Denton Vacuum DESK V User manual

Copyright Denton Vacuum, LLC. All Rights Reserved. Version 9142016da 1
Desk V
DESKV-SPUTTER/ETCHUNITANDACCESSORIES
DENTON VACUUM, LLC
1259 N. CHURCH STREET
MOORESTOWN, NJ 08057
PHONE:[phone]
FAX:[phone]
WWW.DENTONVACUUM.COM
DENTONVACUUM
DESKV
Desk V
Desk V TSC
Watch the Desk V videos here:
https://www.youtube.com/user/Dentonvacuum

Copyright Denton Vacuum, LLC. All Rights Reserved. Version 9142016da 2
Table of Contents
Contents
INTRODUCTION ...............................................................................................................................................................5
GENERALDESCRIPTION............................................................................................................................................5
SYSTEMVIEWS.......................................................................................................................................................6
FRONTVIEW OF UNIT...............................................................................................................................................6
REAR VIEW OF UNIT.................................................................................................................................................7
ELECTRICALREQUIREMENTS.....................................................................................................................................8
DESK V HP & DESK V TSC ..........................................................................................................................................8
CARBON ROD ACCESSORY AND CARBONYARN ACCESSORY .......................................................................................9
ENVIRONMENTALCONDITIONS ................................................................................................................................9
OPTIONS ........................................................................................................................................................... 10
ROTATION .............................................................................................................................................................10
THICKNESS MONITOR.............................................................................................................................................10
CARBON ROD EVAPORATION..................................................................................................................................10
CARBON YARN EVAPORATION ................................................................................................................................10
SAFETYWARNINGS ......................................................................................................................................................... 10
SAFETYSYMBOLS.................................................................................................................................................. 13
UNPACKING&SETUP ....................................................................................................................................................... 13
SYSTEM .............................................................................................................................................................. 13
Emergency Stop Button........................................................................................................................................14
INSTALLATIONINSTRUCTIONS...............................................................................................................................................15
VOLTAGE SELECTION ......................................................................................................................................... 15
........... 15
CHAMBER PREPARATIONS......................................................................................................................................18
MECHANICAL PUMP INSTALLATION ......................................................................................................................... 19
The mechanical pump installed ............................................................................................................................... 19
TARGET INSTALLATION & REPLACEMENT .................................................................................................................... 21
INITIAL START-UP .................................................................................................................................................... 22
INSPECTION......................................................................................................................................................... 22
START-UPPROCEDURE .............................................................................................................................................. 23
OPENINGTHECHAMBER........................................................................................................................................ 24
DESCRIPTIONOFCONTROLS ............................................................................................................................................... 25
SYSTEMSTARTSCREEN...........................................................................................................................................25
SCREENS ...............................................................................................................................................................26
Verifythattheincomingpowerconnectionissetforthepropervoltage!

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.................................................................................................26
MANUAL SPUTTER ............................................................................................................................................ 27
St an d ar d Desk V HP ...........................................................................................................................................27
.....................................................................................27
MANUAL SPUTTER DESK V TSC.......................................................................................................................... 29
TIMED SPUTTER.....................................................................................................................................................31
Desk V TSC .............................................................................................................................................................. 32
Desk V Timed Recipe Programming......................................................................................................................34
How to Use Timed Recipe Programming..............................................................................................................35
MANUAL ETCH .....................................................................................................................................................37
DESK V HP................................................................................................................................................................ 37
TIMED ETCH...........................................................................................................................................................40
OVERVIEW.............................................................................................................................................................42
OPERATION...................................................................................................................................................................44
ETCH ................................................................................................................................................................. 45
SPUTTER............................................................................................................................................................. 47
TIMEDETCHOPERATION ........................................................................................................................................ 49
TIMEDSPUTTEROPERATION................................................................................................................................... 50
SHUT-DOWNPROCEDURE...................................................................................................................................... 52
OPTIONS ............................................................................................................................................................ 52
QUARTZ CRYSTALMONITOR...................................................................................................................................52
DESK V TSC ............................................................................................................................................................53
CARBON ROD ACCESSORY ......................................................................................................................................54

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CARBON YARN ACCESSORY .......................................................................................................................................57
Loa d i ng the Carb on Yarn ............................................................................................................................ 58
MAINTENANCE ............................................................................................................................................................. 59
GENERALMAINTENANCE....................................................................................................................................... 59
MECHANICALPUMP ..............................................................................................................................................59
MECHANICAL PUMP –OIL CHANGE ........................................................................................................................60
SPUTTERTARGET....................................................................................................................................................60
TROUBLESHOOTING ................................................................................................................................................62
VACUUMPERFORMANCEDATASHEET .................................................................................................................................... 64
USEDTARGET ................................................................................................................................................................ 65
TYPICALPERFORMANCEDATA ............................................................................................................................................. 66
PUMPDOWN ...................................................................................................................................................... 66
DEPOSITIONRATE................................................................................................................................................. 69
PACKINGDESKVFORRETURN.............................................................................................................................................72
PACKINGPHOTOS ................................................................................................................................................. 73
SUGGESTEDSPARES ......................................................................................................................................................... 74
CONSUMABLESFORDESKVANDTSC....................................................................................................................... 74
FUSES.................................................................................................................................................................75
CONSUMABLESFORCARBONRODACCESSORY.......................................................................................................... 76
CONSUMABLESFORCARBONYARNACCESSORY ........................................................................................................ 77
TARGETSFORDESKVANDTSC ................................................................................................................................ 78
AdjustingtheVacuumSafetyBellowsSwitch........................................................................................... 79
Emergency Stop Button........................................................................................................................................80
Battery Advisory: ..................................................................................................................................................80

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INTRODUCTION
GENERALDESCRIPTION
The Denton Vacuum DESK V Cold Sputter/Etch Unit is designed to deposit a conductive coating on an
SEM sample and to provide some limited surface cleaning in some models.
A standard 6”diameter Glass Cylinder with top and bottom seals sits on the aluminum Baseplate.
Metal chamber is optional with Turbo Pump option (TSC).
A two-stage, direct-drive Mechanical Pump, is located outside of the system cabinet,
evacuates the cylinder. Turbo molecular pump is optional (TSC).
An automatic Vent Valve is slaved to the mechanical pump. It will automatically open when the
Mechanical Pump is turned OFF to vent the chamber to atmosphere. It will automatically close when
the Mechanical pump is turned on.
An insulated Specimen Table with provisions for height adjustment is mounted within the Pyrex
cylinder. Rotation is optional.
The Sputter Cathode is clamped to an insulated aluminum plate in the chamber cover.
A manual Shutter is provided to shield the Sputter Cathode from contamination during the Etch
cleaning cycle. The shutter control knob is left of the chamber. Clockwise rotation of the knob will
open the shutter and counterclockwise rotation will close it.
A manual Gas Control is provided to control pressure in the cylinder. The Gas Control knob is to the
left of the chamber.
For servicing and inspection convenience, all Fuses are mounted externally on the rear panel and the
rear panel is hinged to provide access to internal components.
There are six main operations for the system: Vacuum, Etch Enable (if equipped), Rotation (if
equipped), Sputter Enable, Timed Etch (if equipped) and Timed Sputter.
A Programmable Logic Controller (PLC) controls the system. A Touch Screen is used to interface with
the PLC. Operator interface is through a graphics program that is running on the Touch Screen. This
control system will be described in detail in the Operation section of this manual.
NOTE:Thesystemoffersyouarangeofthinfilmprocessoptions.
However,it is importantto notethatwithallof thissystem’s potential,thereexistsafety
considerations.Individualswhoare to operate,service,or maintainthissystemshould
familiarizethemselveswiththismanual.

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1
2
5
7
SYSTEMVIEWS
FRONT VIEW OF UNIT
3
4 6
1
Head Support
4
Front Panel Removal; Latch
2
Vacuum Chamber
5
Shutter Control
3
Gas Flow Valve
6
Emergency Shut-off
7
Color Touch Screen
Ifthisequipmentisusedin amannernotspecifiedby DentonVacuum,theprotection
providedbytheequipmentmaybeimpaired.
Acompleteunderstandingofthiscontrolsystemisrecommendedbeforeoperatingthe
vacuumsystem.

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REAR VIEW OF UNIT
2
1
3
1
Fan
8
Fuse 5: Rotation Motor (Option) 1 Amp
2
Vacuum Chamber
9
Fuse 6: Turbo Pump (Option) 2 Amps
3
120 VAC/220 VAC Input Power
Connection and Main 10 Amp Fuses
10
Mechanical Pump 120 VAC Power Connection
4
Fuse 1: Mechanical Pump 8 Amps
11
Mechanical Pump Piping Connection
5
Fuse 2: 24 VDC Power Supply 1 Amp
12
Vent Gas Connection (N2)
6
Fuse 3: AC HVB Board 2 Amps
13
Process Gas Connection (Ar)
7
Fuse 4: PLC Touch Screen 1 Amp
6
11
13
9
NOTE: ALL FUSES MUST OF TIME DELAY OR
SLOW BLOW TYPE

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Picture depicts the tilting, rotating omni found
in the Desk V. The rubber belt controls the
rotation of the specimen stage, while the chain
turns the tilting mechanism at a different speed.
As the white plastic insert moves around the
angled cylinder, it causes the specimen table to
tilt. Because the stage rotates at a different
speed than does the tilting mechanism, the
table’s degree of tilt varies as it passes the same
point in multiple rotations. All systems
equipped with the tilting, rotating omni come
with a screw that can be adjusted to allow for a
fixed degree of tilt (or rotation without tilt).
ELECTRICALREQUIREMENTS
DESK V HP & DESK V TSC
Dual power input provided at rear of cabinet. Systems shipped set for 120 VAC. Customer
must change the incoming voltage selection at the main power connection at the rear of the
cabinet. This drawer also contains the main system 10 Time Delay Fuses.
Open drawer byplacing
screwdriver in slot.

Copyright Denton Vacuum, LLC. All Rights Reserved. Version 9142016da 9
Alignment arrow
Alignment arrow
120VAC; 10 Amps (standard); or
220 VAC; 8 Amps (non-US)
Power cord provided with unit.
CARBON ROD ACCESSORY AND CARBON YARN ACCESSORY
120 VAC; 10 Amps (standard); or
220 VAC; 5 Amps (non-US or special order).
Power Cord provided with unit.
ENVIRONMENTALCONDITIONS
The system is designed and intended for use in the following environmental conditions. If all
specifications are not met, system components may malfunction and can possibly cause injuries.
Altitude up to 2000 m.
Temperature range from5 to 40oC.
Maximum relative humidity 80% for temperature up to 31oC decreasing linearity to 50%
relative humidity at 40oC.
Mains supply voltage fluctuations not to exceed +/-10% of the nominal voltage.
Other supply voltage fluctuations as stated by the manufacturer.
Pollution degree 2 in accordance with IEC 664.
Verifythattheincomingpowerconnectionissetforthepropervoltage!
Openthedrawer
and flip it to the
desiredvoltageso
that the arrowon
thedraweraligns
with the arrow on
theframe.

Copyright Denton Vacuum, LLC. All Rights Reserved. Version 9142016da 10
OPTIONS
ROTATION
Tilting and rotating 2.0”, 3.0”, or 4.0” diameter plate.
Controlled through touch screen.
THICKNESS MONITOR
Stand-alone Film Thickness Monitor
Crystal Sensor head mounted through the Baseplate.
CARBON ROD EVAPORATION
Replaces sputter head with low voltage carbon rod evaporation.
Replaces the 6”x 6”Pyrex cylinder with a 6”x 9”Pyrex cylinder.
Stand-alone power supply.
CARBON YARN EVAPORATION
Replaces sputter head with low voltage carbon yarn evaporation.
Replaces the 6”x 6”Pyrex cylinder with a 6”x 9”Pyrex cylinder.
Stand-alone power supply.
NOTE:Etchmodedisabledwithrotation.
Thicknessmonitorcannotbeusedwith4.0” diameterplate.
NOTE:Thicknessmonitorcannotbeusedwith4.0” diameterplate.

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SAFETY WARNINGS
Thisvacuumdepositionsystemiscomprisedofanumberofcomplexsubsystems.
Lethalvoltages,hightemperatures,highpressuresandpowerfulmechanical
drivemechanismsarepresentthroughoutthesystem.
Everyattempthasbeenmadetosafeguardoperatingandmaintenance
personnel.Interlockingofsubsystemsprovidesa highdegreeofoperatorsafety.
System/softwareinterlocksshouldneverbedefeatedunlessservicingofthesystem
requirestemporaryinterlockoverrides.Hardwiredsafetyinterlocksmustneverbe
defeated.
Allsafety/softwareinterlocksshouldbereturnedtooperationalstatuswhen
problemshavebeencorrected.
Operatingand maintenancemanualshavebeenprovidedandshouldbe
thoroughlyunderstoodbeforeanyoperationsarecontemplated.
Onlypersonnelwithpropertrainingandprocessexperienceshouldoperate
thesystem.

Copyright Denton Vacuum, LLC. All Rights Reserved. Version 9142016da 11
Checkoillevelin mechanicalpumpbeforestartingmachine!

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SAFETYSYMBOLS
CAUTION: Risk of Electrical Shock
CAUTION: This symbol is intended to alert the user to the presence of important operation &
maintenance instructions in this manual.
Protective Conductor Terminal: this symbol indicates where the protective earth ground is
connected.
UNPACKING&SETUP
SYSTEM
The Denton Desk V system is shipped is a heavy-duty cardboard carton. The unit is shipped with oil in the
mechanical pump. To unpack the unit, use the following procedure:
1. Open top of carton.
2. Remove packing material.
3. Remove manuals (CD) and glass cylinder. Glass cylinder will be wrapped in packing material.
4. Remove target and power cord. These will be in a plastic bag.
5. Lift machine out of box using the built-in handles on each side panel.
6. Remove the foam pieces from each side of the machine.
7. Place the unit in the desired location.
Caution!Twopeoplearerequiredtolifttheunitfromtheshippingcarton.
Caution!Twopeoplearerequiredtolifttheunitfromtheshippingcarton.

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8. Cut the plasticband and remove cardboard piece.
9. Replace the cardboard piece with the glass cylinder.
10. The Baseplate and Gaskets are cleaned using isopropyl alcohol and a lint-free cloth. The Gaskets are
lubricated very lightly with vacuum grease. Sufficient grease has been applied when a finger is barely
able to slide around the gasket.
11. The Chamber is placed on the baseplate; and the Sputter Head is positioned on the Chamber.
12. Lift the metal lid from the cylinder and install the target as described in the following manual
section.
Emergency Stop Button
Toensureproperoperation,make certainthat the
emergencybutton (shownhere) is pulled-out
completely. TheDesk V cannot operatewhenthe
emergencybutton ispushed-in.
Caution!Handleglasscylinderwithcare.Wipeallsealingsurfaceswitha
cleanlint-freeragbeforeinstallingtheglasscylinder.
NOTICE:YouMUSTsaveallpackingmaterial,box,andskidintheeventtheunithas
tobereturnedforrepair. Iftheunitis returnedwithoutthestandardpackaging
materials,DentonVacuumcannotberesponsibleforshippingdamages.

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INSTALLATIONINSTRUCTIONS
VOLTAGE SELECTION
Place the Desk V in the desired location.
Voltage selection is required only between low (nominal 100 –120 VAC) and high (nominal 200 –240
VAC) ranges. There is no distinction between 50 and 60 Hz supplies. Refer to the Electrical
Requirements section of this manual for specific power requirements.
Verifythattheincomingpowerconnectionissetforthepropervoltage!
Allsystemsareshippedwiththefuseblockinstalledforlowvoltage
(100–120VAC)operation.Thefollowinginstructionsarenecessary
onlyifthesystemwillbe connectedtohighvoltage(200-240VAC)supply.
Verifythattheproperfuseisin placevisuallyinspectingthefuseforthe
properrating.Useofanimproperfusemaycreateasafetyhazard.
For100–120 VACoperationusea10Ampfuse.
For200–240 VACoperationusean8Ampfuse
Thissystemhaslinevoltagepresentontheprimarycircuitswheneveritis
pluggedintoa mainpowersource.Potentiallylethalvoltagesarepresentwhentheline
Thissystemmustbedisconnectedfromthemainpowersourcebeforeinspectingthe
fuse.

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To change the fuse block to high voltage (200 –240 VAC) input, proceed as follows.
Pry open the entry module cover. A small flat bladed screwdriver can be used.
Inspect the external face plate of the fuse block. Arrows and text are molded into the
faceplate to indicate the proper orientation for low voltage (100 -120 VAC) and high
voltage (200 –240 VAC) input supply.
Re-install the fuse block in the proper orientation for high voltage (200 –240 VAC)
supply.

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Connect the power cord to a 120VAC, 60Hz, 10 Amp outlet (systems shipped with default
setting of 120 VAC).
OR
Connect the power cord to a 220VAC, 50Hz, 8 Amp outlet (change voltage selection at main
power inlet connection).
The main electrical switch in the rear panel is the main circuit breaker. It should be switched
to the ON position when you are ready to power up the system.
GAS CONNECTIONS
Connect Argon to the Gas inlet
Recommended for clean, inert atmosphere for sputtering.
Some users of the Desk V will be satisfied with system operation using room air as
the sputtering gas. If room air is to be used, no connection is required.
Gas inlet fitting is 1/8”FNPT. Swagelok fittings not included. Denton recommends ¼
inch Swagelok fitting. Be certain to use ferrules that match your tubing type (plastic, metal,
etc…).
Connect Nitrogen or other inert gas to the Vent inlet.
Recommended for clean inert atmosphere for venting the chamber.
Some users of the Desk V will be satisfied with system operation using room air for
venting the chamber. If room air is to be used, no connection is required.
Gas inlet fitting is 1/8”FNPT.



NOTE:FortheDeskV TSC,however,argonisrequired.Theargoncylindershould
haveapressure-reducingregulatortoprovide2-to 10-psigtotheunit. Tygontubingis
acceptable.
NOTE:Nitrogenfromadrysourceis recommended. Thenitrogencylindershould
haveapressure-reducingregulatortoprovide2-to 10-psigtotheunit. Tygontubingis
acceptable.

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

CHAMBER PREPARATIONS
The Baseplate and Gaskets are cleaned using isopropyl alcohol and a lint-free cloth. The
Gaskets are lubricated very lightly with vacuum grease. Sufficient grease has been applied
when a finger is barely able to slide around the gasket.
The Chamber is placed on the baseplate; and the Sputter Head is positioned on the
Chamber.
Check manual shutter movement (if provided). The two segments should overlap when
positioned at back of chamber. This is the open position for sputtering. Rotate knob
clockwise to spread the segments, and then move the spread shutter back over specimen
pedestal. This is the position for etching.

Copyright Denton Vacuum, LLC. All Rights Reserved. Version 9142016da 19
MECHANICAL PUMP INSTALLATION
The mechanical pump installed
Step #1: Installation of vacuum hose to the pump
1. 2. 3.
4. 5. 6.
7. 8.