EBARA ESA300W User manual

EBARA CORPORATION
ESA300_STD_B_E_Rev.0
INSTRUCTION MANUAL
MULTI-STAGE DRY VACUUM PUMP
MODEL ESA300W
MODEL ESA300W-H
STANDARD MODEL
200V（50Hz）, 200-220V（60Hz）
380V（50Hz）, 400-440V（60Hz）
440V（50Hz）, 400-480V（60Hz）
Caution:
Please read and understand this INSTRUCTION MANUAL thoroughly
before using this equipment.
Be sure to keep this INSTRUCION MANUAL on hand for future
reference
To Facility and Tool Manufactures:
Be sure to distribute this INSTRUCTION MANUAL to all end-user
personnel actually operation this equipment.
※「Model ООО」 in this INSTRUCTION MANUAL is our model code
ISSUEDBYPRECISIONMACHINERYCOMPANY

EBARA CORPORATION
Do not reproduce or reprint any portion of this manual without permission.
Manufacturer reserves the right to discontinue or change any specifications or
designs without notice and without incurring obligations.
Model OOO in this catalog is our model code.
All rights reserved, copyright EBARA Corporation.

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EBARA CORPORATION
Environmental Basic Policies
It is our responsibility, as people of the earth, to protect nature's irreplaceable
treasures and to pass them on to future generations.
As we undertake our business activities, we will establish environmental
management systems and implement ongoing improvements and reviews, while
striving to promote harmony between technology and nature, prevent
environmental pollution, and improve the overall results of our environmental
management activities. We are aware that environmental protection and
management activities are the responsibility of all managers and employees of the
Corporation, and each person will demonstrate this awareness when carrying out
his or her duties.
We will widely publicize these basic policies to regional societies and the general
public and work to make Ebara's position on the environment clear to society in
general.

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EBARA CORPORATION
Safety Information
It is essential that those operating this pump should have the knowledge to identify
and avoid hazardous conditions associated with the pump.
Improper or rash operation may cause dangerous accidents and serious injuries.
Before installation and operation, the operator should first have a good knowledge
of the pump construction, operation procedure, and its hazards.
The operator should read through this instruction manual and other documents
issued by EBARA in detail.
If you have any questions on pump operation, safety, or maintenance, please
does not hesitate to contact EBARA directly.
Three terms designating the level of hazard are used in this manual.
DANGER Indicates an imminently hazardous situation that, if not avoided, will
result in death or serious injury.
WARNING Indicates a potentially hazardous situation that, if not avoided, could
result in death or serious injury.
CAUTION Indicates an imminently hazardous situation that, if not avoided,
may result in minor or moderate injury.

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EBARA CORPORATION
Important Prior Warnings
DANGER Keep out from under the pump when lifted.
Only qualified personnel shall unload and lift the pump.
Keep pump at horizontal position when lifted.
Do not lift the pump without eyebolt spacer.
WARNING Be careful not to overturn the pump when pushing and pulling it
sideways, because the pump is narrow in comparison to its height.
WARNING Only a qualified electrician should perform electrical works,
observing all national and local electrical regulations.
WARNING Interrupt Earth Leakage Breaker (ELB) before starting on Cut and lock out power
before beginning wiring and or maintenance work.
Do not switch on the power supply to the pump until work is completed and pump
and piping are returned to safe operating condition.
WARNING Supply N2 gas to the exhaust piping when necessary to dilute the flammable or
toxic gas down to a safe concentration.
WARNING Purge with sufficient N2 gas before removing and cleaning the vacuum and
exhaust piping.
Do not let inflammable, toxic or dangerous materials disperse and guard against
contact with the human body.
Always work in a location with an escape route in an emergency.
WARNING Do not use the pump for another process without a previous overhaul. Gases or
reaction products remaining in the pump will react and lead to accidents with the
formation of large amounts of byproducts.
WARNING Pump oil may be contaminated with process byproducts. Treat it as a hazardous
waste. See Table 3.1 for oil quantities.

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EBARA CORPORATION
WARNING Exhaust from pumps handling process gases should be connected to an
appropriate exhaust abatement system that is equipped with discharge quality
monitors to provide warnings and shut down the process gas flow if gas
concentrations exceed allowable limits.
WARNING Check for gas leaks after installing and maintaining the piping.
Gas leaks will result in the discharge of harmful and dangerous substances and
in abnormal reactions due to the ingress of air into the pump. When checking for
gas leaks by pressurization, please pressurize by less than 0.05 MPa into the
purge port and do check.
WARNING Do not alter the pump member nor change any parts without EBARA’s consent or
approval.
WARNING The pump casing and exhaust piping become extremely hot during operation and
remain hot for some time after stopping.
B
e sure that pump and exhaust piping do not come in contact with humans or
inflammable substances.
Do not remove pump enclosure panels during operation
WARNING Check Safety Interlock functions periodically (every 6 months) to confirm correct
operation.
WARNING Disposal of process by-products shall be strictly in accordance with all local and
national environmental and safety regulations
WARNING Disposal of Printed circuit board containing lithium battery shall be strictly in
accordance with all applicable local and national environmental regulations.
WARNING In designing the dry pumps, Ebara does not assume risks caused by hazardous
chemical reactions resulted from simultaneous injection or mixture of multiple
process gases in the pumps, and the pump is not equipped with a protection
against the dangers from such pump usage. The tool suppliers and users must
pay attention not to simultaneously inject or mix those gases.
WARNING Do not perform a withstand voltage test.Failure to comply could
result in damage to the sensitive devices.

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EBARA CORPORATION
CAUTION Never operate the pump without pump cover for safety.

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EBARA CORPORATION
The following safety warning labels are attached to pump covers.
1. High temperature warning
2. Hazardous voltage warning
3. Hazardous materials warning
4. Electric charge mark
5. Hazardous weight danger
1. High temperature warning
Hot surface may burn or cause injury.
Allow the piping and casing to cool before servicing.
2. Hazardous voltage warning
Hazardous Voltage may shock, burn, or cause death.
Turn power off and lockout before servicing.
WARNING 警 告
Hot Surfaces
Will burn skin on contact.
Allow piping and casing to cool
Before servicing
高温部あり。接触すると火傷をする危険があります。
配管・ケーシングが冷えてからメンテナンスをして下さい。
C-7110-312-0001
WARNING 警 告
Hazardous Voltage
Contact will cause injury or death by
electrical shock. Disconnect
line power before servicing.
危険電圧部あり。接触すると重傷または死亡の
危険があります。電源供給を止めてブレーカを切った状態で
メンテナンスをして下さい。
C-7110-313-0001

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EBARA CORPORATION
3. Hazardous materials warning
In case of hazardous materials are handled. Run the pump only with
N2 gas purge before servicing. Take adequate measures against
dangerous reaction and contact with human body.
4. Electric charge mark
5. Hazardous weight danger
Heavy weight may cause severe injury or death due to overturning
or falling pump. Keep out from under the lifted pump.
Raise all adjuster-feet fully when moving.
WARNING 警 告
Hazardous Materials
Exposure to air may cause spontaneous fire or explosion.
Inhalation or skin absorption will cause severe injury or
death by poisoning.
Purge thoroughly with nitrogen for at least 30 minutes
before servicing. Use personal protective equipment
a
pp
ro
p
riate to the materials to
p
revent ex
p
osure.
危険物質あり。
危険反応・人体への接触により重傷または死亡の危険があります。Ｎ２パージのみで３０分以上
空運転を行なってから、危険物質のＭＳＤＳに従ってメンテナンスをして下さい。
C-7110-314-0001
危 険
Heavy Object
Can cause impact injury through falling or tipping.
Use appropriate, properly rigged lifting equipment and keep from
under suspended pump. Raise all adjuster feet fully when moving.
重量物。落下及び転倒により重傷または死亡の危険があります。
吊り上げたポンプの下に入らないで下さい。
移動時は全アジャスタフットを上限まであげて下さい。
C-7110-316-0001

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EBARA CORPORATION
Standard Limited Warranty
The terms of this Warranty limit the liability of EBARA CORPORATION.
Please read it carefully.
Duration
For new pumps, the Warranty period shall be one (1) year from the date of
commencing operation by user or 18 months from shipment by EBARA,
whichever comes first. This Warranty does not apply to service beyond these time
periods.
For overhauled pumps, the warranty period shall be six (6) months from shipment
by EBARA.
Coverage
For the duration of the Warranty period, EBARA warrants this ESA pump from
failure due to defects in materials or workmanship. For such failures, EBARA will,
at its option, either replace or repair the pump free of charge
Such repair or replacement will not extend the duration of the warranty beyond the
original period.
For repairs not covered under this Warranty, EBARA will charge the customer for
parts and labor.
Exclusions and Limitations
This Warranty does not cover the following:
1. Failure due to operating the pump in a manner or under conditions other than
as described in the instruction manual.
2. Failure due to corrosion, byproducts or foreign material entering the pump.
3. Failure due to fire, flood, earthquake, Acts or God, Acts of War or other
circumstances beyond EBARA’s control.
Disassembly or repair of the pump by parties other than EBARA or
EBARA-authorized suppliers will void this Warranty.
EBARA’s liability is limited to repair or replacement of the pump under Warranty.
EBARA accepts no liability for consequential damages, including injury to
personnel and damage to facilities, tools or product.
EBARA makes no Warranty of merchanability, beyond statuatory requirements, or
of fitness for a specific purpose.

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EBARA CORPORATION
Contents
Environmental Basic Policies..............................................................................1
Safety Information...............................................................................................2
Important Prior Warnings ....................................................................................3
Standard Limited Warranty .................................................................................8
Contents ............................................................................................................. 9
1. Foreword.......................................................................................................11
2. Introduction ...................................................................................................11
2.1 Introduction.............................................................................................11
2.2 Environmental Concerns ........................................................................12
3. Product Description....................................................................................... 13
3.1 Outline ....................................................................................................13
3.1.1 Pump Module.......................................................................................13
3.1.2 N2 Gas ............................................................................................13
3.1.3 Cooling Water.................................................................................. 14
3.1.4 Exhaust ...........................................................................................14
3.2 Control System .......................................................................................14
3.2.1 Warning ...........................................................................................14
3.2.2 Operation Status Control ................................................................. 15
3.3 The way of pump moving........................................................................15
3.3.1 Preparation...................................................................................... 15
3.3.2 Moving method................................................................................16
3.4 Detailed Specifications ...........................................................................17
4. Installation.....................................................................................................22
4.1 Movement and Fixation ..........................................................................22
4.1.1 Location...........................................................................................22
4.1.2 Caster and adjustment foot ............................................................. 22
4.2 Piping......................................................................................................24
4.2.1 Vacuum and Exhaust Piping............................................................24
4.2.2 Cooling Water Piping....................................................................... 25
4.2.3 N2 Gas Piping .................................................................................26
4.2.4 Ventilation Duct ............................................................................... 27
4.3 Electrical Wiring......................................................................................28
4.3.1 Grounding........................................................................................28
4.3.2 Power Supply Wiring .......................................................................29
4.3.3 Control Signal Wiring....................................................................... 30
5. Power Supply for the Options .......................................................................33

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EBARA CORPORATION
6. LCD Controller .............................................................................................34
6.1 LCD Outline ............................................................................................34
6.2 LCD Indication ........................................................................................35
6.3 Setting the operational mode.................................................................. 39
6.3.1 Setting the pump operation control mode........................................41
6.3.2 Setting the DIP switch ..................................................................... 41
6.3.3 Setting the pump running mode ......................................................42
6.3.4 Setting the normal rotational speed ................................................42
6.3.5 Setting the low rotational speed......................................................42
6.3.6 Setting the WARNING value for the pump N2 flow.........................43
6.3.7 Setting the WARNING value for the back pressure (option)........... 43
6.4 Dip Switch..............................................................................................44
6.5 DIP Switch setting display ..................................................................... 48
6.6 Starting/stopping the pump with the LCD controller...............................49
7. Operation ......................................................................................................50
7.1 Before Starting........................................................................................50
7.2 START/STOP .........................................................................................52
7.2.1 LOCAL (Pump Side) Start/Stop ...........................................................53
7.2.2 REMOTE Start/Stop ............................................................................54
7.2.3 COMMUNICATION Start/Stop.............................................................55
8. Maintenance and Inspection .........................................................................56
8.1 Internal energies.....................................................................................56
8.1.1 Power source ...................................................................................56
8.1.2 Cooling water ...................................................................................56
8.1.3 Nitrogen gas.....................................................................................56
8.2 Routine Inspection..................................................................................57
8.3 Vacuum and Exhaust Piping................................................................... 59
8.4 Lubricant Oil ...........................................................................................60
8.5 Spare (Maintenance) Parts List .............................................................. 64
8.6 List of wastes during maintenance.......................................................... 65
8.7 Overhaul ................................................................................................. 66
9. Disconnection and Transportation ...............................................................67
10. Troubleshooting .........................................................................................70
10.1 Troubleshooting (1) Basic trouble ....................................................... 70
10.2 Troubleshooting (2) WARNING ..........................................................72
10.3 Troubleshooting (3) ALARM ............................................................... 74
10.4 Troubleshooting (4) Option .................................................................. 77

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EBARA CORPORATION
1. Foreword
We appreciate that you have selected an EBARA dry vacuum pump Model
ESA300W. This pump has been manufactured with much care and attention so
that it can be operated safely and satisfactorily.
Incorrect operation will result in lack of performance and cause accidents and
injuries to personnel.
[NOTE] This instruction manual contains all necessary information on operation
and maintenance of the pump.
Be sure to operate the pump correctly in accordance with these
instructions to ensure a long service life.
Keep this instruction manual in a suitable place for immediate reference
whenever needed.
2. Introduction
2.1 Introduction
Check the following items on receipt of the pump package.
(1) Check that the nameplate affixed to the outer cover of the pump to confirm that
the pump supplied agrees with your order.
Check the accessories against the packing list and the previously submitted
drawings and documents to confirm that the all ordered accessories have
been supplied.
(2) Check whether damage has occurred or screws/bolts have worked themselves
loose in transit.
CAUTION Notify EBARA without delay when damage is discovered or when components
are missing. Do not use when a leak is present as this will result in accident.
(3) Store the pump in a dry and clean place if it is not installed at once after
delivery.
Temperature : 5 – 40 °C
Humidity : 80 % or less
(4) Do not stack the pump. Pump must be placed in an upright position.

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EBARA CORPORATION
2.2 Environmental Concerns
Handling or operating the unit other than specified may induce adverse impacts on the
environment. Follow the descriptions below to handle, operate, and maintain the unit.
(1) Ask an authorized waste-disposal company to dispose packing materials from
uncrating according to laws and ordinances applicable to the waste.
(2) Failure to do the unit maintenance (including overhaul) may trigger accidents
causing injury or death, unit troubles, or environmental pollution. Plan the
maintenance and perform it periodically to operate the unit efficiently.
(3) To dispose the unit, follow effective laws and ordinances applicable in the area
where the unit is installed.
(4) To dispose the lubricant oil and chemicals, follow effective laws and
ordinances applicable in the area where the unit is installed.
WARNING If the pump becomes damaged during shipment or if parts are missing,
immediately contact EBARA. If a leaking or damaged product is used, an accident
resulting in injury or death could occur or the product could become further
damaged. Even if leakage occurs, take measures to ensure they will not be
directly discharged from the site, as such leakage also wastes resources.
CAUTION If the product is not to be immediately installed, store it in a clean, dry location.

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EBARA CORPORATION
3. Product Description
3.1 Outline
This dry vacuum pump has a compact design and includes various sensors and
controls to enhance reliability and operation.
3.1.1 Pump Module
The pump is a roots type vacuum pump which rotates a pair of non-contact
multi-stage rotors synchronized by timing gears. In high-capacity units, a Booster
Pump (BP) is connected in series with the Main Pump (MP) are connected in
series for ventilation.
The timing gears and bearings are enclosed in a compartment that is independent
of the casing. For lubrication Perfluoro-Polyether (PFPE) oil and grease are used.
The pump is factory filled with lubrication oil. Use only the recommended
lubrication oil grades shown in specification Tables 3.1 for replenishing or
replacing.
3.1.2 N2 Gas
Introduce nitrogen gas to dilute the hazardous gases to an unharmful level.
Properly connect the nitrogen gas line to the purge port provided according to the
instructions in Table 3.1 and the descriptions in Section 4.2.3. In the cases the
gas concentration may become higher than the specified for safe gas exhaust,
introduce the nitrogen gas to lines to the exhaust outlet. The tool user shall
provide the purge port for this purpose.
N2 gas is also required to supply to seal the shaft section. This protects the
penetration to bearing section, such as corrosive gas.
To reduce pump corrosion due to process gas or accumulation of reaction
by-products, N2 gas is supplied to each pump component as dilution purge gas.
Stopping the dilution N2 with a selector valve can save N2 gas, when process does
not produce corrosion and reaction by-products.
The correct amount of N2 gas is supplied for those two types of purge operation,
by adjusting the regulation pressure to the specified value.
The nitrogen gas selector is locating on the right side of the unit, facing the LCD
controller and other utility connectors.

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EBARA CORPORATION
3.1.3 Cooling Water
Because the pump compresses gas from a vacuum to atmospheric pressure,
compression heat is generated. Therefore cool the motor and jacket at the bottom
of the casing with cooling water.
The cooling water connector takes the form of a coupler for easy connection and
disconnection.
3.1.4 Exhaust
A check valve is provided as a standard accessory to prevent reverse flow of gas
from the exhaust through the pump to the vacuum chamber when pump is
stopped.
3.2 Control System
This pump has a built-in measuring unit consisting of an Earth Leakage Breaker
(ELB), an Electro-magnetic switch and a control circuit.
To improve reliability and safety, a sensor monitors the condition of each utility
and pump section.
During pump operation all operating conditions are monitored, including power
supply, cooling water flow, N2 gas flow and motor coil temperature, motor speed,
and motor current.
Pump operation “rides through” a transient power outage up to 1 second long.
(Two-second ride through is available as an option.)
3.2.1 Warning
To assure the reliability of the pump as a vacuum exhaust system, the pump
protection system generates two levels of alarm: WARNING and ALARM.
A WARNING signal is generated when pump operation exceeds the normal range.
It therefore only draws attention that the normal operating values are not adhered
to but does not signify that danger is imminent. The pump will continue to operate
in this condition.
An ALARM signal output is generated and the pump will stop automatically when
the upper mechanical safety limit is reached during pump operation.

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EBARA CORPORATION
When a ALARM output is suddenly generated, while the plant unit is operational,
an WARNING signal will be generated to ensure that the plant operation is not
discontinued. This enables the operator to check the pump after the equivalent of
one cycle has been completed.
Be sure to contact EBARA Corporation for details on checking the WARNING and
ALARM setting conditions.
• Note that the warning indications of the Model ESA300W dry pump are
different from the conventional pumps like as UERR, A, AA, AAS series, based
on SEMI standard E73.
3.2.2 Operation Status Control
The sensor data are displayed on the LCD display provided on the controller to
facilitate operation status control and daily inspection.
All WARNING and ALARM signals are displayed on the LCD display. For remote
operation and monitoring, the signals are available as individual and group
outputs.
3.3 The way of pump moving
3.3.1 Preparation
Before pump moving, all adjuster feet shall be raised fully at four places.
In case of being not raised fully, pump may be tripped over by obstacle on floor.
fully
raised
Adjuster
Caster
UERR,A,AA, and
AAS
Model
ESA300W
Alarm 1
(Pump operation continued) ALARM WARNING
Alarm 2
(Pump stop) TRIP ALARM

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EBARA CORPORATION
3.3.2 Moving method
Move pump slowly by pushing eyebolt toward direction A. Be sure not to be caught by toes. If
pump needs to be moved toward direction B in order to be set at a corner or narrow spaces, two
persons shall move the pump by pushing its terminal portion alternately as directed below.
If pump needs to be moved on steps or ditches, spread steel plate or the like which can sustain the
pump weight over the steps / ditches and pump shall be moved on it by two persons with care.
Steel Plate
If pump should lose its balance when moving and start tripping over, never try to sustain the pump,
get away from the pump immediately.

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EBARA CORPORATION
3.4 Detailed Specifications
The following tables and figures should be consulted for pump specification,
dimension and performance details.
Table 3.1 Specification
Model Model ESA300W Model ESA300W-H
Pumping Speed(50/60Hz) 28000/30000 L/min
Ultimate Pressure 0.53Pa 1.3Pa
Gas Inlet ISO100
Connection Gas Outlet NW 40
Max Power 19.5 kW
Approx. power
at ultimate pressure 6.6kW :50Hz , 7.3kW :60Hz
Connection Coupler (Rc 3/8)
Pressure Supply : Max. 0.5Mpa
[Gauge Press.] Differential Press. : Min. 0.25Mpa
Flow rate 6-9 L/min
Cooling
Water
Temperature Max. 30 deg C
Connection 1/4” Tube Fitting (Same as Swagelock or equivalent)
N2 Pressure Supply : 0.15-0.7Mpa
Gas [Gauge Press.] [Setting : 0.09-0.12Mpa]
Approx. Flow rate* 7.5～10.5 Pam3/s 78～82 Pam3/s
Duct Connection d50 mm×L50 mm
Venti- Pressure -196 Pa
Utilit
y
lation Approx. Flow rate 0.5 m3/min
Lubrication
Oil Brand BARRIERTA J100ES (NOK)
Quantity 1.2 L
Approx. Weight 700kg
[200V model] 3 Phase , 200V (50Hz), 200-220(60Hz)
[400V model] 3 Phase , 380-400V (50Hz), 400-440(60Hz)
Phase/Volt/Freq
[460V model] 3 Phase , 440V (50Hz), 440-480(60Hz)
[200V model] 100A trip
[400V model] 50A trip
Power
Earth leakage
Breaker
[460V model] 50A trip
Supply Power capacity 23.7 kVA
[200V model] M8 Crimp-style circle terminal
[400V model] M5 Crimp-style circle terminal
Connection
[460V model] M5 Crimp-style circle terminal
Control Signal D-sub 15Pin + D-sub 25Pin

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EBARA CORPORATION