Lake Shore CRX-EM-HF User manual

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CRX-EM-HF Probe Station Instructions
Introduction
The Lake Shore Model CRX-EM-HF probe station combines the magnetic field capability of the Model EMPX-HF
probe station with the cryogen free capability of the model CRX-4K. The CRX-EM-HF is for non-destructive testing
of devices on full and partial wafers up to 25mm (1 in) in diameter. Based on a two-stage Gifford McMahon closed
cycle refrigerator (CCR), the CRX-EM-HF provides up to a ±0.6 T magnetic field over a temperature range of <8 K to
400 K standard or <20 K to 500 K with optional PS-HTA-EM high temperature stage.
Figure 1: CRX-EM-HF probe station
Rev 1.1 P/N 119-510 March 24, 2014

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Outline
The user’s manual for the new Lake Shore Model CRX-EM-HF probe station is not yet complete; however, the
standard CRX-4K and EMPX-HF user manuals have been included with your CRX-EM-HF probe station. This
document summarizes operation of the CRX-EM-HF and will be the guide for how to reference the CRX-4K and
EMPX-HF manuals. In the cases where the specifications, restrictions, or performance limitations are different
between the CRX-EM-HF and the CRX-4K/EMPX-HF, those listed in this document supersede the other manuals.
Lake Shore contact information for technical assistance can be found at the end of this document.
The sections in this document are as follows:
Specifications
System Overview
Installation and Setup
Vacuum, Probing, and Sample Operation
Temperature Operation
Magnetic Field Operation
Advanced Operation
Maintenance and Troubleshooting

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Specifications
Sample cooling assembly:
Type: 2-stage (sample + radiation shield)
Radiation shielding: Radiation shield with top viewport surrounds sample
Cooling source: 2-stage closed cycle refrigerator (CCR) with 1 W cooling power at
4.2 K
Temperature:
Standard range: 8 K to 400 K
Optional range 20 K to 500 K (PS-HTA-EM)
Vacuum: 10-5 Torr at base temperature
Cycle time: 4.5 h
Vacuum pump down: 0.5 h
Station cooldown: 2.25 h
Station warmup: 1.75 h
Vibration at sample: <1 µm
Sample:
Maximum sample size: 25.4 mm (1 in) diameter
Sample backside optical access: Not an option
Sample rotation: Optional 360 degree rotation stage (PS-360-CRX-EM)
Adds 2 K gradient from sample stage to top of rotation stage at
base temperature
Probing:
Maximum number of probes: 4 (see orientation diagram)
Cooled probe mounts: <20 K with sample at base temperature
DC/RF probes: Electrical isolation >100 Gfor low leakage measurements
Microwave probes: Frequency range DC up to 67 GHz
Fiber optic probes: Available for electro-optical measurements
Magnetic field:
Field capability: ±0.6 T
Field orientation: Horizontal (parallel to the sample plane)
Load lock: Not an option
High Vacuum: Not an option

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System Overview
Refer to Chapters 1 and 2 of the CRX-4K manual for general information about the CCR-based cryogenic probe
station and the available optional equipment that may be used with the CCR probe station. Refer to Chapters 1
and 2 of the EMPX-HF manual for general information about the electromagnet and for additional sample holders
or probe options: the components used in the CRX-EM-HF sample space must be non-magnetic.
Figure 2 shows the control elements of the CRX-EM-HF probe station.
Figure 2: CRX-EM-HF probe station overview (electronics console and CCR compressor not shown)
Optics package
and vision system
Purge Valve for
Venting Chamber
Vacuum Isolation
Valve
Probe Arm
Control (4x)
Vibration Isolation
Feet
Rotation Control
(Optional)

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Installation and Setup
This section describes the process of preparing a site, unpacking the probe station components and assembling
them into the standard CRX-EM-HF configuration. Finally, it explains system checkout procedures. The installation
and setup requirements of the CRX-EM-HF are a combination of the CCR requirements of the CRX-4K and the
electromagnet requirements of the EMPX-HF.
Site Requirements
Refer to section 3.2 of the CRX-4K manual for site requirements pertaining to the instrument console, CCR, and
CCR compressor. Refer to section 3.2.3 and section 3.2.4 of the EMPX-HF manual for site requirements for the
electromagnet, Model 475 gauss meter, and the Model 643 electromagnetic power supply. Requirements for the
Model 643 electromagnetic power supply are identical to the Model 642.
Unpacking the Probe Station
Refer to Chapter 3.3 of the CRX-4K manual as a guide to uncrating and unpacking the probe station. The CRX-EM-
HF weighs approximately 815 kg (1800 lbs); refer to section 3.3.4 of the CRX-4K manual for important safety
information when moving the probe station.
Utility Connections
Refer to section 3.4 of the CRX-4K manual for utility connections pertaining to the instrument console, CCR, and
CCR compressor. Refer to section 3.4.2 and section 3.4.3 of the EMPX-HF manual for utility connections for the
electromagnet and the Model 643 electromagnetic power supply.
Assembling a Basic Probe System Configuration
Complete all of the sections in section 3.5 of the CRX-4K manual for assembly of the probe station. You will also
need to complete steps 3-5 of section 3.5.1 of the EMPX-HF manual.
Installing and Removing Probes
Refer to section 3.6 of the EMPX-HF manual for instructions on installing and removing probes
Re-configuring the Sample Stage: Optional 360° Rotation Stage (PS-360-EMPX)
The CRX-EM-HF comes standard with the sample stage fixed adapter, or it can be configured with the sample stage
rotation option. The configuration is determined by the type of sample stage adapter that is attached to the
sample stage. If ordered, the rotation option will be installed in the CRX-EM-HF and includes the removable
rotation adapter and the rotation control drive that is integrated into the CRX-EM-HF probe station. The drive and
control remain in place even when the rotation adapter is removed.

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Removing the Sample Stage Rotation Option
1. Remove the vacuum chamber lid, radiation shield lid, and any installed probes. Fully retract any probe
arms (Figure 3).
Figure 3: CRX-EM-HF with rotation stage (vacuum chamber lid and radiation shield lid removed)
2. Using a 3 mm hex driver, loosen the four M4 rotation adapter captive screws.
3. Carefully lift the rotation adapter out of the probe station. Take care not to damage to the cryogenic
coaxial wire (Figure 4).
Figure 4: Removing the sample holder tower
Installing the Sample Stage Rotation Option
1. Remove the vacuum chamber lid, radiation shield lid, and any installed probes. Fully retract any probe
arms.
2. Lower the rotation adapter into the chamber. Take care not to damage to the cryogenic coaxial wire.
3. Align the rotation adapter to the drive shaft. The rotation option control knob may be turned to align the
square drive of the drive shaft to the rotation stage (Figure 6).
4. Using a 3 mm hex driver, fasten the rotation adapter to the sample stage by starting all four M4 screws in
a few threads before tightening any screws to prevent cross-threading.

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5. Tighten the four screws securely; this is the source of thermal contact between the rotation stage and the
sample stage. It is best to tighten all four screws a little at a time until snug.
6. Turn the rotation control knob on the probe station to verify that the rotation stage is functioning
smoothly.
Removing the Sample Stage Fixed Adapter
To remove the sample stage fixed adapter, follow the same procedure as outlined for removal of the rotation stage
option.
Figure 5: CRX-EM-HF with fixed stage (vacuum chamber lid and radiation shield lid removed)
Installing the Sample Stage Fixed Adapter
To install the sample stage fixed adapter, follow the same procedure as outlined for installation of the rotation
stage option, skipping step 3.
System Verification and Testing
Complete all sections of section 3.7 of the CRX-4K manual to verify that the probe station has been assembled
correctly and is in good working order. Refer to section 3.7.2 of the CRX-4K manual for temperature sensor and
heater verification testing instructions for the CRX-EM-HF; however, use the information in Table 4 and Table 5 of
this document instead of the controller settings listed in the CRX-4K manual. Refer to section 3.8.3 of the EMPX-HF
manual for electromagnet verification testing instructions for the CRX-EM-HF. The settings for the Model 475 gauss
meter and the Model 643 electromagnetic power supply are identical to those of the EMPX-HF. The settings are
found in Table 4-7 and Table 4-8 of the EMPX-HF manual, respectively.

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Basic Operation
Temperature Limits
The maximum temperature limits for the multiple stages and components of the probe station are listed below.
Adhere to these limits at all times during probe station operation.
Sample stage:
400 K
Radiation shield stage:
350 K
Cryocooler first stage:
300 K
Cryocooler second stage:
300 K
Probe arms:
350 K
Vacuum, Probing and Sample Operation
Follow the procedures in Chapter 4 of the EMPX-HF manual for information about vacuum operation, manipulating
the probe arm stages, sample exchange and imaging/probing the sample.
Temperature Operation
The cooling engine in the CRX-EM-HF is a two stage closed cycle refrigerator (CCR). The sample stage and probe
holders are thermally connected to the CCR 2nd stage through vibration isolation: the radiation shield stage and
probe arms are thermally connected to the CCR 1st stage through similar vibration isolation. The CRX-EM-HF is
capable of operating the sample stage to 400 K; however, to operate above 350 K, the probe holder thermal
anchors must be removed from the sample stage in order to avoid raising the probe temperatures to above their
350 K maximum temperature.
The recommended operation for variable temperature measurements is to allow the entire CRX-EM-HF station to
cool to base temperature and then to warm the sample stage to the desired measurement setpoint.
Controls for Temperature Operation
The CCR compressor and cold head in the CRX-EM-HF are identical to those used in the CRX-4K probe station.
Refer to section 4.5.1 of the CRX-4K manual for information about CCR and electronic controls in the CRX-EM-HF.
Cooling the Probe Station to Base Temperature
For station cooldown, follow the procedure in section 4.5.2 of the CRX-4K manual to cool the probe station.
Operating the Sample Stage from Base Temperature to 350 K
To operate the CRX-EM-HF from base temperature to 350 K, follow the procedure in section 4.5.3 of the CRX-4K
manual; however, use the sample stage controller settings given in Table 7 of this document to set P, I, and D and
the proper heater range settings for the temperature setpoint.
Operating the Sample Stage from 350 K to 400 K
To operate the CRX-EM-HF from 350 K to 400 K, use Chapter 4 of the EMPX-HF manual as a guide to remove the
probe holder thermal anchors from the sample stage. The thermal anchors can be left loose in the probe station or
tied to the probe arm using simple string or unwaxed dental floss. Follow the procedure in section 4.5.3 of the
CRX-4K manual; however, use the sample stage controller settings given in Table 7 of this document to set P, I, and

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D and the proper heater range settings for the temperature setpoint. It is necessary to operate the CCR second
stage heater output to a setpoint of 240 K to overcome the cooling power of the CCR.
CAUTION: The sample stage cannot be operated at temperatures >350 K indefinitely with the probe
mount thermal anchors connected to the sample stage because the probes may exceed their
maximum temperature of 350 K. For extended operation at maximum temperatures, the
probe mount thermal anchors should be removed from the sample stage.
NOTE: As a safety precaution, the Model 336 temperature controller included with the CRX-EM-HF
has been configured at Lake Shore with temperature limits set for each sensor input to
disable the sample stage heater if any of the limits are exceeded.
Returning to Room Temperature
To return the probe station to room temperature, follow the procedure in section 4.5.4 of the CRX-4K manual.
Temperature Control Summary
The temperature controller configuration tables (Table 4 and Table 5) and the CCR and electronic control settings
tables (Table 6 and Table 7) summarize the typical settings needed to maintain CRX-EM-HF temperature control.
Temperature
controller
Input
Sensor type*
Filter
Temperature
limit**
Input
units
Sensor curve
Sample stage
Top
Model 336
Input A
Cernox™ HT
On
(8 pts 10%
window)
420 K
Kelvin
User curve 21
Radiation shield
Input B
Silicon diode
360 K
DT-670
Probe arm
Input C
Silicon diode
360 K
DT-670
CCR second stage
Bottom
Model 336
Input A
Silicon diode
305 K
DT-670
CCR first stage
Input B
Silicon diode
305 K
DT-670
*Range for Si diodes is 2.5 V with diode current 10 µA. For platinum sensors, autorange and current reversal are on.
**Controller maximum temperature limit set above operational maximum to avoid nuisance system shutdown during operation.
Table 4: Model 336 input settings for the CRX-EM-HF
Temperature
controller
Output
Control input
Output
mode
Heater
resistance
Max
current
Power up
enable
Heater out
display
Setpoint
ramping
Heater
range
Top
Model 336
1
Input A
(sample stage)
Closed
loop PID
25 Ω
2 A
(for 100 W)
Off
Power
Off
Low-High
2
Input B (radiation
shield stage)
1.414 A
(for 50 W)
High
Bottom
Model 336
1
Input A
(CCR second stage)
2 A
(for 100 W)
2
Input B
(CCR first stage)
1.414 A
(for 50 W)
Table 5: Model 336 output settings for the CRX-EM-HF

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Probe
station
cooldown
Maintaining
sample stage at
base temp
Operating
sample stage
base to 350 K
Operating
sample stage
350K to 400 K
Returning probe
station to room
temperature
CCR control
settings
Main power
On
On
On
On
Off
Drive switch
On
On
On
On
Off
Cold head drive switch
Off
Off
Off
Off
Off
Remote drive switch
Off
Off
Off
Off
Off
Electronic
control
settings
Sample stage
Heater range
Off
Off
See Table 7
See Table 7
HIGH (100 W)
Nominal power
—
—
See Table 7
See Table 7
100%
Radiation shield stage
Heater range
Off
Off
Off
Off
HIGH (50 W)
Nominal power
—
—
—
—
100%
CCR second stage
Heater range
Off
Off
Off
See Table 7
HIGH (100 W)
Nominal power
—
—
—
See Table 7
100%
CCR first stage
Heater range
Off
Off
Off
Off
HIGH (50 W)
Nominal power
—
—
—
—
100%
Table 6: General CCR and electronic control settings
Sample Stage
Base to 20 K
20 K to 100 K
100 K to 250 K
250 K to 350 K
350 K to 400 K
Nominal Power
20% at 10 K
25% at 50 K
40% at 200 K
60% at 350 K
90% at 400 K
Heater Range
Medium
High
High
High
High
Proportional (P)
50
50
50
50
50
Integral (I)
20
20
20
20
20
Derivative (D)
0
0
0
0
0
CCR Second Stage
Nominal Power
Off
Off
Off
Off
90% at 400 K
Heater Range
-
-
-
-
High
Proportional (P)
-
-
-
-
50
Integral (I)
-
-
-
-
20
Derivative (D)
-
-
-
-
0
Table 7: Electronic control settings for the sample stage temperature operation

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Magnetic Field Operation
The electromagnet coils in the CRX-EM-HF are identical to the EMPX-HF. A redesigned pole and vacuum chamber
configuration allows the CRX-EM-HF to achieve ±0.6 T maximum field compared to the ±0.55 T maximum field of
the EMPX-HF probe station. Refer to section 4.6 of the EMPX-HF manual for magnet operating instructions.
Optional 360° Rotation Stage (PS-360-EMPX): Operation
The CRX-EM-HF probe station can be configured with an optional 360° rotation stage to change the alignment of
the sample relative to the magnetic field. Instructions for changing the configuration of the probe station between
the fixed stage and the rotation stage are presented above.
The rotation stage is manually actuated by the control knob located on the side of the probe station above the
electromagnet base plate (Figure 6). The rotation stage allows for continuous 360° rotation in either clockwise or
counter-clockwise direction with no stops in the travel. This allows for the unimpeded start of another revolution
without having to reverse direction.
Figure 6: Rotation option control knob
CAUTION: The coaxial and triaxial sample holders are not compatible with the optional rotation stage as there
is no provision for preventing damage to the feedthrough connection to the sample holder. While
the coaxial and triaxial sample holder may be mounted to the rotation stage, the rotation should not
be operated during their use.

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The gear ratio of the control knob to actual stage rotation is 30:1 where 30 turns of the control knob will rotate the
stage 1 full revolution. Clockwise rotation of the control knob corresponds to counter-clockwise rotation of the
stage. The patterning on the CRX-EM-HF sample holder can be used to index the degree of rotation with the
number of control knob turns. The rotation stage has small notches at 90° increments that can be used to gauge
the rotation. The information in Figure 7 below replaces the information in Figure 4-15 of the EMPX-HF manual.
Figure 7: CRX-EM-HF gear to stage rotation

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Advanced Operation
Refer to Chapter 5 of the CRX-4K manual for advanced operation procedures such as reducing condensation on the
sample. Refer to Chapter 5 of the EMPX-HF manual for probe arm assembly reconfiguration. The optional high
temperature stage for the CRX-EM-HF is similar in operation to the CRX-4K; section 5.2.2 of the CRX-4K manual can
be referenced as a supplemental guide to the steps below.
Optional High Temperature Stage (PS-HTA-EM)
The CRX-EM-HF probe station can be operated from 20 K to 500 K using the high temperature (HT) sample stage
option. The HT sample stage is a coaxially isolated stage that is designed for 25 mm (1 in) diameter wafers. The HT
stage option installation and removal from the CRX-EM-HF probe station is similar to the sample holder installation
and removal. The HT sample stage has a platinum sensor embedded in the top sample plate that is calibrated from
14 K up to 500 K for rated temperature operation in the CRX-EM-HF. The HT sample stage has two 50 W heaters
(100 W total) that are arranged in parallel; the combined parallel heater resistance is 25 Ω. Electrical connection to
the coaxial stage may be made through the standard CRX-EM-HF FT-BNC or FT-triax option.
NOTE: The CRX-EM-HF must be configured at the factory with the electrical wiring for the HT sample stage.
Configuring the CRX-EM-HF for HT Stage Operation
If the optional HT stage was ordered with the CRX-EM-HF probe station, it will be installed and shipped in the
probe station. In order to actively control the HT stage, electrical connection must be made to the top Model 336
temperature controller. The HT sample stage sensor will be connected to Input D of the top Model 336
temperature controller. Output 1 of the top Model 336 temperature controller will be reconfigured and used to
control the HT sample stage.
Complete the Connections to the Probe Station
1. Locate the main power rocker switch on the front of the CRX-EM-HF console and turn it off.
WARNING: Never open the rear door of the CRX-EM-HF console unless the main power rocker switch
is in the off position. Failure to comply may result in injury or death.
2. Open the rear door of the CRX-EM-HF console.
3. Disconnect the sample stage output control from the rear panel of the top Model 336 temperature
controller as follows:
a. Disconnect the banana style connector (labeled Heater 1) from Output 1.
b. Disconnect the green ground banana plug from the banana plug to screw terminal adapter
c. Leave the banana style connector loose, ensuring that it is not contacting any other connectors.
4. Connect the HT sample stage temperature control and sensing cable (labeled DC2048) to the rear panel of
the top Model 336 temperature controller as follows:
a. Verify that the DIN style connector (labeled Sensor) is connected to Input D.
b. Connect the banana style connector (labeled Heater) to Output 1 (heater).
c. Connect the green ground banana plug from the banana plug to the screw terminal adapter.
5. Locate the other end of the HT sample stage temperature control and sensing cable (labeled DC2048). It is
a 6-pin connector. Attach it to the bottom of the vacuum chamber, which has a corresponding 6-pin
connection. Note the orientation of the guiding lugs, and rotate as necessary. The outer shell will rotate
and click into place for a secure connection

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Reconfigure the Top Model 336 Temperature Controller for HT Sample Stage Operation
1. Verify that Input D of the top Model 336 temperature controller is properly configured for the HT stage as
listed in Table 8.
2. Reconfigure Output 1 according to Table 9.
3. Conduct the temperature sensor and heater test as outlined in section 3.7.2 of the CRX-4K manual for
temperature sensor and heater testing instructions on Output 1 and Input D of the top Model 336
temperature controller to verify that all connections and configurations have been made properly.
Temperature
controller
Input
Sensor type*
Filter
Temperature
limit**
Input
units
Sensor curve
High temperature
(HT) sample stage
Top
Model 336
Input D
Platinum
On
(8 pts 10%
window)
510 K
Kelvin
User curve 22
*For platinum sensors, autorange and current reversal are on.
**Controller maximum temperature limit set above operational maximum to avoid nuisance system shutdown during operation.
Table 8: Model 336 input settings for the CRX-EM-HF with High Temperature Stage
Temperature
controller
Output
Control input
Output
mode
Heater
resistance
Max
current
Power up
enable
Heater out
display
Setpoint
ramping
Heater
range
Top
Model 336
1
Input D
(High Temp Stage)
Closed
loop PID
25 Ω
2 A
(for 100 W)
Off
Power
5 K/min
High
Table 9: Model 336 output settings for the CRX-EM-HF with High Temperature Stage
Re-configuring the Sample Stage
The CRX-EM-HF optional HT stage uses a fixed stage adapter that is compatible with only the HT stage. The HT
stage adapter is required to set the top of the HT sample stage to the correct height for magnetic field operation in
the CRX-EM-HF.
HT Stage Installation
Follow the procedure below to first install the HT stage adapter and then the removable HT stage.
Install the HT stage adapter:
1. Remove vacuum chamber lid, radiation shield lid, and any installed probes. Fully retract any probe arms.
2. Using a 3 mm hex driver, loosen the four M4 captive screws at the base of the installed sample stage
adapter. This may be either the standard fixed stage or the optional rotation stage.
3. Carefully lift the stage adapter out of the probe station. Take care not to damage to the cryogenic coaxial
wire.
4. Lower the HT stage adapter into the chamber. Take care not to damage to the cryogenic coaxial wire.
5. Using a 3 mm hex driver, tighten the four M4 captive screws at the base of the HT stage adapter to the
sample stage by starting all four screws in a few threads before tightening any screws to prevent cross-
threading.
6. Tighten the four screws securely; this is the source of thermal contact between the sample adapter and
the sample stage. It is best to tighten all four screws a little at a time until snug.

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Install the HT sample stage:
1. Align the plug on the HT sample stage with the electrical socket located in the CRX-EM-HF sample stage
and carefully lower the HT sample stage onto the sample stage adapter. Refer to Figure 5-3 in the CRX-4K
manual for additional information.
2. Connect the plug to the socket. Ensure that the white dots of the plug and socket are aligned. Take care
not to damage to the cryogenic coaxial wire when lowering the sample stage onto the HT stage adapter.
3. Using the 2.5 mm hex driver, fasten the HT sample stage to the HT stage adapter by starting all four M3
screws in a few threads before tightening any screws to prevent cross-threading.
4. Tighten the four screws securely; this is the source of thermal contact between the sample holder and the
adapter. It is best to tighten all four screws a little at a time until snug.
5. If you are using the HT sample stage in conjunction with the FT-BNC or FT-triax, connect the 2-pin
feedthrough cable plug next to the HT sample stage plug on the cable receptacle. Ensure the white dot on
the 2-pin feedthrough cable is aligned with the white dot of the plug and socket. Refer to Figure 5-4 in
the CRX-4K manual for additional information.
HT Stage Removal
Follow the procedure below to first remove the HT stage and then the HT stage adapter.
Remove the HT stage:
1. Remove vacuum chamber lid, radiation shield lid, and any installed probes. Fully retract any probe arms.
2. If you are using the HT sample stage in conjunction with the FT-BNC or FT-TRIAX, remove the 2-pin
feedthrough cable plug.
3. Remove the HT stage plug from the socket.
4. Using the 2.5 mm hex driver, remove the four M3 screws that attach the HT stage to the CRX-EM-HF
sample stage. Be careful not to drop them into the chamber.
5. Grasp the base of the HT sample stage and remove it from the station being careful of the delicate lead
wires.
6. Place the HT stage in a clean, secure, dry location.
Remove the HT stage adpater:
7. Using the 3 mm hex driver, loosen the four M4 captive screws at the base of the HT stage adapter.
8. Carefully lift the HT stage adapter out of the probe station. Take care not to damage to the cryogenic
coaxial wire.
Reconfigure the Top Model 336 Temperature Controller for Standard Operation
1. Disconnect the banana style connector, and the green ground banana plug of the HT sample stage
temperature control cable (labeled DC2048, Heater) from Output 1 of the top Model 336 temperature
controller.
2. Reconnect the banana style connector and the green ground banana plug of the stage temperature
control cable (labeled DC0922, Heater1) to Output 1 of the top Model 336 temperature controller.
3. Reconfigure Output 1 of the top Model 336 temperature controller according to Table 5.
4. Conduct the temperature sensor and heater test as outlined in section 3.7.2 of the CRX-4K manual for
temperature sensor and heater testing instructions on Output 1 and Input A to verify that all connections
and configurations have been made properly.

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16
Temperature Operation with the HT Sample Stage
The HT sample stage allows temperature operation of the sample above 400 K by increasing the thermal isolation
between the sample and CCR second stage. Recall that the CCR second stage must not be operated above 300 K.
The steps to cool the CRX-EM-HF probe station with the HT sample stage are the same for normal operation;
however, because of the increased thermal isolation between the HT sample stage and the CCR second stage,
longer settling times should be expected when controlling to a temperature setpoint.
CAUTION: Observe a 5 K/min ramping rate at all times for temperature changes. Failure to comply may
result in permanent damage HT stage.
Cooling the Probe Station with the HT Sample Stage
Follow this procedure to cool the probe station with the HT sample stage installed. Prior to cooling the HT stage,
the CCR second stage control heater will be configured so that when the probe station reaches base temperature,
the HT stage will not be cooled below the 14 K calibrated temperature curve. This procedure assumes the probe
station is at room temperature and that the vacuum chamber has been evacuated following section 4.4.2 of the
EMPX-HF manual.
1. Change the CCR second stage setpoint to 15 K (Input A, Output 2 on the bottom Model 336 temperature
controller).
2. Use the CCR second stage controller settings given in Table 9 for operating the sample at temperatures
above base to set the P, I, and D and the proper heater range settings for the temperature setpoint.
3. Use the z-axis micrometers to raise all probes 3 mm to 4 mm above the sample holder. Failure to do so
will potentially cause damage to the probe tip or scratch the sample surface.
4. Cool the probe station as described in section 4.5.2 of the CRX-4K manual.
5. If the “ALL OFF” button was pressed to turn off all the station heaters, be sure to turn the CCR second
stage heater back on.
Operating the HT Sample Stage at Base Temperature
Depending on the measurement configuration, when the CCR second stage is not being actively controlled as
instructed above, the CRX-EM-HF may cool the top of the sample stage to below 14 K, which is the lowest point on
the platinum sensor calibration curve. If this occurs, Input D on the top Model 336 temperature controller will read
TUNDR; the exact temperature of the HT sample stage will not be known, only that it is less than 14 K.
NOTE: If the HT sample stage Input D reads TUNDR, the control Output 1 will not turn on. Therefore, to
control to a temperature setpoint with the HT sample stage, the CCR second stage heater Output
2 of the bottom Model 336 temperature controller will be controlled to 15 K so that the
temperature at the sample is brought back above 14 K (into the range of the platinum sensor
calibration curve).
Operating the HT Sample Stage from 20 K to 300 K
To operate the HT sample stage from 20 K to 300 K, follow these procedures.
1. Use the z-axis micrometers to raise all probes 3 mm to 4 mm above the sample. Failure to do so will
potentially cause damage to the probe tip or scratch the sample surface.
2. Use the settings given in Table 9 for operating the HT sample stage above base temperature to set the P, I,
and D and the proper heater range settings for the temperature setpoint.
3. Change the setpoint for the HT sample stage (top Model 336 temperature controller Output 1) to the
desired temperature setpoint.

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If the HT sample stage temperature rises above 77 K during operation, turn on the turbo vacuum pump using this
procedure
a. Start the turbo vacuum pump (section 4.4.2 steps 5 and 6 of the EMPX-HF manual).
b. Once the turbo vacuum pump is operating at full speed, slowly open the vacuum isolation valve until
it is fully open.
CAUTION: Do not open the vacuum isolation valve until the turbo vacuum pump is operating at full speed.
If the sample stage falls below 77 K during operation, turn off the turbo vacuum pump using this procedure.
a. Close the vacuum isolation valve fully.
b. Turn off and vent the turbo vacuum pump (section 4.4.3 of the EMPX-HF manual).
4. Wait for the temperature at the HT sample stage to stabilize.
5. Adjust the P, I, and D settings as necessary to improve stability.
Operating the HT Sample Stage from 300 K to 500 K
Operating the HT sample stage from 300 K to 500 K will result in long settling times due to the thermal isolation
between the HT sample stage heater and the CCR second stage cooling source. Therefore, the CCR second stage
heater may be used in conjunction with the HT sample stage heater to speed the settling time of the refrigerator
stages.
CAUTION: Do not operate the HT sample stage above 300 K unless the probe station vacuum chamber
is closed, the system is under vacuum, and the CCR is operational to ensure there is not a
runaway temperature condition.
To operate the HT sample stage from 300 K to 500 K, follow these procedures.
1. Use the z-axis micrometers to raise all probes 3 mm to 4 mm above the sample. Failure to do so will
potentially cause damage to the probe tip or scratch the sample surface.
2. Use the settings given in Table 9 for the HT sample stage and the CCR second stage to set the P, I, and D
and the proper heater range settings for the temperature setpoint.
3. Change the CCR second stage (bottom Model 336 temperature controller Output 1) setpoint to 150 K.
4. Change the setpoint for the HT sample stage (top Model 336 temperature controller Output 1) to the
desired temperature setpoint.
5. Wait for the temperature at the HT sample stage to stabilize.
CAUTION: Observe a 5 K/min ramping rate at all times for temperature changes. Failure to comply may
result in permanent damage HT stage.
CAUTION: Operating the HT sample stage above 500 K may cause the CCR cold head and other
components in the probe station to exceed their maximum operating temperatures. This can
result in permanent damage to the CRX-EM-HF probe station.
Probe arms that are engaged for probing over the HT sample stage will be subject to radiation and may be warmed
to a temperature exceeding their temperature maximum. Therefore, when probing a sample temperature above
350 K, monitor the probe arm sensor reading to ensure the probes and probe arms do not exceed 350 K.
Depending on your measurement setup conditions, you may need to probe in intervals. After each probing
interval, retract the probes to reduce the radiative heat load and to cool them.
CAUTION: When operating the HT sample stage above 350 K, monitor the probe arm sensor to ensure
the probes do not exceed their maximum temperature.

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Station Warm Up
To warm up the system, first set the HT stage 295 K. After the HT stage has stabilized at 295 K, stop the CCR
compressor and warm the other stages to 295 K.
Probe station
cooldown
Maintaining HT
sample stage at
base temp
Operating HT
sample stage
base to 300 K
Operating HT
sample stage
300 K to 500 K
Returning probe
station to room
temperature
CCR control
settings
Main power
On
On
On
On
Off
Drive switch
On
On
On
On
Off
Cold head drive switch
Off
Off
Off
Off
Off
Remote drive switch
Off
Off
Off
Off
Off
Electronic
control
settings
HT stage
Heater range
Off
Off
HIGH (100 W)
HIGH (100 W)
HIGH (100 W)
Nominal power
—
—
Varies
Varies
Varies
Proportional (P)
—
—
10
10
10
Integral (I)
—
—
20
20
20
Derivative (D)
—
—
0
0
0
Radiation shield stage
Heater range
Off
Off
Off
Off
HIGH (50 W)
Nominal power
—
—
—
—
100%
CCR second stage
Heater range
Off
Off
Off
HIGH (100 W)
HIGH (100 W)
Nominal power
—
—
—
Varies
100%
Proportional (P)
—
—
—
50
50
Integral (I)
—
—
—
20
20
Derivative (D)
—
—
—
0
0
CCR first stage
Heater range
Off
Off
Off
Off
HIGH (50 W)
Nominal power
—
—
—
—
100%
Table 9: General CCR and electronic control settings with High Temperature Stage

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Maintenance and Troubleshooting
Refer to sections 6.2.1 through 6.2.11 of the EMPX-HF manual for routine maintenance information. For
maintenance items relating to the CCR, refer to section 6.2.1, Table 6-1 of the CRX-4K manual for preventative
maintenance information and section 6.2.10 of the CRX-4K manual for CCR maintenance.
Refer to section 6.3.1 of the EMPX-HF manual for vacuum trouble shooting information and sections 6.3.4 to 6.3.7
of the EMPX-HF manual for trouble shooting information. Refer to section 6.3.2 of the CRX-4K manual for CCR
troubleshooting and section 6.3.3 of the CRX-4K manual for probe station cooling troubleshooting.
Contacting Lake Shore
The Lake Shore Systems Service department is staffed Monday through Friday between the hours of 8:00 a.m. and
5:00 p.m. EST, excluding holidays and company shut down days.
Contact Lake Shore Systems Service through any of the means listed below. However, the most direct and efficient
means of contacting is to complete the online service request form at
http://www.lakeshore.com/service/Pages/default.aspx. Provide a detailed description of the problem and the
required contact information. You will receive a response within 24 hours, or the next business day in the event of
weekends or holidays.
If you wish to contact Systems Service by mail or telephone, use the following:
Lake Shore Cryotronics, Inc.
575 McCorkle Blvd.
Westerville, Ohio 43082 USA
Phone: [phone] (option 6)
Fax: [phone]
e-mail: [e-mail]