LEYBOLD TURBOVAC TW 700 User manual

TURBOVAC
TW 700
Turbomolecular Pump with
Integrated Frequency Converter
Cat. No.
800051V0001 to
800051V0007
and modified pumps
Operating Instructions
GA 05.147/3.02
Vacuum Solutions Application Support Service LEYBOLD VACUUM

GA 05.147/3.02 - 06/2002
Description
Contents
Page
1 Description . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
1.1 Design . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
1.2 Standard equipment . . . . . . . . . . . . . . . . . . . . 3
1.3 Ordering data . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.4 Technical data . . . . . . . . . . . . . . . . . . . . . . . . . 6
2 Connections . . . . . . . . . . . . . . . . . . . . . . . . . . 9
2.1 Operating environment . . . . . . . . . . . . . . . . . . 9
2.2 Attaching the pump to the vacuum chamber . . 11
2.3 Forevacuum connection . . . . . . . . . . . . . . . . . 12
2.4 Cooling the pump . . . . . . . . . . . . . . . . . . . . . . 14
2.5 Connecting the purge gas and venting valve . 16
2.6 Electrical connection . . . . . . . . . . . . . . . . . . . 18
2.7 Interface description . . . . . . . . . . . . . . . . . . . . 22
3 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
3.1 Switching on . . . . . . . . . . . . . . . . . . . . . . . . . 28
3.2 Shutting down . . . . . . . . . . . . . . . . . . . . . . . . 28
3.3 Venting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
3.4 Bakeout . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
3.5 Removing the pump from the system . . . . . . . 30
4 Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . 31
4.1 Cleaning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
4.2 Service by LEYBOLD . . . . . . . . . . . . . . . . . . . 31
5 Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . 32
6 Spare parts . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
Figures
The references to the diagrams, e.g. (2/10), consist of the figu-
re number and the item number, in that order.
Warning
Identifies working and operating procedures which must be
strictly observed to prevent hazards to persons.
Caution
Indicates working and operating procedures which must be
strictly observed to prevent damage to or destruction of the
appliance.
We reserve the right to alter the design or any data given in
these operating instructions.
The illustrations are not binding.
1 Description
The TURBOVAC TW 700 is a turbomolecular pump with
compound stage. The frequency converter is integrated.
The pump is designed to evacuate vacuum chambers
down to pressure levels in the high vacuum range. It is
suitable for pumping air and/or clean gases. Aforevacu-
um pump is required for its operation.
These pumps are not suitable for
- pumping liquids
- pumping corrosive or reactive gasses
- operation without a forevacuum pump.
If reactive gases in low concentrations must be pumped
please consult Leybold.
During operation the pressure inside the pump is so low
that there is no danger of ignition (at pressures below
about 20 mbar). A hazardous condition will be created if
flammable mixtures enter the hot pump at pressures
above 20 mbar. During operation the pump can reach
temperatures as high as 110°C (230 °F). Ignition sparks
could occur in case of damage to the pump and these
could ignite explosive mixtures.
We would be glad to consult with you as regards the
media which can safely be handled with this unit.
Warning Never expose any parts of the body to the
vacuum.
1.1 Design
The pumps comprise essentially the pump housing, a
multi-stage rotor with the stator group, and the drive.
The rotor consists of a turbomolecular pumping stage
and a compound pumping stage (= Holweck stage). The
Holweck pumping stage increases the permissible fore-
vacuum pressure level markedly when compared with
the classic turbomolecular pump.
The rotor shaft runs in two ceramic ball bearings, lubri-
cated with grease.
2

Description
The pump is driven by a canned DC motor. In this motor
the rotor and stator windings are separated by a vacu-
um-tight can. Consequently the rotor runs inside the
vacuum while the stator is outside the vacuum. This eli-
minates any need of vacuum feedthroughs.
The integrated frequency converter is cooled by integra-
ted fans. The pump is either equipped with fans for air
cooling or with a cooling coil for water cooling. For pro-
tection it is equipped with temperature sensors.
The pumps have a purge gas device.
The integrated TURBO.DRIVE 700 frequency converter
takes care of pump control. It is supplied with power by
an external power supply.
3
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1.2 Standard equipment
The pumps are shipped sealed in a PE bag with a desic-
cant to absorb moisture.The maximum useful life of the
desiccant is one year.
The KF flanges are blank-flanged with centering ring
with FPM sealing ring and a clamping yoke.
These Operating Instructions and a Declaration of Con-
tamination of Vacuum Equipment are part of the stan-
dard equipment.
The high-vacuum connection elements are not part of
the standard equipment.
Asplinter guard is part of the standard equipment for one
version with CF flange.
————————————-
PE = Polyethylene
FPM = Fluororubber, resistant to temperatures up to 150°C (302 °F)
Fig. 1 Section through a TW 700; simplified representation
High-vacuum connection flange
Rotor / Turbomolecular pumping stage
Stator
Ceramic ball bearings
Rotor / Holweck pumping stage
Motor
Ceramic ball bearings
Space for the frequency converter

Description
4GA 05.147/3.02 - 06/2002
1.3 Ordering data
Part No. Remarks
———————————————————————————————————————————————————
TURBOVAC TW 700
DN 160 ISO-K, air cooled, RS 232 interface 800051V0001 (previous 864 31)
DN 160 ISO-K, water cooled, RS 485 interface 800051V0003 (previous 864 37)
DN 160 ISO-K, air cooled, RS 485 interface 800051V0004 (previous 864 36)
DN 160 ISO-K, water cooled, RS 232 interface 800051V0005 (previous 864 32)
DN 200 CF, water cooled, RS 232 interface,
splinter guard 800051V0002 (previous 136 33)
DN 160 CF, water cooled, RS 485 interface 800051V0006 (previous 114 43)
DN 160 CF, air cooled, RS 485 interface 800051V0007 (previous 136 28)
———————————————————————————————————————————————————
Accessories
Splinter guard DN 160 ISO-K 200 00 307
Splinter guard DN 160 CF 200 17 247
———————————————————————————————————————————————————
Power supply and control unit
TURBO.CONTROL 700 800101V0001
Mains cable with US plug, 3 m 800102V1002
Mains cable with Euro plug, 3 m 800102V0002
DC control cable to TURBOVAC for DC power and control
1 m long 800093V0100
3 m long 800093V0300
5 m long 800093V0500
10 m long 800093V1000
20 m long 800093V2000
———————————————————————————————————————————————————
Power supply unit for the Input: 88 - 265 V AC, 50/60 Hz;
TURBOVAC TW 700 864 45 Output: 59 V DC
Max. power consumption at 220 V: 900 VA;
with constant current limitation
(previous 200 04 680); certified as per
EN 60950, EN 61010, UL 1950, and
CSA 22.2; see Fig. 4
Mains cable with US plug, 3 m 800102V1001
Mains cable with Euro plug, 3 m 800102V0001
59 V DC-connection cable, 3 m long 200 12 729 3 way connector —
5 m long 200 12 730 3x cable lug M5: + 59 V DC, 0 V DC, GND
10 m long 200 12 731
20 m long 200 15 064
———————————————————————————————————————————————————
3 way connector for the 59 V DC
connection cable Hirose HS21P-3 200 12 740 Alternative to the 59 V DC connecting cable
———————————————————————————————————————————————————

Description
Accessories for serial interfaces
Display Palm M100/105* 800110V0105 Display unit for parameters, requires the
software "Turbo.Drive Panel”
Required "Turbo.Drive Panel" software 800110V0104 for the display Palm M100/105, 3.5" floppy
PC software "Turbo.Drive Server" 800110V0102 for Windows 95 and higher, CD-ROM*
• Display, change, save and compare
parameter lists
• Integration of customer’s software
• Record parameter data
Adaptor RS232/RS485 for 220 V/Euro plug 800110V0101
* Can be used in connection with the following
interfaces:
- For frequency converters with RS232 interface.
- For frequency converters with RS485 interface,
a RS232/RS485 adaptor is required.
———————————————————————————————————————————————————
9 way connector for PLC interface socket 152 48 with integrated ON/OFF switch for the pump
(REMOTE X1)
———————————————————————————————————————————————————
Purge gas and venting valve 121 33 24 V DC, 0.6 mbar·l/s (previous 200 91 587)
Connecting piece, pipe 1/4“ OD — See Section 2.5 on how to operate the valves
ISO pipe OD 1/4“ 200 91 672
Connecting piece, pipe — VCR 200 91 674
VCR nut 1/4“ 200 91 675
———————————————————————————————————————————————————
Water cooling complete 200 04 882 G 1/8“ connections
Accessories for the water connections
Adapter G 1/8“ — 1/4“ pipe 200 91 671 2x
Gasket 224 01 207 2x
Adapter G 1/8“ — 10 mm hose nozzle 200 18 366 2x
Gasket 230 02 106 2x
Adapter G 1/8“ — NPT 1/8“ 200 12 742 2x
Gasket 238 20 110 2x
———————————————————————————————————————————————————
Recommended forevacuum pumps
• TRIVAC B series, ECODRY series see Leybold catalog
• Diaphragm pump DIVAC 4.8 VT 127 92
5
GA 05.147/3.02 - 06/2002

Description
1.4 Technical data
Technical data for pumps
High-vacuum connection DN 160 ISO-K
DN 160 CF
Pumping speed* for N2/Ar 680 l·s-1
Pumping speed* for He 530 l·s-1
Pumping speed* for H2300 l·s-1
Ultimate pressure*
with two-stage, oil-sealed
rotary vane pump < 10-9 mbar
with diaphragm pump achieving
ultimate pressure < 5 mbar < 10-7 mbar
Max. permissible forevacuum pressure
(see also Fig. 10) 14 mbar
Operating speed 48,000 r.p.m.
Run-up time, approx. 5 min
Forevacuum connection DN 25 KF
Purge gas connection DN 16 KF
Cooling water
Connection, internal threads G 1/8“
Temperature 15 - 35 °C
Flow see Section 2.4
* as per PNEUROP
Technical data for the integrated frequency
converter TURBO.DRIVE L
Nominal supply voltage 59 V DC
Residual ripple < 2%
max. supply voltage 60 V DC
min. supply voltage 53 V DC
Max. power consumption 500 W
Max. continuous current 7.5 A
Max. current 8.5 A
Max. length of the DC cable
at 3 x 2.5 mm220 m
Load rating, relay output 48 V, 0.5 A
Technical data for pump and frequency converter
Weight of the ISO-K version, approx. 16,5 kg
Noise level
air cooled < 47 dB(A)
water cooled < 44 dB(A)
Ambient temperature
during operation 10 - 45 °C
at standstill -15 - + 60 °C
see Fig. 10 for cooling requirements
Relative air humidity acc. to DIN EN 60721 Class F
Type of protection IP 20
6GA 05.147/3.02 - 06/2002

GA 05.147/3.02 - 06/2002
Description
7
103
102
10
1
l/s
10-5 10-4 10-3 10-2 10-1 1 10
mbar
N2
He
H2
Ar
Fig. 2 Pumping speed curves for the TURBOVAC TW 700
High-vacuum pressure
Pumping speed

Description
8GA 05.147/3.02 - 06/2002
ISO-K
78,3 223
228
Ø a
CF
h
h4
115,5
96
h1
h2h3
24
263
22
46
Fig. 3 Dimensional drawing, dimensions in mm
Warning label
under the pump;
means „Warning:
heat generation“
197 18
11
105 127
63
197 18
227
15
30
7 x M4
L
PE
N
88 - 265 V AC, 50/60 Hz
0 V DC
+ 59 V DC
GND
–O/P
+O/P
Fig. 4 Dimensional drawing of the power supply, dimensions in mm
Fan
Fan
L: Live
PE: Prot. ground
N: Neutral
Ø a h h1h2h3h4
DN 160 ISO-K 180 280 197 39.5 119 12
DN 200 CF 253 290 207 49.5 129 24.5
DN 160 CF 202.5 289 206 48.5 128 22

Connections
9
GA 05.147/3.02 - 06/2002
2 Connections
Caution The pumps are not suitable for pumping
aggressive or corrosive media or those
which contain dust.
Install a micropore filter when pumping
media which contain dust.
Observe the information on media compati-
bility at the beginning of these operating
instructions.
For transporting the pumps, the bottom surfaces of the
frequency converter are suited for accepting the fork of a
fork lifter; see fig. 5. In addition a crane eyelet can be
screwed into the pump’s side (M8 thread)
Caution Be careful not to damage the sockets and
coolant connections during transportation.
Do not stand below the pump while connecting or remov-
ing it.
Do not open the packaging until immediately before
installation.
Do not remove the covers and blank flanges on the
pump until just before attachment to the equipment to
ensure that assembly is carried out under the cleanest
possible conditions.
Warning During operation the pump can become so
hot that there is a danger of receiving burns
(up to approx. 80°C).
Provide protection against contact with the
hot components.
2.1 Operating environment
The maximum permissible ambient temperature is 45 °C
(113 °F). Do not expose the pump or the frequency con-
verter to dripping or spraying water
Places of installation up to 1000 m above sea level (3300
ft) are possible without restrictions. At altitudes over
1000 m heat dissipation by the ambient air is impaired.
For higher places of installation, please ask Leybold.
If the pump is used within a magnetic field, the magnetic
induction at the surface of the pump housing may not
exceed:
B = 5 mT if impinging radially and
B = 15 mT if impinging axially.
Install shielding equipment as appropriate if these values
are exceeded.
The standard version is resistant to radiation up to 103
Gy.
1 mT (milli-Telsa) = 10 G (Gauss)
1 Gy (Gray) = 100 rad
Fig. 5 Transport

REMOTE (X1)
RS 232
ERROR
POWER
STATUS
TURBO.DRIVE
PURGE
REMOTE (X1)
RS485
ERROR
POWER
STATUS
TURBO.DRIVE
Connections
10 GA 05.147/3.02 - 06/2002
High-vacuum
connector flange
Cooling water
connections
Purge gas connection
Cooling air inlets
59 V DC power supply
Fig. 6 Connection elements * PLC = Programmable Logic Control
Borehole M8,
suitable for crane eyelet
Forevacuum connection
Interface connector (RS 232)
(drawn without protective cap)
PLC interface*
REMOTE (X1)
High-vacuum
connector flange
Cooling air inlets
59 V DC power supply
Purge gas connection
Borehole M8,
suitable for crane eyelet
Forevacuum connection
Interface connector
(RS 232 or 485)
(drawn without protective cap)
PLC interface*
REMOTE (X1)
ISO-K version,
air-cooled
CF version,
water-cooled
DN 16 KF
20 mm

Connections
11
GA 05.147/3.02 - 06/2002
Design with ISO-K clamp flange
Lay the O-ring on the centering ring.
The O-ring must be positioned so as to be smooth and
flat; it must not be twisted. Then position the outer ring.
Acollar flange with circlip and the appropriate gasket
may also be used to connect the pump.
The order numbers for the flange components are given
in the Leybold Catalog.
2.2 Attaching the pump to
the vacuum chamber
Warning The high-vacuum flange must be firmly
mounted to the vacuum chamber. If the
mounting is not sturdy enough, pump block-
age could cause the pump to break loose;
internal pump components could be thrown
in all directions.
Never operate the pump (in bench testing,
for example) without proper flanging to the
vacuum chamber.
If the pump should suddenly seize, an ensuing deceler-
ation torque of up to 1680 Nm will have to be absorbed
by the system. To accomplish this,
10 clamping bolts made of steel
(torqued down to 35 Nm, 26 ft-lb) or
6 clamping bolts made of stainless steel
(torqued down to 50 Nm, 37 ft-lb)
are required when securing an ISO-K type high-vacuum
flange.
In most applications the pump is flanged to the high-
vacuum flange at the apparatus. The pump can be
mounted and operated in any orientation.
If foreign objects could pass from the vacuum chamber
into the pump, install a wire mesh splinter guard. Foreign
objects which enter the pump through the intake can
cause serious damage to the rotor. Damage resulting
from foreign objects in the rotor section are excluded
from our guarantee.
If dust could pass from the vacuum chamber into the
pump, then a micropore filter must be installed between
the vacuum chamber and the pump.
The pump is precision balanced and is generally opera-
ted without a vibration absorbers.
Detach the shipping flange from the high-vacuum flange
and remove the desiccant. Pay attention to scrupulous
cleanliness when making the connection.
Fig. 7 Using type ISO-K flanges
Install outer
centering ring

Centering ring
KF flange from
the forevacuum line
Clamping yoke
Screws
Fig. 8 Connecting the forevacuum line
2.3 Forevacuum connection
We recommend using a dry-running diaphragm vacuum
pump or a two-stage TRIVAC rotary vane pump for this
purpose.
Connect the forevacuum line; refer to Figure 8.
To do so, remove the three screws and the clamping
yoke. Remove the shipping flange.
Slide the KF flange from the forevacuum line onto the
centering ring, slide the clamping yoke over the flange,
insert and tighten the three screws.
Warning The forevacuum line must be tight. Hazar-
dous gases can escape at leaks or the
gases being pumped can react with air or
humidity.
Figure 9 is a schematic diagram of a pump system incor-
porating a turbomolecular pump and a TRIVAC foreva-
cuum pump with an anti-suckback valve.
Aseparate safety valve must be provided for oil-sealed
forevacuum pumps without an anti-suckback valve. The
safety valve prevents oil flowing back from the forevacu-
um pump into the turbomolecular pump when the system
is not running.
Connections
12 GA 05.147/3.02 - 06/2002
To ensure that the forevacuum space in the turbomole-
cular pump is kept largely free of oil vapors during ope-
ration as well, we recommend installing an adsorption
trap in the forevacuum line.
Provide a roughing line to achieve the shortest cycle
times.
Ensure that the pump is sufficiently isolated against
vibrations generated by the forevacuum pump.

Connections
13
GA 05.147/3.02 - 06/2002
Fig. 9 Schematic of a turbomolecular pump system
Legend for Fig. 9
1 Turbomolecular pump
2 Forevacuum gauge port
3 Forevacuum pump
4 Vibration absorber
5 Adsorption trap
6 Forevacuum valve
7 Purge gas and venting valve
8 High-vacuum valve
9 Valve in the roughing pump line
— — — — Roughing line; recommended
to achieve the shortest possible cycle times

Connections
14 GA 05.147/3.02 - 06/2002
2.4 Cooling the pump
The cooling for the TW 700 depends on the required
pump performance and the ambient temperature; see
Fig. 10. The pump will be switched off in case of unsuffi-
cient cooling.
Air cooling
The pump is equipped with internal fans which are fed by
the DC supply of the frequency converter. When instal-
ling the pump into a housing, ensure that the flow of coo-
ling air is not restricted; see Fig. 11.
Water cooling
Cooling water specifications
Inlet temperature 15 - 35 °C
Inlet pressure 3 to 7 bar absolute
Cooling water requirement See Fig. 12
Appearance Colorless, clear,
free of oils and greases
Sediments < 250 mg/l
Particle size < 150 µm
pH value 7 to 8.5
Overall hardness (total alkaline earths)
max. 20 °German hardness scale
(= 3.57 mmol/l)
Further information on request.
Connect the coolant hoses and the screw connections
carefully.
Caution Make sure to avoid dripping water or humi-
dity.
If the coolant flow is turned on and off by means of a
solenoid valve, make the electrical connection in such a
way that coolant flow will be started and stopped
together with the pump.
Caution The water-cooled pumps need cooling air
for the frequency converter.
10-2 2 4 6 8 10 12 14
mbar
12
10
8
6
4
2
0
mbar·l/s
operation not possible
water cooling required, see Fig. 12,
max. ambient temperature:
45 °C (113 °F)
air cooling required,
max. ambient temperature
25 °C (77 °F)
air cooling required,
max. ambient temperature
45 °C (113 °F)
convection cooling sufficient,
max. ambient temperature
25 °C (77 °F) Forevacuum pressure
Throughput of N2
Fig. 10 Cooling requirements for the TW 700

Connections
15
GA 05.147/3.02 - 06/2002
Fig. 11 Cooling air flow pattern
10 15 20 25 30 35 40
°C
100
80
60
40
20
0
l/h
Fig. 12 Cooling water requirement
Cooling water temperature
Cooling water flow

Connections
16 GA 05.147/3.02 - 06/2002
2.5 Connecting the purge
gas and venting valve
When having to decide which gases need or not need to
be pumped with purge gas we are available to provide
assistance.
Suited are all gases,
•which will not cause corrosion or pitting in aluminium
and steel and
•which in connection with process deposits in the
pump will not cause corrosion or sticking.
For venting and as the purge gas we recommend inert
gases like nitrogen or argon. The temperature of these
gases should be between 5 °C and 80 °C , max. relative
humidity should not exceed 10 ppm.
In individual cases and after consultation also dry, filte-
red, oil-free air or filtered ambient air may be used (filter
mesh < 1µm).
Change the filters after some time, at least annually.
When operating the TW 700 with purge gas, the pump
needs to be vented via the purge gas valve after having
shut down the pump (see Section 3.3).
Design and operation of the purge gas and venting
valve, Cat. No. 121 33
This combined purge gas and venting valve offers the
following advantages:
•At inlet pressures between 1.5 and 6.0 bar the purge
gas flow is maintained at a constant level.
•Motor and ball bearings are protected against dust
containing gases.
•Chemical reactions with the grease in the ball bea-
rings are avoided.
• The TW 700 is vented reliably.
Depicted schematically in Fig. 14 is the design of this
valve.
In the operating mode ”pumping with purge gas” the
purge gas enters via the pressure regulator into the
valve, flows through the opened purge gas valve and
enters into the pump via the choke. The venting valve is
closed.
In the operating mode ”venting” both the purge gas and
the venting valves are open. Thus the pump is mostly
vented via the choke’s bypass.
Purge gas and venting valve may be opened and closed
independently of each other. Both valves are of the nor-
mally closed type. In order to open a valve 24 V DC
needs to be applied.
Fig. 13 Purge gas and venting valve with connection kit (optional)
VCR nut 1/4“
(200 91 675)
Port connector
Tube - VCR
(200 91 674)
Male connector: Tube OD 1/4“ -
ISO male pipe size: 1/4“
(200 91 672)
Purge gas and venting valve mounted to the pump

Connections
17
GA 05.147/3.02 - 06/2002
Technical data for the purge gas and vent valve
Purge gas valve normally closed
Venting valve normally closed
Purge gas pressure, absolute 1.5 to 6.0 bar
Purge gas Nitrogen, argon or the like
Max. moisture content 10 ppm
Purge gas flow 36 sccm ± 5 sccm
(36 sccm = 0.6 mbar·l/s)
Leak rate < 10-7 mbar·l/s
Power supply 24 V DC
Max. power drawn 8 W
24 V connector plug Angle connector
DIN 43650-A; 2-pole;
Transparent housing with LED
Safety class IP 65
Max. purge gas temperature 80 °C
Weight 0.5 kg
Installation orientation any
Connection
Inlet 1/4” nipple
Outlet DN 16 KF small flange
24 V
Vent valve: shown closed; opens a bypass around the choke when the pump is to be vented
Choke (capillary)
Purge gas valve: shown open
Sintered metal filter
Pressure regulator
Purge gas, e.g. N
2
, Ar or dry air
Fig. 14 Purge gas and venting valve assembly (schematic)
LEDs light when
the valve is open
Connection to the turbomolecular pump

Connect the power supply or the TURBO.CONTROL
700 to the mains.
Caution The interface connectors have UNC 4-40
threads. Do not use connectors with M3
treads.
The pump may be operated only with suita-
ble connector cables. Route all cables so as
to protect them from damage.
Do not expose the pump, the frequency
converter or the connections to dripping
water.
Disconnect and connect the cable con-
nections only while the pump is turning
no longer (green status LED off) and
with the mains power switched off (yel-
low power LED off). Otherwise there is
the risk of damaging the frequency con-
verter.
If you want to operate the pump without interface control
we recommend the plug for the PLC connector with inte-
grated ON/OFF switch for the pump; order no. see Sec-
tion 1.3.
18 GA 05.147/3.02 - 06/2002
Connections
2.6 Electrical connection
Warning The pump must only be connected to power
supplies which meet the requirements for
functional extra-low voltages with positive
isolation in accordance with IEC 364 (VDE
0100, Part 410, or local regulations) (SELV).
The OEM power supply unit must only be
connected by a trained electrician in the
sense of the VDE (Association of German
Electrotechnical Engineers).
The power supply must meet the requirements given in
Section 1.4. Peak currents in the kHz range may be pre-
sent on the DC side. The power supply should have a
current limiter or control.
Connect the pump to the 59 V DC power supply or to the
TURBO.CONTROL 700.
Caution Ensure correct polarity; see Fig. 16 and 17.
Pin 1 + 59 VDC
Pin 2 0 V
Pin 3 GND
Awrong polarity may cause the internal
SMD fuse to blow. The fuse can only be
changed by the Leybold Service.
REMOTE (X1)
RS485
ERROR
POWER
STATUS
TURBO.DRIVE
* PLC = Programmable Logic Control
Fig. 15 View of the integrated frequency converter TURBO.DRIVE L
Interface connector
(RS 485 or RS 232)
PLC interface*
Optional
Switch for bus address
LEDs
Supply voltage connection 59 V DC
approx. 0.2 m long
red LED: Failure
yellow LED: Voltage applied
green LED
flashes: Run-up or Run-down
lights up: Normal operation
UNC 4-40 threads

Connections
19
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+ 59 V DC 88 - 265 V AC,
50/60 Hz
REMOTE (X1)
RS485
ERROR
POWER
STATUS
TURBO.DRIVE
1
2
3
0 V DC
NC Option
NC Option
NC Option
PG Power Good
SD Shut down (Inhibit)
–OP –O/P for –sense
–S –Sense
+S +Sense
+OP +O/P for +sense
–O/P GND
+O/P O/P-Voltage
Output
+59 V DC
Fig. 16 Connection of the power supply
Power supply
TW 700
DC connection cable

Connections
20 GA 05.147/3.02 - 06/2002
1
2
3
Pin 1 24 V
Pin 2 0 V
Pin 3 GND
Shielding
Fig. 17 Reqired pin assignment of the 3 pole connector
model Hirose HS21P-3; view from the soldered side
59 V
12 V
TURBO.DRIVE S
7
8
6
0 V = STOP
24 V = START
12 V
TURBO.DRIVE S
7
8
6
Fig. 18 Pin assignment of the REMOTE (X1) connector
Relay operation
876
54321
9
Pin assignment of the connector
12 V
10 kΩ5 V
10 kΩ
10 kΩ
TURBO.DRIVE S
7
8
6
Pin assignment for the Start/Stop input
Switching threshold
for the Start/Stop
control input:
Low level: < 3 V
High level: > 7 V
Start/Stop operation
Example 1: Operation via a PLC
Contact open = STOP
Contact closed = START
Example 2: Operation via contacts
TURBO.DRIVE S
5
3
4
n. c.
n. o.
com.
2
9
1
n. c.
n. o.
com.
Relay - Normal operation (standard setting)
• While deceleration, acceleration, Stop:
4 connected to 5 (as shown; passive)
• During normal operation (f > 0,9·fnom.):
4 connected to 3 (active)
Relay - Error
• No error: 1 connected to 2 (as shown; passive)
• Error is present: 1 connected to 9 (active)
TURBO.DRIVE L
TURBO.DRIVE L
TURBO.DRIVE L
TURBO.DRIVE L