LEYBOLD TURBOVAC 50 User manual

TURBOVAC
Turbomolecular pumps with
grease-lubricated bearings
Operating instructions
Vacuum Solutions Application Support Service LEYBOLD VACUUM
GA05118_1302

Description
Contents
Page
1 Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
Compatibility with pumped media. . . . . . . . . . . . . 2
1.1 Standard equipment. . . . . . . . . . . . . . . . . . . . . . . 3
1.2 Order data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.3 Technical data . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
2 Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
2.1 Operating environment. . . . . . . . . . . . . . . . . . . . . 9
2.2 Connecting the pump to the vacuum chamber . . 9
2.3 Making the forevacuum connection . . . . . . . . . . 12
2.4 Connecting the cooling. . . . . . . . . . . . . . . . . . . . 12
2.5 Connecting the purge gas and airing device . . . 12
2.6 Connecting the TURBOTRONIK . . . . . . . . . . . . 13
3 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
3.1 Switching on. . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
3.2 Bakeout . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
3.3 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
3.4 Switching off. . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
3.5 Venting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
3.6 Removing the pump from the system . . . . . . . . 16
4 Maintenance. . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
4.1 Cleaning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
4.2 Service by LEYBOLD. . . . . . . . . . . . . . . . . . . . . 17
5 Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . 18
EC Manufacturer’s Declaration . . . . . . . . . . . . . 19
Conventions used in these instructions
Illustrations
The references to diagrams, e.g. (2/10), consist of the figure
number and the item number, in that order.
Warning
This indicates procedures and operations which must be strict-
ly observed to prevent hazards to persons.
Caution
This indicates procedures and operations which must be strict-
ly observed to prevent damage to or destruction of the unit.
We reserve the right to change at any time the design and data
given in these operating instructions.
The illustrations are approximate.
1 Description
The TURBOVAC models 50 to 1000 are turbomolecular
pumps featuring grease-lubricated bearings. These
units are engineered to pump vacuum chambers down
to pressures in the high-vacuum range. A TURBOTRO-
NIK frequency converter and a forevacuum pump are re-
quired for the operation of the TURBOVAC.
These units are not suitable for operation without a fore-
vacuum pump.
Compatibility with pumped media
Turbomolecular pumps are not suitable for pumping
either gases which contain dust particles or liquids.
Turbomolecular pumps without a purge gas feature are
suitable only for moving air or inert gases. They are not
suitable for pumping aggressive or reactive gases.
TURBOVAC versions identified with a “C” in the model
number are equipped with this purge gas feature, it pro-
tects only the bearing area and the motor in the TURBO-
VAC.
Some media (such as aluminum trichloride) can sublime
inside the pump and form deposits. Thick deposits re-
duce the play between moving parts to the point that the
pump could seize. In some processes deposits can be
prevented by heating the pump. Please consult with us
in case such problems arise.
Corrosive gases (such as chlorine) can destroy the
rotors.
During operation the pressure inside the TURBOVAC is
so low that there is no danger of ignition (at pressures
below about 100 mbar, 75 Torr). A hazardous condition
will be created if flammable mixtures enter the hot pump
at pressures above 100 mbar (75 Torr). During operati-
on the pump can reach temperatures as high as 120°C
(248 °F). Sparks could occur in case of damage to the
pump and these could ignite explosive mixtures.
We would be glad to consult with you as regards the
media which can safely be handled with this unit.
Warning Never expose any parts of the body to the
vacuum.
Caution Any tampering within the pump or modifica-
tions to the mechanical or electrical compo-
nents of the pump, will void any liability and
warranty claims.
2GA05118_1302 - 01/2004

Description
TURBOVAC 50 50 D2 151 151 C 361 361 C 600 C 1000 C
High-vacuum
flange
DN 40 KF 854 00
DN 40 CF 853 99
DN 63 ISO-K 854 01 856 68
800150V0010
DN 63 CF 854 02
DN 100 ISO-K 856 31 856 35 856 70 856 75
DN 100 CF 856 32 856 71
DN 160 ISO-K 856 72 856 77 856 82 855 351)
855 382)
DN 160 CF 856 73 On request On request
DN 200 CF On request
6“ ANSI 894 25 894 891)
DN 250 ISO-K 855 361)
855 392)
1) With forevacuum flange DN 40 KF
2) With forevacuum flange DN 63 ISO-K
1.2 Order data
1.1 Standard equipment
The TURBOVAC is shipped in a sealed PE bag which
also contains a desiccant.
The maximum effective life of the desiccant is one year.
for high-vacuum port with ISO-K flange:
Splinter guard,
Centering ring with FPM sealing ring; outer ring.
for high-vacuum port with CF flange:
Splinter guard.
for high-vacuum port with KF flange:
Splinter guard, centering ring with FPM O-ring and
clamping ring.
for high-vacuum port with ANSI flange:
Splinter guard.
Forevacuum port
Centering ring with O-ring and clamping ring.
Both the purge gas port and the airing port are blanked
off for shipping.
In addition the pivoted threaded fittings used to make the
coolant connection are included as standard equipment
for the TURBOVAC 151, 361 and 600; if needed, they
can be used to replace the hose nipples installed at the
factory.
The electronic frequency converter and the connector
cables required for operation are not included as
standard equipment with the pump.
——————————
PE = Polyethylene
FPM = Fluoroelastomer, resistant to temperatures of up to
150°C (300 °F)
3
GA05118_1302 - 01/2004

GA05118_1302 - 01/2004
Description
4
TURBOVAC
High-vacuum port nom.diam.
Pumping speed for N2l/sec
Ultimate pressure mbar
Forevacuum pressure, max. N2mbar
Recommended fore-
vacuum pump TRIVAC
Recommended frequency
converter NT
Speed rpm
Run-up time approx. min
Coolant flow rate
at 15 °C* l/hr
Forevacuum port nom. diam.
Purge gas port nom. diam.
Vent port nom. diam.
Weight, approx. kg
Max. ambient temperature
at operation °C
Max. bakeout temperature
at CF flange °C
TURBOVAC
High-vacuum port nom. diam.
Pumping speed
for N2l/sec
Ultimate pressure mbar
Forevacuum pressure mbar
Recommended fore-
vacuum pump TRIVAC
Recommended frequency
converter NT
Speed rpm
Run-up time approx. min.
Coolant connection
nozzle mm
Coolant temperature °C
Coolant flow rate
at 15 °C l·h-1
Forevacuum port nom. diam.
Purge gas port nom. diam.
Vent port nom. diam.
Weight approx. kg
Max. ambient temperature
at operation °C
Max. bakeout temperature
at CF flange °C
151
63 ISO-K
115
< 10-10
0.5
D 4 B
20
50 000
2
10
10 – 25
20
25 KF
–
10 KF
8
55
–
151
100 ISO-K
100 CF
145
< 10-10
0.5
D 4 B
20
50 000
2
10
10 – 25
20
25 KF
–
10 KF
8
55
100
151 C
100 ISO-K
145
< 10-10
0.5
D 16 B
20
50 000
2
10
10 – 25
20
25 KF
10 KF
10 KF
8
55
–
361
100 ISO-K
100 CF
345
< 10-10
0.5
D 16 B
20
45 000
2
10
10 – 25
20
25 KF
–
10 KF
12
55
100
361
160 ISO-K
160 CF
400
< 10-10
0.5
D 16 B
20
45 000
2
10
10 – 25
20
25 KF
–
10 KF
12
55
100
361 C
100 ISO-K
345
< 10-10
0.5
D 25 B
20
45 000
2
10
10 – 25
20
25 KF
10 KF
10 KF
12
55
–
361 C
160 ISO-K
400
< 10-10
0.5
D 25 B
20
45 000
2
10
10 – 25
20
25 KF
10 KF
10 KF
12
55
–
1.3 Technical data
* When using the water cooling option. Cat.no. 854 08
50
40 KF
33
8·10-9
0.5
D 2.5 E
10/12/13
72 000
2
20
16 KF
-
-
2
55
-
50
40 CF
33
< 10-9
0.5
D 2.5 E
10/12/13
72 000
2
20
16 KF
-
10 KF
2
55
80
50
63 ISO-K
55
8·10-9
0.5
D 2.5 E
10/12/13
72 000
2
20
16 KF
-
-
2
55
-
50
63 CF
55
< 10-9
0.5
D 2.5 E
10/12/13
72 000
2
20
16 KF
-
10 KF
2
55
80
50 D2
63 ISO-K
55
< 10-9
15
Diaphragm
pump
10/12/13
72 000
3
20
16 KF
-
-
2
45
-

Description
TURBOVAC
High-vacuum port nom. diam.
Pumping speed for N2l·s-1
Ultimate pressure mbar
Forevacuum pressure mbar
Recommended fore-
vacuum pump TRIVAC
Recommended frequency
converter NT
or NT
Speed rpm
Run-up time approx. min.
Coolant connection
nozzle mm
Coolant temperature °C
Coolant flow rate
at 15 °C l/hr
Forevacuum port nom. diam.
Purge gas port nom. diam.
Vent port nom. diam.
Weight, approx. kg
Max. ambient temperature
at operation °C
Max. bakeout temperature
at CF flange °C
5
GA05118_1302 - 01/2004
1) with the NT 20: 9 min
2) 11 mm with 40 mm type KF forevacuum port
10 mm with 63 mm type ISO-K forevacuum port
3) As of 1995 in some cases 16 mm KF
1000 C
160 ISO-K
160 CF
850
< 10-10
10-3 - 10-2
D 40 B
1000/1500 VH
20
36 000
41)
11 / 102)
10 - 30
30
40 KF/63 ISO-K
10 KF3)
10 KF3)
25
55
100
1000 C
6“ ANSI
200 CF
1100
< 10-10
10-3 - 10-2
D 40 B
1000/1500 VH
20
36 000
41)
11
10 - 30
30
40 KF
10 KF3)
10 KF3)
25
55
100
1000 C
250 ISO-K
1150
< 10-10
10-3 - 10-2
D 40 B
1000/1500 VH
20
36 000
41)
11 / 102)
10 - 30
30
40 KF/63 ISO-K
10 KF3)
10 KF3)
25
55
-
600 C
160 ISO-K
160 CF
560
< 10-10
10-3 - 10-2
D 40 B
1000/1500
20
36 000
3
10
10 - 30
30
40 KF
10 KF
10 KF
17
55
100
600 C
6“ ANSI
620
< 10-10
10-3 - 10-2
D 40 B
1000/1500
20
36 000
3
10
10 - 30
30
40 KF
10 KF
10 KF
17
55
-
kg lbs
———————
2 4.4
8 17.7
12 26.5
17 37.5
25 55
mm inch
———————
10 0.35
11 0.43
°C°F
———————
10 50
15 59
25 77
45 113
55 131
80 176
100 212
mbar Torr
———————
10-10 8·10-11
8·10-9 6·10-9
10-3 8·10-4
10-2 8·10-3
0.5 0.4
1 0.8
15 11.2

Description
6GA05118_1302 - 01/2004
TURBOVAC 50 D2 TURBOVAC 151 C; TURBOVAC 361 C is similar
TURBOVAC 50
A
B
F
A
B
F
A
C
E
D
B
F
Fig. 1

Description
AHigh-vacuum connector flange
B Forevacuum connector flange
C Airing flange
D Purge gas flange
E Connection for water cooling
F Electrical connection
TURBOVAC 1000 C
TURBOVAC 600 C
A
B
F
A
C
E
D
B
F
C
E
D
Fig. 2
7
GA05118_1302 - 01/2004

Connections
2 Connections
Caution Unless appropriate accessories and attach-
ments are used, the TURBOVAC is not
suitable for aggressive or corrosive media,
or those containing dust. When handling
corrosive media the C version pump must
be operated with purge gas; when handling
media containing dust, a fine-mesh filter
must be installed.
Observe the information on media compati-
bility, to be found at the beginning of these
operating instructions.
Do not open the packaging until immediately prior to
installation.
Remove the covers and the blank flanges at the turbo-
molecular pump only just before installing, to ensure that
the TURBOVAC is installed under the cleanest possible
conditions.
When moving the heavier pumps, the lower surfaces on
the base flange are suitable for accepting a lifting fork;
see Fig. 3.
Caution Take care not to damage the plugs and
coolant connections during movement.
Do not stand below the TURBOVAC pump while it is being
connected to or detached from the system.
8GA05118_1302 - 01/2004
TURBOVAC
50 D2
50
151, 151 C,
361, 361 C
600 C
1000 C
Air or water cooling required
Ambient temperature 30 to 40 °C
Bakeout operations
High-vacuum pressure 10-3 to
10-2 mbar
Forevacuum pressure 5·10-1 to
2 mbar
Bakeout at ambient temperature
< 40 °C
Continuous operation at high-vacuum
pressure > 10-4 mbar
Rapid-cycling operation
Bakeout at ambient temperature
< 35 °C
High-vacuum pressure < 10-3 mbar
and ambient temperature < 45 °C
Bakeout at ambient temperature
< 35 °C or
high-vacuum pressure < 10-3 mbar
and ambient temperature < 45 °C
Bakeout at ambient temperature
< 35° C or
high-vacuum pressure < 10-4 mbar
and ambient temperature < 45 °C
Water cooling required if any one of these
conditions prevails
Ambient temperature 40 - 45 °C
Bakeout operations
High-vacuum pressure > 5·10-2 mbar
Forevacuum pressure > 2 mbar
Ambient temperature 45 - 55 °C
Back-out at ambient temperature > 40° C
Bakeout at ambient temperature > 35 °C
High-vacuum pressure > 10-3 mbar
Ambient temperature 45 - 55 °C
Bakeout at ambient temperature > 35 °C
High-vacuum pressure > 10-3 mbar
Ambient temperature 45 - 55 °C
Bakeout at ambient temperature > 35 °C
High-vacuum pressure > 10-4 mbar
Ambient temperature 45 - 55 °C
No additional cooling required if all
these conditions are satisfied
Ambient temperature < 30° C
No bakeout operations
High-vacuum pressure < 10-3 mbar
Forevacuum pressure < 5·10-1 mbar
Continuous operation at high-
vacuum pressure < 10-4 mbar
Ambient temperature < 45 °C
–
–
–
Operating environment and cooling
Fig. 3 Movement
°C°F
———————
30 86
35 95
40 104
45 113
50 122
55 131
mbar Torr
———————
10-4 8·10-5
10-3 8·10-4
10-2 8·10-3
5·10-2 4·10-2
5·10-1 4·10-1
2 1.5

2.2 Connecting the pump to
the vacuum chamber
Remove the packing flange from the high-vacuum
flange. Pay attention to maintaining maximum clean-
liness during connection work.
Warning The high-vacuum flange must be securely
attached to the vacuum chamber. If the
pump were to become blocked, insufficient
attachment could cause the pump to break
away from its mount or allow internal pump
parts to be discharged. Never operate the
pump (in bench tests, for instance) without
its being flanged to the vacuum chamber.
If the pump should suddenly seize, the ensuing deceler-
ation torque will have to be absorbed by the system. To
accomplish this, the following are required when secur-
ing an ISO-K type high-vacuum flange:
Connection
max. 100 mm (4 inch)
max. 100 mm
(4 inch)
max. 100 mm
(4 inch)
Incorrect
Fig. 4 Permanent flanging of the TURBOVAC to the vacuum chamber
2.1 Operating environment
When using the TURBOVAC inside a magnetic field, the
magnetic induction at the pump housing surface may not
exceed the following values:
TURBOVAC 50: B = 7 mT
TURBOVAC 151 – 1000:
B = 5 mT in case of radial impingement
B = 15 mT in case of axial impingement
Provide suitable shielding measures if these values are
exceeded.
The standard version is resistant to radiation at levels up
to 103Gy.
——————————————-
1 mT (milliTesla) = 10 G (Gauss)
1 Gy (Gray) = 100 rad
9
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GA05118_1302 - 01/2004
In most applications the TURBOVAC will be flanged direct
to the high-vacuum flange for the system. The design of
the lubricating system makes it possible to mount and
run the TURBOVAC in any desired attitude. It is not
necessary to support the pump.
If there is a danger that dust could pass from the vacuum
chamber into the TURBOVAC, install a fine-mesh filter
between the vacuum chamber and the TURBOVAC.
The TURBOVAC is precision balanced and is generally
operated without a vibration damper. A special-design
vibration damper is available for mounting at the TUR-
BOVAC high-vacuum flange to decouple extremely sen-
sitive equipment and to prevent external vibrations from
being transferred to the TURBOVAC. If the TURBOVAC
1000 C are flanged via a vibration damper secure it in
addition at the base flange.
Design with ISO-K clamp flange
Fit the O-ring at the centering ring.
The O-ring should be flat and even; it must not be
twisted. Then add the outer ring.
Acollar flange with retaining ring and suitable sealing
washer can also be used to connect the TURBOVAC.
Acollar flange is required when using ultra-high-vacuum
sealing washers.
Connection
Braking Clamping
TURBOVAC torque [Nm] bolts
50 63 4
50 D2 150 4
151/151 C 283 4
361/361 C 580 6
600 C 1486 10
1000 C DN 160 1500 16
DN 250 1500 10
Clamping bolts made of steel must be torqued down to
35 Nm, those made of stainless steel to 50 Nm.
When installing CF flanges, use only the bolts specified
(tightening torque is 15 Nm for DN 40 CF, 30 Nm for
DN 63 CF and larger).
You will find the order numbers for the (clamping) bolts
in the Leybold Catalog.
The clamping bolts are not included as standard equip-
ment with the pump.
Warning The small-flange connector for the high-
vacuum flange at the TURBOVAC 50 is not
strong enough to keep the pump from rota-
ting if it should suddenly seize. Rotation of
the pump can cause leaks in the forevacu-
um line.
Secure the pump additionally to prevent
rotation in case it should suddenly seize.
10
Fig. 5 Using ISO-K flanges
Install outer
centering ring
Nm 15 30 35 50
——————————————————
ft-lb 11 22 26 37

Connection
Splinter guard
Asplinter guard is installed in the high-vacuum flange to
protect the TURBOVAC.
Operate the pump only with this splinter guard in place
as foreign objects passing through the intake port and
into the pump can cause serious damage to the rotor.
Damage caused by foreign objects in the rotor section is
excluded from the guarantee.
Flange heating
(only for pumps with the CF flange)
The flange heater is used to bake out, under automatic
control, the high-vacuum connection port at the TURBO-
VAC and the mating flange on the vacuum chamber.
The bakeout jacket or flange heater is mounted directly
to the TURBOVAC intake flange. This can be done even
with the pump flanged to the vacuum chamber.
Warning The bakeout jacket can become so hot
during operation (> 80°C, 176 °F) as to
represent a burn hazard.
Shield the hot components against contact.
The pump running noise is below 70 dB(A); no noise-
insulating measures are required.
11
GA05118_1302 - 01/2004
Fig. 6 Schematic of a turbomolecular pump system
Legend for Fig. 6
1 Turbomolecular pump
2 Forevacuum test point
3 Forevacuum pump
4 Anti-vibration bellows
5 Adsorption trap
6 Forevacuum valve
7 Airing valve
8 High-vacuum valve
9 Purge gas connection
10 Valve in the roughing pump line
11 Electronic frequency converter
— — — — Roughing pump line; recommended
to achieve the shortest possible cycling times
— · — · — · — · Drive and control line

Connection
2.3 Making the forevacuum
connection
Asuitable forevacuum pump is to be connected to the
forevacuum connection flange.
Fig. 6 shows schematically the design of a pump system
incorporating a TURBOVAC turbomolecular pump and a
TRIVAC forevacuum pump with anti-suckback valve.
When using a forevacuum pump not having an anti-
suckback valve, a separate safety valve should be pro-
vided. The safety valve keeps oil from backstreaming
from the forevacuum pump and into the TURBOVAC
when the system is not running.
We recommend installing a sorption trap in the fore-
vacuum line to insure that the forevacuum chamber in
the TURBOVAC remains largely free of oil vapors during
operation, as well.
Install a roughing pump line to achieve the shortest
possible cycling times.
Be sure that there is sufficient vibration decoupling be-
tween the TURBOVAC and the forevacuum pump.
Warning The forevacuum line must be tight.
Hazardous gases could escape from leaks
or the gases being pumped could react with
air or humidity.
2.4 Connecting the cooling
Air cooling
The air cooling unit is available as a supplementary kit
for retrofitting.
When installing the air-cooled TURBOVAC, ensure that
there is an unrestricted flow of air to the fan.
Always maintain a minimum distance of 20 cm (8 inch)
to the nearest object.
Ensure that no heated air from neighboring equipment
will be drawn in by the fan.
Connect the fan in the air ventilation unit to the AC
mains.
Make the electrical connection for the ventilation unit in
such a way that it will be started and stopped together
with the pump itself.
Observe the information given in the operating instruc-
tions for the air ventilation unit (GA 05.199).
Water cooling
When attaching the water cooling unit to the TURBOVAC
50 and 50 D, remove the pump foot and then bolt the
cooling unit to the bottom of the pump. The mounting
bolts are provided with the water cooling unit.
Connect the coolant hoses to the hose nipples and
secure with hose clamps.
If the coolant flow is turned on and off by means of a
solenoid valve, make the electrical connection in such a
way that coolant flow will be started and stopped
together with the pump itself.
Cooling water specifications
Inlet pressure 3 to 7 bar absolute
Cooling water requirement,
Inlet temperature See Fig. 7
Appearance Colorless, clear,
free of oils and greases
Sediments < 250 mg/l
Particle size < 150 µm
pH value 7 to 8.5
Overall hardness (total alkaline earths)
max. 20 °German hardness scale
(= 3.57 mmol/l)
2.5 Connecting the purge
gas and airing device
Suited are all gases,
•which will not cause corrosion or pitting in aluminium
and steel and
•which in connection with process deposits in the
pump will not cause corrosion or sticking.
For venting and as the purge gas we recommend inert
gases like nitrogen or argon. The temperature of these
gases should be between 5 °C and 80 °C , max. relative
humidity should not exceed 10 ppm.
In individual cases and after consultation also dry, filte-
red, oil-free air or filtered ambient air may be used (filter
mesh < 1µm).
Change the filters after some time, at least annually.
Different venting methods are described in Chapter 3.5.
TURBOVAC 50, 50 D 2 with ISO-K connectors
The TURBOVAC is aired through the system.
12 GA05118_1302 - 01/2004

Observe the operating instructions for the purge gas and
airing valve.
2.6 Connecting the
TURBOTRONIK
Use the connector cable to attach the TURBOVAC and
the TURBOTRONIK; see the operating instructions on the
TURBOTRONIK for details.
Warning Operate the pump only with the matching
frequency converter and connector line.
Voltages of up to 400 V will be present at
the connection cable between the frequen-
cy converter and the pump; mains voltage
will be present at the fan, the flange heater,
the valves and their supply leads.
Route the conductors and cables so as to
protect them from damage.
The connections are of the IP 40 safety classification.
Do not expose the pump, frequency converter or
connectors to dripping water.
Connection
TURBOVAC 50 with CF connectors and
TURBOVAC 151, 361
If the pump cannot be aired through the system, then a
power failure airing valve shall be attached to the airing
connection flange. This power failure airing valve pre-
vents oil vapor from the forevacuum line from diffusing
back into the system.
TURBOVAC 151 C, 361 C, 600 C and 1000 C
Either attach a power failure airing valve to the airing
connection flange or a purge gas and airing valve at the
purge gas connection flange.
Which of the two flanges is used will depend on the pro-
cess.
When pumping clean, non-corrosive gases, a power
failure airing valve is to be attached.
When pumping reactive media, connect a purge gas
and airing valve.
Please contact Leybold for assistance in making the
decision as to which media can be pumped with or with-
out purge gas.
In processes which require purge gas the pump will have
to be aired, when it is switched off, through the purge gas
valve.
13
GA05118_1302 - 01/2004
5 10 15 20 25 30 35
°C
50
40
30
20
10
0
l/h
°C
50
40
30
20
10
0
l/h
5 10 15 20 25 30 35
°C
80
70
60
50
40
30
20
10
0
l/h
5 10 15 20 25 30 35
Fig. 7 Cooling water consumption
Cooling water temperature
Cooling water flow
TURBOVAC 50 TURBOVAC 600, 1000
TURBOVAC 151, 361
Cooling water flow
Cooling water flow
Cooling water temperature
Cooling water temperature

103
102
101
100
mbar
0 25 50 75 100 h-1 125
GA05118_1302 - 01/2004
Operation
14
3 Operation
3.1 Switching on
The starting pressure for the TURBOVAC can be read
from the chart reproduced in Fig. 8.
Where Sf/ V > 100[h-1], the forevacuum pump and the
TURBOVAC can be switched on simultaneously.
In such a situation the TURBOVAC serves from the very
outset as an effective baffle.
When dealing with larger volumes, the vacuum chamber
will first have to be pumped down with the forevacuum
pump.
Then switch on the cooling and the TURBOVAC (at the
TURBOTRONIK).
Kindly refer to the TURBOTRONIK operating instructions
for details.
Avoid impact and vibration while the pump is running.
3.2 Bakeout
If pressures in the range of 10-8 mbar are to be devel-
oped within a short period of time, the vacuum chamber
and the components installed therein will have to be
baked out. In addition, the TURBOVAC can be baked out
using the flange heater provided for this purpose.
Protect the rotor against intensive, direct heat radiation.
When baking out at the forevacuum side – at a sorption
trap, for example – ensure that the components attached
direct are not heated to more than 80 °C (176 °F).
The forevacuum pump must be in operation so as to
eliminate the vapors liberated at the sorption trap.
3.3 Operation
Caution Exposure of the pump to accelerating for-
ces must be avoided or reduced to such an
extent that the rotor unit will not be excited
by vibrations. In the case of critical applica-
tions you must consult our Applications
Dept. first.
Sf= Pumping speed at the forevacuum pump (m3/h)
V = Chamber volume (m3)
Sf/ V
Starting pressure
Fig. 8 Determining the starting pressure for a TURBOVAC
when evacuating larger volumes
TURBOVAC
151 to 1000
TURBOVAC
50

GA05118_1302 - 01/2004
Operation
15
3.4 Switching off
Switch off the TURBOVAC at the TURBOTRONIK.
Refer to the TURBOTRONIK operating instructions for
details.
Switch off the forevacuum pump.
Air the TURBOVAC before it has come to a full standstill;
refer to Section 3.5.
In TRIVAC pumps the built-in anti-suckback valve will
close automatically and shut off the forevacuum line.
When using forevacuum pumps without an anti-suck-
back valve, close the valve in the forevacuum line.
Close off the cooling water supply or switch off the ven-
tilation immediately after switching off the TURBOVAC in
order to avoid condensate formation in the pump.
If the pump previously handled corrosive gases, it will be
necessary to purge the pump with dry nitrogen for one
hour prior to shut-down. When the system is not in oper-
ation, ensure that neither ambient air nor cleaning
agents can enter the TURBOVAC.
3.5 Venting
As to suitable gases, see Chapter 2.5.
Venting Methods
There are three different methods of venting the turbo-
molecular pump.
In the case processes requiring a purge gas, the pump
must be vented via the purge gas and venting valve
when shutting the pump down.
When additionally venting the vacuum chamber, the ven-
ting function of the purge gas and venting valve must be
opened before opening the chamber valve. This will
ensure the presence of a higher pressure in the area of
the ball bearings compared to the remaining vacuum
area. This will prevent particles, dust or aggressive
gases from being forced through the bearings into the
not yet vented motor chamber of the pump.
Cautious venting of the pump is possible from the high
vacuum side, since here the bearing forces will be
lowest. When doing so, no free jet of gas must be allo-
wed to form on the rotor so as to avoid exposing the rotor
to additional forces.
When venting the pump through its foreline connec-
tion, neither oil nor particles may be entrained in the gas
flow from the forevacuum side into the pump.
0 403530252015105 s
10-2
10-1
103
102
10
1
mbar
Forevacuum pressure
Time
TURBOVAC 50
TURBOVAC 151, 361
TURBOVAC 600, 1000
Fig. 9 Curves showing the pressure rise

GA05118_1302 - 01/2004
Operation
16
Speed of the Pressure Rise
All turbomolecular pumps may be vented at full speed.
However, the pressure must not increase faster than
specified through the pressure rise curve.
The pump must be vented significantly slower when
there is the risk of particles entering into the pump from
the process. During venting, the flow must be of the lami-
nar type in both the vacuum chamber and the turbo-
molecular pump.
The speed of the pressure rise during venting of the run-
ning pump will greatly influence the load on the rotor/sta-
tor pack and the bearings. The slower the pump is ven-
ted, the longer the service life of the bearings will be.
The pump must not be vented to pressures above
atmospheric pressure.
3.6 Removing the pump
from the system
Switch off the pump and vent it as per the instructions in
Sections 3.4 and 3.5.
Warning Take the appropriate precautionary meas-
ures prior to opening the intake or dis-
charge connection if the pump has pre-
viously handled hazardous gases.
If necessary, use gloves, a respirator and/or
protective clothing and work under an
exhaust hood.
If the pump previously handled corrosive gases, then
allow the purge gas to flow for as long as possible befo-
re detaching the pump from the system.
Remove the TURBOVAC from the system.
TURBOVAC pumps which are used in semiconductor pro-
cesses, for example, will be contaminated with process
gases. These gases may be toxic and hazardous to
health. In addition, deposits with similarly dangerous
properties may have formed. Many of these gases and
deposits form acids when they come into contact with
humid air. This will result in serious corrosion damage to
the pump.
To avoid health hazards and corrosion damage when the
pumps are detached from the system, lay a container of
desiccant on the splinter guard and then close the pump
immediately at all flange connections. Store the pump,
with a desiccant, in a PE bag.
Apacking set is included with TURBOVAC models with a
“C” in the type designation. Use this packing set after
detaching the pump from the system.
Faulty (leaky) packing of a TURBOVAC will nullify the
guarantee.
Ordering data
Packing set for
high-vacuum connection flange Order No.
DN 100/160 200 91 240
DN 200 200 91 295
DN 250, 6” ANSI 200 91 262
Pack the pump so that it cannot be damaged during
shipping and so that no contaminants can escape from
the packaging. Protect in particular the flanges, the coo-
lant connection nipples and the cable grommets.
If you return a pump to Leybold, be absolutely sure to
observe the instructions given in Section 4.2.

GA05118_1302 - 01/2004
Maintenance
17
4 Maintenance
After 15,000 operating hours at the latest a standard
bearing exchange will be recommended for the TURBO-
VAC 50 to 361 C. For the TURBOVAC 600 C and 1000 C a
standard bearing exchange will be required after 10,000
operating hours at the latest. Moreover we recommend
to have the rotor assy. exchanged , depending on the
thermal stress on the rotor, after 45,000 to 100,000 ope-
rating hours. This can only be done by Leybold Service.
For this ask for a quotation.
When using purge gas valves
Depending on the degree of contamination of the purge
gas used the filter will clog and will have to be exchan-
ged (our experience indicates that this will become
necessary after 1 to 6 months).
When using an adsorption trap
Regenerate or renew the adsorption agent regularly;
refer to the operating instructions provided with the trap.
Caution The pump must only be opened by such
persons who have been authorised by Ley-
bold to do so.
4.1 Cleaning
Contamination inside the TURBOVAC is indicated by a
deterioration in performance, i.e. an increasing decline in
working pressure.
If there is only slight contamination, such as a coating on
the TURBOVAC interior surfaces due to exposure to the
atmosphere over an extended period of time, for the CF
version the flange heater can be used for cleaning.
The ultimate pressure must be monitored while baking
out under vacuum.
When making the initial examination of the pump, mount
blank flanges to eliminate any possibility of leaks and
desorption in the vacuum chamber.
The pump will have to be disassembled if there is more
extensive contamination. The LEYBOLD Customer
Service Department will have to be consulted here in all
cases.
Caution The rotor is precision balanced; any change
whatsoever, such as loosening or bending
any rotor component, will make re-balan-
cing necessary.
4.2 Service by LEYBOLD
Whenever you send a pump to LEYBOLD, indicate
whether the pump is contaminated or is free of sub-
stances which could pose a health hazard. If it is con-
taminated, specify exactly which substances are in-
volved. You must use the form we have prepared for this
purpose; we will forward that form on request.
Acopy of the form is printed at the end of the operating
instructions: “Declaration of contamination for vacuum
equipment and components”. Another suitable form is
available from the Leybold homepage:
http://www.leyboldvac.de under the headline “customer
service”.
Attach the form to the pump or enclose it to the pump.
Do not place it together with the pump inside the PE bag.
This statement detailing the contamination is required to
satisfy legal requirements and for the protection of our
employees.
LEYBOLD must return to the sender any pumps which
are not accompanied by a contamination statement.

GA05118_1302 - 01/2004
Troubleshooting
18
5 Troubleshooting
Warning When the connector cable to the TURBO-
VAC is attached, the outputs of the TURBO-
TRONIK frequency converter are not free of
voltage.
Before commencing troubleshooting procedures, make
the following simple checks:
Is the TURBOVAC being supplied with electrical energy?
Malfunction
TURBOVAC does not start.
TURBOVAC generates loud
running noises and vibrations.
The TURBOVAC does not
achieve ultimate pressure.
TURBOVAC overheats
(malfunction indication at the
TURBOTRONIK).
The TURBOVAC or the vacu-
um chamber is contaminated
with oil.
Possible cause
Motor connection cable not attached, is loose or is
defective.
Pump has seized.
Rotor is out of balance.
Bearing is defective.
Pump running within the natural frequency range of
the system, causing resonance.
Measurement device is defective.
Measurement gauges are soiled.
Leak at the system, lines or pump.
Minor grime collection at the pump.
The pump is oily.
Forevacuum pump with insufficient pumping speed
or ultimate pressure which is too high.
Leak at the power cord passage port.
TURBOVAC is rotating in the wrong direction.
Forevacuum pressure too high.
Gas volume too great / leak in the system.
Ventilation unit blocked.
Ambient temperature is too high.
Cooling water is lacking or insufficient.
Bearings are defective.
Anti-suckback valve at the forevacuum pump is
defective.
The TURBOVAC was not aired or improperly aired
when shut down.
System configured incorrectly: oil vapor streams
back during forepump operation.
Sorption trap is saturated.
Rectification
Check the motor connection cable and connect cor-
rectly; replace if necessary.
Replace the pump.
Balance the rotor (only by the Leybold Service
Department).
Bearings will have to be replaced (only by the Ley-
bold Service Department).
Change the masses of the system or install vibration
damper to isolate oscillations.
Check the measurement device.
Clean or replace the measurement gauges.
Locate the leaks.
Bake out the pump; see Section 4.1.
Have the pump cleaned (only by the Leybold Service
Department).
Check ultimate pressure of the forevacuum pump or
install a more powerful forevacuum pump.
Locate and repair leaks (only by the Leybold Service
Department).
Check the connector lines; interchange poles if
necessary.
Check the forevacuum pump; install a more powerful
forevacuum pump if necessary.
Seal leak; install a more powerful forevacuum pump
if necessary.
Ensure sufficient supply of cooling air.
Route cooler air to the fan or employ water
cooling option.
Ensure sufficient supply of cooling water.
Have the pump repaired (only by the Leybold Service
Department).
Repair or replace the forevacuum pump.
Check the airing valve and replace if indicated. Air
the TURBOVAC correctly; see Section 3.5.
Install a roughing line or pre-pump for a shorter peri-
od of time or install a sorption trap.
Regenerate or replace the sorption trap.
Are the connections . . .
- from the mains power cord to the frequency converter
- at the connector cable from the frequency converter to
the mains network in good working order?
If a water flow monitoring device is connected, is it func-
tioning properly?
Check the water flow monitoring device by jumping its
terminals and starting the TURBOVAC.
Is the forevacuum pressure sufficient?
Is the vacuum chamber free of leaks?
Observe also the troubleshooting instructions for the
TURBOTRONIK.

Cologne, September 19, 2002
—————————————————————
Dr. Beyer, Design Dept. Manager
GA05118_1302 - 01/2004 19
We, the Leybold Vakuum GmbH, declare herewith that
the commissioning of the incomplete machine designa-
ted below is prohibited until such time as it has been
determined that the system in which this complete
machine is to be installed corresponds with the EC
Machinery Guidelines.
At the same time we certify conformity with the Low-
Voltage Guidelines 73/23/EEC.
When using the appropriate Leybold accessories, e.g.
connector lines, flange heaters or fans, and when power-
ing the pump with the specified Leybold frequency con-
verters, the protection level prescribed in the EMC
Guidelines will be attained
Designation: Turbomolecular pump
Models: TURBOVAC 50
TURBOVAC 50 D2
TURBOVAC 151, 151 C
TURBOVAC 361, 361 C
TURBOVAC 600 C
TURBOVAC 1000 C
EC Manufacturer’s Declaration
in the spirit of Appendix IIb to the 89/392/EEC Machinery Guidelines
Catalog numbers:
854 00/01/02, 800150V0010
856 68
856 30/31/32/33/35
856 70/71/72/73/74/75/77
856 82
855 35/36/38/39, 894 89
As from serial No. A 95 .....
Applicable, harmonized standards:
• EN 292 Part 1 and Part 2 November 1991
• EN 1012 Part 2 1996
• EN 60 204 1993
Applied national standards and technical
specifications:
• DIN 31 001 April 1983
• DIN ISO 1940 December 1993
Cologne, September 19, 2002
—————————————————————
Mr. Bonn, Turbomolecular Pump
Engineering Manager

GA05118_1302 - 01/2004
20
Notes