Langer FLS 106 IC User manual

2019.07.04 User Manual FLS 106 eng
User manual
FLS 106 IC set / FLS 106 PCB set
IC scanner 4-axis positioning system /
PCB scanner 3-axis positioning system
- Translation of the original German user manual into English -
Copyright © Februar 2019
LANGER EMV-Technik GmbH

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LANGER
EMV-Technik
DE-01728 Bannewitz
[e-mail]
www.langer-emv.de
FLS 106 IC set / FLS 106 PCB set
Table of contents: Page
Declaration of Conformity............................................................................................6
1
General Remarks..........................................................................................................72
User Manual........................................................................................................................72.1
Reading and Understanding the User Manual .....................................................................72.2
Local Safety and Accident Prevention Regulations..............................................................72.3
Images ................................................................................................................................7
2.4
Limitation of Liability ............................................................................................................72.5
Errors and Omissions..........................................................................................................72.6
Copyright.............................................................................................................................72.7
Description of Symbols........................................................................................................82.8
Scope of Delivery .........................................................................................................9
3
FLS 106 IC Scope of Delivery * ...........................................................................................93.1
FLS 106 PCB Scope of Delivery * .......................................................................................93.2
Technical Parameters ................................................................................................104
General Parameters of the FLS 106 Scanner....................................................................104.1
Technical Parameters of the Subassemblies.....................................................................11
4.2
UH DUT .......................................................................................................................114.2.1
Claw 01 and Claw 02 ...................................................................................................114.2.2
GND 25 Holder.............................................................................................................124.2.3
GND 25 Ground Plane.................................................................................................134.2.4
SH 01 Probe Holder.....................................................................................................13
4.2.5
SUH 106 Safety Enclosure...........................................................................................144.2.6
External NA5 EMERGENCY STOP Switch..................................................................144.2.7
Requirements for the ChipScan-Scanner Software............................................................154.3
Intended Use...............................................................................................................165
Staff requirements.............................................................................................................16
5.1
Risks if Not Used for Its Intended Purpose ........................................................................175.2
Safety Instructions.............................................................................................................175.3
Hazard Due to Electrical Voltage..................................................................................175.3.1
Hazard Due to Movements along the Axes ..................................................................185.3.2
Airborne noise emission if used for its intended purpose ...................................................18
5.4
Safety Devices ............................................................................................................196
Prerequisites for Safe Operation........................................................................................196.1
Operation with the Protective Enclosure.......................................................................196.1.1
Operation with a Spatial Separation.............................................................................196.1.2
Switching the Scanner on in Normal Operation and after a Power Failure.........................19
6.2
EMERGENCY STOP Switch .............................................................................................196.3

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LANGER
EMV-Technik
DE-01728 Bannewitz
[e-mail]
www.langer-emv.de
FLS 106 IC set / FLS 106 PCB set
Overcurrent Protective Device...........................................................................................196.4
Environmental Protection..........................................................................................207
Nameplate ...................................................................................................................20
8
Overview of the FLS 106 Scanner.............................................................................219
Description of the Subassemblies......................................................................................219.1
Guide Rails along the X-Axis........................................................................................219.1.1
Guide Rails along the Y-Axis (Long Side).....................................................................229.1.2
Z-Axis Tower................................................................................................................22
9.1.3
Gantry..........................................................................................................................239.1.4
Rotary Unit...................................................................................................................239.1.5
Aluminium Mounting Bracket........................................................................................249.1.6
T-Slot Table .................................................................................................................259.1.7
Control Panel with EMERGENCY STOP Device and Control LEDs.............................26
9.1.8
Height-Adjustable Machine Feet ..................................................................................269.1.9
ON / OFF Switch..........................................................................................................279.1.10
Connectors........................................................................................................................279.2
Connectors on the Z-Axis Tower..................................................................................279.2.1
Connectors on the Control Panel .................................................................................28
9.2.2
Power Supply Socket...................................................................................................289.2.3
Connector for External Emergency Stop Switch or Safety Enclosure ...........................299.2.4
Overview of Attachments...........................................................................................3010
KA 220 Camera Arm .........................................................................................................3010.1
DM-CAM Holder.3.............................................................................................................30
10.2
DM-CAM with Camera Screw............................................................................................3110.3
Clamping Pieces................................................................................................................3210.4
UH DUT with Claw 01 and Claw 02...................................................................................3210.5
GND 25 Holder..................................................................................................................3310.6
GND 25 Ground Plane.......................................................................................................33
10.7
SH 01 Probe Holder ..........................................................................................................3410.8
Delivery .......................................................................................................................3511
Acceptance Inspection.......................................................................................................3511.1
Storage..............................................................................................................................3511.2
Opening the Transport Box................................................................................................35
11.3
Packaging..........................................................................................................................3511.4
Preparations for Putting the FLS 106 Scanner into Service ...................................3612
Preparations for the Safe Operation of the FLS 106 Scanner............................................3612.1
Setting Up the FLS 106 Scanner.......................................................................................3612.2
Removing the Transport Protection from the Guide Rails..................................................38
12.3
Information on the Pre-Installed Components' Torque.......................................................3812.4

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LANGER
EMV-Technik
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www.langer-emv.de
FLS 106 IC set / FLS 106 PCB set
Checking / Releasing the EMERGENCY STOP Switch .....................................................3912.5
Putting the FLS 106 Scanner into Service for the First Time..................................4013
Installation...................................................................................................................41
14
Ensuring the System's Safe Operation ..............................................................................4114.1
Operation with the SUH 106 Safety Enclosure.............................................................4114.1.1
Operation with Spatial Separation and External NA 5 EMERGENCY STOP Switch.....4114.1.2
Checking the Cables of the Rotary Unit.............................................................................4314.2
Installing the Digital DM-CAM Microscope Camera on the FLS 106 IC..............................43
14.3
Installing the DM-CAM Holder.3 for the Microscope Camera........................................4314.3.1
Installing the Digital DM-CAM Microscope Camera......................................................4414.3.2
Installation of the Digital DM-CAM Microscope Camera on the FLS 106 PCB...................4514.4
Connecting the C13/C14 Device Lead...............................................................................4514.5
Connecting a Computer.....................................................................................................46
14.6
Connecting a Measuring Device for Near-Field Scans by Taking a Spectrum Analyzer as14.7
an Example................................................................................................................................46
Switching the FLS 106 Scanner on....................................................................................4714.8
Software Installation ..................................................................................................4815
Installing the scanner driver...............................................................................................4815.1
Installing the ChipScan-Scanner Software.........................................................................5015.2
Putting the FLS 106 Scanner into Service with the ChipScan-Scanner Software...............5115.3
Fastening the Device Under Test..............................................................................5316
Fastening a Device Under Test With the Clamping Pieces................................................5316.1
Fastening a Circuit Board with the UH DUT Universal Holder............................................5416.2
Installing the UH DUT...................................................................................................5516.2.1
Fastening the GND 25 Ground Plane for IC Measurements ..............................................5616.3
Installing the GND 25 Ground Plane ............................................................................5616.3.1
Information on Using the GND 25 Ground Plane..........................................................5716.3.2
Installing the GND 25 Holder........................................................................................5716.3.3
Installing an ICR Near-Field Microprobe...................................................................5917
Laying the Connecting Cables...........................................................................................5917.1
Connecting the ICR Near-Field Microprobe.......................................................................6117.2
Installing the BT 706 Bias-Tee...........................................................................................6317.3
Collision control of the ICR probe ......................................................................................6317.4
Installing a Near-Field Probe with the SH 01 Probe Holder ....................................6518
Installing a Near-Field Probe on the FLS 106 IC................................................................6518.1
Connecting a Near-Field Probe Directly to the FLS 106 IC Scanner.............................6618.1.1
Connecting a Near-Field Probe With a Pre-Amplifier....................................................6718.1.2
Installing a Near-Field Probe on the FLS 106 PCB............................................................6818.2
Connecting a Near-Field Probe Directly to the FLS 106 PCB Scanner.........................7018.2.1

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LANGER
EMV-Technik
DE-01728 Bannewitz
[e-mail]
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FLS 106 IC set / FLS 106 PCB set
Connecting a near-field probe with a pre-amplifier .......................................................7018.2.2
Collision Control for the Near-Field Probe..........................................................................7118.3
Information on How to Operate the FLS 106 Scanner.............................................72
19
Checking the Measuring Set-Up before Each Use.............................................................7219.1
Adjusting the Exact Height of the Probe Tip above the DUT..............................................7219.2
Estimating the Duration of a Measurement with the FLS 106 Scanner ..............................7319.3
Number of Measuring Points........................................................................................7319.3.1
Travel Distance............................................................................................................73
19.3.2
Sweep Time.................................................................................................................7319.3.3
Transmission Time.......................................................................................................7319.3.4
Storage Requirements for the Measurement .....................................................................7319.4
After Completing the Measurement..........................................................................7420
Dismantling after Completing the Measurement(s).................................................74
21
Removing the ICR Probe...................................................................................................7421.1
Removing the Near-Field Probe ........................................................................................7421.2
Removing the SH 01 Probe Holder from the FLS 106 IC...................................................7421.3
Removing the Pre-Amplifier / BT 706 Bias-Tee..................................................................7421.4
Removing a Device Under Test from the T-slot Table........................................................75
21.5
Removing a Circuit Board from the UH DUT......................................................................7521.6
Removing the UH DUT......................................................................................................7521.7
Removing the GND 25.......................................................................................................7521.8
Removing the GND 25 Holder...........................................................................................7521.9
Removing the DM-CAM Microscope Camera................................................................75
21.10
Removing the DM-CAM Holder.3 Camera Holder .........................................................7521.11
Maintenance................................................................................................................7622
Maintenance Intervals........................................................................................................7622.1
Replacing Labels and Signs ..............................................................................................7622.2
Dismantling/Disposal.................................................................................................77
23
Hazards during Dismantling/Disposal................................................................................7723.1
Dismantling........................................................................................................................7723.2
Disposal ............................................................................................................................7723.3
Customer Service.......................................................................................................7824
Warranty......................................................................................................................7925

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LANGER
EMV-Technik
DE-01728 Bannewitz
[e-mail]
www.langer-emv.de
FLS 106 IC set / FLS 106 PCB set
Declaration of Conformity1
Manufacturer:
Langer EMV-Technik GmbH
Nöthnitzer Hang 31
01728 Bannewitz
Germany
Langer EMV-Technik GmbH herewith declares that the
FLS 106 IC / FLS 106 PCB positioning system
conforms with the following relevant regulations:
- Machinery Directive 2006/42 EC
- EMC Directive 2014/30/EU
- RoHS 2011/65/EU
The system complies with the protection objectives of the Low Voltage Directive 2014/35/EU.
The following applicable standards were used to implement the requirements specified by the
aforementioned directives:
- DIN EN ISO 12100:2011 (Safety of Machinery –General Principles for Design –Risk assessment
and risk reduction)
- DIN EN 60204-1:2014-10 (Safety of Machinery –Electrical equipment of machines –Part 1:
General requirements)
- EN 61000-6-4:2007 (Generic Standards –Emission standard for industrial environments)
- EN 61000-6-2:2006 (Generic Standards –Immunity for industrial environments)
Name of the person authorised to compile the technical file:
Gunter Langer
Bannewitz, 02.04.2019
Signature:
_________________
(Signature)
G. Langer, Managing Director

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LANGER
EMV-Technik
DE-01728 Bannewitz
[e-mail]
www.langer-emv.de
FLS 106 IC set / FLS 106 PCB set
General Remarks2 User Manual2.1
This user manual enables the safe and efficient use of the FLS 106 scanner. It must be kept with
the scanner so that it is accessible for the user.
Reading and Understanding the User Manual2.2
Read the user manual carefully, observe the safety information (section 5.3) and follow the
instructions given in this manual before putting the device into service.
Local Safety and Accident Prevention Regulations2.3
The local accident prevention and general safety regulations also apply to ensure that the FLS 106
scanner is used for its intended purpose.
Images2.4
Figures have been included in this user manual to assist the reader's understanding but may differ
from the device's actual version.
Limitation of Liability2.5
In the following cases, Langer EMV-Technik GmbH can assume no liability for damage to property
and personal injury if:
- The information given in this user manual has not been observed.
- The FLS 106 scanner was operated by staff not qualified in the field of EMC.
- The FLS 106 scanner was subjected to unauthorised modifications or technical changes.
- The FLS 106 scanner was not used according to its intended purpose.
- Spare parts or accessories were used that had not been approved by EMV-Technik GmbH.
The actual scope of delivery may deviate from the illustrations and texts in this user manual due to
the customisation of orders or due to technical changes and innovations.
Errors and Omissions2.6
The information in this manual has been carefully checked and is believed to be accurate;
however, the Langer EMV-Technik GmbH assumes no responsibility for any clerical, typographical,
or proofreading errors, or omissions.
Copyright2.7
The content of this user manual is protected by copyright law and may only be used in connection
with the FLS 106 scanner. This user manual may not be used for any other purpose without the
prior written approval of Langer EMV-Technik GmbH.

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LANGER
EMV-Technik
DE-01728 Bannewitz
[e-mail]
www.langer-emv.de
FLS 106 IC set / FLS 106 PCB set
Description of Symbols2.8
Mandatory signs
Warning signs
Disconnect the mains plug
General warning sign
Wash your hands
Warning against dangerous
electrical voltage hazard
Warning against hand injury
hazard
Table 1: Symbols

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LANGER
EMV-Technik
DE-01728 Bannewitz
[e-mail]
www.langer-emv.de
FLS 106 IC set / FLS 106 PCB set
Scope of Delivery3 FLS 106 IC Scope of Delivery *3.1
Item Name of article Short name Qty.
1 4-axis positioning system FLS 106 IC 1
2 ChipScan-Scanner software / CD-ROM CS-Scanner 1
3 Holder for GND 25 GND 25 holder 1
4 Ground plane GND 25 1
5 Holder for microscope camera DM-CAM holder.3 1
6 Digital microscope camera DM-CAM 1
7 Rotary unit Rotary unit 1
8 EMERGENCY STOP switch, external NA 5 1
9 User manual FLS 106 m 1
----------------------------------------------------------------------------------------------------------------------------------
* The scope of delivery may deviate depending on the respective order.
FLS 106 PCB Scope of Delivery *3.2
Item Name of article Short name Qty.
1 3-axis positioning system FLS 106 PCB 1
2 ChipScan-Scanner software / CD-ROM CS-Scanner 1
3 Universal holder for Langer scanner UH DUT 1
4 Claw claw 01 4
5 Claw claw 02 4
6 Digital microscope camera DM-CAM 1
7 Probe holder for Langer scanner SH 01 1
8 Camera arm KA 220 1
9 EMERGENCY STOP switch, external NA 5 1
10 User manual FLS 106 m 1
----------------------------------------------------------------------------------------------------------------------------------
* The scope of delivery may deviate depending on the respective order.

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LANGER
EMV-Technik
DE-01728 Bannewitz
[e-mail]
www.langer-emv.de
FLS 106 IC set / FLS 106 PCB set
Technical Parameters4 General Parameters of the FLS 106 Scanner4.1
Figure 1: Axes of the FLS 106 scanner
Supply voltage
100 - 250 V (50/60 Hz)
Current consumption
4.5 A
Interface
USB 2.0 type B (Hi-speed)
Weight
75 kg
Dimensions (L x W x H)
(1030 x 775 x 900) mm
Table 2: General technical parameters of the FLS 106 scanner
Axes
X
Y
Z
αrotation
Max. positioning
distance
400 mm
600 mm
120 mm
±180°
Min. positioning
distance
20 µm
20 µm
20 µm
1°
Positioning speed
20 mm/s
25 mm/s
10 mm/s
90°/s
Table 3: Technical parameters of the four axes