EBARA ESA500W User manual

PM40U EBARA CORPORATION
ESA500_STD_B_E_Rev.0
INSTRUCTION MANUAL
MULTI-STAGE DRY VACUUM PUMP
MODEL ESA500W
STANDARD MODEL
200V（50Hz）, 200-220V（60Hz）
440V（50Hz）, 400-480V（60Hz）
Caution:
Please read and understand this INSTRUCTION MANUAL thoroughly
before using this equipment.
Be sure to keep this INSTRUCION MANUAL on hand for future
reference
To Facility and Tool Manufactures:
Be sure to distribute this INSTRUCTION MANUAL to all end-user
personnel actually operation this equipment.
「Model ООО」 in this INSTRUCTION MANUAL is our model code
ISSUED BY PRECISION MACHINERY COMPANY

Do not reproduce or reprint any portion of this manual without permission.
Manufacturer reserves the right to discontinue or change any specifications
or designs without notice and without incurring obligations.
Model OOO in this catalog is our model code.
All rights reserved, copyright EBARA Corporation.

（i）
PM10U EBARA CORPORATION
Environmental Basic Policies
It is our responsibility, as people of the earth, to protect nature's irreplaceable treasures and
to pass them on to future generations.
As we undertake our business activities, we will establish environmental management
systems and implement ongoing improvements and reviews, while striving to promote
harmony between technology and nature, prevent environmental pollution, and improve the
overall results of our environmental management activities. We are aware that environmental
protection and management activities are the responsibility of all managers and employees of
the Corporation, and each person will demonstrate this awareness when carrying out his or
her duties.
We will widely publicize these basic policies to regional societies and the general public and
work to make Ebara's position on the environment clear to society in general.

（ii）
PM10U EBARA CORPORATION
Safety Information
It is essential that those operating this pump should have the knowledge to identify and avoid
hazardous conditions associated with the pump.
Inadequate or rash operation may cause dangerous and serious accidents.
Before installation and operation, the operator should first have a good knowledge of the
pump construction, operation procedure, and its hazards.
The operator should read through this instruction manual and other documents issued by
EBARA in detail.
If you have any questions on pump operation, safeties, and maintenance, please do not
hesitate to contact EBARA directly. Refer to Global network for contact address.
Three terms designating the level of hazard are used in this manual.
DANGER Indicates an imminently hazardous situation which, if not avoided,
will result in death or serious injury.
WARNING Indicates a potentially hazardous situation which, if not avoided,
could result in death or serious injury.
CAUTION Indicates an imminently hazardous situation which, if not avoided,
may result in minor or moderate injury.
This term may also be used as a warning for situations liable to
damage to equipment.

（iii）
PM10U EBARA CORPORATION
Important Prior Warnings
DANGER Keep out from under the pump when lifted.
Only qualified personnel shall unload and lift the pump.
Keep pump at horizontal position when lifted.
Do not lift the pump without eyebolt spacer.
WARNING Be careful not to overturn the pump when pushing and pulling it
sideways, because the width of the pump is small to its height.
WARNING All electrical works must be performed by only a qualified
electrician.
All national and local electrical regulations must be observed.
WARNING Interrupt Earth Leakage Breaker (ELB) before starting on wiring
and maintenance work.
Do not switch on the power supply to the pump until work is
completed.
WARNING Supply N2 gas to the exhaust piping when necessary to dilute
the inflammable or toxic gas up to a safe concentration.
WARNING Purge with sufficient N2 gas before removing and washing the
vacuum and exhaust piping.
Do not let inflammable, toxic or dangerous materials
disperse and guard against contact with the human body.
Always work in a location with an escape route in an emergency.
WARNING Do not use the pump for another process without a previous
overhaul. Gases or reaction products remaining in the pump will
react and lead to accidents with the formation of large amounts of
products.
WARNING Pump oil may be contaminated with process byproducts. Treat it as
a hazardous waste. See Table 3.1 for oil quantities.

（iv）
PM10U EBARA CORPORATION
WARNING To avoid any hazard induced by toxicity, flammability and explosiveness
of the process gases used in the tool, be sure to operate the tool
according to the operations safety guidelines supplied by tool suppliers.
Appendix 6 lists typical process gases used in a
semiconductor-processing tool. However, details concerning
the tool gases and other concerns specific to your tool should be
directed to the respective tool suppliers.
WARNING Check for gas leaks after installing and maintaining the piping.
Gas leaks will result in the discharge of harmful and dangerous
substances and in abnormal reactions due to the ingress of air
into the pump. When checking for gas leaks by pressurization,
please pressurize by less than 0.05 MPa into the purge port and
do check.
WARNING Do not alter the pump member nor change any parts without the
EBARA's consent or approval.
WARNING The pump casing and exhaust piping become extremely hot
during operation and for some time after stopping.
Be sure that pump and exhaust piping do not come in contact
with humans or inflammable substances.
Do not remove the pump cover during operation.
WARNING Check Safety Interlock functions periodically (every 6 months) to
confirm the interlocks will work correctly.
CAUTION Disposal of process by-products shall be strictly in accordance
with all local and national environmental and safety regulations.
CAUTION Disposal of Printed circuit board containing Lithium battery shall
be strictly in accordance with all local and national environmental
and applicable regulations.

（v）
PM10U EBARA CORPORATION
WARNING In designing the dry pumps, Ebara does not assume risks
caused by hazardous chemical reactions resulted from
simultaneous injection or mixture of multiple process gases in
the pumps, and the pump is not equipped with a protection
against the dangers from such pump usage. The tool
suppliers and users must pay attention not to simultaneously
inject or mix those gases.
WARNING Do not perform a withstand voltage test. Failure to comply could
result in damage to the sensitive devices.
CAUTION Never operate the pump without pump cover for safety.

（vi）
PM10U EBARA CORPORATION
The following safety warning labels are attached to pump covers.
1. High temperature warning
2. Hazardous voltage warning
3. Hazardous materials warning
4. Electric charge mark
5. Hazardous weight danger
1. High temperature warning
Hot surface may burn or cause injury.
Allow the piping and casing to cool before servicing.
2. Hazardous voltage warning
Hazardous Voltage may shock, burn, or cause death.
Turn power off and lockout before servicing.
WARNING 警 告
Hot Surfaces
Will burn skin on contact.
Allow piping and casing to cool
Before servicing
高温部あり。接触すると火傷をする危険があります。
配管・ケーシングが冷えてからメンテナンスをして下さい。
C-7110-312-0001
WARNIN 警 告
Hazardous Voltage
Contact will cause injury or death by
electrical shock. Disconnect
line power before servicing.
危険電圧部あり。接触すると重傷または死亡の
危険があります。電源供給を止めてブレーカを切った状態で
メンテナンスをして下さい。
C-7110-313-0001

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PM10U EBARA CORPORATION
3. Hazardous materials warning
In case of hazardous materials are handled. Run the pump only with
N2 gas purge before servicing. Take adequate measures against
dangerous reaction and contact with human body.
4. Electric charge mark
5. Hazardous weight danger
Heavy weight may cause severe injury or death due to overturning
or falling pump. Keep out from under the lifted pump.
Raise all adjuster-feet fully when moving.
WARNIN
警 告
Hazardous Materials
Exposure to air may cause spontaneous fire or explosion.
Inhalation or skin absorption will cause severe injury or
death by poisoning.
Purge thoroughly with nitrogen for at least 30 minutes
before servicing. Use personal protective equipment
a
pp
ro
p
riate to the materials to
p
revent ex
p
osure.
危険物質あり。
危険反応・人体への接触により重傷または死亡の危険があります。Ｎ２パージのみで３０分以上
空運転を行なってから、危険物質のＭＳＤＳに従ってメンテナンスをして下さい。
C-7110-314-0001
危 険
Heavy Object
Can cause impact injury through falling or tipping.
Use appropriate, properly rigged lifting equipment and keep from
under suspended pump. Raise all adjuster feet fully when moving.
重量物。落下及び転倒により重傷または死亡の危険があります。
吊り上げたポンプの下に入らないで下さい。
移動時は全アジャスタフットを上限まであげて下さい。
C-7110-316-0001

（viii）
PM10U EBARA CORPORATION
Location label

（ix）
PM10U EBARA CORPORATION
Standard Limited Warranty
The terms of this Warranty limit the liability of EBARA CORPORATION. Read it carefully.
Duration
For new pumps, the Warranty period shall be one (1) year from the date of commencing
operation by user or 18 months from shipment by EBARA, whichever comes first. This
Warranty does not apply to service beyond these time periods.
For overhauled pumps, the warranty period shall be six (6) months from shipment by EBARA.
Coverage
For the duration of the Warranty period, EBARA warrants this ESA pump from failure due to
defects in materials or workmanship. For such failures, EBARA will, at its option, either
replace or repair the pump free of charge
Such repair or replacement will not extend the duration of the warranty beyond the original
period.
For repairs not covered under this Warranty, EBARA will charge the customer for parts and
labor.
Exclusions and Limitations
This Warranty does not cover the following:
1. Failure due to operating the pump in a manner or under conditions other than as
described in the instruction manual.
2. Failure due to corrosion, byproducts or foreign material entering the pump.
3. Failure due to fire, flood, earthquake, Acts or God, Acts of War or other circumstances
beyond EBARA’s control.
Disassembly or repair of the pump by parties other than EBARA or EBARA-authorized
suppliers will void this Warranty.
EBARA’s liability is limited to repair or replacement of the pump under Warranty. EBARA
accepts no liability for consequential damages, including injury to personnel and damage to
facilities, tools or product.
EBARA makes no Warranty of merchanability, beyond statuatory requirements, or of fitness
for a specific purpose.

（x）
PM10U EBARA CORPORATION
Contents
Environmental Basic Policies............................................................................... i
Safety Information............................................................................................... ii
Important Prior Warnings....................................................................................iii
Standard Limited Warranty ................................................................................ ix
Contents ............................................................................................................. x
1. Foreword.........................................................................................................1
2. Introduction..................................................................................................... 1
2.1 Introduction............................................................................................... 1
2.2 Environmental Concerns .......................................................................... 2
3. Product Description ........................................................................................3
3.1 Outline ......................................................................................................3
3.1.1 Pump Module ........................................................................................3
3.1.2 N2 Gas ..............................................................................................3
3.1.3 Cooling Water....................................................................................4
3.1.4 Exhaust .............................................................................................4
3.2 Control System ......................................................................................... 4
3.2.1 Warning.............................................................................................4
3.2.2 Operation Status Control...................................................................5
3.3 The way of pump moving.......................................................................... 5
3.3.1 Preparation........................................................................................5
3.3.2 Moving method..................................................................................6
3.4 Detailed Specifications ............................................................................. 7
4. Installation..................................................................................................... 11
4.1 Movement and Fixation .......................................................................... 11
4.1.1 Location...........................................................................................11
4.1.2 Caster and adjustment foot .............................................................11
4.2 Piping...................................................................................................... 13
4.2.1 Vacuum and Exhaust Piping ...........................................................13
4.2.2 Cooling Water Piping.......................................................................14
4.2.3 N2 Gas Piping .................................................................................16
4.2.4 Ventilation Duct ...............................................................................16
4.3 Electrical Wiring......................................................................................18
4.3.1 Grounding........................................................................................19
4.3.2 Power Supply Wiring .......................................................................20
4.3.3 Control Signal Wiring.......................................................................21
5. Power Supply for accessories....................................................................... 24

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PM10U EBARA CORPORATION
6. LCD Controller .............................................................................................. 25
6.1 LCD Outline ................................................................................................25
6.2 LCD Indication ........................................................................................ 26
6.3 Setting the operational mode.................................................................. 30
6.3.1 Setting the pump operation control mode........................................32
6.3.2 Setting the DIP switch .....................................................................32
6.3.3 Setting the pump running mode ......................................................33
6.3.4 Setting the BP normal rotational speed.........................................33
6.3.5 Setting the rotational speed in the LOW SPEED mode...................33
6.3.6 Setting the pump N2 flow ................................................................34
6.3.7 Setting the WARNING value for the back pressure (option)............ 35
6.4 Dip Switch............................................................................................... 36
6.5 Dip Switch setting display ....................................................................... 40
6.6 Starting/stopping the pump with the LCD controller................................ 41
7. Operation...................................................................................................... 42
7.1 Before Starting........................................................................................ 42
7.2 START/STOP ......................................................................................... 44
7.2.1 LOCAL Start/Stop................................................................................ 45
7.2.2 REMOTE Start/Stop ............................................................................ 46
7.2.3 COMMUNICATION Start/Stop............................................................. 47
8. Maintenance and Inspection ......................................................................... 48
8.1 Internal energies..................................................................................... 48
8.1.1 Power source....................................................................................... 48
8.1.2 Cooling water....................................................................................... 48
8.1.3 N2 gas ................................................................................................. 48
8.2 Routine Inspection .................................................................................. 49
8.3 Vacuum and Exhaust Piping................................................................... 51
8.4 Lubricant Oil ...........................................................................................52
8.5 Spare (Maintenance) Parts List .............................................................. 55
8.6 List of wastes during maintenance ......................................................... 56
8.7 Overhaul ................................................................................................. 57
9. Disconnection and Transportation ................................................................ 58
10. Troubleshooting .......................................................................................... 61
10.1 Troubleshooting (1) Basic trouble ......................................................... 61
10.2 Troubleshooting (2) WARNING ............................................................ 63
10.3 Troubleshooting (3) ALARM ................................................................. 65
10.4 Troubleshooting (4) Option ................................................................... 68

P.1
PM10U EBARA CORPORATION
1. Foreword
We appreciate that you have selected an EBARA dry vacuum pump model
ESA500W. This pump has been manufactured with much care and attention so
that it can be operated safely and satisfactorily.
Incorrect operation will result in lack of performance and cause accidents and
injuries to personnel.
[ NOTE ] This instruction manual contains all necessary information on
operation and maintenance of the pump.
Be sure to operate the pump correctly in accordance with these
instructions to ensure a long service life.
Keep this instruction manual in a suitable place for immediate
reference whenever needed.
2. Introduction
2.1 Introduction
Check the following items on receipt of the pump package.
(1) Check that the nameplate affixed to the outer cover of the pump to confirm
that the pump supplied agrees with your order.
Check the accessories against the packing list and the previously submitted
drawings and documents to confirm that the all ordered accessories have
been supplied.
(2) Check whether damage has occurred or screws/bolts have worked
themselves loose in transit.
CAUTION Notify EBARA without delay when damage is discovered or
when components are missing. Do not use when a leak is
present as this will result in accident.
(3) Store the pump in a dry and clean place if it is not installed at once after
delivery.
Temperature : 5-40°C
Humidity : 80% or less
(4) Do not stack the pump. Pump must be placed in an upright position.

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PM10U EBARA CORPORATION
2.2 Environmental Concerns
Handling or operating the unit other than specified may induce adverse impacts on the
environment. Follow the descriptions below to handle, operate, and maintain the unit.
(1) Ask an authorized waste-disposal company to dispose packing materials from
uncrating according to laws and ordinances applicable to the waste.
(2) Failure to do the unit maintenance (including overhaul) may trigger accidents
causing injury or death, unit troubles, or environmental pollution. Plan the
maintenance and perform it periodically to operate the unit efficiently.
(3) To dispose the unit, follow effective laws and ordinances applicable in the area
where the unit is installed.
(4) To dispose the lubricant oil and chemicals, follow effective laws and
ordinances applicable in the area where the unit is installed.
WARNING If the pump becomes damaged during shipment or if parts are missing,
immediately contact EBARA. If a leaking or damaged product is used, an
accident resulting in injury or death could occur or the product could become
further damaged. Even if leakage occurs, take measures to ensure they will not
be directly discharged from the site, as such leakage also wastes resources.
CAUTION If the product is not to be immediately installed, store it in a clean, dry location.

P.3
PM10U EBARA CORPORATION
3. Product Description
3.1 Outline
This dry vacuum pump has a compact design and includes various sensors and
controls to enhance reliability and operation.
3.1.1 Pump Module
The pump is a Roots type vacuum pump which rotates a pair of non-contact
multi-stage rotors synchronized by timing gears. In the unit, a Booster Pump
(BP) and the Main Pump (MP) are connected in series for ventilation.
The timing gears and bearings are enclosed in a compartment that is
independent of the casing. For lubrication Perfluoro-Polyether (PFPE) oil and
grease are used.
The pump is filled with lubrication oil. Use only the recommended lubrication oil
grades shown in specification Table 3.1 for replenishing or replacing.
3.1.2 N2 Gas
Introduce N2 gas to dilute the hazardous gases to an unharmful level. Properly
connect the N2 gas line to the purge port provided according to the instructions
in Table 3.1 and the descriptions in Section 4.2.3. In the cases the gas
concentration may become higher than the specified for safe gas exhaust,
introduce the N2 gas to lines to the exhaust outlet. The tool user shall provide
the purge port for this purpose.
N2 gas is also required to supply to seal the shaft section. This protects the
penetration to bearing section, such as corrosive gas.
To reduce pump corrosion due to process gas or accumulation of reaction
by-products, N2 gas is supplied to each pump component as dilution purge gas.
Stopping the dilution N2 with a selector valve can save N2 gas, when process
does not produce corrosion and reaction by-products.
The correct amount of N2 gas is supplied for those two types of purge operation,
by adjusting the regulation pressure to the specified value.
The N2 gas selector is locating on the right side of the unit, facing the LCD
controller and other utility connectors. It is under the outer cover.

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PM10U EBARA CORPORATION
3.1.3 Cooling Water
Because the pump compresses gas from a vacuum to atmospheric pressure,
compression heat is generated. Therefore cool the motor with cooling water.
The cooling water connector takes the form of a coupler for easy connection and
disconnection.
3.1.4 Exhaust
A check valve is provided as a standard accessory to prevent reverse flow of
gas from the exhaust through the pump to the vacuum chamber when pump is
stopped.
3.2 Control System
This pump havs a built-in measuring unit consisting of a Earth Leakage Breaker
(ELB), an electro-magnetic switch and a control circuit.
To improve reliability and safety, the condition of each utility and pump section is
monitored by a sensor.
During pump operation all operating conditions are monitored, including power
supply, cooling water flow, N2 gas flow, casing and motor coil temperature,
motor speed, and motor current.
Continuous operation is possible when there is a momentarily power failure of
1 sec or less.
3.2.1 Warning
To assure the reliability of the pump as a vacuum exhaust system, the pump
protection system generates two levels of alarm： WARNING and ALARM.
A WARNING signal is generated when pump operation exceeds the normal
range. It therefore only draws attention that the normal operating values are not
adhered to but does not signify that danger is imminent. The pump will continue
to operate in this condition.
An ALARM signal output is generated and the pump will stop automatically

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PM10U EBARA CORPORATION
when the upper mechanical safety limit is reached during pump operation.
When an ALARM output is suddenly generated, while the plant unit is
operational, a WARNING signal will be generated to ensure that the plant
operation is not discontinued. This enables the operator to check the pump after
the equivalent of one cycle has been completed.
Be sure to contact EBARA Corporation for details on checking the WARNING
and ALARM setting conditions.
• Note that the warning indications of the Model ESA500W dry pump are
different from the conventional pumps like as UERR, A, AA, AAS series,
based on SEMI standard E73.
3.2.2 Operation Status Control
The sensor data are displayed on the LCD display provided on the controller to
facilitate operation status control and daily inspection.
All WARNING and ALARM signals are displayed on the LCD display. For remote
operation and monitoring, the signals are available as individual and group
outputs.
3.3 The way of pump moving
3.3.1 Preparation
Before pump moving, all adjuster feet shall be raised fully at four places.
In case of being not raised fully, pump may be tripped over by obstacle on floor.
fully
raised
A
djuste
r
Caster
UERR,A,AA,
and AAS
Model
ESA500W
Alarm 1
(Pump operation continued) ALARM WARNING
Alarm 2
(Pump stop) TRIP ALARM

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PM10U EBARA CORPORATION
3.3.2 Moving method
Move pump slowly by pushing eye bolt toward direction A. Be sure not to be
caught by toes. If pump needs to be moved toward direction B in order to be set
at a corner or narrow spaces, two persons shall move the pump by pushing its
terminal portion alternately as directed below.
A
B
If pump needs to be moved on steps or ditches, spread steel plate or the like
which can sustain the pump weight over the steps / ditches and pump shall be
moved on it by two persons with care.
Steel Plate
If pump should lose its balance when moving and start tripping over, never try to
sustain the pump, get away from the pump immediately.

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PM10U EBARA CORPORATION
3.4 Detailed Specifications
The following tables and figures should be consulted for pump specification,
dimension and performance details.
Table 3.1 Specification
Model Model ESA500W
Pumping Speed (50 / 60Hz) 47000 / 50000 L/min
Ultimate Pressure 1.0 Pa
Gas Inlet ISO160
Connection Gas Outlet NW50
Approx. Power at Ultimate Pressure
(Motor Power)
5.1kW : 50Hz , 6.7kW ; 60Hz
33.2 kW
Connection Coupler(Rc3/8)
Pressure
[Gauge Press.]
Differential Press. : Min. 0.28MPa
Supply: Max. 0.5MPa
Flow rate 6 - 9 L/min
Cooling
Water
Temperature Max. 30 deg C
Connection 1/4” Tube Fitting(Same as Swagelok)
Pressure
[Gauge Press.]
Supply : 0.15 - 0.7MPa
[Setting : 0.09 - 0.12MPa]
N2
Gas
Approx. Flow rate 8.5 ～ 11.0 Pa m
3/s
Connection d 50 mm x L 50 mm
Pressure -196 Pa
Uti-li
ty
Duct
Venti-
Lation * Approx. Flow rate 0.5 m3/min
Brand BARRIERTA J100ES (NOK) Lubrication
Oil Quantity 1.5 L
Approx. Weight 750 kg
[200V Model] 3 Phase , 200V (50Hz), 200-220V (60Hz)
Phase/Volt/Freq. [460V Model] 3 Phase , 440V (50Hz), 440-480V (60Hz)
[200V Model] 175A trip
Current Rating [460V Model] 75A trip
Power capacity 41.3 kVA (50 / 60Hz)
[Breaker] ：M8 Crimp-style circle terminal
Power
Supply
Connection [Earth] ：M5 Crimp-style circle terminal
Control Signal D-sub 15 Pin + D-sub 25 Pin
[Note] * The ambient temperature of the pump installation place shall be 30
degrees of centigrade of lower.