LEYBOLD TURBOVAC 151 User manual

TURBOVAC
Turbomolecular pumps with external frequency converter
TURBOVAC 151, 151 C
TURBOVAC 361, 361 C
TURBOVAC 600 C
TURBOVAC 1000 C
TURBOVAC 1100 C
and pumps modified by Leybold
Incorporation Declaration & Operating Instructions
GA05118_002_C1

Contents
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Page
0 Important Safety Information 5
0.1 Mechanical hazards 5
0.2 Electrical hazards 6
0.3 Thermal hazards 7
0.4 Hazards caused by materials and substances 7
0.5 Danger of ignition 8
0.6 Dangers in connection with safety-related
measures and precautions 8
0.7 Risk of damaging the pump 8
1 Description 9
1.1 Design 9
1.2 Standard equipment 9
1.4 Ordering data 13
1.5 Accessories 13
2 Transport and storing 15
3 Installation 16
3.1 Conforming utilization 16
3.1.1 Non-conforming utilization 16
3.2 Operating environment 18
3.3 Fitting accessories 18
3.4 Attach the pump to the vacuum chamber 19
3.5 Forevacuum connection 25
3.6 Connect the cooling 26
3.7 Connecting the purge gas and venting device 29
3.8 Connecting the frequency converter 30
4 Operation 32
4.1 Media compatibility / purge gas 32
4.2 Start-up 32
4.3 Switching on 33
4.4 Shutting down 34
4.5 Venting 35
4.6 Bakeout 36
4.7 Removing the pump from the system 36

Contents
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5 Maintenance 37
5.1 Cleaning 37
5.2 Leybold Service 37
6 Troubleshooting 38
7 Waste Disposal 40
EU Declaration of Conformity 41
EC Declaration of Incorporation 42
Original installation and operating instructions.

Safety Information
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Obligation to Provide Information
Before installing and commissioning the pump, carefully read these
Operating Instructions and follow the information so as to ensure optimum
and safe working right from the start.
The Leybold TURBOVAC has been designed for safe and efficient operation
when used properly and in accordance with these Operating Instructions. It is
the responsibility of the user to carefully read and strictly observe all safety
precautions described in this section and throughout the Operating
Instructions. The pump must only be operated in the proper condition and
under the conditions described in the Operating Instructions. It must be oper-
ated and maintained by trained personnel only. Consult local, state, and
national agencies regarding specific requirements and regulations. Address
any further safety, operation and/or maintenance questions to our nearest
office.
DANGER indicates an imminently hazardous situation which, if not avoid-
ed, will result in death or serious injury.
WARNING indicates a potentially hazardous situation which, if not
avoided, could result in death or serious injury.
CAUTION indicates a potentially hazardous situation which, if not avoided,
could result in minor or moderate injury.
NOTICE is used to notify users of installation, operation, programming or
maintenance information that is important, but not hazard related.
We reserve the right to alter the design or any data given in these Operating
Instructions. The illustrations are not binding.
Retain the Operating Instructions for further use.
NOTICE
DANGER
WARNING
CAUTION
NOTICE

Safety Information
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0 Important Safety Information
0.1 Mechanical hazards
1 Avoid exposing any part of the human body to the vacuum.
2 The pressure in the pump must not exceed 1.4 bar (absolute).
3 The pump is intended for generating a vacuum only. If there is a risk of
an overpressure within the system and the pump, then the pump must
be protected against this, by way of an overpressure safety valve, for
example.
4 Vent the pump only up to atmospheric pressure.
5 When using the pump with a purge gas valve, protect the purge gas
supply such that in the event of a malfunction no overpressure can
occur within the system.
6 The pump must be firmly mounted to the vacuum chamber. If the
mounting is not sturdy enough, pump blockage could cause the pump
to break loose; internal pump components could be thrown in all
directions. Never operate the pump (in bench testing, for example)
without proper flanging to the vacuum chamber. Observe the informa-
tion in Section 3.4.
7 We recommend to change the rotor after 80,000 hours of operation at
the latest. Owing to high rotor speeds and high temperatures, the ser-
vice life of the rotor is limited and is also much dependent on the type
of operation and the particular application. Please consult us regarding
maintenance specifically matching the requirements of your applica-
tion.
If the rotor is changed too late, it may be destroyed. Thus in the flange
mounts high forces and torque conditions can occur. The mounting
screws for the pump may be torn off. When using clamped flange
connections at the housing or with components above the housing,
sudden twisting of the entire pump can be experienced.
8 Turbopumps as described in the following operation manual contain a
high portion of kinetic energy due to their high rotational speed in
combination with the specific rotor mass. In case of a malfunction of
the system, for example rotor/stator contact or even a rotor crash, the
rotational energy is released.
9 To avoid the destruction of the equipment and to prevent injuries of the
operating staff the leading European manufacturers of vacuum pumps
strictly recommend to follow the installation instructions as given in this
manual.
WARNING

Safety Information
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0.2 Electrical hazards
1 The electrical connection must only be provided by a trained person.
Please observe the national regulations in the country of use like EN
50110-1 for Europe, for example.
2 Lethal voltages are present at the mains connections. Before starting
with any maintenance and service work, de-energise (lockout/tagout)
the product first.
3 Unplug any connectors only when the mains voltage is switched off
and the pump does no longer turn.
4 Unauthorized device conversion and modifications are prohibited for
safety reasons.
5 Hazardous voltages are present within the frequency converter. When
coming into contact with these, death or severe injury can result. After
the pump has arrived at standstill, disconnect the frequency converter
from the mains power and prevent it against being switched on inad-
vertently (lockout/tagout) before opening it. Basically there is no reason
why the frequency converter should be opened. There are no user ser-
viceable parts inside.
6 When the connector cable is attached, the outputs at the frequency
converter are not free of voltage.
7 Lay connecting lines so that they cannot be damaged. Protect the
lines against humidity and contact with water. Avoid any heat stress on
the line due to unfavourable laying conditions.
8 Suitably support the connecting lines so that the pumps are not
exposed to any major mechanical stress.
9 Do not expose pump, frequency converter and the connections to
dripping water. Note the information on the IP type of protection.
10 When storing pump, frequency converter and connecting lines in a
humid atmosphere, these can suffer corrosion. Corrosion gives rise to
conductive deposits which in turn can cause short-circuits and reduce
the insulation levels of electrical components
11 Transport pump, frequency converter and connecting cables only in
their original packaging so as to avoid any mechanical damage which
in turn may reduce air gaps and creepage distances.
12 When applying external voltages above 42 V to the connection termi-
nals, observe the applicable VDE safety regulations!
13 Make the electrical connections only after pump and accessories (e.g.
air cooler) have been installed mechanically.
DANGER

Safety Information
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0.3 Thermal hazards
1 Handle the equipment only while vented and cooled down.
2 During operation of the pump certain areas can get so hot (80 °C
max.) so that there is the risk of suffering burns. Protect hot parts
against being touched.
3 Note the warning information on the housing surface. If these warning
notices have been removed, covered or obstructed, include corre-
sponding additional warning notices.
0.4 Hazards caused by materials and substances
1 The pump is not suited for pumping of reactive or corrosive media.
If the rotor is attacked by process gases, it can suffer destruction.
Thus in the flange mounts high forces and torque conditions can
occur. The mounting screws for the pump may be torn off. When
using clamped flange connections at the housing or with components
above the housing, sudden twisting of the entire pump can be experi-
enced.
2 When pumping dusty media, use a dust filter.
3 If low concentration corrosive or reactive gases are being pumped,
then operate the pump with purge gas.
4 Please consult us as to which types of pump are required for specific
processes and applications.
5 The forevacuum line must be tight. Hazardous gases can escape at
leaks or the gases being pumped can react with air or humidity.
A leak search will always be required after having installed the pump
and after service work on the vacuum.
Upon delivery the pump has an integral leak rate of < 5 · 10-7 mbar·l/s.
When pumping toxic gases we recommend a leak search on a regular
basis.
6 If the pump has previously handled hazardous gases, implement the
proper precautionary measures before opening the intake or exhaust
connection.
Before opening the pump, purge it for a longer period of time with an
inert gas.
If necessary, use gloves, a respirator and/or protective clothing and
work under an exhaust hood. Firmly seal off the pump.
When shipping the contaminated pump for servicing, please also state
the type of hazard. For this you must use a form which we have pre-
pared for you.
7 Contaminated parts can be detrimental to health and environment.
Before beginning with any work, first find out whether any parts are
contaminated. Adhere to the relevant regulations and take the neces-
sary precautions when handling contaminated parts.
CAUTION
DANGER

Safety Information
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0.5 Danger of ignition
1 During operation the pressure inside the turbomolecular pump is so
low that there is no danger of ignition (at pressures below about 100
mbar). A hazardous condition will be created if flammable mixtures
enter the hot pump at pressures above 100 mbar. During operation
the pump can reach temperatures as high as 120 °C internally, and at
parts of the outside surfaces 80 °C. Sparks could occur in case of
damage to the pump and these could ignite explosive mixtures.
Also note the safety information provided by the gas supplier.
0.6 Dangers in connection with safety-related
measures and precautions
1 The frequency converter is not equipped with its own emergency shut
down switch. Such a facility needs to be provided from the side of the
system.
0.7 Risk of damaging the pump
1 Never touch the rotor. Touching the rotor may cause injury and
damage the rotor bearing.
2 Foreign objects which enter the pump through the intake would cause
serious damage to the rotor. That’s why we recommend installing an
inlet screen. Damages caused during operation without the inlet screen
are excluded from warranty.
3 The contact surfaces of pump housing, vacuum system and centering
ring must be free of grease and dry so as to ensure sufficient stability
in case the rotor seizes.
4 Disconnect and connect the cable connections only while the pump is
turning no longer (green status LED off) and with the mains power
switched off (yellow power LED off). Otherwise there is the risk of dam-
aging the frequency converter.
5 Exposure of the pump to accelerating forces must be avoided or
reduced to such an extent that the rotor unit will not be excited by
vibrations. In the case of critical applications you must consult our
Applications Dept. first.
CAUTION
CAUTION
NOTICE

Description
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1 Description
1.1 Design
The TURBOVAC models 151 to 1100 are turbomolecular pumps featuring
lifetime lubricated bearings. These units are engineered to pump vacuum
chambers down to pressures in the high-vacuum range. A TURBOTRONIK
or Turbo.Drive TD20 classic frequency converter and a forevacuum pump are
required for the operation of the TURBOVAC.
1.2 Standard equipment
The TURBOVAC is shipped in a sealed PE bag which also contains a desic-
cant. The maximum effective life of the desiccant is one year.
■For high-vacuum port with ISO-K flange:
Inlet screen, centering ring with FPM sealing ring; outer ring.
■For high-vacuum port with CF flange: Inlet screen.
■For high-vacuum port with ANSI flange: Inlet screen.
Forevacuum port: Centering ring with O-ring and clamping ring.
Both the purge gas port and the venting port are blanked off for shipping.
In addition the pivoted threaded fittings used to make the coolant connection
are included as standard equipment for the TURBOVAC 151, 361 and 600; if
needed, they can be used to replace the hose nipples installed at the factory.
The electronic frequency converter and the connector cables required for
operation are not included as standard equipment with the pump.
——————————
PE = Polyethylene
FPM = Fluoroelastomer, resistant to temperatures of up to 150°C (300 °F)

Description
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TURBOVAC 151 /
151 C
TURBOVAC 361 / 361 C
High-vacuum port DN 100 ISO-K / 100 CF 100 ISO-K • 100 CF 160 ISO-K • 160 CF
Pumping speed
N2
Ar
He
H2
I · s-1
145
150
135
115
345
350
340
340
400
–
380
370
Max. gas throughput
N2
Ar
H2
mbar ·
I · s-1 1,5
1,3
1
3
2,5
3
2,5
Compression
N2
He
H2
1 · 109
2 · 104
8 · 102
1 · 109
6 · 104
3 · 103
1 · 109
6 · 104
3 · 103
Speed min-1 49 980 45 000 45 000
Ultimate pressure mbar < 1 · 10-10
Max. Inlet pressure (permanent)
with water cooling
mbar 5 · 10-2
Max. forevacuum pressure for N2mbar 5 · 10-1
Recommended forevacuum pump TRIVAC D 4 B bis D 16 B D 16 B bis D 25 B D 16 B bis D 25 B
Run-up time to 95% nominal speed min ≈ 2
Forevacuum port DN 25 KF
Purge gas / vent port DN 10 KF
Cooling water connection (hose nozzle) mm 10
Weight, approx. kg 8 12 12
Max. power consumption / at ultimate
pressure
VA 680 / 480
Max. ambient temperature at operation °C 55
Storing temperature °C – 10 bis + 60
Max. bakeout temperature at CF flange °C 100
Fig. 1.1 TURBOVAC 151 C; TURBOVAC 361 C similar
High-vacuum port
Forevacuum port
Electrical connection
Vent port
Connection for
water cooling Purge
gas port

Description
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TURBOVAC
600 C
TURBOVAC 1000 C TURBOVAC 1100 C
High-vacuum port DN 160 ISO-K •
160 CF
160 ISO-K
/ CF
200 ISO-K
/ CF
250
ISO-K
160
ISO-K
200
ISO-K
250
ISO-K
Pumping speed
N2
He
H2
I · s-1
560
600
570
850
880
900
1100
975
970
1150
1000
1000
710
-
-
830
760
600
1050
980
630
Max. gas throughput
N2
Ar
mbar ·
I · s-1 < 4
< 4
6
3
6.5
6.5
Compression
N2
He
H2
> 109
2 · 104
1,1 · 103
> 109
5 · 104
2 · 103
> 105
-
104
Ultimate pressure mbar < 10-10 < 10-10 < 3 · 10-10
Speed rpm 36,000 36,000 30,000
Run-up time (freq.
converter), approx.
min
4 9 9
Max. Inlet pressure (permanent)
with water cooling
mbar
1 · 10-2 1 · 10-2 1 · 10-2
Max. forevacuum
pressure for N2
mbar 5 · 10-2 5 · 10-2 10-1
Recommended forevacuum
pump
at standard operation
at purge gas operation
TRIVAC
TRIVAC
D 25 B / 40 B
40 B
D 40 B D 65 B / Scroll SC 15/30 D
Run-up time to
95% nominal speed
min
3 - -
Forevacuum port DN 40 KF 40 KF / 63 ISO-K 63 ISO-K
Purge gas / vent port DN 10 KF 10 KF 10 KF
Cooling water connection
(hose nozzle)
mm
10 10 10
Weight, approx. kg 17 25 22
Max. power consumption /
at ultimate pressure
VA
680 / 480 - -
Max. ambient temperature
at operation
°C
55 55 55
Storing temperature °C – 10 to + 60 – 10 to + 60 – 10 to + 60
Max. bakeout temperature
at CF flange
°C
100 100 100

Description
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A High-vacuum port
B Forevacuum port
C Vent port
D Purge gas port
E Connection for water cooling
F Electrical connection
TURBOVAC 1000 C / 1100 C
TURBOVAC 600 C
A
B
F
A
C
E
D
B
F
C
E
D
Fig. 1.2 TURBOVAC 600 C, 1000 C, 1100 C

Description
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1.4 Ordering data
TURBOVAC 151 151 C 361 361 C 600 C 1000 C 1100 C
High-vacuum
port
DN 100 ISO-K 856 31 856 35 856 70
800150V00053)
856 75
800150V00184)
DN 100 CF 856 32 103 41 856 71 112 09
DN 160 ISO-K 856 72 856 77
114 23
800150V0015 855 351)
855 382)
800150V00305)
DN 160 CF 856 73 800150V0017 854 911)
DN 200 CF 117 641)
DN 200 ISO-K 153 001) 800150V00315)
DN 250 ISO-K 855 361)
855 392)
800150V00325)
1) With forevacuum flange DN 40 KF
2) With forevacuum flange DN 63 ISO-K
3) Venting flange, turned by 180°
4) Clean room packaging
5) No TURBOGUARD 3 possible
1.5 Accessories
Frequency converter TURBO.DRIVE TD 20classic
without interface 800075V0001
with RS 232 C interface 800075V0002
with RS 485 C interface 800075V0004
with Profibus interface 800075V0003
with 25-way terminal strip 800075V0005
with DeviceNet 800075V0006
with Ethernet/IP 800075V0007
Connecting cable pump - frequency converter
3 m long 857 65
5 m long 857 66
10 m long 857 67
20 m long 857 68
50 m long 800152V0008
60 m long 800152V0007
80 m long 800152V0080
140 m long 800152V0140
Mains cable, 3 m long
Euro plug 800102V0002
UK plug 800102V0003
US plug 5-15 P 800102V1002
Flange heater
DN 100 CF, 230 V, 50 Hz 854 27
DN 100 CF, 110 V, 50 Hz 854 28
DN 160 CF, 230 V, 50 Hz 854 37
DN 160 CF, 110 V, 50 Hz 854 38

Description
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Air cooler
TURBOVAC 151, 361, 230 V AC 855 31
TURBOVAC 151, 361, 110-115 V AC 800152V0016
TURBOVAC 600, 1000, 230 V AC 855 41
TURBOVAC 600, 1000, 110-115 V AC 800152V0017
Vibration absorber
DN 100 ISO-K 800131V0100
DN 100 CF 500 071
DN 160 ISO-K 500 073
DN 160 CF 500 072
Venting valve, normally closed,
24 V DC, DN 16 KF 800120V0011
Power failure venting valve, normally open,
24 V DC, DN 16 KF 800120V0021
Spare filter E 200 18 517
Purge gas and venting valve
230 V AC, 24 sccm, 10 KF, G1/4” 800152V0014
100 - 115 V AC, 24 sccm, 10 KF, G1/4” 800152V0041
24 V DC, 24 sccm, 10 KF, G1/4” 800152V0013
230 V AC, 36 sccm, 10 KF, G1/4” 800152V0040
100 - 115 V AC, 36 sccm, 10 KF, G1/4” 800152V0043
24 V DC, 36 sccm, 10 KF, G1/4” 800152V0012
Filter adapter for gas connection G 1/4” 800110V0012
Spare filter E 200 18 515

Transport and storing
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2 Transport and storing
When moving the heavier pumps, the lower surfaces on the base flange are
suitable for accepting a lifting fork; see Fig. 2.1.
Remove the equipment from the transportation box and keep the packaging.
Make sure that the product has not been damaged during transportation. If
this unit is damaged contact your carrier and inform Leybold if necessary. For
storage of the product, use the packaging provided.
Be careful not to damage the sockets and connections during transporta-
tion.
Do not stand below the pump while connecting or removing the turbomo-
lecular pump.
The turbomolecular pump is shipped in a sealed PE bag with desiccant. Do
not open the sealed package until immediately before installing.
Do not remove the covers and blanking flanges until you are ready to make
the connections, to ensure that the turbomolecular pump is installed under
the cleanest possible conditions.
Turbomolecular pumps which were not operated for a period of over 12
months should be returned to us. For more information on this please con-
tact your local sales partner.
Do not store pump and accessories in a moist atmosphere so as to prevent
these items from suffering corrosion.
keep the packaging
NOTICE
WARNING
Fig. 2.1 Transport

Installation
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3 Installation
3.1 Conforming utilization
The turbomolecular pump is intended for generating a vacuum. It is suited for
non-corrosive processes only.
The turbomolecular pump must be bolted to a rigid vacuum system and con-
nected to a suitable backing pump.
The turbomolecular pump must only be operated with correspondingly speci-
fied frequency converters, the special connecting cables and mounting bolts.
Both pump and frequency converter are intended for being operated within
closed rooms.
The use of any accessories which have not been specified by Leybold is only
allowed after approval by Leybold.
3.1.1 Non-conforming utilization
Non-conforming utilizations for both pump and frequency converter are
among others:
■Pumping of gases and vapours for which the materials of the pump are
unsuitable.
■Operation in connection with processes in which GaAs (gallium arsenide) is
being pumped.
■Pumping of gas mixtures with an oxygen content of > 21%.
■Pumping of corrosive gases and dust containing gases without reverting to
purge gas operation.
■Pumping of condensable vapours without suitably controlling the tempera-
ture of the pump. Upon compression within the pump, these vapours may
condense or form deposits.
■Pumping of dusts and solids without the use of suitable screens and filters.
■Operation at an inadmissibly high forevacuum pressure.
■Operation at inadmissibily high gas loads.
■Utilization of both pump and frequency converter in explosion hazard
areas.
■Non-compliance of the specified maintenance and servicing intervals for
both pump and frequency converter.
■Operation of the pump and drive electronics in environments which
demand protection type IP 20 or higher and where the installation site is
over 1000 m the above sea level.
■Utilization in systems and pump systems in which the pressure may
exceed 1.4 bar abs.
■Operation with an inadequately mounted pump.
■Operation without having flanged the pump to the system or without hav-
ing connected it to a suitable backing pump.

Installation
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■Operation with additional heat sources involving thermal radiation, thermal
conduction via the high vacuum or the forevacuum flange, strong magnetic
fields or very hot process gases, for example.
■Use in systems in which impact stress and vibrations or periodically occur-
ring forces affect pump, frequency converter and cables.
■Operation on moving system or system components (locks or movable
pump systems, for example).
■Operation at vibration absorbers and vacuum components (gate valves,
valves) which are not capable of sustaining the specified deceleration
torque should the pump rotor seize.
■Stepping on pump, add-on parts, drive electronics, flanges and cables to
climb onto the system.
■Fitting of add-on parts to the forevacuum flange which cause an inadmissi-
ble high load.
■Removing, covering or obstructing warning notices.
■Standstill or storing of pump and drive electronics without suitable sealing-
off and drying. Storing in a humid atmosphere can cause corrosion.
■Conversions, manipulations and maintenance work by personnel not
authorised by Leybold.
Any non-conforming utilisation of pump, frequency converter and accesso-
ries can result in severe injury and cause damage to components.
WARNING

Installation
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3.2 Operating environment
Permissible ambient temperature i 5 to 55 °C
no dripping or spraying water, no explo-
sive gas atmospheres
Max. magnetic induction at the surface of
the pump housing
B=5 mT if impinging radially
B=15 mT if impinging axially
Max. radiation resistance 103Gy
Installation altitude up to 1000 m
At altitudes over 1000 m heat dissipation
by the ambient air is impaired.
3.3 Fitting accessories
Air cooling
The air cooling unit is available as a supplementary kit for retrofitting.
When installing the air-cooled TURBOVAC, ensure that there is an unrestrict-
ed flow of air to the fan.
Always maintain a minimum distance of 20 cm (8 inch) to the nearest object.
Ensure that no heated air from neighboring equipment will be drawn in by the
fan.
Connect the fan in the air ventilation unit to the AC mains.
Make the electrical connection for the ventilation unit in such a way that it will
be started and stopped together with the pump itself.
Observe the information given in the operating instructions for the air ventila-
tion unit (GA 05199).

Installation
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3.4 Attach the pump to the vacuum chamber
Never touch the rotor. Touching the rotor may cause injury and damage the
rotor bearing.
The high vacuum flange must be solidly mounted to the vacuum chamber.
Observe Safety Information 0.1.6.
Remove the transport seal from the intake flange and remove the desiccant.
Pay attention to maximum cleanliness when connecting.
In the case of a sudden rotor vane rupture or rotor-stator contact which may
occur in practice (caused, for example, by solid objects from the process
chamber entering the pump through the high vacuum flange), the decelera-
tion momentum needs to be absorbed by the system.
Deceleration Deceleration
TURBOVAC torque [Nm] TURBOVAC torque [Nm]
600 C 2300
151/151 C 220 1000 C 2900
361/361 C 1500 1100 C 2000
In most applications the pump is flanged to the high-vacuum flange at the
apparatus. The pump can be mounted and operated in any desired attitude.
No support is required.
Use exclusively flange connecting components and fittings which have been
manufactured in accordance with DIN 28403, DIN 28404, ISO 1609 (KF- and
ISO-K flange connections) or ISO 3669 (CF flange connections).
The flange material to which the pump is bolted, must have at operating tem-
perature a minimum strength specification of 150 N/mm2.
Operation with vibration absorber
The pump is precision balanced and is generally operated without a reson-
ance damper. To decouple extremely sensitive equipment and to prevent
transfer of external vibrations to the pump a special resonance damper is
available for mounting at the high-vacuum flange.
In this case mount the turbomolecular pump separately. A vibration absorber
cannot reliably sustain the high deceleration torque in case of a rotor seizure.
If additional mounting is not possible, then the pump must be protected by a
suitable shield during operation.
NOTICE
WARNING
Torque when the
rotor seizes

Installation
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If several turbomolecular pumps are installed to the vacuum chamber of the
same system, there is the risk of interference (vibration interference between
the pumps). If such a risk exists please contact Leybold Application Support.
The standard mounting arrangement for the pump is adequate to ensure
earthquake protection. If required mount the system to the floor or the walls.
Install an inlet screen
Foreign objects which enter the pump through the intake would cause seri-
ous damage to the rotor. That’s why we recommend installing an inlet
screen. Damages caused during operation without the inlet screen are
excluded from warranty.
Insert the inlet screen so that the surface curvature is at the bottom and
apply some pressure lightly at the rim so that the inlet screen engages, see
Fig. 3.1.
If dust could pass from the vacuum chamber into the pump, then a micro-
pore filter must be installed between the vacuum chamber and the pump.
Vibration influence
Earthquake protection
NOTICE
Correct
Wrong
Fig. 3.1 Installing the inlet screen