Koganei Flow FSU User manual

799
Not affected by piping resistance
A.S.OUT
S.W.OUT
ch
1234
PSU
A single controller detects four points at the same time
A.S.OUT
S.W.OUT
ch
1234
PSU
RS232C
Output Mode
Three types of sensor heads, depending on flow rate range
Connectable to a personal computer
●Use a PC to perform flow rate setting, capture of flow rate
value, and reference flow rate setting.
● Three types are available,
including
–500〜500 mR/min (ANR),
[–30.5〜30.5 in.
3
/min.]
–3〜3R/min (ANR),
[–0.11〜0.11 ft.
3
/min.]
and 0〜10R/min (ANR),
[0〜0.35 ft.
3
/min.] .
●Since the flow rate sensor head is not affected by piping
resistance, there is no restriction on mounting position.
Flow rate sensor
Pressure sensor
Measurement results using φ1.8 [0.071 in.] tube
※Based on Koganei test standard.
Measurement point 2
0.12R/min [0.0042 ft.
3
/min.]
−95 kPa [−13.8 psi.]
Measurement point 1
0.11R/min [0.0039 ft.
3
/min.]
−78 kPa [−11.3 psi.]
100 mm
[3.94 in.]
2000 mm [78.7 in.]
100 mm
[3.94 in.]
Measurement
point 1
Nozzle hole
diameter
0.1 mm [0.004 in.]
Measurement
point 2
Vacuum
source
−98 kPa
[−14.2 psi.]
Switch
output
L（R/min）
L1
L2
Hysteresis
ON
t
Discharge to
atmospheric
pressure
Vacuum
valve ON
Workpiece
lifted by
vacuum
Vacuum
break
L（R/min）
L2
L1
ΔL
Reference flow rate capture
ON
t
Switch
output
Hysteresis
Discharge to
atmospheric
pressure
Vacuum
valve ON
Workpiece
lifted by
vacuum
Vacuum
break
L（R/min）
L1
L2
ON
t
Switch
output
Hysteresis
Hysteresis
Discharge to
atmospheric
pressure
Vacuum
valve ON
Workpiece
lifted by
vacuum
Vacuum
break
●Window comparator mode 2
• When L1 has been set, this mode maintains it unchanged until reference
flow rate capture is performed again.
●Window comparator mode 3
• Each time the L1 setting is deleted when switch output goes OFF, this
mode performs reference flow rate capture and sets L1.
Effective for situations where flow rate fluctuation is severe.
When using window comparator mode 3, use RS232C to perform
reference flow rate capture from outside.
■Window comparator mode 4
• Mode for freely setting L1 and
L2.
■Window comparator mode 2 and 3
• Modes for automatically
setting L1, using ΔL setting
and reference flow rate
capture. (L1＝Reference
flow rate −ΔL)
■Window comparator mode 1
・Mode for freely setting L1
and L2.
Note, however, that switch
output does not go ON while
flow rate is increasing.
Multi-channel Flow
Rate Sensor Controllers
The Flow rate sensor detects workpieces lifted by vacuum
that could not be detected by the pressure sensor.

800
WARNING
●While the Multi-channel Flow Rate Sensor Controller is in
operation, do not apply an external magnetic field to the
controller and sensor head. This could cause unintentional
operation leading to damage to equipment or to personal
injury.
●When wiring, be careful to ensure that the wiring polarity is
correct.
A wrong polarity could result in damage to the Multi-channel
Flow Rate Sensor controller.
CAUTION
●Always use the specified sensor head with this product.
Use of an unspecified item could result in erratic operation.
●When handling the Multi-channel Flow Rate Sensor Controller
and sensor head, avoid hitting, dropping, or bumping with
excessive force (490 m/s2[50 G] or more). Even if not
apparently damaged, the internal parts could be damaged,
leading to erratic operation.
●Do not short the load.
Switching on sensor output with a shorted load could cause
damage to the Multi-channel Flow Rate Sensor Controller due
to overcurrent.
Example of load shorting: Connecting the output lead wires for
sensor output directly to the power supply.
●When mounting the fitting to the sensor head, the tightening
torque should not exceed 2.5 N
・m [1.84 ft・lbf]. In addition,
when securing the sensor head, use an M3 screw and the
tightening torque should not exceed 0.6 N
・m [0.44 ft・lbf].
Excessive tightening could damage the sensor head, etc.
Always switch off the power before connecting the sensor
head and controller. Attempting to connect the sensor head
with the power on could cause erratic operation in the
controller due to surge voltage, etc.
DANGER
●While the product is in operation, do not attempt to adjust the
attached mechanisms (connecting and disconnecting the
wiring connector, or attach or position the sensor head, etc.).
Abnormal operations could result in injury.
General precautions
1. If power is supplied from a commercial switching regulator,
ensure that the frame ground (F.G.) terminal of the power supply
is connected to an actual ground.
2. In the case of noise generating equipment (switching regulator,
inverter motor, etc.) being used in the vicinity of sensor mounting
portion, connect the frame ground (F.G.) terminal of the
equipment to an actual ground.
3. When wiring is completed, check that there is no error in the
wiring connections.
Wiring
1. Sensor head is designed for use with non-corrosive gas. It cannot
be used for liquid or corrosive gas.
2. Use within the rated voltage range for power supply.
3. Do not use during the initial transient time (0.5 sec.) after the
power supply is switched on.
4. Do not operate the keys with pointed or sharp objects.
5. When using window comparator mode 2 in operations that
capture repeated utilization of the reference flow rate, the
guaranteed number of times may be exceeded in a short period of
time. In such cases, use window comparator mode 3.
6. If using with window comparator mode 3, use FSU-S-D.
Others
Handling Instructions and Precautions
MULTI-CHANNEL FLOW RATE SENSOR CONTROLLERS
Safety Precautions (Multi-channel Flow Rate Sensor Controllers)

801
When the sensor head FSU-□-□is supplied, the sensor head body and
mini clamp connector (male) are not yet connected. Follow the procedure
below to perform the connection.
1. Check that the connector cover (the part where lead wires are to be
inserted) is protruding from the connector body.
It cannot be used if it’s flat and placed at the same level against the body.
2. Cut the cable at the length required for the sensor head. Strip off the cable
sheath for 50 mm [1.97 in.] from the cable end, and expose the lead
wires. At this time, do not take off the lead wire insulation.
3. Follow the instructions in the table below to insert the lead wires into the
hole in the connector cover. Look through the top of the semi-transparent
cover to check that the lead wires have been firmly inserted all the way to
the back. (Insertion length is about 9 mm [0.35 in.].)
Use caution in making the connections, since switching on the power with
wrong connections will damage the sensor head and controller.
4. Taking care to avoid letting the lead wires slip out from the connector, use
pliers or some other hand tool to crimp the cover and connector body,
and push the cover into the connector body.
Limit the crimping force to 980.7 N [220.5 lbf.].
When the cover is flat and placed at the same level against the connector
body, the connection is complete.
5. In the same way, handle the sensor head relay cable PSUK-□mini-clamp
connectors (male, female).
6. Check one more time that the wiring is correct.
Sensor head and connector connection procedure
To mount the sensor head and the power supply, switch, and communication
cable, align the lock lever position as shown in the figure, and push until the
lock hooks on the controller-side connector.
To remove, push down completely on the lock lever, take the connector and
pull it out. At this time, be careful to avoid applying excessive force on the
lead wires.
4321
1ch
PSUW-□-□
FS-□
2ch 3ch
4ch
The connector
for 4-sensor head
Connector for power
supply, switch, and
communication cable
Power supply, switch,
and communication cable
Sensor head
Lock lever
Lock lever
Cover
Sensor head-side connector
Attaching and removing of the sensor head, and the
power supply, switch, and communication cable
Attaching the panel mounting parts and protective front cover
Use the hex socket head
screws (M2.6×0.45,
length 5 mm [0.197 in.])
to mount the mounting
bracket into the mounting
holes on the back of the
sensor controller.
The tightening torque
should not exceed
0.32 N・m [2.83 in・lbf].
PSU-BR
2-M2.6×0.45 Depth 6
(Mounting thread)
Mounting bracket
Hex socket head screw
(Provided with
mounting bracket)
Attaching the mounting bracket
Handling Instructions and Precautions
Panel plate
Mounting
body
Protective
front cover
(sold separately)
Multi-channel flow rate
sensor controller
Mounting holder
Groove on panel mounting body
1)
2)
3)4)
Mounting and wiring
50mm [1.97 in.]
No. on the
connector
1
2
3
4
Color of lead wire
Sensor head brown wire
Sensor head black wire
Sensor head blue wire
Prepared by customer
AWG 24-26 (0.14-0.3sq)
Insulation diameter:
φ0.8〜1.0 mm [0.031〜0.039 in.]
Reference flow rate capture Sensor head
Brown
Black
Blue
1) Insert the mounting
body from the front of
the panel hole.
2) Insert the sensor
controller from the
back of the mounting
body.
3) From the back of the
position in 2), place the
mounting holder on the
mounting body groove,
and insert it.
4) Set the separately sold
protective front cover
in place.
※For removal, follow the above
procedure in reverse, using a
screwdriver or other tool to remove
the mounting holder.
Signal name
Sensor head power supply (＋)
Sensor head voltage output
Sensor head power supply (0V)
Reference flow rate capture
Sensor head
1234
PLC etc.
7. On the sensor head body, connect the sensor head-side connector. Open
the sensor head cover, connect the connector, and then close the cover.

No. Name Description
qLED display (red) Displays the detected flow rate value, setting
contents, and error content
wSwitch output indicator (red) Lights up when switch output is ON
eAutoscan indicator (green) The channel whose current flow rate is displayed on
the LED lights up
rUP key ( ) Used when adjusting set value upward
tDOWN key ( ) Used when adjusting set value downward
yMode key ( ) Used for all types of settings
802
Setting procedure
Caution
■Major parts and functions
1. Since miswiring in the sensor head, or in the power supply, switch, and communication cable, can
damage both the controller and sensor head, always check the wiring before switching on the power.
2. The setting conditions are written to EEPROM and saved. Be aware that EEPROM has a finite lifetime,
with guaranteed number of times up to 100,000 times.
3. When using window comparator mode 2 in operations that involve repeated reference flow rate
capture, the EEPROM guaranteed number of times may be exceeded in a short period of time. In such
cases, use window comparator mode 3.
4. In this catalog, window comparator mode 1 is called by code: CO1, window comparator mode 2 by
code: CO2, window comparator mode 3 by code: CO3, and window comparator mode 4 by code: CO4.
■Setting preparation
• Connect the connectors to the sensor heads.
(See p.801 for the connection procedure for the sensor head connectors.)
• Connect the sensor heads (one to four pcs.) and the power supply, switch, and communication cable to
the controller. (See p.801 for attaching and removing of the sensor head and the power supply, switch,
and communication cable.)
■Setting procedure
Window comparator mode 1 (CO1)
Window comparator mode 4 (CO4)
A.S.OUT
SW.OUT
ch
1234
FSU
Figure 1
e
ty
w
q
r
Output mode setting
Set each channel
to CO1, CO2,
CO3, or CO4.
Hysteresis setting
Perform the
hysteresis settings
for each channel.
Sensor head selection
Set the sensor
heads to be used
in each channel.
L1, L2 settings
Perform the L1 and L2
settings for each channel.
Various function settings
Perform function
settings for each
channel. (See
Functions List.)
Detection
Completes the
settings, and
commences
detection.
Window comparator mode 2 (CO2)
Window comparator mode 3 (CO3)
L, L2 settings
Perform the ΔL and L2
settings for each channel.
Reference flow rate capture
Performs reference flow rate
capture for each channel. L1 is
automatically created inside
the controller.
L1=Reference flow rate—ΔL
Settings at time of shipment (1ch to 4ch)
Sensor head type: ±3R/min
[±0.11 ft.
3/min.] type
Output mode: Window comparator mode 1
Hysteresis: 0.02R/min [0.007 ft.
3/min.]
L1 level: 2.00R/min [0.0706 ft.
3/min.]
L2 level: 1.00R/min [0.0353 ft.
3/min.]
MULTI-CHANNEL FLOW RATE SENSOR CONTROLLERS

803
■Setting
• Switching on the power supply (DC24V
voltage) automatically provides detection
mode.
• The flow rate of the selected channel is
indicated in the LED display. (The
selected channel’s A.S.OUT LED
(green) lights up. See Figure 2.)
• The SW.OUT LED (red) lights up when
the switch output is turned ON.
• Pressing the key or key changes
the selected channel.
• If the display appears, it means
that the selected channel’s sensor head
was not connected or has a wire break.
• In the case of a wire break, shut off the
power and replace the sensor head.
Set PIN (sensor head connector 4-pin) for corresponding channel to
“L level” (0.5V or less, 10 ms or longer).
A.S.OUT
SW.OUT
ch
1234
FSU
Figure 2
Detection mode
Use the following procedure to perform settings for the sensor head
used in each channel.
Note: SE2 and SE4 cannot be used.
Sensor head selection
● Reference flow rate capture method in window comparator mode 2 and 3
Device key operation method
RS232C method
General-purpose I/O input method
For the operations method, see p.804
For RS232C commands, see p.806
See diagram below
●Functions List (For details about operations, see the each operation
method)
Function
Flow rate display
L1 (ΔL)/L2 point settings
Hysteresis setting
Reference flow rate capture
Mode selection
Sensor head type setting
Zero reset
Flow rate display autoscan
Switch output reversal
(Enabled in mode 4 only)
Peak hold
Bottom hold
Flow rate display deleted
Output mode check
Sensor head type check
ON (ΔL)/OFF point check
Reference flow rate,
ΔL/OFF point check
Switch output condition
display
Version display
● Reference flow rate capture method using general-purpose I/O input
24V
SW PIN-1
0.5V or less
10 ms or longer
Captured at
startup
1
2
3
4：PIN
SW PIN-1
1
2
3
4：PIN
1
c
h
4
c
h
Flow rate sensor head
Multi-channel flow rate
sensor controller
Main circuit
Device button
command
○
○
○
○
○
○
○
○
○
○
○
○
×
×
×
×
×
×
Serial communication
command (-D only)
@A
@PRE
@HYS
@P
@MODE
@TYPE
@B
@AS
@INV
@PHL
@BHL
@DIS
@MD
@TP
@C
@E (Enabled for modes 2
and 3 only)
@SW
@VER
If not using general-purpose I/O input to perform reference flow
rate capture, do not connect anything to the PIN. (Note: PIN is
pulled up at 24V.)
Note: Share the GND for signal
input with the GND for the
multi-channel flow rate
sensor controller.
Procedure
1
2
3
4
5
Device operation 7-seg display Remark
Use or to select channel
Use or to select sensor head
Sensor head determined
[Sensor head selection]
SE1: −3.00 to 3.00: ±3R[±0.11 ft.
3]type
SE2: Cannot be used
SE3: −500 to 500: ±500 [±30.5 in.
3]mRtype
SE4: Cannot be used
SE5: 0.00 to 10.00: 10
R[±0.35 ft.
3]type
Use the following procedure to perform output mode settings for each
channel.
Output mode selection
Procedure
1
2
3
4
5
7-seg display Remark
Use or to select channel
Use or to select output mode
Output mode determined
[Output mode selection]
CO1: Window comparator mode 1
CO2: Window comparator mode 2
CO3: Window comparator mode 3
CO4: Window comparator mode 4
Device operation
(Push both at
the same time)
(Push both at
the same time)
Setting Procedure

804
Use the following procedure to change the hysteresis for each
channel.
Hysteresis setting
Procedure
1
2
3
4
5
7-seg display Remark
Use or to select channel
Use or to perform
hysteresis setting
Hysteresis determined
[Hysteresis selection]
HYS1: 1ch
HYS2: 2ch
HYS3: 3ch
HYS4: 4ch
• To prevent chattering, set hysteresis to 2 digits or more.
Use the following procedure to perform threshold value settings for
each channel.
Threshold value setting (L1 ( L)/L2 setting)
Procedure
1
2
3
4
5
7-seg display
＊＊＊
Remark
Use or to select channel
Use or to set threshold
value
Threshold value determined
[Threshold value setting]
11: 1ch_L1/ΔL
12: 1ch_L2
21: 2ch_L1/ΔL
22: 2ch_L2
31: 3ch_L1/ΔL
32: 3ch_L2
41: 4ch_L1/ΔL
42: 4ch_L2
When using window comparator mode 2 or 3, use the following
procedure to perform reference flow rate capture.
Reference flow rate capture (for window comparator mode 2 and 3)
Procedure
1
2
3
4
7-seg display Remark
Use or to select channel
Reference flow rate captured
[Reference flow rate capture]
REF1: 1ch
REF2: 2ch
REF3: 3ch
REF4: 4ch
Use the following procedure to switch off the flow rate display.
Flow rate display switch-off
Procedure
1
2
3
4
5
Device operation 7-seg display
＊＊＊
Remark
7-seg LED off
7-seg LED re-lighted
Use the following procedure to switch the flow rate display to
autoscan mode.
Since autoscan mode is combined with the key lock function, no key
operation other than cancellation of autoscan can be performed.
Note: Autoscan mode is cancelled when the power supply is
switched OFF.
Flow rate display autoscan
Procedure
1
2
3
4
5
Device operation 7-seg display Remark
Autoscan start
Autoscan stop
Use the following procedure to reverse the switch output for each
channel.
Note: Cannot be used with any mode other than window comparator
mode 4.
Switch output reversal (enabled for window comparator mode
4 only)
Procedure
1
2
3
4
5
Device operation 7-seg display Remark
Use or to select channel
Use or to set
Output mode determined
[Switch output reversal]
S-0: Not reversed (A-contact)
S-1: Reversed (B-contact)
Device operation
Device operation
Device operation
(Push both at
the same time)
(Push both at
the same time)
(Push both at
the same time)
(Push both at
the same time)
(Push both at
the same time)
(Push both at
the same time)
(Push both at
the same time)
MULTI-CHANNEL FLOW RATE SENSOR CONTROLLERS

805
Setting procedure
Use the following procedure to perform zero point correction for each
channel.
Note: Zero point is cancelled when the power supply is switched
OFF.
Zero point correction (Zero reset)
Procedure
1
2
3
4
5
6
Device operation 7-seg display Remark
Use or to select channel
Zero point correction
[Zero point correction]
b-1: 1ch
b-2: 2ch
b-3: 3ch
b-4: 4ch
Use the following procedure to put the flow rate display on peak hold or bottom hold. The display
channel can be switched back and forth while in the hold position.
Note: Peak hold and bottom hold are cancelled when the power supply is switched OFF.
Peak hold and bottom hold cannot be implemented at the same time.
Peak hold and bottom hold
Procedure
1
2
3
4
5
6
7
Peak hold 7-seg display Remark
Hold start
Hold cancel
Bottom hold 7-seg display
Error Display
Error display
(n is the targeted channel)
(n is the targeted channel)
Error cancel
In the case of a wire break, shut off the power
and replace the sensor head.
Correct the error, and then press the
mode key for at least 1 second.
Error description
Sensor head on selected channel either not connected or has a
wire break.
In window comparator mode 2 and 3, threshold is set outside the
measured range.
Overvoltage (5V or more) applied to sensor input (AN0 to AN3).
Overcurrent flowing to switch output.
(Push both at
the same time)
(Push both at
the same time)
(Push both at
the same time)
(Push both at
the same time)
(Push both at
the same time)

806
@PRE
Function: Sets the ON and OFF points for each channel.
Send example: @PRE11﹈−3.00 c/rl/f
Response example: OK c/rl/f
Response example: NG c/rl/f
21: illegal type
@PRE11: Sets L1/ΔL for Channel 1
@PRE12: Sets L2 for Channel 1
@PRE21: Sets L1/ΔL for Channel 2
@PRE22: Sets L2 for Channel 2
@PRE31: Sets L1/ΔL for Channel 3
@PRE32: Sets L2 for Channel 3
@PRE41: Sets L1/ΔL for Channel 4
@PRE42: Sets L2 for Channel 4
@PRE1 1 ﹈
1：1CH
2：2CH
3：3CH
4：4CH
＊＊＊＊
1：L1/ΔL
2：L2
●Communication command detail
Command List Note: “﹈” denotes a space.
@A
Function: Reads out the current flow
rate value (1ch-4ch).
Send example: @A c/rl/f
Response example: 1 ＝−3.00 c/rl/f
2 ＝−3.00 c/rl/f
c/rl/f ←
When sensor head
is not connected
4 ＝0.00 c/rl/f
c/rl/f
Response example: NG c/rl/f
21: illegal type
@HYS
Function: Sets the hysteresis width for each channel.
Send example: @HYS11﹈0.02 c/rl/f
Response example: OK c/rl/f
Response example: NG c/rl/f
21: illegal type
@HYS11: Hysteresis width setting for Channel 1
@HYS21: Hysteresis width setting for Channel 2
@HYS31: Hysteresis width setting for Channel 3
@HYS41: Hysteresis width setting for Channel 4
@HYS1 1 ﹈
1：1CH
2：2CH
3：3CH
4：4CH
＊＊＊
Always input 1
Signal name

DC24V
0V
OUT1
OUT2
OUT3
OUT4
0V
RXD
TXD
RTS
CTS
Controller side
Personal computer side
D-sub 25 pin configuration
Pin No.

1
2
3
4
5
6
7
8
9
10
11
Signal name

D.G
TXD
RXD
RTS
CTS
DSR
DCD
DTR
Pin No.
7
2
3
4
5
6
8
20
Serial communication
cable
Power and switch output cable
D-sub 9 pin configuration
Signal name

DC24V
0V
OUT1
OUT2
OUT3
OUT4
0V
RXD
TXD
RTS
CTS
Controller side
Personal computer side
Pin No.
1
2
3
4
5
6
7
8
9
10
11
Signal name

D.G
DCD
RXD
TXD
DTR
DSR
RTS
CTS
Pin No.
5
1
2
3
4
6
7
8
Serial communication
cable
Power and switch output cable
●Communication cable specification and connection
Communication with personal computer
●Hardware and operations environment
PC: PC-98 series (excluding
PC-98LT) or equivalent DOS/V
machine
OS: Windows95 or later
●Software and operations environment
Hyperterminal with WIndows95 or later as the standard.
※Windows is a registered trademark of Microsoft Corp.
●Communication parameter
Baud rate 9600 (baud)
Stop bit length 1 [bit]
Parity Odd
Parity check Yes
Data bit length 8 [bit]
Communication method Full duplex
Return key send procedure CR code, LF code
Communication
MULTI-CHANNEL FLOW RATE SENSOR CONTROLLERS

807
Communication
@P
Function: In output mode, the reference flow rate
capture when comparator modes 2 and 3
are selected.
Send example: @P c/rl/f
Response example: OK c/rl/f
Response example: NG c/rl/f
21: illegal type
@P1: Channel 1 reference value setting
@P2: Channel 2 reference value setting
@P3: Channel 3 reference value setting
@P4: Channel 4 reference value setting
@MODE
Function: Sets the output mode for each channel.
Send example: @MODE1﹈1c/rl/f
Response example: OK c/rl/f
Response example: NG c/rl/f
21: illegal type
@MODE1﹈1
1：1CH
2：2CH
3：3CH
4：4CH
1: Window comparator mode 1
2: Window comparator mode 2
3: Window comparator mode 3
4: Window comparator mode 4
@SW
Function: Displays the switch
output for each channel.
Send example: @SW c/rl/f
Response example: 1010 c/rl/f
Response example: NG c/rl/f
21: illegal type
@TYPE
Function: Sets the sensor head type for each channel.
Send example: @TYPE1﹈1c/rl/f
Response example: OK c/rl/f
Response example: NG c/rl/f
21: illegal type
@TYPE1
﹈1
1：1CH
2：2CH
3：3CH
4：4CH
1: −3.00〜3.00
2: Cannot be used
3: −500〜500
4: Cannot be used
5: 0.00〜10.00
@INV (Enabled for window comparator mode 4 only)
Function: Sets switch output reversed/not reversed.
Send example: @INV1﹈0c/rl/f
Response example: OK c/rl/f
Response example: NG c/rl/f
21: illegal type
@INV1
﹈0
1：1CH
2：2CH
3：3CH
4：4CH
0: Not reversed
1: Reversed
@P1
1：1CH
2：2CH
3：3CH
4：4CH
@C
Function: Displays the L1 (ΔL) and L2 points for each
channel.
Send example: @C1 c/rl/f
Response example: 1.00 c/rl/f ←L1（ΔL）
0.50 c/rl/f ←L2
c/rl/f
Response example: NG c/rl/f
21: illegal type
@C1
1：1CH
2：2CH
3：3CH
4：4CH
@B
Function: Performs zero correction for each channel.
Send example: @B1 c/rl/f
Response example: OK c/rl/f
Response example: NG c/rl/f
21: illegal type
@B1
1：1CH
2：2CH
3：3CH
4：4CH
1010
1234
ch ch ch ch
1: Switch output ON
0: Switch output OFF
@MD
Function: Displays the output mode for each channel.
Send example: @MD c/rl/f
Response example: 1231 c/rl/f
Response example: NG c/rl/f
21: illegal type
1231
1234
ch ch ch ch
1: Window comparator mode 1
2: Window comparator mode 2
3: Window comparator mode 3
4: Window comparator mode 4
@TP
Function: Displays the sensor head type for each
channel.
Send example: @TP c/rl/f
Response example: 1135 c/rl/f
Response example: NG c/rl/f
21: illegal type
1135
1234
ch ch ch ch
1: −3.00〜3.00
2: Cannot be used
3: −500〜500
4: Cannot be used
5: 0.00〜10.00

808
50ms MAX.2ms MAX.
52ms MAX.
5ms MAX.
2ms MAX.
7ms MAX.
For sending @A
For sending @P, @PRE, @MODE
@P1 c/rl/f
※c/rl/f: Enter key
OK c/rl/f
Sent
Received
@A c/rl/f
Sent
Received
@E
Function: Displays L1= Reference flow rate−ΔL, and
L2 for each channel.
Send example: @E1 c/rl/f
Response example: 1.00 c/rl/f ←L1=
Reference flow rate −ΔL
0.50 c/rl/f ←L2
c/rl/f
Response example: NG c/rl/f
21: illegal type
@E1
1：1CH
2：2CH
3：3CH
4：4CH
@DIS
Function: Switches off (Locks) the main unit LED.
Send example: @DIS﹈1 c/rl/f
Response example: OK c/rl/f
Response example: NG c/rl/f
21: illegal type
@DIS﹈1
1: Not lighted
0: Lighted
@AS
Function: Sets ON/OFF for autoscan function.
Send example: @AS﹈1 c/rl/f
Response example: OK c/rl/f
Response example: NG c/rl/f
21: illegal type
@AS﹈1
1：ON
0：OFF
@PHL
Function: Sets ON/OFF for peak hold function.
Send example: @PHL﹈1 c/rl/f
Response example: OK c/rl/f
Response example: NG c/rl/f
21: illegal type
@PHL﹈1
1：ON
0：OFF
@BHL
Function: Sets ON/OFF for bottom hold function.
Send example: @BHL﹈1 c/rl/f
Response example: OK c/rl/f
Response example: NG c/rl/f
21: illegal type
@BHL﹈1
1：ON
0：OFF
MULTI-CHANNEL FLOW RATE SENSOR CONTROLLERS

809
Click File, and then click
Property to open the window at
left, and set Connect To.
Click on Configure...
As shown in Figure 2, set the
baud rate, etc.
When the settings are complete,
click OK.
Clicking on the tag of the
Settings in Figure 1 displays
Figure 3. Click the ASCII
Setup... button.
Set as shown in Figure 4, and
click OK.
Return to Figure 3.
Click OK again.
●Hyperterminal setting method
Communication
Figure 1
Figure 2
Internal Circuit Diagram and Wiring Specifications (External Wiring Example)
Tr 4
Tr 1
Tr 3
Tr 2
RTS
CTS
Z D2
Z D3
Z D1
D
DC24V
±10％
＋
−
Z D4
1
2
3
1
2
3
1
2
3
4
4
4
4
1
2
3
Reference flow rate capture
Sensor head 1ch （
Brown ）＋V
（
Blue ）0V
（
Black ） analog voltage output
Reference flow rate capture
Sensor head 2ch （
Brown ）＋V
（
Blue ）0V
（
Black ） analog voltage output
Sensor
SensorSensorSensor
Main circuit
Main circuit
Main circuit
Main circuit
Reference flow rate capture
Reference flow rate capture
Sensor head 3ch
Sensor head 4ch
（ Brown ）＋V
（
Blue ）0V
（
Black ） analog voltage output
（ Brown ）＋V
（
Blue ）0V
（
Black ） analog voltage output
Main circuit
Multi-channel flow rate
sensor controller
Power supply and switch
output cable
（Brown）SW4
（Black）0V
（Yellow）SW3
（Green）SW2
（White）
（Red）
＋V
Color of lead wire
SW1
Load
Load
Load
Load
（ Blue ）0V
（
Brown ）RXD
（
Black ）TXD
Serial communication cableNote
PC
External wiring example
Internal circuit
Note: For power supply, switch, and communication cable,
PSUW-□-D only is available.
Note: Be aware that voltage drops as cable resistance increases when extending the cable.
Code D : Diode for reverse connecting protection of power supply
ZD1〜ZD4 : Zener diode for surge voltage absorption
Tr1〜Tr4: NPN output transistor
Figure 3
Figure 4
Bits per second
Data bits
Parity
Stop bits
Flow control
：9600
：8
：Odd
：1
： Xon/Xoff

810
FSU
Specifications
Model
●Multi-channel flow rate sensor controller
Item
SW output
Display
Setting
method
General
Voltage
Sensor head supply voltage
Consumption current
Compatible sensor heads
Number of connectable sensors
Input voltage range
Maximum input voltage
Number of outputs
Output method
Response time
Load voltage
Load current
Internal voltage drop
Output mode
Switch output reversal
Hysteresis
Flow rate display
Switch output display (SW.OUT)
Flow rate display channel indication (A.S.OUT)
Body key setting
External setting (optional)Note 2
Operating temperature range
Noise resistance
Dielectric strength
Insulation resistance
Vibration resistance
Shock resistance
Material
Mass
FSU
DC24V±10%
DC24V±10%Note 1
100 mA MAX. (Not including current supplied to sensors)
Rated flow rate
・−500〜500 mR/min [−30.5〜30.5 in.
3/min.] (ANR) type
・−3〜3R/min [−0.11〜0.11 ft.
3/min.] (ANR) type
・0〜10R/min [0〜0.35 ft.
3/min.] (ANR) type
1〜4
DC1.0〜5.0V
5.3V MAX.
4
NPN open collector
3 ms
DC30V MAX.
50 mA MAX.
0.3V MAX./at load current 5 mA
Window comparator mode 1 Window comparator mode 2
Window comparator mode 3 Window comparator mode 4
Compatible with window comparator mode 4 only
Variable (Can be freely set at 2 digits or more)
7-segment LED, 3-digit display
Red LED lights up when ON
Flow rate display channel green LED lights up
: UP, : DOWN, : MODE
Conforms with RS232C
−10〜50°C [14〜122°F], storage: −20〜80°C [−4〜176°F], (no condensation and freezing)
IEC61000-4-4
Power supply line: 1KV (level 2)
Sensor input signal line: 1KV (level 3)
AC500V 1 minute
100 MΩor more (at DC500V megger)
88.3 m/s2[9G] (total amplitude 1.5 mm [0.059 in.], 10〜55 Hz)
294.2 m/s2[30G] (Non-repeated shock)
Case: PBT
45 g [1.59 oz.] (excluding cable)
Notes: 1. The supply voltage to the sensor head is lower by 0.5V MAX than the controller power supply voltage.
2. FSU-S-D-□-□only.
Connector type
B11B-XASK-1
made by JST
37104-3101
made by
SUMITOMO 3M
Item
Power supply
Data input
and output
Data input
Switch
output
RS232CNote
Specification
1 pin : 24V (red)
2 pin : 0V (black)
3 pin : SW1 (white)
4 pin : SW2 (green)
5 pin : SW3 (yellow)
6 pin : SW4 (brown)
7 pin : 0V (blue)
8 pin : RXD (brown)
9 pin : TXD (black)
10 pin : N.C
11 pin : N.C
1 pin : ＋V (brown)
2 pin :
Sensor output (black)
3 pin : 0V (blue)
4 pin : PIN
Wiring specifications
Note: FSU-S-D-□-□only.
MULTI-CHANNEL FLOW RATE
SENSOR CONTROLLERS
MULTI-CHANNEL FLOW RATE SENSOR CONTROLLERS
Power
supply
Sensor
input

811
Specifications
Item
Measurement flow rate range
Response
Output signal
Operating temperature range
Storage temperature range
Operating and storage humidity range
Operating pressure range
Proof pressure
Output voltage accuracy
Repeatability
Pressure characteristics
Temperature characteristics
Power supply voltage
Allowable voltage fluctuation range
Output stabilization time
Consumption current
Dielectric strength
Insulation resistance
Connection method
Material
Mounting direction
Mounting conditions
Straight piping length
Vibration resistance
Mass
Electrical connection
(special connectors)
FS-R05
Air/nitrogen. However, the detection media cannot contain chlorine, sulfur, acid, or other corrosive substances. Gas must also be dry.
Gas must be clean gas devoid of dust and mist (oil mist).
−500〜＋500 mR/min [−30.5〜30.5 in.
3
/min.]
Converted volume flow rate at 20°C [68°F], 1 atm [14.7 psi.]
5 ms or less (95% response to stepped changes in flow rate)
DC1〜5V (nonlinear characteristics), Allowable load resistance 10 kΩor more
0〜50°C [32〜122°F] (for both ambient temperature and measured media temperature)
−10〜60°C [14〜140°F]
10〜80%RH (no condensation)
−100〜＋200 kPa [−14.5〜29.0 psi.] (Pressure characteristic warranty range is −70〜＋200 kPa [−10.2〜29.0 psi.])
300 kPa [43.5 psi.]
±5%FS MAX.
0.0R/min [0.000 ft.
3/min.]: 3.00±0.20V
0.1R/min [0.004 ft.
3/min.]: 3.77±0.20V
0.3R/min [0.011 ft.
3/min.]: 4.53±0.20V
0.5R/min [0.018 ft.
3/min.]: 5.00±0.20V
±2%FS MAX.
Assuming the same temperature and pressure conditions at time of measurement
±0.01%FS/kPa
In −70〜＋200 kPa [−10.2〜29.0 psi.] pressure range
0.0R/min [0.000 ft.
3/min.]: ±0.1%FS/°C
0.3R/min [0.011 ft.
3/min.]: ±0.15%FS/°C
DC24V (supplied from sensor controller)
In the DC21.6〜26.4V range, ±2%FS or less in relation to output value at DC24VNote 2
Time required to come within ±5%FS of final attained voltage (flow rate): Instantaneous
Time required to come within ±1%FS of final attained voltage (flow rate): Within 10 sec.
12 mA MAX.
Between all external connector terminals and body: AC500V for 1 min., or AC600V for 1 sec.
Between all external connector terminals and body: 50 MΩ(at DC500V megger)
M5 female thread (brass insertion), tightening torque at 2.5 N·m [1.84 ft·lbf] or less
Gas contact part: PPS plastic (flow path body), ceramic (substrate), brass (connections)
Cover part: PC plastic (polycarbonate)
Any direction except where cover part faces downward
When using the mounting holes on this device, use M3 screws and a tightening torque of 0.6 N·m [5.3in·lbf] or less.
In addition, install a filter upstream from the device that is capable of collecting dust and mist particles of 10
μm or larger.
Unnecessary either upstream or downstream from the device
10〜55 Hz, total amplitude 1.5 mm [0.059 in.], XYZ directions each two hours
9 g [0.32 oz.]
Cable with dedicated connector
Flow rate sensor heads side: SM03B-SRSS-G-TB made by JST Mfg. Co., Ltd.
Mating side: SHR-03V-S-B (housing), SSH-003GA-P0.2 (contact) made by JST Mfg Co., Ltd.
FS-10
0〜＋10R/min [0〜0.35 ft.
3/min.]
±5%FS MAX.
0.0R/min [0.000 ft.
3/min.]: 1.00±0.20V
3.0R/min [0.106 ft.
3/min.]: 3.89±0.15V
5.0R/min [0.177 ft.
3/min.]: 4.46±0.15V
10.0R/min [0.353 ft.
3/min.]: 5.00±0.20V
±6%FS MAX.
±0.01%FS/kPa (0〜＋200 kPa [0〜29.0 psi.])
±0.03%FS/kPa (−70〜0 kPa [−10.2〜0 psi.])
0.0R/min [0.000 ft.
3/min.]: ±0.1%FS/°C
5.0R/min [0.177 ft.
3/min.]: ±0.2%FS/°C
Model
●Flow rate sensor heads
Notes: 1. The %FS in the table assumes full-scale output voltage of 4V (1〜5V).
2. Near the upper limit of the measurement flow rate range, output fluctuation after flow rate stabilization can be generated up to a maximum of ±1%FS
(amount of drift 500 seconds after flow rate stabilization).
FS-R3
−3〜＋3R/min [−0.11〜0.11 ft.
3/min.]
±5%FS MAX.
0.0R/min [0.000 ft.
3/min.]: 3.00±0.15V
0.5R/min [0.018 ft.
3/min.]: 3.88±0.15V
1.5R/min [0.053 ft.
3/min.]: 4.49±0.15V
3.0R/min [0.106 ft.
3/min.]: 5.00±0.20V
±3.5%FS MAX.
±0.01%FS/kPa
0.0R/min [0.000 ft.
3/min.]: ±0.1%FS/°C
1.5R/min [0.053 ft.
3/min.]: ±0.15%FS/°C
Gases targeted for
measurement
Standard flow rate
characteristics

812
Order Codes
FSU S
Multi-channel flow rate
sensor controller
Additional Parts (To Be Ordered Separately)
Mounting bracket
●PSU-BR
Panel mounting parts
Blank : None
B : With mounting bracket
P : With panel mounting parts
Protective front cover Note 1
Blank : No protective front cover
C: With protective front cover
Notes:
1. Protective front cover can be selected only when the panel
mounting parts have been selected.
The protective front cover cannot by itself be mounted to
the Multi-channel Flow Rate Sensor Controller.
2. For FSU-S, only 3L and 5L are available for selection.
For FSU-S-D, only 3LD and 5LD are available for selection.
3. When using the Multi-channel Flow Rate Sensor Controller,
the sensor head FS-□must be used. Order it separately.
Notes: 1. Can be used with FSU-S only.
2. Can be used with FSU-S-D only.
Panel mounting
parts
Protective
front cover
Communication function (RS232C)
Blank : No communication function
D : Communication function available
Flow rate range
R05 : −500〜500 mR/min
[−30.5〜30.5 in.
3/min.] (ANR)
R3 : −3〜3R/min
[−0.11〜0.11 ft.
3/min.] (ANR)
10 : 0〜10R/min
[0〜0.35 ft.
3/min.] (ANR)
Flow rate
sensor head
●PM100 ●KB100
Mini clamp wire mount plug
●PSU-M
Power supply, switch, and communication cableSensor head connecting cableFlow rate sensor head
●FS ●PSUK ●PSUW
Communication cable
Blank : No communication
cableNote 1
D : With communication
functionNote 2
Cable length
3L : 3000 mm
[118 in.]
5L : 5000 mm
[197 in.]
Cable length
3L : 3000 mm [118 in.]
5L : 5000 mm [197 in.]
Power supply, switch, and communication cable (provided) Note 2
Blank : None
3L : No 3000 mm-long [118 in.] communication cable
5L : No 5000 mm-long [197 in.] communication cable
3LD : With 3000 mm-long [118 in.] communication cable
5LD : With 5000 mm-long [197 in.] communication cable
Flow Rate Sensor Head Flow Rate and Output Characteristics Graphs
Flow rate and output characteristics
0.0
0.5
1.0
1.5
2.0
2.5
3.0
3.5
4.0
4.5
5.0
−500 −400 −300 −200 −100 0 100 200 300 400 500
Flow rate mR/min（ANR）
Output（V）
0.0
0.5
1.0
1.5
2.0
2.5
3.0
3.5
4.0
4.5
5.0
−3.0−2.5−2.0−1.5−1.0−0.5 0.0 0.5 1.0 1.5 2.0 2.5 3.0
Flow rate and output characteristics
Flow rate mR/min（ANR）
Output（V）
0.0
0.5
1.0
1.5
2.0
2.5
3.0
3.5
4.0
4.5
5.0
0.0 1.0 2.0 3.0 4.0 5.0 6.0 7.0 8.0 9.0 10.0
Flow rate and output characteristics
Flow rate mR/min（ANR）
Output（V）
●FS-R05 ●FS-R3 ●FS-10
MULTI-CHANNEL FLOW RATE SENSOR CONTROLLERS
1 mR= 0.0610 in.
31R/min = 0.03536 ft. 3/min.

813
10.5 [0.413]
32.5 [1.280]
17 [0.669]
5.3
[0.209]
5.25 [0.2067] 5.25
[0.2067]
5.3 [0.209]
5.7
[0.224]
11.2
[0.441]
10.2
[0.402]
2-M5×0.8 inflow port 2-φ3.1 [0.122] mounting hole
Cover Connector port
Connector on sensor head side
12.4 [0.488]
15.6 [0.614]
14.9
[0.587]
5.9 [0.232]
5 [0.197]
Pin 1
2000±20 [78.74±0.79]
4 3 2 1
●FS-□
（L）
Pin 1
5
[0.197]
14.9 [0.587]
15.6 [0.614]
12.4 [0.488]
5.9 [0.232]
4 3 2 1
(20 [0.79])
φ2.6
[0.102]
(20 [0.79])
1 2 3 4
13.5 [0.531]
23.4 [0.921]
13.4
[0.528]
15.8 [0.622]
10
[0.394]
6.4
[0.252]
Pin 1
Mini clamp wire mounting plug
Mini clamp wire
mounting socket
●PSUK-□
Dimensions mm [in.]
Model
PSUK-3L
PSUK-5L
L
3000 [118]
5000 [197]
7.8
[0.307]
30
[1.181]
5 [0.197]
2.65
[0.1043]
2-M2.6×0.45 Depth 6 [0.236]
27.6
[1.087]
32
[1.260]
5.3 [0.209]
40 [1.575]
40 [1.575]
4-digit LED flow rate indicator
Mode button
LED (red)
A.S.OUT
SW.OUT
ch
1234
FSU
LED (green)
DOWN button
UP button
4-switch output indicators
4-autoscan channel
indicators
(Mounting thread)
The connector for 4-sensor head
Connector for power supply,
switch, and communication cable
35.4 [1.394]
1ch
2ch
3ch
4ch Wiring label
4:PIN
3:0V
2:1−5V
1:＋V
4
T
U
O
3
T
U
O
2
T
U
O
1
11 10 1
2
V
０
3
T
U
O
45
6
7
8
D
X
R
9
D
X
T
S
T
R
S
T
C
SENSOR
V
０
V
DC
24
1
c
h
2
c
h
3
c
h
4
c
h
Wiring label enlarged view
●FSU-S-□

814
Dimensions mm [in.]
48[1.890]
4
[0.157]
32.7[1.287]
48[1.890]
55.4[2.181]
A.S.OUT
S.W.OUT
ch
1234
FSU
●PSU-□-P (Drawings for panel mounting)
51.2[2.016]
51.2[2.016]
9.5[0.374]
8[0.315]
●KB100
70 [2.756]
70 [2.756]
45＋0.6
0
45＋0.6
0
[1.772 ]
＋0.024
0
[1.772 ]
＋0.024 0
●Dimensions of cut panel for sensor controller
mounting
29.8 [1.173]
9.5
[0.374]
(50 [1.97])
（L）
φ3.8 [0.150]
(6 leads)
Power and switch output cable
φ2.6
[0.102]
Serial communication cable Note
(3 leads)
7
[0.276]
●PSUW-□-□
2-φ4.5[0.177]
9
[0.354]
11[0.433]
4.5[0.177]
16
[0.630]
11
[0.433]
2-φ2.9 [0.114]
9.6
[0.378]
(7 [0.276])
24
[0.945]
7
[0.276]
30[1.181]
4
[0.157] 38[1.496]
12.6[0.496]
1.6
[0.063]
●PSU-BR
Model
PSUW-□-3L
PSUW-□-5L
L
3000 [118]
5000 [197]
Note: Only PSUW-D-□is available.
Hex socket head screw
M2.6×0.45 length 5 [0.197], 2 screws provided
MULTI-CHANNEL FLOW RATE SENSOR CONTROLLERS
Notes: 1. The mounting plate thickness should be 1〜3.2 mm.
[0.039〜0.126in.].
2. If mounting in a series, space the units at intervals of the value
shown in the figure above or greater.
3. Conforms to DIN43700 standard.

815
Special Products
VS
R
P
V
V: Vacuum port
VS: Vacuum supply
port
R:Exhaustport
P:Pressureport
Adjustingneedleforvacuumbreakingflow
Flowrate
sensorhead
●Vacuum Valve Unit with flow rate sensor
CRCB-0064W
V
P
R
V: Vacuum port
R:Exhaustport
P:Pressureport
Adjustingneedleforvacuumbreakingflow
Flowratesensorhead
●Micro ejector with flow rate sensor
CRCB-0065W
Note: For detailed specification and dimension, consult us.