Fischione 1060 SEM Mill User manual

MODEL
SEM Mill
Instruction
Manual
E.A. Fischione Instruments, Inc.
9003 Corporate Circle
Export, PA 15632
724-325-5444
www.fischione.com
Part Number 041-0557-02 Revision 03 November 2012

Software version 1.6.0 E.A. Fischione Instruments, Inc.
Model 1060 SEM Mill Instruction Manual

E.A. Fischione Instruments, Inc. Software Version 1.6.0 i
Model 1060 SEM Mill Instruction Manual
Contents
Warnings, Cautions, and Legal Notices . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
Legal Notices. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2
Security Warning and Disclaimer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
Warranty . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
Period . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
Details . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
Exclusions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
Limitation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
Using this Manual . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
Model 1060 SEM Mill Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
Features . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
Selecting a Location and Unpacking the Instrument. . . . . . . . . . . . . . . . . . . 15
Assessing Utility and Environmental Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
Gasses. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
Electrical Power. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
Networking. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
Ventilation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
Unpacking the Instrument . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
Setting up the Instrument . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
Setting up the Basic Edition Instrument . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
Setting up the Premium Edition Instrument . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
Setting up the Instrument Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
Installing the Microscope Post . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
Attaching the Stereo Microscope . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26

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Model 1060 SEM Mill Instruction Manual
Attaching the High Magnification Microscope with CCD Camera . . . . . . . . . . . . . . . . . 27
Attaching the High Magnification Microscope with Image Capture . . . . . . . . . . . . . . . . 30
Positioning the Stack Light . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
Setting up the Cold Trap . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
Model 1060 SEM Mill Accessory Kit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
Using the Interface Controls. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
Basic Edition . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
Premium Edition . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
Starting the Instrument . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36
Turning off the Instrument . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36
Restarting the Instrument after an Incorrect Shut Down . . . . . . . . . . . . . . . . . . . . . . . . . 37
Controlling the Ion Beam Angle. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37
Basic Edition . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37
Premium Edition . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38
Sample Rotary Orientation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38
Using the Touch Screen. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39
Entering Data. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39
Touch Screen Tab Organization . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40
Main Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40
Beams Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43
Termination Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44
Motion Tab. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45
Utility Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 48
General Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 48
Imaging Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 49
Accessing Utility Tab Service Functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 50
Motion Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51
Laser Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 53
Ion Guns Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 54
System Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 55
About Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 57
Using the Operator Console Application . . . . . . . . . . . . . . . . . . . . . . . . . . . 59
Launching the Operator Console Application . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 60
From the Computer Desktop . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 60
From the Windows Start Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 61
Working with User Accounts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 61
Logging into a User Account . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 61
Opening the User Manager Application . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 62
Understanding User Account Types and Privileges . . . . . . . . . . . . . . . . . . . . . . . . . . . . 64
Custom Privileges. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 65
Operator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 65
User . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 65

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Superuser . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 65
Administrator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 65
Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 66
Managing Users . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 66
Adding a User Account. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 66
Editing an Existing User Account . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 70
Deleting a User Account . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 70
Working with the Operator Console Interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 70
Entering Numeric Values . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71
Using the Selector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71
Using the Keyboard . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71
Using Keyboard/Mouse Shortcuts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71
Keyboard Shortcuts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71
Mouse Shortcuts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 72
Viewing Tooltips . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 72
Understanding the Operator Console Tab Organization . . . . . . . . . . . . . . . . . . . . . . . . . . 72
Tab Organization . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 72
Instrument Graphic . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 74
Timer, Load Lock, and Sample Position . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 76
Active Recipe Area . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 77
Status Bar . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 78
Main Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 79
Displays and Controls Specific to the Main Tab. . . . . . . . . . . . . . . . . . . . . . . . . . . . 79
Imaging Tab. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 85
Displays and Controls Specific to the Imaging Tab . . . . . . . . . . . . . . . . . . . . . . . . . 85
Tracking Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 86
Displays and Controls Specific to the Tracking Tab . . . . . . . . . . . . . . . . . . . . . . . . . 86
Data Logging Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 87
Displays and Controls Specific to the Data Logging Tab . . . . . . . . . . . . . . . . . . . . . 87
Service Tab. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 89
Additional Tabs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 91
State Machine . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 91
Setting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 91
Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 91
Tracking . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 91
Logging . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 91
Displays and Controls Specific to the Service Tab . . . . . . . . . . . . . . . . . . . . . . . . . . 92
Setup Tab. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 92
Displays and Controls Specific to the Setup Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . 93
Info Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 96
Displays and Controls Specific to the Info Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . 97
Defining Projects, Samples, and Protocols . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 98
Setting the Current Project . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 99
Defining and Saving Recipes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 100
Understanding Recipe Basics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 100
Documenting Recipes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 102
Saving a New Recipe . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 102

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Editing an Existing Recipe . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 102
Defining Process Cycles . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 104
Organizing Recipes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 106
Working with the Instrument Logs. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 107
Log Types . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 108
Process Log . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 108
Instrument Log . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 110
Operation Log . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 110
Managing Logs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 111
Recording Instrument Use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 112
User Tracking . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 112
Project Tracking . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 113
Component Tracking and Data Logging . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 113
Component Tracking . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 114
Component Tracking Set Up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 114
Viewing Tracking Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 115
Tracking Notification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 116
Tracking Data Access . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 116
Component Data Logging. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 117
Data Logging Component Set Up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 117
Viewing Component Logging Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 119
Exporting Component Tracking and Logging Data . . . . . . . . . . . . . . . . . . . . . . . . . . . 122
Managing Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 123
Location and Format of Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 123
Archiving Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 124
Data Management Support Functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 125
Exiting the Operator Console Application. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 125
From the Service Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 126
From the Setup Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 126
Loading Samples . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 127
Rotary Orientation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 127
Loading a Sample . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 127
Unloading the Sample from the Load Lock . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 131
Troubleshooting. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 133
Ion Source Troubleshooting. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 133
General Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 133
Verify the Process Gas Delivery . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 135
Verify the Mass Flow Controllers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 136
Distinguishing between Board and Mass Flow Controller Failures . . . . . . . . . . . . . . 136
Check the Ion Source for Short Circuits . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 138
Pin Outs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 138
Verify the High-Voltage Output. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 139
Determining the High-Voltage Board Revision Level. . . . . . . . . . . . . . . . . . . . . . . . 139
Understanding the Orientation of High-Voltage Power Supply Connectors. . . . . . . . 140

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Understanding High-Voltage Outputs in Premium Edition Instruments . . . . . . . . . . . 141
Troubleshooting Motion System Issues . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 142
Z Axis Motion Faults . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 142
Z Axis Height Adjustment and Beam Alignment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 143
Troubleshooting Vacuum System Issues . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 144
Troubleshooting Pressure Transducer Errors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 145
Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 147
Entering Service Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 147
Service Mode: Touch Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 147
Exiting Service Mode: Touch Screen. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 148
Service Mode: Operator Console Application . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 148
Exiting Service Mode: Operator Console Application . . . . . . . . . . . . . . . . . . . . . . 148
Venting the Chamber . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 148
Venting the Chamber: Touch Screen. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 149
Returning the Chamber to Vacuum: Touch Screen . . . . . . . . . . . . . . . . . . . . . . . . 149
Venting the Chamber: Operator Console Application. . . . . . . . . . . . . . . . . . . . . . . . . 149
Returning the Chamber to Vacuum: Operator Console Application . . . . . . . . . . . . 150
Cover Removal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 151
Ion Source Cover Plate . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 151
Cover Plate Removal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 151
Cover Plate Reinstallation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 152
White (Left) Cover . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 152
White Cover Removal. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 152
White Cover Reinstallation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 158
Blue (Right) Cover . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 158
Blue Cover Removal. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 158
Blue Cover Reinstallation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 161
O-Ring and Stage Cleaning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 162
Replacing the O-Ring . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 164
Ion Source Cleaning. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 165
Ion Source Removal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 166
Cleaning the Magnet Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 168
Reassembling the Magnet Assembly. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 175
Cleaning the Focus Assembly. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 178
Reinstalling the Ion Source and Aligning the Focus Cup . . . . . . . . . . . . . . . . . . . . . . . 182
Beam Calibration. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 185
Basic Edition System Beam Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 186
Premium Edition System Beam Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 193
Recalibrating the Pirani Gauge or Adjusting the Offset . . . . . . . . . . . . . . . . . . . . . . . . . . 200
Pirani Gauge Manual Calibration. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 200
Adjusting the Pirani Gauge Offset. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 201
Changing the Load Lock Atmospheric Pressure Threshold. . . . . . . . . . . . . . . . . . . . . . . . 205
Reseating the Screen Cable to Fix White Screen at Start up . . . . . . . . . . . . . . . . . . . . . . . 206
Correcting a Mismatch between the Light Source Setting and Actual Output . . . . . . . . . . . 207
Backing Up System Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 208

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Beam Calibration Worksheet . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 209
Index . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 213

E.A. Fischione Instruments, Inc. Software Version 1.6.0 1
Model 1060 SEM Mill Instruction Manual
Warnings, Cautions, and Legal
Notices
Important. Please read these instructions completely before installing, operating, or
servicing the instrument.
Electrical Shock Hazard. Removing the instrument enclosure can expose the user
to potentially harmful voltages. DO NOT OPERATE THE INSTRUMENT WITH THE
COVERS REMOVED. Operation of the instrument without the covers installed should
only be performed by qualified service personnel.
Laser Light Class II. A class II laser is used inside the working chamber for
specimen height detection. The user cannot directly look into the laser source. Avoid
watching the sample during the height detection process.
Warning. The ion source contains strong magnets that create a strong magnetic
field. Individuals with an implanted pacemaker or implantable cardioverter-
defibrillators (ICD) must keep a safe distance from the ion source magnets. Keep
wristwatches and magnetic cards that are susceptible to magnetic fields away from the
ion source.
Warning. The ion source contains strong magnets that create a strong magnetic
field. During instrument service, interaction with metallic objects may produce pinch
hazards.
Warning. Liquid Nitrogen can cause asphyxia (suffocation), as well as severe eye
and skin burns. Use and store liquid Nitrogen in a well-ventilated area. Ensure that
the oxygen concentration of the area where the instrument is located remains above
19.5%. While handling liquid Nitrogen, wear a full-face shield with safety goggles,
heavy, loose fitting leather or cryogenic gloves, and a long-sleeve shirt (or other arm
protection).

2Software version 1.6.0 E.A. Fischione Instruments, Inc.
Model 1060 SEM Mill Instruction Manual
Legal Notices
• Information contained in this document is subject to change without notice.
• No part of this document may be copied or distributed by any means without the
express written permission of E.A. Fischione Instruments, Inc.
• E.A. Fischione Instruments, Inc. assumes no liability for any direct, indirect, or
consequential damages arising from use not described in this manual.
• This document does not provide any warranty or permission for industrial
properties or any rights to grant license lawfully and without infringement.
• Installing software (other than software upgrades or other software changes
authorized in writing by a Fischione Instruments representative) or altering the
Fischione Instruments installed software on Premium Edition computers will void
the owner’s product warranty.
Security Warning and Disclaimer
•Warning. The secondary network interface is provided for general connectivity to
the facility intranet and/or internet. It is NOT INHERENTLY SECURE. Its use is
at your own risk and security precautions are your responsibility. E.A. Fischione
Instruments, Inc., cannot and does not guarantee the privacy of your data and
communication while the secondary network interface is enabled and connected to
a network.
There are potentially serious security issues with any computer connected to the
Internet or a network without the appropriate protection, ranging from viruses,
worms and other programs that can damage the user's computer, to attacks on the
computer by unauthorized or unwanted third parties. By using the secondary
network interface, you acknowledge and knowingly accept the potentially serious
risks of using an unsecured network. It is recommended that users take steps to
protect their own computer system and network, such as installing current anti-
virus software and maintaining appropriate firewall protection. For further
information on how to protect yourself on a network, consult a security
professional.
Caution. If the optional cold trap (part number is installed, when liquid nitrogen is
added to the cold trap, do not vent the chamber until:
• the liquid nitrogen has boiled off and the dewar is empty, and
• at least one hour has passed after the liquid nitrogen has boiled off.
Venting the chamber before the stage and specimen have had time to warm up to
ambient temperature can cause serious damage to the instrument and has the
potential to cause a dangerous environment for instrument users.

E.A. Fischione Instruments, Inc. Software Version 1.6.0 3
Model 1060 SEM Mill Instruction Manual
You acknowledge and agree that your use of the secondary network interface IS
SOLELY AT YOUR OWN RISK.
By using the functionality, you also agree to all terms set forth in the following
Disclaimer.
•Disclaimer. Under no circumstances shall E.A. Fischione Instruments, Inc., or
affiliates, agents, or contractors thereof, be liable for any direct, indirect, incidental,
special, punitive, or consequential damages that result in any way from your use of
the secondary network interface. You agree to indemnify and hold harmless E.A.
Fischione Instruments, Inc., including affiliates, agents, and contractors thereof,
from any claim, liability, loss, damage, cost, or expense arising out of or related to
your use of the secondary network interface, any actions taken by you in
connection with your use of the secondary network interface, any violation of any
third party's rights or an violation of law or regulation, or any breach of this
agreement.
All trademarks and registered trademarks are the property of the respective owners.
Model 1060 SEM Mill patent pending.
©2012 E.A. Fischione Instruments, Inc. All rights reserved.

4Software version 1.6.0 E.A. Fischione Instruments, Inc.
Model 1060 SEM Mill Instruction Manual

E.A. Fischione Instruments, Inc. Software Version 1.6.0 5
Model 1060 SEM Mill Instruction Manual
Warranty
Period
The warranty period is one year from the date of installation.
Details
The instrument will be repaired free of charge if it malfunctions due to a defect in
design or manufacture within the warranty period. Equivalent parts may be used as
replacement parts during repair.
System components, such as the computer, monitor, and keyboard, which are
frequently modified for improvement, may not be available in original versions at the
time of replacement.
Normal maintenance procedures are provided in this manual.
Exclusions
The warranty will not be valid for the following failures and/or cases, even during the
warranty period:
• Failure due to use under improper conditions.
• Failure due to power supply voltage/frequency other than specified by Fischione
Instruments or due to power failure.
• Corrosion or deterioration of the tubing (vacuum or gas) due to impurities
contained in gas supplied by the customer.
• Corrosion of electric circuits or deterioration of ion source elements due to
corrosive gases or dust contained in the atmosphere.
• Failure due to instrument disassembly, modification, parts replacement, or
relocation not approved by Fischione Instruments.
• Consumables and parts having a limited period of guarantee.

6Software version 1.6.0 E.A. Fischione Instruments, Inc.
Model 1060 SEM Mill Instruction Manual
• Failure attributable to use of non-guarantee parts (parts not described in the
instruction manual).
• Failure due to acts of God, including fire, earthquake, storm, flood, lightning,
social disturbance, riot, crime, insurrection, war (declared or undeclared),
radioactive pollution, contamination with harmful substance, etc.
• Failure of instrument or damage of basic software, application software or other
data due to a computer virus.
• Failure of the PC used with the instrument or damage to basic software, application
software and/or data because of momentary voltage drop caused by lightning or
power interruption.
• Failure of the PC used with the instrument or damage to basic software, application
software and/or data caused by turning off the PC main power without taking the
normal termination procedure.
Limitation
Fischione Instruments makes no guarantees, either expressed or implied, except as
provided herein, including without limitation thereof, guarantees as to marketability,
merchantability, for a particular purpose or use, or against infringement of any patent.
In no event shall Fischione Instruments be liable for any direct, indirect or
consequential damages of any nature, or losses or expenses resulting from any
defective product or the use of any product. No oral or written information or advice
given by Fischione Instruments, its dealers, distributors, agents or employees shall
create a guarantee or in any way increase the scope of this guarantee.

E.A. Fischione Instruments, Inc. Software Version 1.6.0 7
Model 1060 SEM Mill Instruction Manual
Using this Manual
The Model 1060 SEM Mill is available in two configurations: Basic Edition and
Premium Edition. This manual covers both configurations. While most of the
content for operating either configuration is the same, the user interface is different.
• The Basic Edition instrument is operated through the touch screen interface. To
determine whether you have a Basic Edition instrument, confirm the instrument’s
part number.
Model 1060 SEM Mill Basic Edition part numbers are: 041-0002-11 and 
041-0002-12.
When operating a Basic Edition instrument, use the touch screen interface. See
Using the Touch Screen on page 39.
• The Premium Edition instrument can be operated through the touch screen
interface or the Operator Console application, which is a PC-based application pre-
installed on the instrument’s PC and viewed by way of the provided monitor. To
determine whether you have a Premium Edition instrument, confirm the
instrument’s part number.
Model 1060 SEM Mill Premium Edition part numbers are: 041-0002-21 and 
041-0002-22.
When operating a Premium Edition instrument, you may use either the touch
screen interface or the Operator Console application. See Using the Touch Screen
on page 39 and Using the Operator Console Application on page 59.

8Software version 1.6.0 E.A. Fischione Instruments, Inc.
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E.A. Fischione Instruments, Inc. Software Version 1.6.0 9
Model 1060 SEM Mill Instruction Manual
Model 1060 SEM Mill Introduction
E.A. Fischione Instruments' Model 1060 SEM Mill is a state-of-the-art ion milling
and polishing system. It is compact, precise, and consistently produces high-quality
sample surface characteristics needed for SEM imaging and analysis.
Features
•Ion milling. Ion milling is used in the physical sciences to enhance the sample’s
surface characteristics. Argon gas is ionized and then accelerated toward the sample
surface. By means of momentum transfer, the impinging ions sputter material from
the sample at a controlled rate.
•Two ion sources. Two TrueFocus ion sources direct controlled-diameter ion beams
to the surface of the sample. Beam diameter is user adjustable. Both sources are
concentrated on the sample surface for high milling rates. The ion sources are
physically small and require minimal gas, but deliver a large range of ion beam
energies.
When operated in the upper energy range, milling is rapid, even at low angles.
When operated at low energy, material is gradually sputtered from the sample
without inducing artifacts.
The unique design of the TrueFocus ion source allows for a controlled ion beam
diameter, which means the ions are directed only to the sample and sputtered
material is not redeposited from the sample holder and/or chamber onto the sample
surface.
Ion accelerating voltages are programmable and can be continuously varied from as
high as 6.0 keV for rapid milling to as low as 100 eV for final sample polishing.
The Model 1060 SEM Mill is equipped with Faraday cups for measuring ion beam
current.
The ion sources are visually aligned from outside the vacuum using a luminescent
target.

10 Software version 1.6.0 E.A. Fischione Instruments, Inc.
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•Minimal maintenance. Material sputtered from the ion source is negligible,
minimizing both sample contamination and component maintenance. Automated
shuttering prevents the buildup of sputtered material on the viewing window.
All system components are easily accessible for routine cleaning and maintenance.
•Automatic gas control. Two mass flow controllers provide independent and
automatic regulation of process gas for the ion sources. The gas control algorithm
produces stable ion beams over a wide variety of ion source milling parameters.
•Fully integrated dry vacuum system. The fully integrated vacuum system includes
a turbomolecular drag pump backed by a multi-stage diaphragm pump. This oil-
free system ensures a clean environment for sample processing.
Because the gas requirements of the TrueFocus ion source are small, the
turbomolecular drag pump produces an operating system vacuum of approximately
5x10-4 mbar. The vacuum level is measured with a Pirani gauge and is continuously
indicated.
•Sample mounting and positioning. The Model 1060 SEM Mill accommodates a
wide range of sample sizes and configurations for applications such as bulk milling,
electron backscatter diffraction (EBSD), semiconductor preparation, as well as
traditional slope cutting and cross-sectional polishing.
A series of sample holders are available for a multitude of applications. Loading
stations further facilitate the sample handling process.
•Chamber. The vacuum chamber remains under continuous vacuum during
operation. A load lock isolates the chamber’s high vacuum from atmosphere during
sample exchange, ensuring optimal vacuum conditions.
•Quick specimen transfer. The vacuum load lock allows for extremely rapid sample
exchange. Once the sample is placed onto the stage, evacuation of the load lock
occurs within a few seconds.
Before milling, an automatic height sensing system provides feedback to a
mechanical elevator so that the sample's top surface is properly aligned with respect
to the ion beams.
At the conclusion of the milling process, the sample returns to the load lock, but
remains under vacuum until vented by the user. Venting takes only a few seconds.
The chamber remains under continuous vacuum during the sample exchange.
•Cold trap (optional). The Model 1060 is available with an optional cold trap that is
highly effective in removing hydrocarbons and water vapor to improve the chamber
vacuum quality. The cold trap features a dewar located within the enclosure.

E.A. Fischione Instruments, Inc. Software Version 1.6.0 11
Model 1060 SEM Mill Instruction Manual
•Precise angle adjustment. With the sample stage fixed in position, the ion sources
are tilted to provide the desired milling angle. Tilt angles are continuously
adjustable in the range from 0° to +10°.
Ion beam impingement angles are independently adjustable for each ion source.
Ion milling with low angles of incidence (less than 10°), combined with low-energy
ion source operation, minimizes irradiation damage and sample heating. Because it
facilitates the uniform thinning of dissimilar materials, low-angle milling is highly
beneficial when preparing layered or composite materials, as well as cross-sectional
SEM specimens.
•Programmable sample motion. Sample rotation is in-plane and continuous
through 360°.
In addition, the sample can be rocked in relation to the ion beam so that interfaces
or glue lines are never parallel to the direction of the ion beam. Rocking angles
ranging from 40° to 60° are typically employed.
•Automatic termination. The ion milling process can be automatically terminated
by elapsed time. A timer allows milling to continue for a predetermined time and
then de-energizes the ion sources while keeping the sample under vacuum until the
user vents the load lock to extract the sample. A sample can be serial sectioned by
applying subsequent milling steps using the same parameters for the same time
duration.
•Sample viewing. The viewing window is protected by a shutter, which prevents
buildup of sputtered material that can interfere with sample observation.
A light source located above the sample surface is used for illumination.
Stereo microscope (optional): The optional stereo microscope enhances sample
viewing. The microscope's long working distance allows the samples to be observed
in situ while milling.
High magnification microscope (optional): The optional imaging system includes
a high magnification microscope coupled to a CCD (charge-coupled device)
camera and video monitor to capture and display images. This system is ideal for
preparing site-specific samples.
When the high magnification microscope and CCD camera are used, the sample is
raised into the load lock for image capture and then returned to the milling position
to continue the milling process.

12 Software version 1.6.0 E.A. Fischione Instruments, Inc.
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