Cognex In-Sight 1740 Series User manual

In-Sight®1740 Series
Wafer Reader
Installation Manual

Legal Notices
The software described in this document is furnished under license, and may be used or copied only in accordance with
the terms of such license and with the inclusion of the copyright notice shown on this page. Neither the software, this
document, nor any copies thereof may be provided to, or otherwise made available to, anyone other than the licensee.
Title to, and ownership of, this software remains with Cognex Corporation or its licensor. Cognex Corporation assumes
no responsibility for the use or reliability of its software on equipment that is not supplied by Cognex Corporation.
Cognex Corporation makes no warranties, either express or implied, regarding the described software, its
merchantability, non-infringement or its fitness for any particular purpose.
The information in this document is subject to change without notice and should not be construed as a commitment by
Cognex Corporation. Cognex Corporation is not responsible for any errors that may be present in either this document or
the associated software.
Companies, names, and data used in examples herein are fictitious unless otherwise noted. No part of this document
may be reproduced or transmitted in any form or by any means, electronic or mechanical, for any purpose, nor
transferred to any other media or language without the written permission of Cognex Corporation.
Cognex P/N 597-0056-02
Copyright © 2011 Cognex Corporation. All Rights Reserved.
Portions of the hardware and software provided by Cognex may be covered by one or more of the U.S. and foreign
patents listed below as well as pending U.S. and foreign patents. Such pending U.S. and foreign patents issued after the
date of this document are listed on the Cognex web site at: http://www.cognex.com/patents.
5481712, 5742037, 5751853, 5845007, 5909504, 5943441, 5949905, 5960125, 5978080, 5978081, 6005978,
6137893, 6141033, 6154567, 6215915, 6301396, 6327393, 6381375, 6408109, 6457032, 6490600, 6563324,
6658145, 6690842, 6771808, 6804416, 6836567, 6850646, 6856698, 6859907, 6920241, 6941026, 6959112,
6963338, 6975764, 6985625, 6993192, 7006712, 7016539, 7043081, 7058225, 7065262, 7069499, 7088862,
7107519, 7164796, 7175090, 7181066, 7251366, 7720315, JP 3927239
Cognex, In-Sight, EasyBuilder, VisionView, DataMan and DVT are registered trademarks of Cognex Corporation.
The Cognex logo, SmartLink, EdgeCount, FeatureCount, and ObjectLocate are trademarks of Cognex Corporation.
Windows is a registered trademark or trademark of Microsoft Corporation in the United States and other countries. Other
product and company trademarks identified herein are the trademarks of their respective owners.
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Regulations/Conformity
Note: For the most up-to-date regulations and conformity information, please refer to the In-Sight online support site:
http://www.cognex.com/Support/InSight.
Declaration of Conformity
Manufacturer Cognex Corporation
One Vision Drive
Natick, MA 01760 USA
Declares this -marked Wafer Reader Machine Vision System Product
Product Type In-Sight 1740: TYPE 821-0066-1R
In-Sight 1741: TYPE 821-0067-1R
In-Sight 1742: TYPE 821-0068-1R
Complies With 2004/108/EC Electromagnetic Compatibility Directive
Compliance Standards EN 55022:2006 +A1:2007 Class A
EN 61000-6-2:2005
EN 61000-3-2:2006
EN 61000-3-3:2008
European Representative COGNEX INTERNATIONAL
Immeuble “Le Patio”
104 Avenue Albert 1er
92563 Rueil Malmaison Cedex - France
Safety and Regulatory
FCC FCC Part 15, Class A
This device complies with Part 15 of the FCC Rules. Operation is subject to the
following two conditions: (1) this device may not cause harmful interference; and
(2) this device must accept any interference received, including interference that
may cause undesired operation.
This equipment generates, uses, and can radiate radio frequency energy and, if
not installed and used in accordance with the instruction manual, may cause
harmful interference to radio communications. Operation of this equipment in a
residential area is likely to cause harmful interference in which case the user will
be required to correct the interference at their own expense.
SEMI This equipment conforms with the applicable requirements of SEMI S2-0709.
KCC In-Sight 1740: KCC-REM-CGX-In-Sight 1740
In-Sight 1741: KCC-REM-CGX-In-Sight 1741
In-Sight 1742: KCC-REM-CGX-In-Sight 1742
NRTL TÜV SÜD AM SCC/NRTL OSHA Scheme for UL/CAN 61010-1.
CB TÜV SÜD AM, IEC/EN 61010. CB report available upon request.
RoHS RoHS 6 Compliant.
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Precautions
Observe these precautions when installing the In-Sight wafer reader to reduce the risk of injury or equipment damage:
lIn-Sight 1740 series wafer readers are intended to be powered by a NRTL listed power supply with a 24VDC
output rated for at least 1A with a maximum short circuit current rating of less than 8A and a maximum power
rating of less than 100VA and marked Class 2 or Limited Power Source (LPS). Any other voltage creates a risk of
fire or shock and can damage the wafer reader. Applicable national and local wiring standards and rules must be
followed.
lDo not install the wafer reader in locations that directly expose it to environmental hazards such as excessive
heat, dust, moisture, humidity, impact, vibration, corrosive substances, flammable substances, or static electricity.
lTo reduce the risk of damage or malfunction due to over-voltage, line noise, electrostatic discharge (ESD), power
surges, or other irregularities in the power supply, route all cables and wires away from high-voltage power
sources.
lThe housing of the wafer reader is internally connected to the system ground wire (pin 8 of the Breakout cable).
Therefore, if the mounting surface of the wafer reader is at a non-zero ground potential, it is strongly
recommended that the wafer reader be mounted on an isolated or non-conductive mount.
lDo not expose the wafer reader's sensor window to laser light; CCDs can be damaged by direct, or reflected,
laser light. If your application requires the use of laser light that may strike the CCD, a lens filter at the
corresponding laser's wavelength is recommended. Contact your local integrator or application engineer for
suggestions.
lAlthough the wafer reader is a Class 1 LED Product, it is not recommended to stare directly into the illumination
LEDs when the wafer reader is receiving power. Note that the In-Sight 1742 wafer reader LEDs emit infrared
light, therefore the light from the illumination LEDs is not visible.
lDo not open the wafer reader. This device does not contain user-serviceable parts. Do not make electrical or
mechanical modifications to the In-Sight hardware. The LED emitted light levels have not been tested when the
wafer reader is open. Unauthorized modifications may void your warranty.
lWhen connecting the wafer reader to the CIO-1400 I/O module, never connect wire leads from remote devices to
the HS OUT 0 or HS OUT 1 terminals on the I/O module; doing so may damage the wafer reader hardware.
lService loops should be included with all cable connections.
lCable shielding can be degraded or cables can be damaged or wear out more quickly if a bend radius or service
loop is tighter than 10X the cable diameter.
lClass A Equipment (broadcasting and communication equipment for office work): Seller and user shall be
notified that this equipment is suitable for electromagnetic equipment for office work (Class A) and can be used
outside the home.
lThis device should be used in accordance with the instructions in this manual.
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Table of Contents
Legal Notices i
Regulations/Conformity iii
Precautions v
Introduction 1
In-Sight Wafer Reader Overview 1
Support 1
Installation 3
Verify Hardware Components 3
Connectors and Indicators 3
Attach the Mirror for Horizontal Operation (Optional) 4
Determine the Working Distance 5
Vertical Wafer Reader Mounting 5
Horizontal Wafer Reader Mounting 6
Working Distances 6
Connect the Ethernet and Breakout Cables 7
Connect the Ethernet Cable 8
Connect the Breakout Cable 8
Adjust the Focus 9
Mount the Wafer Reader 9
Image Artifacts 12
Specifications 13
I/O Specifications 15
Acquisition Trigger Input Specifications 15
Ethernet Cable Specifications 16
Breakout Cable Specifications 17
I/O Module Cable Specifications 18
Expansion Port 19
Dimensional Drawings 20
Appendix A - Connecting the I/O Module 23
Appendix B - Cleaning/Maintenance 25
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Introduction
In-Sight Wafer Reader Overview
This manual describes how to install the In-Sight®wafer reader. The In-Sight series of high performance vision systems
are image formation wafer readers for reading identification marks on silicon wafers. Featuring a vision processor,
advanced lighting and optics, with built-in networking support and serial communications, the compact In-Sight wafer
reader can be utilized in virtually any back-end wafer fab process.
The In-Sight wafer readers include the following models:
lIn-Sight 1740: Red LED lighting, 752 x 480 image resolution and variable working distance.
lIn-Sight 1741: Red LED lighting, 1024 x 768 image resolution and variable working distance.
lIn-Sight 1742: Infrared LED lighting, 1024 x 768 image resolution and variable working distance.
Support
Many information resources are available to assist you in using the wafer reader:
lCognex Wafer ID Help, an online HTML Help file provided on the In-Sight CD-ROM.
lThe Cognex Wafer ID Online Support Center: http://www.cognex.com/waferid.
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Installation
This section describes the connection of the wafer reader to its standard and optional components. For a complete list of
options and accessories, contact your Cognex sales representative.
Verify Hardware Components
lIn-Sight Wafer Reader
l24VDC Power Supply and Adapter
lEthernet Cable
lBreakout Cable
lExpansion Cable (Optional)
lMirror for Horizontal Operation (Optional)
Note: The power supply, cables and mirror are sold separately.
Connectors and Indicators
Table 2-1: In-Sight Wafer Reader Connectors and Indicators
Connector/Indicator Function
1 ETHERNET Port Provides the Ethernet connection for network communications.
2 ENET LED Green when active. Flashes when receiving data and when connected to the
network.
3 User 1 LED Green when active. User-configurable using Discrete Output Line 4 (Line 9
when using the CIO-1400I/O module).
4 User 2 LED Red when active. User-configurable using Discrete Output Line 5 (Line 10 when
using the CIO-1400I/O module).
5Power LED Green when power is applied.
6 24VDC Port Provides connections for the 24VDC power source, acquisition trigger, and
serial communications.
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Attach the Mirror for Horizontal Operation (Optional)
The optional horizontal mirror attachment allows the wafer reader to be installed in top or bottom-side reading
applications where a low mounting profile is required. The mirror mounting configuration depends on whether the
External LEDs (Figure 2-1) or Expansion cable (Figure 2-2) will be used.
1. The mirror contains two pre-fastened captive hex head screws. Align the pre-fastened screws on the mirror
attachment to the holes on the front plate of the wafer reader.
2. Tighten the screws with a 2.5mm hex wrench.
Figure 2-1: Mirror Mounting Configuration - External LEDs
Figure 2-2: Mirror Mounting Configuration - Expansion Cable
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Determine the Working Distance
The wafer reader is shipped with a factory-set working distance of 50.0mm. The wafer reader can be mounted vertically
or horizontally (with the optional mirror mount attached).
Note:
lThe Image Orientation may need to be adjusted, depending on the configuration of the wafer reader and the
mirror attachment configuration. For more information, refer to the Cognex Wafer ID Help file.
lAll dimensions are in millimeters [inches] and are for reference purposes only.
Vertical Wafer Reader Mounting
When mounted in the vertical position, the working distance range will vary depending on whether the External LEDs are
OFF or ON (Figure 2-3).
Note: In both vertical configurations, the Expansion cable can be attached. When attached, the maximum bend radius
or service loop of the cable is 45mm.
Figure 2-3: Vertical Wafer Reader Mounting
Installation
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Horizontal Wafer Reader Mounting
When mounted in the horizontal position, the working distance range will vary depending on whether the External LEDs
or Expansion cable will be used (Figure 2-4).
Figure 2-4: Horizontal Wafer Reader Mounting
Working Distances
Table 2-2 shows examples of the wafer reader’s vertical working distances and the corresponding horizontal working
distances required at the same focal setting. For more information on adjusting the focus, see Adjust the Focus on
page9.
Table 2-2: Working Distances
Vertical Working
Distance (External
LEDs OFF)
Vertical Working
Distance (External
LEDs ON)
Horizontal Working Distance
(External LEDs)
Horizontal Working Distance
(Expansion Cable)
To Mirror
Mount Face To Housing To Mirror Mount Face To Housing
5.0mm N/A N/A N/A N/A N/A
10.0mm N/A N/A N/A N/A N/A
15.0mm N/A N/A N/A N/A N/A
20.0mm N/A N/A N/A N/A N/A
25.0mm 25.0mm 1mm N/A N/A N/A
30.0mm 30.0mm 2.1mm N/A 2.1mm 4.9mm
40.0mm 40.0mm 12.1mm 4.1mm 12.1mm 14.9mm
50.0mm* 50.0mm* 22.1mm* 14.1mm* 22.1mm* 24.9mm*
60.0mm 60.0mm 32.1mm 24.1mm 32.1mm 34.9mm
70.0mm 70.0mm 42.1mm 34.1mm 42.1mm 44.9mm
80.0mm 80.0mm 52.1mm 44.1mm 52.1mm 54.9mm
* Indicates factory-set working distance.
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Connect the Ethernet and Breakout Cables
The wafer reader has two RJ-45 connector ports: the ETHERNET port and the 24VDC port. The ETHERNET port
provides the Ethernet connection for network communications. The 24VDC port provides connections for the 24VDC
power source, acquisition trigger and serial communications.
Note: Cables are sold separately.
Figure 2-5: ETHERNET and 24VDC Ports
Installation
7

Connect the Ethernet Cable
lIf you are connecting to a switch/router, plug one of the RJ-45 connectors of a CAT5 Ethernet cable or crossover
cable into the Ethernet port and plug the other end into an available port on the switch/router.
lIf you are connecting directly to a wafer reader from a remote host, plug one end of a CAT5 Ethernet cable or
crossover cable into the wafer reader’s Ethernet port; plug the other end into the remote host’s Ethernet port.
Connect the Breakout Cable
1. Verify the 24VDC power supply being used is unplugged and not receiving power.
2. Attach the Breakout cable’s power (White/Green wire) and ground (Brown wire) to the corresponding terminals
on the power supply.
3. Connect the wires for the acquisition trigger and serial communications to their corresponding terminals on
remote devices.
4. Plug the RJ-45 connector into the wafer reader’s 24VDC port. The cable’s connectors are “keyed” to the notch in
the 24VDC port; do not force the connections or damage may occur.
5. Restore power to the 24VDC power supply, and turn it on if necessary. The green power LED will indicate the
wafer reader is receiving power.
Note:
lUnused bare wires can be clipped short or tied back using a tie made of non-conductive material. Keep all
bare wires separated from the +24VDC (White/Green) wire.
lSee Breakout Cable Specifications on page17 for the Breakout cable’s wiring details.
lTo connect the wafer reader using the optional CIO-1400 I/O module, refer to Connecting the I/O Module on
page23.
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Adjust the Focus
The wafer reader is shipped with a factory-set working distance of 50.0mm. The focus has been calibrated to
accommodate this working distance. If mounting the wafer reader at a working distance other than 50.0mm, the focus will
need to be adjusted.
1. From the Cognex Wafer ID application, acquire an image.
2. Remove the label covering the focus adjustment screw (M3 hex screw) located by the wafer reader’s Ethernet
port and 24VDC port.
3. Using a 2.5mm hex wrench, turn the focus adjustment screw clock-wise if the wafer reader is moved closer to the
wafer; turn the screw counter clock-wise if the wafer reader is moved farther away from the wafer.
Figure 2-6: Location of Focus Adjustment Screw
Mount the Wafer Reader
When mounting the wafer reader, use the following procedure for each wafer reader installation to ensure that the same
job file produces consistent results. The fixture used to mount the wafer reader should have a small amount of built-in
angle adjustment. Once the wafer reader is mounted to the fixture, you can adjust the tilt of the wafer reader in the fixture
by turning an adjustment screw an incremental amount, and then locking the adjustment screw in place.
CAUTION:
lThe wafer reader must be mounted from only one side. Mounting the wafer reader from both sides may
damage optical components. The maximum torque is 5.85 N-m (51.8 in-lb).
lThe housing of the wafer reader is internally connected to the system ground wire (pin 8 of the Breakout cable).
Therefore, if the mounting surface of the wafer reader is at a non-zero ground potential, it is strongly
recommended that the wafer reader be mounted on an isolated or non-conductive mount.
1. Mount the wafer reader to the fixture, but do not fully tighten all of the mounting screws.
Tip: If mounting the wafer reader at four points, fully tighten the front two screws, and only partially tighten the
two screws toward the back end (i.e. the connector end) of the wafer reader.
2. Position a polished wafer in front of the wafer reader window.
3. From the Cognex Wafer ID application, acquire an image.
4. Set the Light Mode to Mode 1.
Installation
9

5. Increase the Light Power setting until the image is saturated (recommended range is 2.00 to 4.00). If the wafer
reader is properly aligned with respect to the wafer, a horizontal band of white should appear across the width of
the image, creating a bright field image, as shown in Figure 2-7.
Figure 2-7: Optimized Angle (Mode 1 Produces Bright Field)
If the mounting angle of the wafer reader is not optimized, the image is not bright field, as shown in Figure
2-8.
Figure 2-8: Sub-optimal Angle (Mode 1 Produces Dark Field)
6. Place the wafer reader in Live mode to view an acquired image.
7. Assuming the two screws near the back end of the wafer reader (i.e. the connector end) are only partially
tightened, tilt the back end of the wafer reader by either pushing it down or pulling it up slightly. You should see
the image change from dark field to bright field.
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