Hamamatsu LCOS-SLM X15213 Series User manual

ＬＣＯＳ-ＳＬＭ
X15213 Series
OPERATION MANUAL
・Please read this operation manual carefully before using this device.
・Failure to follow the instructions in this manual
may result in a serious accident.
・Keep this manual in a convenient location at all times.
Doc. No. LEJ-B60002
First edition Mar. 18, 2021

1
1. Introduction
Be sure to read it.
 Be sure to read "Safety Precautions" before use.
 Read this operation manual carefully before using the product.
 Keep this manual in a safe place and read it when necessary.
2. Before using the device
 When using this equipment, observe the equipment specifications and precautions. Our company
makes every effort to improve the quality and reliability of this product, but does not guarantee the
integrity of this product. Do not use the product in any way that could harm human life, body or property.
Our company is not responsible for such use.
 Unpack the device and check the contents. If the equipment is damaged or there is a shortage of
accessories, contact our company without operating the product.
 The information in this manual must not be reproduced or copied without the permission of our company
Corporation.
This product does not include PCs. Be prepared by the user.
Included Items
LCOS-SLM Controller 1
LCOS-SLM Head 1
Relay board 1
Relay board cover
Cover plate 2
Fixed foot 4
Fixing screw 4
Rubber Foot for Controller 1
Power cable 1
AC Adapter 1
DVI-D cable 1
LCOS-SLM Certificate of Inspection 1
DVD 1
(The DVD contains the instruction manual (this book), distortion correction patterns, and control software.)

2
3. Safety Precautions
Please be sure to follow the rules.
This device is a Class II device specified in the IEC 61010 -1 standard (Safety requirements for measurement,
control and laboratory electrical equipment) (Equipment with protective grounding terminal). In order to use
the device correctly and safely, observe the following safety precautions when operating the device. Our
company assumes no responsibility or warranty for any damage caused by using the FOMA terminal in
contravention of these precautions.
The following symbols are used in this manual.
DANGER
Indicates an imminently hazardous situation which if not avoided,
will result in death or serious injury. This signal word is to be limited
to the most extreme situations.
WARNING
Indicates a potentially hazardous situation which if not avoided,
could result in death or serious injury.
CAUTION
Indicates a potentially hazardous situation which, if not avoided,
may result in minor or moderate injury.

3
3.1 Warning
■Handling the Power Cable
Turn off the power before installing or removing cables, and then hold the connectors.
Do not operate the product with wet hands or mount or remove the cable. There is a risk of electric
shock or malfunction and it is very dangerous.
■Cables
Do not damage, or place heavy objects on cables. Doing so may damage cables, resulting in electric
shock or fire.
■ground grounding of the power supply
To prevent electric shock or malfunction, always plug the power cord into a socket with a grounding
terminal using a 3-wire cord. 3 When connecting to a 2-wire power supply using the -2 adapter, be sure
to ground the ground wire.
■Location
To prevent fire, install the device in a well-ventilated area free of dust, water, and fire.
■Removing the LCOS-SLM Controller Cover
Do not remove the LCOS-SLM controller cover. There is a risk of electric shock and it is very
dangerous. Do not disassemble or modify the product. Removing the cover is not covered by product
warranty.
■Be careful of reflected light
LCOS-SLM modulates the phase of light incident from a laser or other light source, reflects it, and
outputs it. Be careful where the reflected light of the LCOS-SLM goes. In some cases, it may affect
human body such as blindness. Take appropriate measures such as using a beam damper to block
light or wearing protective glasses to prevent light from entering the eyes.
■Watch out for the diffracted light
LCOS-SLM generates unwanted reflected light due to the effect of pixel diffraction. Pay particular
attention to the effects of diffracted light when a high-intensity laser is incident on the LCOS-SLM.
In some cases, it may affect human body such as blindness. Take appropriate measures such as
cutting diffracted light and wearing protective glasses corresponding to the wavelength used.
■If you notice anything unusual
Do not use the product in a condition where smoke, odor, abnormal sound, or heat is generated. Doing
so may cause fire or electric shock. If this happens, turn off the power switch immediately. Please
contact our company after confirming that there is no abnormality. Please do not repair by yourself as it
is dangerous.
■Do not apply vibration or impact
Excessive vibration or shock may damage components or cause misalignment, resulting in fire or
electric shock.
■Use only the supplied AC adapter/power cable
This device is designed to be connected through the AC adapter and power cable supplied with the
product. Otherwise, fire or electric shock may result. For details, see "Power Cable/AC Adapter" on
page 13.
■Do not let foreign objects or water get inside
Fire or electric shock may result if flammable materials, metals, or moisture enter the product.

4
3.2 Caution
Be sure to read the following precautions before using the product.
■This equipment is a precision optical instrument.
(a) Do not apply excessive vibration or impact.
(b) Do not store or operate in a dusty or wet environment, or at high temperature and humidity.
(c) Do not touch or scratch the opening of the LCOS-SLM. The LCOS-SLM may malfunction or change
its properties due to contact with the aperture or impact to the LCOS-SLM. Especially when
shipping, please make sure that there is no contact with the opening window.
(d) If by any chance you touch the opening window, wipe it lightly with an ethanol-containing gauze. In
addition, wipe with a dry cloth except for the opening window.
(e) There is a risk of damage or deterioration due to static electricity or surge voltage. Handle it with
extreme care.
■Connect the connector properly and securely.
Connect the connectors correctly and securely. If you are not connected properly, LCOS-SLM may not
work correctly. Failure to do so could damage the LCOS-SLM controller and the customer's system. For
precautions on connecting the relay board to the FPC cable (flexible printed circuit board), see page 14
"Connecting/Removing Equipment". The warranty does not cover malfunctions caused by improper
connection.
■Pay attention to the image output setting.
DVI control requires a DVI output (Personal computers (hereinafter referred to as PC), etc.). Set the
display properties as follows:
Type X15213 Series
Screen size
12
80

1
0
2
4
(
SXGA
)
Refresh Rate
60 Hz
C
olors
True Color
(
3
2
Bit
)
■About warm-up operation.
After the power is turned on, the power is turned on for approximately 20 seconds. During this time, the
LCOS-SLM does not run. The LCOS-SLM is also more stable after a 10 minute warm-up period.
■Pay attention to the polarization of the incident light.
Pay attention to the polarization direction of the incident light. For details, see "Polarization direction of
the incident light" on page 21.
■Pay attention to the amount of incident light.
The LCOS-SLM may be damaged if a very strong light is applied. If high-intensity or high-peak-power
lasers are used, contact our company for assistance. Note that damage caused by the addition of
incident light exceeding the light resistance intensity is not covered by the warranty.
■Note the wavelength of the incident light.
Note the wavelength of the incident light. If the wavelength is not set at the time of shipment, the
reflectance or light resistance may decrease or the desired operation may not be obtained.
■Do not block the ventilation vents on the LCOS-SLM controller.
Install the LCOS-SLM controller (controller) with an approximately 10 cm clearance around the air
cooling fan and ventilation holes. Closing the ventilation holes prevents the heat from diffusing inside
the controller, which may cause equipment failure or fire. Note that the warranty does not cover the
failure of the controller caused by closing the ventilation port.

5
Table of Contents
1. Introduction ............................................................................................................................................... 1
2. Before using the device ........................................................................................................................... 1
3. Safety Precautions ................................................................................................................................... 2
3.1 Warning .............................................................................................................................................. 3
3.2 Caution ............................................................................................................................................... 4
4. Overview .................................................................................................................................................... 6
5. Characteristics .......................................................................................................................................... 7
5.1 Absolute maximum ratings ................................................................................................................. 7
5.2 Operating Environment Conditions .................................................................................................... 7
5.3 LCOS-SLM Head ................................................................................................................................ 7
5.4 LCOS-SLM Controller ......................................................................................................................... 8
5.5 AC Adapter ......................................................................................................................................... 8
5.6 Optical specifications .......................................................................................................................... 8
5.7 Conformance standard ....................................................................................................................... 8
6. Internal configuration .............................................................................................................................. 9
7. Names and descriptions of parts .......................................................................................................... 10
7.1 LCOS-SLM Head .............................................................................................................................. 10
7.2 LCOS-SLM Controller ........................................................................................................................ 11
7.3 Relay board／Relay board cover ..................................................................................................... 12
7.4 Power Cable／AC Adapter ............................................................................................................... 13
7.5 DVD (contains distortion correction pattern and control software) ................................................... 13
8. Connecting／Removing Equipment ..................................................................................................... 14
8.1 Connection procedure ...................................................................................................................... 14
8.2 Connecting the relay board .............................................................................................................. 15
8.3 Relay board cover assembly ............................................................................................................ 17
8.4 Removal procedure .......................................................................................................................... 18
9. Setup ........................................................................................................................................................ 19
9.1 setup example of the optical system ................................................................................................ 19
9.2 Installing the Rod Stand ................................................................................................................... 20
9.3 Polarization direction of the incident light ......................................................................................... 21
9.4 How to set DVI video output (PC) .................................................................................................... 22
10. How to ................................................................................................................................................. 23
11. LCOS-SLM operation check .............................................................................................................. 24
12. Trouble shooting ................................................................................................................................ 26
13. Technical explanation ........................................................................................................................ 28
14. Warranty, repair .................................................................................................................................. 29
15. Dimensional outline ........................................................................................................................... 30
16. Water-cooled type (L, R Series) handling ........................................................................................ 32
17. External Dimensions (water-cooled type)........................................................................................ 37

6
4. Overview
LCOS-SLM is a liquid-crystal on silicon (LCOS) spatial light modulator that can modulate only the phase of
incident light. The phase of the incident light can be controlled arbitrarily by generating and displaying an
image using a DVI output device (PC, etc.).
LCOS-SLM has the following features:.
○ High precision phase modulation characteristics
○ High diffraction efficiency
○ High light utilization efficiency
Fig. 1 shows the concept of the phase modulation characteristics of the LCOS-SLM. The gradation value
of the image displayed on the PC becomes the value input to the LCOS-SLM, and the phase modulation
amount changes according to the input gradation value. The LCOS-SLM's non-linear response and phase
modulation characteristics, which vary from device to device, are corrected by adjusting parameters at the
time of shipment. As shown in Fig. 1, the phase modulation characteristics differ depending on the
wavelength used.
Fig.1 Phase Modulation Characteristics (Typical example)
Multilevel phase gratings can be displayed on LCOS-SLM to diffract light at any position. Please refer to
the Product Flyer for the efficiency of light diffracted (diffraction efficiency) at an arbitrary position when a
multilevel phase grating is displayed on the LCOS-SLM. Diffraction efficiency depends on the type of
LCOS-SLM.
0
1
2
3
4
5
6
0 32 64 96 128 160 192 224 256
入力階調値
位相変調量 π[rad]
700nm
633nm
532nm
405nm
Input signal level
Phase modulation [πrad.]

7
5. Characteristics
5.1 Absolute maximum ratings
Parameter Value Unit
Operating temperature + 10 to + 40 (no condensation) °C
Storage temperature -20 ~ + 55 (no condensation) °C
Note1) Be careful of humidity because humidity can cause characteristic deterioration.
Note2) Since LCOS-SLM is temperature dependent, it is recommended to use it at an ambient
temperature of about 25 °C.
5.2 Operating Environment Conditions
Parameter Value Unit
Place of use indoor use -
Operating altitude ≦2000 m
Degree of pollution 2 -
IP code IP 20 -
IK code IK08 -
Recommended Operating
Environment Temperature 25 °C
Operating humidity 30～70 (no condensation) %R.H.
Storage humidity 30～85 (no condensation) %R.H.
Warm-up time 10 minutes
5.3 LCOS-SLM Head
Parameter Value Unit
Number of pixels 1302528 (1272 x 1024) Pixels
Pixel pitch 12.5 µm
Maximum spatial frequency 40 lp/mm
Effective area 15.9 x 12.8 mm
Fill factor 96 %
Input signal levels 256 level
Weight 150 , 550 (L, R) g
Note1) “L” and “R” are designed with a water-cooled heat sink (water jacket).

8
5.4 LCOS-SLM Controller
Parameter Value Unit
Input power supply voltage +24 V
Allowable voltage fluctuation ± 5 %
Current consumption 0.6 A
Input signal Digital Video Interface (DVI-D)
USB-B (2.0 High speed) -
Weight 0.9 kg
5.5 AC Adapter
Parameter In/Out Value Unit
Power supply voltage Input 100 AC to 240 AC V
Frequency Input 50/60 Hz
Allowable voltage fluctuation Input ± 10 %
Power consumption Input 15 W
Overvoltage category Input II -
Output voltage Output +24 V
Output voltage fluctuation Output
± 5 %
Ripple Output 0.24 (MAX) V
Output current Output 2.71 (MAX) A
Over Voltage Protection Output + 36 (MAX) V
Plug shape Output
φ 5.5 - φ 2.1 - L 9.5 mm
Note1) Do not use anything other than the supplied AC adapter.
Note2) The power consumption indicates the value when connected to the LCOS-SLM controller.
5.6 Optical specifications
Check the data sheet for the applicable wavelength range of each type, light utilization efficiency, and
response speed.
5.7 Conformance standard
Safety IEC 61010 -1: 2010 + AMD1: 2016
EMC IEC 61326 -1: 2012
Emission limits CISPR 11 Group 1, Class B
Immunity requirements - Tables 1

9
6. Internal configuration
As shown in Fig. 2, the LCOS-SLM consists of a glass substrate, a transparent electrode, an alignment film,
a liquid crystal layer aligned in parallel, a dielectric multilayer mirror, and a silicon substrate. An active matrix
circuit is formed on the silicon substrate to apply voltage to the pixel electrode and the pixel electrode.
The number of pixels of the X15223 series is 1272×1024, and arbitrary control is possible for each pixel.
The display properties set on the PC are as shown in Fig. 3, and the input signals in the right eight columns
are ignored. Therefore, the signal of 1272×1024 pixels is displayed from the left.
Phase modulation is performed on the liquid crystal layer. The phase is modulated by the parallel aligned
liquid crystal layer, and the phase modulation amount changes according to the applied voltage. Although
liquid crystals generally respond non-linearly to input voltages, linear phase modulation is achieved with
respect to input values by incorporating a look-up table (LUT: Look-Up Table) within the drive circuit that
converts 8 bits of input into 12 bits.
Dielectric multilayer mirrors help to improve light utilization efficiency. The use of a dielectric multilayer
mirror makes it possible to achieve a light utilization efficiency of 90% or more in a specific wavelength range,
which is higher than that of LCOS-SLM composed of aluminum mirrors. The aluminum mirror type can be
used in a wider wavelength range than the type equipped with a dielectric multilayer mirror. However, the light
resistance is lower than that with a dielectric multilayer mirror, so be careful when using a high-power light
source.
Fig.2 Configuration of LCOS-SLM
Fig.3 Relationship between LCOS-SLM pixel structure and display properties
(Right 8 columns not used)
1272
1024
8
Glass substrate
Alignment films
Liquid crystal layer
Dielectric mirror
Silicon substrate
Transparent electrode

10
7. Names and descriptions of parts
This section describes the names and descriptions of each part of the device and the bundled product.
7.1 LCOS-SLM Head
The LCOS-SLM modulates the phase of the incident light.
Caution
Do not remove the cover as it may cause damage.
If the cover is removed, the product is not covered.
Fig.4 LCOS-SLM Head
Name Description
Window
When light enters this part, the phase-modulated light is emitted.
The sizes are shown below, so please be careful when using.
Window Size: 18 mm x 14.4 mm
Chip Size: 22 mm x 22 mm
LCOS-SLM Active area: Chip Center 15.9 mm x 12.8 mm
FPC cable
Flexible printed circuit board (450mm).
Connect to the LCOS-SLM controller using the relay board supplied with the
product.
Caution
Do not pull or bend the FPC cable to prevent damage.
Do not lift the LCOS-SLM head with the FPC cable.
Liquid crystal molecule
orientation direction
Window
FPC cable
Active area:
1
5.9 mm x
12
.8 mm

11
7.2 LCOS-SLM Controller
The LCOS-SLM controller includes a circuit to generate data and control signals, an air-cooled fan to
cool the circuit heating elements, and a voltage conversion board to drive them. The controller processes
the image signals from the PC over the DVI-D cable and sends control signals to the LCOS-SLM.
Fig.5 Back of the controller
 POWER switch
Main power switch
 DC IN 24 V (Power connector)
Connect the supplied power cord to the AC adapter (24 VDC).
 DVI IN (DVI Connector)
Connect your PC to the LCOS-SLM controller using a DVI-D cable to control the output pattern of the
LCOS-SLM head. This document focuses on DVI control.
 USB-B connector
Connect your PC to the LCOS-SLM controller using the USB 2.0 HighSpeed standard.
Using the USB connection, you can control the output pattern of the LCOS-SLM head and know the
status of the controller more freely. For details, refer to "USB Control Manual" on the DVD.
The USB cable is not included with the product.
 LED (POWER)
Lights when the power switch is on.
An FPC cable (Approx. 65 mm protruding) is connected to the LCOS-SLM controller.
Caution
Do not pull or bend the FPC cable to prevent damage.
Do not lift the LCOS-SLM controller with the FPC cable.
FPC cable

12
7.3 Relay board／Relay board cover
The relay board is used to connect the LCOS-SLM head to the LCOS-SLM controller.
See "Connecting/Removing Equipment" on page 14 for connecting.
Caution
Be sure to attach a cover to the relay board.
Peripheral devices may be affected.
Fig.6 Connecting the relay board
A15218-01
Relay board
Actuator
FPC Connector
LCOS-SLM Head LCOS-SLM Controller

13
7.4 Power Cable／AC Adapter
Provides external power to the LCOS-SLM controller and LCOS-SLM head.
Use only the supplied AC adapter/power cable to power the LCOS-SLM.
In addition, the AC adapter/power cable of this product may not be shipped with the product because it
does not comply with safety standards in certain areas. In this case, prepare an AC adapter that complies
with your country's safety standards for 24 V. However, if an overshoot of 40 V or more occurs when the
power is turned on, the overvoltage may cause the internal circuit to burn out. Before use, confirm that no
overvoltage occurs. The warranty does not cover failures caused by applying an overvoltage.
7.5 DVD (contains distortion correction pattern and control
software)
 Distortion Correction Sample Patterns
LCOS-SLM mirror planes have an initial geometric distortion that is unavoidable in manufacturing (For
details, see "Distortion correction pattern" on page 28.). The DVD contains a pattern to compensate for
this distortion. The distortion correction pattern is stored in bitmap format and has a size of 1272 x 1024
pixels.
By adding this pattern to the desired pattern, you can minimize the effect of initial shape distortion and
achieve better results. Refer to the "LCOS-SLM phase control method" section of the software operation
manual for how to add up.
The shape distortion of the LCOS-SLM may change from the initial state depending on the
environmental temperature, storage condition and handling method.
 Control software
Sample software is available for users who want to use LCOS-SLM easily. For details, refer to the
"LCOS-SLM Software Manual" on the DVD.
 Instruction Manual/ LCOS-SLM Software Manual
This manual and the operation manual of the control software.
 USB SLMControl Manual
This is the instruction manual for USB control.

14
8. Connecting ／ Removing Equipment
This chapter explains how to connect and disconnect devices.
Caution Turn off the power before connecting or disconnecting.
Caution Always remove static electricity from the body before touching
the equipment.
8.1 Connection procedure
Connect the LCOS-SLM head, LCOS-SLM controller and PC as follows.
(1) Connect the LCOS-SLM head side FPC cable to the LCOS-SLM controller side FPC cable via the FPC
connector on the relay board. When connecting the relay board, refer to page 15, "Connecting the relay
board" for precautions.
(2) The relay board is placed in the relay board cover. For details, see "relay board cover assembly" on
page 17.
(3) Connect a DVI-D cable from the DVI connector on the LCOS-SLM controller to the DVI-capable PC.
Please prepare your own PC.
(4) Connect the LCOS-SLM controller to the power supply using the power cable and AC adapter supplied
with the controller.
Fig.7 connection diagram

15
8.2 Connecting the relay board
(1) Connecting method of FPC Cable
The FPC cable can be locked by inserting it deep into the FPC connector and tilting the actuator.
The FPC cable can be disconnected by raising the actuator. When tilting the actuator, apply force
evenly. When removing, do not use any tools and use your fingertips to lift up the center part.
Fig.8 Precautions when tilting the actuator
Fig.9 Precautions for raising the actuator
(2) FPC Cable Connection Guidelines
Be careful not to mistake the front and back of the FPC cable. The side written “RELAY BOARD” is
the front.
controller side head side
Fig.10 FPC Cable Connection Guidelines
Put no effort
in one place
Apply equal
force to the
whole
Apply force to the
center of
End Only
Without (any)
force

16
Fig. 11 shows the correct connection. The FPC cable on the head side or controller side can be
connected to either side of the relay board.
Fig.11 correct connection state
The LCOS-SLM will not function properly if the FPC cable is used with the following incorrect
connection.
 Fig. 12 (a) shows the FPC cable connected at an angle.
 Fig. 12 (b) shows that the FPC cable is not fully inserted.
 Fig. 12 (c) shows that the actuator is not locked.
(a)Incorrect Connection Example 1 (b)Incorrect Connection Example 2
(c)Incorrect Connection Example 3
Fig.12 Example of relay board connection

17
8.3 Relay board cover assembly
Make sure you have all the accessories shown in Fig. 13.
Fig.13 List of all relay board cover accessories
Fig.14 relay board assembly
As shown in Fig. 14, insert the FPC cable vertically so that the GND contact of the FPC cable contacts the
gasket of the relay plate cover. Assemble the cover plate so that the mounting projections enter each other's
grooves. If you fix it with the attached screw, it will come in firm contact.
Cover plate:
2
GND contact
Fixed Foot:
4
Fixing screws:
4
Mounting
projection
Gasket

18
8.4 Removal procedure
(1) Turn off the power switch.
(2) Remove the relay board cover screws and remove the cover.
(3) You can remove various cables.
Caution
The head and the FPC cable connected to the controller cannot
be removed. If you try to remove it forcibly, it may cause
malfunction. Please be careful.

19
9. Setup
9.1 setup example of the optical system
Fig. 15 and Fig. 16 show examples of optical system setup using LCOS-SLM. Example 1 is an optical
system using a half mirror. Example 2 shows a grazing incidence optical system. Example 2 has the
advantage of less light loss due to the half mirror than Example 1.
Fig.15 Setup Example 1
Advice: Using an aperture with a circular aperture of Φ = 12 mm or less produces a good focused image.
Fig.16 Setup Example 2
Advice: The incidence angle θ of the oblique incidence optical system in Example 2 should be within 5°.
Advice: In the case of the oblique incidence optical system of Example 2, the incident light should be
incident with horizontal polarization (Note).
Note) Horizontal polarization is the direction of polarization parallel to a plane containing incident and
reflected light.
Advice: Please note that damage caused by the addition of incident light exceeding the light resistance
intensity is not covered by the warranty. Contact our company for information on light resistance.
Warning Watch out for reflected light.
Warning Note the reflected light due to the diffracted light caused by
the pixel diffraction.
Laser
Special filter
Collimating lens
Aperture Half mirror
LCOS-SLM
Head
Fourier transform
Lens
Output
Polarization
direction Readout
light
Output Fourier
Transform lens
LCOS-SLM
Head