Jelight UVO-CLEANER User manual

Jelight Company, Inc.
2 Mason
Irvine, CA 92618 U.S.A
el: [phone] Fax [phone]
UVO-CLEANER
Model 18, 24, 30
Instruction Manual
Original Instructions REV. E
®

2
Jelight Company, Inc.
2 Mason
Irvine, CA 92618 U.S.A
el: [phone] Fax [phone]
able of Contents
Safety Guide ........................................................... 3
Introduction ............................................................ 4
Specifications .......................................................... 5
Machine Description ................................................. 6
Parts Assembly ........................................................ 9
System Setup ........................................................ 10
Lamp Installation ................................................... 11
System Operation .................................................. 12
Scheduled Maintenance ......................................... 13
Intensity Measurement .......................................... 14
Intensity Measurement (Continued) ........................ 15
roubleshooting .................................................... 16
Limited Warranty ................................................... 17
Warranty Registration Form ................................... 19

3
Jelight Company, Inc.
2 Mason
Irvine, CA 92618 U.S.A
el: [phone] Fax [phone]
Safety Guide
WARNING! Hazardous Voltage
Do not remove the cover while the equipment is plugged to an electrical outlet; risk of electric
shock.
WARNING! Inhalation Hazard
Ozone is produced by this equipment during operation and appropriate ventilation must be
provided for exhaust purposes. If ozone is detected in the area surrounding this equipment,
immediately switch the machine off.
WARNING! Ultraviolet Light
he low pressure mercury vapor grid lamp inside this equipment emits harmful UV radiation.
Avoid exposure at all times! Protect eyes and skin.
his equipment should be operated by qualified personnel.

4
Jelight Company, Inc.
2 Mason
Irvine, CA 92618 U.S.A
el: [phone] Fax [phone]
Introduction
he UV+O (atomic oxygen) cleaning method is a photosensitized oxidation process in which the
contaminant molecules of photo-resists, resins, human skin oils, cleaning solvent residues,
silicone oils, and flux are excited and/or dissociated by the absorption of short-wavelength UV
radiation. Atomic oxygen is simultaneously generated when molecular oxygen is dissociated by
184.9nm and ozone by 253.7nm.
253.7nm radiation is absorbed by most hydrocarbons and also by ozone. he products of this
excitation of contaminant molecules react with atomic oxygen to form simpler, volatile molecules
which desorb from the surface. herefore when both wavelengths are present, atomic oxygen is
continuously generated and ozone is continually formed and destroyed.
By placing properly pre-cleaned samples within five millimeters of ozone producing UV source,
such as the low pressure mercury vapor grid lamp inside the UVO-Cleaner
®
, near atomically
clean surfaces can be achieved in less than one minute. In addition, this process does not
damage any sensitive device structures of MOS gate oxide.
he UVO-Cleaner
®
is the safest and most effective method of removing organic contaminants
from silicon, gallium arsenide, quartz, sapphire, glass, mica, ceramics, metals, and conductive
polyimide cements. It is built to last with low maintenance and trouble free service.
Applications:
• Substrate cleaning prior to thin film deposition/descumming and stabilizing photo-resist
• Cleaning of silicon wafers, lenses, mirrors, solar panels, cold rolled steel, inertial guidance
subcomponents, and GaAs wafers
• Cleaning of flux, hybrid circuits, and flat panel LCD
• Etching eflon
®
, Viton
®
, and other organic materials
• Enhancing oxide passivated surfaces of GaAs and Si
• Reduce out-gassing of glass
• Wafer tape removal
• Improve adhesion of coatings on plastics
• Ink removal from wafers after testing
• Stripping photo-resist
• Removing latent images from lithography plates
• Cleaning lithography plates
• Growing oxide layers on silicon wafers
• Cleaning circuit boards prior to packaging/adhesion
• Increase hydrophilic characteristics of surfaces
• Cleaning and sterilization for bioscience applications
• Cleaning electronic microscope probes/slides or optical fibers/lenses
• Details of each application’s data/journal/article: www.jelight.com/applications.php

5
Jelight Company, Inc.
2 Mason
Irvine, CA 92618 U.S.A
el: [phone] Fax [phone]
Specifications
Outer Dimensions without Ozone Filter
Length Width Height Media Inlet Port Exhaust Port
11.50” [292mm] 9.25” [235mm] 8.50” [216mm] Ø 0.375” [9.5mm] Ø 1.0” [25.4mm]
Outer Dimensions with Ozone Filter
Length Width Height Media Inlet Port
11.50” [292mm] 10.50” [267mm] 10.50” [267mm] Ø 0.375” [9.5mm]
Weight
UVO Cleaner
®
Ozone Filter
16.5lb [7.5kg] 1lb [.5kg]
ray Dimensions
Model Width Length Height (Adjustment Range)
18 3.50” [88mm] 7.00” [177mm] 0.25” ~ 1.25”
[6mm ~ 31mm]
24 4.25” [107mm] 7.00” [177mm]
30 5.00” [127mm] 7.00” [177mm]
Grid Lamp
ype Average Intensity Distance Measured Away From Lamp
Low Pressure Mercury (Hg) Vapor 28 ~ 32mW/cm² @ 253.7nm .12” ~ .20” [3 ~ 5mm]
Electrical Characteristics
Output Power
Voltage Current
3000 V peak-peak 30mA
Available Input Power Requirements
Model ype Designation Voltage Frequency Current
18
18 120 V AC 60 Hz 3.0 A
18-220 220 V AC 50 Hz 3.0 A
18-220-60 220 V AC 60 Hz 2.0 A
18-100-50 100 V AC 50 Hz 3.0 A
18-100-60 100 V AC 60 Hz 3.0 A
24
24 120 V AC 60 Hz 3.0 A
24-220 220 V AC 50 Hz 3.0 A
24-220-60 220 V AC 60 Hz 2.0 A
24-100-50 100 V AC 50 Hz 3.0 A
24-100-60 100 V AC 60 Hz 3.0 A
30
30 120 V AC 60 Hz 3.0 A
30-220 220 V AC 50 Hz 3.0 A
30-220-60 220 V AC 60 Hz 2.0 A
30-100-50 100 V AC 50 Hz 3.0 A
30-100-60 100 V AC 60 Hz 3.0 A

6
Jelight Company, Inc.
2 Mason
Irvine, CA 92618 U.S.A
el: [phone] Fax [phone]
Machine Description
Front Panel
FIG. 1
On-Off
Switch
Lamp Indicator
imer
Adjustment
imer
Indicator
Lid
Handle
Lid
Hinge
Set/Display
( imer)
Power-On
Indicator
imer
Stop
Start/
Resume
Mode
Emergency
Stop Button
Lid
Latch
Lid

7
Jelight Company, Inc.
2 Mason
Irvine, CA 92618 U.S.A
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Machine Description (Continued)
Rear Panel
FIG. 2
Exhaust
Port
Media Inlet
Port
Fuse Holder
AC Power
Cord
Socket Outlet
(Blower)
Ventilation
Monitor
(optional on
some models
only)
Lamp
Cable

8
Jelight Company, Inc.
2 Mason
Irvine, CA 92618 U.S.A
el: [phone] Fax [phone]
Machine Description (Continued)
Interior
FIG. 3
Removable
ray
Optional
Ozone Filter and
Blower Assembly
shown mounted to
Exhaust Port
Lid Switch
Actuator
Substrate Height Guide
Note: substrate should
not exceed this height
Media
Inlet Port
Lid Latch
(Lower)
Lid Latch
(Upper)
ray Height
Adjustment
humb Screw
Lamp
erminals
Lamp
Assembly
Lid Seal
Lid

9
Jelight Company, Inc.
2 Mason
Irvine, CA 92618 U.S.A
el: [phone] Fax [phone]
Parts Assembly
T1 T2 L1
L2
FIG. 4
1 UVO Cleaner
2 Lid
3 Stand-off
4 Lamp Assembly
5 Lamp Mounting Screws
6 Exhaust Port
7 Ozone Filter
8 Blower
9 Ozone Filter Locking Screw
10 Blower Plug
11 Media Inlet Port
12 Removable ray
13 ray Support
14 ray Height Adjustment
humb Screw
®

10
Jelight Company, Inc.
2 Mason
Irvine, CA 92618 U.S.A
el: [phone] Fax [phone]
System Setup
Refer to Figure 3 and 4
1
Unpack UVO
-
Cleaner
®
1
from shipping box and p
lace
on a sturdy level surface.
2
Do NO plug the machine into a Socket Outlet or apply power at this time.
3
Connect Exhau
st Port
6
to a suitable exhaust system capable of maintaining negative 0.1 to
negative 0.5 inches [2.5mm-12.7mm] of static water pressure while in operation. A 1-inch
[25.4mm] diameter flexible metal duct or PVC pipe may be used to attach this unit to the
exhaust system.
he flow rate of the media should be equal to or less than the exhaust in order to maintain a
positive flow of the media through the system. Using a greater flow rate of the input media
will cause a backpressure in the system forcing the exhaust gases to leak into the operating
environment.
Alternatively, install optional Ozone Filter 7 and Blower 8 onto Exhaust Port 6 and secure
with Ozone Filter Locking Screw 9 . Install Blower Plug 10 into Socket Outlet (Blower) at the
rear of the machine (see Figure 3).
4
Optional: he Ventilation Monitor
shown
in Figure
3
may be connected to a customer supplied
flow meter measuring the exhaust system.
5
Remove the vinyl cap from Media Inlet Port
11
located at the rear of the syst
em.
6
Optiona
l: connect Media Inlet Port
11
to a media supply.
Media supply should be limited to a
maximum of 1 SCFH [.5 lpm] and pressure must be kept to a maximum of 1 psig [6.9 kPa
(gauge)]. If ozone is detected outside the machine in operation, reduce flow/pressure
accordingly.
7
In
s
tall Lamp Assembly
4
per Lamp Installation Procedure.

11
Jelight Company, Inc.
2 Mason
Irvine, CA 92618 U.S.A
el: [phone] Fax [phone]
Lamp Installation
Refer to Figure 4
Procedure:
1
D
o NO plug th
e machine into a Socket Outlet or apply power at this time.
2
Open Lid 2
.
3
Using a Phillips #1 drive screwdriver, remove four
Lamp Mounting Screws
5 from the four
Stand-offs 3 . Make sure all Stand-offs are secured to the lid; tighten as necessary.
4
Using an
11/32"
size wrench (or adjustable wrench), remove the outermost nut on each of
the insulator posts shown as 1 and 2 in Figure 4.
Do NO remove the innermost nut securing the ring terminals with wires from the power
supply.
5
C
arefully remove Lamp Assembly 4 from the packing box.
6
Carefully place the Lamp Assembly
4
onto of the
four Stand
-
offs 3 . he l
amp
should be
facing outwards as shown in Figure 4 and the lamp wires shown as L1 and L2 should hang
freely at the bottom of the reflector.
7
Secure the Lamp Assembly 4 to the four Stand
-
offs 3 using
Lamp Mounting Screws
5 .
8
Using the two nuts removed in step 4 of this procedure, secure the ring terminals on the
lamp wires shown in Figure 4 as L1 and L2 to insulator posts 1 and 2. Electrical polarity is
not important.
Note: he ring terminals must NO come in to contact with lid or reflector.
9
Pull the rubber sleeve on each lamp wire over the nut on the insulator post.
10
Lamp removal is the op
posite of installation.
Dispose of UV lamps in accordance with local regulations.

12
Jelight Company, Inc.
2 Mason
Irvine, CA 92618 U.S.A
el: [phone] Fax [phone]
System Operation
WARNING:
•Follow all instructions in System Setup before applying power to the UVO Cleaner
®
.
•In case of emergency, push the Emergency Stop button on the front panel and unplug the
machine. Do not open the Lid. o restart, twist the Emergency Stop button clockwise to
reset. Allow the blower to operate for 2 minutes before opening the Lid.
Refer to Figure 2, 3 and 4
1
Open the Li
d and l
oad the substrate on
to
the
R
emovable ray
12
. Substrates should be pre
-
cleaned before processing in the UVO Cleaner
®
. Removing large amounts of contamination
will take long periods of time. Normal cleaning time should be determined through
experimentation.
2
Adjust the
ray Height Adjustment humb S
crew
s
14
at each end of
ray
Support 13
to set
the desired height. he height of the tray will vary according to the height of the substrate.
For optimum results, the uppermost surface of the substrate should be aligned with the top of
the Substrate Height Guide located at the rear of the tray – see Figure 3. his will place the
substrate approximately 0.20” [5 mm] below the grid lamp.
NO E: Substrate height must NO exceed the height of Substrate Height Guide – lamp
damage may result.
3
Connect the
AC
P
ower
C
ord into a socket outlet
and s
witch the O
n
/O
ff
button to
the on
position. he timer display will illuminate.
4
Close the
Lid
until the Upper and Lower Lid Latches engage. At this time,
the
Lid Switch
Actuator (Figure 3) will activate two safety interlock switches. If the Lid is not closed fully, the
interlock mechanism will prevent lamp operation. If the Lid is opened during operation, the
lamp will turn off immediately. his feature prevents operator exposure to harmful UV
radiation.
5
o set the cleaning time
,
press the up/down imer Adjustment buttons until the desired time
is indicated. Push the Start/Resume button to activate the imer. he Power-On Indicator will
illuminate and the UV lamp will operate.
6
he clock function is also available with this imer unit. Press the Mode button once to adjust
seconds by up/down buttons, press again for minutes and hours.
7
When the cleaning cycle is complete, the imer will sound an a
udible signal and automatically
turn OFF the UV lamp. Wait a minimum of 2 minutes for the remaining ozone to be removed
before opening the Lid to unload the substrate.

13
Jelight Company, Inc.
2 Mason
Irvine, CA 92618 U.S.A
el: [phone] Fax [phone]
Scheduled Maintenance
WARNING:
• his equipment should be serviced by qualified personnel.
• Lamps are fragile, handle with care.
• Before performing maintenance, the AC Power Cord must be unplugged from the
Socket Outlet.
• he low pressure mercury vapor grid lamp inside this equipment emits harmful UV
radiation; avoid exposure at all times. Protect eyes and skin.
UVO-Cleaner
®
requires minimal maintenance. After every 100 hours of operation, unplug the
machine, remove the lamp assembly and eliminate particles by applying deionized water, then
dry with a clean cloth. Check the intensity of the lamp by using a radiometer and detector. he
lamp assembly should be replaced when the intensity is measured at or less than 21mW/cm² @
254nm, with a measuring distance of .12” - .20” [3 - 5mm] between the lamp and the detector.
he lamp assembly should be replaced after 5,000 to 10,000 hours of operation (for detailed
instructions on lamp installation, please refer to page 11).
Please contact Jelight Company Inc. for pricing and availability of replacement UV lamps,
radiometer, detectors, and other components.

14
Jelight Company, Inc.
2 Mason
Irvine, CA 92618 U.S.A
el: [phone] Fax [phone]
Intensity Measurement
FIG. 5
1
Allow current cleaning cycle to complete and wait a minimum of
2
minutes for ozone to be
removed from the UVO-Cleaner
®
before proceeding.
2
Open the Li
d and place the UV Detector in the center of the Removable ray
–
see Figure 5.
he Detector window must face upward.
3
Adjust the tray height so the uppermost surface of the Detector is aligned with the top of the
Substrate Height Guide at the rear of the tray – refer to Figure 3. his will place the Detector
window approximately 0.20” [5 mm] below the grid lamp.
NO E: the Detector height must NO exceed the height of Substrate Height Guide – lamp
damage may result.
4
Remove the UV Detector and close
the Lid.
5
Set the imer to 15 minutes.
6
Operate the unit empty for 5 minutes. On the imer, press Stop. he imer display should
indicate there are approximately 10 minutes remaining.
7
Wait 2 minutes for the ozone to be removed.
Continued on next page

15
Jelight Company, Inc.
2 Mason
Irvine, CA 92618 U.S.A
el: [phone] Fax [phone]
Intensity Measurement (Continued)
8
Reopen the Lid and place the UV Detector in the center of the Removable ray. he Detector
window must face upward. Position the Radiometer Cable carefully across the Lid Seal to the
Radiometer outside of the unit. he rubber will compress to allow the Lid to fully close and
engage the safety interlock switches.
FIG. 6
9
Switch
the Radiometer
on
–
see Figure 6
.
10
Press the S
tart
/R
esume
button to continue the UVO cleaning cycle.
11
he intensity reading shoul
d continuously increase
.
W
ait
5
minutes for the reading to
stabilize. Record this measurement.
12
After
recording the UV measurement
, press the S
top
button and wait a minimum of
2
minutes
for ozone to be removed.
13
O
pen the
Lid
and remove the Detect
or
.
14
he UVO
-
Cleaner
®
may now be turned off.

16
Jelight Company, Inc.
2 Mason
Irvine, CA 92618 U.S.A
el: [phone] Fax [phone]
roubleshooting
Problem: Suggestion:
he system has no power.
•wist the Emergency Stop Button clockwise to reset.
•Check the AC Power Cord is undamaged and plugged
into a Socket Outlet.
•Check the Fuse on the rear panel.
•Check or reset the main Circuit Breaker for the Socket
Outlet.
he system has power but the
imer and Lamp do not operate. •Check the Lid is closed properly. he Lid Switch Actuator (see Figure 3) must activate two safety
interlock switches before the imer will operate.
Lamp
Indicator does not light up.
•Check the Power-On Indicator lamp is on.
•Check the UV Lamp Assembly for breaks, cracks, or
other kind of damage.
Ozone is present outside of the
system during operation. •Ensure the Exhaust connections are tight.
•If the Media Inlet Port is connected to a pressurized
gas supply, reduce pressure/flow.
•If using the optional Ozone Filter & Blower assembly:
oCheck the Blower is operating.
oCheck the Blower Plug is connected to the Socket
Outlet (Blower) at the rear of the machine.
oMake sure the Ozone Filter is connected in the
upright position, as shown on page 9.
oCheck the O-ring between the Ozone Filter and
Blower is sealing correctly.
•Check the Lid is closed properly. he Lid latch may
require adjustment.
he intensity measurement is below
normal. •Replace UV Lamp Assembly.
•Distance between the lamp and detector should be no
more than .12”-.20” [3 - 5mm].
•Radiometer/detector may require recalibration.
Recommended calibration period is 3–4 months when
subjected to strong UV radiation. he photodiode
located inside the detector will eventually become
solarized. If solarization occurs, the detector will
require replacement.
For further assistance, contact Jelight Company Inc. 2 Mason, Irvine CA 92618 U.S.A.
el: [phone]

17
Jelight Company, Inc.
2 Mason
Irvine, CA 92618 U.S.A
el: [phone] Fax [phone]
Limited Warranty
What does this warranty cover?
his warranty covers any defects in materials and workmanship to the original end-user
purchaser of this product with the exceptions stated below, provided the Warranty Registration
Form has been returned to Jelight Company, Inc.
What does this warranty not cover?
his warranty does not cover damage or loss of parts incurred in transit, by abuse, misuse or an
act of God (such as a flood), modifications (such as the installation and use of non-approved UV
Lamps or other components), damage incurred through contact with oils or chemicals other than
those specified in this manual when used as directed, any component that has been subject to
unusual physical or electrical stress and consumable items (such as fan filters and capacitors).
Also, consequential and incidental damages are not recoverable under this warranty. his
warranty is non-transferable.
What is the period of coverage?
his warranty covers non-consumable components for a period of 12 months following the date
of purchase, with the following exception: the UV Grid Lamp is not covered within this warranty.
What will Jelight Company, Inc. do to correct problems?
We will inspect your product and contact you within three days of receipt to advise the results of
our inspection. If the product qualifies for warranty repair, Jelight Company, Inc. will elect
whether to provide replacement parts and labor free of charge or replace the unit. If the product
does not qualify for warranty repair, Jelight Company, Inc. will provide an estimate of the parts,
labor and shipping charges required to complete the repair and return the product. If you
authorize repairs, Jelight Company, Inc. will fix the product and return it within 21 days.
How can you get warranty service?
Contact Jelight Company, Inc. at the telephone number above for technical support and provide
contact details, product name, serial number and date of purchase. If field repair is not possible,
a Return Material Authorization (RMA) Number will be issued. his RMA number must be
indicated on all shipping labels, documentation and communications relating to this repair.
Send the product to: Jelight Company, Inc.
2 Mason
Irvine, CA 92618
How will state law affect your customer's rights under the warranty?
his warranty gives you specific legal rights, and you may also have other rights which vary from
state to state.

18
Jelight Company, Inc.
2 Mason
Irvine, CA 92618 U.S.A
el: [phone] Fax [phone]
ecord your product information
Please record the information below and retain this for warranty service.
Date of Purchase
Model
Serial Number
Disclaimer:
Jelight Company Inc. warrants only that a product will conform to its physical descriptions, makes
no other warranties and expressly disclaims any implied warranty of fitness for a particular
reason. It is the responsibility of the purchaser to determine the suitability of the product for any
purpose. All information provided by Jelight Company, Inc. is in good faith and when offered by
another manufacturer or source is done so in good faith. In the event a warranty is offered by
another manufacturer of goods or services, such warranty will convey from that manufacturer.
Jelight Company Inc. reserves the right to modify or discontinue this product at any time. All
texts, graphics and logos in this manual are for guidance purposes and may be changed without
notice. Jelight Company Inc. reserves the right to amend all or some of these terms and
conditions at any time. Jelight Company Inc. declines all liability in the matter, as well as all
responsibility for the accuracy, timeliness and/or completeness of the information contained, and
for any use made of the information provided. Jelight Company Inc. assumes no obligation to
update the data provided or to correct any errors. No rights may be relied from the information
provided. Jelight Company Inc. and/or its rightful claimants, retains all rights (including copyright,
trade mark and patent rights) in the material presented in this manual. No form of license is
granted to the information. In particular, reproduction or making the content of this manual
available to others in any form is strictly prohibited without prior written permission from Jelight
Company Inc. Any unauthorized reproduction of art work is subject to legal action; and is
protected by Federal, State and Local law.
In no event shall Jelight Company Inc. be responsible for particular, minor or significant damage,
directly or indirectly, whether the claim is in contract, negligence or otherwise (including but not
limited to, any interruption of service, loss of business, anticipated profit, or other consequential
damages arising out of the use or inability to use this product or from any defect or omission in
the manual, or other related items). In no event shall the liability of Jelight Company, Inc. exceed
the purchase price of the product. hese terms and disclaimer shall be governed by and
interpreted in accordance with the laws of the United States.
*UVO-Cleaner
®
is a registered trademark of Jelight Company, Inc.
© Copyright 2010 Jelight Company, Inc. 2 Mason Irvine, CA 92618 USA

19
Jelight Company, Inc.
2 Mason
Irvine, CA 92618 U.S.A
el: [phone] Fax [phone]
Warranty Registration Form
Registration entitles you to product support and notification of product upgrades and
enhancements. We do not sell your name to third party mailing list companies. Information you
provide is for the exclusive use of Jelight Company, Inc.
Please complete and return this form by surface mail to Jelight Company Inc. Alternatively, you
may e-mail this information to: [email protected]
Name
Title
Company
Telephone
E-mail
Street Address
City
State / Province
Zip / Postal Code
Country
Date of Purchase
Model
Serial Number