Karl Suss CIC 1200 User manual

SUSS
Constant Intensity Controller
CIC 1200

2

CONTENTS
11 Warnings and Safety Hazards
1.1 Intended Use of the CIC 1200
1.2 Electrical Precautions
1.3 High Pressure Lamps
1.3.1 Electrical Hazards
1.3.2 Lamp Explosion
1.3.2.1 In Case of Lamp Explosion
1.3.3 Exhaust Requirements
1.3.4 Eye and Skin Safety
22 Technical Specifications
33 Program Parameters
44 Operating Procedures
4.1 Front Panel
4.1.1 The Annunciator Group FAILURE
4.2 Rear Panel
Condensed Operating Instructions
4.3 General Remarks
4.4 Select Lamp
4.4.1 Reset Lamp hours
4.5 Operating Modes of the CIC 1200
4.5.1 CP-Mode
4.5.2 CH1-Mode
4.5.3 CH2-Mode
4.6 Ignition of the Exposure Lamp
4.6.1 IDLE-Mode
4.6.2 Power setting
4.6.3 Change Display
4.6.4 Calibration Modes
4.6.4.1 Basics
4.6.4.2 Calibration with the built in UV-meter
4.6.4.3 Calibration with ext. UV-meter
4.6.4.4 Additional Functions
4.6.4.4.1 S1 OK
5
5
5
5
6
6
7
7
7
8
9
9
10
11
12
13
15
15
16
17
17
17
17
17
19
20
21
22
22
23
24
25
25
3
Chapter Page

4.6.4.4.2 S2 OK
4.6.4.4.3 UVPR
4.6.4.4.4 CAL1 RES
4.6.4.4.5 CAL2 RES
4.6.4.4.6 EXIT Calibration menu
4.7 Constant Intensity Mode
4.7.1 Set Light Intensity
4.8 Calibration of the built-in UV
Intensity Meter
4.9 Additional Functions
4.0.1 Full RESET
55 Maintenance and Service
5.1 Error messages
5.2 Service Informations
5.2.1 Technical Assistance
Contacts - Karl Suss Worldwide
List of FiguresList of Figures
Figur 4.1 Front Panel
Figur 4.2 Rear Panel
Figur 4.3 Front Panel
Figur 4.4 Front Panel
Figur 4.5 Front Panel
Figur 4.6 Front Panel
Figur 4.7 UV Intensity Meter with probe
Figur 4.8 Front Panel
List of TablesList of Tables
Table 2.1 Lamp Options
Table 3.1 Program Parameters
Table 4.1 Condensed Operating Informations
Table 4.4 Lamp Orientation
Chapter Page
25
26
26
26
27
27
27
29
30
30
31
31
32
32
34
10
12
18
19
20
21
24
29
8
9
13/14
15
4

1 WARNINGS AND SAFETY HAZARDS
Important: This section contains information
wich the operator must know and understand
to minimize the risk of injuries.
Karl Suss equipment is designed to protect the user against all possible
hazards.
After review by qualified safety personnel, the user should generate a
specific safety procedure with regard to the particular application of the
equipment and local codes. The user must make certain the operators
are familiar with the procedure. The safety procedure should also be
posted in a conspicuous location so that all equipment operators are
exposed to the information on a continuing basis.
1.1 Intended Use of the CIC 1200
The CIC 1200 is is designed to operate as a smart power supply/ regulator
for high pressure UV lamps (see table 2.1) installed in a SUSS lamp house.
Any other use has to be verified in advance cooperating with SUSS techni-
can and/or with the lamp manufacturer. Otherwise the operational safety
of the system cant´t be guaranteed by Karl Suss.
1.2 Electrical Precautions
When the covers or connectors are removed from the power supply, dan-
gerous voltages will be exposed. When all of the covers and connectors are
in place, there is no danger from these voltages.
The electrical system should be serviced by qualified personnel only. So it
will never be necessary for the operator to open the cover of the electri-
cal portion of the machine. If any problems occur with the power supply,
turn the machine off and notify your supervisor or maintenance immedia-
tely.
WARNING: Never open the housing while the power
line is connected.
1.3 High Pressure Lamps
The light source for the concentrated ultraviolet illumination required to
expose the wafer is a high pressure lamp. Special precautions must be
taken when working with these lamps.
5

61.3.1 Electrical Hazards
The voltage and current required to run a high pres-
sure lamp constitute a lethal combination.
When performing any maintenance on the exposure lamp power supply,
lamp housing, or the lamp itself, make sure that the
power line to the power supply is disconnected.
Proper lamp orientation is crucial. If the applied voltage to
the lamp does not agree with the lamp manufacturers
recommendations, an explosion may occur. Starting ignition voltages are
20 KV and open circuit potentials range up to 380 VDC. Start box lead
wires are labeled + (red) and - (blue). Insure these connections are properly
oriented for the lamp in use.
1.3.2 Lamp Explosion
Since these exposure lamps operate at extremely high pressure, explosion is
certainly a possibility if the lamps are handled or operated wrongly. The
lamps may fail because of improper cooling, improper setting of the power
supply, usage outside the manufacturer´s guidelines, etc. Additionally,
some high pressure lamps, even when cold, are still above atmospheric
pressure and should be handled with protective face shields and gloves.
CAUTION: Careful handling of the lamp and proper
operation of the equipment will substan-
tially reduce the possibility of lamp
explosions.
Safety instructions of the lamp manufacturer must be
followed.
The lamp house is designed to minimize damage to the interior of the
equipment and prevent possible injury to the operator should a lamp
explosion occur. All assemblies and protective covers must be in place
during operation of the machine.
Some of these lamps contain hazardous elements such as mercury. If a
lamp should break, avoid touching the fragments and/or breathing the
vapor.
1.3.2.1 In Case of Lamp Explosion

1.3.3 Exhaust Requirements
High pressure lamps produce heat as well as ozone because of the inter-
action of the radiation emitted a wavelength of 250 nm with oxygen.
Ozone attacks the mucous membranes of the respira-
tory system, producing symptoms similiar to pneumo-
nia. The effects are cumulative.
The smaller wattage lamps, must be operated in a
well ventilated area only. Larger wattage lamps must
be exhausted using exhaust pipes.
Also the sockets of larger lamps must be cooled by a flow of nitrogen.
The cooling requirements for special lamps are specified in a table which
is part of the SUSS machine manual.
1.3.4 Eye and Skin Safety
The ultraviolet light produced by these lamps can cause erythema of
skins (similar to sunburn) and conjunctivitis. In addition, the large infrared
output can cause retinal burns resulting in blindness.
Every SUSS mask aligner is equipped with light guards, and the high
pressure lamp and exposure path are enclosed. The mask aligner may
not be operated unless all of these protective covers and devices are in
place.
1.3.2.1 In Case of Lamp Explosion
If the lamp explodes we recommend the following
course of action:
Turn power to the supply and machine off
immediately.
Do not turn off exhaust system.
Evacuate the immediate area of the machine to prevent inhalation
of the mercury vapor. Wait at least 20 minutes before returning.
Mercury residue and glass shards deposited inside the lamp house
should only be handled when wearing rubber gloves, goggles,
and a proper face mask. The best way to remove mercury is by
aspiration - the suction of a syringe or vacuum device is very
effective (do not use lungs). After noticeable amounts of mercury
are removed, gently wipe optics with lint free paper that is slightly
dampened by a residue free liquid. Materials used in the cleanup
should be treated as hazardous waste and disposed of
accordingly.
7

2 Technical Specifications
SUSS CIC 1200
Operating Mode: Single channel constant power.
Independent dual channel constant
intensity. Remote control
Output: LH* 200: 200 W, LH* 350: 750 W,
LH* 1000/LH* 1500: 1200 W maximum
continuos. 380V DC open circuit.
Output regulation: +/- 1% over selected mains input range.
Lamp Ignition: 20kV start with automatic shut down
following ignition. Active current limit
during warm-up. Remote start unit with
polarity switch. Single pulse ignition.
Mains Input: 230V +/- 10% 50/60Hz
Optical Sensor: Dual channel using silicon photodiodes
with thinfilm dielectric or selected glass
absorbtion filters for 220, 240, 320, 365
and 405nm wavelenghts.
Optical Control: Digital meter: 0-100mW/cm2Front panel
channel selection. Front panel level set and
UV-probe calibration.
Size: Length: 540 mm (21,25”)
without remote start unit Width: 260 mm (10,25”)
Height: 152 mm (6,0”)
Weight: 20 kg (44lbs)
without remote start unit A
Lamp Options
* LH= Suss Lamp House
Subject to change without prior notice
200 W Hg200 W Hg 350 W Hg350 W Hg 500 W Hg500 W Hg 500 W Hg-Xe500 W Hg-Xe 1000 W Hg1000 W Hg
LH 200 *LH 200 *
LH 350 *LH 350 *
LH 1000 *LH 1000 *
LH 1500 *LH 1500 *
Table 2.1
8

3 Program Parameters
of the CIC 1200 for the various types of exposure lamps.
Table 3.1
Legend
Lamp Type [WLamp Type [W]PPmin [W][W]
170
200
350
350
750
PPnom [W][W]
200
350
500
500
1000
PPmax [W][W]
230
400
750
750
1200
PPidle [W][W] Lamp Life [h]Lamp Life [h] tt delay [s][s]
400 300
600 600
600 900
600 900
750 900
NN22 time [s][s]
300
180
180
180
195
275
475
475
900
200 Hg200 Hg
350 Hg350 Hg
500 HgXe500 HgXe
500 Hg500 Hg
1000 Hg1000 Hg
PPmin [W] Minimum lamp power to run the exposure lamp.
PPnom [W] Rated power of the exposure lamp.
PPmax [W] Maximum power to run the exposure lamp.
PPidle [W] Idle power to run the exposure lamp while
machine in idle mode, no exposures.
Lamp LifeLamp Life [h] Recomended lifetime of the exposure lamp. If this value
is reached the LED adjacent to LAMP LIFE in the
annunciator group FAILURE flashes.
tt delay [s] Time necessary for the lamp to cool after power has
been switched off. During this period of time lamp cannot
be started.
Left alphanumeric display shows message COOL
right alphanumeric display shows time left before
exposure lamp can be restarted.
N2time [s] If the N2-flow rate for cooling the lamp falls below the
admissible value, the lamp will be switched off after this
time.
9

4.1 CIC 1200 Front Panel
Figure 4.1
Annunciator Groups (1, 2, 3, 4)
1. Annunciator Group LAMP TYPE
2. Annunciator Group DISPLAY
3. Annunciator Group FAILURE
4. Alphanumeric Display for
4. LIGHT INTENSITY and LAMP POWER
5. Key Pad (see section Key Controls
5. of the CIC 1200)
6. Socket for UV Probe (see section
6. Calibration of the CIC)
1 2 3 4
6
5
10

4.1.1 The Annunciator Group FAILURE
LAMP LIFE / POWERLAMP LIFE / POWER
a) The Lamp Life LED will flash indicating that the actual values of
voltage, current or power reached the exspected programmed
limits.
b) The Lamp Life LED will flash indicating that the lamp
has reached its recommended operating life. The
lamp should be turned off and replaced to prevent
explosion. Refer to the Machine Operators Manual
for instructions on lamp replacement.
INTERLOCK NINTERLOCK N22
If the N2flow rate is too low the Interlock N2LED will flash. If left uncorr-
rected the lamp will automatically be turned off to prevent lamp failure.
After the lamp has been turned off the alphanumeric display will read
N2 ERRN2 ERR
INTERLOCKINTERLOCK
The Interlock LED can indicate multiple interlock failures. The specific
cause of failure will be indicated in the alphanumeric display.
TEMPERATURETEMPERATURE
If for some reason the temperature within the unit reaches a certain limit
the unit is shut off immediately. The corresponding LED of the annuncia-
tor is on and the alphanumeric display reads
TEMP ERRTEMP ERR
SENSOR OVERFLOWSENSOR OVERFLOW
This LED indicates that there is an error in the light monitoring and con-
trol system. Contact your Suss Service representative.
(See Chapter 4.6.4.4.1 and Chapter 4.6.4.4.2)
11

4.2 CIC 1200 Rear Panel
Figure 4.2
1. Main Power 5. External Alarm
1. with Fuses (T 10 A) 6. Optical Sensor
2. Remote Start 7. Lamp Interlock
3. RS232 8. Lamp Cooling Interlock
4. Control IN/OUT 9. Type plate
9
78 6 5 4 3
2
1
12

OrientationOrientation
+ (Anode)+ (Anode)
Down
Down
Down
Up
Down
200W Hg200W Hg
350W Hg350W Hg
500W Hg500W Hg
500W Hg-Xe500W Hg-Xe
1000W Hg1000W Hg
LampLamp
Be sure, that the orienta-
tion of the currently used
lamp is correct
(as shown in Table 4.4).
15
4.3 General Remarks4.3 General Remarks
Insure that the proper power cord has been connected to the main
power connector.
The alphanumeric display of the front panel reads
STAND BYSTAND BY
The processor of the CIC 1200 is constantly connected to power so it
monitors the crucial program steps of the exposure lamp, e. g.
the internal clock of the CIC safety programs
preventing the premature ignition of the exposure lamp
The control panel of the CIC comprises 3 annunciator groups with their
LED’s (see adjacent picture of the Control Panel).
1.1. LAMP TYPE
2.2. DISPLAY
3.3. FAILURE
4.4 Selecting the Exposure Lamp4.4 Selecting the Exposure Lamp
Table 4.4
The CIC is connected to the mains but thus far not started (rear panel of
CIC: Main Power plug is connected). Select the apropriate exposure lamp
beforebefore starting the CIC with the key ON of the front panel. The alpha-
numeric display (2X4 characters) of the front panel reads
STAND-BYSTAND-BY

Actuate the key (press button for 2 sec.) to activate the
menu LAMP TYPE of the CIC unit. The alphanumeric display shows the
currently loaded exposure lamp, e. g.
LAMP 1000LAMP 1000
The corresponding LED of the annunciator group LAMP TYPE is on.
Choose the 350 W exposure lamp by actuating the key labeled
with or
Now the LED adjacent to the 350 W is on. Validate with key
(press button for 2 sec.) An audible “beep” is heard. The alphanumeric
display shows consecutively the message
STOREDSTORED
then
L: RESET?L: RESET?
4.4.1 Reset Lamp Hours
Now you can choose two ways to go on:
Reset the lamplife of the lamp
or
leave the stored hours of the lamp in the memory
RESET Lamplife
To reset the lamplife press or key.
The ? disappears from the display. Confirm with
The counter for the total lamp hours is set to zero
The display shows
STOREDSTORED
and then automaticaly
STANDSTAND BYBY
Leave the stored hours
To leave the stored hours in memory press
again.
The display shows
NO STORENO STORE
and then automaticaly
STANDSTAND BYBY
+
SETSET LAMPLAMP
SETSET LAMPLAMP
SETSET LAMPLAMP
SETSET LAMPLAMP
-
+-
16

4.5 Operating Modes of the CIC 12004.5 Operating Modes of the CIC 1200
The three operating modes of the CIC are: CP, CH1 and CH2.
4.5.1 Operating mode CP4.5.1 Operating mode CP
CP stands for Constant Power. The exposure lamp is run with constant
power. One can set the power of the exposure lamp as described in the
Section 4.6.2 “Presetting the Power of the Exposure Lamp” of present
manual.
Note:Note:
all calibration is being done in CP-Mode !all calibration is being done in CP-Mode !
4.5.2 Operating mode CH14.5.2 Operating mode CH1
CH1 stands for Constant Intensity Channel 1. The exposure lamp is run
in constant intensity mode controlled by light sensor 1 (spectral range for
example 365 nm).
4.5.3 Operating mode CH24.5.3 Operating mode CH2
CH2 stands for Constant Intensity Channel 2. The exposure lamp is run
in constant intensity mode controlled by light sensor 2 (spectral range e.
g. 405 nm).
Choose the apropriate operating mode by activating one of the keys
labeled CP, CH1 or CH2. The key in question will be illuminated.
4.6 Ignition of the Exposure Lamp
Commence ignition and activate POWER by pressing the key ON .The
software version of the unit is shown in the display (e. g. “SUSS 2.00”).
Finally the alphanumeric display shows the message
-READY---READY--
The LED’s of the annunciator group
LAMP TYPELAMP TYPE 350 W is ON
Actuate the key CP. The alphanumeric display now shows the message
WAITWAIT
then
=>>START
Actuate the key START . The display shows
IGNITIONIGNITION
then
LAMP COLDLAMP COLD
and in the annunciator group FAILURE the LED of “LAMP LIFE/POWER”
is flashing until the lamp reaches operating conditions - depending of
the type of the lamp.
Upon completion of the warm-up sequence the alphanumeric display
will indicate the real value of LIGHT INTENSITY (if the shutter is open)
and POWER of the exposure lamp.
17

13
2
Figure 4.3
Control Panel of the CIC 1200
Key sequence in ignition of the lamp: 1.1. ON
2.2. CP
3.3. START
18

4.6.1 Idle
The exposure lamp has been ignited and after 5 minutes (depending on
the lamp type) has become operational. The alphanumeric display labe-
led LAMP POWER shows the message
XXXXXXXX [W]
To run the lamp in “Idle” mode actuate key IDLE .
The display shows IDLE XXXIDLE XXX [W]
is shown.
(In IDLE - mode the lamp power is 275 W.)
Quit the Idle mode by actuating the key
IDLE again or by just actuating the key CP.
19
Figure 4.4

4.6.2 Presetting the Power of the Exposure Lamp (CP-Mode)
(adjusting the output power of the lamp)
With the key SET POWER one can set within certain limits beforehand
the output power of the lamp in the CP-Mode.
1.1. Press the key SET POWER for about 1-2 sec to activate the SET
modus. In the annunciator group FAILURE the LED adjacent to
LAMP LIFE / POWER is flashing. In the annunciator group
DISPLAY the LED (green) “SET” is on.
Display LAMP POWER is flashing.
2.2. With the keys or
enter desired numerical value for the power (the alphanumeric
display LAMP POWER reads entered value).
3.3. Validate your entry with key SET POWER (push key for 1-2 sec).
The display shows the message
STOREDSTORED
and a high-pitched “beep” is heard confirming the operator that the
new parameter has been stored.
+-
13
2
Control Panel of the CIC 1200 (Key sequence to set lamp output)
1.1. Press SET POWER
2.2. Set value with + -
3.3. Store with SET POWER
Figure 4.5
20