LEYBOLD Turbovac TW 300 User manual

Vacuum Solutions Application Support Service LEYBOLD VACUUM
TURBOVAC
TW 300
TW 300 H
Wide-Range Turbomolecular
Pump with Integrated or External
Frequency Converter
Operating Instructions
GA05142_0902

GA05142_0902 - 12/2003
2
Contents
Page
Safety information . . . . . . . . . . . . . . . . . . . . . . . 3
1 Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
Use and media compatibility . . . . . . . . . . . . . . . 5
1.1 Design . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
1.2 Standard equipment. . . . . . . . . . . . . . . . . . . . . . 6
1.3 Ordering data . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
1.3.1 Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
1.3.2 Frequency converter and accessories
for the frequency converter . . . . . . . . . . . . . . . . 8
1.3.3 Accessories for the pump. . . . . . . . . . . . . . . . . 11
1.4 Technical data . . . . . . . . . . . . . . . . . . . . . . . . . 12
1.4.1 TURBOVAC . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
1.4.2 TURBO.DRIVE 300 . . . . . . . . . . . . . . . . . . . . . 14
1.4.3 Power supply SITOP 24 V / 10 A. . . . . . . . . . . 14
2 Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
2.1 Operating environment. . . . . . . . . . . . . . . . . . . 16
2.2 Attach the pump to the vacuum chamber . . . . 16
2.3 Forevacuum connection. . . . . . . . . . . . . . . . . . 19
2.4 Connect the cooling . . . . . . . . . . . . . . . . . . . . . 20
2.5 Connect the purge gas and venting valve . . . . 24
2.6 Electrical connection . . . . . . . . . . . . . . . . . . . . 26
2.6.1 Connecting pump and frequency converter. . . 26
2.6.2 Connecting the power supply. . . . . . . . . . . . . . 27
2.6.3 Mounting the frequency converter . . . . . . . . . . 28
2.6.4 Relay status . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
2.6.5 Installing the frequency converter (Optional) . . 32
2.7 Interface description. . . . . . . . . . . . . . . . . . . . . 33
2.7.1 RS 232/RS 422(485) interface (SERVICE X5) 34
2.7.2 RS 485 interface . . . . . . . . . . . . . . . . . . . . . . . 35
2.7.3 Parameter list. . . . . . . . . . . . . . . . . . . . . . . . . . 36
2.7.4 Warning codes for parameter 227 . . . . . . . . . . 39
2.7.5 Error codes for parameter P171. . . . . . . . . . . . 40
3 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42
3.1 Switching on. . . . . . . . . . . . . . . . . . . . . . . . . . . 42
3.2 Shutting down. . . . . . . . . . . . . . . . . . . . . . . . . . 43
Emergency shut down . . . . . . . . . . . . . . . . . . . 43
3.3 Venting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43
3.4 Bakeout . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44
3.5 Removing the pump from the system . . . . . . . 45
4 Maintenance. . . . . . . . . . . . . . . . . . . . . . . . . . . 46
4.1 Cleaning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 46
4.2 Service by LEYBOLD. . . . . . . . . . . . . . . . . . . . 46
5 Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . 47
6Spare parts. . . . . . . . . . . . . . . . . . . . . . . . . . . . 50
EEC Manufacturer’s Declaration . . . . . . . . . . . 51
EC Declaration by the Manufacturer . . . . . . . . 52
Index. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 54
Figures
The references to the diagrams, e.g. (2/10), consist of the figu-
re number and the item number, in that order.
Warning
Identifies working and operating procedures which must be
strictly observed to prevent hazards to persons.
Caution
Indicates working and operating procedures which must be
strictly observed to prevent damage to or destruction of the
appliance.
We reserve the right to alter the design or any data given in
these operating instructions.
The illustrations are approximations.

Safety Information
Electrical hazards
Warning Mains voltage may be present at the power
failure airing valve, the purge gas valve or
the venting valve.
The pump may be operated only with a sui-
table frequency converter and suitable
connector cables.
Route all cables so as to protect them from
damage.
Do not expose the pump, the frequency
converter or the connections to water.
The frequency converter must only be
connected to power supplies which meet
the requirements for functional extra low
voltage with positive isolation in accordance
with IEC 364 (VDE 0100, Part 410, or local
regulations) (SELV).
When the connector cable is attached, the
outputs at the frequency converter are not
free of voltage.
Thermal hazards
Warning During operation the pump can become so
hot that there is a danger of burns (up to
approx. 80 °C, 176 °F).
Provide protection against contact with the
hot components.
Hazards caused by materials and
substances
Warning The forevacuum line must be tight. Hazar-
dous gases can escape at leaks or the
gases being pumped can react with air or
humidity.
If the pump has previously handled hazar-
dous gases, implement the proper precau-
tionary measures before opening the intake
or exhaust connection.
If necessary, use gloves, a respirator and/or
protective clothing and work under an
exhaust hood.
3
GA05142_0902 - 12/2003
Safety information
Failure to observe the following precautions could
result in serious personal injury:
Warning The turbomolecular pump must only be
operated in the proper condition and under
the conditions described in the Operating
Instructions.
Mechanical hazards
Warning Never expose any parts of the body to the
vacuum.
The high-vacuum flange must be solidly
mounted to the vacuum chamber. If the
mounting is not sturdy enough, pump block-
age could cause the pump to break loose;
internal pump components could be thrown
in all directions. Never operate the pump (in
bench testing, for example) without proper
flanging to the vacuum chamber.
Under vacuum conditions the pump may
take up to one hour to run down, when ven-
ting to atmospheric pressure it may take up
to one minute. During the time the pump is
running down, the green LED at the fre-
quency converter will flash, indicating that
the rotor has not yet arrived at standstill.
When shutting down by switching off the
power supply voltage, there will be only
enough power for the LEDs down to a
speed of the pump of approximately 200
Hz. Thus the pump may still turn without a
LED being on. For this reason, when swit-
ching off without venting, wait for approxi-
mately 15 minutes after the LEDs have tur-
ned off until the pump has arrived at stand-
still.
After a mains power failure the pump can
run up automatically once more.

Safety Information
Failure to observe the following precautions could
result in damage to the pump:
Caution The pumps are not suitable for pumping
aggressive or corrosive media or those
which contain dust.
Install a micropore filter when pumping
media which contains dust.
Observe the information on media compati-
bility at the beginning of these operating
instructions.
Caution Never touch the rotor. Touching the rotor
may cause injury and damage the rotor
bearing.
Caution If foreign objects could pass from the vacu-
um chamber into the pump, install a wire
mesh splinter guard. Foreign objects which
enter the pump through the intake would
cause serious damage to the rotor. Dama-
ge resulting from foreign objects in the rotor
section are excluded from guarantee cover-
age.
Caution Ensure that the pump is sufficiently isolated
against resonances (vibrations) generated
by the forevacuum pump.
Caution Unplug any connectors only when the
mains voltage is switched off and the pump
does no longer turn (the green LED is off).
Separating the connections while the mains
power is still applied or while the pump is
still turning may destroy the TURBO.DRIVE
300.
Caution Ensure correct polarity when connecting
the frequency converter.
Caution Exposure of the pump to accelerating for-
ces must be avoided or reduced to such an
extent that the rotor unit will not be excited
by vibrations. In the case of critical applica-
tions you must consult our Applications
Dept. first.
Caution Avoid the influences of shock and vibration
when the pump is running.
Caution The rotor bearings must be changed after
1,500 starts or 10,000 operating hours.
Caution Pumps with integrated frequency converter
need to be shipped to the Leybold Service
with the frequency converter.
Caution The pump must only be opened by such
persons who have been authorised by Ley-
bold to do so.
4GA05142_0902 - 12/2003

GA05142_0902 - 12/2003
Description
1 Description
Use and media compatibility
The TURBOVAC TW 300 and TW 300 H are turbomole-
cular pumps with integrated or external frequency con-
verter. They are designed to evacuate vacuum cham-
bers down to pressure levels in the high vacuum range.
They are suitable for pumping air and clean gases. A
forevacuum pump is required for their operation.
The pumps have been manufactured according to the
state-of-the-art and approved safety regulations. Even
so in the case of improper installation or when impro-
perly used there can be risks or damage may be caused.
The TW 300 has been designed for high gas through-
puts, the TW 300 H for high gas compression in the case
of lighter gases.
These pumps are not suitable for
- pumping liquids or gases containing dust or particu-
lates
-pumping corrosive, explosive or reactive gasses
- operation without a forevacuum pump.
If reactive gases in low concentrations must be pumped
please consult with Leybold.
During operation the pressure inside the pump is so low
that there is no danger of ignition (at pressures below
about 100 mbar). A hazardous condition will be created
if flammable mixtures enter the hot pump at pressures
above 100 mbar. During operation the pump can reach
temperatures as high as 110°C (230 °F). Ignition sparks
could occur in case of damage to the pump and these
could ignite explosive mixtures.
All seals are prone to leaks. In case a seal fails, there is
the risk that hazardous gases may escape. Introduce
the appropriate safety measures depending on the
media being pumped in each case.
We would be glad to consult with you as regards the
media which can safely be handled with this unit.
5

Description
1.1 Design
The pumps comprise essentially the pump housing, a
multi-stage rotor with the stator group, and the drive. The
design of a TURBOVAC TW 300 is depicted in Fig. 1.
The rotor consists of a turbomolecular pump stage and a
Holweck stage. The Holweck pumping stage increases
the permissible forevacuum pressure level markedly
when compared with the classical turbomolecular pump.
The rotor shaft runs in two ceramic ball bearings, lubri-
cated with grease.
The pump is driven by a split-cage DC motor. In this
motor the rotor and stator windings are separated by a
vacuum-tight can. Consequently the rotor runs inside the
vacuum while the stator is outside the vacuum. This eli-
minates any need of vacuum feedthroughs.
Standard pumps rely on convection cooling, but require
depending on the load, like increased gas throughput,
high ambient temperatures, additional air or water coo-
ling.
The pump has DN 16 KF connectors for forevacuum,
and venting/purge gas.
The pump is driven by an electronic frequency converter
TURBO.DRIVE 300. All functions like, for example,
speed control, pump sensing or temperature monitoring
are monitored by the TURBO.DRIVE 300. This unit is
powered by an external power supply.
1.2 Standard equipment
The pumps are shipped sealed in a PE bag with a desic-
cant to absorb moisture.The maximum useful life of the
desiccant is one year.
The flanges for forevacuum, venting, and purge gas are
blank-flanged with centering ring with FPM sealing ring
and a clamping yoke.
The high-vacuum connection elements are not part of
the standard equipment.
Asuitable DC coupling for the power supply is included:
In the case of pumps with integrated frequency conver-
ter it is supplied with the pump; in the case of pumps with
a separate frequency converter it is supplied with the fre-
quency converter.
————————————-
PE = Polyethylene
FPM = Fluororubber, resistant to temperatures up to 150°C (302 °F)
6GA05142_0902 - 12/2003
Fig. 1 Section through a TURBOVAC TW 300
High-vacuum flange
Rotor
Stator
Bearing
Holweck stage
Motor
Bearing

1.3 Ordering data
1.3.1 Pumps
TURBOVAC TW 300
DN 100 ISO-K, no forced cooling,
without frequency converter, without splinter guard 800170V2101
DN 100 ISO-K, air cooling,
without frequency converter, without splinter guard 800011V0003
DN 100 ISO-K, air cooling, with TURBO.DRIVE 300
with RS 485, without splinter guard 800170V2105
DN 100 ISO-K, water cooling, with TURBO.DRIVE 300
with RS 232/422, with splinter guard 800170V2106
DN 100 CF, water cooling, with TURBO.DRIVE 300
with RS 232/422, without splinter guard 800170V2103
DN 160 ISO-K, water cooling, with TURBO.DRIVE 300
with RS 485, without splinter guard 800170V2108
TURBOVAC TW 300 H
DN 100 ISO-K, air cooling, with TURBO.DRIVE 300
with RS 485, without splinter guard 800170V2107
DN 100 CF, air cooling, with TURBO.DRIVE 300
with RS 485, without splinter guard 800170V2102
DN 100 CF, air cooling, with TURBO.DRIVE 300
with RS 232/422, without splinter guard 800170V2104
Description
7
GA05142_0902 - 12/2003

Description
8GA05142_0902 - 12/2003
1.3.2 Frequency converter and accessories for the frequency converter
Frequency converter
Frequency converter
Basic unit with RS 232/422 interface 800072V0001
with RS 485 interface 800072V0003
Connecting cable pump - frequency converter
1.0 m long 152 47
2.5 m long 864 49
3.0 m long 864 40
5.0 m long 864 50
SITOP 24 V / 10 A 152 50
• supplies the TURBO.DRIVE 300 with 24 V DC
24 V DC cable
(TURBO.DRIVE 300 – OEM power supply)
3 m 200 12 732
5 m 200 12 733
10 m 200 12 734
20 m 200 12 735
Mains cable for power supply, 2 m long
with EURO plug / conductor ferrules 800102V0001
with US plug 5-15P / conductor ferrules 800102V1001
OEM power supply (with screw terminals)
TURBO.POWER 300 800100V0002
• supplies the TURBO.DRIVE 300 with 24 V DC
• plug & play cables
• desktop unit or rack mountable
24V DC Power cable
(TURBO.DRIVE 300 – TURBO.POWER 300)
1 m 800094V0100
3 m 800094V0300
5 m 800094V0500
10 m 800094V1000
20 m 800094V2000
Mains cable for TURBO.POWER 300, 3 m long
with EURO plug / IEC mains plug 800102V0002
with US plug 6-15P / IEC mains plug 800102V1002
Power supply unit - plug and play
TURBO.POWER 300
T5A~250V
T5A~250V
100-240VAC

Description
9
GA05142_0902 - 12/2003
Plug for connector REMOTE with integrated
ON/OFF switch for the pump
(Sub-D plug, 9 way) 152 48
Heat sink for frequency converter 800110V0001
Top hat rail adaptor (mounting aid for
TURBO.DRIVE 300 and TURBO.POWER 300) 800110V0003
on
off
Mechanical accessories
TURBO.CONTROL 300 800100V0001
• supplies the TURBO.DRIVE 300 with 24 V DC
• plug & play cables
• desktop unit or rack mountable
• with power switch
• with start/stop switch for the turbomolecular pump
• remote control
• status LEDs and status relays
24V DC Control cable
(TURBO.DRIVE 300 – TURBO.CONTROL 300)
1 m 800091V0100
3 m 800091V0300
5 m 800091V0500
10 m 800091V1000
20 m 800091V2000
Mains cable for TURBO.CONTROL 300,
3 m long
with EURO plug / IEC mains plug 800102V0002
with US plug 6-15P / IEC mains plug 800102V1002
START
NORMAL
POWER
ERROR
START
STOP
TURBO.CONTROL 300
1
0
Power supply and control unit
Heat sink 200 11 628
Adaptor cable 200 12 703
4 screws M4x12 201 03 204
2 screws M4x25 201 03 209
(see Section 2.6)
Mounting the frequency converter to the pump

Description
10 GA05142_0902 - 12/2003
Display PDA* (display unit for
parameters, requires the software
"Turbo.Drive Panel”) upon request
data cable and adaptor
Required "Turbo.Drive Panel" software
for the display PDA with operating system OS
4.0 to 4.x, 3.5" floppy 800110V0104
PC software "Turbo.Drive Server" for Windows 95
and higher, CD-ROM*
• Soft panel
• Display, change, save and compare
parameter lists
• Integration of customer’s software
• Record parameter data 800110V0102
Adaptor RS232/RS485 for 220 V/Euro plug 800110V0101
GSD file for Profibus DP upon request
*Can be used in connection with the following
interfaces:
- For frequency converters with RS232 interface.
- For frequency converters with RS485 interface,
a RS232/RS485 adaptor is required.
Accessories for serial interfaces

Description
11
GA05142_0902 - 12/2003
1.3.3 Accessories for the pump
Splinter guard coarse, DN 100 ISO-K 800132V0101
Splinter guard fine, DN 100 ISO-K 800132V0102
Purge gas and venting valve 24 V DC 800120V0001
Venting valve 24 V DC 800120V0011
Power failure airing valve 24 V DC 800120V0021
Water cooling unit with G 1/8” connection
incl. 2 hose nipples G 1/8” outer Ø 10 mm
for water hose, 4 sealing rings, 2 blind plugs 800135V0002
(see Section 2.4)
Air cooling 800000249
(for fitting to pumps without forced cooling)
(see Section 2.4)
Flange heater DN 100 CF
(only for pumps with CF flange)
230 V 854 27
110 V 854 28
Centering ring (Al) with O-ring (FPM)
DN 100 ISO-K 268 42
DN 160 ISO-K 268 43
Clamps (Set of 4 pieces)
Galvanized steel, clamping range 19 to 27 mm 267 01
Galvanized steel clamping range 25 to 35 mm 267 02
Stainless steel, clamping range 19 to 27 mm 887 99
Copper gasket rings for CF flange (Set of 10 pieces) 839 45
Set of hex. screws with nuts, screws
and washers for CF flange 839 04

Description
12 GA05142_0902 - 12/2003
1.4 Technical data
1.4.1 TURBOVAC
TW 300 TW 300 TW 300 H TW 300 H
—————————————————————————————————————————————————————————
High-vacuum connection DN 100 ISO-K DN 100 CF DN 100 ISO-K DN 100 CF
DN 160 ISO-K
Pumping speed at 10-5/10-3 mbar
N2240/240 l·s-1 240/240 l·s-1 240/240 l·s-1 240/240 l·s-1
Ar 230/230 l·s-1 230/230 l·s-1 240/240 l·s-1 240/240 l·s-1
H2140/125 l·s-1 140/125 l·s-1 160/140 l·s-1 160/140 l·s-1
He 230/220 l·s-1 230/220 l·s-1 240/230 l·s-1 240/230 l·s-1
Ultimate pressure
with two-stage, oil-sealed
rotary vane pump < 2·10-8 mbar < 2·10-10 mbar < 1·10-8 mbar < 1·10-10 mbar
with ECODRY M 15 – < 8·10-10 mbar – < 2·10-10 mbar
with diaphragm pump – < 4·10-9 mbar – < 1·10-9 mbar
Max. permissible forevacuum pressure N2
water-cooled < 5 mbar
air-cooled <1 mbar
(Measurements in progress
for releasing higher pressures)
Weight (with/without
frequency converter), approx. 6.8 / 6.0 kg
Recommended forevacuum pumps
• TRIVAC D 2.5 E
• ECODRY M 15
• Diaphragm pump DIVAC 2.5 VT
• (at purge gas operation) TRIVAC D 8 B
Operating speed 60 000 rpm
Run-up time ca. 4 min
Forevacuum connection DN 16 KF
Venting connection DN 16 KF
Type of protection IP 20
Noise level < 49 dB(A)
Ambient temperature
during operation, water-cooled pump + 15 - + 35 °C
during operation, air-cooled pump + 15 - + 30 °C
storage – 15 - + 70°C
Max. rel. air humidity 95% (non-condensing)
Purge gas flow 12 sccm / 0.2 mbar·l·s-1
Purge gas Nitrogen, Argon or similar
Option pump with water cooling
Cooling water connections G 1/8“
(Adapter on request)
Cooling water data see Section 2.4

Description
13
GA05142_0902 - 12/2003
154 62
12,5
32
1334,6
PURGE
VENT
LEYBOLD VAKUUMGMBH BONNER STR.498
MADE IN GERMANY 50968 K@RLN
186 154
77
h1
h
50
55
Ø a1
DN
TYP X
Ser.Nr. XXXXXXXXXXX
XXX XX XXX Hz
Ø a2
Ø a1
DN
h
TW 300 a1a2h h1
DN 100 ISO-K 130 171 217 243
DN 160 ISO-K 180 202 221 247,5
DN 100 CF 151,5 – 219,4 –
WARNING
Hot Surface
TW 300 H a1a2h h1
DN 100 ISO-K 130 171 225 251
DN 100 CF 151,5 – 227,4 –
Fig. 2 Dimensional drawing for the TW 300 / TW 300 H with mounted frequency converter; dimensions in mm
90°
45°
75°
69°
18°
62
70,4
Ø 146,5
Ø 144,8
Boreholes for the
frequency converter
Boreholes for
air cooler
Fig. 3 Bottom side of the TW 300 / TW 300 H; dimensions in mm
ISO-K CF

Description
14 GA05142_0902 - 12/2003
1.4.2 TURBO.DRIVE 300
Supply voltage 24 V (21 ... 29 V)
Residual ripple < 3 %
Output
Voltage 0 - 24 V 3~
Power 160 W
Frequency 0 - 1500 Hz
Nominal voltage 24 V
Max. power consumption 190 W
Max. peak current, input side 8 A DC
Required power output from the power supply ≥200 W
Max. length of the DC cable (shielded)
at 3 x 1.5 mm25 m
at 3 x 2.5 mm220 m
Relay output rating 42 V, 0.5 A
Ambient temperature
during operation 5 - 45 °C
storage - 15 - + 70 °C
Relative air humidity 5 to 85 %
non condensing
Overvoltage category II
Contamination grade 2
Temp. of the cooling surface 5 - 55 °C
Only Part No. 800072V0004 5 - 50 °C
Power consumption ≤20 W
Type of protection IP 20
Weight, approx. 0.7 kg
1.4.3 Power supply SITOP 24 V / 10 A
AC input voltage 120/230 V, 50/60 Hz
Tolerance 93 - 132 V
187 - 264 V
Recommended circuit breaker
(characteristic C) 16 A
Power consumption 270 W
DC output voltage 24 V ± 1%
DC output current 0 - 10 A
Weight, approx. 1 kg
Mounting DIN rail
Screw-type terminals 0.5 - 2.5 mm2
22 - 12 AWG
Ambient temperature
during operation 0 - 60 °C
storage -25 - + 85 °C
Cooling air convection
Type of protection IP 20
Safety to EN60950 SELV
RI suppression to EN 55022 limit curve B
Noise immunity to EN 50082-2 incl. Table A4
UL508 FILE E143289

Description
15
GA05142_0902 - 12/2003
33
73,2 100
18,1 63,8
DRIVE (X3) 24 V
(X4)
REMOTE (X1)
ERR
PWR
STS
TURBO.DRIVE 300
HEAT SINK
HEAT SINK
SERVICE (X5)
16,85
40,7 79,7
100
50
HEAT SINK
HEAT SINK
22,2 29,3
Fig. 4 Dimensional drawing for the frequency converter and the OEM power supply unit, dimensions in mm

Connections
16 GA05142_0902 - 12/2003
2 Connections
Caution The pumps are not suitable for pumping
aggressive or corrosive media or those
which contain dust.
Install a micropore filter when pumping
media which contains dust.
Observe the information on media compati-
bility at the beginning of these operating
instructions.
Do not open the packaging until immediately before
installation.
Do not remove the covers and blind flanges on the pump
until just before attachment to the equipment to ensure
that assembly is carried out under the cleanest possible
conditions.
Caution Never touch the rotor. Touching the rotor
may cause injury and damage the rotor
bearing.
Warning During operation the pump can become so
hot that there is a danger of burns (up to
approx. 80 °C, 176 °F).
Provide protection against contact with the
hot components.
2.1 Operating environment
Do not expose the pump or the frequency converter to
dripping or spraying water
The pump must not be installed within a magnetic field.
The maximum heat load from the system via the high-
vacuum flange is 15 W.
Places of installation up to 1000 m above sea level
(3300 ft) are possible without restrictions. At altitudes
over 1000 m heat dissipation by the ambient air is im-
paired. Please consult us.
The frequency converter must not be operated in explo-
sive gas atmospheres.
2.2 Attach the pump to the
vacuum chamber
Warning The high-vacuum flange must be solidly
mounted to the vacuum chamber. If the
mounting is not sturdy enough, pump block-
age could cause the pump to break loose;
internal pump components could be thrown
in all directions. Never operate the pump (in
bench testing, for example) without proper
flanging to the vacuum chamber.
If the pump should suddenly seize, an ensuing deceler-
ation torque of momentary up to 200 Nm will have to be
absorbed by the system. To accomplish this, a minimum
of 4 clamping bolts are required for securing an ISO-K
type high-vacuum flange.
The clamping bolts must be torqued down to 20 Nm (15
ft-lb).
In most applications the pump is flanged to the high-
vacuum flange at the apparatus. No support is required.
Attach the pump horizontally or vertically. Other moun-
ting orientations are not allowed.
If several pumps are to be mounted to a system, you
must consult our Applications Dept. in order to prevent
that the pumps will be excited by vibrations by each
other.

Connections
17
GA05142_0902 - 12/2003
PURGE
VENT
REMOTE (X1)
ERR
PWR
STS
TURBO.DRIVE 300
HEAT SINK
HEAT SINK
SERVICE (X5)
High-vacuum flange
Fig. 5 Connection elements
Forevacuum
connection
Splinter guard (accessory)
Purge gas and venting
connection

Connections
18 GA05142_0902 - 12/2003
Design with ISO-K clamp flange
Lay the O-ring on the centering ring.
The O-ring must be positioned so as to be smooth and
flat; it must not be twisted. Then position the outer ring.
Acollar flange with circlip and the appropriate gasket
may be used to connect the pump.
Acollar flange is required when using ultra-vacuum sea-
ling gaskets.
The order numbers for the flange components are given
in the Leybold Catalog.
Caution If foreign objects could pass from the vacu-
um chamber into the pump, install a wire
mesh splinter guard. Foreign objects which
enter the pump through the intake would
cause serious damage to the rotor. Dama-
ge resulting from foreign objects in the rotor
section are excluded from guarantee cover-
age.
Insert the splinter guard so that the surface curvature is
at the top and apply some pressure lightly at the rim so
that the splinter guard engages. The splinter guard must
not touch the rotor.
If dust could pass from the vacuum chamber into the
pump, then a micropore filter must be installed between
the vacuum chamber and the pump.
The pump is precision balanced and is generally opera-
ted without a resonance damper. To decouple extremely
sensitive equipment and to prevent transfer of external
vibrations to the pump a special resonance damper is
available for mounting at the high-vacuum flange.
Detach the shipping flange from the high-vacuum flange
and remove the desiccant. Pay attention to scrupulous
cleanliness when making the connection.
Fig. 7 Using type ISO-K flanges
Centering ring
O-ring (FPM)
ISO-K flange
Outer centering
ring
Clamp
Correct
Wrong
Fig. 6 Installing the splinter guard
Press here

Connections
19
GA05142_0902 - 12/2003
Centering ring with O-ring
KF flange from the forevacuum line
Clamping yoke
Screws
Fig. 8 Connecting the forevacuum line
2.3 Forevacuum connection
As forevacuum pump we recommend using the dry com-
pressing ECODRY M15 piston pump, a diaphragm
pump or a TRIVAC two-stage rotary vane vacuum pump.
Connect the clean forevacuum line; see Fig. 8. The
connecting flanges must be clean an undamaged. The
cross section of this line must be so wide that safe ope-
ration of the pump can be ensured.
Remove the three screws and the clamping yoke.
Remove the shipping flange.
Slide the KF flange from the forevacuum line onto the
centering ring, slide the clamping yoke over the flange,
insert and tighten the three screws.
Warning The forevacuum line must be tight. Hazar-
dous gases can escape at leaks or the
gases being pumped can react with air or
humidity.
Figure 14 is a schematic diagram of a pump system
incorporating a turbomolecular pump and a TRIVAC
forevacuum pump with an anti-suckback valve.
Aseparate safety valve is provided for oil-sealed foreva-
cuum pumps without an anti-suckback valve. The safety
valve prevents oil flowing back from the forevacuum
pump into the turbomolecular pump when the system is
not running.
To ensure that the forevacuum space at the turbomole-
cular pump is kept largely free of oil vapors during ope-
ration, as well, we recommend installing an adsorption
trap in the forevacuum line. An adsorption trap is not
required when using a dry compressing forevacuum
pump like the ECODRY, for example.
Provide a roughing line to achieve the shortest cycle
times.
Caution Ensure that the pump is sufficiently isolated
against resonances (vibrations) generated
by the forevacuum pump.

Connections
20 GA05142_0902 - 12/2003
2.4 Connect the cooling
Cooling of the TW 300 depends on the required pumping
power and the ambient temperature; see Fig. 9. When
the pump is insufficiently cooled it will shut down.
High gas throughputs, cyclic operation or high ambient
temperatures will necessitate air or water cooling.
Air or water cooling (Part Nos. see Section1.3.3) can be
mounted to the pump.
Mounting the air cooling (optional)
Warning Separate the unit from the mains power
supply.
See Fig. 9.
Pull out the plug cautiously and pull the connector, which
is fitted in or under the plug, a few centimeters out; use
tweezers if required.
Caution The pump must not be opened, no seals
must be broken.
Unscrew the 4 screws and separate the air cooler.
Connect the pump connector and the air cooler connec-
tor and push them into the pump.
Mount the air cooler to the pump. Take care that the
cable is in the relief of the air cooler.
Air cooling
The air cooling facility has two powerful fans capable of
passing a large quantity of air past the pumps’ casing,
see Fig. 11. When installing air cooled pumps within a
system ensure that sufficient quantities of fresh air are
freely available. The air cooling facility is powered via the
pump.