Cost Effective Equipment Apogee Developer User manual

Owner’s Manual
Apogee™ Developer
www.costeffectiveequipment.com
[phone]

Cee® Apogee™ Developer Manual
Page 2of 15
Contents
1. Apogee™ Developer Introduction...........................................................................................................4
1.1. Confidentiality Statement ................................................................................................................................ 4
1.2. Warranty............................................................................................................................................................... 4
1.3. Returned Materials............................................................................................................................................. 4
1.4. Model and Revisions......................................................................................................................................... 5
1.5. Safety Hazards/Precautions............................................................................................................................ 5
1.6. Overview of Equipment-Specific Hazards................................................................................................... 5
1.7. Electrical............................................................................................................................................................... 5
1.8. Mechanical........................................................................................................................................................... 5
1.9. Chemical............................................................................................................................................................... 6
1.10. Lockout/Tagout Procedures and Information ........................................................................................ 6
1.11. Intended Use of Machine.............................................................................................................................. 6
2. Equipment Description ............................................................................................................................7
2.1. Dimensions.......................................................................................................................................................... 8
2.2. Programmability................................................................................................................................................. 8
2.3. Precision............................................................................................................................................................... 8
2.4. Reliability.............................................................................................................................................................. 8
2.5. Bowl Design......................................................................................................................................................... 8
2.6. Utilities.................................................................................................................................................................. 9
3. Installation ................................................................................................................................................9
3.1. Floor Space Requirements.............................................................................................................................. 9
3.2. Facilities Requirements.................................................................................................................................. 10
3.3. Environment...................................................................................................................................................... 11
3.4. Unpacking/Inspection..................................................................................................................................... 11
3.5. System Installation and Setup...................................................................................................................... 11
3.6. Start Up............................................................................................................................................................... 12
4. Developer Use and Operation................................................................................................................13
4.1. Spin Chuck......................................................................................................................................................... 13
4.2. 5- Hole Dispense Nozzle Hub........................................................................................................................ 13
4.3. Lid Adjustment.................................................................................................................................................. 13
5. Preventative Maintenance......................................................................................................................14
5.1. Safety Checks................................................................................................................................................... 14
5.2. Mechanical Checklist...................................................................................................................................... 14
5.3. Utility Checks.................................................................................................................................................... 14

Cee® Apogee™ Developer Manual
Page 3of 15
5.4. Cleaning.............................................................................................................................................................. 15

Cee® Apogee™ Developer Manual
Page 4of 15
1. Apogee™ Developer Introduction
1.1.Confidentiality Statement
Information supplied is for the use in the operation and/or maintenance of Cee equipment.
Neither this document nor the information it contains shall be disclosed to others for manufacturing or any
other purpose without written authorization from, Cost Effective Equipment, LLC.
1.2.Warranty
Cost Effective Equipment, LLC warrants to the original purchaser (Buyer) that equipment is free from
defects in material and workmanship under normal use and service in accordance with Cee instructions
and specifications. Buyer Shall promptly notify Cee of any claim against this warranty, and any item to be
returned to Cee shall be sent with transportation charges prepaid by Buyer, clearly marked with a Return
Authorization (RMA) number obtained from Cee Customer Support. Cee’s obligation under this warranty is
limited to the repair or replacement, at Cee option, of any equipment, component or part which is
determined by Cee to be defective in material or workmanship. This obligation shall expire one (1) year
after the initial shipment of the equipment from Cee.
This warranty shall be void if:
(a) Any failure is due to the misuse, neglect, improper installation of, or accident to the equipment.
(b) Any major repairs or alterations are made to equipment by anyone other than a duly authorized
representative of Cee. Representatives of Buyer will be authorized to make repairs to the equipment
without voiding warranty, on completion of the Cee training program.
(c) Replacement parts are used other than those made or recommended by Cee.
CEE MAKES NO OTHER WARRANTIES, EXPRESSED OR IMPLIED, WITH RESPECT TO EQUIPMENT.
NO WARRANTY IS MADE AS TO THE MERCHANTABILITY OF THE EQUIPMENT NOR ITS FITNESS
FOR ANY PARTICULAR PURPOSE. In no event shall Cee be liable for consequential loss or damages,
however caused. No person or representative of Cee is authorized to assume for Cee any liability in
connection with Equipment nor to make any change to this warranty unless such change or modification is
put in writing and approved by an authorized representative of Cee in writing.
This warranty shall be governed by the laws of the state of Missouri U.S.A.
1.3.Returned Materials
Any materials, parts, or equipment returned Cost Effective Equipment, LLC must be clearly labeled with a
Return Material Authorization (RMA) number.
To obtain a RMA number, contact:
Cee Customer Support
Telephone: [phone]
E-Mail: [e-mail]
Web Address: http://www.costeffectiveequipment.com
Shipping information with RMA number:
Attn: Cee Customer Support
Cost Effective Equipment
3703 HyPoint Blvd
Rolla, Missouri 65401

Cee® Apogee™ Developer Manual
Page 5of 15
1.4.Model and Revisions
The model and serial number information for the Cee® Apogee™are located on the rear panel
near the power inlet. Software version information can be found on the About screen. See
DataStream™ Manual for screen shots and a detailed explanation of the system software.
1.5.Safety Hazards/Precautions
Read this manual in its entirety before operating the machine.
1.6.Overview of Equipment-Specific Hazards
The unit is very heavy and proper precautions should be taken when handling the machine to
minimize risk of injury. Labels are placed on the machine to identify areas where caution is
needed during operation.
1.7.Electrical
High voltage is present in the machine. Disconnect the power before servicing.
Stored electrical energy is present in the machine. Before servicing allow sufficient time for
discharge. The servo amp has a charge light; do not service the machine until this light has gone
out.
1.8.Mechanical
This machine uses compressed gasses, which can provide motive force for components and
can expand violently upon decompression. Disconnect N2 or CDA before removing any panels.
The machine is capable of very high-speed rotation. Ensure all lids and panels are in place
before rotating these devices.
Ensure that all panels are on and in their correct locations before powering up or operating.
When opening the lid be aware of the pinch point at the hinge cover. Open the lid only by
using the handle on the lid.
The unit is very heavy and proper precautions should be taken when handling or moving the
machine to minimize risk of injury.

Cee® Apogee™ Developer Manual
Page 6of 15
1.9.Chemical
Ensure chemical compatibility of all chemicals and materials being used inside the machine.
This includes all wetted parts of the storage, supply, dispense, and waste systems.
Ensure chemical compatibility of all chemicals with each other. All dispensed materials are
held in one common waste storage tank. Check for reactions between chemicals before use.
Flammable Chemicals. No open flames/sparks.
Relieve pressure before opening canisters, tanks, cartridges, or syringes to refill.
Relieve pressure and shut off chemical valves before servicing supply lines, dispense valves
or other components.
Relieve pressure and shut off chemical valves before removing spin lid or changing BSR
tubes, EBR tubes, or any other dispense nozzle or spray tip.
Flush tubing and valves with an appropriate solvent and drain system before servicing.
When draining waste tank, use appropriate containers and connection methods.
Ensure proper ventilation/exhaust is used at all times.
Always wear the proper Personal Protective Equipment for the job. This includes safety
glasses, gloves and other equipment as needed to protect from mechanical and chemical
hazards.
1.10. Lockout/Tagout Procedures and Information
Before servicing, turn off the machine and remove the power inlet cord by disconnecting the plug
where it enters the machine.
1.11. Intended Use of Machine
The Cee® Apogee™Developer is intended for use as a Semiconductor/Optical application spin
coating machine. It is primarily intended for substrates up to the maximum size.
The Cee® Apogee™Developer is not intended for use in food or medical applications or for use
in hazardous locations.
The Cee® Apogee™Developer is intended for use only by properly trained personnel wearing the
proper personal protective equipment. Anyone not trained in the proper use of the Apogee™
Developer and have not fully read this manual should not operate the equipment.
The Cee® Apogee™Developer is intended for use in a cleanroom environment to provide the
proper processing conditions for the substrates. If it is used outside of a cleanroom environment,
the substrate cleanliness may be compromised.
The Cee® Apogee™Developer is not intended for use in a hazardous or explosive environment.

Cee® Apogee™ Developer Manual
Page 7of 15
2. Equipment Description
The Cee® Apogee™ Developer delivers track-quality performance, with revolutionary interface
capabilities and the utmost in chemical compatibility, in an efficient, space-saving design.
Fully programmable and user-friendly, the Cee® Apogee™ Developer features the accuracy and
repeatability needed to eliminate processing variability from critical experiments. With its convenient
compact footprint, wide array of chemical compatibility, and durability, this easy-to-use benchtop
system will provide years of high-performance operation, making the Cee® Apogee™ Developer
purchase a smart and cost-effective decision.
1. Power Button –Used to turn on and off the tool
2. User Presence Button –Used for remote access (see DataStream™ Manual)
3. Lid Sensor –Detects when the lid is closed
4. Developer Lid –Cover for the spin bowl (optional chimney hood available)
5. Lid Handle –Used to open and close the lid
6. Dispense Bracket –Used to hold dispense nozzles
1
2
3
5
4
6

Cee® Apogee™ Developer Manual
Page 8of 15
2.1.Dimensions
•13.25” (33.65 cm) W × 19” (48.26 cm) D × 12” (30.48 cm) H
•Machine weight: 40 lb (18.14 kg)
•Shipping weight: 100 lb (45.36 kg)
2.2.Programmability
•Touch screen interface and display
•Full-color alphanumeric-capable graphical user interface (GUI)
•A virtually unlimited number of user-defined recipe program steps
•0.1-second resolution for step times (9,999.9 seconds maximum step time)
•Spin speed: 0 to 6,000 rpm (12,000 rpm option at no charge)
•Spin speed acceleration: 0 to 30,000 rpm/s unloaded 0 to 23,000 rpm/s with a 200-mm
substrate 0 to 3,000 rpm/s with a 6” × 6” × 0.250” photomask in a recessed chuck
•Connectivity: USB/Ethernet port for communications for uploading/downloading process
parameters with DataStream™ technology
•Simultaneous dual automated dispense capability
•In-process/dynamic speed/acceleration control
2.3.Precision
•Spin speed repeatability: < 0.2 rpm
•Spin speed resolution: < 0.2 rpm
•Substrate sizes: < 1 cm to 200 mm round; 7” x 7” square
2.4.Reliability
•Indirect drive system protects the spin motor from contact with process chemicals and solvents
•Vacuum and lid interlock
•Industry-leading reliability and uptime
•1-year full warranty on parts and labor
•Free remote technical support (phone, email, fax) for the life of the product
•Application process assistance for life of the product
2.5.Bowl Design
•High-density polyethylene (HDPE) spin bowl for material compatibility
•Optional stainless or Teflon® bowl
•Optional polyethylene disposable liners available
•Versatile lid design allows process flexibility and repeatability
•Optional nitrogen purge for an inert spin environment
•Integrated drain and exhaust ports

Cee® Apogee™ Developer Manual
Page 9of 15
2.6.Utilities
•Voltage ranges: 100-125, 208-240 VAC, 50/60 Hz
•Power requirements: 655 watts
•Drain port: ¾” OD
•Exhaust port: 1” OD
•Vacuum: 20 to 25” Hg
•Exhaust: 20 to 50 cfm at 0.2” water
•Nitrogen or CDA (for automated dispense): 70 psi
3. Installation
3.1.Floor Space Requirements
The Apogee™ Developer is a bench top unit and requires a table or bench top for location. In
most cases the supporting structure will be larger than the unit itself. The recommended
freestanding space requirements are: 1'0" back to front and 0’3" side to side.
Dimensions: 13.25”L x 19”D x 12”H
Weight: 120 lbs

Cee® Apogee™ Developer Manual
Page 10 of 15
3.2.Facilities Requirements
The Apogee™ Developer requires the following utilities for operation. Locations for connections
are shown in the figure below.
1. USB Port –Used to update the software or download log files (see DataStream™ Manual)
2. Programmable Exhaust (Optional) –Communication port for optional Programable Exhaust module
3. Light Tree (Optional) –Port for optional light tree
4. Backside Rinse (BSR) (Optional) –Fitting for dispense material for optional Backside Rinse
5. Spin Bowl Exhaust Port –Exhaust port for spin bowl vapors. Port is 1 Inch OD and 50 CFM of
exhaust is recommended
6. Fuses –System protection fuses
7. System Vacuum –System vacuum for vacuum chuck. Recommended vacuum Supply is 20 in Hg at
a flow of 5 l/min. Port is ¼” barb fitting
8. Dispense Trigger –This port us used to connect to the optional dispense control box. This is used
when using automated dispenses
9. Accessory Port –This is used to talked to external I/O device to support extra outputs and inputs.
10. Ethernet –The ethernet can be used for remote recipe writing and remote control (see
DataStream™ Manual)
11. Spin Bowl Drain –The port that removes the liquid waste from the machine. The port is ¾” OD.
12. AC Power In –Cord is Provided. Single Phase 100-120V AC at 10 Amps (208-240V A/C option
available, see back label shown in Figure 1 to verify)
1
2
3
4
6
7
8
9
10
11
12
5