Leybold vacuum TTR90 User manual

GA 09.220/3.02
THERMOVAC
Transmitter
TTR90
TTR90-S
Catalog numbers
128 10, 128 20
128 11, 128 21
128 12, 128 22
128 13, 128 23
128 14, 128 24
Operating Manual
Incl. Declaration of Conformity
Product Identification
In all communications with Leybold Vakuum, please specify
the information given on the product nameplate. For conven-
ient reference transfer this information into the diagram be-
low.
Typ:
No:
F-No:
V W
Leybold Vakuum GmbH,
D-50968 Köln
Validity
This document applies to products with the following catalog
numbers:
TTR90 without switching function
128 10 (DN 16 ISO-KF 80 °C)
128 11 (" NPT 80 °C)
128 12 (DN 16 CF-R 250 °C)
128 13 (" tube 80 °C)
128 14 (8 VCR 80 °C)
TTR90-S with switching function
128 20 (DN 16 ISO-KF 80 °C)
128 21 (" NPT 80 °C)
128 22 (DN 16 CF-R 250 °C)
128 23 (" tube 80 °C)
128 24 (8 VCR 80 °C)
The catalog number (No) can be taken from the product
name plate.
If not indicated otherwise in the legends, the illustrations in
this document correspond to the DN 16 ISO-KF vacuum con-
nection. They apply other vacuum connections by analogy.
We reserve the right to make technical changes without prior
notice.
All dimensions are indicated in mm.
Intended Use
The THERMOVAC Transmitters TTR90 and TTR90-S have
been designed for vacuum measurement of gases in the
pressure range of 5×10-4 … 1000 mbar.
They can be operated in connection with a Leybold Vakuum
controller for THERMOVAC transmitters or with another
evaluation unit.
Functional Principle
Over the whole measurement range, the measuring signal is
output as a logarithm of the pressure.
Trademarks
VCR® Swagelok Marketing Co.
Safety
Symbols Used
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and envi-
ronmental damage.
Caution
Information on correct handling or use. Disregard can lead
to malfunctions or minor equipment damage.
Personnel Qualifications
Skilled personnel
All work described in this document may only be carried out
by persons who have suitable technical training and the
necessary experience or who have been instructed by the
end-user of the product.
General Safety Instructions
• Adhere to the applicable regulations and take the ne-
cessary precautions for the process media used.
Consider possible reactions with the product materials.
Consider possible reactions of the process media due to
the heat generated by the product.
• Adhere to the applicable regulations and take the ne-
cessary precautions for all work you are going to do and
consider the safety instructions in this document.
• Before beginning to work, find out whether any vacuum
components are contaminated. Adhere to the relevant
regulations and take the necessary precautions when
handling contaminated parts.
Communicate the safety instructions to all other users.
Liability and Warranty
Leybold Vakuum assumes no liability and the warranty
becomes null and void if the end-user or third parties
• disregard the information in this document
• use the product in a non-conforming manner
• make any kind of changes (modifications, alterations etc.)
to the product
• use the product with accessories not listed in the product
documentation.
The end-user assumes the responsibility in conjunction with
the process media used.
Technical Data
Measurement principle thermal conductance
according to Pirani
Measurement range
(air, O2, CO, N2) 5×10-4 … 1000 mbar
Accuracy ≈10% of reading in the range
of 1×10-3 … 100 mbar
(outside of this range up to
factor 2)
Repeatability ≈2% of the measured value in
the range 1×10-3 … 100 mbar
Output signal
(measuring signal)
Voltage range 0 … ≈+10.3 V
Measurement range +1.9 V … +10.0 V
Voltage vs. pressure logarithmic, 1.286 V/decade
Error signal <0.5 V (filament rupture)
Output impedance 2×10 Ω
Minimum loaded impedance 10 kΩ, short circuit-proof
Response time ≈10 ms
Transmitter identification resistance 27 kΩreferenced
to supply common
Adjustment
Potentiometer <HV>
Potentiometer <ATM>
adjustment under 10-4 mbar
adjustment at atmospheric
pressure
Switching function TTR90-S
Setting range
with potentiometer
≈2×10-3 … 500 mbar
(≈2 rotations per pressure
decade)
Hysteresis ≈30% of reading
Relay contact
closed
open
60 V, 0.5 ADC, floating
at low pressure (LED lit)
at high pressure, error, no
supply
Supply
DANGER
The transmitter may only be connected to supply
and evaluation units that conform to the
requirements of a grounded protective extra-low
voltage (SELV-E according to EN 61010). The
connection to the transmitter has to be fused 1).
Supply voltage at transmitter +14 … +32 VDC
(ripple ≤1 Vpp)
Power consumption ≤1 W
Fuse required 1) ≤1 AT (slow)
Electrical connection FCC-68 socket, 8 poles,
with screening
Sensor cable 8 poles, plus shielding
Cable length ≤100 m (8×0.14 mm2)
Grounding concept
Vacuum connection
to signal common
Supply common
to signal common
→"Electrical Connection"
connected via 10 kΩ
(voltage difference ≤±50 V)
conducted separately, for
differential measurement
Materials exposed to vacuum
Vacuum connection
Filament
Feedthrough
Baffle (only version
DN 16 ISO-KF)
Other materials
stainless steel
W
glass
stainless steel
Ni, Cu, NiFe
Internal volume
128 10, 128 20
128 11, 128 21
128 12, 128 22
128 13, 128 23
128 14, 128 24
≈2 cm3
≈2 cm3
≈10 cm3
≈2 cm3
≈2 cm3
Admissible pressure ≤10 bar (absolute)
limited to inert gases
1) Leybold Vakuum controllers fulfill these requirements.

Admissible temperatures
Operation
Vacuum connection
128 10, 128 20
128 11, 128 21
128 12, 128 22
128 13, 128 23
128 14, 128 24
Filament
Storage
+5 … +60 °C
<80 °C
<80 °C
<250 °C
<80 °C
<80 °C
120 °C
–20 … +65 °C
Relative humidity ≤80% at temperatures up to
≤+31 °C, decreasing to 50%
at +40 °C
Mounting orientation any
Use indoors only
altitudes up to 2000 m NN
Type of protection IP 40
Dimensions [mm]
19.35
128 13
128 23
½" tube
128 12
128 22
DN 16 CF-R
121.6
19.4
128 10
128 20
DN 16 ISO-KF
50
65
45
68.3
28
128 14
128 24
8 VCR
female
47.85
128 11
128 21
" NPT
41.4
Weight
128 10, 128 20
128 11, 128 21
128 12, 128 22
128 13, 128 23
128 14, 128 24
100 g
100 g
160 g
120 g
120 g
Measuring Signal vs. Pressure
1E+05
1E+04
1E+03
1E+02
1E+01
1E+00
1E–01
1E–02
1E–03
1E–04
1E–05
sensor error
underrange
overrange
0.0 0.5 1.0 1.5 2.5 3.5 4.5 5.5 6.5 7.5 8.5 9.5 10.52.0 3.0 4.0 5.0 6.0 7.0 8.0 9.0 10.0
Pressure p
Measuring signal U[V]
Pa
torr
mbar
p = 100.778(U-c) ⇔U = c + 1.286log10 p
valid in the range 5×10-4 mbar <p< 1000 mbar
3.75×10-4 Torr <p< 750 Torr
5×10-2 Pa <p< 1×105Pa
Up c Up c
[V] [mbar] 6.143 [V] [micron] 2.448
[V] [µbar] 2.287 [V] [Pa] 3.572
[V] [Torr] 6.304 [V] [kPa] 7.429
[V] [mTorr] 2.448
where p pressure
U measuring signal
c constant (pressure unit dependent)
Gas Type Dependence
Indicated pressure (transmitter calibrated for air)
102
8
6
4
2
101
8
6
4
2
100
8
6
4
2
10–1
8
6
4
2
10–2
8
6
4
2
10–3
p (mbar)
peff (mbar)
10–3 246 10–2 246 10–1 246 100246 101246 102
H2He Ne
Xe
Ar
Freon 12
Water
vapor
Air
O2
CO
N2
Kr
Indication range
above 10-2 mbar
CO2
Calibration factors for the pressure range below 1 mbar
peff = C × indicated pressure
Gas
type
Calibration
factor C
Gas type Calibration
factor C
He
Ne
Ar
Kr
Xe
0.8
1.4
1.7
2.4
3.0
H2
air, O2, CO, N2
CO2
water vapor
Freon 12
0.5
1.0
0.9
0.5
0.7
Installation
Vacuum Connection
DANGER
Caution: overpressure in the vacuum system
>1 bar
Injury caused by released parts and harm
caused by escaping process gases can result if
clamps are opened while the vacuum system is
pressurized.
Do not open any clamps while the vacuum
system is pressurized. Use the type clamps
which are suited to overpressure.
DANGER
Caution: overpressure in the vacuum system
>4 bar
KF connections with elastomer seals (e.g.
O-rings) cannot withstand such pressures. Pro-
cess media can thus leak and possibly damage
your health.
Use O-rings provided with an outer centering
ring.
DANGER
Caution: protective ground
Incorrectly grounded products can be extremely
hazardous in the event of a fault.
The transmitter must be electrically connected to
the grounded vacuum chamber. This connection
must conform to the requirements of a protective
connection according to EN 61010:
• CF, NPT and 8 VCR connections fulfill this
requirement
• For transmitters with a KF connection, use a
conductive metallic clamping ring.
• For the ½" tube take appropriate measures to
fulfill this requirement.
Caution
Caution: vacuum component
Dirt and damages impair the function of the
vacuum component.
When handling vacuum components, take ap-
propriate measures to ensure cleanliness and
prevent damages.
Caution
Caution: dirt sensitive area
Touching the product or parts thereof with one's
bare hands increases the desorption rate.
Always wear clean, lint-free gloves and use
clean tools when working in this area.
The transmitter may be mounted in any orientation.
To keep condensates and particles from getting into
the measuring chamber preferably choose a hori-
zontal to upright position and possibly use a seal
with a centering ring and filter. If adjustment should
be possible after the transmitter has been installed,
be sure to install it so that Potentiometers <HV> and
<ATM> can be accessed with a screwdriver
(→"Adjustment").
Remove the protective lid and mount the product to the
vacuum system.
or
Clamp
Seal with centering ring
Seal with centering
ring and filter
Protective lid
Keep the protective lid.
ga09.220/3.02 (0202)
Original: German GA 09.220/3.01 (0202)

Electrical Connection
Make sure the vacuum connection is properly made
(→"Vacuum Connection").
If no sensor cable is available, make one according to
the following diagram.
Pin assignment
Pin 1 Supply (+14 ... +32 VDC)
Pin 2 Supply common
Pin 3 Signal output
(measuring signal)
Pin 4 Identification
Pin 5 Signal common
Pin 6, 8 Switching contacts
10
10
Ident
8
3
5
4
1
2
–
+
–
+
6
10 k
Setpoint
Signal
8 pole FCC-68 plug
1
8
Connect the sensor cable to the transmitter.
Connect the sensor cable to the controller.
Operation
When the supply voltage is being applied, the measuring
signal is available between pins 3 and 5 (relationship be-
tween measuring signal and pressure →"Technical Data").
Allow a stabilization period of at least 2 minutes. It is advis-
able to operate the transmitter continuously, irrespective of
the pressure.
Gas Type Dependence
The measurement value is gas dependent. The pressure
reading applies to dry air, O2, CO and N2. For other gases, it
has to be converted (→"Technical Data").
If the transmitter is operated with an Leybold Vakuum con-
troller, a calibration factor for correction of the actual reading
can be applied (→of the corresponding controller).
Adjustment
The transmitter is factory calibrated.
Due to long time operation or contamination, a zero drift
could occur and zero adjustment may become necessary.
Periodically check the zero and adjust it if necessary.
The zero must be adjusted at the ambient temperature at
which the transmitter is normally operated.
If you are using a seal with centering ring and filter,
check that they are clean or replace them if necessary
(→"Deinstallation").
Activate the transmitter.
Evacuate it to p << 10-4 mbar and wait at least
2 minutes.

Adjust the <HV> potentiometer
by means of a 1.5 mm screwdriver …
… to 1.55 V or … to 5×10-4 mbar
… and then turn it coun-
terclockwise ≈¼ turn.
Vent the transmitter with air to atmospheric pressure,
and wait at least 2 minutes.

Adjust the <ATM> potentiometer
by means of a 1.5 mm screwdriver …
… to 10.0 V or … to 1×103mbar.
Switching Function TTR90-S
By pressing the <SETPOINT> button the lower switching
threshold becomes available at the signal output.
With the <SETPOINT> potentiometer the built-in (lower)
threshold can be set in the range of ≈2×10-3 … 500 mbar.
While the <SETPOINT> button is depressed, you can raise
the threshold by one pressure decade per two clockwise
turns. The upper threshold is 30% higher (hysteresis).
DANGER
Caution: malfunction
If processes are controlled via the signal output,
it should be borne in mind that by pressing the
<SETPOINT> button the measuring signal is
suppressed and the lower threshold is output in-
stead.This may lead to malfunctions.
Press the <SETPOINT> button only when you
are sure that no damages can arise from a mal-
function.
The switching function is available as a potential free relay
contact (normally open) at pins 6 and 8. Below the set thresh-
old, the contact is closed and the green lamp is lit.
Lamp
Deinstallation
DANGER
Caution: contaminated parts
Contaminated parts can be detrimental to health
and environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
when handling contaminated parts.
Caution
Caution: vacuum component
Dirt and damages impair the function of the vac-
uum component.
When handling vacuum components, take ap-
propriate measures to ensure cleanliness and
prevent damages.
Caution
Caution: dirt sensitive area
Touching the product or parts thereof with one's
bare hands increases the desorption rate.
Always wear clean, lint-free gloves and use cle-
an tools when working in this area.
Vent the vacuum system.
Turn the transmitter off.
Unplug the sensor cable.
Remove the transmitter from the vacuum system.
Protective lid

Maintenance, Troubleshooting
In case of severe contamination or a malfunction, the sensor
can be replaced.
Transmitter failures due to contamination are not
covered by the warranty.
Spare Parts
When ordering spare parts, always indicate:
• all information on the product nameplate
• description and ordering number according to the spare
parts list
Sensor Ordering number
for transmitter
128 10, 128 20
128 11, 128 21
128 12, 128 22
128 13, 128 23
128 14, 128 24
350-990
350-991
350-992
350-993
350-994
Returning the Product
WARNING
Caution: forwarding contaminated products
Contaminated products (e.g. radioactive, toxic,
caustic or microbiological hazard) can be detri-
mental to health and environment.
Products returned to Leybold Vakuum should
preferably be free of harmful substances. Adhere
to the forwarding regulations of all involved
countries and forwarding companies and enclose
a duly completed declaration of contamination.
Products that are not clearly declared as "free of harmful
substances" are decontaminated at the expense of the
customer.
Products not accompanied by a duly completed declaration of
contamination are returned to the sender at his own expense.
Disposal
DANGER
Caution: contaminated parts
Contaminated parts can be detrimental to health
and environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
when handling contaminated parts.
N
WARNING
Caution: substances detrimental to the environ-
ment
Products or parts thereof (mechanical and elec-
tric components, operating fluids etc.) can be
detrimental to the environment.
Dispose of such substances in accordance with
the relevant local regulations.
Separating the components
After disassembling the product, separate its components
according to the following criteria:
• Contaminated components
Contaminated components (radioactive, toxic, caustic, or
biological hazard etc.) must be decontaminated in accord-
ance with the relevant national regulations, separated
according to their materials, and disposed of.
• Other components
Such components must be separated according to their
materials and recycled.
Declaration of Contamination
Legally binding declaration:
I/we hereby declare that the information on this form is
complete and accurate and that I/we will assume any further
costs that may arise. The contaminated product will be dis-
patched in accordance with the applicable regulations.
Organization/company
Address
Post code, place
Phone Fax
Email
Name
Company stamp
Date and legally binding signature
The service, repair, and/or disposal of vacuum equipment and com-
ponents will only be carried out if a correctly completed declaration
has been submitted. Non-completion will result in delay.
This declaration may only be completed (in block letters) and signed
by authorized and qualified staff.
Reason for return


Operating fluid(s) used
Description of product
Type
Article No.
Serial No.
The product is free
of any substances
which are damaging
to health
yes G
This form can be downloaded from our website.
Copies: Original for addressee
1 copy for accompanying documents
1 copy for file of sender


Harmful substances, gases and/or
by-products
Please list all substances, gases, and by-products
which the product may have come into contact with:
Measures in case of
spillage
First aid in case
of contact
Dangerous
material class
Trade/product name
manufacturer
Chemical name
(or symbol)
*) Products thus
contaminated
will not be
accepted with-
out written
evidence of
decontami -
nation!


Process related contamination of product:
toxic no Gyes G
corrosive no Gyes G
biological hazard no Gyes G*)
explosive no Gyes G*)
radioactive no Gyes G*)
other harmful substances no Gyes G
Declaration of Conformity
We, Leybold Vakuum, hereby declare that the
equipment mentioned below complies with the
provisions of the Directive relating to electrical
equipment designed for use within certain volt-
age limits 73/23/EEC and the Directive relating
to electromagnetic compatibility 89/336/EEC.
THERMOVAC Transmitter
TTR90
TTR90-S
Part numbers
128 10 128 20
128 11 128 21
128 12 128 22
128 13 128 23
128 14 128 24
Standards
Harmonized and international/national standards and
specifications:
• EN 61010 (Safety requirements for electrical equipment
for measurement, control and laboratory use)
• EN 50081-1 (Electromagnetic compatibility generic
emission standard)
• EN 50082-2 (Electromagnetic compatibility generic
immunity standard)
Signatures
Leybold Vakuum GmbH, Köln
12 June 2001 12 June 2001
Günter Hauck
Division manager
LV-LISS
Hans Rottländer
Product manager
LV-LISS
Bonner Strasse 498 (Bayenthal)
D–50968 Köln
Deutschland
Tel [phone]
Fax [phone]
[email protected]
www.leyboldvac.de