Inficon PGE500 User manual

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Pirani Gauge Enhanced
PGE500
With DeviceNet
Operating Manual
Incl. EU Declaration of Conformity

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Product Identification
In all communications with INFICON, please specify the infor-
mation given on the product nameplate. For convenient refer-
ence copy that information into the space provided below.

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Validity
This document applies to products with part numbers:
The part number (PN) can be taken from the product nameplate.
This User Manual is applicable to the INFICON® model PGE500
product with Device Net interface manufactured with firmware
number FW 2998-101 and higher (last three digits of 101 or
higher). See STATUS menu described in section 4.6.4of this
manual to determine the firmware version of your PGE500
We reserve the right to make technical changes without prior
notice.

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Important User Information
There are operational characteristic differences between solid
state equipment and electromechanical equipment. Because of
these differences, and because there are a variety of uses for
solid state equipment, all persons that apply this equipment must
take every precaution and satisfy themselves that the intended
application of this equipment is safe and used in an acceptable
manner.
In no event will INFICON be responsible or liable for indirect or
consequential damages that result from the use or application of
this equipment.
Any examples or diagrams included in this manual are provided
solely for illustrative purposes. Because of the many variables
and requirements imposed on any particular installation,
INFICON cannot assume responsibility or liability for any actual
use based on the examples and diagrams.
No patent liability is assumed by INFICON with respect to use of
information circuits, equipment, or software described in this
manual.
Throughout this manual we use notes, notices and apply inter-
nationally recognized symbols and safety messages to make
you aware of safety considerations.

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Identifies information about practices or circumstances that can
cause electrical or physical hazards which, if precautions are not
taken, could result in death or serious injury, property damage,
or economic loss.
Identifies information about practices or circumstances that can
cause electrical or physical hazards which, if precautions are not
taken, could result in minor or moderate injury, property damage,
or economic loss.
Identifies information that is critical for successful application and
understanding of the product.
Labels may be located on or inside the device to alert people
that dangerous voltages may be present.
CAUTION
NOTICE
SHOCK HAZARD

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General Safety Instructions
•Adhere to the applicable regulations and take the necessary
precautions for the process media used.
Consider possible reactions with the product materials.
Consider possible reactions (e.g. explosion) of the process
media due to the heat generated by the product.
•Adhere to the applicable regulations and take the necessary
precautions for all work you are going to do and consider the
safety instructions in this document.
•Before beginning to work, find out whether any vacuum com-
ponents are contaminated. Adhere to the relevant regulations
and take the necessary precautions when handling contamin-
ated parts.
Communicate the safety instructions to all other users.
Liability and Warranty
INFICON assumes no liability and the warranty becomes null
and void if the end-user or third parties
•disregard the information in this document
•use the product in a non-conforming manner
•make any kind of interventions (modifications, alterations etc.)
on the product
•use the product with accessories not listed in the product
documentation.
The end-user assumes the responsibility in conjunction with the
process media used.
Gauge failures due to contamination or wear and tear, as well as
expendable parts (e.g. Pirani filament), are not covered by the
warranty.

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Contents
Product Identification 2
Validity 3
Important User Information 4
General Safety Instructions 6
Liability and Warranty 6
1Introduction / General Information 9
1.1 Description 9
1.2 Specifications 10
1.3 Dimensions 12
2Important Safety Information 13
2.1 Safety Precautions - General 13
2.2 Safety Precautions - Service and Operation 14
2.3 Electrical Conditions 15
2.3.1 Proper Equipment Grounding 16
2.3.2 Electrical Interface and Control 16
2.4 Overpressure and use with hazardous gases 17
2.5 Gases other than Nitrogen / air 18
3Installation 18
3.1 Mechanical Installation 18
3.2 Electrical Installation 21
3.2.1 Grounding 21
3.2.2 Electrical Connections 22
4Setup and Operation 23
4.1 User Interface Basics 23
4.2 DeviceNet and Module Status LEDs 24
4.3 DeviceNet Setup Switches 25
4.3.1 Data Rate Switch Setting 26
4.3.2 Node Address Switch Setting 26
4.4 Initial Setup 27
4.5 Factory-Set Default Parameters 28
4.6 Programming 30
4.6.1 DISPLAY 30
4.6.2 STATUS 32
4.6.3 DEFAULTS 32
4.6.4 CALIBRATION 33
4.6.5 RELAYS 34

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5Using the gauge with different gases 37
6Display 40
6.1 Display - Torr 40
6.2 Display - mBAR 44
7DeviceNet Operation 48
7.1 Supported DeviceNet Objects for ODVA compliance 48
7.2 Supported DeviceNet Objects compliant with Semi
Guidelines 49
7.3 Other supported DeviceNet Objects 49
7.4 Configuring the DeviceNet switches 49
7.5 Allocating DeviceNet connections to the PGE500 50
7.6 Configuring Expected Packet Rate 50
7.7 Configuring Polled I/O data format 51
7.8 UINT 2 byte integer pressure 52
7.9 DeviceNet Protocol for PGE500 52
7.9.1 Standard Objects 54
7.9.1.1 Identity Object 54
7.9.1.2 DeviceNet Object 55
7.9.1.3 Connection Object - Explicit Message Connection 56
7.9.1.4 Connection Object - Polled I/O Data 57
7.9.1.5 Discrete Output Point Object 58
7.9.1.6 S-Device Supervisor Object 59
7.9.1.7 S-Analog Sensor Object 60
7.9.1.8 S-Gas Calibration Object 61
7.9.1.9 Trip Point Object 62
8Service 63
8.1 Calibration 63
8.2 Maintenance 63
8.3 Troubleshooting 64
8.4 Contamination 66
8.5 Module and sensor replacement 68
9Factory Service and Support 74
10 Returning the Product 75
11 Disposal 75
12 Spare Parts 77
EU Declaration of Conformity 78
For cross-references within this document, the symbol (→XY)
is used.

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1 Introduction / General Information
1.1 Description
Thermal conductivity gauges measure pressure indirectly by
sensing the loss of heat from a sensor to the surrounding gases.
The higher the pressure of the surrounding gas, the more heat is
conducted away from the sensor. Pirani thermal conductivity
gauges maintain a sensor (usually a wire) at some constant tem-
perature, and measure the current or power required to maintain
that temperature. A standard Pirani gauge has a useful measur-
ing range of about 10-4 Torr to 10 Torr. By taking advantage of
convection currents that are generated above 1 Torr, convection-
enhanced Pirani gauges increase the measuring range to just
above atmosphere.
The INFICON®PGE500 module provides the basic signal condi-
tioning required to turn a convection vacuum gauge into a com-
plete measuring instrument. This version of the PGE500 pro-
vides a DeviceNet interface as well as two process control set-
point relays. Additionally a built-in OLED digital display provides
the measured pressure values and provides for a convenient
user interface for setup and operation of the vacuum gauge. The
INFICON PGE500 module will also directly replace the
DeviceNet version of the Granville-Phillips® / MKS Mini-Convec-
tron® vacuum gauge as the electrical connector pin-out and
DeviceNet commands are identical to the corresponding Mini-
Convectron®.

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1.2 Specifications
Measurement range 1.3×10-4 … 1333 mbar
1×10-4 … 1000 Torr
1.3×10
-2
Pa … 133 kPa
Accuracy - N2(typical)
1×10-4 … 1×10-3 Torr
1×10-3 … 400 Torr
400 … 1000 Torr
0.1 mTorr resolution
±10% of reading
±2.5% of reading
Repeatability - N2(typical)
±2% of reading
Display
bright OLED
Scientific notation: 3 digits plus 2 digit exponent for user se-
lectable units in Torr, mbar or Pa.
Engineering notation is also user selectable for Torr/mTorr
only.
Materials exposed to vacuum gold-plated tungsten, 304 & 316
stainless steel, glass, nickel,
Teflon
®
Housing (electronics)
aluminum extrusion
Internal volume
26 cm
3
(1.589 in
3
)
Internal surface area
59.7 cm
2
(9.25 in
2
)
Weight
340 g (12 oz.)
Permissible temperature
Operating
0 … +40 °C
Storage
–40 … +70 °C
Bakeout temperature ≤150 °C (gauge only - electro-
nics removed)

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Relative humidity
0 … 95%, non-condensing
Use
Operating
altitude up to 2500 m (8200 ft.)
Storage altitude up to 12500 m
(41000 ft.)
Mounting orientation horizontal recommended
(orientation has no effect on
measurements below 1.3 mbar
(1 Torr))
DeviceNet Interface
Device type vacuum gauge/pressure gauge
device
Adjustable parameters setpoints, engineering units of
measure, vacuum and atmos-
phere calibration
Messaging
polled I/O and explicit
Baud rates 125K, 250K, or 500K, adjust-
able via rotary switch
Supply voltage 12 … 26 V (dc), 0.22 A, 2.4 W
protected against power rever-
sal and transient over-voltages
Setpoint relays two, single-pole double-throw
relays (SPDT), 1 A at 30 V (dc)
resistive, or V (ac) non-induc-
tive
Electrical connection 9-pin D-sub male used for
setpoint relays
5-pin Micro for power and
DeviceNet interface

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1.3 Dimensions
Fitting
Dimension A
mm
(inch)
DN 16 ISO-KF
29.5
(1.16)
DN 25 ISO-KF
29.5
(1.16)
DN 40 ISO-KF
29.5
(1.16)
DN 16 CF-R
34
(1.34)
DN 40 CF-R
34
(1.34)
4 VCR female
43.7
(1.72)
8 VCR female
40.9
(1.61)
1/8" NPT male
21.8
(0.86)

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2 Important Safety Information
INFICON has designed and tested this product to provide safe
and reliable service, provided it is installed and operated within
the strict safety guidelines provided in this manual. Please read
and follow all warnings and instructions.
To avoid serious injury or death, follow the safety informa-
tion in this document. Failure to comply with these safety
procedures could result in serious bodily harm, including
death, and or property damage.
Failure to comply with these warnings violates the safety stand-
ards of installation and intended use of this instrument. INFICON
disclaims all liability for the customer’s failure to comply with
these instructions.
Although every attempt has been made to consider most possi-
ble installations, INFICON cannot anticipate every contingency
that arises from various installations, operation, or maintenance
of the module. If you have any questions about the safe installa-
tion and use of this product, please contact INFICON.
2.1 Safety Precautions - General
The product should never be operated with the enclosure re-
moved.
WARNING! There are no operator serviceable parts or
adjustments inside the product enclosure. However, the sensor
inside the product enclosure is replaceable. Refer servicing to
service trained personnel.
WARNING

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Do not modify this product or substitute any parts without au-
thorization of qualified INFICON service trained personnel. Re-
turn the product to an INFICON qualified service and repair cen-
ter to ensure that all safety features are maintained. Do not use
this product if unauthorized modifications have been made.
WARNING! Source power must be removed from the
product prior to performing any servicing.
After servicing this product, ensure that all safety checks are
made by a qualified service person. When replacement parts are
required, ensure that the parts are specified by INFICON Sub-
stitutions of non-qualified parts may result in fire, electric shock
or other hazards. Use of unauthorized parts or modifications
made to this product will void the warranty.
To reduce the risk of fire or electric shock, do not expose this
product to rain or moisture. These products are not waterproof
and careful attention must be paid to not spill any type of liquid
onto these products. Do not use these products if they have
been damaged. Immediately contact INFICON to arrange return
of the product if it is damaged.
Due to the possibility of corrosion when used in certain environ-
mental conditions, it is possible that the product’s safety could be
compromised over time. It is important that the product be peri-
odically inspected for sound electrical connections and equip-
ment grounding. Do not use if the equipment grounding or elec-
trical insulation has been compromised.
2.2 Safety Precautions - Service and Operation
Ensure that the vacuum port on which the PGE500 vacuum
gauge is mounted is electrically grounded.
Use an appropriate power source of 12 … 26 V (dc), 0.22 A,
2.4 W.
Turn off power to the unit before attempting to service the
module.

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Turn off power to the unit if a cable or plug is damaged or the
product is not operating normally according to this operating
manual. Contact qualified INFICON service personnel for any
service or troubleshooting condition that may not be covered by
this operating manual.
It is important that the product be periodically inspected for
sound electrical connections and equipment grounding. Do not
use if the equipment grounding or electrical insulation has been
compromised.
Do not use if the unit has been dropped or the enclosure has
been damaged. Contact INFICON for return authorization and
instructions for returning the product to INFICON for evaluation.
2.3 Electrical Conditions
WARNING! When high voltage is present in any vacuum
system, a life threatening electrical shock hazard may exist un-
less all exposed electrical conductors are maintained at earth
ground potential. This applies to all products that come in con-
tact with the gas contained in vacuum chambers. An electrical
discharge within a gaseous environment may couple dangerous
high voltage directly to any ungrounded conductor of electricity.
A person could be seriously injured or killed by coming in contact
with an exposed, ungrounded electrical conductor at high volt-
age potential. This condition applies to all products that may
come in contact with the gas inside the vacuum chamber
(vacuum / pressure containment vessel).

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2.3.1 Proper Equipment Grounding
WARNING! Hazardous voltages that could seriously in-
jure or cause death are present in many vacuum processes.
Verify that the vacuum port on which the PGE500 vacuum gauge
module is mounted is electrically grounded. Consult a qualified
Electrician if you are in doubt about your equipment grounding.
Proper grounding of your equipment is essential for safety as
well as intended operation of the equipment. The PGE500 mo-
dule vacuum gauge must be connected directly to a good quality
earth ground. Use a ground lug on the PGE500 gauge vacuum
connection / flange if necessary.
WARNING! In order to protect personnel from electric
shock and bodily harm, shield all conductors which are subject to
potential high voltage electrical discharges in or around the
vacuum system.
2.3.2 Electrical Interface and Control
It is the user’s responsibility to ensure that the electrical signals
from this product and any connections made to external devices,
for example, relays and solenoids, are used in a safe manner.
Always double check the system set-up before using any signals
to automate your process. Perform a hazardous operation analy-
sis of your system design and ensure safeguards and personnel
safety measures are taken to prevent injury and property dam-
age.

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2.4 Overpressure and use with hazardous gases
WARNING! Install suitable protective devices that will
limit the level of pressure inside your vacuum chamber to less
than what the vacuum chamber system components are capable
of withstanding. INFICON gauges should not be used at pres-
sures exceeding 1000 Torr absolute pressure.
In cases where an equipment failure could cause a hazardous
condition, always implement fail-safe system operation. For ex-
ample, use a pressure relief device in an automatic backfill op-
eration where a malfunction could result in high internal pres-
sures if the pressure relief device was not installed on the
chamber.
The PGE500 vacuum gauge module is not intended for use at
pressures above 20 psia (1000 Torr); DO NOT exceed 35 psig
(<2½ bars) pressure inside the sensor. If your chamber goes to
higher pressures, you should install an isolation valve or pres-
sure relief device to protect the gauge tube from overpressure
conditions. With some fittings, actual safe overpressure condi-
tions may be lower; for example, a quick-connect, O-ring com-
pression fitting may forcibly release the gauge tube from the
vacuum chamber fitting with only a few psi over local uncor-
rected barometric (atmospheric) pressure.
CAUTION! If the internal pressure of a vacuum gauge
device is allowed to increase above local uncorrected baro-
metric pressure (atmospheric pressure side), vacuum fit-
tings may release and possible overpressure conditions
may cause leaks that would allow the gas inside the gauge
tube to release into the atmosphere of the surrounding en-
vironment. Toxic, pyrophoric and flammable gases are ex-
amples of hazardous gases that if allowed to leak out of the
vacuum/pressure containment vessel into the atmospheric
environment, could cause bodily injury and possible dam-
age to equipment. Never expose the gauge tube internal
volume to pressure above local atmospheric pressure when
using hazardous gases.

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2.5 Gases other than Nitrogen / air
WARNING! Do not attempt to use with gases other than
nitrogen (N2) or air without referring to correction factor data
tables.
INFICON gauges and modules are calibrated for direct readout
of nitrogen or air. Do not attempt to use with other gases such as
argon (Ar) or carbon dioxide (CO2) unless accurate conversion
data for N2to other gas is properly used. Refer to sections titled
"Using the gauge with different gases", "Display" and "Analog
Output" for a more complete discussion.
WARNING! Do not use this device in an explosive atmos-
phere or in the presence of flammable gases, vapors or fumes.
Do not use this device to measure the pressure of explosive or
combustible gases or gas mixtures. The sensor wire in the
gauge normally operates at 125 °C, but if malfunction should
occur, the wire temperature could exceed the ignition tempera-
ture of certain combustible gases and gas mixture. This could
cause an explosion which could result in serious injury or death.
3 Installation
3.1 Mechanical Installation
Mount the PGE500 as close as possible to the pressure you
want to measure. Long or restricted, small diameter tubing will
create a pressure difference between your process chamber and
the gauge. This may cause a delay in response to pressure
changes.

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Mounting the PGE500 too close to a gas source inlet may also
cause measurement and control instability. Do not mount the
PGE500 near a source of heating or cooling, such as heaters or
air conditioning vents.
Mount the PGE500 with its main (long) axis horizontal (see dia-
gram below). Pressure reading errors may occur above 1 Torr if
the unit is not mounted horizontally. Below 1 Torr, mounting
position has little to no effect.
For accurate measurements above 1 Torr, mount the gauge axis
horizontally as shown below:
Vacuum chamber

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Incorrect Orientation:
Mount the PGE500 with port down, if possible, to help minimize
the effect of any particles or condensation from collecting in the
gauge.
Do not mount the PGE500 where it will be subjected to exces-
sive vibration. Vibrations may cause unstable readings, measu-
rement errors and possible mechanical stress to components in
the PGE500.
Flanges/ Fittings - follow the manufacturer's recommendations
and note the following: