LEYBOLD DRYVAC DV 450-i User manual

Part Numbers
112045V50-1
112065V40-1 /45-1 /50-1
112120V40-1 /50-1
112500V40-1 /45-1 /50-1 /60-1
/61-1
DRYVAC
DV 450-i, DV 650-i, DV 1200-i,
DVR 5000-i, DVR 5000-f
Dry Compressing Vacuum Pumps
Operating Instructions 300304403_002_C0

Contents
2 300304403_002_C0 - 11/2016 - © Leybold
Page
0 Important Safety Information 5
Explanation of Warning Symbols 5
0.1 Mechanical Hazards 7
0.2 Electrical Hazards 9
0.3 Thermal Hazards 10
0.4 Hazards Caused by Materials and Substances 11
0.5 Ignition Risk 13
0.6 Noise Hazard 13
0.7 Dangers in connection with safety-related
measures and precautions 13
0.8 Danger of Pump Damage 14
1 Description 16
1.1 Design 16
1.2 Supplied Equipment 21
1.3 Technical Data 22
1.4 Ordering Information 25
1.4.1 Pumps 25
1.4.2 Accessories 25
2 Transport and Storage 26
3 Installation 28
3.1 Placement 28
3.2 Conforming Use 30
3.2.1 Non-conforming Use 30
3.2.2 Pumping 100% Argon 32
3.3 Connecting the Intake and Exhaust Lines 32
3.3.1 Connecting Bellows 32
3.3.2 Intake Lines 34
3.3.3 Exhaust Lines 34
3.4 Connecting Cooling Water 36
3.4.1 Water Quality 38
3.5 Connecting Purge Gas 39
3.5.1 Guidelines for Purge Gas Operation, Settings and Monitoring 42
3.6 Electrical Connection 44
3.7 Leak Search after Installation 46

Contents
3300304403_002_C0 - 11/2016 - © Leybold
Original installation and operating instructions.
4 Operation 47
4.1 Media Compatibility 47
4.2 Profibus Interface for i-Version 47
4.3 Start-up 55
4.3.1 The Display Icons 59
4.4 Operation 60
4.4.1 Display Menu Items 60
4.4.2 Password handling 61
4.4.3 Setting Pump Configurations 63
4.4.4 Warning and Shut-off Thresholds 65
4.4.5 Failure list 66
4.4.6 Logging 68
4.4.7 Settings 70
4.5 Shut-off and Venting 73
4.6 Removing from Service 74
5 Maintenance 75
5.1 Leybold Service 75
5.2 Maintenance Intervals 75
5.3 Exchanging the Lubricant 76
5.4 Cleaning the Filter Insert in the Cooling Water Pressure Reducer 78
5.5 Replacing the Filter Cartridge in the Purge Gas Pressure
Reducer 79
5.6 Fuse Replacement 80
6 Troubleshooting 81
6.1 Fault Messages of a Pump Stage 81
6.2 Alarm Messages of a Pump Stage 85
6.3 Alarm and Fault Messages DRYVAC 89
6.4 Pump Malfunctions 90
7 Wearing Parts 93
8 Waste Disposal 93
EC Declaration of Conformity 94
Certificates 95
Index 97

Safety Information
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Obligation to Provide Information
Before installing and commissioning the pump, carefully read these
Operating Instructions and follow the information so as to ensure optimum
and safe working right from the start.
The Leybold DRYVAC has been designed for safe and efficient operation
when used properly and in accordance with these Operating Instructions. It is
the responsibility of the user to carefully read and strictly observe all safety
precautions described in this section and throughout the Operating
Instructions. The pump must only be operated in the proper condition and
under the conditions described in the Operating Instructions. It must be oper-
ated and maintained by trained personnel only. Consult local, state, and
national agencies regarding specific requirements and regulations. Address
any further safety, operation and/or maintenance questions to our nearest
office.
DANGER indicates an imminently hazardous situation which, if not avoid-
ed, will result in death or serious injury.
WARNING indicates a potentially hazardous situation which, if not
avoided, could result in death or serious injury.
CAUTION indicates a potentially hazardous situation which, if not avoided,
could result in minor or moderate injury.
NOTICE is used to notify users of installation, operation, programming or
maintenance information that is important, but not hazard related.
We reserve the right to alter the design or any data given in these Operating
Instructions. The illustrations are not binding.
Retain the Operating Instructions for further use.
NOTICE
DANGER
WARNING
CAUTION
NOTICE

Safety Information
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0 Important Safety Information
Explanation of Warning Symbols
Toxic gases
Danger of explosion
Fire danger
Reactive or corrosive
media
Contaminated parts
The pump must be leaktight.
When the pump has been used to
pump hazardous gases before,
introduce appropriate safety pre-
cautions before opening it. Before
opening the pump, purge it for a
longer period of time with an inert
gas. If necessary, wear gloves,
breathing protection or protection
clothing. If necessary, wear suit-
able personal protection equip-
ment like gloves, breathing protec-
tion and protection clothing, for
example.
Hazardous Voltage
Disconnect power before opening
Contact causes electrical shock
High Leakage Current
Earth connection essential before connecting supply
Electrical Hazards
Danger of residual voltage for up to 5 min after disconnecting power
supply. Connect and disconnect the mains plug only in deenergized
condition
Hot Surface
Do not touch.
Allow this area to cool before servicing
Burn hazard
Hot Surface inside. Do not touch, wear protective equipment.

Safety Information
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Purge gas
Check compatibility with applications
Overpressure in the discharge line
Components can be thrown in all directions.
The pressure in the discharge line must not exceed atmospheric
pressure by 200 mbar max.
The discharge line must not be blocked or restricted.
Pumps with wheels
must only be placed and moved on levelled horizontal surfaces!
Vacuum
Avoid exposing any part of the human body to the vacuum.
Machinery starts automatically
Connect the pump so that it not will restart automatically after a mains
power failure, once the power returns.
Overhead load
Transport the pump only at the four crane eyes or secured
with a forklift.

Safety Information
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0.1 Mechanical Hazards
1 In order to avoid the destruction of systems and injury to operating
personnel we urgently recommend to observe the information and
installation information provided in these Operating Instructions.
2 Avoid exposing any part of the human body to the vacuum.
3 Do not operate the pump with an opened intake port. There exists the
risk of suffering injury.
4 The pump is intended for generating a vacuum only. If an overpres-
sure can occur in the pump and the system then they must be pro-
tected against such an overpressure by an overpressure safety valve,
for example.
5 The maximum permissible discharge pressure for the DRYVAC is 1.2
bar abs.
Always operate the pump with a connected exhaust line. The exhaust
line must be designed for the specific kind of application and shall be
connected to a central exhaust gas system.
Make sure that the gas flow at the discharge is not blocked or restrict-
ed in any way, even when the pumped out gases need to be collected
or contained.
No shutoff devices are required in the discharge line for pump opera-
tion. If shutoff devices are installed, open them before starting the
pump.
In the case of processes involving much condensate, we recommend
the installation of a condensate separator in the discharge line.
6 When using purge gas, protect the purge gas supply so that in the
event of a malfunction or power interruption no overpressure can
occur within the pump system.
7 We recommend to design the discharge line in consideration of a pos-
sible overpressure of 5 bar. In the event of a malfunction, such a pres-
sure can occur briefly.
8 For transporting the pump use only suitable transport means.
When selecting the lifting and transport means take note of the total
weight before transporting the pump.
As standard, the pump has been equipped with four crane eyes.
When transporting the pump with a forklift or similar, ensure that the
pump has been secured on the forks or on a suitable pallet.
The lifting eye of the screw pump must never be used to lift any pump
combinations (Roots pump + backing pump).
WARNING

Safety Information
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9 Select the location where the pump is installed so that all controls can
be easily accessed. Place the pump only on a floor which is level. It
can topple when it is tilted by more than 10° with respect to the verti-
cal axis.
Because of the fitted castors, the pump must only be placed on a level
floor capable of supporting the pump’s weight, as otherwise there
exists the risk of the pump rolling away. Moreover, the pump may only
be moved on a level floor! Moving the pump along sloping paths or
ramps is prohibited! The pump must only be transported with a forklift
or a crane! At the installation location, screw down the adjustable feet.
10 Before beginning with any maintenance and servicing work always
ensure that no gas can flow backwards through the pump since
then the rotors might turn against the normal direction of rotation. For
this reason vent the vacuum chamber to the discharge pressure level
or ensure through suitable valves that the vacuum chamber and the
lines are reliably separated from the pump. When connecting several
pump systems, pressure differences between inlet and discharge can
give rise to uncontrolled turning of the pump’s shafts.
11 During operation, the cooling water circuit must not be shut off. A
cooling water discharge which has been blocked can cause the for-
mation of gas bubbles and result in excessively high pressures.
12 Lay electric feed and cooling water lines so that there is no risk of trip-
ping over these.
13 When changing the oil remove any escaped oil as otherwise there is
the risk of slipping.
14 Before doing installation work on the pump system make sure that no
vacuum is present in the pump and that all media connections have
been depressurised.
15 Before disassembling any cooling water lines, leave the pump to cool
down, shut off the feed line.

Safety Information
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0.2 Electrical Hazards
1 The electrical connection must only be provided by a trained person.
Please observe the national regulations in the country of use like
EN50110-1 for Europe, for example.
2 Potentially lethal voltages are present at the mains connections. Before
beginning with any maintenance or service work on the pump, discon-
nect the pump from all power supplies (lockout/tagout). In addition,
there is the danger of residual voltage for up to 5 min after disconnec-
tion.
3 Install a device for a safe disconnection from the power supply.
4 Plug or unplug the Harting mains connector only when no voltage is
present.
5 High electric voltages! When touching parts at high electric voltages,
there is the risk of suffering severe injuries by an electric shock! Covers
marked with this symbol must only be opened by trained electricians
after having reliably deenergised (lockout/tagout) the equipment.
6 Note the information on the IP type of protection.
7 Always operate the pump with a properly connected protective earth
conductor and make sure that the motor casing is closed
8 Observe the manufacturer’s information and operating instructions for
the respective frequency converter.
9 The pump must only be operated at the frequency specified for the
motor. Use only the Leybold frequency converter.
10 Install a suitable motor protection for the electric motor before starting
up for the first time. Note the information in these Operating
Instructions and on the nameplate.
11 Before starting, check to ensure that the junction box is undamaged,
run a visual inspection on the seals.
12 Install add-on parts (pressure switches, for example) without any
mechanical tensions and protect these against being damaged by
impacts, for example.
13 Lay the connecting lines so that these cannot be damaged. Protect
the lines against humidity and contact with water. Avoid thermally
stressing the lines by unfavourable laying. Comply with the required
standards when designing and laying the electrical connections.
14 Provide strain relief for the connecting lines so that the plugs and the
line connectors are not subjected to excessively high mechanical
stresses.
15 Lay electric feed lines so that there is no risk of tripping over these.
DANGER

Safety Information
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16 The pump must be integrated in the system control arrangement so
that it can not run-up automatically after it has been shut down due to
overtemperature. This applies equally to emergency shut-down
arrangements. After having determined the fault cause, the pump
should be switched on manually again.
17 Work on the frequency converter within the motor casing must always
be left to suitably instructed personnel only.
0.3 Thermal Hazards
1 Under certain ambient conditions parts of the pump may attain tem-
peratures over 80° C. There then exists the risk of suffering burns
when the covers are open. Note the danger symbols on the pump and
in the case of a hot pump wear the required protection equipment. All
work on a pump which is “still warm from operation” should be done
only whilst wearing protective gloves.
If there is the risk of touching hot surfaces inadvertently, install corre-
sponding protection. When working on a pump which is still warm
from operation, always wear protective gloves.
2 Handle the pump only while vented and after having let it cool down.
3 Before disassembling any cooling water lines, leave the pump to cool
down, shut off the feed line.
4 When uninstalling the cooling water lines, take note of splashing water.
Heated water can cause burns.
5 Never remove the oil-fill or oil-drain plugs while the pump is running.
There exists the risk of suffering burns. Always wear protective gloves
and protective goggles also for protection against the oil.
6 Operating the pump with less than the specified amount of cooling
water will result in excessively high surface temperatures. There exists
the risk of suffering burns.
CAUTION

Safety Information
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0.4 Hazards Caused by Materials and Substances
1 The vacuum and exhaust lines must both be leaktight. Hazardous
process gases may escape or the pumped gases can react with air
or atmospheric humidity. After installation of the pump and after servic-
ing work on the vacuum system, a leak search will always be neces-
sary.
When pumping hazardous gases we recommend a leak search on a
regular basis. Leaks in the pump cannot be ruled out under all cir-
cumstances. When pumping hazardous gases, the operator must
ensure that that leaks at the pump will not be a hazard.
2 Since not all application related hazards for vacuum systems can be
described in detail in these Operating Instructions, Leybold has avail-
able a separate document (Safety Booklet) in which the hazards and
general safety concepts for design, operation and maintenance of vac-
uum systems are explained.
When planning to pump hazardous substances with this pump, read
the related chapters in the Safety Booklet and in these Operating
Instructions first. You can download the Safety Booklet from our
homepage.
3 Before commissioning the pump, make sure that the media which are
to be pumped are compatible with each other so as to avoid hazar-
dous situations.
4 If required additional monitoring of the purge gas quantities is neces-
sary from the side of the operator when a well-defined and ensured
dilution is necessary from the side of the process.
The type of protection depends on the specific process and needs to
be assessed by of the customer.
5 The cooling water from the return is not of drinking water quality and
should not be used for this purpose.
After having operated the pump, the cooling water lines may suffer
from microbiological contamination. Take appropriate safety precau-
tions.
6 Before operating the pump with a gas ballast or a purge gas (option)
check the compatibility of the gas with the pumped media so as to
avoid dangerous conditions during operation.
7 When operating the pump with a purge gas valve, secure the purge
gas supply so that in the event of a malfunction no overpressure can
occur in the system.
DANGER

Safety Information
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8 When the pump has been used to pump hazardous gases before,
introduce appropriate safety precautions before opening the intake or
the discharge connections. Before opening the pump, purge it for a
longer period of time with an inert gas. If necessary, wear suitable per-
sonal protection equipment like gloves, breathing protection and pro-
tection clothing, for example (see Material Safety Data Sheets for the
substances in use, the chemical reactions and the by-products). Firmly
seal off the pump. When shipping the decontaminated pump for ser-
vicing please also indicate the type of hazard. For this see Section 5.1
Service at Leybold.
9 Leybold is not in a position to perform servicing (repairs) and waste
disposal of radioactively contaminated pumps. Both needs to be
ensured from the side of the user.
10 When disposing of the pump, used lubricants and used oil filters
observe the applicable environment regulations.
11 When pumping hazardous gases you must assume the presence of
hazardous residues in the pump.
12 If the pump has been contaminated by the process or through envi-
ronmental influences, it must be decontaminated professionally.
Contaminated parts can be detrimental to health and the environment.
Before beginning with any repair and maintenance work inform yourself
about any possible contamination. When handling contaminated parts
observe the pertinent regulations and comply with the necessary pro-
tection measures.
When shipping contaminated pumps which require approval by the
authorities, note the applicable regulations regarding packaging and
shipping.
13 Some pumps use perfluoropolyether (PFPE) as lubricant.
When handling PFPE you should observe the following:
During thermal decomposition at temperatures over 290 °C toxic and
corrosive gases are released. When handling PFPE keep it way from
open fires. Do not smoke with PFPE on your fingers.
Touch the inner sections of the pumps only while wearing clean gloves,
and use clean tools;
do the necessary work in clean and dry rooms;
after having removed the pump from its packaging, start it up as
quickly as possible;
as cleaning agents solvents based on hydrofluorether compounds may
be used.
14 Fluoropolymers are used as sealants (FKM) and as lubricants (PFPE) in
the pumps. In case the pump suffers a severe mechanical failure, the
possibility of hazardous substances being released owing to their ther-
mal decomposition cannot be excluded. The hazards caused by such
decomposition are described in the Material Safety Data Sheets for the
materials, for example.

Safety Information
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0.5 Ignition Risk
1 The standard version of the pump is not suited for operation in explo-
sion hazard areas. Contact us before planning to use the pump under
such circumstances.
0.6 Noise Hazard
1 The noise level of the pump during ultimate pressure operation with
silencer or connected discharge line corresponds to the values stated
in the Technical Data. In other operating modes and with other equip-
ment, higher values must be expected. Make sure that suitable protec-
tion measures are taken to protect your hearing.
We recommend to wear hearing protectors (earmuffs), if local noise
levels exceed mandatory limits.
0.7 Dangers in connection with safety-related
measures and precautions
1 The pump is not equipped with an emergency shutdown facility.
2 The following applies to pumps being operated with a frequency con-
verter: after a mains power failure the pump will automatically start up
again once the power returns.
3 Take note of the warning information on the casing surface. If this
warning information was removed, covered or obstructed, then pro-
vide corresponding additional warning information.
DANGER
CAUTION
CAUTION

Safety Information
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0.8 Danger of Pump Damage
1 Select an installation site for the pump so that all controls are easily
accessible.
2 The pumps are supplied filled with lubricant (synthetic oil or PFPE). For
this reason they should, while being transported or shipped, not be
subjected to much tilting. Store the pumps only horizontally standing
on their feet.
3 Do not allow the ingestion of any objects (screws, welding beads,
nuts, washers, pieces of wire, etc.) through the intake port of the
pump.
If possible, use the intake screen which has been fitted as standard
and clean it regularly.
In case the pump is operated without intake screen the operator has
to make sure that no objects can enter the pump through the intake
port. Objects falling into the pump can cause severe damage at the
pump including leaks to atmosphere.
The intake screen does not replace a filter. Prevent the intake of parti-
cles from the side of the process by fitting suitable filters. Upstream fil-
ters protect the pump against damage to the pump chamber.
In a pumping section (combination of several pumps connected in
series) only a single intake screen is required. This screen needs to be
fitted to the inlet for the pump closest to the process chamber.
4 When pumping dust containing media, install a dust filter in the pro-
cess gas flow upstream with respect to the pump. Consult with us.
5 If low concentration corrosive or reactive gases are being pumped,
then operate the pump with purge gas.
Please consult us to determine which pump types are required for
specific processes and applications.
6 When connecting the pump, provide a suitable valve on the intake side
for the purpose of shutting off the intake line so as to prevent the
pump from turning backwards in the event of a power failure.
Otherwise the pump may suffer damage or oil may contaminate the
pump chamber.
7 Lines and other vacuum connections should be clean and free of oil.
Special attention must be paid here when oil-sealed pumps have been
used on the vacuum side. Check the conditions before initial commis-
sioning. In the case of deviations, the pump can suffer contamination
with oil residues.
8 The pressure within a pump which has been switched off will increase
to ambient pressure within a few seconds. In such a case the pump is
vented through the discharge. We recommend to fit a non return dis-
charge valve.
9 The discharge line should be laid so that it slopes down and away
from the pump so as to prevent condensed vapours from backstream-
ing into the pump.
NOTICE

Safety Information
15300304403_002_C0 - 11/2016 - © Leybold
10 In the case of wet processes we recommend the installation of liquid
separators, upstream and downstream of the pump so as to avoid
the influx of liquid into the pump.
11 During installation work on the intake and discharge lines do not sub-
ject flanges to any stresses. Check the rubber elements of the pump’s
feet as to any deformation.
12 Before pumping condensable vapours the pump should be at oper-
ating temperature. If a gas ballast is present, then it should be opened.
The pump will attain its operating temperature approximately 30 min-
utes after having started the pump. During this warm-up phase, the
pump should be left separated from the process by a valve in the
intake line, for example.
13 With the pump warm from operation do not clean it from the outside
with water. There is the risk of a rotor crash due to shock cooling.
14 If condensable vapours have been pumped, the pump should before
switching off be purged with an inert gas or air (depending on the spe-
cific application). This process should also be run before cleaning the
pump chamber.
15 Improper decommissioning of the pump may damage it. For this rea-
son, follow the instructions given in Sections 4.5 and 4.6 of these
Operating Instructions.
16 Improper maintenance or repair work can have an influence on the
service life and the performance of the pump and will void any warran-
ty claims.
17 Maximum cooling water pressure: 7 bar. When exceeded, there is
the risk of leaks.
Pressures given in bar or mbar are absolute values. If exceptionally a gauge
pressure is meant, a “g” is added (bar(g)).

Description
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1 Description
1.1 Design
The DRYVAC is a dry compressing vacuum pump. The DRYVAC DV 450 and
650 each have one screw pump stage, the DRYVAC DV 1200 two screw
pump stages, the DRYVAC DVR 5000 a Roots and a screw pump stage.
Except for the sealing materials the DVR 5000 C-fpumps are identical to the
DVR 5000 C-ipumps.
We offer different pump models for different applications.
DRYVAC S versions have optimized pumping speeds at pressures >100
mbar. Therefore, they provide fast pump down times. These models are spe-
cially suited for short cycle operation, e.g. load lock applications.
Models from the DRYVAC C range have been designed to provide reliability
in harsh process duties. They are optimized for handling typical gases from
the production in the PV and FPD industry. They excel through their robust
design and meet industrial safety requirements. They are equipped with a
purge gas system that makes possible rotor purge and shaft seal purge.
All described DRYVACs are equipped with
■on-board frequency converter
■PLC with touchscreen
■Profibus interface
■Check valve
■housing, castors and adjustable feet
They are water-cooled and lubricated either with synthetic oil or PFPE.
Fig. 1.1 Pump models
DRYVAC DVR 5000-i/S-i/C-i/C-f
DRYVAC DV 450-i / 650-i/S-i/C-i DRYVAC DV 1200-i/S-i

Description
17300304403_002_C0 - 11/2016 - © Leybold
Fig. 1.2 DRYVAC DVR 5000 C-i without side covers
Inlet
1st pump stage: Roots
2nd pump stage: screw
Purge gas pressure setting and
condensate vessel
Cooling water pressure relief valve
Exhaust
Optional intake flange (blank flanged)
Purge gas module
Touchscreen

Description
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Fig. 1.3 Pumping speed curves
0
100
200
300
400
500
0,001 0,01 0,1 110 100 1000
0
4
8
12
16
20
DRYVAC DV 450-i
mbar
Einlassdruck
m3/h
Saugvermögen
kW
Leistungsaufnahme
Torr
0,1 110 100 750
0,001 0,01
0
100
200
300
cfm
Saugvermögen
Leistungsaufnahme
0
100
200
300
400
500
600
700
0,001 0,01 0,1 110 100 1000
0
4
8
12
16
20
24
28
0
100
200
300
400
500
600
700
0,001 0,01 0,1 110 100 1000
0
4
8
12
16
20
24
28
DRYVAC DV 650 C-i
DRYVAC DV 650 S-i
mbar
Einlassdruck
m3/h
Saugvermögen
kW
Leistungsaufnahme
Saugvermögen
Leistungsaufnahme
mbarEinlassdruck
m3/h
Saugvermögen
kW
Leistungsaufnahme
Saugvermögen
Leistungsaufnahme
Torr
0,1 110 100 750
0,001 0,01
0
100
200
300
400
cfm
Torr
0,1 110 100 750
0,001 0,01
0
100
200
300
400
cfm
Pumping speed
Power consumption
Pumping speed
Power consumption
Pumping speed
Power consumption
Inlet pressure
Inlet pressure
Inlet pressure
Power consumption Power consumption Power consumption
Pumping speed
Pumping speed
Pumping speed

Description
19300304403_002_C0 - 11/2016 - © Leybold
Fig. 1.4 Pumping speed curves
0
200
400
600
800
1000
1200
1400
0,0001 0,001 0,01 0,1 110 100 1000
0
5
10
15
20
25
30
35
40
Seff ohne Gasballast
Leistungsaufnahme ohne Gasballast
m3/h
Saugvermögen
kW
Leistungsaufnahme
mbar
Einlassdruck
DRYVAC DV 1200 S-i
DRYVAC DV 1200-i/S-i
Pumping speed
Inlet pressure
Power consumption
Seff without gas ballast
Power consumption without gas ballast
Fig. 1.5 Pumping speed curves
0
500
1000
1500
2000
2500
3000
3500
4000
5000
0,0001 0,001 0,01 0,1 110 100 1000
0
5
10
15
20
25
Saugvermögen, WH2500 @ 100 Hz Saugvermögen, WH2500 @ 50 Hz
Leistungsaufnahme, WH2500 @ 100 Hz Leistungsaufnahme, WH2500 @ 50Hz
Einlassdruck
m3/h
Saugvermögen
kW
Leistungsaufnahme
DRYVAC DVR 5000 S-i/C-i/C-f, WH 2500 @ 50 Hz / 100 Hz
S-i
C-i/C-
f
Pumping speed
Pumping speed, WH 2500 @ 100 Hz
Power consumption, WH 2500 @ 100 Hz
Pumping speed, WH 2500 @ 50 Hz
Power consumption, WH 2500 @ 50 Hz
Power consumption
Inlet pressure

Description
20 300304403_002_C0 - 11/2016 - © Leybold
Fig. 1.6 Dimensional drawings, dimensions in mm
DRYVAC DV 450-i / 650-i/S-i/C-i
DRYVAC DV 1200-i/S-i
Fig. 1.7 Dimensional drawing, dimensions in mm