J.A. Woollam alpha-SE User manual

alpha-SE®
Spectroscopic
Ellipsometer
Hardware Manual

Copyright © 2004-2018 J.A. Woollam Co. All Rights Reserved.
J.A. Woollam Co.
645 M Street, Suite 102
Lincoln, NE 68508
USA
Ph: 402.477.7501
Fx: 402.477.8214
www.jawoollam.com
[email protected]
[email protected]
[email protected]
Thank you for purchasing a J.A. Woollam Co. Spectroscopic Ellipsometer. We hope the information
contained in this manual will help you develop a better understanding and appreciation for the
alpha-SE hardware.
The contents of this manual are subject to change without notice and do not constitute a
commitment on the part of J.A. Woollam Co. Every effort has been made to ensure the accuracy of
this document. However, due to ongoing product improvements and revisions, J.A. Woollam Co.
cannot guarantee the accuracy of the printed material after the date of publication nor can it
accept responsibility for errors or omissions. J.A. Woollam Co. will update and revise this
document as needed.
Copying and Distribution
You are welcome to make backup copies of the CompleteEASE software and documentation for
your own use and protection. However, you are not permitted to make copies for others or for
resale.
Trademarks
CompleteEASE and alpha-SE are trademarks of J. A. Woollam Co. All other trademarks used within
are the property of their respective owners.

alpha-SE Hardware Manual Contents
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iii
Contents
1. Safety Instructions 1-1
1.1. Message Boxes.........................................................................................................1-1
1.2. General Safety Instructions ......................................................................................1-1
1.3. Environmental Operating Range ..............................................................................1-2
2. Quick Guide 2-1
2.1. Manual Overview.....................................................................................................2-1
2.2. Quick Setup..............................................................................................................2-3
1. Unpack and assemble the instrument ................................................................2-3
2. Install, activate, and run CompleteEASE software ...........................................2-3
3. Check the beam and calibrate the system..........................................................2-4
4. Collect data .......................................................................................................2-5
3. System Installation 3-1
3.1. alpha-SE Specifications............................................................................................3-1
Measurement Capabilities ........................................................................................3-1
Data Analysis Capabilities .......................................................................................3-1
3.2. Facilities Requirements ............................................................................................3-2
3.3. Unpacking the Hardware..........................................................................................3-3
Opening the Shipping Container ..............................................................................3-3
Attaching the Sample Chuck....................................................................................3-4
Releasing the Z-stage Shipping Lock.......................................................................3-5
3.4. Installing the Software..............................................................................................3-7
Before Installation ....................................................................................................3-7
Running the SETUP Program...................................................................................3-7
Operating Hardware ...............................................................................................3-12
3.5. Activating the Software..........................................................................................3-13
3.6. Connecting the alpha-SE ........................................................................................3-13
Verifying the alpha-SE Driver Installation.............................................................3-14
3.7. Running the CompleteEASE Software...................................................................3-15
3.8. Learning Data Analysis..........................................................................................3-16
4. Initial System Checks and Calibration 4-1
4.1. Initial System Operation...........................................................................................4-1
alpha-SE System Components..................................................................................4-1
Changing the Angle of Incidence (AOI) ..................................................................4-2
4.2. Checking Beam Alignment at 90°............................................................................4-4
4.3. Checking Signal Intensity.........................................................................................4-5
Low Intensity............................................................................................................4-5
High Intensity...........................................................................................................4-5
4.4. Checking Straight-Through SE Data Accuracy........................................................4-6
4.5. Measuring the Reference Wafer...............................................................................4-7
4.6. S-T Baseline ...........................................................................................................4-10
4.7. Off-Sample Baseline ..............................................................................................4-12
4.8. Calibrating the Angle of Incidence.........................................................................4-14
4.9. Powering Down......................................................................................................4-18
5. Data Collection 5-1

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Contents alpha-SE Hardware Manual
5.1. Measurement Tab Overview ....................................................................................5-1
5.2. Off-Sample Measurements.......................................................................................5-3
Measuring a Sample .................................................................................................5-3
5.3. Straight-Through Measurements ..............................................................................5-5
5.4. Mueller-matrix Measurements .................................................................................5-7
6. Hardware Tab 6-1
6.1. Hardware..................................................................................................................6-1
Re-initialize ..............................................................................................................6-1
Park Z-Stage.............................................................................................................6-1
6.2. Signal........................................................................................................................6-2
Display .....................................................................................................................6-2
Max. Sig. Display.....................................................................................................6-2
Z-Stage Scan.............................................................................................................6-2
6.3. Calibration................................................................................................................6-3
S-T Baseline .............................................................................................................6-3
Off-Sample Baseline ................................................................................................6-3
Angle Offsets............................................................................................................6-4
6.4. Show Logs................................................................................................................6-4
Hardware and Error Logs .........................................................................................6-4
6.5. Camera .....................................................................................................................6-5
Show Image Dialog..................................................................................................6-5
Mark Beam Position.................................................................................................6-6
Illumination On ........................................................................................................6-7
6.6. Routine Test Measurement.......................................................................................6-7
Measure....................................................................................................................6-8
Show Results............................................................................................................6-8
6.7. Configuration Files...................................................................................................6-8
hardware.cnf.............................................................................................................6-8
Privileges.cnf............................................................................................................6-9
Alpha-cal.cnf............................................................................................................6-9
Motorinfo.cnf ...........................................................................................................6-9
CompleteEASE.cnf and CompleteEASEhard.cnf ....................................................6-9
7. Accessories 7-1
7.1. Focusing ...................................................................................................................7-1
Tips when using focus probes: .................................................................................7-1
How to test focus probe alignment:..........................................................................7-2
Before attempting to align focus probes:..................................................................7-2
Aligning focus probes: .............................................................................................7-3
7.2. Camera .....................................................................................................................7-4
Installation................................................................................................................7-5
7.3. Liquid Cell................................................................................................................7-6
7.4. Transmission Mount.................................................................................................7-7
7.5. Manual Translation...................................................................................................7-7
7.6. QCM Adaptor...........................................................................................................7-8
8. Service and Troubleshooting 8-9
8.1. Lamp Change Procedure ..........................................................................................8-9
8.2. Upgrading CompleteEASE ....................................................................................8-10
8.3. Troubleshooting Guide...........................................................................................8-10
Creating a Debug file..............................................................................................8-12

alpha-SE Hardware Manual Contents
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v
9. Appendices 9-1
9.1. Spectroscopic Ellipsometry......................................................................................9-1
Ellipsometry Advantages..........................................................................................9-2
Intensity Measurements............................................................................................9-2
Mueller-matrix Measurements .................................................................................9-3
Determining Sample Properties (Data Analysis)......................................................9-4
Film Thickness .........................................................................................................9-4
Ultra-Thin Films (<10nm)........................................................................................9-6
Optical Constants .....................................................................................................9-6
Additional References ..............................................................................................9-7
9.2. Conventions Used in this Manual.............................................................................9-7
Tabs..........................................................................................................................9-8
Screen Panels............................................................................................................9-8
Buttons .....................................................................................................................9-8
9.3. Short-cut Guide ........................................................................................................9-9
9.4. Contacting J.A. Woollam Co..................................................................................9-11
10. Index 1

alpha-SE Hardware Manual Safety Instructions

1-1
1. Safety Instructions
1.1. Message Boxes
Three message boxes are used in this manual. They are explained below:
Warning: This box is used to warn the user of a potential hazard to
the user or persons in the area of the ellipsometer.
Caution: This box is used to alert the user that an incorrect
operation or procedure could cause damage to the
equipment.
Note: This box contains tips, hints, and useful information
relating to the procedure in which it is located.
1.2. General Safety Instructions
Warning: For safe operation of this equipment, do not use it in any
way other than what is described in this user’s manual or
as recommended by the manufacturer.
Keep hands/fingers/body parts away from the instrument while
making motor position changes.
Ensure all system controls and power cables are tied/tucked
away/hidden/kept away/arranged such that persons walking
around the instrument area will not snag or trip on any of the
cables.
Replace bad fuses only with proper type and rated fuse.
Never look into a tip of an optical fiber.
Never look directly at an operating lamp, severe eye injury may
result. Wear UV protective lenses, such as a welder’s helmet, when
working around operating lamps.

1-2

Safety Instructions alpha-SE Hardware Manual
Permanent eye damage can result from looking directly into the
beam. It is best to view the beam using a piece of paper or business
card.
Before servicing this equipment, ensure that the power source is
disconnected.
Before servicing the lamp housing, be sure to disconnect all cables.
Make certain the lamp is at room temperature (turn lamp off for at
least 20 minutes).
Compact arc lamps contain highly pressurized gas, and present an
explosion hazard even when cold. Wear face protection, such as a
full-face shield, gloves and a long sleeve shirt whenever handling
lamps.
1.3. Environmental Operating Range
Temperature: 10°C to 35°C
Humidity: 20% to 80% (non-condensing)