Keithley 6517B User manual

Reference Manual
6517B-901-01 Rev. D / February 2016
*P6517B90101D*
6517B-901-01
www.tek.com/keithley
Model 6517B
Electrometer
A Greater Measure of Confidence

Electrometer
Reference Manual
© 2016, Keithley Instruments
Cleveland, Ohio, U.S.A.
All rights reserved.
Any unauthorized reproduction, photocopy, or use of the information herein, in whole or in part,
without the prior written approval of Keithley Instruments is strictly prohibited.
TSP®, TSP-Link®, and TSP-Net®are trademarks of Keithley Instruments. All Keithley Instruments
product names are trademarks or registered trademarks of Keithley Instruments. Other brand
names are trademarks or registered trademarks of their respective holders.
The Lua 5.0 software and associated documentation files are copyright © 1994 - 2015, Lua.org,
PUC-Rio. You can access terms of license for the Lua software and associated documentation at
the Lua licensing site (http://www.lua.org/license.html).
Document number: 6517B-901-01 Rev. C / August 2015
Model 6517B

Safety precautions
The following safety precautions should be observed before using this product and any associated instrumentation. Although
some instruments and accessories would normally be used with nonhazardous voltages, there are situations where hazardous
conditions may be present.
This product is intended for use by qualified personnel who recognize shock hazards and are familiar with the safety precautions
required to avoid possible injury. Read and follow all installation, operation, and maintenance information carefully before using
the product. Refer to the user documentation for complete product specifications.
If the product is used in a manner not specified, the protection provided by the product warranty may be impaired.
The types of product users are:
Responsible body is the individual or group responsible for the use and maintenance of equipment, for ensuring that the
equipment is operated within its specifications and operating limits, and for ensuring that operators are adequately trained.
Operators use the product for its intended function. They must be trained in electrical safety procedures and proper use of the
instrument. They must be protected from electric shock and contact with hazardous live circuits.
Maintenance personnel perform routine procedures on the product to keep it operating properly, for example, setting the line
voltage or replacing consumable materials. Maintenance procedures are described in the user documentation. The procedures
explicitly state if the operator may perform them. Otherwise, they should be performed only by service personnel.
Service personnel are trained to work on live circuits, perform safe installations, and repair products. Only properly trained
service personnel may perform installation and service procedures.
Keithley Instruments products are designed for use with electrical signals that are measurement, control, and data I/O
connections, with low transient overvoltages, and must not be directly connected to mains voltage or to voltage sources with high
transient overvoltages. Measurement Category II (as referenced in IEC 60664) connections require protection for high transient
overvoltages often associated with local AC mains connections. Certain Keithley measuring instruments may be connected to
mains. These instruments will be marked as category II or higher.
Unless explicitly allowed in the specifications, operating manual, and instrument labels, do not connect any instrument to mains.
Exercise extreme caution when a shock hazard is present. Lethal voltage may be present on cable connector jacks or test
fixtures. The American National Standards Institute (ANSI) states that a shock hazard exists when voltage levels greater than
30 V RMS, 42.4 V peak, or 60 VDC are present. A good safety practice is to expect that hazardous voltage is present in any
unknown circuit before measuring.
Operators of this product must be protected from electric shock at all times. The responsible body must ensure that operators
are prevented access and/or insulated from every connection point. In some cases, connections must be exposed to potential
human contact. Product operators in these circumstances must be trained to protect themselves from the risk of electric shock. If
the circuit is capable of operating at or above 1000 V, no conductive part of the circuit may be exposed.
Do not connect switching cards directly to unlimited power circuits. They are intended to be used with impedance-limited
sources. NEVER connect switching cards directly to AC mains. When connecting sources to switching cards, install protective
devices to limit fault current and voltage to the card.
Before operating an instrument, ensure that the line cord is connected to a properly-grounded power receptacle. Inspect the
connecting cables, test leads, and jumpers for possible wear, cracks, or breaks before each use.
When installing equipment where access to the main power cord is restricted, such as rack mounting, a separate main input
power disconnect device must be provided in close proximity to the equipment and within easy reach of the operator.
For maximum safety, do not touch the product, test cables, or any other instruments while power is applied to the circuit under
test. ALWAYS remove power from the entire test system and discharge any capacitors before: connecting or disconnecting
cables or jumpers, installing or removing switching cards, or making internal changes, such as installing or removing jumpers.
Do not touch any object that could provide a current path to the common side of the circuit under test or power line (earth)
ground. Always make measurements with dry hands while standing on a dry, insulated surface capable of withstanding the
voltage being measured.

For safety, instruments and accessories must be used in accordance with the operating instructions. If the instruments or
accessories are used in a manner not specified in the operating instructions, the protection provided by the equipment may be
impaired.
Do not exceed the maximum signal levels of the instruments and accessories, as defined in the specifications and operating
information, and as shown on the instrument or test fixture panels, or switching card.
When fuses are used in a product, replace with the same type and rating for continued protection against fire hazard.
Chassis connections must only be used as shield connections for measuring circuits, NOT as protective earth (safety ground)
connections.
If you are using a test fixture, keep the lid closed while power is applied to the device under test. Safe operation requires the use
of a lid interlock.
If a screw is present, connect it to protective earth (safety ground) using the wire recommended in the user documentation.
The symbol on an instrument means caution, risk of danger. The user must refer to the operating instructions located in the
user documentation in all cases where the symbol is marked on the instrument.
The symbol on an instrument means caution, risk of electric shock. Use standard safety precautions to avoid personal
contact with these voltages.
The symbol on an instrument shows that the surface may be hot. Avoid personal contact to prevent burns.
The symbol indicates a connection terminal to the equipment frame.
If this symbol is on a product, it indicates that mercury is present in the display lamp. Please note that the lamp must be
properly disposed of according to federal, state, and local laws.
The WARNING heading in the user documentation explains dangers that might result in personal injury or death. Always read
the associated information very carefully before performing the indicated procedure.
The CAUTION heading in the user documentation explains hazards that could damage the instrument. Such damage may
invalidate the warranty.
Instrumentation and accessories shall not be connected to humans.
Before performing any maintenance, disconnect the line cord and all test cables.
To maintain protection from electric shock and fire, replacement components in mains circuits — including the power
transformer, test leads, and input jacks — must be purchased from Keithley Instruments. Standard fuses with applicable national
safety approvals may be used if the rating and type are the same. Other components that are not safety-related may be
purchased from other suppliers as long as they are equivalent to the original component (note that selected parts should be
purchased only through Keithley Instruments to maintain accuracy and functionality of the product). If you are unsure about the
applicability of a replacement component, call a Keithley Instruments office for information.
To clean an instrument, use a damp cloth or mild, water-based cleaner. Clean the exterior of the instrument only. Do not apply
cleaner directly to the instrument or allow liquids to enter or spill on the instrument. Products that consist of a circuit board with
no case or chassis (e.g., a data acquisition board for installation into a computer) should never require cleaning if handled
according to instructions. If the board becomes contaminated and operation is affected, the board should be returned to the
factory for proper cleaning/servicing.
Safety precaution revision as of January 2013.

Getting started ............................................................................................................ 1-1
Welcome .............................................................................................................................. 1-1
Capabilities and features overview ...................................................................................... 1-1
Available options and accessories....................................................................................... 1-2
Cables and adapters ................................................................................................................. 1-3
Case and rack mount kits.......................................................................................................... 1-4
Probes....................................................................................................................................... 1-4
Scanner cards ........................................................................................................................... 1-4
Text fixture ................................................................................................................................ 1-4
Software.................................................................................................................................... 1-4
Manual addenda .................................................................................................................. 1-5
Extended warranty ............................................................................................................... 1-5
Contact information .............................................................................................................. 1-5
CD-ROM contents................................................................................................................ 1-5
General ratings..................................................................................................................... 1-6
Unpacking and inspection.................................................................................................... 1-6
Inspection for damage............................................................................................................... 1-6
Shipment contents .................................................................................................................... 1-6
Repacking for shipment ............................................................................................................ 1-7
Getting started ............................................................................................................ 2-1
Introduction .......................................................................................................................... 2-1
Front panel summary ........................................................................................................... 2-1
Rear panel summary............................................................................................................ 2-3
Power-up.............................................................................................................................. 2-5
Line power connection .............................................................................................................. 2-5
Line fuse replacement............................................................................................................... 2-5
Power-up sequence .................................................................................................................. 2-6
Display.................................................................................................................................. 2-8
Exponent mode (Engineering or Scientific) ............................................................................... 2-8
Information messages............................................................................................................... 2-8
Range messages ...................................................................................................................... 2-9
Status and error messages ..................................................................................................... 2-11
Multiple displays...................................................................................................................... 2-14
Navigating menus .............................................................................................................. 2-17
Menu types.............................................................................................................................. 2-17
Navigation rules ...................................................................................................................... 2-17
Menu .................................................................................................................................. 2-18
SAVESETUP........................................................................................................................... 2-19
TEST....................................................................................................................................... 2-26
LIMITS .................................................................................................................................... 2-26
STATUS-MSG......................................................................................................................... 2-26
GENERAL............................................................................................................................... 2-27
Table of Contents

Table of Contents Model 6517B Electrometer Reference Manual
Connections ................................................................................................................ 3-1
Introduction .......................................................................................................................... 3-1
Electrometer input connector ............................................................................................... 3-1
Input configurations................................................................................................................... 3-2
Maximum input levels................................................................................................................ 3-2
Input protection ......................................................................................................................... 3-3
Connection methods ............................................................................................................ 3-4
High-resistance meter connections ........................................................................................... 3-4
Voltage source output connections ........................................................................................... 3-5
V-source probes and cables...................................................................................................... 3-6
Low-noise cables, shielding, and guarding.......................................................................... 3-6
Low-noise input cables.............................................................................................................. 3-7
Shielding and guarding ............................................................................................................. 3-7
Floating circuits .................................................................................................................... 3-9
Floating measurements........................................................................................................... 3-10
Floating voltage source ........................................................................................................... 3-10
Test fixtures........................................................................................................................ 3-11
Keithley Instruments Model 8009 test fixture........................................................................... 3-11
Custom built test fixtures......................................................................................................... 3-12
Basic measurements .................................................................................................. 4-1
Introduction .......................................................................................................................... 4-1
Voltage measurements ........................................................................................................ 4-1
Basic measurement procedure ................................................................................................. 4-2
Volts configuration..................................................................................................................... 4-4
Voltage measurement considerations ....................................................................................... 4-6
Current measurements ........................................................................................................ 4-9
Basic measurement procedure ............................................................................................... 4-10
Amps configuration ................................................................................................................. 4-12
Current measurement considerations ..................................................................................... 4-13
Resistance and resistivity measurements.......................................................................... 4-18
Auto V-source ......................................................................................................................... 4-18
Ohms ranges........................................................................................................................... 4-19
Resistance measurements...................................................................................................... 4-20
Resistivity measurements ....................................................................................................... 4-22
Ohms configuration ................................................................................................................. 4-27
Ohms measurement considerations........................................................................................ 4-30
Charge measurements (Q) ................................................................................................ 4-31
Basic measurement procedure ............................................................................................... 4-31
Coulombs configuration .......................................................................................................... 4-33
Charge measurement considerations ..................................................................................... 4-34
Other measurement considerations................................................................................... 4-35
Ground loops........................................................................................................................... 4-35
Triboelectric effects ................................................................................................................. 4-36
Piezoelectric and stored charge effects .................................................................................. 4-36
Electrochemical effects ........................................................................................................... 4-37
Humidity .................................................................................................................................. 4-37
Light ........................................................................................................................................ 4-37
Electrostatic interference......................................................................................................... 4-37
Magnetic fields ........................................................................................................................ 4-38

Model 6517B Electrometer Reference Manual Table of Contents
Electromagnetic interference (EMI)......................................................................................... 4-38
Relative humidity and external temperature readings ............................................................. 4-39
Measurement options................................................................................................. 5-1
Introduction .......................................................................................................................... 5-1
Voltage source ..................................................................................................................... 5-1
V-Source configuration.............................................................................................................. 5-2
Sourcing options ....................................................................................................................... 5-2
Setting voltage source value ..................................................................................................... 5-4
Voltage and current limit ........................................................................................................... 5-5
Interlock and test fixtures .......................................................................................................... 5-6
Operate ..................................................................................................................................... 5-7
Analog outputs ..................................................................................................................... 5-7
2 V analog output ...................................................................................................................... 5-8
Preamp out................................................................................................................................ 5-9
Using external feedback..................................................................................................... 5-10
Electrometer input circuitry...................................................................................................... 5-11
Shielded fixture construction ................................................................................................... 5-13
External feedback procedure .................................................................................................. 5-14
Non-standard coulombs ranges .............................................................................................. 5-14
Logarithmic currents................................................................................................................ 5-15
Non-decade current gains....................................................................................................... 5-17
Range and resolution......................................................................................................... 5-17
Measurement range ................................................................................................................ 5-17
Display resolution.................................................................................................................... 5-18
Zero check, relative, and zero correct................................................................................ 5-19
Zero check .............................................................................................................................. 5-19
Relative (REL)......................................................................................................................... 5-20
Zero correct............................................................................................................................. 5-21
Test sequences........................................................................................................... 6-1
Introduction .......................................................................................................................... 6-1
Test sequences.................................................................................................................... 6-1
Test descriptions .................................................................................................................. 6-1
Diode leakage current test ........................................................................................................ 6-2
Capacitor leakage current test .................................................................................................. 6-4
Cable insulation resistance test................................................................................................. 6-5
Resistor voltage coefficient test................................................................................................. 6-5
Standard method resistivity tests .............................................................................................. 6-6
Alternating polarity resistance/resistivity test............................................................................. 6-7
Surface insulation resistance (SIR) test .................................................................................... 6-9
Sweep tests (square wave and staircase)............................................................................... 6-10
Configuring test sequences ............................................................................................... 6-12
Configure sequence menu ...................................................................................................... 6-12
Menu sections ......................................................................................................................... 6-14
Triggering .................................................................................................................... 7-1
Introduction .......................................................................................................................... 7-1
Trigger configuration menu .................................................................................................. 7-2

Table of Contents Model 6517B Electrometer Reference Manual
Trigger models ..................................................................................................................... 7-3
Basic trigger model ................................................................................................................... 7-4
Advanced trigger model ............................................................................................................ 7-6
Trigger model layers ................................................................................................................. 7-7
Trigger configuration ............................................................................................................ 7-9
Basic trigger configuration......................................................................................................... 7-9
Advanced trigger configuration.................................................................................................. 7-9
External triggering .............................................................................................................. 7-16
Trigger link connector.............................................................................................................. 7-17
Asynchronous operation ......................................................................................................... 7-17
Semi-synchronous operation................................................................................................... 7-22
Buffer (data store)....................................................................................................... 8-1
Introduction .......................................................................................................................... 8-1
Buffer overview .................................................................................................................... 8-1
Maximum readings.................................................................................................................... 8-1
Data elements ........................................................................................................................... 8-1
Configuring data storage...................................................................................................... 8-3
Data store configuration menu .................................................................................................. 8-3
Storing and recalling readings................................................................................................... 8-6
Buffer multiple displays ............................................................................................................. 8-7
Filters and math .......................................................................................................... 9-1
Introduction .......................................................................................................................... 9-1
Filters.................................................................................................................................... 9-1
Digital filters............................................................................................................................... 9-2
Median filter............................................................................................................................... 9-3
Configuring the filters ................................................................................................................ 9-6
Math ..................................................................................................................................... 9-7
Polynomial................................................................................................................................. 9-8
Percent...................................................................................................................................... 9-8
Percent deviation ...................................................................................................................... 9-8
Deviation ................................................................................................................................... 9-9
Ratio.......................................................................................................................................... 9-9
Logarithmic................................................................................................................................ 9-9
Selecting and configuring math ............................................................................................... 9-10
Math multiple display............................................................................................................... 9-11
Limits, digital I/O, and scanning.............................................................................. 10-1
Introduction ........................................................................................................................ 10-1
Limits.................................................................................................................................. 10-1
Setting limits............................................................................................................................ 10-3
Strobe control.......................................................................................................................... 10-4
Pass pattern............................................................................................................................ 10-4
Limits example ........................................................................................................................ 10-5
Digital I/O ........................................................................................................................... 10-6
Digital I/O menu ...................................................................................................................... 10-6
Digital I/O port ......................................................................................................................... 10-7
Scanning .......................................................................................................................... 10-10

Model 6517B Electrometer Reference Manual Table of Contents
Internal scanning................................................................................................................... 10-10
External scanning.................................................................................................................. 10-11
Remote operations ................................................................................................... 11-1
Introduction ........................................................................................................................ 11-1
Standards................................................................................................................................ 11-1
RS-232 serial port ................................................................................................................... 11-1
Connections ....................................................................................................................... 11-1
IEEE-488 bus connections...................................................................................................... 11-2
RS-232 interface connections ................................................................................................. 11-3
Selecting interface parameters .......................................................................................... 11-4
Communication menu ............................................................................................................. 11-4
GPIB primary address selection.............................................................................................. 11-7
General bus commands..................................................................................................... 11-7
REN (remote enable) .............................................................................................................. 11-8
IFC (interface clear) ................................................................................................................ 11-8
LLO (local lockout) .................................................................................................................. 11-8
GTL (go to local) ..................................................................................................................... 11-8
DCL (device clear) .................................................................................................................. 11-8
SDC (selective device clear) ................................................................................................... 11-8
GET (group execute trigger).................................................................................................... 11-9
SPE, SPD (serial polling) ........................................................................................................ 11-9
IEEE-488 front panel operation.......................................................................................... 11-9
Error and status messages ..................................................................................................... 11-9
IEEE-488 status indicators...................................................................................................... 11-9
LOCAL key............................................................................................................................ 11-10
Programming syntax ........................................................................................................ 11-10
Command words ................................................................................................................... 11-10
Program messages ............................................................................................................... 11-13
Response messages............................................................................................................. 11-15
Message exchange protocol ................................................................................................. 11-15
IEEE-488 trigger model.................................................................................................... 11-16
Idle and initiate ...................................................................................................................... 11-17
Trigger model layers ............................................................................................................. 11-17
RS-232 serial interface..................................................................................................... 11-20
RS-232 interface configuration.............................................................................................. 11-21
RS-232 operating considerations .......................................................................................... 11-21
Error messages..................................................................................................................... 11-23
Common commands ................................................................................................ 12-1
Introduction ........................................................................................................................ 12-1
Common command summary............................................................................................ 12-2
Common command descriptions ....................................................................................... 12-3
*CLS (clear status) .................................................................................................................. 12-3
*ESE <NRf> (event enable), *ESE? (event enable query) ...................................................... 12-4
*ESR? (event status register query)........................................................................................ 12-5
*IDN? (identification query) ..................................................................................................... 12-7
*OPC (operation complete) ..................................................................................................... 12-8
*OPC? (operation complete query) ......................................................................................... 12-9
*OPT? (option identification query) ....................................................................................... 12-10
*RCL (recall).......................................................................................................................... 12-10
*RST (reset the Model 6517B) .............................................................................................. 12-10

Table of Contents Model 6517B Electrometer Reference Manual
*SAV (save the current setup in memory) ............................................................................. 12-11
*SRE <NRf> (service request enable), *SRE? (service request enable query)..................... 12-11
*STB? (status byte query) ..................................................................................................... 12-13
*TRG (trigger)........................................................................................................................ 12-14
*TST? (self-test query) .......................................................................................................... 12-15
*WAI (wait-to-continue) ......................................................................................................... 12-15
Status structure ........................................................................................................ 13-1
Introduction ........................................................................................................................ 13-1
Status register sets ............................................................................................................ 13-1
Standard event status registers............................................................................................... 13-3
Operation event status registers ............................................................................................. 13-3
Condition registers .................................................................................................................. 13-8
Transition filters....................................................................................................................... 13-9
Event registers ........................................................................................................................ 13-9
Enable registers .................................................................................................................... 13-10
Queues............................................................................................................................. 13-10
Output queue ........................................................................................................................ 13-10
Error queue ........................................................................................................................... 13-11
Status byte and service request (SRQ) ........................................................................... 13-11
Status byte register ............................................................................................................... 13-12
Service request enable register............................................................................................. 13-13
Serial poll and SRQ............................................................................................................... 13-14
SCPI command reference ........................................................................................ 14-1
Introduction ........................................................................................................................ 14-1
Signal-oriented measurement commands ......................................................................... 14-1
:FETCh?.................................................................................................................................. 14-2
:CONFigure:<function> ........................................................................................................... 14-3
READ? .................................................................................................................................... 14-4
:MEASure[:<function>]? .......................................................................................................... 14-5
SCPI command summary .................................................................................................. 14-6
General notes.......................................................................................................................... 14-6
CALCulate command summary .............................................................................................. 14-7
DISPlay command summary................................................................................................... 14-9
FORMat command summary ................................................................................................ 14-10
OUTPut command summary................................................................................................. 14-11
:ROUTe command summary................................................................................................. 14-11
:SENSe command summary ................................................................................................. 14-13
:SOURce command summary............................................................................................... 14-20
:STATus command summary................................................................................................ 14-21
:SYSTem command summary .............................................................................................. 14-23
:TRACe command summary ................................................................................................. 14-25
:TRIGger command summary............................................................................................... 14-26
:TSEQuence command summary ......................................................................................... 14-29
:UNIT command summary .................................................................................................... 14-32
SCPI command subsystems............................................................................................ 14-32
CALCulate subsystem...................................................................................................... 14-32
CALCulate[1]......................................................................................................................... 14-32
:FORMat <name> ................................................................................................................. 14-33
KMATh commands................................................................................................................ 14-33
:MA0Factor <NRf> ................................................................................................................ 14-33
:MA1Factor <NRf> ................................................................................................................ 14-34