Koganei IONIZER Manual

No.BK-SP005
Static Electricity Removing Unit
IONIZER
Technical Information
Guidebook

1
Reference
Application Examples
 BlowTypeApplicationExamples･････････････････････････････････････････ 2
 FanTypeApplicationExamples･･････････････････････････････････････････ 5
Technical Information
 BlowType:FlowRateCharacteristics････････････････････････････････････ 6
StaticChargeRemovingCharacteristicsWhenMiniLineFilter(DTRY-
LF040)isMounted････････････････････････････････････････････････････････ 6
BlowType:FlowRateChangesinRelationtoNumberofThrottleValve
NeedleRotations･･････････････････････････････････････････････････････････ 6

StaticChargeRemovingRangebyNozzleType ････････････････････････････ 7
 SelectingPneumaticEquipmentforBlowType･･････････････････････････ 8
 DischargingNeedleMaintenancePeriod(RoughGuidelines)･････････････ 9
 CleaningProcedureforDischargingNeedle････････････････････････････ 10
 SteadyFlowFanType:WindSpeedData ･･････････････････････････････ 11
Other Materials
 StaticElectricityCountermeasureAccessories ････････････････････････ 12
 StaticElectricityQ&A･･･････････････････････････････････････････････････ 13
 FrequentlyAskedQuestions････････････････････････････････････････････ 30
 Troubleshooting･････････････････････････････････････････････････････････ 34
 Glossary･････････････････････････････････････････････････････････････････ 36
Contents

2
Use an L-shaped bar nozzle.
Use a blow type ionizer with
straight bar nozzle.
Arm
CDs and DVDs, etc.
Use a bender nozzle.
Blow Type Application Examples
●Removal of static charges and particles on
CDs and DVDs
Use 2-head types with bender nozzles to remove static
charges and particles on CDs and DVDs from both sides.
●Removal of static charges on workpieces
using a controller
Simultaneously controls the ionizer power supply and air ON/
OFF function.
●Removal of static charges and dust using
intermittent ion air blowing
Works in combination with the high-cycle solenoid valve,
using high-tact intermittent blowing of ionized air for
removal of static charges and dust .
●Removal of static charges when taking out or
storing wafers
Avoids electrostatic discharging when taking wafers out of
their cassettes, and prevents the stored wafers from being
attracted to the transfer arm.
●Removal of static charges on parts when
carried by a parts feeder
Static electricity is generated due to friction of parts while the
parts feeder conveys them, and the parts stick to the feeder’s
surface.
Use the blow type ionizer to prevent parts from becoming
stuck due to static electricity. Also, simultaneous use with a
fan type is effective for the static electricity removal.
●Removal of static charges on wafers
Use blow type ionizers with shower nozzles that provide
Ionized air flow with a wide angle to remove static charges on
wafers.
●Removal of static charges when conveying
wafers
Prevents dust from being attracted to the surface of wafers.
Prevents the internal patterns from being damaged.
Use a straight bar nozzle
or shower nozzle.
Dust
Caution: Depending on the
ON/OFF timing for the
ionizer, there could be a
possibility of adverse effects
on equipment and the
environment. For details
about application conditions,
consult with Koganei.
Application Examples

3
●Removal of static charges in printing
process
Use 2-head type Ionizers with bender nozzles. Prevents
faulty printing caused by static charges in ink jet printing
process.
Use a bender nozzle.
●Removal of static charges on electronic parts
Very low generation of electrical noise
・No damage to a device caused by induction electric field by the
discharging needle.
・Removal of static charges with pinpoint accuracy. (It is possible
to place the nozzle close to a device by using the tube.)
Note: Select a tube in accordance with the degree of tube flexibility.
●Removal of static charges on
wrap film
Use blow type Ionizers with U-shaped
bar nozzles in confined space to
remove static charges on both sides of
the wrap film.
●Removal of static charges on devices carried
by pallets
Use blow type Ionizers with straight bar nozzles to remove
static charges on a wide carrying pallet.
Use straight bar nozzles at
two places to remove static
charges.
●Removal of static charges
in pipes (φ50 or less)
Inserting the tube inside a pipe
enables removal of static charges.
●Removal of static charges in bottles
(Removal of dust)
Use a spiral bar nozzle to remove static charges
inside a bottle.
Blows ionized air from the tip.
●Removal of static charges on
glass substrate
Use 2-head type Ionizers with two
straight bar nozzles to remove static
charges on FPD glass.
Spirally blows ionized air from
the side surface of the bar.

4
60° or 90°
60°or90°
90°
●Shower nozzle
・Blows ionized air at 60° or 90° angles.
●Flat nozzle
・Blows ionized air at 90° angle, suitable for removal
of static charges over relatively wide area.
●L-shaped bar nozzle
・Space saving and suitable for
locations where straight bar
nozzles can't reach.
・2 types of L-shaped bar nozzles
are applicable for 100 and 200
mm [3.94 and 7.87 in.] ionized air
coverage. (only 100 mm [3.94 in.]
for DTRY-ELL01)
●Straight bar nozzle
・Removal of static charges over a
wide area.
・5 types of bar nozzles are
applicable for 100 to 500 mm [3.94
to 19.69 in.] ionized air coverage.
●U-shaped bar nozzle
・Removal of static charges from
both sides simultaneously for
up to 100 mm [3.94 in.] wide
film.
●Free-mounting L-shaped bar nozzle
・Enables bar rotation to change the direction of the ionized
air flow outlet.
・Applicable for 100 and 200 mm [3.94 and 7.87 in.] ionized
air coverage.
●Combining various nozzle units with bender
nozzles
・Combining various nozzle units with the flexible tube enables
static charge removal for various
applications.
Select the proper nozzle for your application
●Use of 2 straight bar nozzles
・Removal of static charges from both
sides of film simultaneously.
Rotate the bar in the
desired direction.
When using the bender shower nozzle unit.
Note : Nozzle units can only be attached
to the nozzles used in bender
nozzle types. (DTRY-NZR □00ND
and DTRY-NZL □00ND)

5
●Removal of static charges on printed circuit
boards
Enables static charge removal for relatively wide objects.
●Removal of static charges of parts on
working bench
Removes static charges from parts, during assembly.
●Removal of static charges on plastic
containers and parts
Fan Type Application Examples
●Removal of static charges on packaging films
Removes static charges generated when film is peeled off
from a roller.
●Replace Louvers to match workpiece size
Use when removing static charges at high speed in limited
areas, or when there is some distance to the workpiece.
Remarks: While the application example is for the Steady Flow Fan Type only, the same method can be used for the
Wide Flow Fan Type as well. Select the type to match the targeted object.
Use when removing static charges in wide-
angle areas.
(For Steady Flow Fan Type only)
Straight-ahead louver Wide-angle louver

6
Technical Information
Blow Type: Flow Rate Characteristics
Static Charge Removing Characteristics When Mini Line Filter (DTRY-LF040) is Mounted
Blow Type: Flow Rate Changes in Relation to Number of Throttle Valve Needle Rotations
0
50
100
150
200
250
0.0 0.1 0.2 0.3 0.4 0.5
Supply air pressure (MPa)
Flow rate r/min(ANR)
Without filter
When DTRY-LF040
is mounted
DTRY-ELB01 Flow Rate Characteristics
0
50
100
150
200
250
0.0 0.1 0.2 0.3 0.4 0.5
Supply air pressure (MPa)
Flow rate r/min(ANR)
Without filter
When DTRY-LF040
is mounted
DTRY-ELL01 Flow Rate Characteristics
0
1
2
3
4
5
0.0 0.1 0.2 0.3 0.4 0.5
Supply air pressure (MPa)
Static charge removing time (sec)
DTRY-ELB01 Static Charge Removing Characteristics
0
1
2
3
4
5
0.0 0.1 0.2 0.3 0.4 0.5
Supply air pressure (MPa)
Static charge removing time (sec)
When DTRY-LF040
is mounted
Without filter
When DTRY-LF040
is mounted
Without filter
DTRY-ELL01 Static Charge Removing Characteristics
※Nozzleused:Showernozzle(DTRY-NZR20SW)
※Allnozzleshavethesameflowrate.
※Whenthrottlevalveisfullyopen.
※Nozzleused:Showernozzle(DTRY-NZL20SW)
※Allnozzleshavethesameflowrate.
※Whenthrottlevalveisfullyopen.
※Nozzleused:Showernozzle(DTRY-NZR20SW)
※Measurementdistance:50mm[1.97in.]
※Whenthrottlevalveisfullyopen.
※Nozzleused:Showernozzle(DTRY-NZL20SW)
※Measurementdistance:50mm[1.97in.]
※Whenthrottlevalveisfullyopen.
0
50
100
150
200
250
12345678910111213
Number of needle rotations
Flow rateR/min (ANR)
0.1 MPa
0.2 MPa
0.3 MPa
0.4 MPa
DTRY-ELB01 Flow Rate Characteristics
0
50
100
150
200
250
12345678910111213
Number of needle rotations
Flow rateR/min (ANR)
0.1 MPa
0.2 MPa
0.3 MPa
0.4 MPa
0.5 MPa
DTRY-ELL01 Flow Rate Characteristics
※Nozzleused:Showernozzle(DTRY-NZR20SW)
※Allnozzleshavethesameflowrate.
※Nozzleused:Showernozzle(DTRY-NZL01NS)
※Allnozzleshavethesameflowrate.
MiniLineFilter
DTRY-LF040
Needle
1 MPa＝145 psi.
1R /min＝0.0353 ft.3/min.
1 MPa＝145 psi.
1R /min＝0.0353 ft.3/min.
1 MPa＝145 psi.

7
Static Charge Removing Range by Nozzle Type (Compact blow type reference values)
Static charge removing range for typical nozzle.
0〜2 sec
Static charge removing time
300
250
200
(mm)
(mm)
150
100
50
0
50
100
50 100 150 200 250 300 350 400 450 500
150
200
250
300
300
250
200
(mm)
(mm)
150
100
50
0
50
100
50 100 150 200 250 300 350 400 450 500
150
200
250
300
2〜4 sec 4〜6 sec 6〜8 sec 8〜10 sec
300
250
200
(mm)
(mm)
150
100
50
0
50
100
50 100 150 200 250 300 350 400 450 500
150
200
250
300
300
250
200
(mm)
(mm)
150
100
50
0
50
100
50 100 150 200 250 300 350 400 450 500
150
200
250
300
0〜2 sec
Static charge removing time
300
250
200
(mm)
(mm)
150
100
50
0
50
100
50 100 150 200 250 300 350 400 450 500
150
200
250
300
300
250
200
(mm)
(mm)
150
100
50
0
50
100
50 100 150 200 250 300 350 400 450 500
150
200
250
300
2〜4 sec 4〜6 sec 6〜8 sec 8〜10 sec
300
250
200
(mm)
(mm)
150
100
50
0
50
100
50 100 150 200 250 300 350 400 450 500
150
200
250
300
Standard nozzle
DTRY-NZL01NS
Shower nozzle
DTRY-NZL21SW
（90゜type）
Bender nozzle
DTRY-NZL300ND
(300 mm [11.81 in.] nominal dimension)
Straight bar nozzle
DTRY-NZL100B
(100 mm [3.94 in.] nominal dimension)
Straight bar nozzle
DTRY-NZL300B
(300 mm [11.81 in.] nominal dimension)
Straight bar nozzle
DTRY-NZL500B
(500 mm [19.69 in.] nominal dimension)
Flat nozzle
DTRY-NZL01FT
Notes: 1. The method of measurement used a 20 pF, □150 mm [5.91 in.] charged plate monitor, and the measurement was performed using
Koganei measurement conditions.
2. The static charge removing time is the time required to decay from ±1000V down to ±100V.
3. Graphs assume a supply air pressure of 0.5 MPa [73 psi.].
1 mm＝0.0394 in.
1 mm＝0.0394 in.

8
Selecting Pneumatic Equipment for Blow Type
※Select ionizer air cleanliness suited to your applications.
※The combinations shown below are typical examples. For details, see p. 41 of the Accessories General Catalog.
Please feel free to consult us.
Cleanlevel
DF Drain filter Drain filter Drain filter Drain filter
FFilter Filter Filter Filter
MF Mist filter Mist filter Mist filter Mist filter
MMF Micro mist filter Micro mist filter Micro mist filter
KRM Membrane air dryer Membrane air dryer
RRegulator Regulator Regulator Regulator
DTRY-
LF040 Mini line filter
Ionizer Ionizer Ionizer Ionizer
Blowing, filling, and
especially strict particle
control locations
Locations where dry
air or clean dry air is
required
Clean air for ordinary
industrial use
Air for ordinary
industrial use
①②③④
Moisture
removal
Oil removal
Dry air
generation
Air pressure
regulation
Final filter
High Low
● Exampleofcombination(forlevel④ )
Note: When selecting equipment, check the flow rate.
Item Model
Drain filter
Adaptor
Filter
Adaptor
Mist filter
Adaptor
Regulator
DF300-02-A
8-30D
F300-02-A
8-30F
MF300-02-A
8-30D
R300-02
Regulator
Mist filter
Air filter
Drain filter

9
DTRY-ELF04 (without back filter): Appearance after discharging needle cleaning
Note: White lines denote the discharging needle shapes when new (at 0 hours of use).
0 h 2500 h 5000 h 10000 h
Discharging Needle Maintenance Period (Rough Guidelines)
Periodic cleaning of the ionizer discharging needle is required.
The photographs below show the accumulation of dust on the tip of the discharging needle used in the steady flow fan type.
Depending on the application conditions, perform the cleaning after 300 to 500 hours of use. When cleaning the discharging needle,
cleaning the louver and the inside of the ionizer body at the same time is recommended.
The photographs below show the shape of the discharging needle after cleaning. The tip of the discharging needle can wear down from
repeated use. While it depends on the application environment and conditions, replacement is recommended after around 10000 hours of use.
When operating the DTRY-ELF04 (without back filter): Appearance of discharging needle
Note: Based on Koganei measurement conditions.
0 h 100 h 300 h 500 h

10
Cleaning Procedure for Discharging Needle
Note: Before cleaning, check that the power supply and air are switched OFF.
Never use a wire brush.
Precautions for Maintenance and Cleaning
・Contamination on the tip of the discharging needle can cause the static charge removal effectiveness to deteriorate. If static charge
removal effectiveness has reduced, clean the discharging needle.
・The discharging needle is a consumable part that must be replaced if used over long periods. For replacement, use a dedicated
tool (DTRY-ELB21).
・After cleaning, flush the needle. Activating the ionizer with residual alcohol on the needle could result in unstable performance.
Ionizer type
Memo
Inspection
No.
1
2
3
4
5
6
7
8
9
10
20XX/4/15
20XX/5/15
＊＊＊ Device: No. 1
・Ionizer operations begin: 20XX/4/15
※ 8 h/day × 20 days/month
・For the static charge removal time and ion balance, the charged plate monitor manufactured by ＊＊ was used.
・Static charge removal time is the time required for decaying from ±1000V down to ±100V.
1.2
1.1
1.0
1.0
−9
＋11 ↑
ﾚ
ﾚ
—
—
—
160
Initial condition
Koganei
Compact Blow
Type
DTRY-ELL01
Date
(YYYY/MM/DD)
Static charge removal time [sec]
Ion balance
(V)
Measurement
conditions
Cleaning
check
Discharging needle
replacement
Operation hours
(h) Remarks
Plus side Minus side
Theionizerrequiresperiodicmaintenanceandchecks.
Example: Ionizer Performance Check Sheet
An example of the cleaning procedure for the blow type discharging needle is shown below.
・Apply alcohol (isopropyl alcohol, etc.) to a cotton swab, and clean the tip of the discharging needle using the swab.
・Also remove any contamination inside and around the metal cap.
For cleaning the fan type, use the nylon brush provided with the product or a cotton swab dampened with
alcohol. For details, see the Owner’s Manual.
Device installation condition
(100 mm distance)

11
Steady Flow Fan Type: Wind Speed Data (Reference value)
0.2 1.0 1.9 1.7
1.0 3.2 2.4 2.1 1.9
4.6 4.1 3.1 2.4 2.0
1.0 3.2 2.4 2.1 1.9
0.2 1.0 1.9 1.7
100mm 100mm 100mm 100mm 100mm
100mm100mm100mm100mm
（m/s）
●DTRY-ELF02 When straight louver is used
0.2 0.3 0.9 0.6 0.8
1.5 0.9 0.6 0.6 0.6
0.5 0.7 0.5 0.6 0.6
1.5 0.9 0.6 0.6 0.6
0.2 0.3 0.9 0.6 0.8
100mm 100mm 100mm 100mm 100mm
100mm100mm100mm100mm
（m/s）
●DTRY-ELF02 When wide-angle louver is used
0.2 1.0 1.9 2.2
1.2 3.3 3.0 2.4 2.3
3.5 3.6 2.9 2.5 2.2
1.2 3.3 3.0 2.4 2.3
0.2 1.0 1.9 2.2
100mm 100mm 100mm 100mm 100mm
100mm100mm100mm100mm
（m/s）
●DTRY-ELF03 When straight louver is used
0.2 0.3 1.0 1.1 1.4
3.8 1.4 1.8 1.4 1.3
1.1 1.1 1.3 1.2 1.1
3.8 1.4 1.8 1.4 1.3
0.2 0.3 1.0 1.1 1.4
100mm 100mm 100mm 100mm 100mm
100mm100mm100mm100mm
（m/s）
●DTRY-ELF03 When wide-angle louver is used
0.3 1.3 2.8 3.4 3.1
3.4 3.8 4.3 3.6 3.9
3.0 4.7 4.5 3.7 3.7
3.4 3.8 4.3 3.6 3.9
0.3 1.3 2.8 3.4 3.1
100mm 100mm 100mm 100mm 100mm
100mm100mm100mm100mm
（m/s）
●DTRY-ELF04 When straight louver is used
3.6 3.1 1.1 0.9 1.0
1.7 1.6 1.0 0.7 1.0
1.7 1.0 0.7 0.6 0.5
1.7 1.6 1.0 0.7 1.0
3.6 3.1 1.1 0.9 1.0
100mm 100mm 100mm 100mm 100mm
100mm100mm100mm100mm
（m/s）
●DTRY-ELF04 When wide-angle louver is used
Notes: 1. The wind speed at maximum wind volume is measured at each point.
2. The measurement values are the actual measured values and are not guaranteed performance values.
1 m/s＝3.28 ft./sec.
1 mm＝0.0394 in.

12
Static Electricity Countermeasure Accessories
●Wrist Strap
Because the operator’s body maintains a constant, low-level electrification
potential, use a wrist strap to ground the body.
●Antistatic Shoes
Use shoe soles made of synthetic rubber or plastic that containing conductive
material to prevent the build-up of static charges. An electrical resistance range
of 105Ωto 1010 Ωis recommended.
●Antistatic Mat
To prevent workpiece damage or personal injury due to the build-up of static
charges on the worktable during electronic device assembling, use an antistatic
mat or sheet on the worktable.
●Antistatic Work Clothes
Use antistatic work clothes equipped with conductive fibers woven in at regular
intervals (5 to 25 mm [0.20 to 0.98 in.]).
●Antistatic Bags
Antistatic bags are made with material that is blended or coated with antistatic
agents. They also have intermediate shield layers to prevent the build-up of static
charges on the packaging material or on the packaged content. Use the bags to
protect contents from breakdowns or damage due to static electricity.
●Antistatic Fingerstalls and Gloves
Fingerstalls and gloves are made of natural rubber containing carbon black, or
synthetic rubber containing antistatic agents. Use them to prevent contamination
or corrosion to workpieces due to sebum, or sweat secreted from skin when work
is performed with bare hands, and to protect against nicks or punctures.
●Antistatic Chair
Use an antistatic chair to suppress the build-up of static charges on work clothes,
the operator’s body, or the chair itself.
●Antistatic Dolly
Use an antistatic dolly equipped with conductive casters that prevent the build-up
of static charges on the metal frame when the dolly moves on the floor surface.
Other Materials
※Koganei does not offer the static electricity countermeasure goods shown on this page.

13
Static Electricity Q&A
QWhat is static electricity?
A
QWhat is the mechanism for the generation of static electricity?
A
When friction between materials causes the plus-minus balance to collapse and to tilt electrically
toward one polarity, this condition is called static electricity. The zap that comes when a person
touches a car door on a dry winter day is static electricity.
ZAP!
About 3 kV
Static electricity is generated by clothing or seat friction.
Discharges when metal is touched.
Electriccurrent
Dynamic electricity
(regular electricity)
Static electricity
(electricity stored on materials)
●All materials are made up of atoms. Atoms consist of electrons holding a negative electrical
charge, and a nucleus holding a positive electrical charge (the nucleus further consists of positive
protons and electrically neutral neutrons). The electrons revolve around this nucleus. And it is
these electrons that form the basis of static electricity.
●In normal conditions, the positive electrical
charge held by the protons is balanced
against the negative electrical charge held
by the electrons, so that the atom overall is
electrically neutral.
●When a neutral atom is moved by friction,
contact, or peeling, addition of an electron
gives it a negative charge, while removal of
an electron gives it a positive charge.
Electrically neutral Electrically neutral
Electrification turns
negative
Electrification turns
positive
Oxygen atom
8 positive protons
8 negative electrons
Oxygen atom
8 positive protons
9 negative electrons
Nitrogen atom
7 positive protons
7 negative electrons
Nitrogen atom
7 positive protons
6 negative electrons

14
Factors determining the amount of electrification (static electricity) can vary depending on the
environment, as described below.
QWhat types of electrification are there?
A
●Induction electrification
 Electrification is induced when an object charged with static electricity is brought close to or
taken away from another object. This phenomenon of static electricity between objects even
without mutual contact is called induction electrification. For example, a charged body can
induce a charge on an IC merely by proximity. (Electrostatic induction)
Electrification is due to contact:
Electrification is induced when two objects come into contact.
Electrification due to induction: Electrification induced without contact.
QWhat factors determine the amount of electrification?
A
Contact
surface
area
The larger the
surface area, the
greater the
amount of static
electricity
generated.
Pressure
The higher the
pressure, the
greater the
amount of static
electricity
generated.
Friction
The greater the
friction, the
greater the
amount of static
electricity
generated.
Temperature
While not a major
change, a higher
temperature
results in a
smaller resistance
value. (Insulator)
Humidity
The higher the
humidity, the
smaller the
amount of static
electricity
generated.
●Triboelectric electrification
 Static electricity induced when the surfaces of two objects in contact rub against each other.
●Peeling electrification
 A type of contact electrification. Because static electricity appears to occur whenever a peeling
action is performed, it is sometimes called peeling electrification. The amount of static electricity
tends to become larger with faster peeling speed.
●Rolling electrification
 A type of contact electrification. The static electricity is induced when an object such as film or a
roller is rolled on another object. (Repeated contact and peeling)
●Spouting electrification
 Static electricity induced by friction with a nozzle, etc., during spouting of a high-pressure gas or
liquid.

15
QWhat is the difference between a conductor and an insulator?
A
Conductor:
Materials that conduct electricity easily →Iron, copper, aluminum, carbon, etc.
Insulator:
Materials that conduct electricity poorly →Plastic, rubber, glass, etc.
Grounding the conductor results in 0V.
Since electrons move freely through the
conductor, grounding the charged
conductor results in 0V.
Ground
Electrically balanced state
Ground
Since electrons do not move freely,
grounding the charged insulator does not
result in 0V. In addition, the amount of
charges varies by location, resulting in
different polarities from one point to another.
Grounding an insulator does not result in 0V.
Insulator charge is not evenly distributed.
Conductor image
Insulator image
Electrification acts differently between a conductor and an insulator.

16
QWhat kind of phenomenon is electrostatic induction?
A
Approaches
Returns to original state
Conductor
Charged
body
Pulls away
Conductor
Charged
body
Charged
body
Ground
Ground
Pulls away
Neutralized by
grounding
Neutralization
Cutting off the ground and
pulling away from the
charged body leaves
behind negative charges.
For example, when a positively
charged body is brought close to a
conductor (in an ungrounded state), a
negative charge appears on the
surface of the conductor closest to the
charged body, and a positive charge
appears on the opposite surface.
Next, pulling the charged body
away returns the charge of the
conductor to its original state.
When a positively charged
body is brought close to a
conductor, grounding the
conductor neutralizes the
charge.
If the conductor is cut off from
the ground and then
separated from the charged
body, the negative charge
remains, and the conductor
becomes negatively charged.
Bringing a charged body close to a conductor (metal, etc.) causes a build-up in the opposite charge
in regions near the charged body, and a build-up of the same charge in regions farther away. This is
called electrostatic induction.

17
Q
Is there an example of work-related trouble with electrostatic induction?
AEven if a workpiece has no charge, bringing a charged body close to a conductor can cause
polarization within the conductor due to electrostatic induction, resulting in a discharge.
QWhat is a triboelectric series?
AIt is a relative positioning of positively and negatively charged materials undergoing friction. When
two materials are rubbed against each other, the one on the left becomes positively charged, and the
one on the right becomes negatively charged. In general, the magnitude of friction-induced charge is
larger for materials whose positional relationship is distant than for those that are close together.
In addition, if two of the same materials are rubbed together, one will be positively charged and the
other negatively charged.
In reality, of course, variations in temperature, humidity, surface shape, etc., may prevent the
following series from appearing. View this as a general example of what a series could look like.
Discharge
Semiconductor (example of device)
Ground
Charged body
Approaches
Air
Human hand
Asbestos
Glass
Mica
Nylon
Lead
Silk
Aluminum
Paper
Cotton
Steel
Wood
Amber
Sealing wax
Hard rubber
Nickel, copper
Tin, silver
Gold, platinum
Sulfur
Rayon
Polyester
Celluloid
Urethane
Polyethylene
Polyvinyl chloride
Silicone
Fluororesin
Positive Negative
Triboelectric Series
Nylon is positively
charged
Polyester is negatively
charged
Polyester is positively
charged
Polyvinyl chloride is negatively
charged
When polyester and nylon
are rubbed together
When polyester and polyvinyl
chloride are rubbed together
The same material can become either positively or negatively charged depending on the material against which it rubs.
Friction

Metal
Metallic tweezers, etc.
18
QWhat is electrostatic damage?
AWith increasingly compact parts and greater semiconductor densities, electrostatic damage to
circuits and devices due to electrostatic discharge (ESD) has become a major problem.
In general, MOS-configuration ICs and field-effect transistors (FETs), high-frequency devices, and
other similar types of equipment are extremely sensitive to static electricity, and easily susceptible
to be damaged.
The electrostatic damage model of semiconductor devices can be broadly classified into the Human
Body Model (HBM), Machine Model (MM), and Charged Device Model (CDM).
Model when the body’s static charge is discharged to a device pin when touched.
Model when the static charge on a metallic device is discharged to a device pin when touched.
Model when static charge on a device conductor part (chip, wire, lead frame, etc.) is discharged
when the device pin touches equipment or tools.
Causes (example)
●Wrist strap or conductive shoes not worn
●Hand touches a pin directly
Causes (example)
●Insufficient grounding for electrification of equipment or robot
●Power leak from soldering tool, etc.
Causes (example)
●Triboelectric charging on an automated IC conveyer system, etc.
Electrostatic Damage Model of Semiconductor Devices
■Human Body Model (HBM)
■Machine Model (MM)
■Charged Device Model (CDM)

19
QWhat points should we be careful about during dust removal?
ADust Removal Omissions (1)
Dust
Blown off by
force of wind
Ordinary
air gun, etc.
Charged
product
Dust removed,
but charge remains
Dust re-adherence
likely
Charged
product
Charged
product
Even after wind force has been used to
blow off dust, the charged state
continues unchanged.
Dust Removal Omissions (2)
Ionizer
Simultaneously remove dust and
eliminate static charges using a
relatively strong wind force
Ionizer
Air gun type, blow type,
ion wiper, etc.
Dust
Charged
product
Ionizer
Dust
Static charges
not eliminated
Some dust
cannot be
removed with
weak wind force
Static
charge
elminated
product
Static
charge
elminated
product
Dust Removal Points
1. Blow dust off
2. Static charge elimination from the product
3. Collect the dust (with a dust collector, etc.)
Attracted dust may not be removed when the
method of static charge elimination is not
appropriate.