1.3.3 Exhaust Requirements
High pressure lamps produce heat as well as ozone because of the inter-
action of the radiation emitted a wavelength of 250 nm with oxygen.
Ozone attacks the mucous membranes of the respira-
tory system, producing symptoms similiar to pneumo-
nia. The effects are cumulative.
The smaller wattage lamps, must be operated in a
well ventilated area only. Larger wattage lamps must
be exhausted using exhaust pipes.
Also the sockets of larger lamps must be cooled by a flow of nitrogen.
The cooling requirements for special lamps are specified in a table which
is part of the SUSS machine manual.
1.3.4 Eye and Skin Safety
The ultraviolet light produced by these lamps can cause erythema of
skins (similar to sunburn) and conjunctivitis. In addition, the large infrared
output can cause retinal burns resulting in blindness.
Every SUSS mask aligner is equipped with light guards, and the high
pressure lamp and exposure path are enclosed. The mask aligner may
not be operated unless all of these protective covers and devices are in
place.
1.3.2.1 In Case of Lamp Explosion
If the lamp explodes we recommend the following
course of action:
Turn power to the supply and machine off
immediately.
Do not turn off exhaust system.
Evacuate the immediate area of the machine to prevent inhalation
of the mercury vapor. Wait at least 20 minutes before returning.
Mercury residue and glass shards deposited inside the lamp house
should only be handled when wearing rubber gloves, goggles,
and a proper face mask. The best way to remove mercury is by
aspiration - the suction of a syringe or vacuum device is very
effective (do not use lungs). After noticeable amounts of mercury
are removed, gently wipe optics with lint free paper that is slightly
dampened by a residue free liquid. Materials used in the cleanup
should be treated as hazardous waste and disposed of
accordingly.
7
