Granville-Phillips 475 Series User manual

Series 475
Instruction Manual
Granville-Phillips®Series 475 Convectron®
Vacuum Measurement Controller
Instruction manual part number 475101
Revision G - January 2015

Instruction Manual
Series 475
This Instruction Manual is for use with all Granville-Phillips
Series 475 Vacuum Measurement Controllers. A list of
applicable catalog numbers is provided on the following page.
This product is RoHS compliant.
Granville-Phillips®Series 475 Convectron®
Vacuum Measurement Controller
© 2015, MKS Instruments, Inc. All rights reserved. Granville-Phillips®and Convectron®
are registered trademarks of MKS Instruments, Inc. All other trademarks and registered
trademarks are the properties of their respective owners.
Customer Service/Support
For Customer Service or Technical Support 24 hours per day,
7 days per week, every day of the year including holidays:
Phone: [phone] or [phone]
MKS, Granville-Phillips Division
6450 Dry Creek Parkway
Longmont, CO 80503 USA
Phone: [phone] or 1-800-776-6543
FAX: [phone]
Email: [email protected]
Corporate Office
MKS Instruments, Inc.
2 Tech Drive, Suite 201
Andover, MA 01810 USA
Phone: [phone]
www.mksinst.com

Granville-Phillips Series 475 Convectron
Vacuum Measurement Controller
Catalog numbers for Series 475 Convectron Vacuum Measurement Controller with Graphic Display
1/8 DIN Panel Mount or Benchtop Mount
Controller:
1/8 DIN Panel Mount or Benchtop Mount 475001 - X X - X
Interface:
None 0
RS-232 A
RS-485/422 B
Setpoints:
No setpoints 0
Two setpoints 2
Measurement Units:
Torr T
mbar M
Pascal P
Power Supply:
Universal, CE Compliant 475008 - X
Power Cords:
North American 115 VAC & Japan 100 VAC 1
North American 240 VAC 2
Universal Europe 220 VAC 3
United Kingdom 240 VAC 4
Convectron Gauges
Gold-Plated Tungsten Sensor
275071 1/8 inch NPT / 1/2 inch compression fitting
275185 1/4 inch VCR-type female fitting
275233 3/8 inch VCO-type male fitting
275282 1/2 inch VCR-type female fitting
275256 1.33 inch (NW16CF) rotatable ConFlat-type flange
275238 2.75 inch (NW35CF) rotatable ConFlat-type flange
275203 NW16KF flange
275196 NW25KF flange
275316 NW40KF flange
Platinum Sensor
275320-PP 1/8 inch NPT, ½ inch compression fitting
275320-PQ 1/4 inch VCR-type female fitting
275320-PR 1/2 inch VCR-type female fitting
275320-PF 1.33 inch CF (NW16CF) rotatable ConFlat-type flange
275320-PG 2.75 inch CF (NW35CF) rotatable ConFlat-type flange
275320-PD NW16KF flange
275320-PE NW25KF flange
275320-PK NW40KF flange
275320-PB 15 mm OD tubulation, metric O-ring compression fitting

Series 475 Convectron Gauge Controller Instruction Manual 475101 - Rev. G 5
Table of Contents
Chapter 1 Safety & Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
1.1 Caution and Warning Statements . . . . . . . . . . . . . . . . . . . . . 9
1.2 Reading and Following Instructions . . . . . . . . . . . . . . . . . . . 9
1.3 System Grounding . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
1.4 Explosive Gases . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
1.5 Explosion / Implosion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
1.6 Overpressure Conditions . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
1.7 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
1.8 Certification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
1.9 Extended Warranty . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
1.10 Service Guidelines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
1.11 Damage Requiring Service . . . . . . . . . . . . . . . . . . . . . . . . . . 12
1.12 Specifications & Compliance . . . . . . . . . . . . . . . . . . . . . . . . 13
Chapter 2 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
2.1 System Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
2.2 Pre-Installation Considerations . . . . . . . . . . . . . . . . . . . . . . . 17
2.3 Installation Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
2.4 Install Pressure Relief Devices . . . . . . . . . . . . . . . . . . . . . . . . 18
2.5 Mount the Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
2.6 Install the Convectron Gauge . . . . . . . . . . . . . . . . . . . . . . . . 20
Install Vacuum Chamber Fittings . . . . . . . . . . . . . . . . . . . . . 21
Ground the Convectron Gauge . . . . . . . . . . . . . . . . . . . . . . . 22
2.7 Connect the Wiring . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
2.8 Connectors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
2.9 Configure the Relays for the Application . . . . . . . . . . . . . . . . 26
2.10 Requirements for Process Control Option . . . . . . . . . . . . . . . 26
Chapter 3 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
3.1 Preparing for Pressure Measurement . . . . . . . . . . . . . . . . . . . 27
3.2 Button Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
3.3 Initial Power Up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
3.4 Menu Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
Product Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
Keypad . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
Diagnose . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
Calibrate . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
3.5 Configure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
Setpoint Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
RS-232 Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
RS-485/422 Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
Analog Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
Pressure Units . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
Display Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
Gas Species . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
Pressure Filtering . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36
Restore Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37
Save Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37
Gauge Sensor Type . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37

6Series 475 Convectron Gauge Controller Instruction Manual 475101 - Rev. G
Table of Contents
Correction Factor Parameters . . . . . . . . . . . . . . . . . . . . . . . . 38
3.6 Error Codes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39
3.7 Preparing For Convectron Gauge Operation . . . . . . . . . . . . . 40
3.8 Convectron Gauge Theory of Operation . . . . . . . . . . . . . . . . 40
3.9 Convectron Gauge Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . 41
3.10 Using Gases Other than N2 or Air . . . . . . . . . . . . . . . . . . . . 41
Effects on User Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . 41
Indicated vs. True Pressure for Gases Other Than N2or Air . 42
Examples . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43
3.11 Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51
Calibration Ranges for Different Gas Species . . . . . . . . . . . . 51
Vacuum Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51
Atmosphere Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51
Convectron Gauge Use Below 10-3 Torr . . . . . . . . . . . . . . . . 52
NIST Traceable System Calibration . . . . . . . . . . . . . . . . . . . . 52
3.12 Convectron Gauge Analog Output Signal . . . . . . . . . . . . . . . 53
Default Analog Output of 0 to 7 V . . . . . . . . . . . . . . . . . . . . 55
Optional Analog Output of 1 to 8 V . . . . . . . . . . . . . . . . . . . 55
Optional Nonlinear Analog Output “S Curve” . . . . . . . . . . . 55
3.13 Analog Output Mode Programming . . . . . . . . . . . . . . . . . . . 56
3.14 Process Control Setpoints & RS-232 or RS-485 Interface . . . . 56
Chapter 4 Process Control . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 57
4.1 Process Control Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 57
4.2 Connecting Process Control Relays . . . . . . . . . . . . . . . . . . . . 58
4.3 Setpoint Display and Adjustment . . . . . . . . . . . . . . . . . . . . . 58
4.4 Process Control Tips . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 59
4.5 Process Control Factory Default Settings . . . . . . . . . . . . . . . . 59
4.6 Process Control Relay Trip Points . . . . . . . . . . . . . . . . . . . . . 60
Chapter 5 RS-232 Interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 61
5.1 RS-232 Theory of Operation for the 475 Controller . . . . . . . 61
5.2 Connecting the RS-232 Computer Interface . . . . . . . . . . . . . 61
5.3 RS-232 Handshake . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 62
5.4 Command-Response Timing . . . . . . . . . . . . . . . . . . . . . . . . . 64
5.5 Preparing the RS-232 Computer Interface . . . . . . . . . . . . . . . 64
5.6 RS-232 Command Syntax . . . . . . . . . . . . . . . . . . . . . . . . . . . 65
5.7 RS-232 Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . 75
RS-232 Error Messages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 75
Chapter 6 RS-485 Interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 77
6.1 RS-485/422 Computer Interface Setup . . . . . . . . . . . . . . . . . 77
6.2 RS-485/422 Computer Interface Factory Default Settings . . . 77
6.3 RS-485/422 Computer Interface Settings . . . . . . . . . . . . . . . . 77
Baud Rate . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 77
Data Format . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 77
Address . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 78
Bus Type . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 78
Transceiver Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 78
6.4 RS-485/422 Physical Configurations . . . . . . . . . . . . . . . . . . . 78
Connecting the RS-485/422 Computer Interface . . . . . . . . . . 80
6.5 Communications Protocol . . . . . . . . . . . . . . . . . . . . . . . . . . 81
6.6 RS-485/422 Command Syntax . . . . . . . . . . . . . . . . . . . . . . . 81
6.7 RS-485/422 Response Syntax . . . . . . . . . . . . . . . . . . . . . . . . 81

Table of Contents
Series 475 Convectron Gauge Controller Instruction Manual 475101 - Rev. G 7
Command Descriptions . . . . . . . . . . . . . . . . . . . . . . . . . . . . 82
6.8 Command-Response Timing . . . . . . . . . . . . . . . . . . . . . . . . . 93
6.9 RS-485 Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . 94
RS-485 Error Messages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 94
Chapter 7 Diagnostics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 95
7.1 Continuous Diagnostics . . . . . . . . . . . . . . . . . . . . . . . . . . . . 96
7.2 Diagnostics Requiring User Interaction . . . . . . . . . . . . . . . . . 96
Analog Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 96
Measurement Circuits . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 96
7.3 Convectron Gauge Simulator . . . . . . . . . . . . . . . . . . . . . . . . 97
Simulate a Process Operation Prior to Full System Integration 97
Analog Output Tests . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 98
Controller Calibration Verification . . . . . . . . . . . . . . . . . . . . 98
Chapter 8 Service and Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 99
8.1 Customer Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 99
8.2 Service Guidelines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 99
8.3 Damage Requiring Service . . . . . . . . . . . . . . . . . . . . . . . . . . 100
8.4 Error Codes and Possible Solutions . . . . . . . . . . . . . . . . . . . . 101
8.5 Convectron Gauge Test Procedure . . . . . . . . . . . . . . . . . . . . 103
8.6 Cleaning Contaminated Convectron Gauges . . . . . . . . . . . . . 103
8.7 Reset to Factory Defaults . . . . . . . . . . . . . . . . . . . . . . . . . . . 104
Index . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 105

8Series 475 Convectron Gauge Controller Instruction Manual 475101 - Rev. G
Table of Contents

Series 475 Convectron Gauge Controller Instruction Manual 475101 - Rev. G 9
Chapter 1 Safety & Introduction
1.1 Caution and Warning
Statements
This manual contains caution and warning statements with which you must
comply to prevent inaccurate measurement, property damage, or personal
injury.
Each caution or warning statement explains:
1. The specific hazard that you must prevent or unsafe practice that you
must avoid,
2. The potential result of your failure to prevent the specified hazard or
avoid the unsafe practice, and
3. What you must do to prevent the specified hazardous result.
1.2 Reading and
Following Instructions
You must comply with all instructions while you are installing, operating, or
maintaining the Controller. Failure to comply with the instructions violates
standards of design, manufacture, and intended use of the Controller.
Granville-Phillips and Brooks Automation disclaim all liability for the
customer's failure to comply with the instructions.
• Read instructions – Read all instructions before installing or operating the
Controller.
• Retain instructions – Retain the instructions for future reference.
• Follow instructions – Follow all installation, operating and maintenance
instructions.
• Heed warnings and cautions – Adhere to all warnings and caution
statements on the Controller and in these instructions.
• Parts and accessories – Install only those replacement parts and
accessories that are recommended by Granville-Phillips. Substitution of
parts is hazardous.
CAUTION
Caution statements alert you to hazards or unsafe
practices that could result in minor personal injury or
property damage.
Each caution statement explains what you must do to
prevent or avoid the potential result of the specified
hazard or unsafe practice.
WARNING
Warning statements alert you to hazards or unsafe
practices that could result in severe personal injury or
death due to electrical shock, fire, or explosion.
Each warning statement explains what you must do
to prevent or avoid the potential result of the
specified hazard or unsafe practice.

10 Series 475 Convectron Gauge Controller Instruction Manual 475101 - Rev. G
Chapter 1
1.3 System Grounding Ion producing equipment, such as ionization gauges, mass spectrometers,
sputtering systems, etc., from many manufacturers may, under some
conditions, provide sufficient electrical conduction via a plasma to couple a
high voltage electrode potential to the vacuum chamber. If exposed
conductive parts of the gauge, Controller, and chamber are not properly
grounded, they may attain a potential near that of the high voltage electrode
during this coupling. Potential fatal electrical shock could then occur
because of the high voltage between these exposed conductors and ground.
All components in a vacuum system used with this or any similar high
voltage product must be maintained at Earth ground for safe operation.
Connect power cords only to properly grounded outlets or sources.
1.4 Explosive Gases Do not use the Series 475 Controller or a Series 275 Convectron Gauge in
an environment of explosive or combustible gases or gas mixtures.
Operation of any electrical instrument in such an environment constitutes a
definite safety hazard. Do not use the product to measure the pressure of
explosive gases or gas mixtures. The sensor wire of a Convectron Gauge
normally operates at 125 degrees Centigrade. If a malfunction causes the
sensor wire to reach a higher temperature, it could raise the sensor wire
temperature to above the ignition point of combustible materials or gases.
Danger of explosion or inadvertent venting to atmosphere exists in all
vacuum systems which incorporate gas sources or involve processes capable
of pressuring the system above safe limits.
1.5 Explosion / Implosion Danger of injury to personnel and damage to equipment exists on all
vacuum systems that incorporate gas sources or involve processes capable
of pressuring the system above the limits it can safely withstand.
For example, danger of explosion in a vacuum system exists during
backfilling from pressurized gas cylinders because many vacuum devices
such as ionization gauge tubes, glass windows, glass belljars, etc., are not
designed to be pressurized.
1.6 Overpressure
Conditions
Do NOT subject Series 275 Convectron Gauges to pressures above 1000
Torr.
Install suitable devices that will limit the pressure from external gas sources
to the level that the vacuum system can safely withstand. In addition, install
suitable pressure relief valves or rupture disks that will release pressure at a
WARNING
Read these safety notices and warnings before
installing, using, or servicing this equipment. If you
have any doubts regarding the safe use of this
equipment, contact the Granville−Phillips Customer
Service department at the address listed in this user
manual.
Each warning statement explains what you must do
to prevent or avoid the potential result of the
specified hazard or unsafe practice.