LEYBOLD MAG W 2010 CHT User manual

MAG W 2010 CHT
Turbomolecular Pump
with Magnetic Bearing
MAG.DRIVE 2000
Electronic Frequency
Converter
Software version 1.4.xx
Cat. Nos.
121 31
121 44
Operating Instructions
Vacuum Solutions Application Support Service LEYBOLD VACUUM
GA 05.139/1.02

Contents Page
1 Description . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.1 System overview . . . . . . . . . . . . . . . . . . . . . . 3
1.2 Compatibility with pumped media . . . . . . . . . . 4
1.3 Design of the MAG . . . . . . . . . . . . . . . . . . . . 4
1.4 Function and design of the MAG.DRIVE . . . . 5
1.5 Standard specification . . . . . . . . . . . . . . . . . . 6
1.6 Technical data . . . . . . . . . . . . . . . . . . . . . . . . 6
1.7 Ordering information . . . . . . . . . . . . . . . . . . . 8
2 Installation . . . . . . . . . . . . . . . . . . . . . . . . 13
2.1 General safety information . . . . . . . . . . . . . . 13
2.2 Unpacking - storing - transportation . . . . . . . 13
2.3 Operating environment . . . . . . . . . . . . . . . . 14
2.4 Connecting the MAG
to the vacuum chamber . . . . . . . . . . . . . . . . 14
2.5 Connecting the backing pump . . . . . . . . . . . 19
2.6 Connecting the cooling water . . . . . . . . . . . . 20
2.7 Connecting the purge gas . . . . . . . . . . . . . . 22
2.8 Installing the MAG.DRIVE . . . . . . . . . . . . . . 24
2.8.1 Power supply connection X10 . . . . . . . . . . . 25
2.8.2 Pump connection . . . . . . . . . . . . . . . . . . . . . 26
2.8.3 Control plug X14 . . . . . . . . . . . . . . . . . . . . . 27
2.8.4 Interface connector . . . . . . . . . . . . . . . . . . . 31
3 Operation . . . . . . . . . . . . . . . . . . . . . . . . . 32
3.1 General operation rules . . . . . . . . . . . . . . . . 32
3.2 Operation with the START and STOP keys . 34
3.3 Remote control . . . . . . . . . . . . . . . . . . . . . . 35
4 Plug-in Control . . . . . . . . . . . . . . . . . . . . . 36
4.1 Operation with plug-in control . . . . . . . . . . . 36
4.2 Operating statuses . . . . . . . . . . . . . . . . . . . 38
4.3 Operating menu . . . . . . . . . . . . . . . . . . . . . . 40
4.3.1 Basic menu . . . . . . . . . . . . . . . . . . . . . . . . . 40
4.3.2 Settings converter . . . . . . . . . . . . . . . . . . . . 41
4.3.3 Settings pump . . . . . . . . . . . . . . . . . . . . . . . 42
4.3.4 Settings temperature management system . 42
4.3.6 Total view of the menu . . . . . . . . . . . . . . . . . 43
4.4 Temperature management system . . . . . . . . 44
5 Maintenance . . . . . . . . . . . . . . . . . . . . . . . 46
5.1 Removing the pump from the system . . . . . . 46
5.2 Service at Leybold’s . . . . . . . . . . . . . . . . . . 48
6 Troubleshooting . . . . . . . . . . . . . . . . . . . . 50
6.1 Warning messages . . . . . . . . . . . . . . . . . . . 50
6.2 Failure messages . . . . . . . . . . . . . . . . . . . . 52
6.3 Malfunctions . . . . . . . . . . . . . . . . . . . . . . . . 57
Certifications . . . . . . . . . . . . . . . . . . . . . . . . 58
Forms . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 64
Figures
The references to diagrams, e. g. (1/2) consist of the Fig.
No. and the Item No. in that order.
We reserve the right to alter the design or any data given
in these Operating Instructions. The illustrations are not
binding.
The Operating Instructions are included with the pump
and the converter. If they have different numbers, the
version delivered with the pump describes the pump
correctly and the version delivered with the converter
describes the converter correctly.
Concerning the converter description, this GA
05.139/1.02 is nearly identical to GA 05.135/3.02 for
the standard MAG versions.
See also the last page.
2GA 05.139/1.02 - 06/99

Description
3
GA 05.139/1.02 - 06/99
1 Description
1.1 System overview
The Leybold MAG pumping system consists of:
• The MAG W 2010 CHT turbopump
The MAG are turbomolecular pumps utilizing magne-
tic bearings.They are designed to evacuate vacuum
chambers down to pressure values in the high-vacu-
um range and to pump high gas throughputs.
The pump design allows high temperatures (HT) at
the connection flanges without reduction of the maxi-
mum gas throughput.
• The MAG.DRIVE 2000 frequency converter
The electronic converter converts the single-phase
line supply voltage into a three-phase DC voltage to
drive the pump motor. It also evaluates measured sig-
nals and controls
- the pump functions
- the temperature management system (TMS) and
- the active magnetic bearing system
The MAG.DRIVE 2000 can be operated with the
START and STOP keys, via a plug-in control, or via a
network interface.
• A cable set consisting of:
- BEARING cable
- DRIVE/TMS cable
Fig. 1 MAG W 2010 CHT
Each Fuse 4 A
Fig. 2 MAG.DRIVE Front panel

Description
1.2 Compatibility with
pumped media
The MAG W 2010 CHT is specifically designed for the
needs of the semiconductor industry.
All materials used inside the pump are compatible with
typical gases used for semiconductor processes. Typical
gases are: Cl2, HBr, HF, SF6, Halocarboncompounds,
NF3, SiH4, SiH2Cl2, PH3, AsH3, P, As.
Caution Please consult Leybold regarding the
media which can safely be handled with this
unit.
Corrosion protection
To protect the pump from corrosive gases it is mandatory
to use dry Nitrogen purge during operation of the
pump.The purge gas protects the bearing section and
the motor from corrosive gases.
The rotor and the stator of the pump are KEPLA®-coated
to prevent corrosive attack caused by the process
gases. The corrosion protection of the pump is effective
only when the pump is protected from moisture during
standstill and storage. If the process gas contains moi-
sture, contact Leybold for recommendations.
Sublimation
Some media (e.g. AlCl3) can sublimate in the pump and
form deposits. Thick coatings can infringe on the requi-
red operating clearence and ultimately cause the pump
to seize. These deposits can also react with moisture
and generate corrosive gases (e.g. HCl).This can beco-
me very critical when the pump is exposed to air. Depo-
sits can be avoided in many processes by heating the
pump with TMS (Temperature Management System).
The TMS is integrated in all CHT-versions. The purpose
of the TMS is to keep the baseflange temperature in a
constant range. To achieve the temperature the pump is
equipped with a heaterband.
Some media ( e.g. metall organic compounds ) can
decompose at the hot surface of the pump and build lay-
ers. Please direct any inqueries to the manufacturer.
Caution In order to handle gases or media (e.g.
AlCl3, WOCl4) which can form deposits insi-
de the pump it is required to use the TMS
(Temperature Management System). The
temperature selected for such processes
has to be set to the maximum value (62°C).
4GA 05.139/1.02 - 06/99
Ignition danger
During operation the pressure inside the MAG is so low
that there is no danger of ignition (at pressures below
about 100 mbar). A hazardous condition will be created
if flammable mixtures enter the hot pump at pressures
above 100 mbar. During operation the pump can reach
temperatures as high as 120°C (248°F). If the pump is
damaged, sparks could occur which could ignite explosi-
ve mixtures.
1.3 Design of the MAG
The MAG comprises basically the pump housing, the
multistage rotor with the stator package, the drive, and a
magnetic bearing.
Rotor
The rotor is made from a high strength aluminium alloy.
The rotor and the stator plates are protected with a spe-
cial ceramic layer ( KEPLA-COAT®). The rotor is a multi-
stage axial-flow turbine with a screw stage.
The rotor is machined from one piece and the geometry
of the the blades is optimized for high compression and
pumping speed of the typical gases used in semicon-
ductor manufacturing processes ( e.g. SF6, Ar, BCl3).
Bearings
The MAG has a built-in precision 5-axis controlled
magnetic bearing. The rotor is suspended by trouble-
free magnets:
• along two orthogonal axes in each of two radial planes
• and completely in the axial direction
The bearing concept allows for low vibration operations
and insures operation of the pump in any mounting posi-
tion. Magnetic bearings also guarantee ultra-clean vacu-
um because no grease is used for lubrication of bea-
rings.
Two touch down bearings are provided to stabilize the
rotor mechanically if impacts occur during operation.
They are only used in case of the breaking of the power
supply or BEARING cable during operation, strong
shocks, or faulty electronics.

GA 05.139/1.02 - 06/99
Description
5
Motor and control
ADC motor without commutator is used to power the
rotor.
Drive voltage for the motor and the operating voltage for
the magnetic bearing are supplied by the MAG.DRIVE
frequency converter. It also handles the automatic moni-
toring of these systems.
The pump is equipped with a data storage device which
stores the important operating parameters during the
complete operation time of the pump.
The converter monitors continously all important opera-
ting parameters and provides warning and alarm signals
in case the operating conditions exceed the specification
or the set threshold.
1.4 Function and design of
the MAG.DRIVE
The MAG.DRIVE 2000 electronic converter is used to
drive the MAG turbo-molecular pumps.
The electronic converter converts the single-phase line
supply voltage into a three-phase DC voltage to control
and monitor the electronically-commutated DC motor. It
also evaluates measured signals and controls (open-
loop and closed-loop) the pump functions.
The temperature management system (TMS) and the
magnetic bearing control system are integrated into the
converter. The TMS regulates the pump temperature by
switching the heating on/off or cooling the pump. The
magnetic bearing control system actively controls the
pump rotor in five axes (closed-loop control).
All parameters required for pump operation and the
listed faults and operating hours are stored in a non-
volatile memory in the pump. When the converter is swit-
ched on, the data are loaded into the converter from the
pump.
The outputs of the electronic converter are no-load and
short-circuit proof.
For remote control via control connector X14 we recom-
mend that either a relay or optocoupler is used to provi-
de electrical decoupling.
Housing
The converter is supplied with a closed housing. It can
be installed in a 19” cabinet; see Section 2.8.
Front panel
Main switch
9-pin connecting socket for the plug-in control or for
connection of a serial interface
2 short-stroke keys
1 green/red STATUS LED
1 green COM LED (communications interface)
1 green MAIN LED (line supply voltage)
2 fuses TMS (Temperature Management System)
The optional plug-in control has 10 keys and 1 LCD with
2 lines, each 16 characters. The plug-in control displays
operating statuses and failures and allows the configura-
tion of the pumping system.
Rear panel
X14 50-pin D socket connector for remote monitoring
and open-loop control
X19 3-pin Hirschmann connector for the connection to
the mains supply
X20 55-pin MIL standard socket connector for internal
sensors and magnetic bearing connection
X21 41-pin MILstandard socket connector for the motor,
TMS, and purge valve connection
Spare slot for optional network cards, e.g. Device
Net

GA 05.139/1.02 - 06/99
Description
6
1.6 Technical data
MAG W 2010 CHT
Pumping speed for N2measured
with splinter guard (PNEUROP) 1650 l·s-1
Gas flow (continuous operation
with Argon) 1300 sccm
Compression for N2>108
Ultimate pressure as to DIN 28 400 < 10-8 mbar
Max. forevacuum pressure
with Nitrogen 3.5 mbar
with Argon 4.3 mbar
Rotor Speed 28,800 min-1
Run-up time < 8 min
Braking time with/without venting 1 / < 7.5 min
Cooling water
Cooling connection,
Swagelok tube OD 1/4“
Cooling water temperature 10 to 30 °C
50 to 86 °F
Inlet pressure 2 to 6 bar (absolute)
(i.e. 1 to 5 bar over atmosphere)
Base flange temperature 30 to 62 °C
(controlled) 86 to 144 °F
Weight approx. 65 kg
High-vacuum connection flange DN 250 ISO-F
Max. high-vacuum flange temperature 85 °C
185 °F
Forevacuum connection flange DN 40 KF
Recommended backing pump DRYVAC 50
Admissible ambient temperature 5 to 40 °C
40 to 104 °F
Storage temperature -10 to +60 °C
14 to 140 °F
Max. relative air humidity 95%
(non-condensing)
Degree of protection IP 20
(EN 60529)
Purge Gas
Purge gas: dry nitrogen, argon or similar
Purge gas throughput 0.5 to 0.65 mbar·l·s-1
30 to 40 sccm
Connection: VCR Nut 1/4“
1.5 Standard specification
MAG
The turbomolecular pumps are shipped complete,
sealed in a PE bag containing a desiccant.
The maximum effective life time of the desiccant is one
year.
The intake flange is sealed with a transport seal, the
forevacuum flange with a plastic cap.
For the intake flange, a centering ring with FPM O-ring,
outer ring, and a splinter guard are enclosed.
We also provide the bolts for attaching the pump to your
tool. To avoid any safety risk we highly recommend using
only the bolts provided with the pump. Refer also to Sec-
tion 2.4 „Connecting the MAG ...“.
The electronic frequency converter MAG DRIVE as well
as the cables required for operation must be ordered
seperately.
In addition, a seal kit is included to seal the pump tightly
if it is removed from the process.
MAG.DRIVE
• Converter
• Line supply cable with USA connector, approx. 3m
•Line supply cable with EURO connector, approx. 3 m
•2 spare fuses for the TMS (miniature fuses 5 x 20
mm, F4A; according to IEC 127-2/1) and 2 fuse hol-
ders 6.3 x 30 mm
• Connector for control plug X14 (pins 47/48 bridged)
Cable Set
• BEARING cable
• DRIVE/TMS cable

GA 05.139/1.02 - 06/99
Description
7
X19
X14 X20
X21
Each Fuse 4 A
Start Stop
Esc Mon Prog Enter
+
_
Each Fuse 4 A
Fig. 3 Front panel
X14 Connection control plug
X19 Mains connection
X20 Connection magnetic
bearing
X21 Connection pump motor and
TMS
Fig.4 Rear panel with connections
MAG.DRIVE 2000
MAG.DRIVE 2000 with plug-in control

Description
1.7 Ordering data
Order No.
MAG W 2010 CHT 121 31
Seal Kit DN 250 standard 200 91 641
Seal Kit DN 250 metal 200 07 901
MAG.DRIVE 2000 converter 121 35
MAG.DRIVE 2000 converter (AMAT part no.) 121 44
Plug-in control 121 36
MAG.DRIVE 2000 with DeviceNet 121 37
Connecting cables, converter — pump see Fig.5
19“ installation frame 161 00
Connector for hardware interface
from 25 pins to 50 pins on request
Purge/vent valve 121 33
8GA 05.139/1.02 - 06/99
Technical data (continued)
MAG.DRIVE
Voltage range 200 - 240 V +10% -15%
Line supply frequency 50 / 60 Hz
Load
Stand-by approx. 100 W
Continuous (rated speed) 810 W
Maximum 1800 W
Max. voltage motor 60 V
Maximum pump current 20 A rms
Continuous pump current, max. 15 A rms
Maximum frequency 480 Hz
Load capability, relay output 42 V, 1 A
Temperature during operation 0-45°C
Storage temperature - 10°C to + 60°C
Relative air humidity Class F acc. to DIN 400 40
Overvoltage category II
Contamination level 2
in accordance with EN 61010
Weight 10 kg
The units have degree of protection IP20 in accordance
with EN 60529
(protection against the ingress of solid foreign bodies >
12 mm diameter (finger). It is not protected against the
ingress of water with damaging effects.)
An increased degree of protection, e.g. IP54 can only be
implemented by mounting the converter in an additional
housing.

Description
9
GA 05.139/1.02 - 06/99
0°
270°90°
40°
180°
BEARING
connection
DRIVE/TMS
connection
Connecting cables converter — pump
Length Cable Cable outlet Cable outlet Order No.
Converter Pump
—————————————————————————————————————————
1.5 m BEARING bended 40°bended 140°121 29
1.5 m DRIVE/TMS bended 40°bended 225° (DRIVE) 121 30
bended 185° (TMS)
3 m BEARING straight straight 121 17
3 m DRIVE/TMS straight straight 121 18
5 m BEARING bended 225°straight 121 19
5 m DRIVE/TMS bended 180°straight 121 20
10 m BEARING bended 225°straight 121 21
10 m DRIVE/TMS bended 180°straight 121 22
20 m BEARING bended 225°straight 121 25
20 m DRIVE/TMS bended 180°straight 121 26
20 m BEARING bended 225°bended 235°121 45
20 m DRIVE bended 180°bended 235°121 46
(only for MAG
W 2010 C)
Fig. 5 Overview and ordering data for connecting cables
0°
DRIVE
connection BEARING
connection
TMS
connection
180°
225°

Description
10 GA 05.139/1.02 - 06/99
Fig. 6 Dimensional drawing and standard fixing of the MAG.DRIVE; dimensions in mm
START
STOP
Com
Status
Main
X7
Fuses TMS
MAG.DRIVE 2000
Each Fuse 4 A
19“ installation frame
4 x M3 screws
455
113
196
128
135
27 max. 115
122.4
198 Ø 3.3
Each Fuse 4 A
straight plugs
bended plugs

Description
11
GA 05.139/1.02 - 06/99
Fig. 7 MAG W 2010 CHT, Dimensions in mm
DN 40
DN 250 ISO F
272
386
303 16
ø355
ø335
ø261
400
ø199
320.5
ø284
201
ø310
336
12x60 (=360 )
°
11
ø310
30
°
°
18°
51°
18°
10
30°
35°
421
102
115

Description
12 GA 05.139/1.02 - 06/99
10-1
10-2
10-3
10-4
50 sccm
100 sccm
200 sccm
500 sccm
1000 sccm
10-2 10-1 1 10
Torr
Torr
Fig. 9 MAG W 2010 CHT: operation diagram for nitrogen
High vacuum pressure
Forevacuum pressure
Rotor speed 480 Hz
Purge gas flow 36 sccm Nitrogen
with splinter guard
Forepump D 65 B + WS 251
Pipe 1 m DN 40
according to PNEUROP
1500
1000
500
0
2000
10-2 10-1 1
Torr
10-3 10-4
l/s
MAG W 2010 C
High Vacuum Pressure
Fig. 8 Pumping speed curve for Nitrogen
Pumping speed
Rotor speed 480 Hz
Purge gas flow 36 sccm Nitrogen
with splinter guard
Forepump D 65 B + WS 251
Pipe 1 m DN 40
according to PNEUROP
HT

Installation
13
GA 05.139/1.02 - 06/99
Warning Unauthorized opening of the converter
voids the warranty.
Before opening the converter, always dis-
connect it from the mains and the pump!
Before disconnecting any cables make sure
that the converter is switched off and the
pump has come to a standstill.
When applying external voltage in excess
of 42 V to terminals of the device, observe
local safety regulations!
Unauthorized device conversion and modi-
fications are prohibited for safety reasons.
Please keep this Operating Instruction for future referen-
ce.
2.2 Unpacking - storing -
transportation
Remove the equipment from the transportation box and
keep the packaging. Make sure that the product has not
been damaged during transportation. If this unit is dama-
ged contact your carrier and inform LEYBOLD if neces-
sary. For storage of the product, use the packaging pro-
vided.
Lift the pump by the crane eyelets or move it with at least
two persons.
You can position the pump on the base plate for trans-
port with a lift-truck. Protect the pump against slipping
and tipping over.
Caution Be careful not to damage the sockets and
coolant connections during transportation.
Do not stand below the pump while connecting or remo-
ving the MAG.
The MAG is shipped in a sealed PE bag with desiccant.
Do not open the sealed package until immediately befo-
re installing.
Do not remove the covers and blanking flanges until you
are ready to make the connections, to ensure that the
MAG is installed under the cleanest possible conditions.
2 Installation
2.1 General safety information
Warning
Indicates procedures that must be strictly observed to
prevent hazards to persons.
Caution
Indicates procedures that must be strictly observed to
prevent damage to, or destruction of the MAG.
Warning Never expose any parts of the body to the
vacuum.
Warning The converter has dangerous voltage
levels.
Failure to strictly follow the instructions in
this Manual can result in death, severe
bodily injuries or significant material dama-
ge.
Only suitably qualified personnel are per-
mitted to work on the pump or converter.
Personnel must be completely knowledgea-
ble of all warning information and measures
which are specified in this Instruction
manual for transporting, installing, and ope-
rating the unit.
Qualified personnel
Qualified electrical personnel in this instruction manual
means a person who has received electrical engineering
instruction or is an electrical expert in accordance with
EN 60204, Part 1, 3.30 respectivly 3.55.
Warning The device contains electrostatically sensi-
tive devices (ESD)!

Installation
14 GA 05.139/1.02 - 06/99
1
2
1Aluminum cover
2 Screws
Fig. 10 Removing the transport seal
2.3 Operating environment
When using the MAG inside a magnetic field, the
magnetic induction at the pump housing must not ex-
ceed 5 mT; (1 mT (milliTesla) = 10 G (Gauß))
Exceeding this limit can cause excessive rotor heating
due to the eddy currents generated in this situation. It is
therefore necessary to provide suitable shielding in such
cases.
The standard version of the MAG is resistant to radiation
at levels up to 103Gy. (1 Gy (Gray) = 100 rad)
The ambient temperature must not exceed 40°C
(104 °F).
The noise level when the pump is running is below 70
dB(A). No acoustic insulation is required.
2.4 Connecting the MAG to
the vacuum chamber
The MAG is shipped in a sealed PE bag with desiccant.
Do not open the package until immediately before instal-
ling.
Do not remove the covers and blanking flanges until you
are ready to make the connections, to ensure that the
MAG is installed under the cleanest possible conditions.
Pay attention to maximum cleanliness when connecting.
Remove the transport seal from the intake flange. To do
so unscrew the screws (10/2) and remove the aluminum
cover. We recommend saving the transport seal for
maintenance.
Foreign objects entering the pump through the high-va-
cuum flange can cause serious damage to the rotor.
That’s why the splinter guard must always be installed.
Damages caused during operation without the splinter
guard are excluded from warranty.
Caution Install the splinter guard as shown in Fig.
11. Installing the splinter guard upside down
may lead to contact between splinter guard
and rotor during fast venting of the pump.
Correct
Wrong
Fig. 11 Installing the splinter guard

Installation
15
GA 05.139/1.02 - 06/99
Fig. 12 Connection elements
Intake flange
Forevacuum flange
Cooling water out
Cooling water in
Purge gas connector
(behind the pump)
Warning The pump must be securely attached. If the
pump should suddenly seize, inadequate
attachment could cause the pump to break
away or allow internal pump parts to be dis-
charged. Never operate the pump (in bench
tests, for instance) without its being con-
nected at the vacuum chamber.
If the pump should suddenly seize, the dec-
celeration torque of 60,000 Nm will have to
be absorbed by the system. To accomplish
this, use all 12 bolts provided by Leybold for
fastening the high-vacuum flange; see also
Fig. 15.
Mount the MAG as close as possible to the vacuum
chamber. If the MAG is permanently flanged to a vacu-
um chamber with a weight exceeding 500 kg, it will not
be necessary to secure it in any other way.
The vacuum chamber must be securely attached to the
floor or a solid wall.
In case of lighter vacuum vessels secure the pump addi-
tionally. The pump’s bottom is equipped with tappered
holes for fastening a support; see Fig. 14.
If the pump is exposed to shocks, e.g. by a gate valve,
secure the pump so that it is supported in the direction of
the shock.
Earthquake protection
For earthquake protection fix the pump as shown in Fig.
13,14 and 15. Depending on the chamber’s weight and
fixing use the boreholes in the pump’s bottom in additi-
on.
The standard fixing for the converter is shown in Fig. 6.
We recommend installing an isolation valve between the
pump and the chamber. The valve should be closed
during wet cleans of the chamber and in case of pump
failures which will lead to a pump shut down. The valve
should normally be closed with power off.
Warning The pump can become so hot during ope-
ration (> 85°C, > 185 °F) that it represents
a burn hazard:
Provide protection against contact with the
hot components.

GA 05.139/1.02 - 06/99
Installation
16
M = 60,000 Nm
M = 60,000 Nm
Correct Wrong
Fig. 13 Vacuum chamber fixed to the floor
125°
70
°
30
°
ø310
15
°
Fig. 14 Fixing the pump at the bottom
Boreholes M8,
15 mm deep

Installation
17
GA 05.139/1.02 - 06/99
21.5
ll > 15 mm in aluminium
l > 10 mm in steel
Outer ring (stainless steel)
Sealing (FPM)
Centering ring (stainless steel)
Splinter guard
Max. torque = 60,000 Nm
Fig. 15 Fixing the intake flange
Bolts: M10 x 35 / M10 x 40
Quality 12.9 according to DIN 898:
0,2% yield strength > 1080 N/mm2
Bolt torque: 40 Nm

Installation
18 GA 05.139/1.02 - 06/99
Fig. 16 Layout of a turbomolecular pump system
Key to Fig. 16
1 Turbomolecular pump
2 Forevacuum gauge point
3 Backing pump
4 Anti-vibration bellows
5 Forevacuum valve
6 High vacuum valve
7 Purge gas connection
8 Valve in the roughing line
9 Electronic frequency converter
— — — — roughing line; recommended
if shorter cycle times are to be achieved
— · — · — · — · BEARING and DRIVE/TMS cable

Installation
19
GA 05.139/1.02 - 06/99
2.5 Connecting the backing
pump
Atwo stage rotary vane pump or dry-compression
backing pump is required to support operation of the
MAG.
We recommend using our DRYVAC or TRIVAC pump for
this purpose.
In case of high gas throughput, it may also be necessary
to use a roots blower to achieve the backing pressure
necessary for operating the MAG. We recommend our
RUVAC blower for this purpose or our DRYVAC 251/501
systems.
Fig. 16 shows schematically the design of a pump
system incorporating a MAG with an additional foreline
valve and an isolation valve between chamber and
MAG.
The foreline isolation valve is recommended to protect
the MAG from shock venting in case of uncontrolled shut
down of the backing pump. This valve must be able to
close fast enough to avoid pressure increase in the
MAG.
In case of an oil-sealed backing pump the foreline isola-
tion valve protects the MAG from backstreaming oil
vapor during standstill.
Connect the forevacuum flange of the MAG to the
backing pump.
The torque on the forevacuum connection flange must
not exceed the values shown in Fig. 17.
Warning The forevacuum line must be tight. Hazar-
dous gases can escape at leaks or the
gases being pumped can react with the air
or humidity. We recommend a leak check.
M
Mq
M < 150 Nm
Mq< 150 Nm
Fig. 17 Maximum torques for the forevacuum connection

Installation
20 GA 05.139/1.02 - 06/99
Fig. 18 Recommended cooling water flow
5 10 15 20 25 30 35 40
°C
300
250
200
150
120
100
50
0
l/h
Operation window
Flow
Temperature
0123456
bar over
atmosphere
300
250
200
150
120
100
50
0
l/h
Pressure
Flow
2.6 Connecting the cooling
water
Cooling water specifications
Inlet temperature 10 - 30 °C
Inlet pressure 2 to 6 bar absolute
i.e.1 to 5 bar over atmoshere
Cooling water requirement See Fig. 18
Appearance Colorless, clear,
free of oils and greases
Sediments < 250 mg/l
Particle size < 150 µm
Electrical conductivity < 500 µS/cm
pH value 7 to 8.5
Overall hardness (total alkaline earths)
max. 20 °German hardness scale
(= 3.57 mmol/l)
Further information on request.
Connect the cooling water to the connectors; see Fig.
19.
Caution Make sure that you do not mix up the inlet
and the outlet connection. If it is mixed up
the water valve will not work correctly.
Turn off the cooling water supply when the pump is
switched off in order to avoid condensate formation in
the pump.
If you do not close the cooling water it may take longer
to achieve ultimate pressure after start up of the system.
An internal bypass in the cooling water distributor allows
operating the MAG in series with other cooling water
consumers.