Cee Apogee User manual

1. INTRODUCTION...............................................................................................................................................................3
1.1. CONFIDENTIALITY STATEMENT................................................................................................................................................................3
1.2. WARRANTY ........................................................................................................................................................................................3
1.3. RETURNED MATERIALS .........................................................................................................................................................................3
1.4. MODEL AND REVISIONS ........................................................................................................................................................................3
1.5. ENVIRONMENTAL CONSIDERATIONS ........................................................................................................................................................4
1.6. GENERAL SAFETY HAZARDS /PRECAUTIONS..............................................................................................................................................4
1.7. ELECTRICAL.........................................................................................................................................................................................4
1.8. MECHANICAL......................................................................................................................................................................................4
1.9. CHEMICAL ..........................................................................................................................................................................................4
1.10. LOCKOUT/TAGOUT PROCEDURES AND INFORMATION ...............................................................................................................................5
1.11. INTENDED USE OF MACHINE................................................................................................................................................................5
2. EQUIPMENT DESCRIPTION................................................................................................................................................6
2.1. USER CONTROLS..................................................................................................................................................................................6
2.2. DIMENSIONS.......................................................................................................................................................................................6
2.3. FEATURES AND PROGRAMMABILITY.........................................................................................................................................................7
2.4. PRECISION..........................................................................................................................................................................................7
2.5. RELIABILITY.........................................................................................................................................................................................7
2.6. BOWL DESIGN.....................................................................................................................................................................................7
2.7. UTILITIES............................................................................................................................................................................................7
3. INSTALLATION.................................................................................................................................................................8
3.1. CLEARANCE REQUIREMENTS ..................................................................................................................................................................8
3.2. FACILITIES REQUIREMENTS ....................................................................................................................................................................9
3.3. ENVIRONMENT..................................................................................................................................................................................10
3.4. UNPACKAGING &INSPECTION ..............................................................................................................................................................10
3.5. SYSTEM INSTALLATION &SETUP ...........................................................................................................................................................10
3.6. START UP.........................................................................................................................................................................................10
3.7. SYSTEM CHECKS ................................................................................................................................................................................11
4. SPIN COATER USE & OPERATION.....................................................................................................................................12
4.1. SPIN CHUCK INSTALLATION AND/OR REMOVAL........................................................................................................................................12
4.2. FIVE-HOLE DISPENSE NOZZLE HUB........................................................................................................................................................12
4.3. LID ADJUSTMENT...............................................................................................................................................................................12
5. SPIN COATER THEORY....................................................................................................................................................13
5.1. SPIN COATER PROCESS DESCRIPTION.....................................................................................................................................................13
5.2. SPIN SPEED.......................................................................................................................................................................................14
5.3. ACCELERATION..................................................................................................................................................................................14
5.4. FUME EXHAUST.................................................................................................................................................................................14
5.5. PROCESS TREND CHARTS.....................................................................................................................................................................15
5.6. SPIN-COATING PROCESS TROUBLESHOOTING ..........................................................................................................................................16
6. PREVENTATIVE MAINTENANCE.......................................................................................................................................18
6.1. SAFETY CHECKS .................................................................................................................................................................................18
6.2. MECHANICAL/UTILITIES CHECKLIST .......................................................................................................................................................18
6.3. CLEANING ........................................................................................................................................................................................18
7. TABLE OF REVISIONS......................................................................................................................................................20

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1. Introduction
1.1. Confidentiality Statement
Information supplied is for the use in the operation and/or maintenance of Cee® equipment. Neither
this document nor the information it contains shall be disclosed to others for manufacturing or any other
purpose without written authorization from, Cost Effective Equipment, LLC.
1.2. Warranty
Cost Effective Equipment, LLC warrants to the original purchaser (Buyer) that equipment is free from
defects in material and workmanship under normal use and service in accordance with Cee®
instructions and specifications. Buyer Shall promptly notify Cee® of any claim against this warranty,
and any item to be returned to Cee® shall be sent with transportation charges prepaid by Buyer, clearly
marked with a Return Authorization (RMA) number obtained from Cee® Customer Support. Cee’s
obligation under this warranty is limited to the repair or replacement, at Cee® option, of any equipment,
component or part which is determined by Cee® to be defective in material or workmanship. This
obligation shall expire one (1) year after the initial shipment of the equipment from Cee®. This warranty
shall be void if:
Any failure is due to the misuse, neglect, improper installation of, or accident to the equipment.
Any major repairs or alterations are made to equipment by anyone other than a duly authorized
representative of Cee®. Representatives of Buyer will be authorized to make repairs to the equipment
without voiding warranty, on completion of the Cee® training program.
Replacement parts are used other than those made or recommended by Cee®.
CEE® MAKES NO OTHER WARRANTIES, EXPRESSED OR IMPLIED, WITH RESPECT TO
EQUIPMENT. NO WARRANTY IS MADE AS TO THE MERCHANTABILITY OF THE EQUIPMENT
NOR ITS FITNESS FOR ANY PARTICULAR PURPOSE. In no event shall Cee® be liable for
consequential loss or damages, however caused. No person or representative of Cee® is authorized to
assume for Cee® any liability in connection with equipment nor to make any change to this warranty
unless such change or modification is put in writing and approved by an authorized representative of
Cee® in writing.
This warranty shall be governed by the laws of the state of Missouri, U.S.A.
1.3. Returned Materials
Any materials, parts, or equipment returned to Cost Effective Equipment, LLC must be clearly labeled
with a Return Material Authorization (RMA) number.
To obtain an RMA number, contact:
Cee® Customer Support
Telephone...................................... [phone]
Email.............................................. [e-mail]
Web Address.................................. www.costeffectiveequipment.com
1.4. Model and Revisions
The model and serial number information for the Cee® Apogee™ Spin Coater are located on the rear
panel. Software version information can be found on the About screen. See DataStream™ Manual for
screenshots and a detailed explanation of the system software.

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1.5. Environmental Considerations
Cee® fosters sustainability through innovation in the durability and reliability of our precision
tools and equipment. Individual component modules are engineered for serviceability ensuring
long lasting performance. Processes are designed to minimize use & consumption of chemical
compounds ensuring accurate, replicable, industry-leading results every time.
Cee® diligently screens suppliers to ensure conflict-free sourcing of minerals and product
components are constructed of recycled materials wherever possible.
Cee® tools and equipment operate without the use of ozone depleting substances (ODSs)
includingchlorofluorocarbons (CFCs), methyl chloroform, hydrochlorofluorocarbons (HCFCs),
carbon tetrachloride, perfluoro compounds (PFCs), or other volatile compounds/organic
solvents.
1.6. General Safety Hazards / Precautions
Read this manual in its entirely before operating orservicing the machine
The unit is very heavy and proper precautions should be taken to when handling the machine to
minimize the risk of injury. Labels are placed on the machine to identify areas where caution is
needed during operation.
1.7. Electrical
High voltage is present in the machine. Disconnect power before servicing.
Stored electrical energy is present in the machine. Before servicing allow sufficient time for
discharge. The servo amp contains a charge light. Do not service the machine until this light has
been extinguished.
1.8. Mechanical
This machine may contain compressed gases which can provide motive force for components
and can expand violently upon decompression. Disconnect N2or CDA before removing any
panels.
Spin Coaters and Developers are capable of very high-speed rotation. Ensure all lids and
panels are in place before rotating these devices.
Ensure that all panels are on and in their correct locations before powering up or operating.
When opening lids be aware of the pinch point at the hinge cover. Open lids only by using the
handles on the lids.
1.9. Chemical
Ensure chemical compatibility of all chemicals and materials being used inside the machine.
This includes all wetted parts of the storage, supply, dispense, and waste systems.

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All dispensed materials are held in one common waste storage tank. Ensure chemical
compatibility andverify potential for negative interactions between chemicals before use.
Flammable Chemicals. No open flames/sparks.
Relieve pressure before openingcanisters, tanks, cartridges, or syringes to refill.
Relieve pressure andshut off chemical valves before servicing supply lines, dispense valves or
other components such as EBR/BSR tubes, dispense nozzles, spray tips, or spinner lid.
Flush tubing and valves with an appropriate solvent and drain system before servicing.
When draining waste tank, use appropriate containers and connection methods.
Ensure proper ventilation/exhaust is always used.
Always wear appropriate Personal Protective Equipment. This includes safety glasses, gloves,
and other equipment, as needed, to protect from mechanical and chemical hazards.
1.10. Lockout/Tagout Procedures and Information
Before servicing, turn off the machine and remove the power inlet cord by disconnecting the plug where
it enters the machine.
Note: There are no LOTO (Lock Out/Tag Out) facilities supplied with the Cee® Apogee™ Spin Coater.
It is the responsibility of the customer/installer/end-user to ensure that the suitable LOTO devices are
provided on utilities being supplied to the Cee® Apogee™ Spin Coater in accordance with applicable
laws, regulations, and/or company policies.
For more information, please contact Cee® Customer Support.
1.11. Intended Use of Machine
The Cee® Apogee™ Spin Coater is intended for use as a semiconductor/optical application machine.
The Cee® Apogee™ Spin Coater is not intended for use in food or medical applications or for use in
hazardous locations.
The Cee® Apogee™ Spin Coater is intended for use only by trained personnel wearing the proper
personal protective equipment. Anyone not trained in the proper use of the Cee® Apogee™ Spin
Coater and having not fully read this manual, should not operate the equipment.
The Cee® Apogee™ Spin Coater is intended for use in a cleanroom environment to provide the proper
processing conditions for the substrates. If it is used outside of a cleanroom environment, substrate
cleanliness may be compromised.
The Cee® Apogee™ Spin Coater is not intended for use in a hazardous or explosive environment.

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2. Equipment Description
The Cee® Apogee™ Spin Coater delivers track-quality performance, with revolutionary interface
capabilities and the utmost in chemical compatibility, in an efficient, space-saving design.
Fully programmable and user-friendly, this precision spin coater features the accuracy and
repeatability needed to eliminate processing variability from critical experiments. With its convenient
compact footprint, wide array of chemical compatibility, and durability, this easy-to-use benchtop
system will provide years of high-performance operation, making the Cee® Apogee™ Spin Coater
purchase a smart and cost-effective decision.
2.1. User Controls
Figure 1: Cee® Apogee™ Spin Coater User Controls
1. power button............................. used to turn the tool off and on
2. local presence button
1
............... used for remote access
3. lid sensor.................................. detects when the lid is closed
4. spin coater lid............................ cover for the spin bowl
5. lid handle.................................. used to safely open and close the lid
6. 5-hole dispense hub.................. allow for materials to be dispensed onto the substrate
7. lid height adjustment.................. used to adjust airflow and solvent vapor in the spin bowl
2.2. Dimensions
13.25” (337mm) W x 19” (483mm) D x 12” (305mm) H
Machine Weight.............................. 40lb (18kg)
1
Refer to the DataStream™ Manual for more detailed information.

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2.3. Features and Programmability
•vacuum and lid interlock
•touch screen interface and display
•full-color alphanumeric-capable graphical user interface (GUI)
•supports unlimited user-defined program steps for each recipe
•0.1 second step time resolution (9,999.9 seconds maximum step time)
•spin speeds up to 12,000rpm
•spin speed acceleration of 0 to 20,000rpm/s unloaded 0 to 13,000rpm/s with a 200mm substrate or
0 to 3,000rpm/s with a 6” x 6” x 0.0250” photomask in a recessed chuck.
•upload/download process parameters using DataStream™ technology via built in USB and Ethernet
ports
•multiple simultaneous automated dispense capability
•in-process dynamic speed & acceleration control
2.4. Precision
Spin Speed Repeatability.......................................0.2rpm (per standard spin module)
Spin Speed Resolution...........................................0.2rpm (per standard spin module)
Substrate Sizes .....................................................200mm round; 7” x 7” square (max)
2.5. Reliability
•indirect drive system protects the spin motor from contact with process chemicals and solvents
•industry-leading reliability and uptime
•low maintenance design
•one-year full warranty on parts and labor
•complimentary remote technical support for the life of the product
•application process assistance for life of the product
2.6. Bowl Design
•high-density polyethylene (HDPE) spin bowl for material compatibility
•optional polyethylene disposable liners available
•versatile lid design allows process flexibility and repeatability
•optional nitrogen purge for an inert spin environment
•integrated drain and exhaust ports
2.7. Utilities
Voltage Ranges.....................................................100-120, 208-240 VAC 50/60Hz
Power Requirements..............................................655 watts
Drain Port..............................................................¾” OD
Exhaust Port..........................................................1” OD
Vacuum.................................................................20 inHg
Exhaust.................................................................20-50cfm at 0.2” water
Nitrogen/CDA (automated dispense).......................70 psi

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3. Installation
3.1. Clearance Requirements
The Cee® Apogee™ Spin Coater is a benchtop unit requiring a table or benchtop for location. In most
cases the supporting structure will be larger than the unit itself.
Clearance Requirements
Device Rear...........................................................12” (304.8mm)
Device Sides..........................................................3” (76.2mm)
Figure 2: Cee® Apogee™ Spin Coater Rear Clearance Requirements
Figure 3:Cee® Apogee™ Spin Coater Side Clearance Requirements

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3.2. Facilities Requirements
The Apogee™ Spin Coater requires the following utilities for operation.
Figure 4: Cee® Apogee™ Spin Coater Facilities Connections
1. USB Port
2
.................................. facilitates software updates and log file downloads
2. Programmable Exhaust ............. (optional) communication port for programmable exhaust module
3. Light Tree ................................. (optional) light tree port
4. Backside Rinse (BSR)............... (optional) dispense material fitting for backside rinse
5. Spin Bowl Exhaust Port ............. exhaust port for spin bowl vapors
6. Fuses........................................ system protection fuses
7. System Vacuum
3
....................... ¼” NPT system vacuum attachment for vacuum chuck
8. Dispense Trigger....................... (optional) connection for automated dispense control box
9. Accessory Port.......................... enables communication with external I/O device(s) as needed
10. Ethernet.................................... facilitates remote recipe writing and remote device control
11. Spin Bowl Drain......................... port via which liquid waste is removed from the tool
12. AC Power In
4
............................. single phase 100-120 Volts AC at 655 watts
2
see DataStream™ Manual for more information
3
Tools through July 2022 include ¼” barb connect as standard/ post-July 2022 tools are supplied with a ¼”
push connect fitting as standard. Your connection fitting may vary based on customer request.
4
(208-240V A/C option available, see back to verify).

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3.3. Environment
The Cee® Apogee™ Spin Coater should be operated in a clean, climate-controlled environment.
3.4. Unpackaging & Inspection
1. Lifting from the bottom of the unit, carefully remove from the packing crate. Do not lift by any of the
top covers or protrusions. Do not roll or turn the unit on its sides.
2. Remove packing foam and plastic wrap.
3. Place the Cee® Apogee™ Spin Coater on a table of proper height and strength so that the controls
and spin chuck are at the proper ergonomic height.
4. Thoroughly check machine for shipping damage. If physical damage is seen, DO NOT APPLY
POWER! Contact Cee® Customer Support immediately.
The following items are included with shipment:
•Cee® Apogee™ Spin Coater
•Temperature & Humidity Sensor
•Power Cord
•Operators Manual (USB)
Optionally included Items:
•Dispense Systems and related components
•Spin Chucks with Screws
•Programmable Exhaust
•Substrate Centering Equipment
•Waste Systems
3.5. System Installation & Setup
Please refer to the quick reference card supplied with the tool and visit the Cee® YouTube Channel for
a video on installation.
1. Using the adjustable feet, adjust the Cee® Apogee™ Spin Coater so that it is level from side-to-side
and front-to-back.
2. Thoroughly clean the spin bowl andspin chuck.
3. Connect utilities per the reference diagram in Figure 4: Cee® Apogee™ Spin Coater Facilities
Connections
4. Connect the Temperature & Humidity Sensor to the CAN terminal
5. Connect the vacuum supply to the vacuum fitting
6. Connect the drain to the drain port
7. Connect exhaust lines to the exhaust port
8. Connect the (optional) dispense box (if equipped) to the dispense triggers
9. Connect the (optional) programmable exhaust (if equipped) to the programmable exhaust terminal
10. Connect any dispense as indicated on the supplied USB dispense diagrams.
11. Plug in the machine and note that only the cooling fan should be powered, not the display.
3.6. Start Up
1. Turn the machine on by pressing the lighted power switch. The display will cycle through a series of
boot screens and before arriving at the main login screen.
2. Enter default administrative login credentials:
Username: .....................................................admin
Password: ......................................................admin2