LEYBOLD TRIVAC B SERIES User manual

Part Nos.
112 65/66/75/76 3i
113 25/35 3i
113 28A 3i/o
113 33
140 160/170 3i/o
140 165
170 119
898 199/199-1/208/698
898 227/229
912 65-1/65-2
912 75-2
TRIVAC®B
D 16 B / D 25 B
Rotary Vane Vacuum Pump
ATEX Categories 3 i and 3 i/o
■with mineral oil
Operating Instructions GA01217_002_A5

Contents
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Page
0 Important Safety Information 5
0.1 Mechanical hazards 5
0.2 Electrical hazards 5
0.3 Thermal hazards 6
0.4 Hazards caused by materials and substances 6
0.5 Danger of ignition 7
0.6 Hazard caused by noise 7
0.7 Risk of damaging the pump 8
TRIVAC B ATEX Categories 3 i and 3 i/o Vacuum Pump 9
Classification and Marking of the Pump 9
Explanation of the Symbols 9
Protective Measures 11
1 Description 13
1.1 Function 15
1.2 Lubricants 17
1.3 Supplied Equipment 18
1.4 Technical Data 19
1.5 Accessories 28
2 Transport and Storage 29
3 Installation 30
3.1 Placement 30
3.2 Conforming Utilization 31
3.2.1 Non-conforming Utilization 32
3.3 Connection to the System 34
3.4 Electrical Connections 36
3.4.1 Pump with Single-Phase AC Motor 36
3.4.2 Pump with Three-Phase AC Motor 37
3.5 Connecting the ATEX-Motor 39
3.5.1 General Installation Information 40
3.5.2 Fitting the Coupling 41
3.5.3 Fitting the Motor 42
3.5.4 Electrical Connection 42

Contents
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Original installation and operating instructions.
4 Operation 43
4.1 Media Compatibility 43
4.2 Start-up 43
4.3 Operation 44
4.3.1 Pumping of Non-Condensable Gases and Vapours 44
4.3.2 Pumping of Condensable Gases and Vapours 44
4.3.3 Operating Temperature 45
4.4 Shutdown 45
4.4.1 Controller/Mains Power Failure 46
5 Maintenance 47
5.1 Maintenance Plan 48
5.2 Oerlikon Leybold Vacuum Service 49
5.3 Monitoring the Oil Level 50
5.3.1 Checking the Condition of the Oil 50
5.4 Oil Change 51
5.5 Cleaning the Inlet Screen 53
5.6 Removing and Fitting the Internal Demister 53
5.7 Disassembly and Reassembly of the Electric Motor 55
5.7.1 Checking the Coupling 56
5.8 Replacing the Shaft Seal 56
5.9 Removing and Remounting the Pump Module 59
5.9.1 Removing the Pump Module 59
5.9.2 Remounting the Pump Module 60
6 Troubleshooting 61
7 Wearing Parts and Original Spare Parts 63
8 Waste Disposal 63
EC Declaration of Conformity 64
EC Incorporation Declaration 67

Safety information
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Obligation to Provide Information
Before installing and commissioning the TRIVAC B, carefully read these
Operating Instructions and follow the information so as to ensure optimum
and safe working right from the start.
The Leybold TRIVAC B has been designed for safe and efficient operation
when used properly and in accordance with these Operating Instructions. It is
the responsibility of the user to carefully read and strictly observe all safety
precautions described in this section and throughout the Operating
Instructions. The pump must only be operated in the proper condition
and under the conditions described in the Operating Instructions. It
must be operated and maintained by trained personnel only. Consult local,
state, and national agencies regarding specific requirements and regulations.
Address any further safety, operation and/or maintenance questions to our
nearest office.
Figures
The references to figures, e.g. (4/2) consist of the consecutive Fig. No. and
the Item No. in that order.
We reserve the right to alter the design or any data given in these Operating
Instructions. The illustrations are not binding.
Retain the Operating Instructions for further use.
NOTICE
DANGER GEFAHR bezeichnet eine Gefährdung mit einem hohen
Gefährdungspotenzial. Wird die Gefahr nicht vermieden, sind schwere
Verletzungen oder der Tod die Folge. Änderung
WARNING WARNUNG bezeichnet eine Gefährdung mit einem mittleren
Gefährdungspotenzial. Wird die Warnung nicht berücksichtigt kann es
schwere Verletzungen oder den Tod zur Folge haben.
CAUTION VORSICHT bezeichnet eine Gefährdung mit einem niedrigen
Gefährdungspotenzial. Wird diese nicht beachtet sind geringfügige oder
mäßige Verletzungen die Folge.
NOTICE Information über Eigenschaften oder Anweisung zu einer Handlung,
deren Missachtung zu Schäden an der Pumpe oder an der Anlage führt.

Safety information
55GA01217_C0002_A5 - 0510/20165 - © Oerlikon Leybold Vacuum
0 Important Safety Information
0.1 Mechanical hazards
1 Avoid exposing any part of the human body to the vacuum.
2 Never operate the pump without a connected intake line or without fit-
ting a blank flange.
3 Do not operate the pump with any of the covers removed.
Serious injury may result.
4 The location at which the TRIVAC B (including its accessories) is being
operated should be such that angles over 10° from the vertical are
avoided. Select the operating place so that all controls are easily
accessible.
5 The pump when filled with oil must only be moved in its vertical posi-
tion. Spilled oil involves the risk of falling.
6 Make sure that the gas flow from the exhaust port is not blocked or
restricted in any way.
7 If exhaust gases must be collected or contained, do not allow the
exhaust line to become pressurised. The pressure in the oil box must
not exceed 0.5 bar (g). An exhaust line which is too small in diameter
or which is blocked can result in the formation of overpressures within
the pump. Possible consequences can be a damaged or even burst
open pump. Thus the exhaust line must be checked from time to time
to ensure that there are no obstructions.
8 When moving the TRIVAC B always use the allowed means.
0.2 Electrical hazards
1 The electrical connection must only be provided by a trained person.
Please observe the national regulations in the country of use like EN
50110-1 for Europe, for example.
2 Lethal voltages are present at the mains connections. Before starting
with any maintenance and service work, de-energise (lockout/tagout)
the product first.
3 Lay connecting lines so that they cannot be damaged. Protect the
lines against humidity and contact with water. Avoid any heat stress on
the line due to unfavourable laying conditions.
4 Suitably support the connecting lines so that the pumps are not
exposed to any major mechanical stress.
5 After a mains power failure the pump will run up automatically again.
This also applies in the case of an emergency shutdown. In order to
prevent the pump from running up automatically again, the pump must
be integrated within a control arrangement such that it can only be
switched on manually again after the mains power has returned.
6 Provide an adequate ground connection for the pump so as to avoid
any electrostatic charging.
WARNING
WARNING

Safety information
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0.3 Thermal hazards
1 Under certain ambient conditions the TRIVAC B may attain a tempera-
ture of over 70 °C (158 °F). There then exists the danger of receiving
burns.
Note the symbols on the pump pointing to the hazards, and in the
case of a hot pump wear the required protective clothing. All work on
the “pump still warm from operation” should only be done using pro-
tection gloves.
2 Before servicing and maintenance work always leave the pump to cool
down.
3 Note the warning information on the housing surface. If these warning
notices have been removed, covered or obstructed, include corre-
sponding additional warning notices.
0.4 Hazards caused by materials and substances
1 The vacuum line and the exhaust line must be leaktight. Hazardous
process gases may escape or the pumped gases can react with air or
atmospheric humidity. After installation of the pump and after servicing
work on the vacuum system, a leak search will always be necessary.
When pumping hazardous gases we recommend a leak search on a
regular basis. Leaks in the pump cannot be ruled out under all circum-
stances. When pumping hazardous gases, the operator must ensure
that that leaks at the pump will not be a hazard.
2 Since not all application related hazards for vacuum systems can be
described in detail in these Operating Instructions, Oerlikon Leybold
Vacuum has available a separate document (Safety Booklet) in which
the hazards and general safety concepts for design, operation and
maintenance of vacuum systems are explained.
When planning to pump hazardous substances with this pump, read
the related chapters in the Safety Booklet and in these Operating
Instructions first. You can download the Safety Booklet from our
homepage.
3 The pump is not suited for oxygen operation.
4 Before commissioning the TRIVAC B, make sure that the media which
are to be pumped are compatible with each other so as to avoid haz-
ardous situations. All relevant safety standards and regulations must
be observed.
5 When pumping toxic, chemical, radioactive and corrosive gases as
well as pyrophorous substances, the operating company is under the
obligation to comply with the national and international safety regulati-
ons and guidelines. Regarding the suitability of the TRIVAC B pumps
for special applications in which such gases, respectively substances
shall be pumped, Oerlikon Leybold Vacuum should be consulted first.
6 If the pump has previously handled hazardous gases, implement the
proper precautionary measures before opening the intake or exhaust
connection.
Before opening the pump, purge it for a longer period of time with an
inert gas.
CAUTION
DANGER

Safety information
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If necessary, use gloves, a respirator and/or protective clothing and
work under an exhaust hood. Firmly seal off the pump.
When shipping the contaminated pump for servicing, please also state
the type of hazard. For this you must use a form which we have pre-
pared for you.
7 When cleaning a system in which a TRIVAC pump has been integrat-
ed, all parts in contact with the medium need to be compatible with
the cleaning agent so as to prevent a chemical reaction. Residues of
the cleaning agent within the pump must be avoided.
8 Contaminated parts can be detrimental to health and environment.
Before beginning with any work, first find out whether any parts are
contaminated. Adhere to the relevant regulations and take the neces-
sary precautions when handling contaminated parts.
0.5 Danger of ignition
1 Only those pumps which are equipped with an Atex certified motor are
suited for operation in the explosion hazard areas approved for the
pumps.
2 The standard version of the TRIVAC B is not suited for operation in
explosion hazard areas.
3 The TRIVAC pumps including the accessories are fundamentally not
suited for pumping of combustible and explosive gases or vapours.
The pump including accessories is only suited within the scope of the
ATEX guideline for pumping of explosive gases and vapours. Mixtures
of substances may, regarding the fire and explosion risk be critical or
uncritical. The operating company is under the commitment to analyse
this and rate the hazard potential accordingly so as to therefrom derive
the necessary safety measures which must be introduced.
4 Provided ignitable or pyrophorous substances are present in the
equipment you must:
■ ensure that no air can enter into the equipment,
■ ensure that the system is leak-tight,
■with an inert gas purge (with dry nitrogen, for example) dilute all ignit-
able gases or vapours which may enter into the pump through the
pump’s inlet and/or with an inert gas purge reduce the concentration
of ignitable gases or vapours in the pump and in the exhaust line to
less than a quarter of the lower explosion limit (LEL) published for the
respective gases.
0.6 Hazard caused by noise
The noise level produced by the pump less than 60 dB(A). Suitable
hearing protection measures must be introduced.
CAUTION
CAUTION

Safety information
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0.7 Risk of damaging the pump
1 Before starting up for the first time, the motor circuit must be equipped
with a suitable protective motor switch. Please take note of the infor-
mation in these Operating Instructions and on the electric motor (wiring
diagram).
2 Do not allow the ingestion of small objects (screws, nuts, washers,
pieces of wire, etc.) through the inlet port. For this reason always use
the inlet screen which is supplied as standard.
3 Do not use the pump for applications that produce abrasive or adhe-
sive powders or condensable vapours that can leave adhesive or high
viscosity deposits. When planning to pump vapours other than water
vapour please contact our sales or service department for advice.
4 This pump is suited for pumping water vapour within the specified
water vapour tolerance limits.
5 Avoid vapours that can condense into liquids when being compressed
inside the pump, if these substances exceed the vapour tolerance of
the pump.
6 Before pumping vapours the TRIVAC B should have attained its oper-
ating temperature. This will be the case approximately 30 minutes after
having started the pump. During this warming up phase, the pump
should be separated from the process, by a blocking valve in the
intake line, for example.
7 In the case of wet processes we recommend the installation of liquid
separators upstream and downstream of the pump as well as the use
of the gas ballast.
8 The exhaust line should be laid so that it slopes down and away from
the pump so as to prevent condensate from backstreaming into the
pump.
9 The entry of particles and fluids must be avoided under all
circumstances.
10 Reactive or aggressive substances in the pump chamber may impair
the operating oil or modify it. In addition, such substances may be
incompatible with the materials of the pump (Viton, grey cast iron, alu-
minium, steel, resins, glass etc.).
11 Corrosion, deposits and cracking of oil within the pump are not
allowed.
12 Normal amounts of humidity within the range of the pump’s water
vapour tolerance will not significantly affect pump performance when
the gas ballast is active.
13 When operating the pumps at gas throughput, it is urgently recom-
mended to connect an exhaust filter or use a suitable exhaust line.
Here, the exhaust line must slope down and away from the pump.
14 In the case of custom pumps please note the information provided in
the supplementary sheets.
NOTICE

ATEX
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TRIVAC B ATEX Categories 3 i and 3 i/o Vacuum Pump
Operating Instructions for Operation in Explosion Hazard Areas
The vacuum pumps from the line TRIVAC B Category 3 have been designed
and manufactured especially for the purpose of fulfilling the requirements of
Equipment Group II, Category 3 of the “ATEX Directive” (Directive 94/9/EC)
for conforming utilisation of equipment and protection systems in explosion
hazard areas”.
Classification and Marking of the Pump
In the case of the standard TRIVAC B the inside, i.e. the process gas side of
the pump fulfils the basic safety requirements of the EU Directive 94/9/EC.
The pump is supplied with an electric motor which is not ATEX certified and
has for this reason been marked as follows:
II (i) 3G IIC T4 (50 Hz) T3 (60 Hz) (12°C <Ta< 40°C) X
This pump is not suited for being installed in explosion hazard areas.
Pumps where the inside and the outside of the pump fulfil the basic safety
requirements of the Directive, are supplied with an ATEX certified motor and
have been marked as follows:
II (i) 3G IIC T4 (50 Hz) (12°C <Ta< 40°C) X
II (o) 3G IIC T3 (50 Hz) (12°C <Ta< 40°C) X
Pumps w/o motor 11328A have been marked as follows:
II 3/3G IIC T4; n<1,500 rpm; (12°C <Ta< 40°C)
II 3/3G IIC T3; n<1,800 rpm; (12°C <Ta< 40°C)
II 3/3G IIC T3; n<1,800 rpm; (LVO 210);12°C <Ta< 50°C)
Explanation of the Symbols
II Equipment Group II applies to all equipment for use in areas which can be
endangered by an explosive atmosphere except in underground mining
operations and their related above ground systems which can be endan-
gered by mine gas and/or combustible dust.
(i)/(o) Specifies the category/conditions according to which the inside (i) (i.e.
sections of the equipment in contact with the process gas flow) and the
outside (o) of the equipment are classified provided these differ.
3 Category 3 comprises equipment which is designed such that it can be
operated in agreement with the characteristic quantities (operating parame-
ters) specified by the manufacturer and which ensure a normal level of pro-
tection. Equipment belonging to this category is intended for use in areas
where it needs not to be expected that an explosive atmosphere occurs
due to gases, vapours, mists or raised dust but, in case such an atmos-
phere should occur in spite of this then according to all probability only
rarely and briefly. Equipment belonging to this category ensures during nor-
mal operation the required degree of safety.
Category 3 inside
Category 3 inside, 3 outside

ATEX
10 GA01217_002_A5 - 510/2015 - © Oerlikon Leybold Vacuum
GFor areas with an explosive atmosphere caused by gases, vapours or
mists in the air.
The pump is not suited for utilisation in dusty areas.
IIA, IIB or IIC Explosion Groups: these are subdivisions for equipment
belonging to Group II which is employed in connection with some protec-
tion types. This subdivision is based on the concept of the maximum per-
mitted gap and the minimum ignition current of the explosive mixture. Refer
to Annex A of the European Standard EN 50014 (EN 50014 electrical
apparatus for potentially explosive atmospheres — General requirements).
Equipment marked with IIB is suited for applications which require equip-
ment with the marking IIA. Correspondingly equipment marked with IIC is
suited for applications which require equipment belonging to Exploding
Group IIA or IIB.
T3, T4 Temperature class: classification of operating means depending on
their maximum surface temperature, in agreement with the following table:
Temperature class Maximum surface
temperature (°C)
T1 450
T2 300
T3 200
T4 135
T5 100
T6 85
Pumps belonging to temperature class T4 (with 50 Hz electric motors)
must only be operated with gases or vapours which exhibit an ignition tem-
perature of over 135 °C.
Pumps belonging to temperature class T3 (with 60 Hz electric motors)
must only be operated with gases or vapours which exhibit an ignition tem-
perature of over 200 °C.
The temperature class and the actual maximum surface temperature of the
equipment includes a safety margin with respect to the minimum ignition
temperature of the potentially explosive atmosphere as demanded by EN
13463-1.
50 Hz, 60 Hz Frequency of the electric motor – at a higher frequency the
pump will run faster and produce a higher surface temperature.
Ta Permissible ambient temperature for operating the pump
12 °C < Ta < 40 °C.
XSpecial operating conditions need to be complied with! The special condi-
tions and notes provided in the Operating Instructions apply
NOTICE

ATEX
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Protective Measures
Hot Surfaces
During normal operation of the vacuum pump, compression of the gases
causes the surfaces to heat up resulting in hot surfaces. Tests have shown
in the case of conforming operation of the pump (in accordance with these
instructions) that at the inside of the pump which might come into contact
with a potentially explosive atmosphere attains during operation with a
50Hz motor a maximum temperature of less than 135 °C and during
operation with a 60 Hz motor a maximum temperature of less than 200 °C.
The maximum temperatures are attained during continuous operation at an
inlet pressure ranging between 300 and 500 mbar. The actually attained
temperature depends on the inlet pressure.
The outside of the pump may attain under these conditions a surface tem-
perature of over 80 °C. The maximum temperature is in the case of opera-
tion with a 50 Hz motor less than 135 °C and in the case of operation with
a 60 Hz motor less than 200 °C.
(These temperatures include safety margins in accordance with
EN 13463-1.)
Higher maximum surface temperatures can occur when filling and operat-
ing the pump with types of oil which differ from the Leybold oil LVO 100.
This is due to the frequently worse lubrication and cooling properties of
such oil.
Hot Exhaust Gases
Due to the compression of the gases, the pump will produce in the case of
normal operation hot exhaust gases. The exhaust gas temperatures do not
exceed the maximum surface temperatures stated for the pump.
The exhaust gases need to be disposed of through a suitable exhaust gas
system.
Mechanical Sparks
During normal operation no mechanically produced sparks occur since the
internal surfaces of the pump are covered with oil. The external fan and the
fan cover are so designed that a sufficient clearance is maintained thereby
excluding the possibility of a contact.
Sucking in of particles into the pump needs to be avoided so as to prevent
the formation of hot spots due to friction.
CAUTION
NOTICE
CAUTION
DANGER
NOTICE

ATEX
12 GA01217_002_A5 - 510/2015 - © Oerlikon Leybold Vacuum
Electric Sparks
These can be caused by the electric motor and the accessories supplied
with the pump. If the pump has been approved for operation in areas with
an explosive atmosphere, then motor and supplied accessories have the
same classification as the pump. Motor and accessories need to be
installed and used in agreement with the enclosed manufacturer’s informa-
tion.
Static Electricity
The pump needs to be sufficiently grounded so as to avoid any electrostat-
ic charging. This is attained when properly connecting the electric ground
conductor to the motor. During normal operation no hazardous generation
of charges will occur on the elastomer coupling or the fan (for further infor-
mation relating to the hazards caused by static electricity, see CENELEC
report CLC/TR 50404: 2003 Electrostatics - Code of practice for the
avoidance of hazards due to static electricity).
Wipe plastic parts on the pumps of category 3G outside only with a
moistened piece of cloth.
Only original Leybold oil filters and gas inlet filters must be used since
these have been designed such that proper connection to ground is
ensured. Dust on the surfaces must only be removed using a moist piece
of cloth so as to exclude the possibility of generating sparks.
Chemical Reactions
The pump must not be used in connection with reactive or corrosive
gases, which might result in an exothermal chemical reaction.
Additional Safety Measures
Overheating the pump can give rise to temperatures which exceed the maxi-
mum permitted surface temperature.
In order to prevent overheating, installation and maintenance need to be
done in accordance with the information provided in these Operating
Instructions. Especially the correct oil level needs to be maintained.
The oil must be exchanged within the recommended interval or earlier if con-
taminated by the process gas.
Additional Maintenance Requirements
In those cases where dust can deposit itself on the pump or the motor sur-
faces, measures must be introduced which ensure that such deposits are
removed on a regular basis.
In order to ensure that the defined safety level is complied with, use only
original Leybold spare parts.
In addition to the maintenance work described in the Operating Instructions
every 15,000 operating hours or every three years a complete refurbishment
of the pump including a replacement of the bearings, the motor and the
coupling element should be scheduled.
DANGER
DANGER
DANGER
Maintain the correct oil level

Description
135GA01217_C0002_A5 - 0510/20165 - © Oerlikon Leybold Vacuum
123
Fig. 1 TRIVAC B pump with accessories
1 Oil filter OF 4-25
2 Exhaust filter AF 16-25
3 Condensate Separator AK 16-25
1 Description
TRIVAC B pumps are oil-sealed rotary vane pumps. The TRIVAC D 16 B and
D 25 B are dual-stage pumps. The number in the type designation (16 or 25)
indicates the pumping speed in m3· h-1.
The vacuum pumps from the line TRIVAC B Category 3 have been designed
and manufactured especially for the purpose of fulfilling the requirements of
Equipment Group II, Category 3 of the “ATEX Directive” (Directive 94/9/EG)
for conforming utilisation of equipment and protection systems in explosion
hazard areas”.
TRIVAC B pumps are capable of pumping gases and vapours and evacuat-
ing vessels or vacuum systems down into with the medium vacuum range.
The standard versions of the pump are not suited for pumping of oxygen
exceeding the concentration as found in the atmosphere, and are also not
suited for pumping of hazardous gases or extremely aggressive or corrosive
media.
The inside (the process gas side) of this vacuum pump is so designed and
rated that the occurrence of foreseeable ignition sources can be excluded
during normal operation. Provided the pump is operated within the limits of
the parameters specified in the Operating Instructions, the pump will offer a
normal degree of protection. It is therefore suited for operation under condi-
tions under which it is unlikely that explosive atmospheres are caused by
gases, vapours or mists in the air or should these occur then only rarely and
for a short period of time (i.e. Zone 2). The same conditions apply to outside
components of the pumps which have been certified.
Areas of application
Process gas side

Description
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If only the inside of the pump (process side) has been certified for use in
explosive atmospheres, then the pump itself must not be installed and
operated within explosion hazard areas.
Areas in which explosive atmospheres (gases, vapours or mists) in the air can
occur are classified in three zones according to the frequency and the dura-
tion of the occurrence of an explosive atmosphere.
These zones are designated as Zone 0, 1 and 2. The definitions for these
zones are described in the Annex I of the “Atex Directives (Directive 99/92/
EG) for the improvement of health protection and safety of staff which might
be endangered by explosive atmospheres”.
Notes relating to the definitions for the three zones relating to areas with
explosive atmospheres are given in the Directive 99/92/EG and the corre-
sponding guide (COM (2003) 515), together with the European standard EN
60079-10 (Electrical apparatus for explosive gas atmospheres – Part 10
Classification of hazardous areas). Additionally further information on the
avoidance of explosions and on the topic of explosion protection can be
found in the Directive 99/92/EG and the corresponding guide.
Alternatively the guide of the EU commission on ATEX (reference number.
COM 2003 0515) can also be read by accessing the link:
http://europa.eu.int/eur-lex/
Conforming utilisation of the TRIVAC pumps and compliance with the statu-
tory requirements of the ATEX operator directive (99/92/EG) is the responsi-
bility of the operator.
Via an intermediate flange the drive motor of the TRIVAC B is mounted to the
coupling housing. The pump and motor shafts are directly connected by a
flexible coupling. The bearing points of the pump module are force lubricated
sliding bearings. All controls as well as the oil-level glass and the nameplate
are arranged on the front. All connections are to be found at the sides of the
pump. The oil-level glass is provided with prisms for better observation of the
oil level.
The pump module consists of assembly parts which are pin-fitted so as to
allow easy disassembly and reassembly. The pump module can be easily
removed without special tools.
DANGER
Outside of the pump
Zone 0, 1 and 2
Responsibility of the operator
Drive concept

Description
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Fig. 2 Sectional drawing of the TRIVAC B
1 Intake port
2 Dirt trap
3 Anti-suckback valve
4 Intake channel
5 Vanes
6 Pump chamber
7 Rotor
8 Cover plate, connection for inert gas
ballast
9 Exhaust channel
10 Exhaust valve
11 Internal demister
12 Spring buckles
13 Cover plate, connection for oil filter
1.1 Function
The rotor (2/7), mounted eccentrically in the pump housing (2/6), has two
radially sliding vanes (2/5) which divide the pump chamber into several com-
partments. The volume of each compartment changes periodically with the
rotation of the rotor.
As a result, gas is sucked in at the intake port (2/1). The gas passes through
the dirt trap sieve (2/2), flows past the open anti-suckback valve (2/3) and
then enters the pump chamber. In the pump chamber, the gas is passed on
and compressed, after the inlet aperture is closed by the vane.
The oil injected into the pump chamber is used for sealing and lubricating.
The slap noise of the oil in the pump which usually occurs when attaining the
ultimate pressure is prevented by admitting a very small amount of air into the
pump chamber.
The compressed gas in the pump chamber is ejected through the exhaust
valve (2/10). The oil entrained in the gas is coarsely trapped in the internal
demister (2/11); there the oil is also freed of mechanical impurities. The gas
leaves the TRIVAC B through the exhaust port.
During compression, a controlled amount of air – the so-called gas ballast –
can be allowed to enter the pump chamber by opening the gas ballast valve.
The gas ballast stops condensation of vapours in the pump chamber up to
the limit of the water vapour tolerance as specified in the technical data for
the pump.

Description
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The gas ballast valve is opened (position I) and closed (position 0) by turning
the gas ballast knob (7/5) on the front.
To enable the TRIVAC B to be used at intake pressures as high as
1,000mbar, a special lubricating system was developed featuring force-lubri-
cation of the sliding bearings.
An oil pump (3/6) pumps the oil from the oil reservoir (3/5) into a pressure-
lubrication system which supplies oil to all bearing points (3/2). From there
the oil enters the pump chamber area (3/4) of the vacuum pump.
The oil pump is fitted in the front end plate on the coupling side of the pump
module. The oil suction line is placed low, resulting in a large usable oil reser-
voir.
The oil is separated from the gas in the TRIVAC B in two steps as described
above. First, small droplets are coalesced into large drops in the internal
demister (2/11) fitted above the exhaust valve (2/10). Then, the large drops
fall into the oil reservoir as the exhaust gas is diverted by the inner walls of
the oil case. Thus a low loss of oil is obtained. This and the large usable oil
reservoir ensure long intervals between oil changes even at high intake pres-
sures.
The vacuum is maintained by the TRIVAC B through an integrated hydro-
pneumatic anti-suckback valve (2/3) which is controlled via the oil pressure.
During operation of the TRIVAC B the control piston (4/3) remains sealed
against a spring (4/2) by the oil pressure. The valve disk (4/6) of the anti-
suckback valve is held at the lower position by its own weight (valve open).
When the pump stops (because it has been switched off or because of a fail-
ure), the oil pressure drops and the spring (4/2) presses the control piston
(4/3) up. Thus a connection is provided between the oil case or the oil reser-
voir (4/1) and the piston (4/4) of the anti-suckback valve.
Due to the pressure difference between the oil case and the intake port the
oil presses the piston (4/4) up and the valve plate (4/6) against the valve seat
(4/5). The quantity of oil in the oil reservoir (4/1) prevents the entry of air into
the intake port (2/1) at the beginning of this process.
After the oil has flowed out from the reservoir and when the valve plate rests
on the valve seat, air follows in, which vents the pump chamber and forces
the valve disc (4/6) against its seat.This effectively prevents backstreaming of
oil or oil vapours. The anti-suckback valve (2/3) operates independently of the
operating mode of the pump, i.e. also with gas ballast.

Description
175GA01217_C0002_A5 - 0510/20165 - © Oerlikon Leybold Vacuum
Fig. 3 Schematic of the lubricating system
Fig. 4 Hydropneumatic anti-suckback valve
1 Accessories
2 Bearings
3 Non-return valve
4 Pump chamber of the TRIVAC
5 Oil reservoir
6 Oil pump
1 Oil reservoir 5 Valve seat
2 Spring 6 Valve disk
3 Control piston 7 Gas inlet
4 Anti-suckback piston
1.2 Lubricants
The standard TRIVAC B pumps are ready for operation with mineral oil.
For operating a TRIVAC B pump we specify our vacuum pump oils which are
supplied with the pumps.

Description
18 GA01217_002_A5 - 510/2015 - © Oerlikon Leybold Vacuum
1.3 Supplied Equipment
The equipment supplied with the TRIVAC-B pump includes:
Pump with motor,
1 centering ring,
1 centering ring with dirt trap,
2 clamping rings DN 25 KF,
Operating Instructions,
Spare Parts List.
For protection during shipment, the connection ports are each blanked off by
rubber diaphragms and supporting rings.
Upon delivery from Oerlikon Leybold Vacuum Cologne, the pumps are filled
with the following types of oil:
P/N Oil Accessories
112 65/66/75/76 LVO100
113 25/35 LVO100
113 28/28A LVO100 without motor 1
113 33 LVO210
140 160/170 LVO100
140 165 LVO310 Solenoid valve (2/2-way, 24 V, DC) for gas ballast with angled screw-in connection
for 8 mm outside hose diameter,
oil drain with G1/8 plug on 240 mm long plastic hose
170 119 LVO400
898 199/199-1 Invoil 20 Oil drain tap,
cable with custom plug and pin assignment,
adapter under the intake port for connecting the oil return
with thread 9/16-18UNF-2B
898 208 LVO210
898 227 LVO100 Oil drain tap,
intake port (40 KF) for connecting the oil return
with thread 9/16-18UNF-2B
898 229 LVO100 Oil drain tap,
intake port (40 KF) for connecting the oil return
with thread 9/16-18UNF-2B,
cable with custom plug and pin assignment
898 698 LVO100 Oil drain tap
912 65-1/65-2 LVO100
912 75-2 LVO100
1The fitting of a motor has to comply with the regulations of EN 60204-1 “Safety of machinery - Electrical equipment of machines - Part 1: General require-
ments”.

Description
195GA01217_C0002_A5 - 0510/20165 - © Oerlikon Leybold Vacuum
1.4 Technical Data
TRIVAC B D 16 B D 25 B
two-stage two-stage
Nominal pumping speed 1) m3· h-1 (cfm) 18.9 (11.1) 29.5 (17.4)
Pumping speed 1) m3· h-1 (cfm) 16.5 (9.7) 25.7 (15.1)
Ultimate partial pressure without gas ballast 1) mbar 10-4 10-4
Torr 0.75 · 10-4 0.75 · 10-4
Ultimate total pressure without gas ballast 1) mbar < 2 · 10-3 < 2 · 10-3
Torr < 1.5 · 10-3 < 1.5 · 10-3
Ultimate total pressure with gas ballast 1) mbar < 5 · 10-3 < 5 · 10-3
Torr < 3.8 · 10-3 < 3.8 · 10-3
Water vapour tolerance 1) mbar 25 25
Torr 18.8 18.8
Water vapour capacity g · h-1 305 476
Oil filling, min./max. l 0.45 / 1.0 0.6 / 1.4
Noise level to DIN 45 635 dB (A) 54 / 56 54 / 56
without/with gas ballast
Admissible ambient temperature 2) °C +12 ... +40 +12 ... +40
Weight kg 26 32
Connections, intake and exhaust side DN 25 KF 25 KF
1) In acc. with DIN 28 400 et seq. valid for LVO 100. For other oils the ultimate pressure may differ.
2) The motor may accelerate with a delay when simultaneously an undervoltage is present at the motor and the pump is at the minimum permissible and
ambient temperature. Under such operating conditions the motor protection switch may respond. In this case the motor may be started again.

Description
20 GA01217_002_A5 - 510/2015 - © Oerlikon Leybold Vacuum
Type DN a b b1b2c h h1h2h3m n o
D 16 B 25 KF 82 190 175 150 135 298 250 226 263 280 140 132
D 25 B 142
Length (l) see next page.
Fig. 6 Dimensional drawings for the TRIVAC B pumps (dimensions a, l, b to b2and h1are approximate; dimensions in mm; 1 inch = 25.4 mm)
Fig. 5 Pumping speed characteristics for the TRIVAC B pumps (50 Hz operation, SI units)
Ultimate partial pressure without gas ballast
Ultimate total pressure without gas ballast
Ultimate total pressure with gas ballast
Pressure
Pumping speed