Colnatec Eon-LT User manual

PC-based controller
user manual
eon-ltTM

WARNING All electrical components are to be considered extremely
dangerous if tampered with in any way. Colnatec is not liable for any injury
resulting from product misuse, modication, or disassembly.
WARRANTY LABEL If the warranty label has been tampered with, “VOID”
will appear where the warranty label was originally placed. If this is visible
at the time of arrival, it is important that you contact Colnatec immediately
after receiving the product.
© Copyright 2014 Colnatec
All information contained within this
technical manual and accompanying
pages are copyright of Colnatec.
All rights reserved. It is a breach of
copyright if this technical manual is
copied, distributed, or reproduced,
in whole or part, using any means
whatsoever, without the prior written
approval of Colnatec.
Colnatec gives no condition or
warranty, expressed or implied,
about the tness of this technical
manual or accompanying hardware
product. Colnatec reserves the right
to make changes to this technical
manual or accompanying hardware
or design without notice to any
person or company.
Colnatec shall not be liable for any
indirect, special, consequential or
incidental damages resulting from
the use of this technical manual
or the accompanying hardware or
design whether caused through
Colnatec’s negligence or otherwise.
May 2014
Version 3.0

EXAMINE YOUR NEW EON-LT™ FOR ANY SIGNS OF PHYSICAL
DAMAGE. ALSO, ENSURE THAT THE TAMPER-EVIDENT LABELS
ARE INTACT Before shipping, your Eon-LT™ was calibrated and tested
by Colnatec to meet the highest quality standards. It is important that you
take a few minutes to inspect the product to ensure that your equipment
was not damaged or otherwise tampered with during transit.
About Eon-LT™
With the ability to sense deposition and temperature with high precision, the
Eon-LT™ thin lm controller is one of the newest advancements in Thin Film
deposition controllers. The Eon-LT™provides features that help improve
measurement accuracy for better process control.
LabVIEW® Interface
The Eon-LT™offers a simple LabVIEW® interface that provides control and
operation that is intuitive, efcient, and impressive.
Software Updates
The Eon-LT™interface software can be upgraded on site to provide
software improvements. There will be notications when these updates
become available.
Inspection & Initial Setup
Examine Eon-LT™for any signs of physical damage. Also, make sure
that the tamper-evident labels are intact. In order to ensure safe, correct
operation of your Eon-LT™, please follow the step-by-step instructions
presented in the Eon-LT™ Quick Start guide.
Warranty
Eon-LT™is warranted to the original purchaser to be free of any
manufacturing-related defects for one year from the date of purchase.
Colnatec reserves the right to repair or replace the unit after inspection.
Contact [email protected] for more information.
What Is the Eon-LT™Thin-Film Controller?
ii

The Warranty Label........................................................................................................
Safety Information..........................................................................................................
Copyright........................................................................................................................
About Eon-LT™..............................................................................................................
Software Updates...........................................................................................................
Inspection and Initial Setup.............................................................................................
Warranty.........................................................................................................................
Section 1: System Components and Connections
1.0 Eon-LT™ Package Contents..................................................................
1.1 Phoenix™ System Components.............................................................
Section 2: Hardware and Design
2.0 Connecting Inputs...................................................................................
2.1 Connecting Outputs................................................................................
Section 3: Front Panel Controls and Displays
3.0 Controls..................................................................................................
3.1 Status Displays.......................................................................................
3.2 Graphs....................................................................................................
Section 4: Layer Controls/Selections
4.0 Setup Menu: Layer Tab..........................................................................
Section 5: Process Controls/Selections
5.0 Setup Menu: Process Tab......................................................................
Section 6: Device Parameters
6.0 Setup Menu: Device Parameters Tab.....................................................
Section 7: Manual Power
7.0 Setup Menu: Manual Power Tab............................................................
Section 8: First Start
8.0 Communication Port Selection...............................................................
8.1 Procedure...............................................................................................
Section 9: Using the Software
9.0 Adding a Layer........................................................................................
9.1 Adding a Process....................................................................................
9.2 Starting a Deposition...............................................................................
Contents
p. 1
p. 2
p. 4
p. 4
p. 5-6
p. 6-7
p. 7
p. 8-10
p. 11-12
p. 13-14
p. 15
p. 16
p. 16
p. 17
p. 17-18
p. 18
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ii
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ii

Section 10: Troubleshooting..........................................................................................
Section 11: Specications
11.0 Device Parameters.................................................................................
11.1 Deposition Settings.................................................................................
11.2 Measurement.........................................................................................
11.3 Process Display......................................................................................
11.4 Communications.....................................................................................
11.5 Deposition Settings.................................................................................
Index...............................................................................................................................
Contents
p. 19
p. 20
p. 20
p. 21
p. 21
p. 21
p. 22
p. 23

Tables
1 Coating Specications....................................................................................
2 Troubleshooting..............................................................................................
3 Device Specications......................................................................................
4 Coating Specications.....................................................................................
5 Measurement Specications...........................................................................
6 Process Display Specications.......................................................................
7 Communication Specications........................................................................
8 Input and Output Specications......................................................................
Figures
A Eon-LT™System Components......................................................................
B Phoenix™System Package Contents............................................................
C Connections Between Phoenix System Components....................................
D Eon-LT™ Front Hardware Connections..........................................................
E Eon-LT™Rear Hardware Connections...........................................................
F Front Panel Controls and Displays.................................................................
G Layer Tab.........................................................................................................
H Process Tab.....................................................................................................
I Device Parameters Tab...................................................................................
J Manual Power Tab...........................................................................................
K ComPort Selection Prompt..............................................................................
Tables & Figures
p. 12
p. 19
p. 20
p. 20
p. 21
p. 21
p. 21
p. 22
p. 1
p. 2
p. 2
p. 3
p. 3
p. 5
p. 8
p. 11
p. 13
p. 15
p. 16

Section 1 System Components and Connections
Power Supply Cable
North America standard plug
(Europlug available on request)
Power Supply
Input: 100-200VAC, 50/60Hz, 2.0A
Output: 24V-3.75A, 90W MAX
Eon-LT™ Thin Film Controller
Eon- LT™Controller, BNC Sensor
Inputs, Type K Thermocouple
Inputs, Power Input, and RS-232
ComPort for connection to PC
Eon-LT™Quick Start Guide Eon-LT™Software Disc
Eon LT™ software, Labview
runtime, USB drivers, and manual.
Software requires administrative
privileges to install and run.
BNC to Microdot Cable
USB to RS-232 Adaptor
RS-232 Extension Cable
Standard, male-to-female
serial cable
Quartz Crystals
Figure A: Eon-LT™Package Components

Phoenix Sensor Head
Phoenix™ temperature measuring
sensor head
substrate
source
shutter
Eon-LTTM software
installed on your PC
Eon-LTTM Controller
PhoenixTM Sensor Head
Figure B: Phoenix™ Sensor Head
Figure C: Connections Between Phoenix™ System Components
Phoenix™ System
2

Figure D: Eon-LT™Front Hardware Connections
Section 2 Hardware and Design
Figure E: Eon-LT™Rear Hardware Connections
LED Indicator
Variable Stat Indicator
RS-232
For connecting Eon-LT™to PC
Power Input
24 VDC Power Input
3
BNC Sensor Inputs
For connecting to sensor head
Outputs
For relay and source outputs
Type K Thermocouple Inputs
For temperature measurement

2.0 - 2.1 Connecting Inputs & Outputs
4
Eon-LT™has been designed so that ONLY the correct hardware can be
plugged into the appropriate input or output. The following is a guideline on
how hardware should be connected in order to prevent damage to Eon-LT™.
2.1 Connecting Output
The Eon-LT™utilizes one (1) output. Make sure the correct hardware
is used with this output.
2.1.1 DB9 Connector
Connects the two SPST relays and two source outputs.
2.0 Connecting Inputs
The Eon-LT™utilizes four (4) inputs. Make sure the correct hardware
is used with these inputs.
2.0.1 Power
Only the provided power supply should be used with Eon-LT™.
Not doing so will cause hardware damage to Eon-LT™that will
not be covered by warranty. Ensure that the power supply has a
24 VDC.
2.0.2 ComPort
Connect an RS232 cable to this port. Always use the provided
USB to RS232 cable.
2.0.3 BNC
Eon-LT™has a built in oscillator. (Colnatec also offers an
external oscillator for purchase). The cable between Eon-LT™
and the crystal should remain as short as possible to avoid
noise. The advisable maximum acceptable length for this is one
(1) foot or 30 cm.
2.0.4 TC Connection
Eon-LT™uses a thermocouple probe to measure the
temperature of the sensor head.