From here you can get the Spin Processing Screen by pressing the large buttons in the
left-center of the screen. It is also possible to navigate to other windows by using the
navigation Bar.

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5.2 Spin process Page
This is the page where Spin processes are run and monitored on the 300X Model
software.
The controls and indicators from the Spin Process page are listed here, for instructions
on how to run a spin process go to the next page.
5.2.1 Field definitions:
1. Recipe Name: The name of the currently loaded recipe.
2. Live Update: This button allows the user to update the process currently
running. The button is only active during an active process. More info on Live
Update is available on the ToDo LIVE Update section. (Live update is not
available on all models.)
3. Load: This button brings up the TODO Recipe Select Screen to select for
processing.
4. Edit Recipe: This button will navigate to the Spin Process Editor if a recipe is
loaded. If a recipe is not loaded, it will go to the TODO Recipe Select Screen.
5. Lid Closed; A lamp showing the state of the Lid Closed sensor.
6. Substrate Present Indicator: A lamp showing the state of the Spin Chuck
Vacuum sensor.
7. Step Indicator: Shows the current step of the process.
8. Time Indicator: Shows the time remaining on the current step.
9. Speed indicator: Shows the current speed of the spindle
10.Exhaust Indicator: Shows the current setting of the programmable exhaust.
(Programmable Exhaust not available on all models)
11.Dispense indicators: Illuminated button shows which dispenses are currently
activated.
12.Iteration Setting: This setting allows the currently selected process to run
consecutively the entered number of time without stopping. (Iteration processing
not available on all models)

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13.Process Button: The process button has four modes;
a. Start Centering: This mode starts the wafer spinning very slowly to check
for centering on the Spin Chuck.
b. Start Process: This mode starts the selected process.
c. Abort: This mode aborts a currently running process.
d. OK: This mode turns off the process complete buzzer.
14.Vacuum Hold / Release button: this button allows the user to actuate the
vacuum of the spin chuck as they center the substrate.

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To run a substrate, first a recipe must be loaded. Pressing the Load button will bring up
the Recipe Selection Screen. A recipe may be selected by double clicking on the
desired recipe or selecting the desired recipe and clicking Enter.

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5.4 Centering a Substrate
The Cee 300X has 2 methods of centering a substrate. The Centering Time parameter
set on the Spin Config screen determines the method used.
If the Centering Time parameter (3) is set to 0 seconds, pressing the Start Centering
button will start the Spin Chuck spinning. The Chuck will continue to spin as long as the
lid is closed, if the lid is opened the Chuck will stop spinning. The lid can be lifted to
adjust centering as many times as needed.
If the Centering Time parameter (3) is set to a non- zero value, pressing Start Centering
button will start the Spin Chuck spinning for the Centering Time value. This method has
no regard for the lid position. Once completed, pressing the Center button will restart
the centering process.

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5.5 Starting the Process
Once the substrate is on the Spin Chuck at a desired position, pressing the Start
Process button will begin the process. For the duration of the process, the lid must
remaine closed.
5.6 Aborting a Process
Once the process is started, the Abort button can be used to abort the process. This put
the machine into a safe position for the user to recover the substrate.

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5.7 Process Complete
Once the Process is completed, the 300X will sound an audible alarm. Pressing the OK
button will silence the alarm. The 300X is now ready to Center another substrate.
5.8 Running Multiple Iterations
It is possible to run a process multiple times consecutively. By entering a value greater
than 1 in the Iterations field will cause the process to run the specified number of times.
The tool will give a slight alarm between runs, and the processes may be aborted in
normal fashion. (Iterations not available on all models)

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From here you can get the Spin Recipe Edit Screen by pressing the large buttons in the
left-center of the screen.
5.9 Edit Screen
This is the page where Spin Recipes are edited on the 300X.
The controls and indicators from the Spin Recipe Edit page are listed here, for
instructions on how to edit a spin process go to the next page.
(1) Recipe Name: The name of the currently loaded recipe.
(2) Load button: This button opens the dialog to load a recipe into the editor.
(3) Save button: This button opens the save dialog for saving the current recipe.
(4) Delete button: This button opens the delete dialog for deleting the recipes off
the 300X.
(5) Velocity Column: This box is where Velocity data is entered for each step in

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RPM’s.
(6) Ramp Column: This box is where Ramp data is entered for each step in
RPM/sec.
(7) Time Column: This box is where the length of each step is entered in
seconds.
(8) Dispenses Column: This box opens the dialog which allows you to select
which dispenses are active for each step.
(9) Exhaust: This box is where the exhaust is selected in percentage.
(Programmable exhaust not available on all models).
(10) Oscillation: This box is where the time between oscillations is entered in
seconds. (Oscillation mode not available on all models)
(11) Insert button: This button inserts a blank step in front of the currently
highlighted step.
(12) Delete button: This button deletes the currently selected step.
(13) Clear All button: this button clears all the data loaded in the editor.
(14) Scroll Up button: This control steps the recipe up one step.
(15) Scroll Down button: This control steps the recipe down one step.
(16) Highlighted Step: The currently highlighted step is demonstrated by a darker
grey color.

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5.10 Writing a Spin Recipe
The Spin Edit Screen is where Spin Recipes are written.
5.10.1 Entering data
By clicking on the Velocity (5), Ramp (6), Time (7), Exhaust (9), or Oscillation (10)
boxes a numeric pad will appear.
Using the Numeric Pad, you can now enter the parameter for the selected step. The
Numeric Pad will indicate the valid range for at the top of the window. Once the desired
value is entered, pressing the ENTER key will close the Numeric Pad and go back to
the Spin Edit Screen with the selected value updated.