Langer FLS 106 IC User manual

2019.07.04 User Manual FLS 106 eng
User manual
FLS 106 IC set / FLS 106 PCB set
IC scanner 4-axis positioning system /
PCB scanner 3-axis positioning system
- Translation of the original German user manual into English -
Copyright © Februar 2019
LANGER EMV-Technik GmbH

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LANGER
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[e-mail]
www.langer-emv.de
FLS 106 IC set / FLS 106 PCB set
Table of contents: Page
Declaration of Conformity............................................................................................6
1
General Remarks..........................................................................................................72
User Manual........................................................................................................................72.1
Reading and Understanding the User Manual .....................................................................72.2
Local Safety and Accident Prevention Regulations..............................................................72.3
Images ................................................................................................................................7
2.4
Limitation of Liability ............................................................................................................72.5
Errors and Omissions..........................................................................................................72.6
Copyright.............................................................................................................................72.7
Description of Symbols........................................................................................................82.8
Scope of Delivery .........................................................................................................9
3
FLS 106 IC Scope of Delivery * ...........................................................................................93.1
FLS 106 PCB Scope of Delivery * .......................................................................................93.2
Technical Parameters ................................................................................................104
General Parameters of the FLS 106 Scanner....................................................................104.1
Technical Parameters of the Subassemblies.....................................................................11
4.2
UH DUT .......................................................................................................................114.2.1
Claw 01 and Claw 02 ...................................................................................................114.2.2
GND 25 Holder.............................................................................................................124.2.3
GND 25 Ground Plane.................................................................................................134.2.4
SH 01 Probe Holder.....................................................................................................13
4.2.5
SUH 106 Safety Enclosure...........................................................................................144.2.6
External NA5 EMERGENCY STOP Switch..................................................................144.2.7
Requirements for the ChipScan-Scanner Software............................................................154.3
Intended Use...............................................................................................................165
Staff requirements.............................................................................................................16
5.1
Risks if Not Used for Its Intended Purpose ........................................................................175.2
Safety Instructions.............................................................................................................175.3
Hazard Due to Electrical Voltage..................................................................................175.3.1
Hazard Due to Movements along the Axes ..................................................................185.3.2
Airborne noise emission if used for its intended purpose ...................................................18
5.4
Safety Devices ............................................................................................................196
Prerequisites for Safe Operation........................................................................................196.1
Operation with the Protective Enclosure.......................................................................196.1.1
Operation with a Spatial Separation.............................................................................196.1.2
Switching the Scanner on in Normal Operation and after a Power Failure.........................19
6.2
EMERGENCY STOP Switch .............................................................................................196.3

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FLS 106 IC set / FLS 106 PCB set
Overcurrent Protective Device...........................................................................................196.4
Environmental Protection..........................................................................................207
Nameplate ...................................................................................................................20
8
Overview of the FLS 106 Scanner.............................................................................219
Description of the Subassemblies......................................................................................219.1
Guide Rails along the X-Axis........................................................................................219.1.1
Guide Rails along the Y-Axis (Long Side).....................................................................229.1.2
Z-Axis Tower................................................................................................................22
9.1.3
Gantry..........................................................................................................................239.1.4
Rotary Unit...................................................................................................................239.1.5
Aluminium Mounting Bracket........................................................................................249.1.6
T-Slot Table .................................................................................................................259.1.7
Control Panel with EMERGENCY STOP Device and Control LEDs.............................26
9.1.8
Height-Adjustable Machine Feet ..................................................................................269.1.9
ON / OFF Switch..........................................................................................................279.1.10
Connectors........................................................................................................................279.2
Connectors on the Z-Axis Tower..................................................................................279.2.1
Connectors on the Control Panel .................................................................................28
9.2.2
Power Supply Socket...................................................................................................289.2.3
Connector for External Emergency Stop Switch or Safety Enclosure ...........................299.2.4
Overview of Attachments...........................................................................................3010
KA 220 Camera Arm .........................................................................................................3010.1
DM-CAM Holder.3.............................................................................................................30
10.2
DM-CAM with Camera Screw............................................................................................3110.3
Clamping Pieces................................................................................................................3210.4
UH DUT with Claw 01 and Claw 02...................................................................................3210.5
GND 25 Holder..................................................................................................................3310.6
GND 25 Ground Plane.......................................................................................................33
10.7
SH 01 Probe Holder ..........................................................................................................3410.8
Delivery .......................................................................................................................3511
Acceptance Inspection.......................................................................................................3511.1
Storage..............................................................................................................................3511.2
Opening the Transport Box................................................................................................35
11.3
Packaging..........................................................................................................................3511.4
Preparations for Putting the FLS 106 Scanner into Service ...................................3612
Preparations for the Safe Operation of the FLS 106 Scanner............................................3612.1
Setting Up the FLS 106 Scanner.......................................................................................3612.2
Removing the Transport Protection from the Guide Rails..................................................38
12.3
Information on the Pre-Installed Components' Torque.......................................................3812.4

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FLS 106 IC set / FLS 106 PCB set
Checking / Releasing the EMERGENCY STOP Switch .....................................................3912.5
Putting the FLS 106 Scanner into Service for the First Time..................................4013
Installation...................................................................................................................41
14
Ensuring the System's Safe Operation ..............................................................................4114.1
Operation with the SUH 106 Safety Enclosure.............................................................4114.1.1
Operation with Spatial Separation and External NA 5 EMERGENCY STOP Switch.....4114.1.2
Checking the Cables of the Rotary Unit.............................................................................4314.2
Installing the Digital DM-CAM Microscope Camera on the FLS 106 IC..............................43
14.3
Installing the DM-CAM Holder.3 for the Microscope Camera........................................4314.3.1
Installing the Digital DM-CAM Microscope Camera......................................................4414.3.2
Installation of the Digital DM-CAM Microscope Camera on the FLS 106 PCB...................4514.4
Connecting the C13/C14 Device Lead...............................................................................4514.5
Connecting a Computer.....................................................................................................46
14.6
Connecting a Measuring Device for Near-Field Scans by Taking a Spectrum Analyzer as14.7
an Example................................................................................................................................46
Switching the FLS 106 Scanner on....................................................................................4714.8
Software Installation ..................................................................................................4815
Installing the scanner driver...............................................................................................4815.1
Installing the ChipScan-Scanner Software.........................................................................5015.2
Putting the FLS 106 Scanner into Service with the ChipScan-Scanner Software...............5115.3
Fastening the Device Under Test..............................................................................5316
Fastening a Device Under Test With the Clamping Pieces................................................5316.1
Fastening a Circuit Board with the UH DUT Universal Holder............................................5416.2
Installing the UH DUT...................................................................................................5516.2.1
Fastening the GND 25 Ground Plane for IC Measurements ..............................................5616.3
Installing the GND 25 Ground Plane ............................................................................5616.3.1
Information on Using the GND 25 Ground Plane..........................................................5716.3.2
Installing the GND 25 Holder........................................................................................5716.3.3
Installing an ICR Near-Field Microprobe...................................................................5917
Laying the Connecting Cables...........................................................................................5917.1
Connecting the ICR Near-Field Microprobe.......................................................................6117.2
Installing the BT 706 Bias-Tee...........................................................................................6317.3
Collision control of the ICR probe ......................................................................................6317.4
Installing a Near-Field Probe with the SH 01 Probe Holder ....................................6518
Installing a Near-Field Probe on the FLS 106 IC................................................................6518.1
Connecting a Near-Field Probe Directly to the FLS 106 IC Scanner.............................6618.1.1
Connecting a Near-Field Probe With a Pre-Amplifier....................................................6718.1.2
Installing a Near-Field Probe on the FLS 106 PCB............................................................6818.2
Connecting a Near-Field Probe Directly to the FLS 106 PCB Scanner.........................7018.2.1

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Connecting a near-field probe with a pre-amplifier .......................................................7018.2.2
Collision Control for the Near-Field Probe..........................................................................7118.3
Information on How to Operate the FLS 106 Scanner.............................................72
19
Checking the Measuring Set-Up before Each Use.............................................................7219.1
Adjusting the Exact Height of the Probe Tip above the DUT..............................................7219.2
Estimating the Duration of a Measurement with the FLS 106 Scanner ..............................7319.3
Number of Measuring Points........................................................................................7319.3.1
Travel Distance............................................................................................................73
19.3.2
Sweep Time.................................................................................................................7319.3.3
Transmission Time.......................................................................................................7319.3.4
Storage Requirements for the Measurement .....................................................................7319.4
After Completing the Measurement..........................................................................7420
Dismantling after Completing the Measurement(s).................................................74
21
Removing the ICR Probe...................................................................................................7421.1
Removing the Near-Field Probe ........................................................................................7421.2
Removing the SH 01 Probe Holder from the FLS 106 IC...................................................7421.3
Removing the Pre-Amplifier / BT 706 Bias-Tee..................................................................7421.4
Removing a Device Under Test from the T-slot Table........................................................75
21.5
Removing a Circuit Board from the UH DUT......................................................................7521.6
Removing the UH DUT......................................................................................................7521.7
Removing the GND 25.......................................................................................................7521.8
Removing the GND 25 Holder...........................................................................................7521.9
Removing the DM-CAM Microscope Camera................................................................75
21.10
Removing the DM-CAM Holder.3 Camera Holder .........................................................7521.11
Maintenance................................................................................................................7622
Maintenance Intervals........................................................................................................7622.1
Replacing Labels and Signs ..............................................................................................7622.2
Dismantling/Disposal.................................................................................................77
23
Hazards during Dismantling/Disposal................................................................................7723.1
Dismantling........................................................................................................................7723.2
Disposal ............................................................................................................................7723.3
Customer Service.......................................................................................................7824
Warranty......................................................................................................................7925

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FLS 106 IC set / FLS 106 PCB set
Declaration of Conformity1
Manufacturer:
Langer EMV-Technik GmbH
Nöthnitzer Hang 31
01728 Bannewitz
Germany
Langer EMV-Technik GmbH herewith declares that the
FLS 106 IC / FLS 106 PCB positioning system
conforms with the following relevant regulations:
- Machinery Directive 2006/42 EC
- EMC Directive 2014/30/EU
- RoHS 2011/65/EU
The system complies with the protection objectives of the Low Voltage Directive 2014/35/EU.
The following applicable standards were used to implement the requirements specified by the
aforementioned directives:
- DIN EN ISO 12100:2011 (Safety of Machinery –General Principles for Design –Risk assessment
and risk reduction)
- DIN EN 60204-1:2014-10 (Safety of Machinery –Electrical equipment of machines –Part 1:
General requirements)
- EN 61000-6-4:2007 (Generic Standards –Emission standard for industrial environments)
- EN 61000-6-2:2006 (Generic Standards –Immunity for industrial environments)
Name of the person authorised to compile the technical file:
Gunter Langer
Bannewitz, 02.04.2019
Signature:
_________________
(Signature)
G. Langer, Managing Director

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FLS 106 IC set / FLS 106 PCB set
General Remarks2 User Manual2.1
This user manual enables the safe and efficient use of the FLS 106 scanner. It must be kept with
the scanner so that it is accessible for the user.
Reading and Understanding the User Manual2.2
Read the user manual carefully, observe the safety information (section 5.3) and follow the
instructions given in this manual before putting the device into service.
Local Safety and Accident Prevention Regulations2.3
The local accident prevention and general safety regulations also apply to ensure that the FLS 106
scanner is used for its intended purpose.
Images2.4
Figures have been included in this user manual to assist the reader's understanding but may differ
from the device's actual version.
Limitation of Liability2.5
In the following cases, Langer EMV-Technik GmbH can assume no liability for damage to property
and personal injury if:
- The information given in this user manual has not been observed.
- The FLS 106 scanner was operated by staff not qualified in the field of EMC.
- The FLS 106 scanner was subjected to unauthorised modifications or technical changes.
- The FLS 106 scanner was not used according to its intended purpose.
- Spare parts or accessories were used that had not been approved by EMV-Technik GmbH.
The actual scope of delivery may deviate from the illustrations and texts in this user manual due to
the customisation of orders or due to technical changes and innovations.
Errors and Omissions2.6
The information in this manual has been carefully checked and is believed to be accurate;
however, the Langer EMV-Technik GmbH assumes no responsibility for any clerical, typographical,
or proofreading errors, or omissions.
Copyright2.7
The content of this user manual is protected by copyright law and may only be used in connection
with the FLS 106 scanner. This user manual may not be used for any other purpose without the
prior written approval of Langer EMV-Technik GmbH.

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Description of Symbols2.8
Mandatory signs
Warning signs
Disconnect the mains plug
General warning sign
Wash your hands
Warning against dangerous
electrical voltage hazard
Warning against hand injury
hazard
Table 1: Symbols

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Scope of Delivery3 FLS 106 IC Scope of Delivery *3.1
Item Name of article Short name Qty.
1 4-axis positioning system FLS 106 IC 1
2 ChipScan-Scanner software / CD-ROM CS-Scanner 1
3 Holder for GND 25 GND 25 holder 1
4 Ground plane GND 25 1
5 Holder for microscope camera DM-CAM holder.3 1
6 Digital microscope camera DM-CAM 1
7 Rotary unit Rotary unit 1
8 EMERGENCY STOP switch, external NA 5 1
9 User manual FLS 106 m 1
----------------------------------------------------------------------------------------------------------------------------------
* The scope of delivery may deviate depending on the respective order.
FLS 106 PCB Scope of Delivery *3.2
Item Name of article Short name Qty.
1 3-axis positioning system FLS 106 PCB 1
2 ChipScan-Scanner software / CD-ROM CS-Scanner 1
3 Universal holder for Langer scanner UH DUT 1
4 Claw claw 01 4
5 Claw claw 02 4
6 Digital microscope camera DM-CAM 1
7 Probe holder for Langer scanner SH 01 1
8 Camera arm KA 220 1
9 EMERGENCY STOP switch, external NA 5 1
10 User manual FLS 106 m 1
----------------------------------------------------------------------------------------------------------------------------------
* The scope of delivery may deviate depending on the respective order.

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FLS 106 IC set / FLS 106 PCB set
Technical Parameters4 General Parameters of the FLS 106 Scanner4.1
Figure 1: Axes of the FLS 106 scanner
Supply voltage
100 - 250 V (50/60 Hz)
Current consumption
4.5 A
Interface
USB 2.0 type B (Hi-speed)
Weight
75 kg
Dimensions (L x W x H)
(1030 x 775 x 900) mm
Table 2: General technical parameters of the FLS 106 scanner
Axes
X
Y
Z
αrotation
Max. positioning
distance
400 mm
600 mm
120 mm
±180°
Min. positioning
distance
20 µm
20 µm
20 µm
1°
Positioning speed
20 mm/s
25 mm/s
10 mm/s
90°/s
Table 3: Technical parameters of the four axes

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FLS 106 IC set / FLS 106 PCB set
Technical Parameters of the Subassemblies4.2
UH DUT4.2.1
Figure 2: Dimensions of the DUT UH universal holder
Claw 01 and Claw 024.2.2
Figure 3: Dimensions of the claws for the DUT UH (claw 01 and claw 02)

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Figure 4: Claws from above with the long hole and M3 screw
GND 25 Holder4.2.3
Figure 5: GND 25 holder
with anti-rotation element

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GND 25 Ground Plane4.2.4
Figure 6: GND 25 ground plane
Diameter
218 mm
Depth of the recess
1.7 mm
Recess dimensions (L x W)
(103 x 103) mm
Weight
2 kg
Height
24 mm
Table 4: Technical parameters of the GND 25 ground plane
SH 01 Probe Holder
4.2.5
Figure 7: SH 01 probe holder
Probe sleeve
Length: 40 mm
Inner diameter 9.9 mm
Outer diameter 12 mm
Table 5: Technical parameters of the SH 01 probe holder

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FLS 106 IC set / FLS 106 PCB set
SUH 106 Safety Enclosure4.2.6
Length
1260 mm
Width
890 mm
Height
1000 mm
Connection
25-pin D-Sub
Weight
50 kg
Table 6: Technical parameters of the SUH 106 safety enclosure
External NA5 EMERGENCY STOP Switch4.2.7
Figure 8: External EMERGENCY STOP switch with cable and plug
Cable length
5 m
Table 7: Technical parameters of the external NA 5 EMERGENCY STOP switch

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FLS 106 IC set / FLS 106 PCB set
Requirements for the ChipScan-Scanner Software4.3
Operating system
Windows 7 64 bit (latest service packs)
Monitor resolution
(1280 x 1024) px
Hard-disk storage
1 GB minimum / 10 GB recommended
Table 8: System requirements for the ChipScan-Scanner software
Processor
Intel Core i7 2.7 GHz
RAM memory
8 GB
Graphics card
AMD Radeon 7950
Graphics card memory
3 GB
Table 9: PC specifications recommended for use with the ChipScan-Scanner software

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Intended Use5
The FLS 106 scanner is a positioning system for probes from Langer EMV-Technik GmbH and is
used exclusively to test and/or carry out measurements on printed circuit boards (PCBs) and
integrated circuits (ICs).
The system supports the following probe types from Langer EMV-Technik GmbH:
- ICR near-field micro-probes
- Passive near-field probes
The system allows the measurement of fields coupled out by the device under test (DUT).
The probes can be moved across the DUT surface on the X-, Y- and Z-axis.
In addition, the FLS 106 IC allows the probe's rotation around the Z-axis. The probe tip position
can be checked visually with the digital DM-CAM microscope camera at any time.
The FLS 106 is controlled with the ChipScan-Scanner software via a PC.
The system is used for applications such as:
-Surface scans in compliance with standard DIN IEC/TS 61967-3
-Volume scans
-Pin scans
The FLS 106 scanner may only be used in accordance with the prerequisites described in
section 6.1.
The user must comply with all information and instructions given in this user manual.
The FLS 106 scanner should only be used in an environment with a temperature of
10 to 35 degree Celsius and a humidity of 20 to 85 percent without condensation.
Keep the scanner free of foreign objects, dirt and liquids to prevent adverse effects on
measurements and damage to the scanner.
Staff requirements5.1
Only persons who are trained and qualified in the field of electromagnetic compatibility (EMC) may
operate the FLS 106 scanner.
Persons whose responses are impaired by alcohol, medicines, drugs or similar substances must
not be allowed to operate the FLS 106 scanner.

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Risks if Not Used for Its Intended Purpose5.2
Incorrect use of the FLS 106 scanner may put the user at risk, damage the scanner and/or the
technical equipment connected to the scanner.
Examples of improper use that may put persons/equipment at risk:
-Safety devices are bypassed or rendered ineffective.
-The FLS 106 scanner is used in a defective state.
-The FLS 106 scanner is used outside the specified range of technical parameters.
-The field of application is changed by modifications to the design.
Claims due to the scanner's abnormal use are excluded!
Safety Instructions5.3
Risks cannot be totally excluded even if the FLS 106 scanner is used for its intended purpose.
Observe the safety information and hazard warnings listed below to prevent damage to property
and personal injury. Also observe the operating and safety instructions for all other devices used in
the measurement set-up.
Carry out a visual check before performing a measurement with a product from
Langer EMV-Technik GmbH. Replace any damaged connecting cables, attachments and probes.
Please contact Langer EMV-Technik GmbH if damaged parts need to be replaced or repaired.
Wear tight-fitting clothes when using the scanner.
Hazard Due to Electrical Voltage5.3.1
Your life is at risk if you touch damaged electrical cables.
Important: Always check any attachments, measuring devices, cables and probes before using the
scanner. Never use any damaged or defective devices.
Do not connect or disconnect any cables whilst the FLS 106 scanner is in operation.
Only staff from Langer EMV-Technik GmbH may open the scanner and work on the electrical
components and electrical lines.
Switch the device off immediately, disconnect the mains plug and contact Langer EMV-Technik
GmbH if you detect any damaged insulation on lines, cables or electric components!

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Hazard Due to Movements along the Axes5.3.2
There is a risk of injuries when the scanner is in motion.
Important: The scanner may only be operated within a protective enclosure (section 6.1.1 and
14.1.1) or with a spatial separation (section 6.1.2 and 14.1.2). As a result, attachments, probes and
DUTs can only be installed and removed when the FLS 106 scanner is at a standstill.
Airborne noise emission if used for its intended purpose5.4
The noise level is below 70 dB(A) if the FLS 106 scanner is used for its intended purpose
No ear protection is required.

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Safety Devices6 Prerequisites for Safe Operation6.1
The FLS 106 scanner may only be operated if either
-a protective enclosure or
-a spatial separation in connection with the external NA 5 EMERGENCY STOP switch is
used.
The FLS 106 scanner is stopped immediately if
-the EMERGENCY STOP switch on the device is actuated,
-the external EMERGENCY STOP switch is actuated,
-the protective enclosure is opened.
After the EMERGENCY STOP switch on the scanner has been pressed, it has to be released by
turning it clockwise before the scanner can be switched back on.
After the external NA 5 EMERGENCY STOP switch has been pressed, it has to be released by
pulling before the scanner can be switched back on.
The scanner then has to be recalibrated with the software.
Operation with the Protective Enclosure6.1.1
The FLS 106 scanner is operated inside the SUH 106 protective enclosure.
Operation with a Spatial Separation6.1.2
The user provides a spatial separation at an appropriate distance to prevent persons from
interfering with the scanner's operation. Measures such as cordoning off or fencing off the site are
suitable precautions. The external EMERGENCY STOP switch has to be connected to the scanner
and placed outside the isolated space so that it is accessible at any time.
Switching the Scanner on in Normal Operation and after a Power6.2 Failure
The FLS 106 scanner can only be activated or operated via the software after passing a self-
testing routine.
EMERGENCY STOP Switch6.3
The emergency stop function is triggered by pressing the EMERGENCY STOP switch.
The FLS 106 scanner is stopped immediately.
After the EMERGENCY STOP switch has been pressed, it has to be released by turning it
clockwise before the scanner can be switched back on.
Overcurrent Protective Device6.4
Line-side fuses protect the scanner in the event of a fault. The power supply unit is resistant to
short circuits.

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Environmental Protection7
Dispose of any packaging material paying due regard to the local environmental protection
regulations.
Do not allow lubricants such as grease and oil based on mineral oils to escape into the
environment. These lubricants must be disposed of in compliance with the local, official regulations
through corresponding collection points.
Nameplate8
The nameplate is on the rear of the FLS 106 scanner and identifies the scanner clearly.
The nameplate provides the following details:
- Name of the device
- Company name and full address of the manufacturer
- CE mark
- Serial number and article number
- Year of construction (year in which the manufacturing process has been completed)