Keysight Technologies B1500A Instruction Manual

Keysight Technologies B1500A
Semiconductor Device Analyzer
Configuration and
Connection Guide

Notices
©Keysight Technologies 2005-2019
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Manual Part Number
B1500-90090
Edition
Edition 1, May 2005
Edition 2, July 2007
Edition 3, June 2010
Edition 4, October 2011
Edition 5, June 2013
Edition 6, February 2015
Edition 7, June 2015
Edition 8, August 2019
Edition 9, December 2019
Published by:
Keysight Technologies Japan K.K.
9-1, Takakura-cho, Hachioji-shi, Tokyo
192-0033 Japan
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In This Document
This document provides the following information about Keysight B1500A
Semiconductor Device Analyzer.
1. B1500A Product Configuration
Describes the product configuration of the B1500A.
2. B1500A Accessories
Describes the available accessories for the B1500A.
3. Connection Guide for Wafer Prober
Describes how to connect the B1500A, accessories, and a DUT interface such as
wafer prober and your own test fixture.
4. Connection and Ordering Examples
Describes fixture/prober connection and ordering examples.

Contents
Keysight B1500A Configuration and Connection Guide Contents - 1
1. B1500A Product Configuration
Product line up of the B1500A series . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2
Options of B1500A series . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
Furnished accessories. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10
Upgrade products for the B1500A series. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-20
Option of B1500AU upgrade kit . . . . . . . . . . . .. . . . . . . . . . . . . . . . . . . . . . . 1-20
About Plug-in modules. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-25
Module type and locations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-26
Maximum Module Configuration. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-27
Limitation by installing B1500AU-030 WGFMU. . .. . . . . . . . . . . . . . . . . . . 1-27
EasyEXPERT group+ software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-28
Functions and capabilities . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-28
Operation mode. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-28
Application library . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-29
Oscilloscope view. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-29
Workspace and data management. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-30
External instrument control . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-30
Furnished Software. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-30
EasyEXPERT group+ Software for PC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-31
System requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-33
License Management Tool . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-35
2. B1500A Accessories
Accessories for the B1500A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2
SMU cables . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2
CMU accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4
HVSPGU accessories. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6
WGFMU accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8
Test fixture . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-10
Other accessories and interlock . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-12
Rack mount kit for Keysight standard cabinet . . . . . . . . . . . . . . . . . . . . . . . . 2-18
Accessories for the wafer prober / connector plate . . . . . . . . . . . . . . . . . . . . . . . 2-19
3. Connection Guide for Wafer Prober
SMU/GNDU connection with prober . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2
GNDU connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
Non-Kelvin connection. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
Kelvin connection. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4

Contents - 2 Keysight B1500A Configuration and Connection Guide
Contents
SMU connections. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5
Non-Kelvin connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5
Kelvin connection. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6
Kelvin to non-Kelvin connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7
MCSMU connections. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-8
Connection for low current measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12
To make connection to reduce leakage current . . .. . . . . . . . . . . . . . . . . . . . . 3-12
Guarding. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12
Connection for low resistance measurement. . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-14
To make connection to measure low resistance. . . . . . . . . . . . . . . . . . . . . . . . 3-14
Kelvin connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-14
SCUU and ASU. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-16
SCUU positioner-based probing connection . . . . . . . . . . . . . . . . . . . . . . . . . . 3-16
ASU connection. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-17
WGFMU and RSU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-19
Connecting RSU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-19
Connecting RF Probes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-21
Connecting DC Probes. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-24
Interlock circuit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-26
Installing the interlock circuit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-26
To connect interlock circuit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-28
4. Connection and Ordering Examples
Two terminal device . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
General IV characterization . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
General IV/CV characterization . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4
High resolution IV characterization . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6
Four terminal device . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8
General IV characterization, Migration from 4155 . . . . . . . . . . . . . . . . . . . . . . 4-8
General IV/CV characterization . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-10
High resolution IV characterization, Migration from 4156. . . . . . . . . . . . . . . 4-12
High resolution IV characterization (ASU). . . . . . . . . . . . . . . . . . . . . . . . . . . 4-14
High power IV characterization. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-16
50 ms Pulse IV characterization (MCSMU) . . . . . . . . . . . . . . . . . . . . . . . . . . 4-18
50 ms Pulse IV characterization (Two MCSMU) . . . . . . . . . . . . . . . . . . . . . . 4-20
Flash memory cell characterization (2 pulse channels) . . . . . . . . . . . . . . . . . . 4-22
Flash memory cell characterization (3 or 4 pulse channels) . . . . . . . . . . . . . . 4-24
Configuration example of WGFMU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-26
Ultra-fast 1 us NBTI characterization using the B1530A WGFMU module . 4-26

1 B1500A Product Configuration

1-2 Keysight B1500A Configuration and Connection Guide
B1500A Product Configuration
Product line up of the B1500A series
1.1 Product line up of the B1500A series
The Keysight B1500A Semiconductor
Device Analyzer is the new generation one
box solution for the semiconductor device
DC/AC parametric measurement and
analysis application. The B1500A provides
the DC voltage/current output capability,
DC voltage/current measurement
capability, and AC signal output and
impedance measurement capability. So you
can perform a current-voltage sweep
measurement and a capacitance-voltage
sweep measurement for example by one
instrument.
The B1500A also provides an intuitive graphical user interface, touch screen LCD panel,
keyboard, and mouse for easy and effective measurement and analysis on the Windows
environment. You can analyze a measurement result characteristics graph for example by
using several tools such as markers, cursors, and lines.
The EasyEXPERT remote control function supports the remote execution of application
tests via the LAN interface.
Also, in the GPIB remote control mode, you can control the B1500A from an external
computer by using Keysight FLEX command set that is the common language for Keysight
semiconductor DC measurement instruments. So you can reuse the measurement program
created for Keysight 4155/4156/E5260/E5270 series.
•B1500A Semiconductor device analyzer mainframe
Mainframe that provides the ground unit (GNDU) and ten empty slots for the
measurement facilities, and Keysight EasyEXPERT group+ software for the operating
environment. The EasyEXPERT group+ is the GUI based measurement control and
analysis software runs on the Windows.
The B1500A is equipped with the 15 inch LCD with touch panel, solid-state drive
(SSD) DVD-RW/DVD-ROM/CD-RW/CD-ROM drive, and USB/LAN/GP-IB
interfaces. The USB keyboard, the USB mouse, and the stylus pen are available as
option.
•HPSMU module (B1500A-A10)
High power source/monitor unit module. Occupies two slots.
•MPSMU module (B1500A-A11)
Medium power source/monitor unit module. Occupies one slot. Needs Keysight
E5288A ASU(option A29) to perform atto level current measurement or automatic
switching of the measurement resources connection. ASU is effective for the B1511B
MPSMU. ASU cannot be connected to the B1511A MPSMU.
•HRSMU module (B1500A-A17)
High resolution source/monitor unit module. Occupies one slot. Needs Keysight
E5288A ASU (option A28) to perform atto level current measurement or automatic
switching of the measurement resources connection.

Keysight B1500A Configuration and Connection Guide 1-3
B1500A Product Configuration
Product line up of the B1500A series
•MCSMU module (B1500A-A1A or A1B)
50 μs pulse Medium current source/monitor unit module. Occupies one slot.
•MFCMU module (B1500A-A20)
Multi frequency capacitance measurement unit module. Occupies one slot. Needs
Keysight N1301A-100 SCUU to perform automatic switching of the measurement
resources connection.
•HVSPGU module (B1500A-A25)
High voltage semiconductor pulse generator unit module. Occupies one slot. Up to five
modules can be installed in one B1500A mainframe. One module provides two output
channels. Needs Keysight 16440A (B1500A-A04) and 16445A to perform automatic
switching of the measurement resources connection.
•WGFMU module and RSU (B1500A-A30, A31)
Waveform generator/fast measurement unit module and the remote-sense and switch
unit. Occupies one slot. Up to five modules can be installed in one B1500A mainframe.
One module provides two channels.
•16440A SMU/PGU pulse generator selector (B1500A-A04)
Used to switch the measurement resource connected to the DUT. The measurement
resource can be HV SPGU or SMU. Needs the 16445A adapter to use the selector. One
selector provides two switching channel.
•16442B test fixture (B1500A-A5F)
Test fixture for semiconductor parameter analyzers and device analyzers. Provides
three Kelvin triaxial connectors (six non-Kelvin triaxial connectors) for connecting
SMU, six BNC connectors for connecting HV SPGU, MFCMU, or other instruments, a
GNDU connector, and an Intlk connector. Furnished with the dual-in-line package
socket module, universal socket modules (two types), blank PTFE on board, and
connection wires for device connection.
•16445A selector adapter (B1500A-A04)
Used to connect the 16440A selector (B1500A-A04) to the B1500A. Two selectors can
be connected.
•E5288A ASU (B1500A-A28 or A29)
Atto sense and switch unit (ASU). Used to enable the 1 pA range for the atto level
current measurement, also switch the measurement resource connected to the DUT.
The measurement resource can be HRSMU/MPSMU or the instrument connected to
the AUX terminal.
•N1255A 2 channel connection box for MCSMU
Connection box to make the MCSMU connection easy. Supports two MCSMU.
•N1301A-100 SCUU
SMU CMU unify unit (SCUU). Used to switch the measurement resource connected to
the DUT. The measurement resource can be CMU or one of two SMUs connected to
the SCUU.

1-4 Keysight B1500A Configuration and Connection Guide
B1500A Product Configuration
Product line up of the B1500A series
•N1302A-200 GSWU
Guard switch unit (GSWU). Needs the SCUU to use the GSWU. Effective for the
accurate impedance measurements by connecting the guard lines between CMU high
and low near the DUT.
Table 1-1 Mainframe Specification
Table 1-2 SMU Module Variation
Available Slots 10
Ground Unit (GNDU) sink capability 4.2 A
Instrument control GPIB
External trigger inputs / outputs 1 BNC Trigger in, 1 BNC Trigger out, 8
Programmable Trigger In/Out
Networking 100 BASE-TX / 10 BASE-T LAN Port
Module
Key specification
Max.
Current Max. Voltage
Current
means.
Resolu-
tion
Voltage
means.
Resolu-
tion
Req’d
slots
HPSMU
(High Power SMU) ±1 A ±200 V 10 fA 2 μV2
MPSMU
(Medium Power SMU) ±100 mA ±100 V 10 fA 0.5 μV1
HRSMU
(High Resolution SMU) ±100 mA ±100 V 1 fA 0.5 μV1
ASU
(Atto Sense and Switch Unit) ±100 mA ±100 V 0.1 fA 0.5 μVNA
MCSMU
(50 μs pulse Medium Current SMU) ±1 A ±30 V 10 pA 0.2 μV1

Keysight B1500A Configuration and Connection Guide 1-5
B1500A Product Configuration
Product line up of the B1500A series
Figure 1-1 B1500A Rear View

1-6 Keysight B1500A Configuration and Connection Guide
B1500A Product Configuration
Options of B1500A series
1.2 Options of B1500A series
This section describes Option items of the Keysight B1500A Semiconductor Device
Analyzer.
Table 1-3 B1500A Options
Model/
Option Description OP Instruction
Mainframe
B1500A Semiconductor device analyzer
mainframe • Select option 015 or 030 to specify cable length. • Select option 050 or 060 to specify Power line
frequency.
• The following accessories are included. See
Table 1-3, for more details of furnished
accessories.
Keyboard
USB mouse
Stylus pen
One Interlock cable (1.5 m or 3.0 m)
One GNDU cable (1.5 m or 3.0 m)
One Triaxial cable (1.5 m or 3.0 m)
GNDU to Kelvin adaptor
Select standard packages (mandatory)
B1500A-A00 Empty package for custom solution • No module is included in B1500A mainframe
• Specify Add-on package option.
B1500A-A01 Standard pack 1 -Standard package
(Mid PWR unit 4ea, cables) • Standard package-1 contains four MPSMU and
eight Triaxial cables.
• Cable length 1.5 m or 3.0 m is specified by
option 015 or 030.
B1500A-A02 Standard pack 2 -High resolution
package (High resolution unit 4ea,
cables)
• Standard package-2 contains four HRSMU and
eight triaxial cables.
• Cable length 1.5 m or 3.0 m is specified by
option 015 or 030.
B1500A-A03 Standard pack 3 -High power package
(High PWR unit 2ea, Mid PWR unit
2ea, cables)
• Standard package-3 contains two HPSMU, two
MPSMU, and eight triaxial cables.
• Cable length 1.5 m or 3.0 m is specified by
option 015 or 030.
B1500A-A04 Standard pack 4 - Flash pack (Mid
PWR unit 2ea, Hi-res unit 2ea, PGU,
accessories)
• Standard package-4 contains two MPSMU, two
HRSMU, one HVSPGU and accessories for
flash memory cell measurement See Table 1-8.

Keysight B1500A Configuration and Connection Guide 1-7
B1500A Product Configuration
Options of B1500A series
Select add-on packages (optional)
B1500A-A10 Add-on package - High power source
monitor unit (B1510A) 1ea, cables • HPSMU add-on package adds one HPSMU and two triaxial cables.
• Cable length 1.5 m or 3.0 m is specified by
option 015 or 030.
B1500A-A11 Add-on package - Mid power source
monitor unit (B1511B) 1ea, cables • MPSMU add-on package adds one MPSMU and two triaxial cables.
• Cable length 1.5 m or 3.0 m is specified by
option 015 or 030.
B1500A-A17 Add-on Package - High resolution
source monitor unit (B1517A) 1ea,
cables
• HRSMU add-on package adds one HRSMU and
two triaxial cables.
• Cable length 1.5 m or 3.0 m is specified by
option 015 or 030.
B1500A-A1A Add-on Package - B1514A Medium
current source/monitor unit 1ea w/
connection box
•50μs pulse MCSMU add-on package adds one
MCSMU, two triaxial cables and the N1255A
connection box.
• Cable length 1.5 m or 3.0 m is specified by
option 015 or 030.
B1500A-A1B Add-on Package - B1514A Medium
current source/monitor unit 2ea w/
connection box
•50μs pulse MCSMU two modules add-on
package adds two MCSMU, four triaxial cables
and the N1255A connection box.
• Cable length 1.5 m or 3.0 m is specified by
option 015 or 030.
B1500A-A20 Add-on package - Capacitance
measurement unit (B1520A) 1ea, cable
1ea
• Capacitance measurement add-on package adds
the MFCMU and one CMU cable.
• Cable length 1.5 m or 3.0 m is specified by
option 015 or 030.
B1500A-A25 Add-on package - Pulse generator unit
(B1525A) 1ea, cables • HVSPGU add-on package adds one HVSPGU and two SPGU cables.
• Cable length 1.5 m or 3.0 m is specified by
option 015 or 030.
B1500A-A28 Add-on package - Atto sense switch
unit (E5288A) 1ea, cables for High
Resolution Source Monitor Unit
• ASU add-on package for HRSMU adds one
ASU, one D-sub cable, and one triaxial cable.
• Cable length 1.5 m or 3.0 m is specified by
option 015 or 030.
B1500A-A29 Add-on package - Atto sense switch
unit (E5288A) 1ea, cables for Mid
Power Source Monitor Unit (B1511B)
• ASU add-on package for B1511B MPSMU adds
one ASU, one D-sub cable, and one triaxial
cable.
• Cable length 1.5 m or 3.0 m is specified by
option 015 or 030.
• ASU and D-sub cable require ASU connector on
the B1511B MPSMU module.
Model/
Option Description OP Instruction

1-8 Keysight B1500A Configuration and Connection Guide
B1500A Product Configuration
Options of B1500A series
B1500A-A30 Add-on package - WGFMU 1ea,
Remote sense unit 2ea, cables • WGFMU add-on package adds one WGFMU, two RSU, and two RSU cables
• Cable length 1.5 m or 3.0 m is specified by
option 015 or 030.
B1500A-A31 Add-on package - WGFMU 1ea,
Connector adaptor, Remote sense unit
2ea, cables
• WGFMU add-on package adds one WGFMU,
two RSU, and accessories for connector plate.
See Table 1-19.
• Cable length 1.5 m or 3.0 m is specified by
option 015 or 030.
B1500A-A3P Add-on package - Probe cable kit for
WGFMU (8 probe cables. WGMU not
included)
• WGFMU probe cable kit adds cables for prober.
See Table 1-20.
• This option does not include the WGFMU
module.
B1500A-A5F Add-on package - Test fixture for
packaged device (16442B 1ea) • Test fixture for package device measurement, adds one 16442B Parametric Test Fixture.
• See Table 1-21 for furnished accessories.
Specify the cable length (mandatory)
B1500A-015 1.5 m cable • 1.5 m cable length (for mainframe bundled
cables and for package options)
B1500A-030 3.0 m cable • 3.0 m cable length (for mainframe bundled
cables and for package options)
Specify the power line frequency (mandatory)
B1500A-050 50Hz line frequency
B1500A-060 60Hz line frequency
Select calibration options (optional)
B1500A-A6J ANSI Z540 compliant calibration • ANSI Z540 compliant calibration
B1500A-UK6 Commercial cal. certificate w/ test data • Test Data for ISO 9001/2 Commercial
Calibration. This option provides measurement
test data for the standard commercial calibration
and test equipment trace information.
Specify the language of the paper manuals if you need (optional)
B1500A-ABA Paper manual set, English • Printed manuals are optional. Order this option
to get the paper manuals. Contains B1500A user
guide, Plug & Play driver user guide, self-paced
training manual, EasyEXPERT user guide, and
programming guide.
B1500A-ABJ Paper manual set, Japanese
Select the read-only drive if you need (optional)
Model/
Option Description OP Instruction

Keysight B1500A Configuration and Connection Guide 1-9
B1500A Product Configuration
Options of B1500A series
B1500A-DR1 Replace a built-in DVD-R drive with a
read-only DVD drive • DVD-ROM drive option for higher security • Replace from DVD-RW to DVD-ROM
Select rack mount kit (optional)
B1500A-1CM Rack mount kit • Rack mount kit for the B1500A.
• 7U height EIA
Select WGFMU learning kit (optional)
B1530A-0KN Self-paced sample program learning kit
for B1530A WGFMU • This option becomes available when B1500A-A30 or A31 is selected.
Refurbished product
B1500A
-RMKT Keysight Refurbished products • Shipment of used product from factory.
Startup assistance
PS-S20-01 Keysight 1 day startup assistance • Startup assistance & product training.
Model/
Option Description OP Instruction

1-10 Keysight B1500A Configuration and Connection Guide
B1500A Product Configuration
Furnished accessories
1.3 Furnished accessories
Furnished accessories of the B1500A semiconductor device analyzer and furnished
accessories of package options are described in this chapter.
Table 1-4 Furnished accessories on the B1500A semiconductor device analyzer mainframe
Description Qty. Note
USB keyboard 1 USB Keyboard for the B1500A
USB mouse 1 USB Mouse for the B1500A
Stylus pen 1 Stylus pen for the B1500A
Interlock cable 1 Cable length 1.5 m or 3.0 m is specified by the option B1500A-015 or
B1500A-030.
GNDU cable 1 Cable length 1.5 m or 3.0 m is specified by the option B1500A-015 or
B1500A-030.

Keysight B1500A Configuration and Connection Guide 1-11
B1500A Product Configuration
Furnished accessories
GNDU Kelvin adapter 1 GNDU Kelvin adapter must be directly connected to the B1500A GNDU
connector for taking out the GNDU Force and Sense to the individual
connectors. Then the GNDU cable must be used for extending the GNDU
Force. And the triaxial cable must be used for the Sense.
Triaxial cable 1 Cable length 1.5 m or 3.0 m is specified by the option B1500A-015 or
B1500A-030.
Power cable 1 Power cable for the B1500A
License Sheet 1SWS License-to-use for EasyEXPERT group+ software.
SMU number label 1 SMU number label, only for the B1500A installed with SMU.
PG number label 1 PG number label, only for the B1500A installed with HVSPGU
Description Qty. Note

1-12 Keysight B1500A Configuration and Connection Guide
B1500A Product Configuration
Furnished accessories
Table 1-5 B1500A-A01 Standard Pack 1 -Standard package
Table 1-6 B1500A-A02 Standard Pack 2 -High resolution package
Table 1-7 B1500A-A03 Standard Pack 3 -High power package
Table 1-8 B1500A-A04 Standard Pack 4 -Basic flash memory cell package
Description Qty. Note
MPSMU 4 Installed Medium power source/monitor unit (MPSMU)
Triaxial cable 8 Cable length 1.5 m or 3.0 m is specified by the option B1500A-015 or
B1500A-030.
Description Qty. Note
HRSMU 4 Installed High resolution source/monitor unit (HRSMU)
Triaxial cable 8 Cable length 1.5 m or 3.0 m is specified by the option B1500A-015 or
B1500A-030.
Description Qty. Note
MPSMU 2 Installed Medium power source/monitor unit (MPSMU)
HPSMU 2 Installed High power source/monitor unit (HPSMU)
Triaxial cable 8 Cable length 1.5 m or 3.0 m is specified by the option B1500A-015 or
B1500A-030.
Description Qty. Note
MPSMU 2 Installed Medium power source/monitor unit (MPSMU)
HRSMU 2 Installed High resolution source/monitor unit (HRSMU)
HVSPGU 1 Installed High voltage semiconductor pulse generator unit (HVSPGU)
SPGU cable 2 SPGU Cable (SMA to Coaxial). Cable length 1.5 m or 3.0 m is specified by
the option B1500A-015 or B1500A-030.

Keysight B1500A Configuration and Connection Guide 1-13
B1500A Product Configuration
Furnished accessories
Table 1-9 B1500A-A10 Add-on Package - High power source monitor unit
Table 1-10 B1500A-A11 Add-on Package - Medium power source monitor unit
16440A pulse selector 1 16440A SMU/PGU pulse generator selector
16445A Selector adapter 1 16445A Selector adapter for 16440A
Control cable, 1.5 m 1 Digital I/O cable, 1.5 m, between B1500A and 16445A (16445A-001)
Control cable, 40 cm 1 Control cable, 40 cm, between 16445A and 16440A (16440A-003)
Triaxial cable, 1.5 m 2 Cable length 1.5 m for 16440A pulse selector.
Triaxial cable 8 Cable length 1.5 m or 3.0 m is specified by the option B1500A-015 or
B1500A-030.
Description Qty. Note
Description Qty. Note
HPSMU 1 Installed High power source/monitor unit (HPSMU)
Triaxial cable 2 Cable length 1.5 m or 3.0 m is specified by the option B1500A-015 or
B1500A-030.
Description Qty. Note
MPSMU 1 Installed Medium power source/monitor unit (MPSMU)
Triaxial cable 2 Cable length 1.5 m or 3.0 m is specified by the option B1500A-015 or
B1500A-030.

1-14 Keysight B1500A Configuration and Connection Guide
B1500A Product Configuration
Furnished accessories
Table 1-11 B1500A-A17 Add-on Package - High resolution source monitor unit
Table 1-12 B1500A-A1A Add-on Package - 50 μs Pulse Medium current source monitor unit
Table 1-13 B1500A-A1B Add-on Package - 50 μs Pulse Medium current source monitor unit
Description Qty. Note
HRSMU 1 Installed High resolution source/monitor unit (HRSMU)
Triaxial cable 2 Cable length 1.5 m or 3.0 m is specified by the option B1500A-015 or
B1500A-030.
Description Qty. Note
MCSMU 1 Installed Medium current source/monitor unit (MCSMU)
Triaxial cable 2 Cable length 1.5 m or 3.0 m is specified by the option B1500A-015 or
B1500A-030.
Connection box 1 N1255A Connection box for B1514A Medium Current Source/Monitor unit
to make connection to DUT easy.
Description Qty. Note
MCSMU 2 Installed two Medium current source/monitor units (MCSMU)
Triaxial cable 4 Cable length 1.5 m or 3.0 m is specified by the option B1500A-015 or
B1500A-030.
Connection box 1 N1255A Connection box for B1514A Medium Current Source/Monitor unit
to make connection to DUT easy.