LEYBOLD MAG integra Series Manual

MAG integra
Turbomolecular Pumps with Magnetic Bearing
and Frequency Converter
Installation & Operating Instructions 300324726_002_C0
Part Nos.
411300Vxxxx
411600Vxxxx
411700Vxxxx
412200Vxxxx
and pumps modified by
Leybold

Contents
2 300324726_002_C0 - 10/2016 - © Leybold
Page
0 Important Safety Information 5
0.1 Mechanical hazards 5
0.2 Electrical hazards 6
0.3 Thermal hazards 7
0.4 Hazards caused by materials and substances 7
0.5 Danger of ignition 8
0.6 Risk of damaging the pump 9
1 Description 10
1.1 Design and function 11
1.2 Supplied equipment 12
1.3 Technical data 13
1.4 Ordering data 20
1.5 Accessories 21
2 Transport and storing 22
3 Installation 23
3.1 Conforming utilization 23
3.1.1 Non-conforming utilization 23
3.2 Operating environment 25
3.3 Attach the pump to the vacuum chamber 25
3.4 Forevacuum connection 30
3.5 Connecting the cooling water 31
3.5.1 Water Quality 32
3.6 Connect the purge gas and venting valve 34
3.7 Electrical connection for the integrated frequency converter 35
3.8 Relays, LEDs, PLC interface 36

Contents
3300324726_002_C0 - 10/2016 - © Leybold
Original installation and operating instructions.
4 Operation 38
4.1 Media compatibility / purge gas 38
4.2 Interfaces 38
4.3 Switching on 39
4.4 Operation 39
4.5 Switching off 40
4.6 Venting 41
4.7 Removing the pump from the system 42
5 Maintenance 43
5.1 Cleaning 43
5.2 Changing the touch-down bearings 44
5.3 Leybold Service 44
6 Troubleshooting 45
7 Waste Disposal 46
EC Incorporation Declaration 47
EC Declaration of Conformity 48
Certificates 49
Page

Safety Information
4 300324726_002_C0 - 10/2016 - © Leybold
Obligation to Provide Information
Before installing and commissioning the pump, carefully read these
Operating Instructions and follow the information so as to ensure optimum
and safe working right from the start.
The Leybold MAG integra has been designed for safe and efficient opera-
tion when used properly and in accordance with these Operating Instructions.
It is the responsibility of the user to carefully read and strictly observe all safe-
ty precautions described in this section and throughout the Operating
Instructions. The pump must only be operated in the proper condition and
under the conditions described in the Operating Instructions. It must be oper-
ated and maintained by trained personnel only. Consult local, state, and
national agencies regarding specific requirements and regulations. Address
any further safety, operation and/or maintenance questions to our nearest
office.
DANGER indicates an imminently hazardous situation which, if not avoid-
ed, will result in death or serious injury.
WARNING indicates a potentially hazardous situation which, if not
avoided, could result in death or serious injury.
CAUTION indicates a potentially hazardous situation which, if not avoided,
could result in minor or moderate injury.
NOTICE is used to notify users of installation, operation, programming or
maintenance information that is important, but not hazard related.
We reserve the right to alter the design or any data given in these Operating
Instructions. The illustrations are not binding.
Retain the Operating Instructions for further use.
NOTICE
DANGER
WARNING
CAUTION
NOTICE

Safety Information
5300324726_002_C0 - 10/2016 - © Leybold
0 Important Safety Information
0.1 Mechanical hazards
1 Avoid exposing any part of the human body to the vacuum.
2 The pressure in the pump must not exceed 1.4 bar (absolute).
3 The pump is intended for generating a vacuum only. If there is a risk of
an overpressure within the system and the pump, then the pump must
be protected against this, by way of an overpressure safety valve, for
example.
4 Vent the pump only up to atmospheric pressure.
5 When using the pump with a purge gas valve, protect the purge gas
supply such that in the event of a malfunction no overpressure can
occur within the system.
6 The pump must be firmly mounted to the vacuum chamber. If the
mounting is not sturdy enough, pump blockage could cause the pump
to break loose; internal pump components could be thrown in all
directions. Never operate the pump (in bench testing, for example)
without proper flanging to the vacuum chamber. Observe the informa-
tion in Section 3.3.
7 We recommend to change the rotor after 80,000 hours of operation or
20,000 cycles at the latest. Due to high-speed and temperature, the
service life of the rotor is limited. If the rotor is changed too late, it may
be destroyed. Thus in the flange mounts high forces and torque condi-
tions can occur. The mounting screws for the pump may be torn off.
When using clamped flange connections at the housing or with com-
ponents above the housing, sudden twisting of the entire pump can be
experienced.
8 Turbopumps as described in the following operation manual contain a
high portion of kinetic energy due to their high rotational speed in
combination with the specific rotor mass. In case of a malfunction of
the system, for example rotor/stator contact or even a rotor crash, the
rotational energy is released.
9 To avoid the destruction of the equipment and to prevent injuries of the
operating staff the leading European manufacturers of vacuum pumps
strictly recommend to follow the installation instructions as given in this
manual.
WARNING

Safety Information
6 300324726_002_C0 - 10/2016 - © Leybold
0.2 Electrical hazards
1 The electrical connection must only be provided by a trained person.
Please observe the national regulations in the country of use like EN
50110-1 for Europe, for example.
2 Lethal voltages are present at the mains connections. Before starting
with any maintenance and service work, de-energise (lockout/tagout)
the product first.
3 Unplug any connectors only when the mains voltage is switched off
and the pump does no longer turn
4 At speeds approximately below 200 Hz, there will not be enough
power any more for the LEDs, i.e. the pump may still turn with out any
of the LEDs being on.
5 Unauthorized device conversion and modifications are prohibited for
safety reasons.
6 Hazardous voltages are present within the frequency converter. When
coming into contact with these, death or severe injury can result. After
the pump has arrived at standstill, disconnect the frequency converter
from the mains power and prevent it against being switched on inad-
vertently (lockout/tagout) before opening it. Basically there is no reason
why the frequency converter should be opened. There are no user ser-
viceable parts inside.
Should, even so, changes be made to the pump-frequency converter
system then a trained electrician, as specified by the standard
EN50110-1, for example, must perform an electrical safety test again
in accordance with the locally applicable safety regulations.
7 Lay connecting lines so that they cannot be damaged. Protect the
lines against humidity and contact with water. Avoid any heat stress on
the line due to unfavourable laying conditions.
8 Suitably support the connecting lines so that the pumps are not
exposed to any major mechanical stress.
9 Do not expose pump, frequency converter and the connections to
dripping water. Note the information on the IP type of protection.
10 When storing pump, frequency converter and connecting lines in a
humid atmosphere, these can suffer corrosion. Corrosion gives rise to
conductive deposits which in turn can cause short-circuits and reduce
the insulation levels of electrical components
11 Transport pump, frequency converter and connecting cables only in
their original packaging so as to avoid any mechanical damage which
in turn may reduce air gaps and creepage distances.
12 When applying external voltages above 42 V to the connection termi-
nals, observe the applicable VDE safety regulations!
13 Make the electrical connections only after pump and accessories (e.g.
air cooler) have been installed mechanically
WARNING

Safety Information
7300324726_002_C0 - 10/2016 - © Leybold
0.3 Thermal hazards
1 Handle the equipment only while vented and cooled down.
2 During operation of the pump certain areas can get so hot (80 °C
max.) so that there is the risk of suffering burns. Protect hot parts
against being touched.
3 Note the warning information on the housing surface. If these warning
notices have been removed, covered or obstructed, include corre-
sponding additional warning notices.
0.4 Hazards caused by materials and substances
1 The pump is not suited for pumping of reactive, corrosive or toxic
media. If the rotor is attacked by process gases, it can suffer destruc-
tion. Thus in the flange mounts high forces and torque conditions can
occur. The mounting screws for the pump may be torn off. When
using clamped flange connections at the housing or with components
above the housing, sudden twisting of the entire pump can be experi-
enced.
2 The operator of the system must ensure that no plasma is to enter the
pump. Otherwise it may lead to a failure of the pump.
3 When pumping dusty media, use a dust filter.
4 If low concentration corrosive or reactive gases are being pumped,
then operate the pump with purge gas.
5 Please consult us as to which types of pump are required for specific
processes and applications.
6 The forevacuum line must be tight. Hazardous gases can escape at
leaks or the gases being pumped can react with air or humidity.
A leak search will always be required after having installed the pump
and after service work on the vacuum.
Upon delivery the pump has an integral leak rate of < 5 · 10-7 mbar·l/s.
7 If the pump has previously handled hazardous gases, implement the
proper precautionary measures before opening the intake or exhaust
connection.
Before opening the pump, purge it for a longer period of time with an
inert gas.
If necessary, use gloves, a respirator and/or protective clothing and
work under an exhaust hood. Firmly seal off the pump.
When shipping the contaminated pump for servicing, please also state
the type of hazard. For this you must use a form which we have pre-
pared for you.
8 Contaminated parts can be detrimental to health and environment.
Before beginning with any work, first find out whether any parts are
contaminated. Adhere to the relevant regulations and take the neces-
sary precautions when handling contaminated parts.
CAUTION
DANGER

Safety Information
8 300324726_002_C0 - 10/2016 - © Leybold
0.5 Danger of ignition
1 During operation the pressure inside the turbomolecular pump is so
low that there is no danger of ignition (at pressures below about 100
mbar). A hazardous condition will be created if flammable mixtures
enter the hot pump at pressures above 100 mbar. During operation
the pump can reach temperatures as high as 120°C internally, and at
parts of the outside surfaces 80 °C. Sparks could occur in case of
damage to the pump and these could ignite explosive mixtures.
Also note the safety information provided by the gas supplier.
CAUTION

Safety Information
9300324726_002_C0 - 10/2016 - © Leybold
0.6 Risk of damaging the pump
1 Never touch the rotor. Touching the rotor may cause injury and
damage the rotor bearing.
2 Foreign objects which enter the pump through the intake would cause
serious damage to the rotor. That’s why we recommend installing an
inlet screen. Damages caused during operation without the inlet screen
are excluded from warranty.
3 The contact surfaces of pump housing, vacuum system and centering
ring must be free of grease and dry so as to ensure sufficient stability
in case the rotor seizes.
4 Connect a purge gas or venting valve to the correct flange. Confusing
the forevacuum and purge gas flange can cause shock venting of the
pump.
5 The interface connectors have UNC 4-40 threads. Do not use connec-
tors with M3 treads.
6 Disconnect and connect the cable connections only while the pump is
turning no longer (green status LED off) and with the mains power
switched off (yellow power LED off). Otherwise there is the risk of dam-
aging the frequency converter.
7 Do not stop the MAG with the mains. Switching off the mains while the
pump is running will wear out the touch down bearings.
8 Exposure of the pump to accelerating forces must be avoided or
reduced to such an extent that the rotor unit will not be excited by
vibrations. In the case of critical applications you must consult our
Applications Dept. first.
9 Connect the pump in an EMC compliant manner so as to avoid line
related interference.
Pressures given in bar or mbar are absolute values. If exceptionally a gauge
pressure is meant, a “g” is added (bar(g)).
NOTICE

Description
10 300324726_002_C0 - 10/2016 - © Leybold
1 Description
The Leybold MAG integra pumping system consists of:
■The MAG integra turbo pump
The MAG are turbomolecular pumps utilizing magnetic bearings.They are
designed to evacuate vacuum chambers down to pressure values in the
high-vacuum range.
The required frequency converter is integrated into the pump for the
MAG ... iP models.
■The MAG.DRIVE electronic frequency converter
The MAG.DRIVE iM frequency converter is connected to the mains.
It outputs an AC voltage synchronised to the speed for the pump’s motor.
Moreover, the electronic frequency converter processes the measured sig-
nals and controls the magnetic levitation arrangement.
Fig. 1.1 MAG integra models
MAG W 1300 iP
MAG W 1600 iP
MAG W 2000 iP
MAG W 1600 iPL Booster
MAG W 1700 iPL
MAG W 1600 iP Booster
MAG W 1700 iP
MAG W 2200 iPL MAG W 2200 iP

Description
11300324726_002_C0 - 10/2016 - © Leybold
1.1 Design and function
The turbomolecular pump comprises basically the pump housing, the multi-
stage rotor with the stator package, the drive, and a magnetic bearing.
The rotor is made from an aluminum alloy. In addition to the turbine stage the
rotor has a Holweck stage.
The MAG has a built-in precision 5-axes controlled magnetic bearing. The
rotor is suspended by trouble-free magnetic bearings.
The bearing concept allows low vibration operation and insures operation of
the pump in any mounting position. Magnetic bearings also guarantee ultra-
clean vacuum because no grease is used for lubrication of bearings.
Touch down bearings are provided to stabilize the rotor mechanically if
impacts occur during operation. They are only used in case of strong shocks
or faulty electronics.
When interrupting the power supply voltage, the turbomolecular pump will
operate as a generator supplying the frequency converter with power. The
rotor is decelerated down to approximately 100 Hz and will then touch down
on the touchdown bearings.
The MAG has a purge gas device. It is water-cooled.
A controlled synchronous motor is used to power the rotor.
Rotor
Magnetic bearing
Touch-down bearings
High-vacuum flange
Rotor
Stator elements
Upper touch-down
bearings
Holweck stage
Synchronous motor
and magnetic
bearing cartridge
Base flange
Bottom touch-down
bearings
Fig. 1.2 Schematic section of the MAG integra with frequency converter, other models similar
Frequency converter
On/Off switch
Start/Stop keys
Local/Remote key
Service interface
Customer interface
Address switch
for Profibus
LEDs
Mains connection 24 V DC outputs for valves

Description
12 300324726_002_C0 - 10/2016 - © Leybold
Drive voltage for the motor and the operating voltage for the magnetic bear-
ing are supplied by the MAG.DRIVE iM frequency converter. It also handles
the automatic monitoring of these systems.
The converter monitors continously all important operating parameters and
provides warning and alarm signals in case the operating conditions exceed
the specification or the set threshold.
Switching the motor to the generator mode keeps the magnetic bearing unit
in operation even in case of a mains power failure.
The frequency converter has the following interfaces:
■a Profibus or another optional interface, see Section 4.2
■an interface for the Leybold Service (RS 232) and
■three connections for accessories, e.g. valves.
1.2 Supplied equipment
The pumps are shipped sealed in a PE bag with a desiccant to absorb mois-
ture.The maximum useful life of the desiccant is one year.
The forevacuum flange is capped with a protective cap. The purge gas and
venting flange is blank-flanged with centering ring with FPM sealing ring and
a clamping yoke.
The high-vacuum connection elements are not part of the standard
equipment. An inlet screen has been built in.
A mains mating connector for the frequency converter side (IP 54) is sup-
plied. A cable and a mains plug are not part of the standard equipment.
———————————————
PE = Polyethylene
FPM = Fluororubber, resistant to temperatures up to 150°C (302 °F)
Frequency converter

Description
13300324726_002_C0 - 10/2016 - © Leybold
1.3 Technical data
MAG W 1300 iP(L) 1600 iP(L) Booster 1700 iP(L) 2200 iP(L)
High-vacuum flange DN 200 ISO-F 250 ISO-F 250 ISO-F 250 ISO-F
200 CF 250 CF 250 CF
Pumping speed (PNEUROP) I · s-1
N21100 1600 1610 2100
Ar 1050 1470 1480 1900
He 1220 1770 1710 2050
H21130 1570 1660 1750
Max. Compression
N2> 108> 107> 108> 108
Ar > 108> 107> 108> 108
He at 1 sccm 2 · 1056 · 1042 · 1055 · 104
H2at 1 sccm 8 · 1031 · 1034 · 1035 · 103
Max. gas throughput 1) 2) mbar · I · s-1
N2temporary, for pump down 30 60 30 30
N2continuous operation 20 30 20 17
Ar temporary, for pump down 20 30 20 20
Ar continuous operation 15 20 15 12
Max. forevacuum pressure 2) N2/Ar mbar 4 1 4 2.5
Nominal speed 37,800 min-1 33,000 min-1 33,000 min-1 30,600 min-1
Stand-by speed to be set between 13,800 min-1 (230 Hz)
and nominal speed
Ultimate pressure ISO-F / CF flange < 10-8 mbar / < 10-10 mbar
Max. bake-out temperature 80 °C
Run-up time < 5 min < 7 min < 7 min < 10 min
Forevacuum flange DN 40 KF
Purge gas / venting flange DN 16 KF (clamp shoe)
Cooling connection G 1/8”
Weight, approx. 40 kg 45 kg 45 kg 50 kg
Noise level acc. to ISO 3744 < 41 db(A)
Vibration level at high-vacuum flange at max. speed < 0.01 µm
1) The maximum gas throughput for continuous operation in connection with N2or Ar is attainable with a cooling water temperature below
25 °C and a forevacuum pump system having a pumping speed of over 600 m3/h. These values may differ for other operating conditions.
2) Maximum gas throughput and maximum forevacuum pressure cannot be attained simultaneously.

Description
14 300324726_002_C0 - 10/2016 - © Leybold
Technical data for the integrated frequency converter
MAG.DRIVE iM
Supply voltage 200 - 240 V ±10%
Mains frequency 50 / 60 Hz
Power consumption
maximum 750 VA
at ultimate pressure 150 VA
Max. load capability of the relays (interface X1, optional) 32 V, 0.5 A
(for SELV or PELV power circuits only)
Max. load for each valve output 24 VDC, 0.35 A
Temperature during operation 10 - 45 °C
Storage temperature – 10 - 60 °C
Relative air humidity (non condensing) 5 to 85 %
Type of protection IP 54
Overvoltage category II
Contamination level acc. to IEC 61010 2

Description
15300324726_002_C0 - 10/2016 - © Leybold
mbar
10-2
10-3 10-4 10-1
Vorvakuumdruck
101
100
1
10
0.1
mbar·l/s
Durchfluss
Stickstoff
MAG W 1300
Argon
0
200
400
600
800
1000
1200
1400
1600
1800
2000
l/s
Saugvermögen
mbar
10-2
10-3 10-4 10-5 10-6 10-1
Hochvakuumdruck
MAG W 1300
Argon
Stickstoff
Helium
Wasserstoff
2200
Fig. 1.3 Pumping speed curves and operation diagrams for the MAG W 1300
temporary
Continuous
operation
Nitrogen
Throughput
Pressure
Nitrogen
Argon
Argon
Helium
Hydrogen
Inlet pressure
Pumping speed

Description
16 300324726_002_C0 - 10/2016 - © Leybold
0
200
400
600
800
1000
1200
1400
1600
1800
2000
l/s
Saugvermögen
mbar
10
-2
10
-3
10
-4
10
-5
10
-6
10
-1
Hochvakuumdruck
MAG W 1600
Helium
Argon
Stickstoff
Wasserstoff
2200
mbar
10
-2
10
-3
10
-4
10
-1
Vorvakuumdruck
101
100
1
10
0.1
mbar·l/s
Durchfluss
Stickstoff
MAG W 1600
Argon
Fig. 1.4 Pumping speed curves and operation diagrams for the MAG W 1600
temporary
Continuous
operation
Nitrogen
Throughput
Pressure
Hydrogen
Argon
Argon
Helium
Inlet pressure
Pumping speed
Nitrogen

Description
17300324726_002_C0 - 10/2016 - © Leybold
0
200
400
600
800
1000
1200
1400
1600
1800
2000
l/s
Saugvermögen
mbar
10-2
10-3 10-4 10-5 10-6 10-1
Hochvakuumdruck
MAG W 1700
Helium
Wasserstoff
Argon
Stickstoff
mbar
10-2
10-3 10-4 10-1
Vorvakuumdruck
101
100
1
10
0.1
mbar·l/s
Durchfluss
Stickstoff
Argon
MAG W 1700
2200
Fig. 1.5 Pumping speed curves and operation diagrams for the MAG W 1700
temporary
Continuous
operation
Nitrogen
Throughput
Pressure
Nitrogen
Argon
Argon
Helium
Hydrogen
Inlet pressure
Pumping speed

Description
18 300324726_002_C0 - 10/2016 - © Leybold
mbar
10-2
10-3 10-4 10-1
Druck
101
100
1
10
0.1
mbar·l/s
Durchfluss
0
1000
2000
l/s
Saugvermögen
mbar
10-2
10-3 10-4 10-5 10-6 10-1
Hochvakuumdruck
MAG W 2200
Wasserstoff
Stickstoff
Helium
Stickstoff
MAG W 2200
Argon
200
400
600
800
1200
1400
1600
1800
2200
Argon
Fig. 1.6 Pumping speed curves and operation diagrams for the MAG W 2200
temporary
Continuous
operation
Nitrogen
Throughput
Pressure
Nitrogen
Argon
Helium
Inlet pressure
Pumping speed
Argon
Hydrogen

Description
19300324726_002_C0 - 10/2016 - © Leybold
Ø d1
h
94
114
b
17°
17°
260
98
Ø d2
s2
s1
s3
7
I
Vorvakuum Sperrgas
Ø d1
h
h1
DN
251 114
iP iPL
l1
l2
s4
s5
DN ø d1 ø d2 h h1 I l1 l2 b s1 s2 s3 s4 s5
200 ISO-F 285 285 305 442 3111) 3111) 3321) 4201) 42 140 0 15 241
200 CF 254 285 335 472 307 307 – 416 32 164 0 – –
250 ISO-F 335 317 325 463 335 331 374 442 39 154 0 14 259
250 CF 305 317 330 467 335 322 – 432 29 173 0 9 285
250 ISO-F 335 349 355 492 343 340 392 450 34 165 0 12 272
250 CF 305 349 372 509 339 340 – 446 26 187 0 8 302
1) 4 mm for cooling coil
Fig. 1.7 Dimensional drawing of the pumps, dimensions in mm
MAG W
1300
1600/1700
2200
Forevacuum
connection Purge gas
connection

Description
20 300324726_002_C0 - 10/2016 - © Leybold
1.4 Ordering data
Part No.
Pump with integrated converter and purge gas port, Type of protection IP 54*
with Profibus 24 V PLC Interface
MAG W 1300 iP DN 200 ISO-F 411300V0504 411300V0514
MAG W 1300 iP DN 200 CF 411300V0506 411300V0516
MAG W 1300 iPL DN 200 ISO-F 411300V0704 411300V0714
MAG W 1300 iPL DN 200 CF 411300V0706 411300V0716
MAG W 1600 iP Booster DN 250 ISO-F 411600V0504 411600V0514
MAG W 1600 iPL Booster DN 250 ISO-F 411600V0704 411600V0714
MAG W 1700 iP DN 250 ISO-F 411700V0504 411700V0514
MAG W 1700 iP DN 250 CF 411700V0506 411700V0516
MAG W 1700 iPL DN 250 ISO-F 411700V0704 411700V0714
MAG W 1700 iPL DN 250 CF 411700V0706 411700V0716
MAG W 2200 iP DN 250 ISO-F 412200V0504 412200V0514
MAG W 2200 iP DN 250 CF 412200V0506 412200V0516
MAG W 2200 iPL DN 250 ISO-F 412200V0704 412200V0714
MAG W 2200 iPL DN 250 CF 412200V0706 412200V0716
other interfaces on request
* The IP 54 type of protection is only ensured with an IP 54 protection cap on the customer interface.
Pump versions without IP 54 protection cap can only be classified as IP 20.
Please consult with us for an optional IP 54 protection cap.