Energetiq EQ-99X LDLS User manual

Model EQ-99X
LDLS™
Laser-Driven Light Source
Operation and Maintenance Manual
Revision 2September 30, 2015
Part Number DOC-6521

Copyright © 2014 Energetiq Technology Inc. All rights reserved.
Energetiq products are covered by US and foreign patents. All technical information, including
drawings, schematics and specifications contained in this manual are the property of Energetiq
and shall not be reproduced in whole or in part without the written consent of Energetiq. The
content of this manual is subject to change without notice.
Energetiq Technology Inc.
7 Constitution Way, Woburn, MA 01801 USA
Tel. [phone]
Fax [phone]
E-mail: [e-mail]
http://www.energetiq.com

Declaration of Conformity
We, the manufacturers
Energetiq Technology Inc.
7 Constitution Way
Woburn, Massachusetts 01801 USA
hereby declare that the product family
LDLS™Laser-Driven Light Source
Model EQ-9X Series High Brightness Broadband Light Source
is in conformity with the requirements of the following standards
EN 61010-1:2010 Safety Requirements for Electrical Equipment for Measurement, Control and
(3rd Edition) Laboratory Use: Part 1 –General Requirements
CISPR 11:2009 Industrial, scientific and medical equipment - Radio-frequency disturbance
+A1:2010 characteristics - Limits and methods of measurement
IEC61000-4-2:2001 Electrostatic Discharge Immunity
IEC61000-4-3:2010 Radiated Electromagnetic Field Immunity
IEC61000-4-4:2012 Electrical Fast Transient Burst Immunity
IEC61000-4-6:2008 Radio Frequency Common Mode Immunity
IEC61000-4-8:2009 Power Frequency Magnetic Field Immunity
EN61326-1:2006 Electrical equipment for measurement, control and laboratory use.
EMC requirements. General requirements
EN60825-1 (2007) Safety of laser products - Part 1: Equipment classification and
requirements
in accordance with the provisions of
2006/95/EC EU Low Voltage Directive
2004/108/EC EU Electromagnetic Compatability Directive.
Signed,
28 January 2014
Paul Blackborow, CEO Date
at Woburn, Massachusetts USA
CE Authorized Person in the Community:
Paul Laidler, Business Director (Machinery)
TÜV SÜD Product Service
Belasis Business Centre
Coxwold Way
Billingham TS23 4EA, UK
Tel. [phone]

Table of Contents
Chapter 1.................................................................................................................................1
General Information....................................................................................................1
Safety............................................................................................................................................... 1
Chapter 2.................................................................................................................................8
Description ....................................................................................................................8
General........................................................................................................................................... 8
System Description .................................................................................................................... 11
Power Supply Controller........................................................................................................... 12
Lamp House................................................................................................................................ 13
Chapter 3.............................................................................................................................. 16
Installation................................................................................................................... 16
Unpacking.................................................................................................................................... 16
Connections................................................................................................................................. 16
Installation Procedure................................................................................................................ 22
Water Cooling Installation for EQ-99-CAL ......................................................................... 23
Chapter 4.............................................................................................................................. 25
Operation.................................................................................................................... 25
Starting.......................................................................................................................................... 25
Stopping ....................................................................................................................................... 25
Chapter 5.............................................................................................................................. 27
Maintenance ................................................................................................................................ 27
EQ-99 SMA Fiber Cleaning Process...................................................................................... 27
Troubleshooting ......................................................................................................................... 31
Lamp Replacement .................................................................................................................... 32

EQ-99X Operation Manual Rev. 2 1
Chapter 1
GENERAL INFORMATION
Safety
WARNING
CAUTION
The EQ-99X emits dangerous levels of UV
radiation. Even short exposures to skin or eyes
may cause burns. Ensure that only authorized
personnel are in the vicinity of source during
operation. Personnel in vicinity of operating
source should wear protective eyewear, clothing,
and gloves. Lighted UV warning lights and signs
posted on doors to lab areas may help prevent
accidental exposure.
This unit emits ultraviolet (UV) radiation that is
harmful to humans. Avoid exposure to the
direct or reflected output beam. Make certain
that the appropriate output beam shields and
optics are in place prior to energizing the unit.
All interlocks must be satisfied prior to
operation; failure to do so may lead to
hazardous conditions.

2 EQ-99X Operation Manual Rev. 2
WARNING
General Precautions
The output beam from the EQ-99X should be blocked when not in use with an electronic
shutter or other appropriate beam blocking device. Due to the possibility of generating ozone
when ambient oxygen is exposed to short wavelength light, the beam should always be
enclosed in an appropriate beam pipe, tube, or enclosed space. We suggest purging any beam
transport space with dry nitrogen gas.
The EQ-99X source must also be cabled correctly and connected to a socket with a protective
earth ground prior to operation.
Refer to the Installation section of this manual in Chapter 3 for details of the facilities
connections.
Other than a bulb replacement, there are no user-serviceable parts inside the EQ-99X. For
any problems encountered during operation, please contact Energetiq Technology for
assistance. If there is a component failure, do not attempt to open the Power Supply
Controller or Lamp House enclosure of the EQ-99X.
The EQ-99X controller utilizes an internal Class
4 IR laser capable of causing severe injury to eyes
or skin. Do not open or attempt to service this
unit. Contact Energetiq regarding any problems
with the unit.

EQ-99X Operation Manual Rev. 2 3
The EQ-99X utilizes a quartz lamp containing a high-pressure gas fill. Explosion of
the lamp and possible injury from flying fragments can occur if the lamp is
mishandled.
Do not open the enclosure of either the Lamp House enclosure or the Power Supply
Controller. Dangerous invisible infrared laser beams and hazardous voltages exist
inside the units. Opening the chassis both voids the warranty and exposes the user to
dangerous radiation and hazardous voltages.
CAUTION
Laser Information
The EQ-99X uses a patented (U.S. Patent #7435982, 7786455, 7989786, others pending) laser
drive system to excite a plasma that radiates in the UV as well as the visible bands. A class 4
laser is located in the Power Supply Controller enclosure. Laser energy is delivered via an
armored fiber to the Lamp House enclosure and connected with an SMA-type connector.
Safety interlocks shut down the laser power if the SMA connector is removed from the Lamp
House enclosure. The optical configuration of the Lamp House ensures that the direct laser
beam can not exit the unit. The EQ-99X laser product is designated as Class 1 during all
normal operation.
Use of controls or adjustments or performance of procedures
other than those specified herein may result in hazardous
radiation exposure.

4 EQ-99X Operation Manual Rev. 2
The parameters of the non-accessible internal laser are given below in Table 1.
Wavelength
974 nm
Emission Type
CW
Laser Power for classification
<8.7 mW via 12mm measurement
aperture at a distance of 300mm
Beam Diameter
~29 mm at aperture
Divergence
>100 mRad
Transverse Beam Mode
Diffuse
Table 1: Embedded Laser Parameters
No regular service is required for the EQ-99X. Any service to the system must be performed
only by factory authorized and trained technicians. To avoid injury, under no circumstances
should the user open or modify the Lamp House or Power Supply Controller enclosure.
The unit must not be operated if the covers are removed or it is defective in any way. Contact
Energetiq if any problems with the equipment are suspected.

EQ-99X Operation Manual Rev. 2 5
Labels and Safety Notification
The following safety labels appear on the product. Figure 1 shows the location of each label
on the EQ-99X system.
UV Hazard warning label –indicates hazardous levels of UV
light are present.
Manufacturer’s identification label – gives the manufacturer’s
name and address, and the model, serial number, and date of
manufacture of the equipment.
Explanatory label –states the classification of the laser product.
Class 1 is the lowest hazard level classification.
Certification label –states that the equipment has been tested
and verified to meet the standards indicated.
Non-interlocked housing label –notifies of a potential hazard
when covers are removed.

6 EQ-99X Operation Manual Rev. 2
Figure 1: Safety Label Locations
Safety Interlocks
The EQ-99X is equipped with interlocks to prevent operation of the device when any of the
following conditions are present:
1. Bulb is not properly installed into the Lamp House enclosure
2. The laser fiber is not properly connected to the Lamp House enclosure
3. An external interlock is open
External Interlock
External interlock pins are provided for the customer’s use (see Chapter 3 for connection
details). Any suitable normally-open contact or solid-state switch can operate the interlock
circuit.
The interlock circuit must be connected to enable the operation of the unit. Should the
interlock connection open during operation or standby, the source is immediately disabled, and
all light output from the aperture ceases.
Certification
Label
Explanatory
Label
Non-interlocked
Housing Label
Manufacturer’s
Identification label
Manufacturer’s
Identification label
Non-interlocked
Housing Label

EQ-99X Operation Manual Rev. 2 7

8 EQ-99X Operation Manual Rev. 2
Chapter 2
DESCRIPTION
General
The EQ-99X is a broad-band lamp system for use in a wide variety of applications. The lamp
produces high brightness, broad-band light from DUV wavelengths through visible and
beyond. The output is very stable, and has a long lifetime before any service is required. A
simple control interface ensures ease of use.
Some of the advantages of the EQ-99X include:
Very high brightness across complete spectrum
–170nm through visible and beyond
Eliminates need for multiple lamps (replaces D2/Tungsten/Xenon Arc)
–Simplified optical system
Excellent spatial stability
–Repeatable measurements
Superior short and long term power stability
–Repeatable measurements
Electrodeless operation for long life
–Reduced consumable costs
–Minimal recalibration of instrument
The EQ-99X system consists of a Power Supply Controller unit, Lamp House unit, and
interconnecting cables. Connection to DC power is required for operation. Connection to
nitrogen purge gas is optional, but recommended for best performance. See Chapter 3 for
connection details.

EQ-99X Operation Manual Rev. 2 9
Specifications
Optical Performance
Typical output spectrum: see Figure 2.
Figure 2: Typical Output Spectrum
Physical Specifications
Dimensions (H x W x D)
Lamp House: 82 x 86 x 76 mm (3.2 x 3.4 x 3.0 in)
Power Supply Controller: 113 x 111 x 299 mm (4.4 x 4.4 x 11.8 in)
Weight
Lamp House: 0.7 kg (1.5 lbs)
Power Supply Controller: 1.4 kg (3.0 lbs)
0.001
0.01
0.1
1
10
100
150 250 350 450 550 650 750
Wavelength, nm
Radiance, mW/mm2/nm/sr
EQ-99
D2 Lamp

10 EQ-99X Operation Manual Rev. 2
Utility Requirements
Electrical: 12VDC, 140W
Cooling: natural convection and internal fan, no auxiliary cooling necessary
Purge gas (optional): clean dry nitrogen, filtered to 5um 20 psig (0.14 MPa) supply
pressure
Remote Interface
Digital Inputs
Type: Optocoupler LED
Logic: Active High
Input voltage: 5VDC
Input current: 8mA
Digital Outputs
Type: Open collector to ground (digital common)
Logic: Active Low
Voltage: 30VDC max.
Sink current: 30mA max.
User Power
Voltage: 5VDC, referenced to digital common
Current: 50mA maximum
Environmental Requirements
Operating
Ambient temperature: 15–35°C
Relative Humidity: non-condensing, 80% max. for temperatures up to 31°C,
decreasing linearly to 50% max. at 40°C.
Pollution Degree 2 (normally only non-conductive pollution; occasional,
temporary condensation possible)
Installation Category II
Indoor use only
Transport
Temperature: -5–95°C
Relative Humidity: non-condensing, 95% max.

EQ-99X Operation Manual Rev. 2 11
System Description
As shown in Figure 3 the EQ-99X system consists of a Power Supply Controller unit, Lamp
House, laser fiber optic cable, and Lamp House signal cable (not shown). Power and I/O
interface connections (also not shown) are provided by the user.
The following sections provide descriptions of the system components and controls, and gives
an overview of their functions. Refer to the “Installation” section of this manual (Chapter 3)
for more detailed information.
Figure 3: EQ-99X Lamp System
Fault Status
Indicators
Lamp
House
Optical
Output Window
Armored Laser
Fiber
I/O Interface Connector
(rear panel)
12 VDC Input Connector
(rear panel)
Lamp House
Signal Connector
Power Supply
Controller
Status
Indicators

12 EQ-99X Operation Manual Rev. 2
Power Supply Controller
The Power Supply Controller contains:
IR Diode Laser
Laser power supply
Thermo-electric cooler for laser
Permanently attached, armored laser fiber optic cable
Control electronics
Status indicator LEDs
Interface connectors
External features (refer to Figure 3):
Status Indicator LEDs
These five LEDs indicate the system status. The function of these indicators is shown below
in Table 2.
LED Label
Meaning (when lit)
POWER ON
DC power is connected to the EQ-99X Power Supply Controller
LAMP ON
UV Light is on
LASER ON
Laser power is ON and laser light is being delivered to the Lamp
House
CONTROLLER FAULT
One of the following has occurred in the Power Supply Controller:
1. External interlock open
2. Controller internal temperature too high
3. Laser power not reaching setpoint
4. Laser Temperature Fault
5. Failure in Laser Delivery Fiber
LAMP MODULE FAULT
One of the following has occurred in the Lamp House module:
1. Control Cable not connected properly
2. Lamphouse internal termperature too high
3. Laser fiber not correctly connected
4. Bulb not correctly installed
5. Ignition Failure
Table 2: Status Indicator LED Functions

EQ-99X Operation Manual Rev. 2 13
Input/Output (I/O) Connector
Provides access to control and status signals. See Chapter 3 for pin assignments and functions.
This is the only operator interface to the EQ-99X –there are no local controls. Energetiq
offers the EQ-99-RC Remote Control Module which connects to the Input/Output
connector and provides a means of local control. Contact Energetiq for additional
information.
Power Input Connector
This is a latching input connector for 12 VDC power. Power can be provided using the
optional PS00018 12VDC power supply. Alternatively, the EQ-99X can be powered directly
from a customer provided 12VDC power supply. See Chapter 3 for detailed information.
Lamp House Signal Connector (mini D sub –9-pin)
Provides various power and control signals to/from the Lamp House module. No other
connector or cable may be used with the EQ-99X other than the one supplied.
Armored Laser Fiber
The laser light is delivered from the Power Supply Controller to the Lamp House via a fiber
optic cable with armored protection. The fiber is permanently attached to the Power Supply
Controller, and connected to the Lamp House by an SMA-type connector. It is critical that
this armored fiber be treated with care and inspected for any abnormalities prior to operation.
Avoid sharp bends, which will permanently damage the fiber. Minimum bend radius is 30mm
(1.18 in). Avoid crimping or compressing the fiber. See Chapter 3 for more information on
installation and fiber end face cleaning.
Lamp House
The Lamp House assembly contains:
Lamp
Igniter
IR pumping optics
Output window
Laser ON indicator

14 EQ-99X Operation Manual Rev. 2
Interface connectors
Figure 4: Lamp House Assembly
External features (refer to Figure 4):
Lamp Window
The lamp window at the optical output provides protection from the high pressure bulb inside
the Lamp House. An internally-threaded SM1 adapter is provided for easy connection of
optical hardware.
Lamp
Window
Laser Input
(SMA-type)
Laser ON
Indicator
Purge Gas
Port
Signal Connector
(to Controller)
Bulb mounting
flange