Cee Apogee User manual

1. INTRODUCTION...............................................................................................................................................................3
1.1. CONFIDENTIALITY STATEMENT................................................................................................................................................................3
1.2. WARRANTY ........................................................................................................................................................................................3
1.3. RETURNED MATERIALS .........................................................................................................................................................................3
1.4. MODEL AND REVISIONS ........................................................................................................................................................................3
1.5. ENVIRONMENTAL CONSIDERATIONS ........................................................................................................................................................4
1.6. GENERAL SAFETY HAZARDS /PRECAUTIONS..............................................................................................................................................4
1.7. ELECTRICAL.........................................................................................................................................................................................4
1.8. MECHANICAL......................................................................................................................................................................................4
1.9. CHEMICAL ..........................................................................................................................................................................................4
1.10. LOCKOUT/TAGOUT PROCEDURES AND INFORMATION ...............................................................................................................................5
1.11. INTENDED USE OF MACHINE................................................................................................................................................................5
2. EQUIPMENT DESCRIPTION................................................................................................................................................6
2.1. USER CONTROLS..................................................................................................................................................................................6
2.2. DIMENSIONS.......................................................................................................................................................................................6
2.3. FEATURES AND PROGRAMMABILITY.........................................................................................................................................................7
2.4. PRECISION..........................................................................................................................................................................................7
2.5. RELIABILITY.........................................................................................................................................................................................7
2.6. BOWL DESIGN.....................................................................................................................................................................................7
2.7. UTILITIES............................................................................................................................................................................................7
3. INSTALLATION.................................................................................................................................................................8
3.1. CLEARANCE REQUIREMENTS ..................................................................................................................................................................8
3.2. FACILITIES REQUIREMENTS ....................................................................................................................................................................9
3.3. ENVIRONMENT..................................................................................................................................................................................10
3.4. UNPACKAGING &INSPECTION ..............................................................................................................................................................10
3.5. SYSTEM INSTALLATION &SETUP ...........................................................................................................................................................10
3.6. START UP.........................................................................................................................................................................................10
3.7. SYSTEM CHECKS ................................................................................................................................................................................11
4. SPIN COATER USE & OPERATION.....................................................................................................................................12
4.1. SPIN CHUCK INSTALLATION AND/OR REMOVAL........................................................................................................................................12
4.2. FIVE-HOLE DISPENSE NOZZLE HUB........................................................................................................................................................12
4.3. LID ADJUSTMENT...............................................................................................................................................................................12
5. SPIN COATER THEORY....................................................................................................................................................13
5.1. SPIN COATER PROCESS DESCRIPTION.....................................................................................................................................................13
5.2. SPIN SPEED.......................................................................................................................................................................................14
5.3. ACCELERATION..................................................................................................................................................................................14
5.4. FUME EXHAUST.................................................................................................................................................................................14
5.5. PROCESS TREND CHARTS.....................................................................................................................................................................15
5.6. SPIN-COATING PROCESS TROUBLESHOOTING ..........................................................................................................................................16
6. PREVENTATIVE MAINTENANCE.......................................................................................................................................18
6.1. SAFETY CHECKS .................................................................................................................................................................................18
6.2. MECHANICAL/UTILITIES CHECKLIST .......................................................................................................................................................18
6.3. CLEANING ........................................................................................................................................................................................18
7. TABLE OF REVISIONS......................................................................................................................................................20

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1. Introduction
1.1. Confidentiality Statement
Information supplied is for the use in the operation and/or maintenance of Cee® equipment. Neither
this document nor the information it contains shall be disclosed to others for manufacturing or any other
purpose without written authorization from, Cost Effective Equipment, LLC.
1.2. Warranty
Cost Effective Equipment, LLC warrants to the original purchaser (Buyer) that equipment is free from
defects in material and workmanship under normal use and service in accordance with Cee®
instructions and specifications. Buyer Shall promptly notify Cee® of any claim against this warranty,
and any item to be returned to Cee® shall be sent with transportation charges prepaid by Buyer, clearly
marked with a Return Authorization (RMA) number obtained from Cee® Customer Support. Cee’s
obligation under this warranty is limited to the repair or replacement, at Cee® option, of any equipment,
component or part which is determined by Cee® to be defective in material or workmanship. This
obligation shall expire one (1) year after the initial shipment of the equipment from Cee®. This warranty
shall be void if:
Any failure is due to the misuse, neglect, improper installation of, or accident to the equipment.
Any major repairs or alterations are made to equipment by anyone other than a duly authorized
representative of Cee®. Representatives of Buyer will be authorized to make repairs to the equipment
without voiding warranty, on completion of the Cee® training program.
Replacement parts are used other than those made or recommended by Cee®.
CEE® MAKES NO OTHER WARRANTIES, EXPRESSED OR IMPLIED, WITH RESPECT TO
EQUIPMENT. NO WARRANTY IS MADE AS TO THE MERCHANTABILITY OF THE EQUIPMENT
NOR ITS FITNESS FOR ANY PARTICULAR PURPOSE. In no event shall Cee® be liable for
consequential loss or damages, however caused. No person or representative of Cee® is authorized to
assume for Cee® any liability in connection with equipment nor to make any change to this warranty
unless such change or modification is put in writing and approved by an authorized representative of
Cee® in writing.
This warranty shall be governed by the laws of the state of Missouri, U.S.A.
1.3. Returned Materials
Any materials, parts, or equipment returned to Cost Effective Equipment, LLC must be clearly labeled
with a Return Material Authorization (RMA) number.
To obtain an RMA number, contact:
Cee® Customer Support
Telephone...................................... [phone]
Email.............................................. [e-mail]
Web Address.................................. www.costeffectiveequipment.com
1.4. Model and Revisions
The model and serial number information for the Cee® Apogee™ Spin Coater are located on the rear
panel. Software version information can be found on the About screen. See DataStream™ Manual for
screenshots and a detailed explanation of the system software.

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1.5. Environmental Considerations
Cee® fosters sustainability through innovation in the durability and reliability of our precision
tools and equipment. Individual component modules are engineered for serviceability ensuring
long lasting performance. Processes are designed to minimize use & consumption of chemical
compounds ensuring accurate, replicable, industry-leading results every time.
Cee® diligently screens suppliers to ensure conflict-free sourcing of minerals and product
components are constructed of recycled materials wherever possible.
Cee® tools and equipment operate without the use of ozone depleting substances (ODSs)
includingchlorofluorocarbons (CFCs), methyl chloroform, hydrochlorofluorocarbons (HCFCs),
carbon tetrachloride, perfluoro compounds (PFCs), or other volatile compounds/organic
solvents.
1.6. General Safety Hazards / Precautions
Read this manual in its entirely before operating orservicing the machine
The unit is very heavy and proper precautions should be taken to when handling the machine to
minimize the risk of injury. Labels are placed on the machine to identify areas where caution is
needed during operation.
1.7. Electrical
High voltage is present in the machine. Disconnect power before servicing.
Stored electrical energy is present in the machine. Before servicing allow sufficient time for
discharge. The servo amp contains a charge light. Do not service the machine until this light has
been extinguished.
1.8. Mechanical
This machine may contain compressed gases which can provide motive force for components
and can expand violently upon decompression. Disconnect N2or CDA before removing any
panels.
Spin Coaters and Developers are capable of very high-speed rotation. Ensure all lids and
panels are in place before rotating these devices.
Ensure that all panels are on and in their correct locations before powering up or operating.
When opening lids be aware of the pinch point at the hinge cover. Open lids only by using the
handles on the lids.
1.9. Chemical
Ensure chemical compatibility of all chemicals and materials being used inside the machine.
This includes all wetted parts of the storage, supply, dispense, and waste systems.

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All dispensed materials are held in one common waste storage tank. Ensure chemical
compatibility andverify potential for negative interactions between chemicals before use.
Flammable Chemicals. No open flames/sparks.
Relieve pressure before openingcanisters, tanks, cartridges, or syringes to refill.
Relieve pressure andshut off chemical valves before servicing supply lines, dispense valves or
other components such as EBR/BSR tubes, dispense nozzles, spray tips, or spinner lid.
Flush tubing and valves with an appropriate solvent and drain system before servicing.
When draining waste tank, use appropriate containers and connection methods.
Ensure proper ventilation/exhaust is always used.
Always wear appropriate Personal Protective Equipment. This includes safety glasses, gloves,
and other equipment, as needed, to protect from mechanical and chemical hazards.
1.10. Lockout/Tagout Procedures and Information
Before servicing, turn off the machine and remove the power inlet cord by disconnecting the plug where
it enters the machine.
Note: There are no LOTO (Lock Out/Tag Out) facilities supplied with the Cee® Apogee™ Spin Coater.
It is the responsibility of the customer/installer/end-user to ensure that the suitable LOTO devices are
provided on utilities being supplied to the Cee® Apogee™ Spin Coater in accordance with applicable
laws, regulations, and/or company policies.
For more information, please contact Cee® Customer Support.
1.11. Intended Use of Machine
The Cee® Apogee™ Spin Coater is intended for use as a semiconductor/optical application machine.
The Cee® Apogee™ Spin Coater is not intended for use in food or medical applications or for use in
hazardous locations.
The Cee® Apogee™ Spin Coater is intended for use only by trained personnel wearing the proper
personal protective equipment. Anyone not trained in the proper use of the Cee® Apogee™ Spin
Coater and having not fully read this manual, should not operate the equipment.
The Cee® Apogee™ Spin Coater is intended for use in a cleanroom environment to provide the proper
processing conditions for the substrates. If it is used outside of a cleanroom environment, substrate
cleanliness may be compromised.
The Cee® Apogee™ Spin Coater is not intended for use in a hazardous or explosive environment.

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2. Equipment Description
The Cee® Apogee™ Spin Coater delivers track-quality performance, with revolutionary interface
capabilities and the utmost in chemical compatibility, in an efficient, space-saving design.
Fully programmable and user-friendly, this precision spin coater features the accuracy and
repeatability needed to eliminate processing variability from critical experiments. With its convenient
compact footprint, wide array of chemical compatibility, and durability, this easy-to-use benchtop
system will provide years of high-performance operation, making the Cee® Apogee™ Spin Coater
purchase a smart and cost-effective decision.
2.1. User Controls
Figure 1: Cee® Apogee™ Spin Coater User Controls
1. power button............................. used to turn the tool off and on
2. local presence button
1
............... used for remote access
3. lid sensor.................................. detects when the lid is closed
4. spin coater lid............................ cover for the spin bowl
5. lid handle.................................. used to safely open and close the lid
6. 5-hole dispense hub.................. allow for materials to be dispensed onto the substrate
7. lid height adjustment.................. used to adjust airflow and solvent vapor in the spin bowl
2.2. Dimensions
13.25” (337mm) W x 19” (483mm) D x 12” (305mm) H
Machine Weight.............................. 40lb (18kg)
1
Refer to the DataStream™ Manual for more detailed information.

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2.3. Features and Programmability
•vacuum and lid interlock
•touch screen interface and display
•full-color alphanumeric-capable graphical user interface (GUI)
•supports unlimited user-defined program steps for each recipe
•0.1 second step time resolution (9,999.9 seconds maximum step time)
•spin speeds up to 12,000rpm
•spin speed acceleration of 0 to 20,000rpm/s unloaded 0 to 13,000rpm/s with a 200mm substrate or
0 to 3,000rpm/s with a 6” x 6” x 0.0250” photomask in a recessed chuck.
•upload/download process parameters using DataStream™ technology via built in USB and Ethernet
ports
•multiple simultaneous automated dispense capability
•in-process dynamic speed & acceleration control
2.4. Precision
Spin Speed Repeatability.......................................0.2rpm (per standard spin module)
Spin Speed Resolution...........................................0.2rpm (per standard spin module)
Substrate Sizes .....................................................200mm round; 7” x 7” square (max)
2.5. Reliability
•indirect drive system protects the spin motor from contact with process chemicals and solvents
•industry-leading reliability and uptime
•low maintenance design
•one-year full warranty on parts and labor
•complimentary remote technical support for the life of the product
•application process assistance for life of the product
2.6. Bowl Design
•high-density polyethylene (HDPE) spin bowl for material compatibility
•optional polyethylene disposable liners available
•versatile lid design allows process flexibility and repeatability
•optional nitrogen purge for an inert spin environment
•integrated drain and exhaust ports
2.7. Utilities
Voltage Ranges.....................................................100-120, 208-240 VAC 50/60Hz
Power Requirements..............................................655 watts
Drain Port..............................................................¾” OD
Exhaust Port..........................................................1” OD
Vacuum.................................................................20 inHg
Exhaust.................................................................20-50cfm at 0.2” water
Nitrogen/CDA (automated dispense).......................70 psi

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3. Installation
3.1. Clearance Requirements
The Cee® Apogee™ Spin Coater is a benchtop unit requiring a table or benchtop for location. In most
cases the supporting structure will be larger than the unit itself.
Clearance Requirements
Device Rear...........................................................12” (304.8mm)
Device Sides..........................................................3” (76.2mm)
Figure 2: Cee® Apogee™ Spin Coater Rear Clearance Requirements
Figure 3:Cee® Apogee™ Spin Coater Side Clearance Requirements

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3.2. Facilities Requirements
The Apogee™ Spin Coater requires the following utilities for operation.
Figure 4: Cee® Apogee™ Spin Coater Facilities Connections
1. USB Port
2
.................................. facilitates software updates and log file downloads
2. Programmable Exhaust ............. (optional) communication port for programmable exhaust module
3. Light Tree ................................. (optional) light tree port
4. Backside Rinse (BSR)............... (optional) dispense material fitting for backside rinse
5. Spin Bowl Exhaust Port ............. exhaust port for spin bowl vapors
6. Fuses........................................ system protection fuses
7. System Vacuum
3
....................... ¼” NPT system vacuum attachment for vacuum chuck
8. Dispense Trigger....................... (optional) connection for automated dispense control box
9. Accessory Port.......................... enables communication with external I/O device(s) as needed
10. Ethernet.................................... facilitates remote recipe writing and remote device control
11. Spin Bowl Drain......................... port via which liquid waste is removed from the tool
12. AC Power In
4
............................. single phase 100-120 Volts AC at 655 watts
2
see DataStream™ Manual for more information
3
Tools through July 2022 include ¼” barb connect as standard/ post-July 2022 tools are supplied with a ¼”
push connect fitting as standard. Your connection fitting may vary based on customer request.
4
(208-240V A/C option available, see back to verify).

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3.3. Environment
The Cee® Apogee™ Spin Coater should be operated in a clean, climate-controlled environment.
3.4. Unpackaging & Inspection
1. Lifting from the bottom of the unit, carefully remove from the packing crate. Do not lift by any of the
top covers or protrusions. Do not roll or turn the unit on its sides.
2. Remove packing foam and plastic wrap.
3. Place the Cee® Apogee™ Spin Coater on a table of proper height and strength so that the controls
and spin chuck are at the proper ergonomic height.
4. Thoroughly check machine for shipping damage. If physical damage is seen, DO NOT APPLY
POWER! Contact Cee® Customer Support immediately.
The following items are included with shipment:
•Cee® Apogee™ Spin Coater
•Temperature & Humidity Sensor
•Power Cord
•Operators Manual (USB)
Optionally included Items:
•Dispense Systems and related components
•Spin Chucks with Screws
•Programmable Exhaust
•Substrate Centering Equipment
•Waste Systems
3.5. System Installation & Setup
Please refer to the quick reference card supplied with the tool and visit the Cee® YouTube Channel for
a video on installation.
1. Using the adjustable feet, adjust the Cee® Apogee™ Spin Coater so that it is level from side-to-side
and front-to-back.
2. Thoroughly clean the spin bowl andspin chuck.
3. Connect utilities per the reference diagram in Figure 4: Cee® Apogee™ Spin Coater Facilities
Connections
4. Connect the Temperature & Humidity Sensor to the CAN terminal
5. Connect the vacuum supply to the vacuum fitting
6. Connect the drain to the drain port
7. Connect exhaust lines to the exhaust port
8. Connect the (optional) dispense box (if equipped) to the dispense triggers
9. Connect the (optional) programmable exhaust (if equipped) to the programmable exhaust terminal
10. Connect any dispense as indicated on the supplied USB dispense diagrams.
11. Plug in the machine and note that only the cooling fan should be powered, not the display.
3.6. Start Up
1. Turn the machine on by pressing the lighted power switch. The display will cycle through a series of
boot screens and before arriving at the main login screen.
2. Enter default administrative login credentials:
Username: .....................................................admin
Password: ......................................................admin2

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3.7. System Checks
On the Process screen, navigate to Tools>Manual Control and perform the following system checks
for initial validation of the Cee® Apogee™ Spin Coater.
Vacuum:
Turn the vacuum on and verify that vacuum is pulling through the hole of the spin shaft. Turn
the vacuum off and verify that vacuum ceased at the hole of the spin shaft.
Spin Speed:
Close the lid and set spin speed to 1000rpm. Verify that the shaft spins and that the tool reads
1000rpm.
Lid Interlock:
Open thespin bowl lid to test the lid interlock functionality. If properly functioning the tool will
stop spinning.
Temperature & Humidity Sensor:
On the left side of the Process screen, confirm that temperature and humidity readings are
present.
Automated Dispense (optional):
If equipped with automated dispenses, navigate to Tools>Manual Control>Dispenses,tap
Dispense 1 to select, then hit Apply to validate that Dispense Triggers are operational.
Repeat as needed for additional dispense triggers.
Programmable Exhaust (optional):
If equipped with programmable exhaust, ensure that it is working properly
Spin Chuck(s):
Aligning the spin chuck slot with the pin or key on the spin shaft, firmly press the chuck onto
the shaft ensuring the pin or key is fully engaged. If equipped, insert chuck screw, and tighten.
Place substrate on the spin chuck.
Navigate to Tools>Manual Control>Vacuum and set vacuum threshold to 64kPa.
If the vacuum is less than 64kPa, the chuck passes inspection.
Turn off the vacuum and remove the substrate. Spin chuck removal is reverse of installation.
Once operations have been validated, the Cee® Apogee™ Spin Coater is ready for use. Begin by
creating a recipe. See DataStream™ Manual for more information.

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4. Spin Coater Use & Operation
4.1. Spin Chuck Installation and/or Removal
1. In the center of the vacuum chuck, locate the spin chuck flat head cap screw.
2. Using a 3/32” hex wrench, remove the chuck screw from the spindle.
3. Grasp the spin chuck and lift vertically for removal.
4. Align the new spin chuck slot with spin shaft pin and firmly press chuck onto shaft.
5. Use a 3/32” hex wrench to tighten the chuck screw and secure the spin chuck to the shaft.
4.2. Five-Hole Dispense Nozzle Hub
All Cee® Apogee™ Spin Coaters utilize a multi-nozzle dispense center hub. This design allows for up
to five centrally positioned dispense nozzles to be mounted into the lid simultaneously and triggered
independently in any sequence or combination. Auto-dispense nozzles are oriented to the center of the
substrate and utilize precision suck-back control. Additionally, each nozzle features a female luer
adapter housing a disposable tip to be placed at point of use. Tips are easily changed to clear dried
material residue and/or to manipulate the volume of dispense flow.
4.3. Lid Adjustment
The Cee® Apogee™ Spin Coater is furnished with an adjustable lid allowing the operator to regulate
exhaust flow through the bowl region. Adjustments to lid height can be a variable in optimizing coating
results.
To adjust lid height, locate and loosen the two bolts mounting the lid assembly to the back panel of the
tool. Next identify the three lid adjustment knobs (two on the rear and one on the front) as seen in
Figure 1: Cee® Apogee™ Spin Coater User Controls. The lid is raised by rotating the adjustment knobs
counterclockwise and lowered by rotating them clockwise. For best results, adjust knobs in sequence
and only one revolution per sequence. Once the desired result has been achieved, tighten the two bolts
securing the lid assembly to the back panel of the tool.

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5. Spin Coater Theory
Spin coating has been used for several decades as a method for applying
thin films. A typical process involves depositing a small puddle of a fluid
material onto thecenter of a substrate and then spinning the substrate at
high speed (typically around 3000 rpm). Centripetal acceleration will
cause most of the resin to spread to, and eventually off, the edge of the
substrate leaving a thin film of material on thesurface. Final film thickness
and other properties will depend on the nature of the fluid material
(viscosity, drying rate, percent solids, surface tension, etc.) and the
parameters chosen for the spin process. Factors such as final rotation
speed, acceleration, and fume exhaust affect the properties of the coated films. One of the most important
factors in spin coating is repeatability, as subtle variations in the parameters that define a spin-coating
process can result in drastic variations in the coated film.
5.1. Spin Coater Process Description
A typical spin process consists of a dispense step in which the resin fluid is deposited onto the
substrate surface, a high-speed spin step to thin the fluid, and a drying step to eliminate excess
solvents from the resulting film. Two common methods of dispense are Static dispense, and Dynamic
dispense.
Static dispense is simply depositing a small puddle of fluid on or near the
center of the substrate. This can range from 1 to 10 cc depending on the
viscosity of the fluid and the size of the substrate to becoated. Higher
viscosity and or larger substrates typically require a larger puddle to
ensure full coverage of the substrate during the high-speed spin step.
Dynamic dispense is the process of dispensing while the substrate is
turning at low speed. A speed of about 500 rpm is commonly used during
this step of the process. This serves to spread the fluid over thesubstrate
and can result in less waste of resin material since it is usually not
necessary to deposit as much to wet the entire surface of the substrate.
This is a particularly advantageous method when the fluid or substrate
itself has poor wetting abilities and can eliminate voids that may
otherwise form.
After the dispense step, it is common to accelerate to a relatively high
speed to thin the fluid to near its final desired thickness. Typical spin
speeds for this step range from 1500-6000 rpm, again depending on the
properties of the fluid as well as the substrate. This step can take from 10
seconds to several minutes. The combination of spin speed and time
selected for this step will generally define the final film thickness.
In general, higher spin speeds and longer spin times create thinner films.
The spin coating process involves many variables that tend to cancel and average out during the spin
process, and it is best to allow sufficient time for this to occur.
A separate drying step is sometimes added after the high-speed spin step to further dry the film without
substantially thinning it. This can be advantageous for thick films since long drying times may be
necessary to increase the physical stability of the film before handling. Without the drying step
problems can occur during handling, such as pouring off the side of the substrate when removing it
from the spin bowl. In this case a moderate spin speed of about 25% of the high-speed spin will
generally suffice to aid in drying the film without significantly changing the film thickness. Each program
on a Cee® spin coater may contain up to ten separate process steps. While most spin processes
require only two or three, this allows the maximum amount of flexibility for complex spin coating
requirements.

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5.2. Spin Speed
Spin speed is one of the most important factors in spin coating. The
speed of the substrate (rpm) affects the degree of radial (centrifugal)
force applied to the liquid resin as well as the velocity and characteristic
turbulence of the air immediately above it. The high-speed spin step
generally defines the final film thickness. Relatively minor variations of
±50 rpm at this stage can cause a resulting thickness change of 10%.
Film thickness is largely a balance between the force applied to shear
the fluid resin towards the edge of the substrate and the drying rate
which affects the viscosity of the resin. As the resin dries, the viscosity
increases until the radial force of the spin process can no longer
appreciably move the resin over the surface. At this point, the film
thickness will not decrease significantly with increased spin time. All
Cee® spin coating systems are specified to be repeatable to within ±5 rpm at all speeds. Typical
performance is ±1 rpm. Also, all programming and display of spin speed is given with a resolution of 1
rpm.
5.3. Acceleration
The acceleration of the substrate towards the final spin speed can
also affect the coated film properties. Since the resin begins to dry
during the first part of thespin cycle, it is important to accurately
control acceleration. In some processes, 50% of the solvents in
the resin will be lost to evaporation in the first few seconds of the
process.
Acceleration also plays a large role in the coat properties of
patterned substrates. In many cases the substrate will retain
topographical features from previous processes; it is therefore
important to uniformly coat the resin over and through these
features. While thespin process in general provides a radial
(outward) force to the resin, it is the acceleration that provides a twisting force to the resin. This twisting
aids in the dispersal of the resin around topography that might otherwise shadow portions of the
substrate from the fluid. Acceleration of Cee® spinners is programmable with a resolution of 1
rpm/second. In operation, the spin motor accelerates (or decelerates) in a linear ramp to the final spin
speed.
5.4. Fume Exhaust
The drying rate of the resin fluid during the spin process is defined
by the nature of the fluid itself (volatility of the solvent systems used)
as well as by the air surrounding the substrate during thespin
process. Just as a damp cloth will dry faster on a breezy dry day
than during damp weather, the resin will dry depending on the
ambient conditions around it. It is well known that such factors as air
temperature and humidity play a large role in determining coated
film properties. It is also very important that the airflow and
associated turbulence above the substrate itself be minimized, or at
least held constant, during the spin process.
All Cee® spin coaters employ a "closed bowl" design. While not actually anairtight environment, the
exhaust lid allows only minimal exhaust during the spin process. Combined with the bottom exhaust
port located beneath the spin chuck, the exhaust lid becomes part of a system to minimize unwanted

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random turbulence. There are two distinct advantages to this system: slowed drying of the fluid resin
and minimized susceptibility to ambient humidity variations.
The slower rate of drying offers the advantage of increased film thickness uniformity across the
substrates. The fluid dries out as it moves toward the edge of the substrate during the spin process.
This can lead to radial thickness non-uniformities since the fluid viscosity changes with distance from
the center of the substrate. By slowing the rate of drying, it is possible for the viscosity to remain more
constant across the substrate.
Drying rate and hence final film thickness is also affected by
ambient humidity. Variations of only a few percent relative humidity
can result in large changes in film thickness. By spinning in a
closed bowl, the vapors of the solvents in the resin itself are
retained in the bowl environment and tend to overshadow the
effects of minor humidity variations. At the end of the spin process,
when the lid is lifted to remove the substrate, full exhaust is
maintained to contain and remove solvent vapors.
Another advantage to this "closed bowl" design is the reduced
susceptibility to variations in air flow around the spinning substrate.
In a typical clean room, for instance, there is a constant downward flow of air at about 100 feet per
minute (30m/min). Various factors affect the local properties of this air flow. Turbulence and eddy
currents are common results of this high degree of air flow. Minor changes in the environment can
create drastic alteration in the downward flow of air. By closing the bowl with a smooth lid surface,
variations and turbulence caused by the presence of operators and other equipment are eliminated
from the spin process.
5.5. Process Trend Charts
These charts represent general trends for the various process parameters. For most resin materials,
the final film thickness will be inversely proportional to the spin speed and spin time. Final thickness will
also be somewhat proportional to the exhaust volume although uniformity will suffer if the exhaust flow
is too high since turbulence will cause non-uniform drying of the film during the spin process.

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5.6. Spin-Coating Process Troubleshooting
Film too Thin
spin speed too high................................................select lower speed
spin time too long...................................................decrease time during high-speed step
inappropriate choice of resin material......................contact resin manufacturer
Film too Thick
spin speed too low.................................................select higher speed
spin time too short..................................................increase time during high-speed step
exhaust volume too low..........................................adjust exhaust lid or house exhaust damper
inappropriate choice of resin material......................contact resin manufacturer
Air Bubbles on Wafer Surface
Air bubbles in dispensed fluid (resin).
Dispense tip is cut unevenly.
Comets, streaks, or flares
Fluid velocity (dispense rate) is too high.
Spin bowl exhaust rate is too high.
Resist sits on wafer too long prior to spin.
Spin speed and accelerationsetting is too high.
Particles exist on substrate surface prior to dispense.
Fluid is not being dispensed at the center of the substrate surface.
Swirl pattern
Spin bowl exhaust rate is too high.
Fluid is striking substrate surface off center.
Spin speed and accelerationsetting is too high.
Spin time too short.
Center circle (chuck mark)
If the circle is the same size as the spin chuck,
switch to a Delrinspin chuck.

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Poor Reproducibility
variable exhaust or ambient conditions ...................adjust exhaust lid to fully closed
substrate not centered properly ..............................center substrate before operation
insufficient dispense volume...................................increase dispense volume
inappropriate application of resin material...............contact resin manufacturer
unstable balance in speed/time parameters ............increase speed/decrease time or vice versa
Poor Film Quality
exhaust volume too high.........................................adjust exhaust lid or house exhaust damper
acceleration too high..............................................select lower acceleration
unstable balance in speed/time parameters ............increase speed/decrease time or vice-versa
insufficient dispense volume...................................increase dispense volume
inappropriate application of resin material...............contact resin manufacturer
Uncoated areas
Insufficient dispense volume.
Pinholes
Air bubbles in dispensed fluid (resin).
Particles in dispensed fluid (resin).
Particles exist on substrate surface prior to dispense.

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6. Preventative Maintenance
This maintenance manual provides personnel with procedures and guidelines for maintaining a Cee®
Apogee™ Spin Coater. Below is a chart of recommend maintenance scheduling.
6.1. Safety Checks
Inspect spin coater lid for the following defects each day prior to use:
▪Loose assemblies
▪Improper closure
▪Improper bowl ring placement
6.2. Mechanical/Utilities Checklist
Evaluate
Frequency
Detail
Pressure Range
Daily
Check all pressures for ranges specified in tool manual.
Drains
Daily
Verify that there is a proper drain facility.
Exhaust
Daily
Verify that the exhaust is functioning.
Spin Chuck
Cleanliness
Daily
A dirty spin chuck could cause vacuum errors. Wipe the spin
chuck clean with isopropyl alcohol or acetone. For major buildup
of material, a glass slide can be used to gently scrape the
material away and then wipe clean. See the Cleaning section for
more detailed instructions.
Spin Chuck
Flatness
Quarterly
A non-uniform spin chuck can cause vacuum errors. Inspect
visually against a straight edge. Small uniformity issues such as
a burr can be gently removed with a glass slide. Larger
deformations can be removed with fine sandpaper. Contact Cee
Customer Support if the above methods are not successful.
Bearing Wear
Quarterly
Bad bearings can cause erratic spin speed and acceleration.
When rotating the spindle shaft by hand, the shaft should spin
easily with little noise. If the shaft does not spin easily or if a
grinding noise is heard during a process, the bearing should be
replaced.
Vacuum at Spindle
Quarterly
If low vacuum is present, check system supply. If supply is in
spec and problems persist, contact Cee Customer Support for
more information.
AxialSpindle Shaft
Play
Bi-Annually
Axial play will cause excess bearing wear and possible vacuum
error. There should be no axial play in the shaft.
Connections
Bi-Annually
Inspect all connections for proper installation.
Power
Bi-Annually
Verify that AC power is connected and of the proper voltage.
6.3. Cleaning
The Apogee™ Spin Coater should be cleaned following daily use. When cleaning the spin chuck,
remove it from the equipment to keep solvent from getting into the spin coater vacuum system. It is
good practice to use the mildest solvent possible such as acetone or isopropyl alcohol. Do not use
caustic acids or bases.
When cleaning the spin bowl, a small substrate should be on the spin chuck to keep solvent from
getting into the vacuum system. Spin the wafer at approximately 100 RPM and use solvent in a wash

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Doc Rev 2-20220808
bottle to flush out thespin bowl. Keep solvent from going down the spin shaft or the spin shaft tube.
Shields andseals will protect the bearings from a small amount of solvent, but they will not tolerate
large doses. Do not direct the solvent stream down the shaft or tube.
Use only water-based cleaner on the labels on the rear of the machine. Use only isopropyl or water-
based cleaner on the Power, Cee® logo, Caution ... Eye Protection, and the Cee® model/serial number
labels. The display may be cleaned with glass cleaner, water, or isopropyl alcohol.

Page 20 of 20
Doc Rev 2-20220808
7. Table of Revisions
Doc
Rev #
Author
Description of Change(s)
Reviewed/Approved
By
Date
2.0
J. Adams
- Update format
- Add Section 1.5 Environmental
Considerations
- Add Section 3.1 Clearance
Requirements
- Remove shipping weight from
Section 2.2 due to potential for
variance
- Add Doc Rev for DCIF and
append document with
explanation of rev
B. Waterworth
J. Strothmann
8/04/2022