LEYBOLD DRYVAC P Series User manual

1
DRYVAC 25/50/100 P Manual
GA 01.414/2.02 - 1/97
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GA 01.414/2.02
DRYVAC P
Operating Instructions

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DRYVAC 25/50/100 P Manual
GA 01.414/2.02 - 1/97
Contents Page
Safety Information ......................................................2
1 Description............................................................4
1.1 DesignandFunction ........................................4
1.2 TechnicalData .................................................7
1.3 StandardEquipment ........................................8
1.4 OrderingData ...................................................8
2 Installation ............................................................9
2.1 AdaptingthePumptotheProcess ..................9
2.1.1 ConvertingtoETCHProcesses ............ 9
2.1.2 ConvertingfromETCHto
CVDProcesses ......................................9
2.1.3 ConvertingtoLTOProcesses ..................9
2.1.4 MainInertGasValve ..............................9
2.2 SettingupthePump ......................................11
2.3 ElectricalConnections ...................................11
2.3.1 ConnectiontothePlantControl
Equipment ............................................11
2.3.2 ACPowerSource .................................13
2.4 ConnectingtheCoolingWater .......................14
2.5 CheckingtheDirectionofRotation ................14
2.6 ConnectingtheInertGasSupply ...................15
2.7 ConnectingtheIntakeLine ............................15
2.8 ConnectingtheExhaustLine .........................15
3 Operation.............................................................16
3.1 Start-upandOperation ..................................16
3.2 Shutdown .......................................................16
3.3 StoringandShipping ......................................16
4 Maintenance........................................................18
4.1 RoutineMaintenance .....................................18
4.2 ReplacingtheExhaustSilencer .....................18
5 Troubleshooting.................................................19
Appendix A - Shutdown for Particulate-
Generating Processes ..............................................22
Note:
Referencestoillustrationsconsist of (figurenumber/item
number). For example, (1/2) refers to Figure 1, Item 2.
DRYVACisaregisteredtrademarkofLeybold.
Safety Information
Hazard analyses per European standard EN 1012 were
conducted for the DR YVAC® 25, 50 and 100 P pumps.
Every person involved with connecting, operating or
maintaining these pumps shall have read and under-
stood this DR YVAC operating instruction manual in or-
derto avoid hazardsand operatingmalfunctions.
DRYVACP pumps aredesigned topumpdown vacuum
chambers to pressure values in the rough and fine
vacuumranges, andare intendedfor industrialuse.
Precautionary notes in these instructions:
Warning – This indicates procedures and operations
which must be strictly observed to prevent hazards to
persons.
Caution – This indicates procedures and operations
which must be strictly observed to prevent damage or
destructionofthe pump.
Media compatibility
DRYVAC P pumps are authorized for use only in those
applicationsand processes whichare listedin Table1of
this manual. Contact Leybold before using a DR YVAC
forapplicationsand processeswhichare notlisted.
Warning Standard DRYVAC P pumps are not
suited for pumping media which
could ignite or explode. If these
pumps are nonetheless used in such
applications, the owner / operator
must take the precautionary mea-
sures required for explosion protec-
tion in compliance with legal
requirements.
Electrical Safety
Warning Disconnect the pump from the main
power supply before beginning any
assembly or disassembly work. Take
measures to ensure that the pump
cannot be started. The electrical con-
nections shall be made only by a
qualified and licensed electrician, in
accordance with local codes.

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DRYVAC25/50/100 P Manual
GA 01.414/2.02 - 1/97
Mechanical Safety
Warning Do not expose any parts of the body to
the vacuum. In particular do not oper-
ate the pump with flanges open, or
loosen any flange, oil filling or drain
screws when a vacuum is present,
even if the pump is switched off.
Remove the cover panels only when the pump is
switchedof f.
Do not remove the pump or perform any maintenance
work before it has been vented and has come to a com-
pletestop.
Protection Against Hazardous Gases
The inlet and exhaust line connections must be tight.
Hazardousgases could escapeat leaksor thegases be-
ingpumped could reactwith humidair .
The pump’ s overall leak rate is <1·10 -5 mbar·l·s -1. Install
a housing evacuation unit when pumping hazardous
gases.
Wheneverthe pump isopened to:
• refitthepurge-control plate
• checkthedirection ofrotation
• removethe intake orexhaust line
• removethe pump from the system
thefollowingsafetyinstructions mustbeobserved:
Warning If the DRYVAC has pumped hazard-
ous gases, you must determine the
nature of the hazard and take the ap-
propriate safety precautions. Comply
with all safety regulations. Take ad-
equate safety precautions before
opening the intake or exhaust.
If necessary, use gloves, a respirator
and/or protective clothing and work
under an exhaust hood.
DRYVACsthatareusedin semiconductor processes,for
example, can be contaminated with process gases.
These gases may be toxic and hazardous to health. In
addition, deposits with similarly dangerous properties
canform inside the pump.Many of these gasesand de-
positscan seriouslycorrode thepump, especiallywhen
theyare mixed withhumid air .
Toavoid health hazardsand corrosion damagewhenthe
pump is detached from the system, lay a container of
desiccant on the inlet splinter guard and then seal the
pump immediately at all flange connections. Store the
pumpwith adesiccant, in a polyethylene bag.
Handling PFPE
Since PFPE is used when pumping corrosive media, it
canbe contaminatedwith these media during use.Thus
it is necessary to take appropriate precautionary mea-
suresdepending on themedium that hasbeen pumped
(see“Protectionagainsthazardous gases”).
Warning Hazardous decomposition products
may be formed at temperatures ex-
ceeding 350°C (660°F). Thus smok-
ing is prohibited in rooms where
PFPE is being used or handled; do
not expose cigarettes or other to-
bacco products to PFPE.
Allsafetyregulations applicabletohandling themedium
beingpumpedshallalso be observedwhenworkingwith
PFPE and the pump.
PFPE must be reclaimed or disposed of as a toxic
waste.
Returning Equipment
Complete the form at the back of this manual before re-
turningequipmentto Leyboldforservice. This formnoti-
fiesusof anytoxicor other harmfulproducts(as defined
bythe applicableregulations suchas theCommon Mar-
ket Guideline L360, 1976/1979 or VBG 16) that may ex-
istinor nearthe equipment. Attachthe formtothe pump
orenclose itwith thepump. Thisstatement detailingthe
contamination is required to satisfy legal requirement
andto protect ouremployees.

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DRYVAC 25/50/100 P Manual
GA 01.414/2.02 - 1/97
Section1—Description
1 Description
1.1 Design and Function
The DRYVAC 25P, 50Pand 100 P are dry-compression
vacuumpumps designed especiallyfor semiconductor
etching and CVD processes. Refer to Section 1.2 for
technicaldata.
Pump operating principle
DRYVACs are four-stage hook-and-claw vacuum
pumps. Figure 1 illustrates the DR YVAC's operating
principle.
Thetworotors (1/1)turnin opposite directionsinsidethe
pumping chamber .As they rotate, they open and close
the intake (1/5) and outlet (1/4) slots with each cycle.
The pumping chamber is divided by the rotors. Gas is
drawn in on the one side of the rotors and compressed
onthe otherside.
The top sketch shows the beginning of the suction and
compression cycle. As the rotors rotate, the sealed
space above the rotors (1/2) is reduced in size and the
gasis compressed. Atthe same time, the rightrotor be-
gins opening the inlet slot and gas is drawn into the
pumpingchamberbelowthe rotors.
Inthe center sketch, the left rotor isstarting to open the
outlet slot, and compressed gas is being discharged
fromthe pumping chamber .
Inthe bottomsketch, the cycle has beencompleted and
the inlet and outlet slots are closed. Once the rotors
have passed through the neutral position, the cycle
startsagain.
Design
There are four pumping stages (2/2) located one above
theother .The stagesare pinned together .
The gas enters the pump through the intake port, is
pumpedthroughfour pump stages,flowsthrough an ex-
haustsilencer (2/4), and through anon-return valve into
theexhaust.
Therotorsare drivenby two verticalshafts connectedto
themotor (2/1)and synchronized by gears.
Figure1 Pumpoperatingprinciple
Key to Figure 1
1 Rotors
2 Compressionchamber
3 Intakechamber
4 Outletslot
5 Intakeslot
Thepumpingchamber isfreeof sealantsandlubricants;
however , PFPE(perfluoropolyether) isused tolubricate
thegearing and thelower bearings. The upper bearings
arePFPE-grease lubricated.
Pistonrings are used to sealeach shaft where it passes
through the stages. The gear box is isolated from the
pumpingchamberby pistonrings and radialshaft seals.
Theupper bearingsare isolated by shaft seals.
Thebearings and sealsare mountedin thewater-cooled
upperand lowerend plates. The supply ofcooling water
is regulated by a thermostat (2/3). The pump stages are
aircooled.
The pump is fully enclosed by panels, which can easily
beremoved for maintenancepurposes. An air outlet for
cabinetventilation is on thetop of the DR YVAC.

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DRYVAC 25/50/100 P Manual
GA 01.414/2.02 - 1/97
Section1—Description
Key to Figure 2
1 Motor 6 Checkvalve
2 Pumpstages 7 Pressureregulator3.0bar
3 Thermostatvalve 8 Interstagepurgeblock
4 Exhaustsilencer 9 Purge-controlplate(reversible)
5 Pressureregulator1.5bar
Figure2 SectionaldrawingofaDRYVAC100P

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DRYVAC 25/50/100 P Manual
GA 01.414/2.02 - 1/97
Section1—Description
Figure3 SimplifiedschematicoftheDRYVACP
Inert Gas Barrier and Purge Gas Device
TheDRYVACP has amechanismfor barriergas andfor
purgegas.
Inert gas for these devices is connected at the back of
the pump. It flows into the pump through a solenoid
valve and two pressure reducers (1.5 bar and 3.0 bar).
Thebarrier gas, whichflows through the1.5 bar regula-
tor, protects the lower radial shaft seals and bearings
againstaggressive media andparticles. In addition,the
barriergas ispumped to the exhaust pressureswitches
andprotectsthem againstcontamination.
The purge gas, which flows through the 3.0 bar regula-
tor, the interstage purge block, the purge-control plate,
connecting pipes and nozzles, and into the three lower
pumpstages,protectsthepumpstagesagainst deposits.
Electrical Equipment
Theelectrical equipmentofthe DR YVAC P includesfour
pressureswitches,threethermalswitches, and onesole-
noidvalve. These devicesare normallyconnected to the
plant'scontrol equipmentfor the purpose of controlling
thepump.
The exhaust pressure is monitored by two pressure
switches. The first switch warns of an abnormally high
exhaust pressure, while the second switch signals that
theexhaustpressure istoo high forcontinued pumpop-
eration.
Thegearboxoilpressure ismonitoredbyan oil-pressure
switch. The contacts of this switch can be used to indi-
catewhetherthe pumpisrunning or shutdown.
The fourth pressure switch monitors the barrier-gas
pressure.
The DRYVAC P is equipped with two thermal switches
thatmonitorpumptemperature.The first switchwarnsof
an abnormally high temperature, while the second
switchsignalsthatthetemperature is toohighforcontin-
uedpumpoperation.
The third thermal switch monitors the motor tempera-
ture.
Thepump’ s supplyof inert gas is controlledby itsinert-
gas-solenoidvalve.
The connections for the switches and the inert-gas-
solenoidvalve are brought togetherin two sub-D plugs
on the back of the DR YVAC.
Dimensionsinmm
abb
1b 2hh 1h 2II 1I 2I 3
25P 400 370 178 149 557 573 173 563 278 50 145
50P 400 370 178 149 587 603 173 563 278 50 145
100P 395 394 135 152 598 614 196 652 275 50 145
Dimensionsininches
abb
1b 2hh 1h 2II 1I 2I 3
25P 53/4149/16 75
7
/82115/16 229/16 613/16 223/16 11 2 53/4
50P 153/4149/16 75
7
/8231/8233/4613/16 223/16 11 2 53/4
100P 159/16 151/255/16 623
9
/16 243/16 723/32 2511/16 1013/16 25
3
/4
h:upperedgeofintakeport
Figure4 Dimensionaldrawing
only100P

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DRYVAC 25/50/100 P Manual
GA 01.414/2.02 - 1/97
Section1—Description
Figure5 Pumpingspeedcurves
1.2 Technical Data
DRYVAC 25P 50P 100P
Pumping Speed
50Hzoperation ......................25 m3 · h-1 (14.7 cfm) 45 m3 · h-1 (26.5 cfm) 100 m3 · h-1 (59 cfm)
60Hzoperation ......................30 m3 · h-1 (17.7 cfm) 55 m3 · h-1 (32.4 cfm) 100 m3 · h-1 (59 cfm)
Ultimatepressure*withpurge-controlplatesetto“ETCH”
50Hzoperation ................. 4·10-2 mbar(3x10 -2 Torr) 4·10-2 mbar(3x10-2 Torr) 1.5·10-2 mbar(1.1x10-2 Torr)
60Hzoperation ........... 2.5·10-2 mbar(1.9x10 -2 Torr) 2.5·10-2 mbar(1.9x10-2 Torr) 1.5·10-2 mbar(1.1x10 -2 Torr)
Maximumintakepressure
incontinuousoperation .................. 1000mbar(750Torr) 300mbar(225Torr) 150mbar(112Torr)
Motorpower .............................................2.8 kW (3.8 hp) 2.8 kW (3.8 hp) 4.0 kW (5.4 hp)
Rotationalspeedofpump
50Hzoperation .........................................3000rpm 3000rpm 3000rpm
60Hzoperation ........................................ 3600rpm 3600rpm 3000rpm
Noiselevelwiththeexhaust
lineconnected .................................................... 62dB(A) 62dB(A) 68dB(A)
Coolingwaterrequirements(approx.)at
a water temp. of 15ºC (59ºF) ..... 70 l · hr -1 (18.5 gal/hr) 70 l · hr -1 (18.5 gal/hr) 100 l · hr -1 (26.4 gal/hr)
Maximumcoolingwatertemp. ...................... 25ºC (77ºF) 25ºC (77ºF) 25ºC (77ºF)
Coolingwaterpressure* ...........2 –10bar(14 – 130 psig) 2 – 10 bar (14 – 130 psig) 2 – 10 bar (14 – 130 psig)
Cooling water connection, female threads .... NPT 1/2" NPT 1/2" NPT 1/2"
Inert gas pressure* ............... 4 – 10 bar (43 – 130 psig) 4 – 10 bar (43 – 130 psig) 4 – 10 bar (43 – 130 psig)
Inert gas connection, female threads .............. NPT 3/8" NPT 3/8" NPT 3/8"
Inert gas flow ........................................Refer to Table 1 Refer to Table 1 Refer to Table 1
Barrier gas pressure* ........................... 1.5 bar (7 psig) 1.5 bar (7 psig) 1.5 bar (7 psig)
Purge gas pressure* .......................... 3.0 bar (29 psig) 3.0 bar (29 psig) 3.0 bar (29 psig)
Lubricant quantity in gear box ..................0.75 l (0.8 qt) 0.75 l (0.8 qt) 0.8 l (0.85 qt)
Maximum ambient temperature ................ 40ºC (104ºF) 40ºC (104ºF) 40ºC (104ºF)
Weight .................................................170 kg (375 lbs) 180 kg (397 lbs) 210 kg (463 lbs)
Intake port ................................................ DN 63 ISO-K DN 63 ISO-K DN 63 ISO-K
Exhaust port ................................................... DN 25 KF DN 25 KF DN 40 KF
*All pressures given in bar or mbar are absolute values.

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DRYVAC25/50/100 P Manual
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TABLE 1 – Process Settings*
Process Processes Thermostat Purge Control Inert Gas
Group Valve Plate Consumption
NI/hr
A Al-Etching,Si-Etching 4 ETCH 1000 – 1500
Poly-Si-Etching,SiO 2 -Etching, Tungsten-Etching sidefaces out
B PECVD-WSi2, MOCVD, 4 CVD 4000 – 5000
PECVD-SiO2, LPCVD-SiO2, sidefaces out
PECVD-Si3N4, LPCVD-Si3N4,
PECVD-Poly-Silicon, LPCVD-Poly-Silicon,
PECVD-TEOS, LPCVD-TEOS,
PECVD-W, LPCVD-W
PECVD-PSG,
PECVD-BPSG,
Ionimplanter
C†LTO 2 CVD 6000 – 7000
LPCVD-PSG, LPCVD-BPSG sidefaces out
D†LPCVD-WSi22 CVD 4000 – 5000
sidefaces out
* ConsultyouLeybold salesrepresentativeto confirmthecorrect processsettingfor youapplication.
†AdditionalDR YVAC modificationsmay benecessary for theseapplications. Consultyour Leyboldsales
representativeforadditional information.
Section1—Description
1.3 Standard Equipment
The DRYVAC P is delivered ready for operation with its
gearbox filledwith PFPE (perfluoropolyether) lubricant.
A sealing disk with dirt trap and a union flange are at-
tachedto theintake port.
The intake and exhaust ports, the water inlet and outlet
fittings,and theinert gasfitting aresealed forshipping.
Thepumpis shippedwiththe following:
•A2-meter (6.5-foot)main power cable without plug.
•AnAllen key for removingor installing the exhaust
silencer (refer to Section 4.2).
•The mating connectors for the DR YVAC's X18 and
X19sub-D connectors (refer toSection 2.3.1).
•A purge nozzle for L TO processes (refer to Section
2.1.3).
1.4 Ordering Data
Catalog No.
DRYVAC 25P ....................................................... 138 13
DRYVAC 50P ....................................................... 138 33
DRYVAC100Pwith3-phasemotor
200-208-240/400-480 V*, 60 Hz, 3 phase .... 138 74
200/400 V*, 50 Hz, 3 phase ...........................138 73
Repairkit:
DRYVAC 25/50 P .........................................899552
DRYVAC 100 P ............................................899555
ExhaustsilencerSD25-501 ................................137 50
Drycanisterforshippingandstorage ........ . 200 78 563
*Allvoltage ±10%fromvaluelisted.

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DRYVAC 25/50/100 P Manual
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2 Installation
2.1 Adapting the Pump
to the Process
Warning If the DRYVAC has pumped hazard-
ous gases, you must determine the
nature of the hazard and take the ap-
propriate safety precautions. Comply
with all safety regulations. Take ad-
equate safety precautions before
opening the intake or exhaust.
The DRYVAC is delivered set up for the processes of
group B in Table 1 – unless specified otherwise by the
sales order . This setup opens the purge-gas supply to
theindividualpump stages.
If your process is in group A of Table 1, you must re-
move the cover panels of the pump, and reverse the
purge-controlplate asdescribed inSection 2.1.1.
2.1.1 Converting to ETCH Processes
For the ETCH processes listed in group A of Table 1, re-
verse the purge-control plate. Turning the plate so that
its"ETCH"side facesout shuts of fthe purge-gassupply
tothe pumpstages.
If LTO processes were being run with the CVD setting,
follow the procedure in Section 2.1.3; however , replace
the installed nozzle of the 3rd pump stage with a ∅
0.6 nozzle.
Reverse the purge-control plate as follows (see Fig-
ure 6):
1. Open the 1/4-turn retaining clips on top of the
pump, and take of f the two top covers.
2. Open the four 1/4-turn retaining clips on the rear
panel, and take of f the panel.
3. Unscrew the socket-head capscrews holding on
the side panels, and remove panels.
4. Unscrew the eight socket-head capscrews of the
purge-controlplate.
5. Turnoverthepurge-controlplate, andreinstallitsothat
thesidemarked“ETCH”isvisiblefromtheoutside; en-
surethatitsrubbergasketisalignedcorrectly .
6. Reassemblethepump cabinet.
Section2—Installation
2.1.2 Converting from ETCH to CVD
Processes
When converting from ETCH to CVD processes (the
processes of groups B, C and D in Table 1), follow the
procedure in Section 2.1.1; however , the purge control
panelmust be turnedso thatthe word CVDis facingout.
2.1.3 Converting to LTO Processes
For LTO processes, the nozzle of the 3rd pump stage
(6/4 or 6/7) must be replaced by the nozzle enclosed
separately with the pump. Replacing this nozzle in-
creasesthe purge gas flow inthe 3rd pump stage.
Replacethe nozzle as follows(see Figure 6):
1. Open the 1/4-turn retaining clips on top of the
pump, and take of f the two shells.
2. Open the four 1/4-turn retaining clips on the rear
panel, and take of f the panel.
3. Unscrew the socket-head capscrews holding on
the side panels, and remove panels.
4. For DRYVAC 25/50 pumps only , remove the tube
connector (6/1) from the connection block (6/3).
5. Unscrew the eight socket-head capscrews of the
purge-control plate (6/2 or 6/8), and remove plate.
6. For DRYVAC 25/50 pumps only , pull of f the connec-
tionblock (6/3) from the pump.
7. Unscrew the ∅0.6 nozzle (6/4 or 6/7); then screw
in the ∅0.8 nozzle.
8. For DRYVAC 25/50 pumps only , reinstall the con-
nection block and tube connector . Be careful not
to damage the O-rings on the connection block.
9. Install the purge-control plate so that the side
marked "CVD" is visible from the outside. Observe
the correct alignment of the sealing strap.
10.Reassemble the pump cabinet.
2.1.4 Main Inert Gas Valve
Standard DR YVAC P models have a 24 V AC/DC main
inertgas valve. However ,this valveis lockedin theopen
bypass position (manual override). In this position, the
purgewillflowcontinuously .
Referto Section 2.3.1for instructions ifyou want touse
24 V to open and close this valve.

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DRYVAC 25/50/100 P Manual
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Section2—Installation
Figure6 Conversionofthepurge-controlplateandexchangeofthenozzleforLTO
Key to Figure 7
DRYVAC 25/50 P
1 Tubeconnector
2 Purge-controlplate(reversible)
3 Interstagepurgeblock
4 Nozzle
5 3rdpumpstage
DRYVAC 100 P
6 Interstagepurgeblock
7 Nozzle
8 Purge-controlplate(reversible)

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DRYVAC 25/50/100 P Manual
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Section2—Installation
2.2 Setting up the Pump
Eyebolts are provided for lifting and moving the pump.
Do not tip or turn the pump during movement. Do not
standbeneaththe suspendedpump during movement.
Set the pump on a flat even surface in a dry location.
Lockthe casters afterthe pump is in place.
The pump is of safety class IP 20. Protect the pump
againstdrippingand splashed water .
The ambient temperature must not exceed 40ºC
(104ºF).Do not obstructthe ventilationgrids. If installing
thepump in anenclosed cabinet or system, ensurethat
sufficientventilation isavailable.
2.3 Electrical Connections
Warning Electrical connections should be
made only by a qualified and
licensed electrician, in accordance
with local codes. Disconnect the
pump from all voltages before begin-
ning any assembly or disassembly
work. Take measures to ensure that
the pump cannot be started.
2.3.1 Connection to the Plant Control
Equipment
Seven switches and one solenoid valve are installed in
theDRYVAC. Theconnection oftheswitches andof the
main inert gas valve are brought together in two sub-D
connectors (X18 and X19) at the back of the housing.
Theswitchcontacts openinresponse to abnormaloper-
atingconditions (Figure 7).
Thevoltage source for the control circuits mustbe pro-
videdfromthe secondarywindingsof anisolationtrans-
former or from some other isolated source. In addition,
ensure that the control voltage applied to X18 does not
exceed 24 V (AC or DC), and that the contact load of
each switch does not exceed 24 V AC/DC, 250 mA.
The DRYVAC’s input and output signals must be posi-
tively isolated from potentially hazardous voltages in
down-line processing. This isolation shall be ef fective
even if there is a defect in the electrical system.
Figure7 Switchandmaininertgasvalveconnections

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DRYVAC 25/50/100 P Manual
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Section2—Installation
Caution Do not connect equipment to termi-
nals other the ones listed in the fol-
lowing instructions.
Failure to connect the switches as
described may result in major dam-
age to the pump, and lead to a loss of
warranty.
Connect the switches and solenoid valve to the plant
controlequipmentasdescribed below .
Connect a control voltage of 24 V (max.) AC or DC to
connector X18, pin 6. This control voltage is applied to
thecontacts of allswitches forthe purposeof indicating
whethera switch isopened orclosed.
The main inert gas valve is shipped locked in the open
bypassposition (manual override).In this position,you
do not need to supply power to the valve -- the valve is
lockedopenand thepurgewill flow continuously .
If you want to use 24 V to open and close the main inert
gas valve, first rotate the locking screw on the metal
base of the valve so that its screw slot is parallel to the
arrowon thevalve. Whenthe lockingscrew is set in this
manner, the valve is "normally closed". To open the
valve, connect 24 V ( 10%) AC or DC to pins 8 and 9 of
the pump's X19 Sub-D connector . The valve's rating is
500 mA, 11W, 50/60 Hz.
Alabel on theback panel ofthe pump illustrateshow to
rotate the locking screw . The valve is plumbed to the
back of the DR YVAC's "DR Y N2" port. The screw is lo-
cated on the metal base of the valve.
DRYVAC 25/50/100 P models before S/N L961320915
did not have the AC/DC/manual override valve. Most of
these older models were shipped without a main inert
gas valve. However , some were shipped with a 24 V AC
or 24 V DC valve.
Connect the oil-pressure switch so that the pump
switches of f when its contact opens (connector X18,
pin 8). The switch opens when the oil pressure is
<1.5 bar(7 psig),indicating thatthepump isn'toperating
or that the oil level is very low . Note that it is also open
for 3 seconds during start-up, until the oil pressure in-
creases.Bridge this switchfor 3 secondsto allow theoil
pressuretobuildduring start-up.
Caution Don't bridge the oil-pressure switch
for more than 3 seconds. If this
switch is bridged for >3 seconds and
the rotation direction is wrong dur-
ing start-up, the pump will be dam-
aged from insufficient lubrication.
Connect the “Warning” thermal switch so that it acti-
vatesa warning annunciator (such as a light,horn, bell,
or buzzer) when its contact opens (connector X18,
pin 9). The switch opens to alert you that the pump is
approachinga criticalstate. You can,however , continue
tooperate the pump afterthe “warning” thermal switch
opens.
Connect the “Alarm” thermal switch so that the pump
shuts down when its contact opens (connector X18,
pin 7). Failure to shutdown the pump when this switch
opensresults inmajor damageto thepump.
Connect the “Warning” exhaust pressure switch so
that it activates a warning annunciator (such as a light,
horn,bell, orbuzzer) whenits contactopens (connector
X19, pin 4). The switch opens when the pressure is
>1.3 bar(4 psig) to alertyou thatthe exhaustpressure is
higherthan normal. You can,however , continueto oper-
atethepumpafterthe“warning”exhaustpressureswitch
opens.
Connect the “Alarm” exhaust pressure switch so that
thepumpshutsdownwhen its contactopens(connector
X19, pin 2). The switch opens when the exhaust pres-
sure is >1.5 bar (7 psig). Failure to shutdown the pump
when this switch opens results in major damage to the
pump.
Connect the motor overtemperature switchso that the
pump shuts down when its contact opens (connector
X18, pin 4). Failure to shutdown the pump when this
switchopens results inmajor damageto themotor .
Connect the inert gas pressure switch so that either a
warningis sounded, or the pump is shutdown when its
contactopens (connector X19,pin 3).This switchopens
when the inert gas pressure is <1.3 bar (4 psig). Your
choice of action depends on the process. Operation
without a barrier gas may damage the pump when run-
ningcertainprocesses.

13
DRYVAC 25/50/100 P Manual
GA 01.414/2.02 - 1/97
Section2—Installation
2.3.2 AC Power Source
The DRYVAC is supplied with a 2-meter (6.5 ft) power
cable(3-phase + ground).
The following are the standard pump voltages and fre-
quencies. All standard DR YVACs are wired for low volt-
age unless the customer specifies high voltage on the
salesorder .
Catalog No. Voltage, Frequency
25 P: 138 13 .............200-208-240 /400-480 V*, 60 Hz
................................... 200/400 V*, 50 Hz
50 P: 138 33 ..............200-208-240/400-480 V*, 60 Hz
................................... 200/400 V*, 50 Hz
100 P:138 74 ..............200-208-240/400-480 V*, 60 Hz
138 73 ................................... 200/400 V*, 50 Hz
If necessary , change the pump's connections to match
theapplied ACline voltage as follows:
1. Access the motor junction box by removing the four
bolts(Figure 8) onthe base of the pump,and remove
thefront panel.
2. Change the connections onthe motor terminalblock
(Figure 9) to match the applied AC line voltage and
frequency .
3. Replace the front panel.
Figure8 Fasteningscrewsforthecover Figure9 ACpowersourceconnections
Connectthe pump'sAC line cord to itsrated ACvoltage
andfrequencythrough asuitablecircuit breaker (seethe
DRYVACnameplate). Don't turn ONthe breaker until all
electricaland vacuumconnections have been made.
Full load
DRYVAC Main power current
25 P 3 Ph AC 200 V*, 50 Hz 11 A
3 Ph AC 200-208-240 V*, 60 Hz 11 A
3 Ph AC 400 V*, 50 Hz 5.5 A
3 Ph AC 400-480 V*, 60 Hz 5.5 A
50 P 3 Ph AC 200 V*, 50 Hz 11 A
3 Ph AC 200-208-240 V*, 60 Hz 11 A
3 Ph AC 400 V*, 50 Hz 5.5 A
3 Ph AC 400-480 V*, 60 Hz 5.5 A
100 P 3 Ph AC 200 V*, 50 Hz 15 A
3 Ph AC 200-208-240 V*, 60 Hz 15 A
3 Ph AC 400 V*, 50 Hz 7.5 A
3 Ph AC 400-480 V*, 60 Hz 7.5 A
*All voltages are ±10% from value listed.
Note:All standard DR YVACs are wired for low voltage
unlessthecustomerspecifies high voltage on
thesalesorder .

14
DRYVAC 25/50/100 P Manual
GA 01.414/2.02 - 1/97
Section2—Installation
Figure10 Connectionside
Thepumpis shippedwithout cooling water .Fill thecool-
ingchannelsasfollows:
1. Open the four 1/4-turn retaining clips on the rear
of the pump and remove the rear panel.
2. Completely open the thermostat valve (setting
less than 1).
3. Open the cooling water supply and wait until the
water flows out of the cooling water outlet.
4. Set the thermostat to the recommended setting for
yourprocess (refer to Table 1). Contactyour Leybold
salesor service representative if youhave questions
aboutthe correct thermostat-valvesetting.
5. Replace the rear panel.
Caution Operating the DRYVAC with an incor-
rect thermostat valve setting may
cause premature failure of the pump
and void the warranty.
2.5 Checking the Direction
of Rotation
Warning If the pump previously pumped haz-
ardous gases, take appropriate pre-
cautions.
Caution Don’t remove the shipping seals
until you are ready to install the
pump. The pump’s interior must be
protected against humidity as long
as possible.
Checkthedirection ofrotation as follows:
1. Remove the shipping seals from the intake port (see
Figure 11) and ensure that the pump's intake and ex-
haust ports are open. Save the shipping seals for fu-
tureuse.
2. Loosen the four 1/4-turn retaining clips, and
remove the front top half of the housing.
3. Briefly switch ON the pump and check whether the
motorfan turns counterclockwise; then immediately
turn OFF the pump.
2.4 Connecting the
Cooling Water
Thecoolingwatershouldhavethefollowingproperties:
pH .............................................................. 7.0to 8.5
Chloride(Cl –) ........................≤75 mg/l = 2.1 mmol/l
Sulfate(SO 4–2).......................≤70 mg/l =0.7mmol/l
Calciumions ....................... > 1.0mmol/l = 100 ppm
≤2.7 mmol/l = 268 ppm
Hydrogencarbonatehardness ............ 125– 179 ppm
Significant deviations from the recommended values
mayresultin prematurecorrosionor deposits.
Connectthe cooling water lines. Ensurethat your water
supplyline is connected tothe DR YVACwater inlet and
yourdrain lineis connected to the DR YVAC wateroutlet
(see Figure 10).
Caution Operation without cooling water will
damage the pump if the alarm ther-
mal switch is not wired as described
in Section 2.3.1.
Note:Specialmodificationsmay berequiredwhen using
deionized(DI) water . Consultyour Leybold sales or ser-
vicerepresentative for information.

15
DRYVAC 25/50/100 P Manual
GA 01.414/2.02 - 1/97
Section2—Installation
Figure11 ShippingSeals
Key to Figure 11
1 Shippingcap
2 Drycanister
3 Gasket
4 Sealingdisc
If the pump rotated in the wrong direction (clock-
wise), first ensure that the incoming power to the
pump is OFF , and then interchange two of the input
leadsat themotor junctionbox.
4. Reinstallthecover .
Warning All housing panels and covers must
be reinstalled to protect the opera-
tors against contact with the hot
pump.
If the oil-pressure switch is connected correctly as de-
scribed in Section 2.3.1, the pump will switch of f after
3 secondsifitsrotationdirection is wrong.Thepump will
bedamaged if itrotates inthe wrongdirection forlonger
than3 seconds.
2.6 Connecting the Inert Gas
Supply
Remove the shipping seal from the DR Y NITROGEN fit-
tingand connect yourinert gassupply .Thesupply pres-
sureshould be 4 to 10 bar absolute(43 to 130 psig). Dry
nitrogenis normallyused asthe inertgas.
2.7 Connecting the
Intake Line
Note: Air/moisture leaks in the system's inlet or
exhaustline cancause depositsand prematurefailure.
The intake line should have the same or larger
diameter than the DR YVAC intake flange. The line
must be clean and oil-free.
We recommend installing a valve between the pump
andthe vacuum chamber .
A RUVAC WS 151 or WS 251 roots pump can be con-
nected directly to the intake port of a DR YVAC 25P.A
RUVAC WS 251 or WS 501 can be connected directly to
the intake port of a DR YVAC 50P or 100P.
Connectthe intakeline to the intake port;use bellowsto
eliminatetension inthe line.
Alwaysinstallthesupplied dirt trapintheintake flange to
prevent dirt from entering the pump from the vacuum
chamberor fromthe piping.
When etching aluminum, we recommend that the in-
take line be at least 100 mm (4 inches) in diameter or be
heated to at least 80ºC (176ºF).
LPCVDnitride and TEOS applications may require spe-
cial configurations to ensure satisfactory DR YVAC op-
eration.Consultyour Leyboldsales or servicerepresen-
tative.
2.8 Connecting the
Exhaust Line
Connect the exhaust line; use bellows to eliminate ten-
sioninthe line.Be sure theexhaust lineconnectionsare
tightto prevent hazardousgases fromescaping.
The exhaust line should have the same or larger diam-
eter than the DR YVAC exhaust flange. The exhaust line
mustbe ableto withstand 1.5 bar absolute(7 psig)since
the DRYVAC doesn’t automatically shutdown until the
exhaustpressure increases to 1.5 bar(7 psig).
Avoid connecting the DR YVAC together with oil-sealed
pumpsto onecentral exhaustsystem. Usinga common
exhaust line could result in condensate backstreaming
intothe DR YVACor in dust adheringin theexhaust line.
Special modifications may be necessary to eliminate
noise and vibration when connecting several exhaust
lines to a single plenum. Consult your Leybold sales or
servicerepresentative.
Theoutlet for the ventilation airis on the top ofthe DR Y-
VAC; if necessary , you can place an exhaust hood over
thepump for certainclean-room applications.
Keep the exhaust line free of deposits. If the exhaust
flow becomes restricted, deposits often collect in the
DRYVAC.

16
DRYVAC 25/50/100 P Manual
GA 01.414/2.02 - 1/97
3 Operation
3.1 Start-up and Operation
Openthe inert gassupply by energizingthe solenoid of
themaininert gassupplyvalve; ensurethatthe inertgas
pressure is at least 4 bar (43 psig).
Openthecooling watersupply .
SwitchON the pump.
If the motor ’s circuit breaker trips when evacuating a
largevacuum chamber , pre-evacuate thechamber with
asmall-diameter line (softpump line).
3.2 Shutdown
Note: Refer to Appendix A for the shutdown procedure
forprocessesthat generateparticles.
We recommend that you operate the DR YVAC continu-
ously.Allowitto continueoperatingovernight with itsin-
letclosedto avoidcorrosionduring idle periods.
To shutdown, close the valve to the vacuum chamber
and purge the pump with inert gas by allowing it to run
foran additional15 minutes.Then switchOFF thepump
andclose the watersupply .
Warnings During operation, the pump's tem-
perature can exceed 100ºC (212ºF).
Always allow the pump to cool down
before removing it from the system
or before opening its housing.
If the DRYVAC previously pumped
hazardous gas, take appropriate pre-
cautions before opening the intake
or exhaust.
If you continue to purge the pump
with inert gas after shutdown, avoid
exceeding a pressure of 1.5 bar
(7 psig).
Ifthe DRYVAC willbe shutdown foran extended period,
sealits intake and exhaust ports, and purgeit with inert
gas at a pressure of 1,000 mbar (760 Torr).
Refer Section 3.3 if the DR YVAC will be disconnected
fromthe system.
Section3—Operation
3.3 Storing and Shipping
Shutdown the pump as described in Section 3.2.
Warnings During operation, the pump's tem-
perature can exceed 100ºC (212ºF).
Always allow the pump to cool down
before removing it from the system
or before opening its housing.
If the DRYVAC previously pumped
hazardous gas, take appropriate pre-
cautions before opening the intake
or exhaust.
Toavoidhealth hazardsandcorrosion damage whenthe
DRYVAC is detached from the system, place dry canis-
tersonto the pump’ sinlet to protectthe pump’ s interior
from moisture. Then, seal the DR YVAC’s intake and ex-
haustports. You canreuse the shippingseals that were
originallyon the pump(see Figure1 1); butyou mustuse
new dry canisters (P/N 200-78-563).
Caution Always drain the cooling water be-
fore storing or shipping the pump.
Failure to drain the water can result
in the water freezing and bursting the
pump housing.
Draining Water From the DRYVAC 100P
1. Turnof f the watersupply .
2. Open the four 1/4-turn retaining clips on the rear
panel, and take of f the panel.
3. Completely open the thermostat valve (setting less
than 1). Disconnect the cooling water hoses and
drain the water . Blow compressed air through the
water discharge to remove any remaining water .
4. Reinstall the rear panel.
Draining Water From the DRYVAC 25P and 50P
1. Turn of f the water supply .
2. Open all necessary 1/4-turn retaining clips and
take off the rear panel and the top covers.
3. Unscrew the hex socket screws at the bottom of
the left-side panel and remove the panel.

17
DRYVAC 25/50/100 P Manual
GA 01.414/2.02 - 1/97
Section3—Operation
Figure12 DRYVAC25/50P Water Drain Plug
4. Completely open the thermostat valve (setting
less than 1). Then disconnect the cooling water
hoses; remove the M12x1.5 plugscrew (12/1); and
let the water drain out. Blow compressed air
through the water discharge to remove any
remaining water .
5. Reinstall the plug screw , the side panel, the top
covers, and the rear panel.
Service by Leybold
If you ship a pump to Leybold, be sure to indicate
whether the pump is free of substances that could be
hazardous to health or if it is contaminated. If it is con-
taminated,indicate the natureof the hazard.
You must complete the form at the back of this
manual before sending any equipment to Leybold.
Attach the form to the pump or enclose it with the
pump. This statement detailing the contamination is
required to satisfy legal requirement and to protect
our employees.
Leybold will return to the sender any pumps that are
not accompanied by a contamination statement.
Pack the pump so that it cannot be damaged during
shipping.Thepump mustalsobe shippedeitherin agas
tight container or sealed in plastic so that no contami-
nantscan escapefrom thepackaging.
25/50PWater-DrainPlug

18
DRYVAC 25/50/100 P Manual
GA 01.414/2.02 - 1/97
4 Maintenance
4.1 Routine Maintenance
The DRYVAC may require rebuilding periodically de-
pendingon yourapplication and your production cycle.
Insome installations, the rebuild intervalmay vary from
12 to 24 months. If you seldom need to clean the inlet
and exhaust lines, then the rebuild interval could be
longer . Contact your Leybold service center for rec-
ommendations on rebuild intervals for your particu-
lar installation. Also ask about the service options
availablein yourregion.
Typically , the only other routine maintenance is replac-
ingthe exhaustsilencer if it becomes clogged(see Sec-
tion 4.2).
All work must be done by suitably trained personnel.
Maintenanceor repair doneby inexperiencedpersonnel
may affect the life and performance of the pump and
mayvoid thewarranty .
Before doing any maintenance or repair , shutdown the
pumpas described inSection 3.2and disconnect itfrom
thesystem.
Caution Always drain the cooling water be-
fore storing or shipping the pump.
Failure to drain the water can result
in the water freezing and bursting the
pump housing.
Ifthepumpwillbereturned to Leybold,itmustbeaccom-
paniedbyalistingofallhazardoussubstanceswhichmight
bepresentinoraroundit.Completetheformatthebackof
thismanualbeforesendinganyequipmenttoLeybold.Re-
fertoSection3.3topreparethepumpfor shipping.
4.2 Replacing the Exhaust
Silencer
If the exhaust silencer starts to become clogged, the
“Warning”exhaust pressure switchwill open. The pump
cancontinuetooperateunderthiswarningcondition,but
stepsshould betaken to service the exhaustsilencer as
soonaspossible.
Section4—Maintenance
If the exhaust silencer becomes clogged to the point
wherethe “Alarm” exhaustpressure switchopens, then
the pump must be shut down, and the exhaust silencer
servicedimmediately .
Refer to Item 3 of the troubleshooting chart for other
possiblecausesof excessiveexhaustpressure.
For particulate/vapor generating processes, we rec-
ommend checking the exhaust silencer and silencer
flange monthly . Install a new silencer (P/N 13750) and
cleanthe silencer flange if you find significantaccumu-
lationofcontaminants.
Warnings During operation, the pump’s tem-
perature can exceed 100°C (212°F).
Always allow the pump to cool down
before removing it from the system
or before opening its housing.
If the DRYVAC previously pumped
hazardous gas, take appropriate pre-
cautions before opening the intake
or exhaust.
If necessary, use gloves, a respirator
and/or protective clothing and work
under an exhaust hood.
Change the exhaust silencer (P/N 137 50) as follows:
1. Open the four 1/4-turn retaining clips and take of f
the rear panel.
2. Use the Allen key supplied with the silencer and a
17-mmwrench to unscrew the exhaustsilencer (2/4).
3. Unscrew the shipping cover from the new exhaust
silencer .
4. Apply PFPE grease on the gasket of the new exhaust
silencer .
5. Install the exhaust silencer and tighten it to 25 Nm
(18 lb-ft).
The shipping cover can be used to seal the old exhaust
silencer .
Caution Comply with local environmental
regulations when disposing of the
old exhaust silencer.

19
DRYVAC 25/50/100 P Manual
GA 01.414/2.02 - 1/97
Checksettingofmotorbreaker.TurnONthe
breaker.
Checkwiringandrepair.Checkthevoltageatyour
ACpowersource.
Seenoteson malfunction 2, 3, 4 or5.
Repairthepump.
Repairorreplacethemotor.
DisconnectthepumpfromyourACpowersource.
Interchangetwoofthreeinputleads.
Modifythesystem.
Modifytheprocess.
Changesiteorsupplycoolerair.
Cleantheventilationgridsandcoolingairchan-
nels.Increasethedistancebetweentheventgrids
andthewalls.
Repairthepump.
Openthecoolingwatersupply.
Ensuresufficientsupplyofcoolingwater.
Repairthepump.
Dismantlethepumpandcleanthecoolingwater
channels.
Connectthecoolingwaterlinescorrectly.
Replacemalfunctioningpart.
Possible cause Recommended corrective action
1.1 Pumpdoesnot
start.
1.2 Pumprunsup
brieflyandthen
shutsdown.
2. Pumptempera-
tureistoohigh.
The“Warning”
thermalswitch
openstoalertthe
operatorthatthe
pumptempera-
tureisabove
normal.When
the“Alarm”
thermalswitch
opens,thepump
mustbeshut
down.
Symptom
2.3.2
2.3.2
---
Service
Service
2.5
1.2
---
---
---
Service
3.1
1.2
Service
Service
2.4
Service
Refer-
ences*
*This columnrefers to the section inthe Operatinginstructions thatcontains theapplicable repairinformation.
Section5—Troubleshooting
Motorcircuitbreakerisoff.
Errorinpowerconnection.
See Symptom 2, 3, 4 or 5 below.
Pumphasseizedcausingthemotor
circuitbreakertoopenatstart-up.
Motormalfunction.
Directionofrotationiswrong.Ifthe
oilpressureswitchisconnectedas
describedinSection2.3.1,thepump
willshutdownafterrunninginthe
wrongdirectionfor3seconds.
Intakepressureistoohighin
continuousoperation.
Processgasistoohot.
Ambienttemperatureistoohigh.
Coolingairisrestricted.
Toomuchfrictioninsidethepump.
Coolingwaterinletisnotopen.
Coolingwaterpressureistoolow.
Limedepositsincoolingwater
channelsinsidethepump.[During
normaloperation,thecoolingwater
temperaturewillbebelow70ºC
(158ºF).Atthesetemperatures,
depositsformveryslowly.Early
cloggingisanindicationofsome
operationaldifficulty.]
Dirtdepositsinthepump’scooling
waterchannels.
Coolingwaterlinesconnected
incorrectly.
Switch,plug,orcordmalfunction.
5 Troubleshooting

20
DRYVAC 25/50/100 P Manual
GA 01.414/2.02 - 1/97
Exhaustlineisclogged.
Exhaustsilencerisclogged.
Exhaustlineistoolongortoo
narrow.
Switch,plug,orcordmalfunction.
Pumprotationdirectioninincorrect;
seemalfunction1.2.
Toolittlelubricantinthegearbox.
Oilpumpmalfunction.
Switch,plug,orcordmalfunction.
Intakepressureistoohighin
continuousoperation.
Exhaustpressureistoohigh.
Ambienttemperatureistoohigh.
Coolingairisrestricted.
IncorrectACpowerconnection.
Pumpcontaminatedbydeposits.
Switch,plug,orcordmalfunction.
Intakelineistoolongortoonarrow.
Dirttrapatintakeportisclogged.
Intakelineisleakingordirty.
3. Exhaustpressure
istoohigh.
The“Warning”
pressureswitch
openstoalertthe
operatorthatthe
exhaustpressure
isabovenormal.
Whenthe“Alarm”
pressureswitch
opens,thepump
mustbeshut
down.
4. Oilpressureis
toolow.Switch
hasopened.
5. Motortempera-
tureistoohigh.
Switchhas
opened.
6. Evacuation
periodistoo
long.(Pumping
speedistolow.)
---
4.3
2.8
Service
2.5
Service
Service
Service
1.2
2.8
---
---
2.3.2
Service
Service
2.7
---
---
Refer-
ences*
Symptom Possible cause Recommended corrective action
Cleantheexhaustline.
Replacetheexhaustsilencer.
Installashorterorwiderdiameterexhaustline.
Replacemalfunctioningpart.
Disconnectthepumpfromthepowersupply.
InterchangetwophasesatyourACpowersource.
Measurethelubricantlevelviathefillplug.Thetarget
value is 6 to 9 mm ( 1/4to 3/8inch) for the 100P and
12 to 15 mm (1/2to 5/8inch) for the 25/50P.
Repairtheoilpump.
Replacemalfunctioningpart.
Modifythesystem.
Cleanormodifytheexhaustline.
Changesiteorsupplycoolerair.
Cleantheventilationgridsandcoolingairchan-
nels.Increasethedistancebetweentheventgrids
andthewalls.
Wirethepump’stransformertomatchtheAC
powersource.
Cleanpump.
Replacemalfunctioningpart.
Installashorterorwiderdiameterintakeline.
Cleandirttrap.
Sealorcleantheintakeline.
Section5—Troubleshooting
*This columnrefers to the section inthe Operatinginstructions thatcontains theapplicable repairinformation.